JP2015149361A - cooler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a collision jet type cooler having a high cooling efficiency.SOLUTION: A cooler has a housing 2 in which refrigerant flows, a pair of confronting side plates 2a, 2b, and a pair of partition plates 6a, 6b which confront the pair of side plates and compart the space between the side plates. A cooling target 42 is secured to the outside of the side plates. The partition plate 6a is sloped to be farther away from the confronting side plate 2a as shifting to the downstream side along a refrigerant flowing direction. A refrigerant supply port 3 communicates with the space between the pair of partition plates 6a, 6b at one end portion of the housing 2. An exhaust port 4 communicates with the space between the partition plate 6a and the partition plate 2a at the other end portion of the housing. The partition plates 6a, 6b are provided with grooves 7, and the bottom surfaces of the grooves 7 are parallel to the confronting side plates. The bottom surfaces are provided with slits 9 extending along the flow direction. The lateral width of the grooves 7 is smaller to the downstream side in the flow direction.

Description

  The present invention relates to a cooler. In particular, the present invention relates to a collision jet type cooler in which a refrigerant collides with an inner surface of a side plate to which a cooling target such as a semiconductor chip is attached.

  For cooling semiconductor chips and electronic components, a type of cooler in which a coolant is jetted toward the inner surface of a casing side plate to which a cooling target such as a semiconductor chip is attached is known. Such a type of cooler is called a collision jet type cooler because the ejected refrigerant collides with the back surface (inner surface) of the member to which the cooling target is attached.

  Examples of the impinging jet type cooler are described in Patent Documents 1 and 2, for example. The cooler described in Patent Document 1 has the following structure. In the cooler, a cooling object is attached to each of the pair of side plates. Two partition plates parallel to the pair of side plates are arranged inside the housing, and the space inside the housing is partitioned into three layers by the two partition plates. A refrigerant supply port that communicates with the central space is provided at one end of the housing, and a refrigerant that communicates with the outer space (the space between the side plate and the partition plate) at the other end of the housing. A discharge port is provided. Further, the partition plate is provided with a plurality of holes arranged along the refrigerant flow direction. The refrigerant supplied from the refrigerant supply port to the central space flows into the outer space through the holes in the partition plate. At this time, the refrigerant collides with the back surface of the side plate and cools the side plate efficiently. The refrigerant colliding with the back surface of the side plate is then discharged from the refrigerant discharge port.

  Moreover, the cooler disclosed in Patent Document 2 has the following structure. The partition plate is disposed to be inclined with respect to the side plate so as to be away from the side plate from the upstream side to the downstream side of the refrigerant. A plurality of nozzles protruding from the partition plate toward the side plate are provided. The plurality of nozzles are arranged from the upstream to the downstream of the flow of the refrigerant, and the length of the nozzle becomes longer toward the downstream of the refrigerant, and the distance between the tip of the nozzle and the side plate is constant. Yes. In the collision jet type cooler, the amount of refrigerant flowing through the space between the side plate and the partition plate increases as it goes downstream. However, in the cooler of Patent Document 2, the partition plate is inclined with respect to the side plate, and Since the distance between the partition plate and the side plate becomes wider as it goes, more refrigerant can pass. That is, as the flow rate of the refrigerant increases, the cross-sectional area of the flow path also increases, so that the refrigerant flows smoothly without being hindered.

JP 2008-198751 A Japanese Utility Model Publication No. 01-112095

  The cooler disclosed in this specification is also related to the collision jet type, and includes a partition plate that is inclined so as to move away from the side plate as it proceeds downstream as in Patent Document 2. The cooler disclosed in the present specification further improves the cooler disclosed in Patent Document 2, and provides a cooler in which the refrigerant flows more smoothly. The smooth flow of the refrigerant contributes to the improvement of the cooling capacity.

  The cooler disclosed in the present specification includes a casing through which a refrigerant flows and a pair of partition plates that divide a space between the pair of side plates. The casing has a refrigerant supply port at one end and a refrigerant discharge port at the other end. A cooling object is attached to the outside of the pair of side plates that are opposed to each other in the housing and are between the supply port and the discharge port. A plurality of fins may be provided inside each of the pair of side plates. The pair of partition plates opposes each of the pair of side plates and partitions a space between the pair of side plates. Each partition plate is inclined with respect to the side plate so as to move away from the opposing side plate as it proceeds downstream along the flow direction of the refrigerant from the refrigerant supply port toward the discharge port. In other words, the pair of partition plates face each other and are arranged so as to approach each other as they proceed downstream in the refrigerant flow direction. The supply port communicates with the space between the pair of partition plates at one end of the housing, and the discharge port communicates with the space between each partition plate and the side plate at the other end of the housing. doing. Each partition plate is provided with an elongated groove that protrudes toward the opposite side plate and extends in the flow direction. Furthermore, the lateral width of the groove becomes narrower as it proceeds downstream along the flow direction. The bottom surface of the groove is parallel to the opposing side plate, and an elongated slit is provided on the bottom surface along the flow direction. The groove and the slit correspond to a nozzle that ejects the refrigerant toward the inside of the side plate. In the above-described cooler, the refrigerant flowing in from the refrigerant supply port is sprayed from the space between the pair of partition plates to the inner surface of each side plate through the slit, and then discharged from the discharge port.

  The cooler disclosed in this specification is narrowed as the lateral width of the groove (the width in the direction perpendicular to the flow direction) proceeds downstream in the refrigerant flow direction. In other words, the space outside the side surface of the groove expands as it goes downstream in the flow direction of the refrigerant. Here, the space outside the side surface of the groove is a space sandwiched between the partition plate and the side plate, and corresponds to a flow path through which the refrigerant ejected from the slit passes. Moreover, the partition plate is moving away from the side plate as it proceeds downstream along the flow direction. That is, in the above-described cooler, the flow path through which the refrigerant ejected from the slit passes expands vertically and horizontally as it proceeds downstream. Here, “vertical” is a direction perpendicular to the side plate, and “horizontal” is a direction perpendicular to the flow direction and parallel to the side plate. In the above-described cooler, since the flow path through which the refrigerant ejected from the slit flows two-dimensionally, the refrigerant ejected from the slit flows more smoothly. In other words, even if the inclination of the partition plate with respect to the side plate is small, the flow channel expands in the lateral direction as it proceeds downstream, and the flow channel cross-sectional area increases corresponding to the increase in flow rate. The fact that the refrigerant can flow smoothly even if the inclination of the partition plate is small means that the thickness of the cooler can be reduced without impairing the cooling capacity.

  The technology disclosed in the present specification relates to a collision jet type cooler and provides a structure in which a refrigerant jetted from a nozzle flows smoothly. Details and further improvements of the technology disclosed in this specification will be described in the following “DETAILED DESCRIPTION”.

The top view of the cooler of the 1st example is shown. The longitudinal cross-sectional view along the IB-IB line of FIG. 1A is shown. 1B is a longitudinal sectional view taken along line IC-IC in FIG. 1A. FIG. 1C shows a cross-sectional view along the ID-ID line in FIG. 1A. 1C shows a cross-sectional view along the line IE-IE in FIG. 1A. It is a graph which shows the difference of the pressure loss of the cooler of an Example, and the cooler of a comparative example. It is a graph which shows the change of fin base temperature from the supply port in the cooler of an Example, and the cooler of a comparative example to a discharge port. It is a top view of the cooler of the 2nd example. It is a top view of the cooler of the 3rd example. The cross-sectional view of the cooler in the VB-VB line | wire of FIG. 5A is shown. The cross-sectional view of the cooler in the VC-VC line of FIG. 5A is shown.

  (First Embodiment) The cooler of the first embodiment will be described with reference to the drawings. FIG. 1A is a plan view of the cooler 10. In addition, FIG. 1A is shown with sectional drawing along the IA-IA line shown to FIG. 1B so that an internal structure can be understood. FIG. 1B and FIG. 1C are longitudinal sectional views of different cross sections when the cooler 10 is viewed from the same projection direction (Y-axis direction). FIG. 1B shows a vertical cross-sectional view of the cooler 10 taken along line IB-IB in FIG. 1A. Similarly, FIG. 1C shows a longitudinal sectional view of the cooler 10 along the IC-IC line of FIG. 1A. On the other hand, FIGS. 1D and 1E are cross-sectional views of different cross sections viewed from the projection direction of FIG. 1B (FIG. 1C) and the direction (X-axis direction) orthogonal to the projection direction of FIG. 1A. FIG. 1D shows a cross-sectional view of the cooler 10 along the ID-ID line of FIG. 1A. Similarly, FIG. 1E shows a cross-sectional view of the cooler 10 along the line IE-IE in FIG. 1A.

  As shown in FIG. 1B, the cooler 10 includes a rectangular parallelepiped casing 2 constituting an outer shell and a pair of partition plates 6 a and 6 b attached to the inside of the housing 2. And the upper surface and lower surface of the housing | casing 2 respond | correspond to a pair of side plate 2a, 2b which attaches the cooling target object 42a, 42b, respectively. A space between the pair of side plates 2a and 2b is partitioned by the partition plates 6a and 6b. As the coolant flows through the inside of the housing 2, the cooling objects 42a and 42b attached to the side plates 2a and 2b are cooled.

  The housing 2 will be described. A refrigerant supply port 3 is provided on one end surface of the casing 2 in the longitudinal direction (X-axis direction), and a refrigerant discharge port 4 is provided on the other end surface. Two discharge ports 4 are provided, one for each of the side plate 2a side and the side plate 2b side. The refrigerant flowing in from the supply port 3 flows out of the discharge port 4 through a space defined by partition plates 6a and 6b described later. Hereinafter, the “flow direction” of the refrigerant in the present specification indicates an inflow / outflow direction of the refrigerant passing through the cooler 10 and coincides with the X-axis direction and the longitudinal direction of the housing 2 shown in the drawing.

  The pair of side plates 2a and 2b will be described. The pair of side plates 2a and 2b correspond to the upper and lower surfaces of the housing 2 as described above. That is, the pair of side plates 2 a and 2 b extend so as to face each other along the flow direction of the refrigerant from the supply port 3 to the discharge port 4 of the housing 2. A cooling object 42a is attached via an insulating member 41 to the outer surface of the side plate 2a (the surface opposite to the surface facing the side plate 2b). In the present embodiment, the cooling object 42a is a semiconductor chip. The object to be cooled 42a, which is a semiconductor chip, is electrically insulated from the housing 2 by the insulating member 41.

  Furthermore, a plurality of fins 5 are provided on the inner surface of the side plate 2a (the surface facing the side plate 2b). The fins 5 are rectangular flat plates that are arranged in parallel with their planes facing each other. And the fin 5 is extended from one side of the side surface of the width direction (Y-axis direction) of the housing | casing 2 to the other. The plurality of fins 5 are arranged such that the plane thereof is orthogonal to the refrigerant flow direction (X-axis direction). In other words, the plurality of fins 5 are arranged so as to be parallel to the end surface of the housing 2 on which the supply port 3 is provided (end surface on which the discharge port 4 is provided).

  Further, similarly to the side plate 2a, a cooling object 42b (semiconductor chip) is attached to the side plate 2b via an insulating member 41 on the outside thereof. Moreover, the fin 5 is provided also inside the side plate 2b similarly to the side plate 2a.

  The pair of partition plates 6a and 6b will be described. The pair of partition plates 6a and 6b are disposed to face the side plates 2a and 2b, respectively. One edge of the partition plate 6a in the flow direction (X-axis direction) is connected to an end surface of the housing 2 where the supply port 3 is provided, and the other edge is provided with the discharge port 4 of the housing 2. Connected to the end face. Further, both ends in the width direction (Y-axis direction) of the partition plate 6 a are connected to the inner surface in the width direction of the housing 2. The partition plate 6a is disposed to be inclined with respect to the side plate 2a so as to move away from the side plate 2a from the end surface where the supply port 3 is provided toward the end surface where the discharge port 4 is provided. That is, the distance H1 with the side plate 2a in the vicinity of the end surface where the supply port 3 of the partition plate 6a is provided is larger than the distance H2 with the side plate 2a in the vicinity of the end surface where the discharge port 4 of the partition plate 6a is provided. small. In other words, the partition plate 6a is opposed to the side plate 2a so as to move away from the opposing side plate 2a as it proceeds downstream along the refrigerant flow direction (X-axis direction) from the refrigerant supply port 3 to the discharge port 4. Inclined. The other partition plate 6b facing the side plate 2b has the same shape and configuration as the partition plate 6a. And the partition plate 6b is also inclined with respect to the side plate 2b so that it goes away from the side plate 2b as it goes from the end surface where the supply port 3 is provided to the end surface where the discharge port 4 is provided, similarly to the partition plate 6a. Has been placed. Here, the mutual relationship between the pair of partition plates 6a and 6b will be described. The pair of partition plates 6a and 6b are opposed to each other and are arranged so as to approach each other as they proceed downstream in the flow direction (X-axis direction). Has been. Moreover, the edges connected to the end surfaces of the partition plates 6a and 6b where the discharge ports 4 are provided are connected to each other.

  With the partition plates 6a and 6b described above, the space between the side plates 2a and 2b of the housing 2 is divided into three spaces. One space is a space between the partition plates 6a and 6b, and is a space indicated by a symbol “Pin” in FIG. 1B. The other two spaces are a space between the partition plate 6a and the side plate 2a and a space between the partition plate 6b and the side plate 2b, and are spaces indicated by reference sign “Pout” in FIG. 1B. The space Pin communicates with the supply port 3 located on one end face in the longitudinal direction (X-axis direction) of the housing 2. The space Pout communicates with the discharge port 4 located on the other end surface in the longitudinal direction (X-axis direction) of the housing 2. Each of the two discharge ports 4 described above communicates with the space Pout between the partition plate 6a and the side plate 2a and the space Pout between the partition plate 6b and the side plate 2b. Moreover, although mentioned later in detail, the slit 9 is provided in each partition plate 6a, 6b. Therefore, the refrigerant flowing in from the supply port 3 passes through the space Pin, passes through the slit 9 from the space Pin to the space Pout, and flows out from the space Pout to the discharge port 4. Hereinafter, the space indicated by the symbol Pin is referred to as a supply space Pin, and the space indicated by the symbol Pout is referred to as a discharge space Pout.

  The pair of partition plates 6a and 6b are provided with grooves 7 protruding toward the corresponding side plates 2a and 2b, respectively. The groove 7 is elongated along the flow direction (X-axis direction). In the present embodiment, two grooves 7 having the same shape are provided in one partition plate 6a, and four grooves 7 are provided in combination with the pair of partition plates 6a and 6b. The space inside the groove 7 communicates with the supply space Pin between the partition plates 6a and 6b. Below, the one groove | channel 7 provided in the partition plate 6a is demonstrated. The bottom surface 7a of the groove 7 is parallel to the opposing side plate 2a. In other words, the distance between the bottom surface 7a of the groove 7 and the side plate 2a facing the surface 7a is constant from the end surface where the supply port 3 is provided toward the end surface where the discharge port is provided. Further, as described above, the distance between the partition plate 6a and the side plate 2a decreases as the distance from the supply port 3 to the discharge port 4 decreases. Therefore, as well represented in FIGS. 1D and 1E, the height of the groove 7 is along the IE-IE line compared to the height at the cross section along the ID-ID line (see FIG. 1D). The height at the cross section (see FIG. 1E) is larger. That is, the height of the groove 7 increases as it approaches the discharge port 4 from the supply port 3. Here, “height” means the length of the groove in the Z-axis direction in the drawing.

  Further, as well represented in FIG. 1A, the lateral width of the groove 7 (the width in the direction perpendicular to the flow direction (Y-axis direction)) gradually increases along the flow direction (X-axis direction) toward the downstream side. It is getting smaller. In other words, the shape of the groove 7 viewed from above (Z-axis direction) is a trapezoid elongated in the flow direction (X-axis direction). That is, the lateral width L1 of the end portion of the groove 7 close to the supply port 3 is larger than the lateral width L2 of the end portion close to the discharge port 4.

  Here, as shown in FIG. 1D, the discharge space between the partition plate 6a and the side plate 2a in the cross section along the ID-ID line is represented as Pout1, and as shown in FIG. 1E, along the IE-IE line. A discharge space between the partition plate 6a and the side plate 2a in the cross section is represented as Pout2. As shown in FIG. 1D, the discharge space Pout1 is a space surrounded by the outer side surface of the groove 7, the partition plate 6a, and the side plate 2a. The discharge space Pout2 is the same space as the discharge space Pout1. The ID-ID line is close to the supply port 3, and the IE-IE line is close to the discharge port 4. As described above, the lateral width of the groove 7 is gradually reduced from the supply port 3 toward the discharge port 4. Thereby, as well represented in FIG. 1D and FIG. 1E, the cross section of the discharge space Pout2 is expanded in the lateral direction (Y-axis direction) compared to the cross section of the discharge space Pout1. Further, as described above, the interval between the partition plates 6 a and 6 b decreases as the distance from the supply port 3 to the discharge port 4 decreases. Thereby, the cross section of the discharge space Pout2 extends in the vertical direction (Z-axis direction) as compared with the cross section of the discharge space Pout1. That is, the discharge space Pout between the partition plate 6a and the side plate 2a is expanded in both the vertical and horizontal directions as it goes from the supply port 3 to the discharge port 4. Similarly, the space between the partition plate 6b and the side plate 2b is a cross section along the IE-IE line closer to the discharge port 4 than the discharge space Pout3 in the cross section along the ID-ID line close to the supply port 3. The discharge space Pout4 in FIG.

  The bottom surface 7a of the groove 7 is provided with a substantially rectangular slit 9 that is elongated along the flow direction (X-axis direction). The groove 7 and the slit 9 may be collectively referred to as a nozzle 8. By the nozzle 8, the refrigerant that has flowed into the nozzle is ejected toward the side plate 2a.

  The flow of the refrigerant passing through the inside of the cooler 10 will be described. First, the flow of the refrigerant will be described with reference to FIG. 1B. The thick line with the arrow shown to FIG. 1B represents the flow of the refrigerant | coolant. Here, the symbol “Fin” represents the refrigerant flowing into the supply port 3, and the symbol “Fout” represents the refrigerant flowing out from the discharge port 4. The refrigerant supplied from the supply port 3 flows into the supply space Pin between the partition plates 6a and 6b. The refrigerant that has flowed into the supply space Pin flows into the space inside the nozzle 8 that communicates with the supply space Pin (the space inside the groove 7). Since the nozzle 8 protrudes toward the side plates 2a and 2b, the direction in which the refrigerant flows toward the side plates 2a and 2b is changed. Moreover, since the nozzle 8 protrudes in the two vertical directions on the side plate 2a side and the side plate 2b side, the refrigerant changes its flow in the two vertical directions. It should be noted that the flow of the refrigerant through the space that cannot be seen from the drawing is represented by a broken line with an arrow. The refrigerant that has flowed into the nozzle 8 is ejected from the slit 9 provided in the bottom surface 7 a of the groove 7 and flows into the discharge space Pout outside the nozzle 8. Then, the refrigerant flowing into the discharge space Pout flows out of the cooler 10 through the discharge port 4. When the flow of the refrigerant is viewed from another cross section, as shown in FIG. 1C, the refrigerant ejected from the nozzle 8 through the slit 9 is the discharge space outside the nozzle 8 as represented by the broken line with an arrow. It flows into Pout.

  With reference to FIG. 1D, the flow of the refrigerant ejected from the nozzle 8 to the side plates 2a and 2b will be described from another viewpoint. A thick line with an arrow shown in FIG. 1D also represents the refrigerant that flows from the supply space Pin to the discharge space Pout through the nozzle 8 as in FIG. 1B. The refrigerant ejected from the nozzle 8 passes through the long and narrow slit 9 and vigorously ejects onto the side plates 2a and 2b. The ejected refrigerant collides with the inner surfaces of the side plates 2a and 2b, rebounds, passes between the fins 5, and flows into the discharge space Pout. In this embodiment, two grooves 7 (nozzles 8) are formed in each of the partition plates 6a and 6b. Accordingly, the refrigerant is ejected from the two nozzles 8 extending from the partition plate 6a to the side plate 2a, and the refrigerant is ejected from the two nozzles 8 extending from the partition plate 6b to the side plate 2b.

  According to the cooler 10 having the above-described configuration, the heat released from the cooling objects 42a and 42b (semiconductor chips) attached to the outside of the side plates 2a and 2b is transmitted to the side plates 2a and 2b to the fins 5. Spread. As described above, the refrigerant ejected from the nozzle 8 collides with the side plates 2 a and 2 b and passes between the fins 5. At that time, the heat of the side plates 2a, 2b and the fins 5 is transferred to the refrigerant. Thereby, the cooling objects 42a and 42b are efficiently cooled.

  Further, the flow rate of the refrigerant flowing through the discharge space Pout increases as it goes downstream. Here, in the present embodiment, as described above, the cross section of the discharge space Pout expands toward the downstream. In other words, a larger amount of refrigerant can pass through the discharge space Pout as it goes downstream. That is, since the cross-sectional area of the flow path increases as the flow rate of the refrigerant increases, the refrigerant can flow smoothly without being obstructed.

  Further, the discharge space Pout outside the partition plate 6a is not only expanded in the vertical direction (Z-axis direction) due to the inclination of the partition plates 6a and 6b, but the lateral width of the groove 7 is from upstream to downstream in the flow direction. By being small, it has spread also in the horizontal direction (Y-axis direction). Therefore, even if the inclination of the partition plates 6a and 6b is reduced, the cross section of the discharge space Pout can be expanded toward the downstream in the refrigerant flow direction. This means that the thickness of the cooler can be reduced without impairing the cooling capacity.

  With reference to the graph shown in FIG. 2, the effect of the cooler 10 of the present embodiment that allows the refrigerant to flow more smoothly than before will be described. In order to quantitatively know that the refrigerant has flowed smoothly, there is a method of measuring the pressure loss in the space (hereinafter referred to as the refrigerant flow path) in which the refrigerant flows in the cooler 10. The smaller the pressure loss, the smoother the refrigerant flows through the refrigerant flow path. FIG. 2 is an example of a graph comparing the pressure loss of the refrigerant flow path of the cooler 10 of this embodiment with the pressure loss of the cooler of the comparative example. Here, unlike the present example, in the comparative example, the partition plate and the side plate are arranged in parallel, there is no inclination with respect to the side plate of the partition plate, and the lateral width of the groove provided in the partition plate is from upstream to downstream in the flow direction. And a constant cooler. As shown in the graph of FIG. 2, the pressure loss of this example could be reduced by 15.1% compared to the comparative example. This means that the refrigerant flowing in this embodiment flows more smoothly than in the comparative example.

  With reference to the graph shown in FIG. 3, the cooling efficiency of the cooler 10 of a present Example is demonstrated. In this embodiment, the cooling efficiency is evaluated based on the temperature of the fin base provided on the side plate. FIG. 3 is an example of a graph comparing fin base temperatures (hereinafter referred to as root temperatures) in the same cooler as the comparative example shown in FIG. 2 and the cooler 10 of the present embodiment. The horizontal axis of the graph of FIG. 3 represents the temperature measurement position. That is, the left end of the horizontal axis corresponds to the fin closest to the refrigerant supply port, and the right end of the horizontal axis corresponds to the fin closest to the refrigerant discharge port. On the other hand, the vertical axis in FIG. 3 is the root temperature of each fin. The curve indicated by the solid line in FIG. 3 is the root temperature of the fin of the example, and the curve indicated by the broken line is the root temperature of the fin of the comparative example. FIG. 3 also shows the average value of the root temperatures of the plurality of fins of this example and the comparative example. Here, the cooling efficiency is evaluated by the average value of the root temperatures of the plurality of fins. This is because the lower the average of the root temperatures of the plurality of fins, the better the heat of the cooling object is absorbed by the refrigerant. In FIG. 4, the solid line represents the average value of the present example, and the broken line represents the average value of the comparative example. The average value of the root temperature in this example is 0.15 degrees lower than the average value in the comparative example. Therefore, it can be evaluated that the cooling efficiency of the cooler 10 of the present embodiment is improved as compared with the comparative example.

  As described above, the technology disclosed in this specification can increase the cooling efficiency of the cooler and can contribute to downsizing of the cooler.

  (Second Embodiment) A cooler according to a second embodiment will be described with reference to FIG. The cooler 110 of the second embodiment is the same as the first embodiment except that the shape of the grooves provided in the partition plates 6a and 6b is different from that of the first embodiment. Hereinafter, the groove 107 of the cooler 110 will be described. As shown in FIG. 4, the shape of the groove 107 is different from that of the first embodiment in the shape of the side surface 107 a in the width direction (Y-axis direction) of the groove 107. The side surface 107a in the width direction of the groove 107 is not a flat surface but a curved surface. The side surface 107a is curved so as to ensure a configuration in which the lateral width of the groove 107 gradually narrows as it proceeds downstream in the refrigerant flow direction (X-axis direction). Even in such a configuration, the same effect as in the first embodiment can be obtained.

  (Third Embodiment) A cooler according to a third embodiment will be described with reference to FIGS. 5A, 5B and 5C. The cooler 210 of the third embodiment is the same as the first embodiment except that the shape of the grooves provided in the partition plates 6a and 6b is different from that of the first embodiment. Hereinafter, the groove 207 of the cooler 210 will be described. FIG. 5A is a plan view of the cooler 210. It is shown in cross section as in FIG. 1A. The width of the opening of the groove 207 is constant from upstream to downstream in the refrigerant flow direction (X-axis direction). On the other hand, the width of the bottom surface of the groove 207 decreases from upstream to downstream in the refrigerant flow direction. That is, the side surface 207a in the width direction (Y-axis direction) of the groove 207 is inclined so that the width of the groove 207 is narrowed from the opening to the bottom surface of the groove 207. This shape is well represented in FIGS. 5B and 5C. As shown in FIG. 5B, in the cross-sectional view of the vicinity of the end surface where the supply port 3 of the housing 2 is provided, the lateral width of the bottom surface of the groove 207 is indicated by L3. On the other hand, as shown in FIG. 5C, in the cross-sectional view near the end surface of the housing 2 where the discharge port 4 is provided, the lateral width of the bottom surface of the groove 207 is indicated by L4. When the lateral width L3 on the upstream side and the lateral width L4 on the downstream side of the bottom surface of the groove 207 are compared, L4 is smaller than L3. Even in such a configuration, as in the first embodiment, the space outside the groove 207 can be made wider on the downstream side than on the upstream side. Therefore, the same effect as in the first embodiment can be obtained. Further, as shown in FIG. 5C, the lateral width of the groove 207 gradually decreases from the opening to the bottom. With this configuration, when the flow of the refrigerant changes along the groove 207, it is possible to suppress a sudden decrease in the flow path area and to suppress an increase in pressure loss at the opening of the groove 207.

  Points to be noted regarding the technology shown in the embodiments will be described. The shape of the slit provided on the bottom surface of the groove in the partition plate is not limited to a substantially rectangular shape as in the embodiment. For example, the shape may be such that the width of the slit gradually decreases as it proceeds downstream along the flow direction of the refrigerant. In the space between the partition plates, a large amount of refrigerant flows on the upstream side. Therefore, with such a configuration, pressure loss on the upstream side due to the slit can be suppressed.

  In the above embodiment, the total number of grooves provided in the partition plate is four, but may be four or more. In the drawings of the embodiments, the side plates to which the object to be cooled are attached are shown so as to be positioned above and below the cooler. However, the posture when actually used is not always as shown in the drawings. In consideration of the gravity acting on the refrigerant, it is desirable to use the side plate to which the object to be cooled is attached in a horizontal position.

  Further, the cooling object may be an electronic device other than the semiconductor chip. For example, the electronic device may be a heating element such as a reactor, a capacitor, or a battery.

  Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.

2: casing 2a, 2b: side plate 3: supply port 4: discharge port 5: fins 6a, 6b: partition plates 7, 107, 207: groove 8: nozzle 9: slits 10, 110, 210: cooler 41: insulation Members 42a, 42b: Cooling object Pin: Supply space Pout, Pout1, Pout2, Pout3, Pout4: Discharge space

Claims (1)

A refrigerant supply port is provided at one end and a refrigerant discharge port is provided at the other end, and a casing through which the refrigerant flows,
A pair of side plates facing the housing, extending along the flow direction of the refrigerant from the supply port to the discharge port, and a side plate to which a cooling object is attached on the outside;
A pair of partition plates facing each of the pair of side plates and partitioning a space between the pair of side plates, each of the partition plates facing as it progresses downstream along the flow direction of the refrigerant. A pair of partition plates that are inclined with respect to the side plate so as to be away from
With
The supply port communicates with the space between the pair of partition plates at one end of the housing, and the discharge port communicates with each partition plate at the other end of the housing. Communicating with the space between the side plates,
Each of the partition plates is provided with a groove that protrudes toward the opposing side plate and that is elongated along the flow direction and narrows as the lateral width proceeds downstream along the flow direction,
The bottom surface of the groove is parallel to the opposing side plate and the bottom surface is provided with an elongated slit along the flow direction,
After the refrigerant flowing in from the supply port is sprayed from the space between the pair of partition plates to the inner surface of each side plate through the slit, the refrigerant is discharged from the discharge port.
A cooler characterized by that.

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