JP2014185990A5

JP2014185990A5 -

Info

Publication number: JP2014185990A5
Application number: JP2013062427A
Authority: JP
Filing date: 2013-03-25
Publication date: 2016-03-10

Description

（４）本発明の一形態によれば、面圧分布を検査する方法が提供される。この面圧分布検査装置は、（ａ）表面に複数の電極が並んで配されている載置部と接するように拡散層を置き、前記拡散層に対して前記載置部とは反対側に、平面部を有する基準部材を、前記平面部が前記拡散層と向かい合うように置く工程と；（ｂ）前記載置部と前記拡散層と前記基準部材とを積層方向に、異なる大きさの力で押圧した状態において、前記複数の電極のうち、異なる組み合わせの２つの電極に、それぞれ電圧を掛け、前記拡散層を介して前記２つの電極に流れるそれぞれの電流の値を測定する工程と；（ｃ）前記異なる組み合わせの２つの電極ごとに、前記電圧と前記電流の値とから算出される抵抗値と、前記異なる大きさの力と、の関係を得る工程と；（ｄ）前記載置部と接するように前記拡散層を置き、前記拡散層に対して前記載置部とは反対側に、流路溝を有するセパレータを、前記流路溝が前記拡散層と向かい合うように置く工程と；（ｅ）前記載置部と前記拡散層と前記セパレータとを積層方向に、所定の大きさの力で押圧した状態において、前記複数の電極のうち、異なる組み合わせの２つの電極に、それぞれ電圧を掛け、前記拡散層を介して前記２つの電極に流れるそれぞれの電流の値を測定する工程と；（ｆ）前記（ｅ）工程における前記電圧と前記（ｅ）工程における前記電流の値とから算出される抵抗値と、前記関係と、により、前記異なる組み合わせの２つの電極ごとに掛かる力の大きさを得ることにより、面圧分布を得る工程と、を備える。この形態の面圧分布を検査する方法によれば、拡散層と電極を直接接触させ、面圧の変化による拡散層と電極との間の抵抗値の変化を計測することにより、面圧分布を細かく測定できる。 (4) According to one aspect of the present invention, a method for inspecting a surface pressure distribution is provided. In this surface pressure distribution inspection apparatus, (a) a diffusion layer is placed so as to be in contact with a placement portion on which a plurality of electrodes are arranged side by side, and on the opposite side of the placement portion with respect to the diffusion layer A step of placing a reference member having a flat portion so that the flat portion faces the diffusion layer; (b) forces of different magnitudes in the stacking direction between the placement portion, the diffusion layer and the reference member; A step of applying voltages to two different combinations of the plurality of electrodes among the plurality of electrodes, and measuring values of respective currents flowing through the two electrodes through the diffusion layer; c) obtaining a relationship between the resistance value calculated from the voltage and the current value and the force of the different magnitude for each of the two electrodes of the different combination; Place the diffusion layer in contact with the On the opposite side of the placing section and a separator having a channel groove, a step of the flow path groove is placed so as to face with said diffusion layer; wherein the (e) the mounting section and the diffusion layer separator Are pressed in the stacking direction with a force of a predetermined magnitude, a voltage is applied to two electrodes of different combinations among the plurality of electrodes, and flows to the two electrodes through the diffusion layer. And (f) a resistance value calculated from the voltage in the step (e) and the current value in the step (e), and the relationship. Obtaining a surface pressure distribution by obtaining the magnitude of the force applied to each of the two electrodes of the combination. According to the method for inspecting the surface pressure distribution in this form, the surface pressure distribution is determined by directly contacting the diffusion layer and the electrode and measuring a change in resistance value between the diffusion layer and the electrode due to a change in surface pressure. It can be measured finely.

（５）上記形態の面圧分布を検査する方法は、前記（ｅ）工程と、前記（ｆ）工程との間に、さらに、（ｇ）前記載置部と接するように前記拡散層を置き、前記拡散層に対して前記載置部とは反対側に、前記基準部材を、前記平面部が前記拡散層と向かい合うように置く工程と；（ｈ）前記載置部と前記拡散層と前記基準部材とを積層方向に、前記（ｂ）工程における前記異なる大きさの力よりも大きい力を含む、異なる大きさの力で押圧した状態において、前記複数の電極のうち、異なる組み合わせの２つの電極に、それぞれ電圧を掛け、前記拡散層を介して前記２つの電極に流れるそれぞれの電流の値を測定する工程と；（ｉ）前記異なる組み合わせの２つの電極ごとに、前記（ｈ）工程における前記電圧と前記（ｈ）工程における前記電流の値とから算出される抵抗値と、前記（ｈ）工程における前記異なる大きさの力と、の関係を得る工程と、を備え；前記（ｂ）工程における前記異なる大きさの力は、閾値以下の力のうち、異なる大きさの力であり、前記（ｆ）工程は、前記（ｃ）工程と前記（ｉ）工程とによって得られた前記関係と、前記（ｅ）工程における前記電圧と前記（ｅ）工程における前記電流の値とから算出される抵抗値と、により、前記異なる組み合わせの２つの電極ごとに掛かる力の大きさを得ることにより、面圧分布を得る工程としてもよい。この形態の面圧分布を検査する方法によれば、面圧の検査工程である（ｅ）工程を行う前に、拡散層に大きい力を与えないため、拡散層の劣化を抑制できる。
(5) In the method for inspecting the surface pressure distribution according to the above aspect, (g) the diffusion layer is further placed between the step (e) and the step (f) so as to contact the placement portion. A step of placing the reference member on the opposite side of the diffusion layer with respect to the diffusion layer such that the planar portion faces the diffusion layer; (h) the placement portion, the diffusion layer, and the In a state in which the reference member is pressed with a force having a different magnitude including a force larger than the force having a different magnitude in the step (b) in the stacking direction, two different combinations of the plurality of electrodes are used. Applying a voltage to each of the electrodes, and measuring a value of each current flowing through the two electrodes through the diffusion layer; and (i) for each of the two electrodes in the different combinations, in the step (h) The voltage and the step (h) A step of obtaining a relationship between the resistance value calculated from the flow value and the force having the different magnitude in the step (h); and the force having the different magnitude in the step (b), of subthreshold force, the force of different sizes, the step (f) said before Symbol relationship obtained by the step (c) and the step (i), wherein in step (e) As a step of obtaining the surface pressure distribution by obtaining the magnitude of the force applied to each of the two electrodes of the different combinations from the voltage and the resistance value calculated from the value of the current in the step (e). Good. According to the method for inspecting the surface pressure distribution in this form, since a large force is not applied to the diffusion layer before the step (e), which is the surface pressure inspection step, deterioration of the diffusion layer can be suppressed.

Claims

A placement unit for placing a measurement object;
A plurality of electrodes arranged side by side on the surface of the mounting portion;
A voltage applying unit capable of applying a voltage to two different electrodes among the plurality of electrodes;
A current measuring unit capable of measuring a value of a current flowing through the two electrodes via the measurement object;
A surface pressure distribution inspection device comprising: a pressing unit that presses the measurement object together with the placement unit.

The surface pressure distribution inspection apparatus according to claim 1,
Furthermore, a surface pressure distribution inspection apparatus comprising a potential measurement unit capable of measuring a potential difference between the two electrodes.

The surface pressure distribution inspection apparatus according to any one of claims 1 to 2,
The surface pressure distribution inspection apparatus, wherein an interval between the plurality of electrodes is 100 μm or less.

A method for inspecting a surface pressure distribution,
(A) A diffusion layer is placed so as to be in contact with a placement portion on which a plurality of electrodes are arranged side by side, and a reference member having a plane portion on the opposite side of the placement portion with respect to the diffusion layer. , Placing the planar portion so as to face the diffusion layer;
(B) In the state where the mounting portion, the diffusion layer, and the reference member are pressed in the stacking direction with different magnitudes of force, voltages are applied to two different combinations of the plurality of electrodes, respectively. Multiplying and measuring the value of each current flowing through the two electrodes through the diffusion layer;
(C) obtaining a relationship between the resistance value calculated from the voltage and the current value and the force of the different magnitude for each of the two electrodes of the different combination;
(D) before placing the diffusion layer in contact with the placing part, on the opposite side of the placing part to the diffusion layer, a separator having a channel groove, the channel groove and the said diffusion layer The process of placing them facing each other,
(E) In the state where the mounting portion, the diffusion layer, and the separator are pressed in the stacking direction with a predetermined amount of force, voltages are respectively applied to two different combinations of the plurality of electrodes. Multiplying and measuring the value of each current flowing through the two electrodes through the diffusion layer;
(F) By obtaining the magnitude of the force applied to each of the two electrodes of the different combinations by the resistance value calculated from the voltage and the current value in the step (e) and the relationship, Obtaining a surface pressure distribution, and a method for inspecting the surface pressure distribution.

A method for inspecting a surface pressure distribution according to claim 4,
Between the step (e) and the step (f),
(G) The diffusion layer is placed in contact with the placement portion, and the reference member is placed on the opposite side of the placement portion with respect to the diffusion layer so that the planar portion faces the diffusion layer. Process,
(H) In the state where the mounting portion, the diffusion layer, and the reference member are pressed in the stacking direction with a force having a different magnitude, including a force larger than the force having the different magnitude in the step (b). Applying a voltage to two electrodes of different combinations among the plurality of electrodes, and measuring values of respective currents flowing to the two electrodes through the diffusion layer;
(I) For each of the two electrodes of the different combination, a resistance value calculated from the voltage and the current value in the step (h), and a force of the different magnitude in the step (h) Obtaining a relationship,
The force of the different magnitude in the step (b) is a force of a different magnitude among the forces below the threshold,
Step (f), the before Symbol relationship obtained by the step (c) and the step (i), the resistance value calculated from the value of the voltage and the current in step (e), Thus, the method of inspecting the surface pressure distribution, which is a step of obtaining the surface pressure distribution by obtaining the magnitude of the force applied to each of the two electrodes of the different combinations.

A method for inspecting a surface pressure distribution according to claim 4, wherein:
In the step (b), the step (e), and the step (h),
A method of inspecting the surface pressure distribution by increasing the force from 0 at a constant rate when pressing.

A method for inspecting a surface pressure distribution according to claim 5 , further comprising:
As the previous step of the step (b) and the step (h),
Repeating the step of increasing the force from 0 to below the threshold at a constant rate three times;
As a previous step of the step (e),
The method of inspecting the surface pressure distribution, comprising: repeating the step of increasing the force from 0 to the predetermined force at a constant rate three times.