JP2014185990A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014185990A5 JP2014185990A5 JP2013062427A JP2013062427A JP2014185990A5 JP 2014185990 A5 JP2014185990 A5 JP 2014185990A5 JP 2013062427 A JP2013062427 A JP 2013062427A JP 2013062427 A JP2013062427 A JP 2013062427A JP 2014185990 A5 JP2014185990 A5 JP 2014185990A5
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- diffusion layer
- force
- surface pressure
- pressure distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 14
- 238000007689 inspection Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 4
- 230000006866 deterioration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013062427A JP2014185990A (ja) | 2013-03-25 | 2013-03-25 | 面圧分布検査装置、面圧分布を検査する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013062427A JP2014185990A (ja) | 2013-03-25 | 2013-03-25 | 面圧分布検査装置、面圧分布を検査する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014185990A JP2014185990A (ja) | 2014-10-02 |
| JP2014185990A5 true JP2014185990A5 (enExample) | 2016-03-10 |
Family
ID=51833686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013062427A Pending JP2014185990A (ja) | 2013-03-25 | 2013-03-25 | 面圧分布検査装置、面圧分布を検査する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014185990A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6680643B2 (ja) | 2016-08-03 | 2020-04-15 | 株式会社Ｓｏｋｅｎ | 面圧計測装置 |
-
2013
- 2013-03-25 JP JP2013062427A patent/JP2014185990A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2015062013A5 (enExample) | ||
| JP2014519019A5 (enExample) | ||
| JP2012518788A5 (enExample) | ||
| EP2741332A3 (en) | Array substrate and method of fabricating the same | |
| MX386477B (es) | Dispositivo y metodo de deteccion de contaminantes. | |
| JP2014178119A5 (enExample) | ||
| CN105203847B (zh) | 一种薄层材料方块电阻和连接点接触电阻测试方法 | |
| RU2013144631A (ru) | Устройство для приложения непрерывного электрического поля и способ | |
| HK1213568A1 (zh) | 用於电化学分析的检测装置 | |
| JP2015200017A5 (enExample) | ||
| JP2016177941A5 (enExample) | ||
| MX381317B (es) | Conjunto de sensores. | |
| JP2012163557A5 (enExample) | ||
| JP2014185990A5 (enExample) | ||
| RU2012103469A (ru) | Cистема и способ определения толщины исследуемого слоя в многослойной структуре | |
| WO2015145445A3 (en) | Spin transport electronic device | |
| MX388445B (es) | Sensor in-vitro que utiliza una medicion de impedancia tetrapolar. | |
| MY186620A (en) | Web thickness measuring equipment and method | |
| KR102101340B1 (ko) | 층상 구조를 가지는 2차원 물질의 저항 측정 방법 및 장치 | |
| JP2008241653A (ja) | 半導体検査装置 | |
| CN103713013A (zh) | 测试管状材料轴向导热系数的装置 | |
| KR101521879B1 (ko) | 다중 분지형 마이크로플루이딕 채널에서 용액의 유동 특성 센싱 방법 및 장치 | |
| JP2015073094A5 (ja) | コンタクト抵抗測定パターン及びその使用方法、半導体装置 | |
| WO2015104015A3 (de) | Sensorelement zur bestimmung von dehnungen | |
| CN103163375B (zh) | 一种固液导体接触电阻测量方法 |