JP2014187170A - Cooler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cooler capable of uniformly cooling a cooling object.SOLUTION: A cooler 2 comprises: a base plate 3 having a front face 3a on which a cooling object is mounted; a plurality of fins 4 mounted on a rear face 3b of the base plate 3; a coolant supply passage 12 extending along the base plate 3; a coolant discharge passage 14 which communicates to a space between the plurality of fins 4 and is provided between the coolant supply passage 12 and the base plate 3; a coolant nozzle 6 which blows coolant at the rear face 3b of the base plate 3; a supply passage dividing member 21 which extends along a coolant flow direction in the coolant supply passage 12 and divides the coolant supply passage 12 into a plurality of divided supply passages; a first coolant supply port 81 which supplies the coolant from one side to the coolant supply passage 12; and a second coolant supply port 82 which supplies the coolant from the other side.

Description

  The present invention relates to a cooler. In particular, the present invention relates to a collision jet type cooler in which an object to be cooled such as a semiconductor chip is attached to one surface of a base plate, and a coolant collides with the other surface of the base plate.

  For cooling semiconductor chips and electronic components, there is known a type of cooler in which an object to be cooled such as a semiconductor chip is attached to one surface and a coolant is jetted toward the other surface opposite to the one surface. . Such a type of cooler is sometimes referred to as a collision jet type cooler because the ejected refrigerant collides with the other surface of the base plate. In this specification, a part to which a cooling target such as a semiconductor chip is attached is referred to as a “base plate”. For convenience of explanation, the surface on which the object to be cooled (the above “one surface”) is referred to as the front surface of the base plate, and the opposite surface (the above “other surface”) is referred to as the back surface.

  An example of a collision jet type cooler is described in Patent Document 1, for example. In the cooler described in Patent Document 1, one side wall of the housing corresponds to the base plate. A partition plate is provided that divides the space in the housing into a space facing the base plate and a space separated from the base plate so as to face the base plate. A refrigerant is supplied from the outside into a space separated from the base plate. That is, the space itself constitutes the refrigerant supply path. A port for supplying a refrigerant provided in the housing is referred to as a refrigerant supply port. A refrigerant nozzle that ejects refrigerant from the partition plate toward the back surface of the base plate is provided. The refrigerant nozzle has a long opening extending from a side near the refrigerant supply port to a side far from the refrigerant supply port. Alternatively, the cooler has a plurality of refrigerant nozzles scattered side by side from the side closer to the refrigerant supply port to the side farther from the side. Among the spaces partitioned by the partition plate, a space facing the base plate is provided with a refrigerant discharge port on the wall surface of the housing. The refrigerant discharge port is provided on the side wall of the housing facing the side wall provided with the refrigerant supply port. The refrigerant ejected from the refrigerant nozzle flows toward the refrigerant outlet after colliding with the back surface of the base plate. That is, the space between the partition plate and the base plate constitutes the refrigerant discharge path. In the cooler disclosed in Patent Document 1, a plurality of fins are provided on the back surface of the base plate.

  The refrigerant nozzle has a long opening in the refrigerant flow direction (or the cooler has a plurality of refrigerant nozzles scattered in the flow direction), and the refrigerant passes through the refrigerant nozzle from the refrigerant supply path to the refrigerant discharge path. Move to. Therefore, in the refrigerant supply path, the refrigerant flow rate decreases as it proceeds from upstream to downstream, while in the refrigerant discharge path, the refrigerant flow rate increases as it proceeds from upstream to downstream.

  On the other hand, in the cooler disclosed in Patent Document 1, the partition plate is parallel to the base plate, and the flow passage cross-sectional area of the refrigerant supply passage and the refrigerant discharge passage (the flow passage area in the cross section orthogonal to the refrigerant flow direction) is Constant in the refrigerant flow direction. When the flow rate decreases from the upstream to the downstream (increases in the refrigerant discharge path) but the flow path cross-sectional area is constant, the pressure of the refrigerant decreases in the downstream (increases in the refrigerant discharge path). If the pressure distribution is non-uniform in the flow direction of the refrigerant, the pressure (or flow velocity) of the refrigerant that collides with the base plate becomes non-uniform, and the cooling capacity for the cooling target attached to the base plate becomes non-uniform.

  As another example of the impinging jet type cooler, for example, Patent Document 2 discloses a technique for making the temperature distribution of the cooling target uniform. In the technique disclosed in Patent Document 2, a cooling member is formed by providing a partition member that partitions semiconductor elements arranged on a substrate to form an element cooling chamber, and a cooling medium supply port for supplying a cooling medium to the element. The temperature difference between each element is made small by inserting in a cooling chamber and cooling each element independently.

JP 2011-166113 A JP-A-5-3274

  However, also in the technique described in Patent Document 2, as in Patent Document 1, the pressure distribution in the flow direction of the refrigerant is reduced because the pressure of the refrigerant decreases downstream of the refrigerant supply path (increases in the refrigerant discharge path). It becomes uneven. Therefore, it is hard to say that the technology of Patent Document 2 also sufficiently equalizes the cooling capacity for the object to be cooled.

  The cooler disclosed in the present specification further improves the impinging jet type cooler exemplified in the cooler of Patent Document 1 or 2, and provides a cooler capable of uniformly cooling a cooling target.

  The technology disclosed in the present specification relates to a cooler that cools a cooling target attached to a base plate. The cooler includes a base plate on which a cooling target is attached to the front surface, and a plurality of fins that are attached to the back surface of the base plate and arranged in parallel with each other facing each other. Further, the cooler is provided on the back surface side of the base plate so as to be separated from the tips of the plurality of fins, and communicates with a refrigerant supply path extending along the base plate and a space between the plurality of fins. A refrigerant discharge path provided between the refrigerant supply path and the base plate, and a refrigerant nozzle provided in the refrigerant supply path and ejecting the refrigerant toward the back surface of the base plate are provided. Further, the cooler extends along the refrigerant flow direction in the refrigerant supply path, and includes a supply path partition member that divides the refrigerant supply path into a plurality of supply paths (divided supply paths), and a plurality of divided supply paths. A first refrigerant supply port for supplying refrigerant from one side is provided in at least one, and a second refrigerant supply port for supplying refrigerant from the other side is provided in at least one other divided supply path. Yes. The supply path partition member partitions the refrigerant supply path so that the plurality of divided supply paths are arranged in parallel with the base plate. A cooling nozzle is provided in each of the plurality of divided supply paths.

  According to such a configuration, since the refrigerant supply path is divided into a plurality of divided supply paths by the supply path partition member and the refrigerant is supplied from one side and the other side, the refrigerant is allowed to flow bidirectionally with respect to the refrigerant supply path. Can do. The refrigerant pressure decreases downstream of each divided supply path, but the upstream of another divided supply path where the refrigerant flows in the opposite direction is located adjacent to the downstream where the pressure decreases in one divided supply path. doing. Therefore, the pressure distribution of the refrigerant is made uniform along the extending direction in the entire refrigerant supply path. Thereby, the object to be cooled can be uniformly cooled.

  In the technology disclosed in this specification, a guide portion is provided on the back surface of the base plate. The guide portion has a curved surface that curves from the back surface of the base plate toward the refrigerant discharge path, and guides the refrigerant to the refrigerant discharge path by the curved surface.

  According to such a configuration, the refrigerant ejected from the nozzle toward the base plate is guided to the refrigerant discharge path while drawing a curve along the curved surface of the guide portion. Therefore, the refrigerant flows smoothly between adjacent fins. Thereby, the collision of the refrigerant | coolant with respect to the back surface of a baseplate can be relieve | moderated, or the disturbance of the flow of the refrigerant | coolant after colliding with a back surface can be suppressed, and the pressure loss of a refrigerant | coolant can be reduced.

The perspective view of the cooler concerning an embodiment is shown. A cross-sectional view of the cooler is shown. FIG. 2A shows a plan view of the casing excluding the top plate. FIG. 2B is a cross-sectional view taken along line BB in FIG. FIG. 2C is a cross-sectional view taken along the line CC in FIG. The enlarged view of the III part of FIG. 2 (B) is shown. The enlarged view of IV part of FIG.2 (C) is shown.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view of the cooler 2. However, in FIG. 1, a part of the parts is cut and drawn so that the internal structure of the cooler 2 can be understood. Hatching represents the cut surface. FIG. 2 is a three-side view of the cooler 2. FIG. 2A shows a plan view of the housing 7 excluding the top plate 7a. FIG. 2B shows a cross section (side cross-sectional view) along the line BB in FIG. FIG. 2C shows a cross-section (front cross-sectional view) along the line CC in FIG.

  The cooler 2 is a device that cools the objects to be cooled 92a, 92b, and 92c such as a semiconductor chip. The objects to be cooled 92a to 92c are attached to the front surface 3a of the base plate 3 via an insulating plate 91 that also serves as a heat spreader. The base plate 3 constitutes one side wall of the housing 7. Here, it should be noted that the “front surface” is a convenient expression for distinguishing two planes of the base plate 3. In the present specification, in the base plate 3, a surface facing the outside of the cooler 2 is referred to as a “front surface 3a”, and a surface facing the inside of the cooler 2 is referred to as a “back surface 3b”. The cooler 2 passes the refrigerant through the inside of the housing, in particular, the back side of the base plate 3 to cool the object to be cooled. The refrigerant is preferably water or antifreeze, but may be a gas such as air. In addition, although the cooler 2 of embodiment is arrange | positioned so that the pace plate 3 may face the downward direction in drawing, it can arrange | position the pace plate 3 toward the upper direction.

  A plurality of fins 4 are attached to the back surface 3 b of the base plate 3. The plurality of fins 4 are arranged in parallel with their planes facing each other. The direction of the plurality of fins 4 is a direction in which the plane is orthogonal to the refrigerant flow direction (described later).

  The casing 7 of the cooler 2 is substantially a rectangular parallelepiped, and the internal space excluding the fins 4 serves as a refrigerant flow path. Inside the housing 7, a partition plate 5 that divides the internal space into a space that faces the back surface 3 b of the base plate 3 and a space that is separated from the base plate 3 is provided. The partition plate 5 is disposed in parallel with the base plate 3. A refrigerant supply path 12 is formed between the side wall of the housing 7 on the side opposite to the base plate 3 and the partition plate 5. A refrigerant discharge path 14 is formed in the space between the base plate 3 and the partition plate 5. The refrigerant supply path 12 and the refrigerant discharge path 14 will be described in detail later.

  The cooler 2 includes a plurality of supply path partition members 21 arranged in the refrigerant supply path 12. Each supply path partition member 21 extends in the refrigerant supply path 12 along the refrigerant flow direction, and partitions the refrigerant supply path 12 into a plurality of parts. Each divided refrigerant supply path is referred to as a divided supply path. That is, the refrigerant supply path 12 is divided into a first divided supply path 121 and a second divided supply path 122, and the first divided supply path 121 and the second divided supply path 122 are alternately arranged. ing. Each supply path partition member 21 partitions the refrigerant supply path 12 so that the divided supply paths divided thereby are arranged in parallel with the base plate 3. In the example shown in FIG. 2A, the supply path partition member 21 extends in the left-right direction in the drawing, and both end portions in the longitudinal direction are in close contact with the inner surface of the side wall of the housing 7. Further, as shown in FIG. 2B, the supply path partition member 21 is in close contact with the back surface of the partition plate 5 and in close contact with the inner surface of the side wall of the housing 7 facing the partition plate 5. By arranging the supply path partition member 21 in this way, the refrigerant supply paths 12 (the first refrigerant supply path 121 and the second refrigerant supply path 122) partitioned into a plurality are configured so that the refrigerant does not flow into each other. Has been.

  A space farther from the base plate 3 than the partition plate 5 (that is, the coolant supply path 12) is provided with a first coolant supply port 81 and a second coolant supply port 82, and is closer to the base plate 3 than the partition plate 5. In the space (that is, the refrigerant discharge path 14), a refrigerant discharge port 9 is provided (see FIG. 2B). The first refrigerant supply port 81, the second refrigerant supply port 82, and the refrigerant discharge port 9 are provided on two opposite side walls of the housing 7. In addition, a first refrigerant supply port 81 and a second refrigerant supply port 82 are formed in each of the refrigerant supply passages 12 (the first divided supply passage 121 and the second divided supply passage 122) partitioned into a plurality of parts. Yes. The first refrigerant supply port 81 and the second refrigerant supply port 82 are formed so as to alternately face each other, the first refrigerant supply port 81 is formed with respect to the first divided supply path 121, Two refrigerant supply ports 82 are formed with respect to the second divided supply path 122. In the example shown in FIG. 2A, the first refrigerant supply port 81 corresponding to the central first divided supply path 121 is formed on the right side wall of the housing 7, and the second divided upper and lower sides. A refrigerant supply port 82 corresponding to the supply path 122 is formed on the left side wall of the housing 7. Thereby, the refrigerant can be supplied from one side (right side) to one of the plurality of divided supply paths (first divided supply path 121), and the other divided supply path (second divided supply path 122). ) Can be supplied with refrigerant from the other side (left side). Therefore, as shown by the thick arrows in FIGS. 1 and 2A, in one of the plurality of divided supply paths (first divided supply path 121), the refrigerant moves from the right side to the left side (from one side to the other side). And the remaining split supply path (second split supply path 122) flows from the left side to the right side (from the other side to the one side). In this way, the refrigerant flows in the opposite directions in the first divided supply path 121 and the second divided supply path 122 arranged alternately. Therefore, the downstream side (or upstream side) of the refrigerant in the first divided supply path 121 and the upstream side (or downstream side) of the refrigerant in the second divided supply path 122 are adjacent to each other.

  Moreover, as shown to FIG. 2 (B), the refrigerant | coolant discharge port 9 is provided in the side wall of the right side (one side) of a figure. Accordingly, at the refrigerant discharge port 9, the refrigerant flows from the left to the right in the drawing.

  A refrigerant nozzle 6 extends from the partition plate 5 toward the base plate 3. As well shown in FIG. 2A, the refrigerant nozzle 6 has a long opening (flow path) along the flow of the refrigerant. The refrigerant supplied from the refrigerant supply ports 81 and 82 passes through the refrigerant supply path 12, then passes through the refrigerant nozzle 6, and moves to the refrigerant discharge path 14. Finally, the refrigerant is discharged from the refrigerant outlet 9. Each refrigerant nozzle 6 communicates with each of a plurality of divided supply paths (a first divided supply path 121 and a second divided supply path 122).

  As well shown in FIG. 2C, the refrigerant discharge path 14 also corresponds to a U-shaped groove in cross section, and the U-shaped opening side faces the fin 4. That is, the refrigerant discharge path 14 communicates greatly with the space between the fins 4. The refrigerant nozzle 6 has a tip 6a that is in contact with the upper end 4a of the fin 4 (see FIG. 2C).

  The cooler 2 includes a plurality of guide portions 31 provided on the back surface of the base plate 3. 3 shows an enlarged view of a portion III in FIG. 2 (B), and FIG. 4 shows an enlarged view of a portion IV in FIG. 2 (C). As shown in FIGS. 3 and 4, the guide portion 31 is a configuration for smoothly flowing the refrigerant, is provided at a position facing the refrigerant discharge path 14, and is directed from the back surface of the base plate 3 toward the refrigerant discharge path 14. A curved surface 32 is provided. The curved surface 32 extends from the back surface of the base plate 3 along a direction perpendicular to the plane of the fin 4 and also extends along a direction parallel to the plane of the fin 4. Thus, the curved surface 32 is curved both in the sectional view of FIG. 2B and in the sectional view of FIG. Further, the curved surface 32 is smoothly and continuously connected to the plane of the fin 4. In the cross section of FIG. 2B (that is, the cross section along the flow direction of the refrigerant in the refrigerant supply path 12), as shown by the thick arrow in FIG. And flows along the curved surface 32 as it approaches the base plate 3, and flows parallel to the base plate 3 in the immediate vicinity of the base plate 3. Thereafter, the refrigerant curves along the curved surface 32 of the other surface of the opposing fin 4 and travels toward the refrigerant discharge path 14. As described above, in the cross section along the refrigerant flow direction in the refrigerant supply path 12, the refrigerant collides with the base plate 3 while drawing a curve along the curved surface 32 and moves away. Therefore, the collision of the refrigerant with the back surface of the base plate 3 is alleviated and the disturbance of the refrigerant flow is suppressed.

  As shown in FIG. 4, the guide portion 31 includes a tip portion 33 formed so as to protrude toward the refrigerant discharge path 14. In the cross section of FIG. 2C (that is, the cross section orthogonal to the refrigerant flow direction in the refrigerant supply path 12), as shown by the thick arrows in FIG. After the refrigerant has collided with the back surface of the base plate 3, the refrigerant flows along the curved surface 32 of the guide portion 31 and is guided from the tip portion 33 to the refrigerant discharge path 14. Therefore, the disturbance of the refrigerant flow after colliding with the base plate 3 is suppressed.

  With reference to FIG. 1, FIG. 2 (B), the flow of the refrigerant | coolant through the whole cooler 2 is demonstrated. The thick line with the arrow of FIG. 1, FIG. 2 (B) has shown the flow of the refrigerant | coolant. The symbol “Fin” in FIG. 2B represents that the refrigerant flows into the cooler 2, and the symbol “Fout” represents that the refrigerant flows out of the cooler 2. The refrigerant supplied from the first refrigerant supply port 81 flows through the refrigerant supply path 12 from the right side to the left side. Further, the refrigerant supplied from the second refrigerant supply port 82 flows from the left side to the right side through the refrigerant supply path 12. The supplied refrigerant changes the flow direction toward the base plate 3 through the long opening of the refrigerant nozzle 6 while flowing through the refrigerant supply path 12. Then, the refrigerant is ejected vigorously from the refrigerant nozzle 6 toward the back surface 3 b of the base plate 3. The refrigerant ejected toward the back surface 3 b of the base plate 3 passes between the fins 4, is guided by the curved surface 32 of the guide portion 31, and flows from the front end portion 33 toward the refrigerant discharge path 14. In the refrigerant discharge path 14, the refrigerant flows toward the refrigerant outlet 9. Finally, the refrigerant is discharged from the refrigerant discharge port 9. A refrigerant pipe (not shown) is connected to each of the refrigerant supply ports 81 and 82 and the refrigerant discharge port 9, and a tank and a pump (not shown) are connected to the tip of the refrigerant pipe. The refrigerant is sent to the cooler 2 by the tank, the pump, and the refrigerant pipe, and is recovered from the cooler 2.

  The advantages of the cooler 2 will be described. Since the cooler 2 is provided with the long refrigerant nozzle 6 along the refrigerant supply path 12, the amount of refrigerant moving to the refrigerant discharge path 14 increases as it goes downstream of the refrigerant supply path 12. Therefore, the refrigerant pressure decreases in the refrigerant supply path 12 as it goes downstream. On the other hand, the cooler 2 partitions the refrigerant supply path 12 into a plurality of divided supply paths by the supply path partition member 21 and supplies the refrigerant from the opposite directions to the first divided supply path 121 and the second divided supply path 122, respectively. Therefore, the refrigerant can flow in both directions with respect to the refrigerant supply path 12. Thereby, in each divided supply path, the pressure decreases on the downstream side of the refrigerant. However, the second divided supply path 122 is adjacent to the downstream side of the first divided supply path 121, while the second divided supply path. Since the upstream of the 1st division | segmentation supply path 121 adjoins the downstream of the path | route 122, even if the downstream cooling capacity is low, a cooling capacity can be supplemented with the refrigerant | coolant which flows upstream adjacently. Thereby, the object to be cooled can be uniformly cooled. Further, since the refrigerant is guided to the refrigerant discharge path 14 by the curved surface 32 of the guide portion 31, the refrigerant can flow smoothly between the adjacent fins 4. Thereby, the collision of the refrigerant | coolant with respect to the back surface 3b of the baseplate 3 can be relieved, and the pressure loss of a refrigerant | coolant can be reduced.

  As mentioned above, although one embodiment was described, a specific mode is not limited to the above-mentioned embodiment. For example, in the above-described embodiment, the first divided supply path 121 and the second divided supply path 122 are alternately arranged adjacent to each other, and flow from one to the other (from right to left) and from the other to the other ( Although the refrigerant flowing from the left to the right is alternately flowing adjacently, the first divided supply path 121 and the second divided supply path 122 are not necessarily arranged alternately. For example, the 1st division | segmentation supply path 121 and the 2nd division | segmentation supply path 122 may be the structure arrange | positioned every 2 rows mutually. Even with such a configuration, the cooling target can be uniformly cooled by including the first divided supply path 121 where the refrigerant flows to one side and the second divided supply path 122 where the refrigerant flows to the other side. As described above, the arrangement order is not particularly limited as long as the first divided supply path 121 and the second divided supply path 122 in which the refrigerant flows in opposite directions are provided.

  The cooler 2 of the above embodiment includes the refrigerant nozzle 6 having a long opening along the flow direction of the refrigerant supply path 12, but the technology disclosed in this specification is replaced with the long refrigerant nozzle 6. Also, the present invention can be applied to a collision jet type cooler having a plurality of refrigerant nozzles scattered in the flow direction.

  Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.

2: Cooler 3: Base plate 3a: Front surface 3b: Back surface 4: Fin 5: Partition plate 6: Refrigerant nozzle 7: Housing 7a: Top plate 9: Refrigerant discharge port 12: Refrigerant supply path 14: Refrigerant discharge path 21: Supply path partition member 31: Guide portion 32: Curved surface 33: Tip portion 81: First refrigerant supply port 82: Second refrigerant supply port 91: Insulating plates 92a, 92b, 92c: Semiconductor chip (cooling target)
121: First divided supply path 122: Second divided supply path

Claims (2)

A base plate on which the object to be cooled is attached to the front surface;
A plurality of fins attached to the back surface of the base plate and arranged in parallel with the planes facing each other;
A refrigerant supply path that is provided apart from the tips of the fins on the back surface side of the base plate and extends along the base plate;
A refrigerant discharge path that communicates with a space between the plurality of fins and is provided between the refrigerant supply path and the base plate;
A refrigerant nozzle that is provided in the refrigerant supply path and ejects the refrigerant toward the back surface of the base plate;
A supply path partition member extending along the refrigerant flow direction in the refrigerant supply path, and dividing the refrigerant supply path into a plurality of divided supply paths;
A first refrigerant supply port that supplies refrigerant from one side to at least one of the plurality of divided supply paths is provided, and a second refrigerant supply port that supplies refrigerant from the other side to at least one other is provided. Cooler provided.   The back surface of the base plate has a curved surface that curves toward the refrigerant discharge path, and a guide portion that guides the refrigerant to the refrigerant discharge path by the curved surface is provided. Cooler.

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