JP2014163963A5 - - Google Patents
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- JP2014163963A5 JP2014163963A5 JP2013032003A JP2013032003A JP2014163963A5 JP 2014163963 A5 JP2014163963 A5 JP 2014163963A5 JP 2013032003 A JP2013032003 A JP 2013032003A JP 2013032003 A JP2013032003 A JP 2013032003A JP 2014163963 A5 JP2014163963 A5 JP 2014163963A5
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- liquid
- substrate
- protective film
- liquid device
- transparent plate
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- 239000007788 liquid Substances 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 16
- 230000001681 protective Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 3
- 230000003287 optical Effects 0.000 claims description 3
- 230000000149 penetrating Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001131 transforming Effects 0.000 description 1
Description
本発明に係る液体デバイスは、第１の電極を備えた基板であって、前記基板のおもて面上に設定された液体載置領域内に、前記基板のおもて面と裏面との間を貫通する流路が形成されている基板と、前記基板の前記裏面の前記流路の出口を覆う伸縮部と、前記伸縮部の周囲を取り囲み前記基板の前記裏面に対して直接又は間接的に固定された固定部と、を有する裏面膜と、前記裏面膜の前記伸縮部により覆われた前記流路内を満たし、前記基板の前記おもて面の前記液体載置領域上に膨出した液体と、前記液体載置領域上に膨出した前記液体の表面に形成されている保護膜と、前記保護膜の上面側に、前記保護膜に対して直接又は間接的に固定して形成された第２の電極と、を有し、前記裏面膜のうち少なくとも前記伸縮部が前記保護膜よりもヤング率の低い材質で形成されている。 The liquid device according to the present invention is a substrate including a first electrode, and a liquid placement region set on the front surface of the substrate includes a front surface and a back surface of the substrate. A substrate in which a flow path penetrating therethrough is formed, an expansion / contraction part covering the outlet of the flow path on the back surface of the substrate, and surrounding the periphery of the expansion / contraction part, directly or indirectly with respect to the back surface of the substrate Rise and fixed fixed portion, and a back film which have a, in the meet covered the passage by the expansion and contraction of the back surface film, on the liquid-placing area of the front surface of the substrate a liquid body out, and a protective film which is made form the surface of the liquid that bulges on the liquid placing area, on the upper surface of the protective film, directly or indirectly fixed to said protective film than to possess a second electrode formed, a by at least the extendable portion is the protective layer of the back film It is formed with a low Young's modulus material.
この液体デバイスの構造では、第１の電極と第２の電極との間の印加電圧の制御により、第１の電極と第２の電極とを互いに引き寄せる静電気力を作用させると、保護膜が第２の電極により基板側へと押圧される。この押圧力が液体を介して伸縮部に伝わり、伸縮部を膨張させる。伸縮部は保護膜よりもヤング率が低い（すなわち伸縮しやすい）ので、保護膜の変形が小さくても、伸縮部がそれよりも大きく変形する。これにより、液体レンズの曲率を大きく変化させることができる。 In this liquid device structure, when an electrostatic force that draws the first electrode and the second electrode together is controlled by controlling the voltage applied between the first electrode and the second electrode, the protective film is It is pressed to the substrate side by the two electrodes. This pressing force is transmitted to the expansion / contraction part via the liquid and expands the expansion / contraction part . Since the stretchable portion has a Young's modulus lower than that of the protective film (that is, easily expands and contracts), even if the deformation of the protective film is small, the stretchable portion deforms larger than that. Thereby, the curvature of a liquid lens can be changed greatly.
好適な態様では、裏面膜の少なくとも伸縮部に回折格子等の光学的機能を持たせる。この光学的機能は、伸縮部の各部の局所厚みを所定のパターンに従って異ならせることで実現してもよい。 In a preferred embodiment, at least the stretchable portion of the back film is provided with an optical function such as a diffraction grating. This optical function may be realized by changing the local thickness of each part of the stretchable part according to a predetermined pattern.
透明板を平坦な板として構成すれば、裏面膜の伸縮部が平坦な状態では、液体デバイスの焦点距離が無限大になる。 If the transparent plate is configured as a flat plate, the focal length of the liquid device becomes infinite when the stretchable portion of the back film is flat.
本発明によれば、液体表面を保護する保護膜の静電気力による変形に応じて伸縮部を大きく変形させることで所望の機能を得る液体デバイスにおいて、製造しやすく、信頼性の高いデバイス構造を提供することができる。
ADVANTAGE OF THE INVENTION According to this invention, in the liquid device which obtains a desired function by greatly deforming an expansion-contraction part according to the deformation | transformation by the electrostatic force of the protective film which protects the liquid surface, it is easy to manufacture and provides a reliable device structure can do.
Claims (8)
前記基板の前記裏面の前記流路の出口を覆う伸縮部と、前記伸縮部の周囲を取り囲み前記基板の前記裏面に対して直接又は間接的に固定された固定部と、を有する裏面膜と、
前記裏面膜の前記伸縮部により覆われた前記流路内を満たし、前記基板の前記おもて面の前記液体載置領域上に膨出した液体と、
前記液体載置領域上に膨出した前記液体の表面に形成されている保護膜と、
前記保護膜の上面側に、前記保護膜に対して直接又は間接的に固定して形成された第２の電極と、
を有し、前記裏面膜のうち少なくとも前記伸縮部が前記保護膜よりもヤング率の低い材質で形成されている、液体デバイス。 A substrate provided with a first electrode, wherein a flow path penetrating between a front surface and a back surface of the substrate is formed in a liquid placement region set on the front surface of the substrate. A substrate that is
A stretchable portion covering the outlet of the flow path of the back surface of the substrate, and a back film which have a, a fixing portion that is directly or indirectly fixed to the back surface of the substrate surrounding the periphery of the expansion portion ,
A liquid body in which the meet covered the passage by the expansion and contraction of the back surface film, bulges on the liquid placing area of the front surface of the substrate,
A protective film which is made form the surface of the liquid that bulges on the liquid placement area,
A second electrode formed on the upper surface side of the protective film by directly or indirectly fixing to the protective film;
Yes, and at least the collapsible portion is formed at a lower material having Young's modulus than the protective film, the liquid device of the back film.
前記保護膜が前記液体の表面及び前記透明板を覆うよう形成されている、
ことを特徴とする請求項１〜３のいずれか1項に記載の液体デバイス。 A transparent plate disposed on the surface of the liquid bulged on the liquid placement area;
The protective film is formed so as to cover the surface of the liquid and the transparent plate.
The liquid device according to claim 1, wherein the liquid device is a liquid device.
前記第１の電極又は前記第２の電極のうちの少なくとも一方が、前記液体載置領域内において複数の部分に分割されており、前記複数の部分のおのおのに対して個別に印加電圧の制御が可能となっている、
ことを特徴とする請求項４に記載の液体デバイス。 The transparent plate is movable according to the deformation of the protective film,
At least one of the first electrode and the second electrode is divided into a plurality of portions in the liquid placement region, and the control of the applied voltage is individually performed for each of the plurality of portions. Is possible,
The liquid device according to claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013032003A JP6120400B2 (en) | 2013-02-21 | 2013-02-21 | Liquid device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013032003A JP6120400B2 (en) | 2013-02-21 | 2013-02-21 | Liquid device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014163963A JP2014163963A (en) | 2014-09-08 |
| JP2014163963A5 true JP2014163963A5 (en) | 2016-03-31 |
| JP6120400B2 JP6120400B2 (en) | 2017-04-26 |
Family
ID=51614654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013032003A Active JP6120400B2 (en) | 2013-02-21 | 2013-02-21 | Liquid device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6120400B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101999735B1 (en) * | 2017-09-21 | 2019-07-12 | 엘지전자 주식회사 | Asymmetric deformable lens |
| JP7233082B2 (en) * | 2017-12-28 | 2023-03-06 | 国立大学法人信州大学 | Optical element, microlens array, and method for fabricating optical element |
| WO2019131925A1 (en) * | 2017-12-28 | 2019-07-04 | 日東電工株式会社 | Optical element, microlens array, and method for producing optical element |
| JP2021521483A (en) * | 2018-04-19 | 2021-08-26 | オプトチューン コンシューマー アーゲー | Optical zoom device |
| WO2021121681A1 (en) * | 2019-12-20 | 2021-06-24 | Optotune Consumer Ag | Liquid lens having a fixed lens shaping element and a movable transparent window |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3480071B2 (en) * | 1994-10-13 | 2003-12-15 | 株式会社デンソー | Variable focus lens |
| JP3400270B2 (en) * | 1996-11-08 | 2003-04-28 | 株式会社デンソー | Laminated piezoelectric actuator and variable focus lens device |
| JPH11133210A (en) * | 1997-10-30 | 1999-05-21 | Denso Corp | Variable focus lens |
| JP2002311213A (en) * | 2001-04-17 | 2002-10-23 | Olympus Optical Co Ltd | Variable shape optical element and optical element unit |
| NO326372B1 (en) * | 2006-09-21 | 2008-11-17 | Polight As | Polymer Lens |
| JP5030215B2 (en) * | 2007-01-17 | 2012-09-19 | 国立大学法人 東京大学 | Microdevice and manufacturing method thereof |
| JP2009186935A (en) * | 2008-02-08 | 2009-08-20 | Olympus Corp | Variable-focus liquid lens and method of manufacturing the same |
| US8699141B2 (en) * | 2009-03-13 | 2014-04-15 | Knowles Electronics, Llc | Lens assembly apparatus and method |
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2013
- 2013-02-21 JP JP2013032003A patent/JP6120400B2/en active Active
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