JP3400270B2 - Laminated piezoelectric actuator and variable focus lens device - Google Patents
Laminated piezoelectric actuator and variable focus lens deviceInfo
- Publication number
- JP3400270B2 JP3400270B2 JP29678096A JP29678096A JP3400270B2 JP 3400270 B2 JP3400270 B2 JP 3400270B2 JP 29678096 A JP29678096 A JP 29678096A JP 29678096 A JP29678096 A JP 29678096A JP 3400270 B2 JP3400270 B2 JP 3400270B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent
- piezoelectric actuator
- elastic film
- laminated piezoelectric
- variable focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、中央に貫通孔を有
する積層型圧電アクチュエータの技術分野と、この積層
型圧電アクチュエータを駆動機構に採用し上記貫通孔を
光路としている可変焦点レンズ装置の技術分野とに属す
る。この可変焦点レンズ装置の応用分野としては、顕微
鏡、顕微鏡カメラ装置の他に、医療用ないし工学用のカ
テーテルないしプルーブの先端に装備される光学レンズ
など多岐に渡る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the technical field of a laminated piezoelectric actuator having a through hole in the center and a technique of a variable focus lens device which employs the laminated piezoelectric actuator as a drive mechanism and uses the through hole as an optical path. Belongs to the field and. In addition to a microscope and a microscope camera device, the variable focus lens device has various fields of application, such as a medical or engineering catheter or an optical lens mounted on the tip of a probe.
【０００２】[0002]
【従来の技術】積層型圧電アクチュエータの従来技術と
しては、特開平１−２３５２８８号公報に、中央部に貫
通孔を有する積層型圧電変位素子が開示されている。同
素子では、同軸に積層された一対のリング状のバイモル
フが対向している二箇所で半径方向に沿った連結部材に
より剛に連結されて、圧電変位素子の基本単位が構成さ
れている。同基本単位は、上記連結部材とは９０度ずれ
た位置で、隣接する他の基本単位と外周部で他の連結部
材により連結されている。2. Description of the Related Art As a conventional technique of a laminated piezoelectric actuator, Japanese Patent Application Laid-Open No. 1-235288 discloses a laminated piezoelectric displacement element having a through hole in its central portion. In this device, a pair of coaxially laminated ring-shaped bimorphs are rigidly connected by two connecting members facing each other in the radial direction to form a basic unit of a piezoelectric displacement device. The basic unit is connected to another basic unit adjacent thereto by another connecting member at the outer peripheral portion at a position displaced by 90 degrees from the connecting member.
【０００３】それゆえ、この従来技術の積層型圧電アク
チュエータに電圧が印加されると、上記連結部材を対称
軸として（回転対称ではなく）９０度毎に屈伸し、同ア
クチュエータの一端と他端との間に変位もしくは変位力
を生じる。Therefore, when a voltage is applied to this prior art laminated piezoelectric actuator, it bends and expands every 90 degrees about the connecting member as an axis of symmetry (rather than rotational symmetry), and one end and the other end of the actuator. Displacement or displacement force is generated between.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、可変焦
点レンズ装置用のアクチュエータとして評価する場合、
上記従来技術の積層型圧電アクチュエータでは、中央に
貫通孔が開いていて光路としての使用に適しながら、ア
クチュエータとしての特性が可変焦点レンズの駆動に適
したものではない。すなわち、変位を取り出す部分がリ
ング状のバイモルフの対向する二箇所に限られているの
で、着力点が可変焦点レンズの全周囲に均等になく、レ
ンズの縦軸と横軸とで焦点が精密に一致させることが難
しい。However, when evaluated as an actuator for a variable focus lens device,
In the above-mentioned conventional laminated piezoelectric actuator, a through hole is opened in the center and it is suitable for use as an optical path, but the characteristics as an actuator are not suitable for driving a variable focus lens. In other words, since the portions from which displacement is taken out are limited to the two opposing locations of the ring-shaped bimorph, the force application points are not evenly distributed around the entire circumference of the varifocal lens, and the focal points are precisely defined on the vertical and horizontal axes of the lens. Difficult to match.
【０００５】また仮に、着力点をレンズの周囲に均一に
分布させるように剛性の高い円形のフレームを従来技術
の圧電アクチュエータに装着した場合にも、同フレーム
が傾いた場合に十分な復元力が期待できないので、同様
の不都合は依然として解消されない。そのうえ、従来技
術のアクチュエータでは、比較的変位は大きく取れるも
のの発生力は小さく、可変焦点レンズの駆動に必要な発
生力を得ることは難しく、高速駆動には適していないと
いう不都合もある。Further, even if a circular frame having high rigidity is mounted on a piezoelectric actuator of the prior art so as to evenly distribute the force applying points around the lens, a sufficient restoring force is obtained when the frame is tilted. The same inconvenience still remains, as we cannot expect. In addition, the conventional actuator has a disadvantage that it is not suitable for high-speed driving because it is difficult to obtain the required force for driving the varifocal lens, although the generated force is small although the displacement can be relatively large.
【０００６】一方、先行技術としては、特願平８−３４
８８３号に記載の可変焦点レンズ装置がある。同装置で
は、可変焦点レンズの周囲に六つの積層圧電バイモルフ
が配設されており、これらによる発生力は軸対称性が比
較的高く、かつ、十分に強力であり、可変焦点レンズの
高速駆動にも好適である。しかしながら上記先行技術で
も、可変焦点レンズ駆動用の積層型圧電アクチュエータ
がレンズの周囲に６個あるので、その体積はやや大きめ
になり、コンパクトとは言い難い憾みがある。すなわ
ち、上記先行技術によっては、可変焦点レンズ装置を積
層型圧電アクチュエータと同程度の直径に小型化するこ
とは不可能である。また、複数の積層型圧電アクチュエ
ータを構成要素としているので、いきおい部品点数が増
加し、その結果、製造コストの増加や故障率の増大を招
くおそれもなしとはしない。On the other hand, the prior art is Japanese Patent Application No. 8-34.
There is a variable focus lens device described in Japanese Patent No. 883. In this device, six laminated piezoelectric bimorphs are arranged around the varifocal lens, and the force generated by these is relatively high in axial symmetry and is sufficiently strong, which is suitable for high-speed driving of the varifocal lens. Is also suitable. However, even in the above-mentioned prior art, since there are six laminated piezoelectric actuators for driving the variable focus lens around the lens, the volume thereof is rather large, and it is difficult to say that it is compact. That is, according to the above prior art, it is impossible to reduce the size of the variable focus lens device to the same size as the laminated piezoelectric actuator. In addition, since a plurality of laminated piezoelectric actuators are used as constituent elements, the number of parts is drastically increased, and as a result, manufacturing cost and failure rate may increase.
【０００７】さらに、レンズの回転対称性を高く保つた
めに、全ての積層型圧電アクチュエータの発生力特性や
変位特性を均一にしておく必要があり、品質の均一性に
対する要求が高くなる。また、６個の積層型圧電アクチ
ュエータを構成している数十枚の圧電バイモルフのう
ち、一枚にでも導通不良などの不具合があれば、レンズ
の回転対称性が失われるので、この意味からも高い信頼
性を維持するのは難しいものと考えざるを得ない。Further, in order to keep the rotational symmetry of the lens high, it is necessary to make the generated force characteristics and displacement characteristics of all the laminated piezoelectric actuators uniform, which increases the demand for uniformity of quality. In addition, if even one of the dozens of piezoelectric bimorphs making up the six laminated piezoelectric actuators has a defect such as poor conduction, the rotational symmetry of the lens is lost. I have to think that maintaining high reliability is difficult.
【０００８】そこで本発明は、前述の先行技術と比較し
て、小型軽量化、低コスト化および高信頼性化が可能な
可変焦点レンズ装置と、同可変焦点レンズ装置の高速駆
動に好適な積層型圧電アクチュエータとを提供すること
を解決すべき課題とする。Therefore, the present invention has a varifocal lens device which is smaller and lighter in weight, lower in cost, and more reliable than the prior art described above, and a stack suitable for high-speed driving of the varifocal lens device. It is an object to be solved to provide a piezoelectric actuator.
【０００９】[0009]
【課題を解決するための手段およびその作用・効果】上
記課題を解決するために、発明者らは以下の手段を発明
した。
（第１手段）
本発明の第１手段は、請求項１記載の積層型圧電アクチ
ュエータである。本手段では、中央部に貫通孔が開いて
いるリング状の圧電変形素子（バイモルフまたはユニモ
ルフ）が積層されており、外周連結部材によりそれぞれ
の外周部が、内周連結部材によりそれぞれの内周部が、
互いに連結されている。そして外周連結部材または内周
連結部材が導電性の材料からなり、各圧電変形素子の圧
電板の電極に導通している。 Means for Solving the Problems and Their Actions / Effects In order to solve the above problems, the inventors have invented the following means. (First Means) The first means of the present invention is the multilayer piezoelectric actuator according to claim 1. In this means, ring-shaped piezoelectric deformable elements (bimorphs or unimorphs) each having a through hole formed in the central portion are laminated, each outer peripheral portion is formed by an outer peripheral connecting member, and each inner peripheral portion is formed by an inner peripheral connecting member. But,
Connected to each other. And the outer periphery connecting member or the inner periphery
The connecting member is made of a conductive material, and
It is electrically connected to the electrode of the electric plate.
【００１０】それゆえ、上記貫通孔により、中央部に円
筒状の光路用の空間が確保されているので、単一の積層
型圧電アクチュエータで可変焦点レンズを駆動すること
ができる。この際、積層型圧電アクチュエータをレンズ
と同軸に配設することができるので、レンズの全周囲に
均等に発生力をかけることができ、レンズに非回転対称
な歪みが生じることがない。Therefore, since the space for the cylindrical optical path is secured in the central portion by the through hole, the variable focus lens can be driven by a single laminated piezoelectric actuator. At this time, since the laminated piezoelectric actuator can be arranged coaxially with the lens, the generated force can be uniformly applied to the entire circumference of the lens, and the lens does not have non-rotationally symmetric distortion.
【００１１】また、外周連結部材および内周連結部材に
より、発生力は各圧電変形素子の総和になるので、発生
力の必要に応じて圧電変形素子を積層すれば、十分な発
生力が得られる。また、発生力が強く、ストローク（変
位）が比較的小さいので、可変焦点レンズの高速駆動に
も適している。さらに、単一の積層型圧電アクチュエー
タをレンズと同軸に配設することができるので、一つの
積層型圧電アクチュエータの倍程度の体積で、可変焦点
レンズ装置全体をコンパクトかつ軽量にまとめることが
できる。さらに、単一の積層型圧電アクチュエータであ
るので、部品点数も少なくて済み、信頼性が向上するう
えにコストダウンにもなる。また、積層された圧電変形
素子のうち一枚に不具合があっても、積層型圧電アクチ
ュエータ全体の発生力は少し減少するだけで非対称性は
生じないので、レンズに歪みが生じることがない。Further, since the generated force is the sum of the respective piezoelectric deformation elements due to the outer peripheral connection member and the inner peripheral connection member, a sufficient generated force can be obtained by stacking the piezoelectric deformation elements according to the required generation force. . Further, since the generated force is strong and the stroke (displacement) is relatively small, it is suitable for high speed driving of the variable focus lens. Furthermore, since a single laminated piezoelectric actuator can be arranged coaxially with the lens, the entire variable focus lens device can be compact and lightweight with a volume about twice that of one laminated piezoelectric actuator. Further, since it is a single laminated piezoelectric actuator, the number of parts can be small, the reliability is improved, and the cost is reduced. Further, even if one of the laminated piezoelectric deformation elements has a defect, the generated force of the entire laminated piezoelectric actuator is slightly reduced and asymmetry does not occur, so that the lens is not distorted.
【００１２】したがって、本手段を可変焦点レンズ装置
に採用すれば、同装置のレンズを光学的な歪みが少ない
状態で高速駆動できるだけではなく、同装置を小型化、
高信頼性化および低廉化することができるという効果が
ある。すなわち、本手段によれば、小型軽量の可変焦点
レンズ装置に特に好適な積層型圧電アクチュエータを提
供することができる。Therefore, if this means is adopted in a variable focus lens device, not only can the lens of the device be driven at high speed with little optical distortion, but also the device can be made compact.
There is an effect that the reliability and the cost can be reduced. That is, according to the present means, it is possible to provide a laminated piezoelectric actuator particularly suitable for a small and lightweight variable focus lens device.
【００１３】本手段では、外周連結部材または内周連結
部材が導電性の材料からなり、各圧電変形素子の圧電板
の電極に導通しているので、その分、リード線等による
配線は不要となる。それゆえ、リード線配線の工数が低
減されコストダウンに貢献があるほか、断線等による導
通不良が起きる確率が減り信頼性が向上する。したがっ
て本手段によれば、さらに、製造コストが低減され、信
頼性が向上するという効果がある。 In this means, the outer peripheral connecting member or the inner peripheral connecting member is connected.
The piezoelectric plate of each piezoelectric deformation element, whose members are made of conductive material
Since it is electrically connected to the electrode of,
No wiring is required. Therefore, the lead wire wiring man-hour is low.
It contributes to the cost reduction as well as the reduction due to disconnection.
The probability of communication failure is reduced and reliability is improved. According to
By this means, the manufacturing cost is further reduced and the reliability is improved.
This has the effect of improving reliability.
【００１４】（第２手段） 本発明の第２手段は、請求項２記載の積層型圧電アクチ
ュエータである。本手段では、内周連結部材がパイプ材
で構成されているので、最も単純な構成で部品点数が少
なく組立が容易であり、破損しにくい。また、パイプ状
の内周連結部材の貫通孔を光路として使用する際、貫通
孔を形成している内周面が平滑であって埃等が溜まりに
くく、発生もしないので、本手段の内周連結部材は光路
の形成に好適である。 (Second Means) A second means of the present invention is a laminated piezoelectric actuator according to claim 2.
It is a player. In this means, the inner peripheral connecting member is a pipe material.
Since it is configured with, it has the simplest configuration and a small number of parts.
It is easy to assemble and does not easily break. Also, pipe shape
When using the through hole of the inner peripheral connecting member of
The inner surface forming the holes is smooth and dust is not collected.
The inner peripheral connecting member of this means does not generate an optical path.
Is suitable for the formation of
【００１５】したがって本手段によれば、前述の第１手
段の効果に加えて、組立が容易で工数が少なく低廉であ
るうえ、頑丈で歪みにくく、埃も発生しないので光路を
形成する部材として好適な内周部を持つ積層型圧電アク
チュエータを提供することができるという効果がある。 Therefore, according to this means, the above-mentioned first method is used.
In addition to the step effect, it is easy to assemble, has a small number of steps, and is inexpensive.
In addition, it is sturdy and resistant to distortion, and does not generate dust, so the optical path
A laminated piezoelectric actuator having an inner circumference suitable as a member to be formed.
There is an effect that a cheetah can be provided.
【００１６】（第３手段）
本発明の第３手段は、請求項３記載の可変焦点レンズ装
置である。本手段には、前述の積層型圧電アクチュエー
タと、その貫通孔に同軸に配設されている円盤状の透明
弾性膜と、同様の他の透明弾性膜または透明板である透
明封止部材とがあり、透明弾性膜または透明封止部材は
同アクチュエータに駆動される。また、透明弾性膜、透
明封止部材および容器で密閉空間が形成されており、同
密閉空間の中には透明な作動流体が封入されている。[0016] (third means) third means of the present invention is a variable focus lens according to claim 3, wherein. This means includes the above-mentioned laminated piezoelectric actuator, a disk-shaped transparent elastic film coaxially arranged in the through hole, and a similar transparent elastic film or a transparent sealing member which is a transparent plate. Yes, the transparent elastic film or the transparent sealing member is driven by the same actuator. Further, a closed space is formed by the transparent elastic film, the transparent sealing member and the container, and a transparent working fluid is enclosed in the closed space.
【００１７】それゆえ、積層型圧電アクチュエータに駆
動されて透明弾性膜または透明封止部材が変位すると、
内部空間に封入されている作動流体の圧力が変化し、透
明弾性膜を押圧ないし吸引して変形させる。透明弾性膜
は、透明封止部材および作動流体とで光学レンズを形成
しているので、透明弾性膜が突出したり陥没したりする
たびに同レンズの焦点面の位置は変動する。Therefore, when the transparent elastic film or the transparent sealing member is displaced by being driven by the laminated piezoelectric actuator,
The pressure of the working fluid enclosed in the internal space changes, and the transparent elastic film is pressed or sucked to be deformed. Since the transparent elastic film forms an optical lens with the transparent sealing member and the working fluid, the position of the focal plane of the lens changes each time the transparent elastic film projects or collapses.
【００１８】それゆえ、積層型圧電アクチュエータを高
速で往復駆動すれば、可変焦点レンズの焦点面の位置は
高速で変化する。その結果、本可変焦点レンズ装置で
は、様々な焦点深度に位置している被写体の形状が残像
現象により鮮明な像として残り、被写体に対する焦点深
度が極めて深い（広範囲な）焦点機能が発揮され、凹凸
の激しい被写体の全体をも鮮明な画像でとらえることが
可能になる。Therefore, when the laminated piezoelectric actuator is reciprocally driven at high speed, the position of the focal plane of the variable focus lens changes at high speed. As a result, in this varifocal lens device, the shapes of the subject located at various depths of focus remain as a clear image due to the afterimage phenomenon, and the depth of focus for the subject is extremely deep (wide range), which results in unevenness. It is possible to capture the entire subject with intense sharpness in a clear image.
【００１９】したがって本手段によれば、焦点深度が極
めて深い焦点機能を有する可変焦点レンズ装置が提供で
きるだけでなく、その駆動装置である積層型圧電アクチ
ュエータがもつ前述の各種の作用効果を発揮することが
できる。すなわち本手段によれば、可変焦点レンズを光
学的な歪みが少ない状態で高速駆動できるだけではな
く、可変焦点レンズ装置全体を小型化できるうえ、信頼
性の飛躍的な向上とコストダウンとが可能であるという
効果がある。Therefore, according to the present means, it is possible to provide not only a variable focus lens device having a focusing function with an extremely deep depth of focus, but also exhibiting the above-mentioned various effects of the laminated piezoelectric actuator which is the driving device thereof. You can That is, according to this means, not only can the varifocal lens be driven at high speed with little optical distortion, but also the varifocal lens device can be downsized, and the reliability can be dramatically improved and the cost can be reduced. There is an effect that there is.
【００２０】さらに本手段では、先行技術の可変焦点レ
ンズ装置で超小型化のボトルネックになっていた複数の
積層型圧電アクチュエータが、貫通孔が光路を兼ねる単
一の積層型圧電アクチュエータで置き換えられている。
したがって本手段によれば、積層型圧電アクチュエータ
の倍程度の体積に、可変焦点レンズ装置全体を超小型化
することが可能になるという効果がある。Further, in this means, a plurality of laminated piezoelectric actuators, which had been a bottleneck for miniaturization in the variable focus lens device of the prior art, are replaced by a single laminated piezoelectric actuator whose through hole also serves as an optical path. ing.
Therefore, according to the present means, there is an effect that it is possible to make the entire variable-focus lens device ultra-miniaturized in a volume about twice that of the laminated piezoelectric actuator.
【００２１】（第４手段）
本発明の第４手段は、請求項４記載の可変焦点レンズ装
置である。本手段では、透明封止部材は円盤状の透明板
で、積層型圧電アクチュエータのパイプ状の内周連結部
材に接合されており、内周連結部材を介して積層型圧電
アクチュエータによりその軸長方向に駆動される。ま
た、容器は、外周連結部材に接合されている外周部分を
有し中央に円形のレンズ孔が貫通しているリング部材
と、リング部材と透明板とを油密に接続しているリング
状の弾性膜とを有している。そして、透明弾性膜は、レ
ンズ孔の周囲のリング部材に全周が接合されている。[0021] (Fourth means) fourth means of the present invention is a variable focus lens according to claim 4, wherein. In this means, the transparent sealing member is a disk-shaped transparent plate, and is joined to the pipe-shaped inner peripheral connecting member of the laminated piezoelectric actuator, and the axial direction of the laminated piezoelectric actuator is fixed by the laminated piezoelectric actuator via the inner peripheral connecting member. Driven to. Further, the container has a ring member having an outer peripheral portion joined to the outer peripheral connecting member and having a circular lens hole penetrating through the center thereof, and a ring-like member that oil-tightly connects the ring member and the transparent plate. And an elastic film. The entire circumference of the transparent elastic film is joined to the ring member around the lens hole.
【００２２】積層型圧電アクチュエータが内周連結部材
を介して透明板を駆動すると、透明板とともにその周囲
の弾性膜の内周部も変位し、内部空間の容積を変えよう
とするので作動流体に圧力変動が生じる。この圧力変動
により、作動流体から透明弾性膜は押し引きされて、突
出したり陥没したりしてその曲率を変化させる。その結
果、透明板および透明弾性膜と両者の間に介在している
作動流体とによって形成されているレンズは、その焦点
面の位置を変化させる。When the laminated piezoelectric actuator drives the transparent plate via the inner peripheral connecting member, the inner peripheral portion of the elastic film around the transparent plate is displaced, and the volume of the internal space is changed. Pressure fluctuations occur. Due to this pressure fluctuation, the transparent elastic film is pushed and pulled from the working fluid, and it projects or collapses to change its curvature. As a result, the lens formed by the transparent plate and the transparent elastic film and the working fluid interposed therebetween changes the position of its focal plane.
【００２３】それゆえ、積層型圧電アクチュエータによ
り高速駆動されて激しく振動するのは、透明弾性膜より
も頑丈な透明板であり、同透明板は激しい振動等によっ
ても破損しにくい。また、透明弾性膜は、静止している
リング部材に全周囲が接合されているので、衝撃や加速
度が直接かからず、作動流体の圧力を介して変形するだ
けであるから、破損しにくい。Therefore, it is the transparent plate that is stronger than the transparent elastic film and vibrates violently when it is driven at high speed by the laminated piezoelectric actuator, and the transparent plate is not easily damaged even by violent vibration. Further, since the transparent elastic film is joined at its entire periphery to the stationary ring member, it is not directly subjected to impact or acceleration and is only deformed via the pressure of the working fluid, so that it is less likely to be damaged.
【００２４】（第５手段）
本発明の第５手段は、請求項５記載の可変焦点レンズ装
置である。本手段では、透明弾性膜を形成している材料
は石英ガラス（ＳｉＯ2 ）を含むガラスであるので、合
成樹脂等に比べて比較的硬度が高く、光学的な特性も良
好なうえ、化学的により安定であり、弾性率等の特性の
経年変化も温度等の環境による変化も少ない。また、ガ
ラス材料では、優れた透明度（光線の透過性）と適度な
弾性係数と良好な加工性とを備えた種類を選定できるの
で、ガラスは透明弾性膜の材料として好適である。[0024] (Fifth means) fifth means of the present invention is a variable focus lens according to claim 5, wherein. In this means, since the material forming the transparent elastic film is glass containing quartz glass (SiO 2 ), it has relatively high hardness as compared with synthetic resin and the like, and also has good optical characteristics and chemical properties. Is stable, and changes with time in characteristics such as elastic modulus and changes due to environment such as temperature are small. Further, as the glass material, it is possible to select a type having excellent transparency (transmission of light rays), an appropriate elastic coefficient and good workability, and therefore glass is suitable as a material for the transparent elastic film.
【００２５】したがって本手段によれば、前述の第３手
段の効果に加えて、透明弾性膜をより光学的に優れ力学
的にも化学的にも安定した材質で形成できるので、可変
焦点レンズ装置の性能が向上し、かつ、安定するという
効果がある。
（第６手段）
本発明の第６手段は、請求項６記載の可変焦点レンズ装
置である。Therefore, according to this means, in addition to the effect of the above-mentioned third means, the transparent elastic film can be formed of a material which is more optically excellent and is mechanically and chemically stable. Has the effect of improving and stabilizing the performance of. Sixth means (6 means) The present invention is a variable focus lens according to claim 6.
【００２６】本手段では、作動流体がシリコンオイルで
あるので、作動流体の透明度が高くまた化学的により安
定であり、粘性等の特性の経年変化も少なく温度等の環
境による変化も比較的少ない。また、透明弾性膜および
透明封止部材がガラス製であるとすると、シリコンオイ
ルの屈折率がガラスの屈折率に近いので、界面での反射
が少なくなり、より明晰な光学像が得られる。さらに、
シリコンオイルの成分を選定することにより、適正な粘
性を作動流体に持たせることができる。In this means, since the working fluid is silicone oil, the working fluid has a high transparency and is chemically more stable, and the characteristics such as viscosity are less likely to change over time, and the changes due to the environment such as temperature are relatively small. If the transparent elastic film and the transparent sealing member are made of glass, the refractive index of silicon oil is close to the refractive index of glass, so that the reflection at the interface is reduced and a clearer optical image is obtained. further,
By selecting the component of the silicone oil, the working fluid can have an appropriate viscosity.
【００２７】したがって本手段によれば、前述の第３手
段の効果に加えて、より明晰な光学像が安定して得られ
るという効果がある。
（第７手段）
本発明の第７手段は、請求項７記載の可変焦点レンズ装
置である。本手段では、積層型圧電アクチュエータは、
可変焦点レンズ装置の振動する構造全体の共振周波数に
て加振される。それゆえ、より少ない電力（ないし電
圧）を積層型圧電アクチュエータに印加するだけで、よ
り大きな振幅で透明弾性膜の形状を変化させることがで
き、焦点深度がいっそう深くなる。なお、共振周波数付
近で加振されてうなりを生じる場合には、粘度がより高
い作動流体を使用することにより、適正なダンピングを
生じてうなりを抑制することができる。Therefore, according to this means, in addition to the effect of the above-mentioned third means, there is an effect that a clearer optical image can be stably obtained. Seventh means (seventh aspect) The present invention is a variable focus lens according to claim 7 wherein. In this means, the laminated piezoelectric actuator is
The variable focus lens device is vibrated at the resonance frequency of the entire vibrating structure. Therefore, the shape of the transparent elastic film can be changed with a larger amplitude by only applying less electric power (or voltage) to the laminated piezoelectric actuator, and the depth of focus becomes deeper. When a beat is generated near the resonance frequency by vibrating, a working fluid having a higher viscosity is used, so that proper damping can be generated and the beat can be suppressed.
【００２８】したがって本手段によれば、前述の第３手
段の効果に加えて、より少ない消費電力で過熱等の不具
合を心配することなく、より深い焦点深度が得られると
いう効果がある。Therefore, according to this means, in addition to the effect of the third step described above, an effect that a deeper depth of focus can be obtained with less power consumption without worrying about problems such as overheating. There is.
【００２９】[0029]
（実施例の積層型圧電アクチュエータの構成）本発明の
一実施例としての積層型圧電アクチュエータＡは、図１
（ａ）〜（ｂ）に示すように、４枚の積層された圧電バ
イモルフ１と、各圧電バイモルフ１の外周部および内周
部をそれぞれ互いに連結している外周連結部材２および
内周連結部材３とから構成されている。すなわち、中央
部に貫通孔１０を有するバイモルフ１が４枚、同軸に積
層されており、その貫通孔１０に面する内周部にはパイ
プ状の内周連結部材３が、内周接合部材５を介してそれ
ぞれ接合されている。一方、各バイモルフ１の外周部に
は、６０度毎に配設されている６本の棒状の外周連結部
材２が、外周接合部材４を介してそれぞれ接合されてい
る。したがって、４枚の圧電バイモルフ１は、同軸で一
定間隔に積層されている。(Structure of Multilayer Piezoelectric Actuator of Embodiment) A multilayer piezoelectric actuator A as one embodiment of the present invention is shown in FIG.
As shown in (a) and (b), four laminated piezoelectric bimorphs 1, and an outer peripheral connecting member 2 and an inner peripheral connecting member that connect the outer peripheral portion and the inner peripheral portion of each piezoelectric bimorph 1 to each other. 3 and 3. That is, four bimorphs 1 each having a through hole 10 in the central portion are coaxially laminated, and a pipe-shaped inner peripheral connecting member 3 and an inner peripheral joining member 5 are provided on the inner peripheral portion facing the through hole 10. Are respectively joined via. On the other hand, to the outer peripheral portion of each bimorph 1, six rod-shaped outer peripheral connecting members 2 arranged at intervals of 60 degrees are respectively joined via outer peripheral joining members 4. Therefore, the four piezoelectric bimorphs 1 are coaxially stacked at regular intervals.
【００３０】各圧電バイモルフ１は、図２に示すよう
に、中央部に貫通孔１０を有するリング状の弾性板１１
と、弾性板１１の表裏両方の表面にそれぞれ接合されて
いるリング状の圧電板１２，１３とからなる。弾性板１
１は、バネ弾性を有するステンレス鋼製の薄板から形成
されており、圧電板１２，１３の共通電極をも兼ねてい
る。圧電板１２，１３は、それぞれ弾性板１１の表裏の
表面に接合されている圧電材料ＰＺＴからなる薄板であ
り、同圧電材料の分極方向Ｐは軸長方向の同じ方向へ向
いている。また、圧電板１２，１３の表面には、銀の微
細粉末を主成分とする導電ペーストが印刷されて焼成さ
れた膜状の表面電極１４，１５が形成されている。As shown in FIG. 2, each piezoelectric bimorph 1 has a ring-shaped elastic plate 11 having a through hole 10 in the center thereof.
And ring-shaped piezoelectric plates 12 and 13 bonded to both the front and back surfaces of the elastic plate 11, respectively. Elastic plate 1
1 is formed of a stainless steel thin plate having spring elasticity, and also serves as a common electrode of the piezoelectric plates 12 and 13. The piezoelectric plates 12 and 13 are thin plates made of a piezoelectric material PZT bonded to the front and back surfaces of the elastic plate 11, respectively, and the polarization directions P of the piezoelectric materials are oriented in the same axial direction. On the surfaces of the piezoelectric plates 12 and 13, film-shaped surface electrodes 14 and 15 formed by printing and firing a conductive paste containing fine silver powder as a main component are formed.
【００３１】外周連結部材２は、再び図１（ａ）〜
（ｂ）に示すように、ステンレス鋼からなる細い棒状部
材である。そして外周連結部材２は、同じくステンレス
鋼製のクリップ状の外周接続部材４を介して、圧電バイ
モルフ１の弾性板１１の外周部に、銀鑞付けまたはレー
ザ溶接で接合されている。それゆえ、外周連結部材２
は、弾性板１１に電気的に導通している。The outer peripheral connecting member 2 is again shown in FIGS.
As shown in (b), it is a thin rod-shaped member made of stainless steel. The outer peripheral connecting member 2 is joined to the outer peripheral portion of the elastic plate 11 of the piezoelectric bimorph 1 by silver brazing or laser welding through a clip-shaped outer peripheral connecting member 4 which is also made of stainless steel. Therefore, the outer peripheral connecting member 2
Are electrically connected to the elastic plate 11.
【００３２】内周連結部材３は、ステンレス鋼製の薄板
からなるパイプ材であり、図３に示すように、内周接続
部材５を介して圧電バイモルフ１の内周部に接合されて
いる。すなわち、内周連結部材３の外周面は、絶縁リン
グ５２を介して圧電バイモルフ１の内周面に当接してお
り、圧電バイモルフ１の弾性板１１と内周連結部材３と
は互いに絶縁されている。圧電バイモルフ１の表裏両側
からは、それぞれキャップ状の導電スペーサ部材５１が
当接しており、各圧電バイモルフ１の内周部は、それぞ
れ二つの対向する導電スペーサ部材５１によって挟持さ
れている。The inner peripheral connecting member 3 is a pipe material made of a stainless steel thin plate, and is joined to the inner peripheral portion of the piezoelectric bimorph 1 via an inner peripheral connecting member 5, as shown in FIG. That is, the outer peripheral surface of the inner peripheral connecting member 3 is in contact with the inner peripheral surface of the piezoelectric bimorph 1 via the insulating ring 52, and the elastic plate 11 of the piezoelectric bimorph 1 and the inner peripheral connecting member 3 are insulated from each other. There is. Cap-shaped conductive spacer members 51 are in contact with the piezoelectric bimorph 1 from both front and back sides, and the inner peripheral portion of each piezoelectric bimorph 1 is sandwiched by two facing conductive spacer members 51.
【００３３】導電スペーサ部材５１は、その内周面で内
周連結部材３の外周面に銀鑞付けまたはレーザ溶接で接
合されている。また、導電スペーサ部材５１は、それぞ
れ各圧電バイモルフ１の表面電極１４，１５に押圧力を
もって当接し、表面電極１４，１５に導通している。そ
れゆえ、内周連結部材３は、導電スペーサ部材５１を介
して各圧電バイモルフ１の表面電極１４，１５に導通し
ている。The conductive spacer member 51 has its inner peripheral surface joined to the outer peripheral surface of the inner peripheral connecting member 3 by silver brazing or laser welding. Further, the conductive spacer member 51 is brought into contact with the surface electrodes 14 and 15 of each piezoelectric bimorph 1 with a pressing force and is electrically connected to the surface electrodes 14 and 15. Therefore, the inner peripheral connecting member 3 is electrically connected to the surface electrodes 14 and 15 of each piezoelectric bimorph 1 through the conductive spacer member 51.
【００３４】（実施例の積層型圧電アクチュエータの作
用効果）本実施例の積層型圧電アクチュエータＡは、以
上のように構成されているので次のような作用および効
果を発揮する。第１に、図４に示すように、積層型圧電
アクチュエータＡに外周連結部材２および内周連結部材
３を介して電圧を印加すると、各圧電バイモルフ１が変
形して外周連結部材２と内周連結部材３との間に、軸長
方向の変位を生じる。同変位の方向は、印加電圧の極性
が反転すれば反転し、変位を生じるための発生力は所定
の電圧まではほぼ印加電圧に比例する。なお、外周連結
部材２および内周連結部材３により、変位は各圧電バイ
モルフ１の単体そのままであるが、発生力は積層されて
いる圧電バイモルフ１の枚数分である４倍になる。(Operation and Effect of the Multilayer Piezoelectric Actuator of the Embodiment) Since the multilayer piezoelectric actuator A of this embodiment is configured as described above, it exhibits the following operation and effect. First, as shown in FIG. 4, when a voltage is applied to the laminated piezoelectric actuator A through the outer peripheral connecting member 2 and the inner peripheral connecting member 3, each piezoelectric bimorph 1 is deformed and the outer peripheral connecting member 2 and the inner peripheral connecting member 2 are deformed. A displacement in the axial direction occurs between the connecting member 3 and the connecting member 3. The direction of the displacement is reversed if the polarity of the applied voltage is reversed, and the generated force for causing the displacement is almost proportional to the applied voltage up to a predetermined voltage. Note that, due to the outer peripheral connecting member 2 and the inner peripheral connecting member 3, the displacement remains as it is for each piezoelectric bimorph 1, but the generated force is quadrupled, which is the number of laminated piezoelectric bimorphs 1.
【００３５】したがって、積層型圧電アクチュエータＡ
によれば、発生力が強いばかりではなく、ストローク
（変位）が比較的小さいので高速で往復駆動することが
でき、可変焦点レンズＬ（図５参照）の駆動に好適であ
るという効果がある。なお、ストロークが比較的小さい
とは言っても、可変焦点レンズＬを駆動するのに十分な
ストロークは確保されている。Therefore, the laminated piezoelectric actuator A
According to the method, not only the generated force is strong, but also the stroke (displacement) is relatively small, so that reciprocal driving can be performed at high speed, which is suitable for driving the varifocal lens L (see FIG. 5). Although the stroke is comparatively small, a sufficient stroke for driving the variable focus lens L is secured.
【００３６】第２に、積層型圧電アクチュエータＡの軸
心回りの中央部には、パイプ状の内周連結部材３の内周
面により貫通孔１０が形成されており、中央部に円筒状
の光路用の空間が確保されている。それゆえ、単一の積
層型圧電アクチュエータＡで貫通孔１０を光路とするこ
とにより、後述の可変焦点レンズＬを駆動することがで
きる。この際、積層型圧電アクチュエータＡをレンズＬ
と同軸に配設することができるので、レンズＬに回転対
称に均等な発生力をかけることができ、積層型圧電アク
チュエータＡによれば、レンズＬに非回転対称な歪みが
生じることがないという効果がある。Secondly, a through hole 10 is formed by the inner peripheral surface of the pipe-shaped inner peripheral connecting member 3 in the central portion around the axis of the laminated piezoelectric actuator A, and the cylindrical portion is formed in the central portion. A space for the optical path is secured. Therefore, by using the single laminated piezoelectric actuator A with the through hole 10 as the optical path, it is possible to drive the variable focus lens L described later. At this time, the laminated piezoelectric actuator A is attached to the lens L.
Since the lens L can be disposed coaxially with the lens L, a uniform rotationally symmetrical generated force can be applied to the lens L, and the laminated piezoelectric actuator A does not cause non-rotationally symmetric distortion in the lens L. effective.
【００３７】第３に、単一の積層型圧電アクチュエータ
ＡをレンズＬと同軸に配設することができるので、可変
焦点レンズ装置Ｊ（図５参照）全体をコンパクトにまと
めることができる。すなわち、圧電バイモルフ１と同程
度の直径に可変焦点レンズ装置Ｊをまとめることがで
き、可変焦点レンズ装置Ｊの飛躍的な小型化が可能にな
るという効果がある。Third, since the single laminated piezoelectric actuator A can be arranged coaxially with the lens L, the whole variable focus lens device J (see FIG. 5) can be compactly assembled. That is, the varifocal lens device J can be put together in the same diameter as the piezoelectric bimorph 1, and the varifocal lens device J can be dramatically reduced in size.
【００３８】第４に、単一の積層型圧電アクチュエータ
Ａだけで可変焦点レンズＬを駆動できるので、部品点数
も少なくて済み、信頼性が向上するうえにコストダウン
にもなる。また、積層された圧電変形素子のうち一枚に
不具合があっても、積層型圧電アクチュエータ全体の発
生力は少し減少するだけで非対称性は生じないので、レ
ンズに歪みが生じることがなく、使用し続けることがで
きる。それゆえ、本実施例の積層型圧電アクチュエータ
Ａによれば、可変焦点レンズ装置Ｊの信頼性が極めて高
くなるという効果がある。Fourth, since the variable focus lens L can be driven by only a single laminated piezoelectric actuator A, the number of parts can be reduced, the reliability is improved and the cost is reduced. Moreover, even if one of the laminated piezoelectric deformation elements has a defect, the generated force of the entire laminated piezoelectric actuator is slightly reduced and asymmetry does not occur. Can continue to do. Therefore, according to the laminated piezoelectric actuator A of the present embodiment, there is an effect that the reliability of the variable focus lens device J becomes extremely high.
【００３９】第５に、積層型圧電アクチュエータＡの内
周連結部材３はパイプ材で構成されているので、最も単
純な構成で部品点数が少なく組立が容易であり、破損し
にくい。また、パイプ状の内周連結部材３の貫通孔１０
を光路として使用する際、貫通孔１０を形成している内
周面が平滑であって埃等が溜まりにくく、塵等が発生も
しない。Fifth, since the inner peripheral connecting member 3 of the laminated piezoelectric actuator A is made of a pipe material, it has the simplest structure, has a small number of parts, is easy to assemble, and is not easily damaged. Further, the through hole 10 of the pipe-shaped inner peripheral connecting member 3
When used as an optical path, the inner peripheral surface forming the through hole 10 is smooth, dust and the like are hard to collect, and the dust and the like are not generated.
【００４０】したがって、本実施例の積層型圧電アクチ
ュエータＡは、組立が容易で工数が少なく低廉であるう
え、頑丈で歪みにくく、埃も発生しないで光路を形成す
ることができるという効果がある。第６に、外周連結部
材２および内周連結部材３が導電性の材料からなり、各
圧電バイモルフ１の電極に導通しているので、その分、
リード線等による配線は不要となる。それゆえ、リード
線配線の工数が低減されコストダウンに貢献があるほ
か、断線等による導通不良が起きる確率が減り信頼性が
さらに向上する。Therefore, the laminated piezoelectric actuator A of this embodiment has the effects that it is easy to assemble, has a small number of steps, is inexpensive, and is sturdy and resistant to distortion, and an optical path can be formed without generating dust. Sixth, since the outer peripheral connecting member 2 and the inner peripheral connecting member 3 are made of a conductive material and are electrically connected to the electrodes of each piezoelectric bimorph 1,
Wiring using lead wires or the like is not necessary. Therefore, the number of man-hours for lead wire wiring is reduced, which contributes to cost reduction, and the probability of defective conduction due to disconnection or the like is reduced, and reliability is further improved.
【００４１】したがって本手段によれば、前述の第１手
段の効果に加えて、製造コストが低減され、信頼性がい
っそう向上するという効果がある。以上をまとめると、
積層型圧電アクチュエータＡを可変焦点レンズ装置Ｊに
採用すれば、同装置ＪのレンズＬを光学的な歪みが少な
い状態で高速駆動できるだけではなく、同装置を小型
化、高信頼性化および低廉化することができるという効
果がある。すなわち、本実施例によれば、小型軽量な可
変焦点レンズ装置Ｊに極めて好適な積層型圧電アクチュ
エータＡを提供することができる。Therefore, according to this means, in addition to the effect of the above-mentioned first means, there is an effect that the manufacturing cost is reduced and the reliability is further improved. To summarize the above,
If the laminated piezoelectric actuator A is used for the variable focus lens device J, not only can the lens L of the device J be driven at high speed with little optical distortion, but also the device can be made smaller, more reliable, and less expensive. There is an effect that can be done. That is, according to the present embodiment, it is possible to provide the laminated piezoelectric actuator A that is extremely suitable for the small and lightweight variable focus lens device J.
【００４２】（実施例の可変焦点レンズ装置の構成）一
実施例としての可変焦点レンズ装置は、図５に示すよう
に、前述の積層型圧電アクチュエータＡと、その一端に
接合されている可変焦点レンズＬとから構成されてい
る。可変焦点レンズＬは、中央部の表面に配設されてい
る円盤状の透明板６と、中央部の裏面に配設されている
透明弾性膜７と、両者６，７とで密閉された内部空間を
形成している容器８と、同内部空間に隙間なく封入され
ている作動流体９とから構成されている。さらに容器８
は、中空円筒状の外周部分を有し中央に円形のレンズ孔
８０が貫通しているリング部材８１と、リング部材８１
と透明板６とをそれぞれ油密に全周で接続しているリン
グ状の弾性膜８２と、リング状の接合部材８３とから構
成されている。(Structure of Variable Focus Lens Device of Example) As shown in FIG. 5, a variable focus lens device as an example has a laminated piezoelectric actuator A described above and a variable focus lens joined to one end thereof. It is composed of a lens L. The varifocal lens L has a disk-shaped transparent plate 6 disposed on the front surface of the central portion, a transparent elastic film 7 disposed on the rear surface of the central portion, and an interior hermetically sealed by both 6 and 7. It is composed of a container 8 that forms a space and a working fluid 9 that is sealed in the internal space without a gap. Further container 8
Is a ring member 81 having a hollow cylindrical outer peripheral portion and a circular lens hole 80 passing through in the center, and a ring member 81.
And a transparent plate 6 are oil-tightly connected over the entire circumference, respectively, and include a ring-shaped elastic film 82 and a ring-shaped joining member 83.
【００４３】接合部材８３は、弾性膜８２の内周部の表
面に全周で接着されており、積層型圧電アクチュエータ
Ａの内周連結部材３の一端と接合して連動する。また、
透明板６は透明封止部材であって、その外周部でリング
状の弾性膜８２の内周部に裏側から全周で接着されてお
り、弾性膜８２を介して接合部材８３と接合している。The joint member 83 is adhered to the entire surface of the inner peripheral portion of the elastic film 82, and joints with one end of the inner peripheral connecting member 3 of the laminated piezoelectric actuator A to interlock. Also,
The transparent plate 6 is a transparent sealing member, and is bonded at its outer peripheral portion to the inner peripheral portion of the ring-shaped elastic film 82 from the back side over the entire circumference, and is bonded to the bonding member 83 via the elastic film 82. There is.
【００４４】積層型圧電アクチュエータＡの貫通孔１０
と、可変焦点レンズＬの透明板６、透明弾性膜７、およ
び容器８のレンズ孔８０とは、いずれも互いに同軸に配
設されている。そして、透明板６および透明弾性膜７
と、両者６，７の間に介在する透明な作動流体９とで、
焦点が調整可能な光学レンズが構成されている。ここ
で、透明板６および透明弾性膜７はいずれも石英ガラス
製であり、作動流体９は所定の成分のシリコンオイルで
あって、上記三者６，７，９の屈折率はほぼ同一であ
る。Through hole 10 of laminated piezoelectric actuator A
The transparent plate 6 of the variable-focus lens L, the transparent elastic film 7, and the lens hole 80 of the container 8 are arranged coaxially with each other. Then, the transparent plate 6 and the transparent elastic film 7
And a transparent working fluid 9 interposed between the both 6,
An optical lens whose focus is adjustable is configured. Here, both the transparent plate 6 and the transparent elastic film 7 are made of quartz glass, the working fluid 9 is silicon oil having a predetermined component, and the refractive indices of the above three, 6, 7 and 9 are almost the same. .
【００４５】また、容器８の外形は回転対称形をしてお
り、容器８のリング部材８１の外周部には６０度毎に小
さな貫通孔が６箇所で形成されている。この貫通孔に
は、積層型圧電アクチュエータＡの一端に突出している
外周連結部材２が挿入されて接着固定されている。すな
わち、可変焦点レンズＬの外周部を形成している容器８
のリング部材８１の外周部には、積層型圧電アクチュエ
ータＡの外周連結部材２が接合されている。また、可変
焦点レンズＬの内周部を形成している透明板６には、容
器８の弾性膜８２および接合部材８３を介して、積層型
圧電アクチュエータＡの内周連結部材３の一端が接合さ
れている。それゆえ、容器８を固定して積層型圧電アク
チュエータＡに印加電圧を加えると、透明板６が内周連
結部材３に連動して、積層型圧電アクチュエータＡの軸
長方向に駆動される。Further, the outer shape of the container 8 is rotationally symmetrical, and small through holes are formed at six locations on the outer peripheral portion of the ring member 81 of the container 8 every 60 degrees. The outer peripheral connecting member 2 projecting from one end of the laminated piezoelectric actuator A is inserted into this through hole and fixed by adhesion. That is, the container 8 forming the outer peripheral portion of the variable focus lens L
The outer peripheral connecting member 2 of the laminated piezoelectric actuator A is joined to the outer peripheral portion of the ring member 81. Further, one end of the inner peripheral connecting member 3 of the laminated piezoelectric actuator A is bonded to the transparent plate 6 forming the inner peripheral portion of the variable focus lens L via the elastic film 82 of the container 8 and the bonding member 83. Has been done. Therefore, when the container 8 is fixed and an applied voltage is applied to the laminated piezoelectric actuator A, the transparent plate 6 is driven in the axial direction of the laminated piezoelectric actuator A in conjunction with the inner peripheral connecting member 3.
【００４６】（実施例の可変焦点レンズ装置の作用効
果）本実施例の可変焦点レンズ装置Ｊは、以上のように
構成されているので、前述のように積層型圧電アクチュ
エータＡに印加電圧が加わると、透明板６が連動して軸
長方向に変位する。すると、透明板６、透明弾性膜７お
よび容器８で形成されている密閉空間に封入されている
作動流体９の圧力が変動し、この圧力変動によって透明
弾性膜７の軸長方向の凹凸形状の曲率が変化する。その
結果、透明弾性膜７は透明板６および作動流体９とで光
学レンズを形成しているので、透明弾性膜７が突出した
り陥没したりするたびに、同レンズが形成する焦点面の
位置は変動する。(Operation and Effect of Variable Focus Lens Device of Example) Since the variable focus lens device J of this example is configured as described above, an applied voltage is applied to the laminated piezoelectric actuator A as described above. Then, the transparent plate 6 is interlocked and displaced in the axial direction. Then, the pressure of the working fluid 9 enclosed in the closed space formed by the transparent plate 6, the transparent elastic film 7 and the container 8 fluctuates, and due to this pressure fluctuation, the transparent elastic film 7 becomes uneven in the axial direction. The curvature changes. As a result, since the transparent elastic film 7 forms an optical lens with the transparent plate 6 and the working fluid 9, the position of the focal plane formed by the lens is changed every time the transparent elastic film 7 is projected or depressed. fluctuate.
【００４７】それゆえ、顕微鏡カメラの例で図６に示す
ように、積層型圧電アクチュエータＡを発振器およびア
ンプにより高速で往復駆動すれば、可変焦点レンズ装置
Ｊの焦点面Ｆは高速で振動変位する。すると、可変焦点
レンズ装置Ｊおよび接写レンズＬ’を通してＣＣＤカメ
ラＣで撮像された映像は、ディスプレイＤの画面上に映
し出されるが、様々な焦点深度に位置している被写体Ｏ
の形状が残像現象により鮮明な像として残る。その結
果、被写体Ｏに対する焦点深度が極めて深い（広範囲
な）焦点機能が発揮され、凹凸の激しい被写体Ｏの全体
をも鮮明な画像でとらえることが可能になる。Therefore, as shown in FIG. 6 in the example of the microscope camera, when the laminated piezoelectric actuator A is reciprocally driven at high speed by the oscillator and the amplifier, the focal plane F of the variable focus lens device J is oscillated and displaced at high speed. . Then, the image captured by the CCD camera C through the variable focus lens device J and the close-up lens L ′ is displayed on the screen of the display D, but the object O located at various focal depths is displayed.
The shape of is left as a clear image due to the afterimage phenomenon. As a result, a focusing function with an extremely deep (wide range) depth of focus for the object O is exerted, and it is possible to capture the entire object O with severe unevenness in a clear image.
【００４８】したがって本実施例の可変焦点レンズ装置
Ｊによれば、焦点深度が極めて深い焦点機能を発揮する
ことができるだけでなく、その駆動装置である積層型圧
電アクチュエータＡがもつ前述の各種の作用効果が発揮
される。すなわち、可変焦点レンズ装置Ｊによれば、可
変焦点レンズＬを光学的な歪みが少ない状態で高速駆動
できるだけではなく、可変焦点レンズ装置Ｊの全体を小
型化できるうえ、信頼性の飛躍的な向上とコストダウン
とが可能であるという効果がある。Therefore, according to the variable focus lens device J of the present embodiment, not only the focus function having an extremely deep depth of focus can be exhibited, but also the above-mentioned various functions of the laminated piezoelectric actuator A which is the driving device thereof. The effect is demonstrated. That is, according to the varifocal lens device J, not only can the varifocal lens L be driven at a high speed in a state where optical distortion is small, but the varifocal lens device J can be downsized as a whole, and the reliability can be dramatically improved. And, there is an effect that cost can be reduced.
【００４９】さらに、先行技術の可変焦点レンズ装置で
超小型化のボトルネックになっていた複数の積層型圧電
アクチュエータが、貫通孔１０が光路を兼ねる単一の積
層型圧電アクチュエータＡで置き換えられている。した
がって、本実施例によれば、可変焦点レンズ装置Ｊ全体
を超小型化することが可能になるという特筆すべき効果
もある。Further, a plurality of laminated piezoelectric actuators, which had been a bottleneck for miniaturization in the variable focus lens device of the prior art, were replaced by a single laminated piezoelectric actuator A whose through hole 10 also serves as an optical path. There is. Therefore, according to this embodiment, there is also a remarkable effect that the entire variable focus lens device J can be miniaturized.
【００５０】また、以下のいくつかの効果もある。第１
に、積層型圧電アクチュエータＡにより高速駆動されて
激しく振動するのは、透明弾性膜７よりも頑丈な透明板
６であり、透明封止部材としての透明板６は厚いので激
しい振動等によっても破損しにくい。また、透明弾性膜
７は、静止しているリング部材８１に全周囲が接合され
ているので、衝撃や加速度が直接かかることがなく、作
動流体９の圧力を介して変形するだけであるから、比較
的破損しにくい。したがって、本実施例の可変焦点レン
ズ装置Ｊは、より頑丈で長寿命であるという効果があ
る。There are also the following several effects. First
In addition, it is the transparent plate 6 that is stronger than the transparent elastic film 7 and vibrates violently when it is driven at high speed by the laminated piezoelectric actuator A. Since the transparent plate 6 as the transparent sealing member is thick, it is damaged even by violent vibrations. Hard to do. Further, since the transparent elastic film 7 is joined to the stationary ring member 81 all around, it is not directly subjected to impact or acceleration, and is only deformed via the pressure of the working fluid 9. It is relatively hard to break. Therefore, the variable focus lens device J of the present embodiment has the effects of being more robust and having a longer life.
【００５１】第２に、透明弾性膜７を形成している材料
は石英ガラス（ＳｉＯ2 ）であるので、合成樹脂等に比
べて比較的硬度が高く、光学的な特性も良好なうえ、化
学的により安定であり、弾性率等の特性の経年変化も温
度等の環境による変化も少ない。また、石英ガラスは、
優れた透明度（光線の透過性）と、適度な弾性係数と、
良好な加工性を備えているので、透明弾性膜の材料とし
て好適である。したがって、透明弾性膜７は、光学的に
優れ力学的にも化学的にも安定した材質で形成されてい
るので、可変焦点レンズ装置Ｊの性能が向上し、かつ、
安定するという効果がある。Second, since the material forming the transparent elastic film 7 is quartz glass (SiO 2 ), it is relatively harder than synthetic resin or the like and has good optical characteristics and chemical properties. It is more stable, and its characteristics such as elastic modulus do not change over time and changes due to the environment such as temperature are small. In addition, quartz glass is
Excellent transparency (transmissivity of light rays), moderate elastic coefficient,
Since it has good workability, it is suitable as a material for a transparent elastic film. Therefore, since the transparent elastic film 7 is formed of a material that is optically excellent and is mechanically and chemically stable, the performance of the variable focus lens device J is improved, and
It has the effect of stabilizing.
【００５２】第３に、作動流体９がシリコンオイルであ
るので、作動流体９の透明度が高くまた化学的により安
定であり、粘性等の特性の経年変化も少なく温度等の環
境による変化も比較的少ない。また、透明板６および透
明弾性膜７が石英ガラス製であり、シリコンオイルの屈
折率がガラスの屈折率に近いので、両者６，７と作動流
体９との各界面での反射が少なくなり、より明晰な光学
像が得られる。したがって、本実施例の可変焦点レンズ
装置Ｊによれば、より明晰な光学像が安定して得られる
という効果がある。Thirdly, since the working fluid 9 is silicone oil, the working fluid 9 has high transparency and is chemically more stable, and the characteristics such as viscosity do not change with time and the change due to the environment such as temperature is relatively small. Few. Further, since the transparent plate 6 and the transparent elastic film 7 are made of quartz glass, and the refractive index of silicon oil is close to the refractive index of glass, reflection at each interface between the both 6, 7 and the working fluid 9 is reduced, A clearer optical image can be obtained. Therefore, according to the variable focus lens device J of the present embodiment, there is an effect that a clearer optical image can be stably obtained.
【００５３】また、シリコンオイルの成分を選定するこ
とにより、適正な粘度を作動流体９に持たせることがで
き、積層型圧電アクチュエータＡからの可変焦点レンズ
Ｌへの加振に対するダンピングを適正に設定することが
できるという効果もある。
（実施例の可変焦点レンズ装置の駆動方法）本実施例の
可変焦点レンズ装置Ｊは、通常は、積層型圧電アクチュ
エータＡと透明板６、透明弾性膜７および作動流体９と
を含む構造全体の共振周波数よりも低い周波数の正弦波
で加振される。積層型圧電アクチュエータＡの駆動力が
十分に強力であるから、この駆動方法で通常は十分な焦
点深度が得られる。Further, by selecting the component of the silicone oil, the working fluid 9 can be given an appropriate viscosity, and the damping for the vibration from the laminated piezoelectric actuator A to the variable focus lens L is properly set. There is also an effect that can be done. (Driving Method of Variable Focus Lens Device of the Embodiment) The variable focus lens device J of the present embodiment generally has the entire structure including the laminated piezoelectric actuator A, the transparent plate 6, the transparent elastic film 7 and the working fluid 9. It is excited by a sine wave with a frequency lower than the resonance frequency. Since the driving force of the laminated piezoelectric actuator A is sufficiently strong, this driving method usually provides a sufficient depth of focus.
【００５４】しかし、さらに透明弾性膜８の振幅を拡大
してより深い焦点深度を得たい場合や、積層型圧電アク
チュエータＡでの消費電力を節減したり発熱を抑制した
りしたい場合には、別の駆動方法で駆動してこれらの要
求を満たすことができる。すなわち、積層型圧電アクチ
ュエータＡにかける印加電圧を可変焦点レンズ装置Ｊの
上記共振周波数にて印加し、共振周波数で加振すれば、
比較的低い印加電圧であっても共振現象によって大きな
振幅が得られる。それゆえ、より少ない電力を積層型圧
電アクチュエータＡに投入するだけで、より大きな振幅
で透明弾性膜７の形状を変化させることができ、焦点深
度がいっそう深くなる。なお、共振周波数付近で加振さ
れてうなりを生じる場合には、粘度がより高い作動流体
９を使用することにより、適正なダンピングを与えてう
なりを抑制することができる。However, when it is desired to further increase the amplitude of the transparent elastic film 8 to obtain a deeper depth of focus, or to reduce the power consumption or suppress the heat generation in the laminated piezoelectric actuator A, another method is used. It is possible to meet these requirements by driving with the driving method of That is, if the applied voltage applied to the laminated piezoelectric actuator A is applied at the resonance frequency of the variable focus lens device J and vibrated at the resonance frequency,
Even with a relatively low applied voltage, a large amplitude can be obtained by the resonance phenomenon. Therefore, the shape of the transparent elastic film 7 can be changed with a larger amplitude by only applying less power to the laminated piezoelectric actuator A, and the depth of focus becomes deeper. When a beat is generated near the resonance frequency by vibrating, the working fluid 9 having a higher viscosity is used to provide proper damping and suppress the beat.
【００５５】したがって、共振現象を利用するこの駆動
方法によれば、より少ない消費電力でありながら過熱等
の不具合を心配することなく、同じ可変焦点レンズ装置
Ｊでより深い焦点深度が得られるという効果がある。な
お、本実施例の可変焦点レンズ装置には、上記駆動方法
とはまた別に、印加電圧を所定値に調整して焦点面を固
定し、焦点深度の浅い画像を得る使用方法もある。Therefore, according to this driving method utilizing the resonance phenomenon, it is possible to obtain a deeper depth of focus with the same varifocal lens device J without worrying about problems such as overheating while consuming less power. There is. In addition to the driving method described above, the variable focus lens apparatus of the present embodiment may also be used in a method of adjusting the applied voltage to a predetermined value to fix the focal plane to obtain an image with a shallow depth of focus.
【００５６】（実施例の変形態様１）以上の本実施例に
対して、透明板６に替えて透明弾性膜７と同様の透明弾
性膜を透明封止部材としている構成の可変焦点レンズ装
置の変形態様が可能である。本変形態様では、作動流体
９を挟んで両側が透明弾性膜であるから、これらにより
形成される光学レンズの焦点面の変動幅は倍増する。し
たがって本変形態様によれば、前述の実施例の可変焦点
レンズ装置Ｊと比較して、焦点深度の深さが倍増すると
いう効果がある。(Variation 1 of Embodiment) In contrast to the present embodiment described above, a variable focus lens device having a structure in which a transparent elastic film similar to the transparent elastic film 7 is used as a transparent sealing member instead of the transparent plate 6 is used. Variations are possible. In this modification, since the both sides of the working fluid 9 are transparent elastic films, the fluctuation range of the focal plane of the optical lens formed by them is doubled. Therefore, according to this modification, there is an effect that the depth of focus is doubled as compared with the variable focus lens device J of the above-described embodiment.
【００５７】（実施例１の変形態様２）前述の実施例の
可変焦点レンズ装置Ｊに対して、透明板６と透明弾性膜
７とがその配置を逆転させている構成の変形態様も実施
可能である。本変形態様では、積層型圧電アクチュエー
タＡの内周連結部材３に連動して透明弾性膜７自体が振
動変位するので、透明弾性膜７付近の作動流体９がもつ
仮想質量の慣性作用により、透明弾性膜７の変形が増大
する傾向にある。また、内周連結部材３と連動する透明
弾性膜７は透明板６よりも軽量であるから、内周連結部
材３の振幅も増大する傾向にある。したがって本変形態
様によれば、前述の実施例の可変焦点レンズ装置Ｊと比
較して、焦点深度の深さがいくらか増大するという効果
がある。(Variation 2 of Embodiment 1) In addition to the variable focus lens device J of the above-described embodiment, a variation of a configuration in which the transparent plate 6 and the transparent elastic film 7 are reversed in arrangement is also possible. Is. In this modification, since the transparent elastic film 7 itself is vibratingly displaced in association with the inner peripheral connecting member 3 of the laminated piezoelectric actuator A, the transparent elastic film 7 is vibrated and displaced by the inertial action of the virtual mass of the working fluid 9 near the transparent elastic film 7. The deformation of the elastic film 7 tends to increase. Further, since the transparent elastic film 7 interlocking with the inner peripheral connecting member 3 is lighter than the transparent plate 6, the amplitude of the inner peripheral connecting member 3 tends to increase. Therefore, according to this modification, there is an effect that the depth of focus is somewhat increased as compared with the variable focus lens device J of the above-described embodiment.
【００５８】また本変形態様では、透明弾性膜７よりも
力学的強度が高い透明板６が外側（対物側）にあるの
で、被写体Ｏとの接触などの外力に対しても破損しにく
く、信頼性がいっそう向上するという効果がある。Further, in this modification, since the transparent plate 6 having a mechanical strength higher than that of the transparent elastic film 7 is on the outer side (object side), the transparent plate 6 is less likely to be damaged by an external force such as contact with the object O and is reliable. There is an effect that the sex is further improved.
【図１】 一実施例としての積層型圧電アクチュエータ
の構成を示す組図
（ａ）平面図 （ｂ）断面図（ｂ−ｂ断面）FIG. 1 is an assembly diagram (a) a plan view (b) a cross-sectional view (bb cross section) showing a structure of a laminated piezoelectric actuator as one embodiment.
【図２】 本実施例のバイモルフの構成を示す断面斜視
図FIG. 2 is a cross-sectional perspective view showing the configuration of the bimorph of this embodiment.
【図３】 本実施例の内周連結部材の周囲の接合部の構
成を示す断面図FIG. 3 is a cross-sectional view showing a configuration of a joint portion around an inner peripheral connecting member of the present embodiment.
【図４】 本実施例としての積層型圧電アクチュエータ
の作用を示す端面図FIG. 4 is an end view showing the operation of the laminated piezoelectric actuator according to the present embodiment.
【図５】 一実施例としての可変焦点レンズ装置の構成
を示す分解斜視図FIG. 5 is an exploded perspective view showing a configuration of a variable focus lens device as one embodiment.
【図６】 本実施例の可変焦点レンズ装置の作用を示す
模式図FIG. 6 is a schematic diagram showing the operation of the variable focus lens device of the present embodiment.
１：圧電バイモルフ １０：貫通孔
１１：弾性板 １２，１３：圧電板 １４，１５：
表面電極
２：外周連結部材（棒状の導電性部材）
３：内周連結部材（パイプ状の導電性部材）
４：外周接合部材（導電性クリップ）
５：内周接合部材
５１：導電スペーサ部材 ４：絶縁リング
６：透明板 ７：透明弾性膜
８：容器 ８０：レンズ孔
８１：リング部材 ８２：弾性膜（リング状） ８
３：接合部材
９：シリコンオイル（作動流体として）
Ｊ：可変焦点レンズ装置
Ａ：積層型圧電アクチュエータ Ｂ：電池 Ｓ：ス
イッチ
Ｌ：可変焦点レンズ
Ｌ’：接写レンズ Ｃ：ＣＣＤカメラ Ｄ：ディス
プレイ
Ｆ：焦点面 Ｏ：被写体1: Piezoelectric bimorph 10: Through hole 11: Elastic plate 12, 13: Piezoelectric plate 14, 15:
Surface electrode 2: Outer peripheral connecting member (bar-shaped conductive member) 3: Inner peripheral connecting member (pipe-shaped conductive member) 4: Outer peripheral joining member (conductive clip) 5: Inner peripheral joining member 51: Conductive spacer member 4 : Insulation ring 6: Transparent plate 7: Transparent elastic film 8: Container 80: Lens hole 81: Ring member 82: Elastic film (ring-shaped) 8
3: Joining member 9: Silicon oil (as a working fluid) J: Variable focus lens device A: Stacked piezoelectric actuator B: Battery S: Switch L: Variable focus lens L ': Close-up lens C: CCD camera D: Display F: Focal plane O: subject
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 41/09 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01L 41/09
Claims (7)
通孔を有するリング状の弾性板と、該弾性板の少なくと
も一方の表面に接合されている圧電材料からなる薄板で
ある圧電板とを有し、複数個が同軸に積層されているリ
ング状の圧電変形素子と、 各該圧電変形素子のそれぞれの外周部を互いに連結して
いる外周連結部材と、 各該圧電変形素子の該貫通孔を形成しているそれぞれの
内周部を互いに連結している内周連結部材と、 を有し、該外周連結部材および該内周連結部材にうち少
なくとも一方は、導電性の材料からなり、各該圧電変形
素子の該圧電板の電極に導通していることを特徴とする
積層型圧電アクチュエータ。1. A ring-shaped elastic plate made of a thin plate having spring elasticity and having a through hole in a central portion, and a piezoelectric plate which is a thin plate made of a piezoelectric material and is bonded to at least one surface of the elastic plate. A plurality of ring-shaped piezoelectric deformation elements that are coaxially stacked, an outer peripheral connecting member that connects the outer peripheral portions of the respective piezoelectric deformation elements to each other, and the through hole of each piezoelectric deformation element. have a, a circumferential coupling member inner are connected to each other each of the inner peripheral portion forming a small out to the outer peripheral coupling member and the inner circumferential connecting members
At least one is made of a conductive material, and each piezoelectric deformation
Multilayer piezoelectric actuator, characterized that you have conducted to the electrodes of the piezoelectric plate elements.
る、請求項１記載の積層型圧電アクチュエータ。2. The laminated piezoelectric actuator according to claim 1, wherein the inner peripheral connecting member is a pipe-shaped member.
に記載の積層型圧電アクチュエータと、 該積層型圧電アクチュエータの前記内周連結部材および
前記外周連結部材のうち一方に直接または間接的に接合
されており、前記貫通孔に対し同軸に配設されている円
盤状の透明弾性膜と、 該透明弾性膜と対向して配設され該内周連結部材および
該外周連結部材のうち他方に直接または間接的に接合さ
れており、前記貫通孔に対し同軸に配設されている、円
盤状の他の透明弾性膜と透明板とのうち一方である透明
封止部材と、 該透明弾性膜および該透明封止部材とで密閉空間を形成
している容器と、 該密閉空間に封入されている透明な作動流体と、 を有することを特徴とする、可変焦点レンズ装置。Wherein one directly or indirectly of claim 1 to a multilayer piezoelectric actuator according to any one of claims 2, wherein the inner coupling member and the outer peripheral coupling member of the laminated piezoelectric actuator A disk-shaped transparent elastic film that is joined to the through hole and is coaxial with the through hole, and the other of the inner peripheral connecting member and the outer peripheral connecting member that is disposed so as to face the transparent elastic film. A transparent sealing member which is directly or indirectly joined to the through hole and is coaxial with the through hole, and which is one of a disk-shaped transparent elastic film and a transparent plate, and the transparent elastic member. A varifocal lens device comprising: a container forming a closed space with the film and the transparent sealing member; and a transparent working fluid sealed in the closed space.
型圧電アクチュエータの前記内周連結部材に接合されて
該積層型圧電アクチュエータの軸長方向に駆動される円
盤状の前記透明板であり、 前記容器は、前記外周連結部材に接合されている外周部
分を有し中央に円形のレンズ孔が貫通しているリング部
材と、該リング部材と該透明板とを油密に接続している
リング状の弾性膜とを有し、 前記透明弾性膜は、該レンズ孔の周囲の該リング部材に
全周が接合されている、請求項３記載の可変焦点レンズ
装置。4. The disk-shaped transparent plate, wherein the transparent sealing member is joined to the inner peripheral connecting member of the laminated piezoelectric actuator according to claim 2 and is driven in the axial direction of the laminated piezoelectric actuator. The container has a ring member having an outer peripheral portion joined to the outer peripheral connecting member and having a circular lens hole penetrating through the center thereof, and the ring member and the transparent plate are oil-tightly connected to each other. 4. The variable focus lens device according to claim 3 , further comprising a ring-shaped elastic film, wherein the transparent elastic film is entirely bonded to the ring member around the lens hole.
ガラスを含むガラスである、請求項３記載の可変焦点レ
ンズ装置。5. The variable focus lens device according to claim 3 , wherein the material forming the transparent elastic film is glass containing quartz glass.
求項３記載の可変焦点レンズ装置。6. The variable focus lens device according to claim 3 , wherein the working fluid is silicone oil.
型圧電アクチュエータと前記作動流体、前記透明弾性膜
および前記透明封止部材とを含む構造全体の共振周波数
にて加振される、請求項３記載の可変焦点レンズ装置。Wherein said laminated piezoelectric actuators, laminated type piezoelectric actuator and the working fluid is vibrated at the resonance frequency of the whole structure including the said transparent elastic film and the transparent sealing member, according to claim 3 The variable focus lens device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29678096A JP3400270B2 (en) | 1996-11-08 | 1996-11-08 | Laminated piezoelectric actuator and variable focus lens device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29678096A JP3400270B2 (en) | 1996-11-08 | 1996-11-08 | Laminated piezoelectric actuator and variable focus lens device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10144975A JPH10144975A (en) | 1998-05-29 |
| JP3400270B2 true JP3400270B2 (en) | 2003-04-28 |
Family
ID=17838045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29678096A Expired - Fee Related JP3400270B2 (en) | 1996-11-08 | 1996-11-08 | Laminated piezoelectric actuator and variable focus lens device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3400270B2 (en) |
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| Publication number | Publication date |
|---|---|
| JPH10144975A (en) | 1998-05-29 |
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