JP2014168022A5 - - Google Patents

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Publication number
JP2014168022A5
JP2014168022A5 JP2013040033A JP2013040033A JP2014168022A5 JP 2014168022 A5 JP2014168022 A5 JP 2014168022A5 JP 2013040033 A JP2013040033 A JP 2013040033A JP 2013040033 A JP2013040033 A JP 2013040033A JP 2014168022 A5 JP2014168022 A5 JP 2014168022A5
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JP
Japan
Prior art keywords
reflection surface
optical element
optical
optical system
shape formed
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Application number
JP2013040033A
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English (en)
Japanese (ja)
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JP2014168022A (ja
JP6178588B2 (ja
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Priority to JP2013040033A priority Critical patent/JP6178588B2/ja
Priority claimed from JP2013040033A external-priority patent/JP6178588B2/ja
Priority to TW103103205A priority patent/TWI569104B/zh
Priority to KR1020140019467A priority patent/KR101707277B1/ko
Publication of JP2014168022A publication Critical patent/JP2014168022A/ja
Publication of JP2014168022A5 publication Critical patent/JP2014168022A5/ja
Priority to KR1020170008091A priority patent/KR101831552B1/ko
Application granted granted Critical
Publication of JP6178588B2 publication Critical patent/JP6178588B2/ja
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JP2013040033A 2013-02-28 2013-02-28 照明光学系、露光装置、デバイスの製造方法及び光学素子 Active JP6178588B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013040033A JP6178588B2 (ja) 2013-02-28 2013-02-28 照明光学系、露光装置、デバイスの製造方法及び光学素子
TW103103205A TWI569104B (zh) 2013-02-28 2014-01-28 An illumination optical system, an exposure apparatus, a manufacturing method of an element, and an optical element
KR1020140019467A KR101707277B1 (ko) 2013-02-28 2014-02-20 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자
KR1020170008091A KR101831552B1 (ko) 2013-02-28 2017-01-17 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013040033A JP6178588B2 (ja) 2013-02-28 2013-02-28 照明光学系、露光装置、デバイスの製造方法及び光学素子

Publications (3)

Publication Number Publication Date
JP2014168022A JP2014168022A (ja) 2014-09-11
JP2014168022A5 true JP2014168022A5 (enrdf_load_stackoverflow) 2016-04-07
JP6178588B2 JP6178588B2 (ja) 2017-08-09

Family

ID=51617573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013040033A Active JP6178588B2 (ja) 2013-02-28 2013-02-28 照明光学系、露光装置、デバイスの製造方法及び光学素子

Country Status (3)

Country Link
JP (1) JP6178588B2 (enrdf_load_stackoverflow)
KR (2) KR101707277B1 (enrdf_load_stackoverflow)
TW (1) TWI569104B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5843905B2 (ja) * 2013-04-23 2016-01-13 キヤノン株式会社 照明光学系、露光装置及びデバイス製造方法
CN114677441B (zh) * 2021-11-20 2025-08-12 余姚舜宇智能光学技术有限公司 光心测试方法、光心测试装置及电子设备
JPWO2023248507A1 (enrdf_load_stackoverflow) 2022-06-22 2023-12-28

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1182639B (it) * 1985-10-29 1987-10-05 Cselt Centro Studi Lab Telecom Procedimento per la fabbricazione di fibre ottiche con nucleo a sezione non circolare
WO1999025009A1 (fr) * 1997-11-10 1999-05-20 Nikon Corporation Dispositif d'insolation
JP3517573B2 (ja) * 1997-11-27 2004-04-12 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
DE19856575A1 (de) * 1998-12-08 2000-09-14 Zeiss Carl Fa Projektions-Mikrolithographiegerät
JP2001324762A (ja) * 2000-05-17 2001-11-22 Minolta Co Ltd 単板式液晶プロジェクタの照明光学系
JP4659223B2 (ja) * 2001-01-15 2011-03-30 キヤノン株式会社 照明装置及びこれに用いる投影露光装置並びにデバイスの製造方法
US7215863B1 (en) 2006-04-27 2007-05-08 International Business Machines Corporation Light pipe optical coupling utilizing convex-shaped light pipe end
DE102010026252B4 (de) * 2010-07-01 2012-08-02 Jenoptik Optical Systems Gmbh Lichtintegrator für rechteckige Strahlquerschnitte unterschiedlicher Abmessungen
JP5806479B2 (ja) * 2011-02-22 2015-11-10 キヤノン株式会社 照明光学系、露光装置及びデバイス製造方法

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