JP2014182167A5 - - Google Patents

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Publication number
JP2014182167A5
JP2014182167A5 JP2013054590A JP2013054590A JP2014182167A5 JP 2014182167 A5 JP2014182167 A5 JP 2014182167A5 JP 2013054590 A JP2013054590 A JP 2013054590A JP 2013054590 A JP2013054590 A JP 2013054590A JP 2014182167 A5 JP2014182167 A5 JP 2014182167A5
Authority
JP
Japan
Prior art keywords
permanent magnet
rotor
rotation center
galvano scanner
center axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013054590A
Other languages
English (en)
Japanese (ja)
Other versions
JP5875546B2 (ja
JP2014182167A (ja
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Publication date
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Priority to JP2013054590A priority Critical patent/JP5875546B2/ja
Priority claimed from JP2013054590A external-priority patent/JP5875546B2/ja
Publication of JP2014182167A publication Critical patent/JP2014182167A/ja
Publication of JP2014182167A5 publication Critical patent/JP2014182167A5/ja
Application granted granted Critical
Publication of JP5875546B2 publication Critical patent/JP5875546B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013054590A 2013-03-18 2013-03-18 ガルバノスキャナ Active JP5875546B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Publications (3)

Publication Number Publication Date
JP2014182167A JP2014182167A (ja) 2014-09-29
JP2014182167A5 true JP2014182167A5 (de) 2014-11-27
JP5875546B2 JP5875546B2 (ja) 2016-03-02

Family

ID=51700965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013054590A Active JP5875546B2 (ja) 2013-03-18 2013-03-18 ガルバノスキャナ

Country Status (1)

Country Link
JP (1) JP5875546B2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7140980B2 (ja) 2019-12-13 2022-09-22 ミツミ電機株式会社 回転往復駆動アクチュエーター
US11543652B2 (en) * 2020-04-20 2023-01-03 Luminar, Llc Imaging system having coil on mirror actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4531022B2 (ja) * 2006-08-18 2010-08-25 住友重機械工業株式会社 ビームスキャナ
JP2008228524A (ja) * 2007-03-15 2008-09-25 Hitachi Via Mechanics Ltd 揺動アクチュエータ装置およびレーザ加工装置
JP2010014920A (ja) * 2008-07-03 2010-01-21 Nidec Sankyo Corp レンズ駆動装置
JP5153719B2 (ja) * 2009-04-28 2013-02-27 三菱電機株式会社 ガルバノスキャナ
JP5640687B2 (ja) * 2010-11-16 2014-12-17 セイコーエプソン株式会社 アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置

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