JP2014182167A5 - - Google Patents

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JP2014182167A5
JP2014182167A5 JP2013054590A JP2013054590A JP2014182167A5 JP 2014182167 A5 JP2014182167 A5 JP 2014182167A5 JP 2013054590 A JP2013054590 A JP 2013054590A JP 2013054590 A JP2013054590 A JP 2013054590A JP 2014182167 A5 JP2014182167 A5 JP 2014182167A5
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Japan
Prior art keywords
permanent magnet
rotor
rotation center
galvano scanner
center axis
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JP2013054590A
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Japanese (ja)
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JP2014182167A (en
JP5875546B2 (en
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Priority claimed from JP2013054590A external-priority patent/JP5875546B2/en
Publication of JP2014182167A publication Critical patent/JP2014182167A/en
Publication of JP2014182167A5 publication Critical patent/JP2014182167A5/ja
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Claims (7)

反射ミラーと、上記反射ミラーを搭載した回転子と、上記回転子に取付けられたシャフトと、上記回転子と所定のギャップを設けて配置された固定子と、上記固定子を保持するとともに、上記シャフトが挿入され且つ上記回転子を回動可能に保持する軸受を装着したベースとを備えたガルバノスキャナであって、
上記回転子が、部分円柱体の永久磁石で形成されており、
上記永久磁石が、その周壁円弧面の周方向の中心位置に軸方向へ延在する溝を形成し、且つ上記溝の反対側の面を反射ミラー搭載面とし、両端側の面をシャフト取付面としており、上記永久磁石の部分にある上記周壁円弧面の中心軸が、上記回転子の回転中心軸と一致しており、
上記固定子が、部分円筒体のコアと、上記コアの内円弧面に配設されたコイルとで形成されており、
上記コアが、上記内円弧面の曲率半径を、上記永久磁石の周壁円弧面の曲率半径より大きくし、且つ上記内円弧面の中心軸を上記回転中心軸と一致させており、
上記コイルが、軸方向に延在する、一方の直線部と他方の直線部と、上記一方の直線部と上記他方の直線部との両端を連結する円弧部とでなるレーストラック形状であるとともに周方向を円弧状に成形しており、且つ上記永久磁石の周壁円弧面と上記ギャップを設けて対向しているガルバノスキャナ。
A reflection mirror, a rotor mounted with the reflection mirror, a shaft attached to the rotor, a stator arranged with a predetermined gap from the rotor, and holding the stator, and A galvano scanner having a shaft inserted therein and a base mounted with a bearing for rotatably holding the rotor,
The rotor is formed of a permanent magnet of a partial cylindrical body,
The permanent magnet forms a groove extending in the axial direction at the center position in the circumferential direction of the circular arc surface of the peripheral wall, the surface on the opposite side of the groove is used as a reflection mirror mounting surface, and the surfaces on both ends are shaft mounting surfaces And the central axis of the peripheral wall arc surface in the permanent magnet portion coincides with the rotation center axis of the rotor,
The stator is formed of a core of a partial cylindrical body and a coil disposed on an inner arc surface of the core,
The core has a radius of curvature of the inner arc surface larger than a radius of curvature of the peripheral wall arc surface of the permanent magnet, and the central axis of the inner arc surface coincides with the rotation center axis;
The coil has a racetrack shape that includes one linear portion and the other linear portion that extend in the axial direction, and an arc portion that connects both ends of the one linear portion and the other linear portion. A galvano scanner which is formed in a circular arc shape in the circumferential direction and faces the circular arc surface of the permanent magnet with the gap.
上記永久磁石が、上記回転中心軸と上記溝の底部の中点とを結ぶ面で分割された、第1の永久磁石と第2の永久磁石とで形成されており、
上記第1の永久磁石の磁化方向が、上記回転中心軸から上記コイルの一方の直線部における周方向の中点の方向であり、上記第2の永久磁石の磁化方向が、上記コイルの他方の直線部における周方向の中点から上記回転中心軸の方向であることを特徴とする請求項1に記載のガルバノスキャナ。
The permanent magnet is formed of a first permanent magnet and a second permanent magnet divided by a plane connecting the rotation center axis and the midpoint of the bottom of the groove;
The magnetization direction of the first permanent magnet is the direction of the midpoint of the circumferential direction in one linear portion of the coil from the rotation center axis, and the magnetization direction of the second permanent magnet is the other direction of the coil. The galvano scanner according to claim 1, wherein the galvano scanner is in the direction from the midpoint in the circumferential direction of the straight line portion to the rotation center axis.
上記永久磁石が、上記回転中心軸と上記溝の底部の中点とを結ぶ面で分割されていない一体物であり、上記永久磁石の磁化方向が、上記回転子の回動方向であり且つ上記反射ミラーの面と平行となっていることを特徴とする請求項1に記載のガルバノスキャナ。 The permanent magnet is an integral part that is not divided by a plane connecting the rotation center axis and the midpoint of the bottom of the groove, and the magnetization direction of the permanent magnet is the rotation direction of the rotor, and The galvano scanner according to claim 1, wherein the galvano scanner is parallel to a surface of the reflection mirror. 上記永久磁石が、上記回転中心軸と上記溝の底部の中点とを結ぶ面で分割されていない一体物であり、上記永久磁石の磁化方向が、上記回転子の回動方向であり且つ上記反射ミラー側に凸となった円弧状となっていることを特徴とする請求項1に記載のガルバノスキャナ。 The permanent magnet is an integral part that is not divided by a plane connecting the rotation center axis and the midpoint of the bottom of the groove, and the magnetization direction of the permanent magnet is the rotation direction of the rotor, and The galvano scanner according to claim 1, wherein the galvano scanner has an arc shape that is convex toward the reflecting mirror. 上記回転子が上記反射ミラーを水平に保つ位置から回動する回動角γを、上記回転中心軸と上記コイルの各直線部の内側端とを結んだ線分でなす角であるコイル中心孔角βと上記回転中心軸と上記溝の開口部とを結んだ線分でなす角である溝開口角αとを足した値の半分である(β+α)/2より小さくしていることを特徴とする請求項1から請求項4のいずれか1項に記載のガルバノスキャナ。 A coil center hole that is an angle formed by a line segment connecting the rotation center axis and the inner end of each linear portion of the coil with a rotation angle γ that rotates the rotor from a position that keeps the reflection mirror horizontal. The angle β is smaller than (β + α) / 2, which is half of a value obtained by adding a groove opening angle α, which is an angle formed by a line segment connecting the rotation center axis and the opening of the groove. The galvano scanner according to any one of claims 1 to 4. 上記永久磁石が、回転中心軸部に軸方向の孔を形成しており、上記孔に通しボルトを設置していることを特徴とする請求項1から請求項5のいずれか1項に記載のガルバノスキャナ。 The permanent magnet, forms an axial hole in the rotation center shaft, according to any one of claims 1 to 5, characterized in that it is installed a bolt through the hole Galvo scanner. 上記永久磁石が、上記シャフト取付面と平行な面で、複数に分割されていることを特徴とする請求項1から請求項6のいずれか1項に記載のガルバノスキャナ。 The galvano scanner according to any one of claims 1 to 6, wherein the permanent magnet is divided into a plurality of planes parallel to the shaft mounting surface.
JP2013054590A 2013-03-18 2013-03-18 Galvano scanner Active JP5875546B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (en) 2013-03-18 2013-03-18 Galvano scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013054590A JP5875546B2 (en) 2013-03-18 2013-03-18 Galvano scanner

Publications (3)

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JP2014182167A JP2014182167A (en) 2014-09-29
JP2014182167A5 true JP2014182167A5 (en) 2014-11-27
JP5875546B2 JP5875546B2 (en) 2016-03-02

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JP2013054590A Active JP5875546B2 (en) 2013-03-18 2013-03-18 Galvano scanner

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7140980B2 (en) 2019-12-13 2022-09-22 ミツミ電機株式会社 rotary reciprocating drive actuator
US11543652B2 (en) * 2020-04-20 2023-01-03 Luminar, Llc Imaging system having coil on mirror actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4531022B2 (en) * 2006-08-18 2010-08-25 住友重機械工業株式会社 Beam scanner
JP2008228524A (en) * 2007-03-15 2008-09-25 Hitachi Via Mechanics Ltd Rocking actuator and laser machining device
JP2010014920A (en) * 2008-07-03 2010-01-21 Nidec Sankyo Corp Lens drive device
JP5153719B2 (en) * 2009-04-28 2013-02-27 三菱電機株式会社 Galvano scanner
JP5640687B2 (en) * 2010-11-16 2014-12-17 セイコーエプソン株式会社 Actuator, actuator manufacturing method, optical scanner, and image forming apparatus

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