JP2014159029A - Ultraviolet lamp and ultraviolet irradiation apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce an affection of ultraviolet irradiated from a neighboring lamp tube to an ultraviolet lamp.SOLUTION: An ultraviolet lamp is the ultraviolet lamp in which two or more emission tube parts are disposed in a parallel arrangement, when a coordinate axis is regulated that a parallel direction of these two or more ultraviolet lamps is an x direction, an irradiation direction of each ultraviolet lamp is a -y direction, an axial direction of each ultraviolet lamp is a z direction, each ultraviolet lamp includes a pair of light-shielding films that are formed along an external surface at a part of a lamp tube that counters a neighboring ultraviolet lamp, and a range that forms the light-shielding film is made the range in which a light source of the neighboring ultraviolet lamp is regarded as a point light source being in a lamp center, and the point light source of the neighboring ultraviolet lamp cannot be viewed from any place of each ultraviolet lamp tube.

Description

  The present invention relates to an ultraviolet lamp and an ultraviolet irradiation device.

  One of the uses of ultraviolet lamps is in the manufacturing process of FPD (Flat Panel Display). For example, an FPD color liquid crystal substrate is manufactured by laminating a color filter film, an ITO film (Indium Tin Oxide) and the like on a glass substrate. An ultraviolet lamp is used for ultraviolet cleaning in these film forming processes.

  Ultraviolet lamps have been developed to increase the lamp load and increase the lamp illuminance in order to increase the manufacturing process line speed. Further, as shown in FIG. 1, in addition to the conventional straight tube type (I-shaped) lamp 10 (FIG. 1A), a U-shaped lamp is used to improve the irradiation efficiency per lamp. 12 (FIG. 1B), an N-shaped lamp (not shown), and an M-shaped lamp 14 (FIG. 1C) have been developed. 1A and 1C, the upper part shows a front view of the lamp, the middle part shows a sectional view in the axial direction of the lamp tube, and the lower part shows the irradiation direction (white arrow) of the lamp tube. For ease of explanation, the coordinate axis is defined, the parallel direction of the plurality of lamps is the X direction, the lamp irradiation direction is the -Y direction, and the lamp axis direction is the Z direction from the top of the drawing to the plane of the drawing.

  Furthermore, as shown in FIG. 2, the irradiation apparatus is used in such a manner that any one of these lamps or any combination thereof can be arranged to perform surface irradiation. At this time, in order to increase the ultraviolet illuminance, the plurality of lamps are arranged in parallel at a high density by narrowing the interval between the arc tubes. FIG. 2 is a plan view of the irradiation device 16-1 in which a plurality of I-shaped lamps are arranged in parallel as seen from the irradiated surface, the middle is a sectional view in the lamp tube axial direction of the irradiation device, and the lower is an FPD. The irradiated object (for example, color liquid crystal substrate) 24 and the irradiation direction (white arrow) carried on the carrying roller 18 in a manufacturing process such as the above are schematically shown.

  Conventionally, lamp life has been mainly caused by lamp burnout (spot failure) or lamp illuminance falling below a predetermined value (blackening phenomenon). However, the lifetime performance of maintaining lighting and maintaining illuminance has dramatically increased due to various technological developments related to the extension of the lifetime (for example, the formation of a protective film on the inner surface of the arc tube and the application of a sufficient amount of emitter to the electrode). It has improved.

Japanese Laid-Open Patent Publication No. 03-93144, “Original Lighting Device” (published on April 18, 1991) Japanese Patent Application Laid-Open No. 2002-131841 “Light Source Device” (published on May 09, 2002) In Patent Document 1, a light shielding film is attached to the outer peripheral surface of each fluorescent lamp except for each opening. The purpose of applying the light shielding film is that, in the document illumination device, a part of the light output from each aperture of the adjacent lamps is reflected on the outer peripheral surface, stray light is generated, and the reading accuracy of the optical sensor is lowered. This is to solve the problem. Therefore, a light shielding film is deposited on the outer peripheral surface of each fluorescent lamp except for each opening to prevent the generation of reflected light. However, Patent Document 1 has no description or suggestion regarding the problem of breakage of the lamp quartz tube disclosed in the present invention, the formation range of the light shielding film for solving this problem, and the like. In Patent Document 2, a light shielding wall is provided between adjacent lamps to block light transmitted through the reflector from entering the other lamp. The light shielding wall of Patent Document 2 completely blocks between adjacent lamps, and is different from the shielding object of the present invention.

  However, recently, due to the improvement of the above-mentioned life performance, a new problem has arisen that the quartz tube, which is a lamp arc tube, is damaged due to exposure to ultraviolet rays for a long time.

  Since the arrangement density of the lamp tubes is further increased in order to improve the illuminance of the lamp, the lamp tubes are brought closer to each other, and the lamp quartz tube is subjected to strong ultraviolet irradiation from the adjacent lamp tube. Further, in the U, N, and M-shaped lamps, the lamp tube portions are arranged in parallel even within one ultraviolet lamp. Therefore, the lamp quartz tube receives ultraviolet irradiation from the adjacent lamp in addition to ultraviolet irradiation from the inside of the lamp itself. Since it is impossible to avoid ultraviolet irradiation from the inside, it is necessary to reduce ultraviolet irradiation from the adjacent lamp as much as possible.

  Therefore, it is desired to develop a technique for reducing the influence of ultraviolet rays emitted from adjacent lamp tubes on the ultraviolet lamp.

  An object of the present invention is to provide an ultraviolet irradiation device that reduces the influence of ultraviolet rays emitted from lamp tube portions arranged in parallel with ultraviolet lamps and ultraviolet rays reflected by a reflector.

  It is another object of the present invention to provide an ultraviolet lamp in which the influence of ultraviolet rays emitted from lamp tube portions arranged in parallel and reflected by a reflector is reduced.

  In view of the above object, an ultraviolet irradiation apparatus according to the present invention is an ultraviolet irradiation apparatus in which a plurality of arc tube portions of an ultraviolet lamp are arranged in parallel, the coordinate axis being parallel to the plurality of arc tube portions in the X direction, When the irradiation direction of the lamp is defined as the -Y direction and the axial direction of the arc tube portion of the ultraviolet lamp is defined as the Z direction, a shield extending in the Z direction is provided between the arc tubes of adjacent ultraviolet lamps. The height in the −Y direction is such that the light source of the adjacent ultraviolet lamp is regarded as a point light source at the center of the lamp and the point light source of the adjacent ultraviolet lamp cannot be seen from any part of the arc tube of the ultraviolet lamp.

  Further, in the ultraviolet irradiation apparatus, the plurality of parallel arrangements means a state in which a plurality of lamps are arranged in parallel when the arc tube is a straight tube type ultraviolet lamp, and the arc tubes are U, N or M-shaped. In the case of a mold-shaped ultraviolet lamp, one or more lamps may be arranged in parallel.

  Furthermore, in the said ultraviolet irradiation device, it is further provided with a reflector in the Y direction of the plurality of ultraviolet lamps, and the shield is from the line connecting between the centers of two adjacent lamps from the reflector. It can be formed at a height Hs or more determined in accordance with the formula (1).

更に、上記紫外線照射装置では、前記遮蔽物は、少なくとも波長500ｎｍ以下の可視光及び紫外線を吸収する物質で形成することができる。

Further, in the ultraviolet irradiation apparatus, the shielding object can be formed of a substance that absorbs visible light and ultraviolet light having a wavelength of at most 500 nm or less.

  Further, in the ultraviolet irradiation apparatus, the shielding object may be formed of a metal plate such as stainless steel or a steatite ceramic mainly made of MgO.

  Furthermore, in the said ultraviolet irradiation device, the said shielding object may form the substance which shields an ultraviolet-ray and does not reflect on the surface of this shielding object.

  Furthermore, the ultraviolet lamp in which a plurality of arc tube portions according to the present invention are arranged in parallel has a coordinate axis, the parallel direction of the plurality of ultraviolet lamps in the X direction, the irradiation direction of each ultraviolet lamp in the -Y direction, and each ultraviolet lamp axis. When the direction is defined as the Z direction, each ultraviolet lamp has a pair of light shielding films formed along the outer surface in the portion of the lamp tube facing the adjacent ultraviolet lamp, and the range in which the light shielding film is formed is as follows. The light source of the adjacent ultraviolet lamp is regarded as a point light source at the center of the lamp, and the point light source of the adjacent ultraviolet lamp is set in a range where it cannot be visually recognized from any part of each ultraviolet lamp tube.

  Further, in the ultraviolet lamp, the plurality of parallel arrangements means a state in which a plurality of lamps are arranged in parallel when the arc tube is a straight tube type ultraviolet lamp, and the arc tubes are U, N or M-shaped. In the case of a shaped ultraviolet lamp, one or more lamps may be arranged in parallel.

  Further, in the ultraviolet lamp, the light shielding film may be formed in a range of 2 hy or more, which is twice the hy determined by the following equation (2), from the line connecting the centers of two adjacent lamps. Good.

更に、上記紫外線ランプでは、前記遮光膜は、隣接する２個のランプの中心の間を結ぶ線より、次式(3)によって決定されるｈｃの２倍の２ｈｃ以上の範囲に形成してもよい。

Further, in the ultraviolet lamp, the light shielding film may be formed in a range of 2 hc or more that is twice the hc determined by the following equation (3) from a line connecting the centers of two adjacent lamps. Good.

更に、上記紫外線ランプでは、前記遮光膜は、金属酸化物から成ってよい。

Furthermore, in the ultraviolet lamp, the light shielding film may be made of a metal oxide.

Furthermore, in the ultraviolet lamp, the light shielding film may be made of titanium oxide TiO ₂ , zinc oxide ZnO, or cerium oxide CeO ₂ .

Further, in the ultraviolet lamp described above, a light shielding film may be formed on the Y-direction light shielding film-unformed portion on the reflector side on the rear surface of the lamp among the pair of light shielding films.

  ADVANTAGE OF THE INVENTION According to this invention, the ultraviolet irradiation device which reduces the influence of the ultraviolet-ray radiated | emitted from the lamp tube part arrange | positioned in parallel of an ultraviolet lamp and the ultraviolet-ray reflected by a reflector can be provided.

  Furthermore, according to the present invention, it is possible to provide an ultraviolet lamp in which the influence of the ultraviolet rays emitted from the lamp tube portions arranged in parallel and the ultraviolet rays reflected by the reflector is reduced.

FIG. 1 is a diagram illustrating various lamp shapes. Here, FIG. 1 (A) shows a straight tube type (I-shaped) lamp, FIG. 1 (B) shows a U-shaped lamp, and FIG. 1 (C) shows an M-shaped lamp. Yes. FIG. 2 is a plan view of an irradiation device in which a plurality of I-shaped lamps are arranged in parallel as seen from the irradiated surface, the middle is a sectional view in the lamp tube axial direction of the irradiation device, and the lower is a manufacturing process of an FPD or the like. The irradiation object and the irradiation direction (outlined arrow) carried on the roller conveyance device in FIG. FIG. 3 is a diagram for explaining the first embodiment. Here, FIG. 3A shows an axial direction of the lamp tube in which two adjacent lamps among a plurality of parallel arranged ultraviolet lamps, a casing, and a shielding plate provided between the two adjacent lamps are provided. FIG. 3B is a partially enlarged view for explaining the positional relationship. FIG. 4 is a diagram for explaining the second embodiment. Here, FIG. 4A is a cross-sectional view perpendicular to the axial direction of two adjacent lamp tubes among a plurality of ultraviolet lamps arranged in parallel, and FIG. 4B explains the positional relationship. It is the elements on larger scale for doing. FIG. 5 is a diagram for explaining the third embodiment.

  Hereinafter, embodiments of an ultraviolet lamp and an ultraviolet irradiation device according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  The inventors of the present invention have realized the development of technology for reducing the influence of ultraviolet rays emitted from ultraviolet lamps arranged in parallel on the following two themes.

(1) Development of an "ultraviolet irradiation device" that does not receive ultraviolet radiation (radiation) from adjacent lamps and reflectors
(2) Development of “ultraviolet lamp” that does not receive ultraviolet radiation (radiation) from adjacent lamps and / or reflectors The following describes the first embodiment relating to (1) and the second and third embodiments relating to (2). Will be described in order.

[First embodiment: UV irradiation device that does not receive UV radiation (radiation) from adjacent lamps and adjacent reflectors]
The ultraviolet irradiation apparatus according to the first embodiment forms a shielding plate between adjacent arc tubes, and prevents the influence of ultraviolet radiation (radiation) from adjacent lamps.

  Further, in this ultraviolet irradiation device, the housing behind the lamp and the lamp are close to each other, so that the housing is formed of a non-reflecting material.

  This will be specifically described below. FIG. 3A shows a case in which a shielding plate 26 provided between two adjacent lamps L1 and L2, a casing 22-2 and two adjacent lamps among a plurality of ultraviolet lamps arranged in parallel. It is the figure shown with the cross section perpendicular | vertical to the axial direction (Z direction) of a pipe | tube.

  The lamps L1 and L2 are ultraviolet lamps. Any of I, U, N, or M shape may be sufficient. This is because, in the case of U, N, and M-shaped lamps, the lamp tube portions are arranged in parallel even within one ultraviolet lamp. The ultraviolet lamps L1 and L2 are generic names of lamps designed so that the luminous efficiency of ultraviolet rays is relatively high. Low pressure and high pressure mercury lamps, excimer lamps and the like are mainly used as ultraviolet lamps.

  Since the housing 22-2 and the lamps L1 and L2 are close to each other (that is, d is small), the housing 22-2 is formed of a non-reflecting material, thereby reducing the influence of reflected light. Therefore, the housing 22-2 needs to be formed of, for example, stainless steel having a low reflectance of light having a wavelength of 500 nm or less. In addition, when utilizing the reflected light from the housing | casing 22-2, the housing | casing 22-2 which serves also as a reflecting plate is formed with aluminum etc. with high reflectance of the light of the said wavelength range, and demonstrates in 3rd Embodiment. Thus, it is necessary to make a combination with an ultraviolet lamp that does not receive ultraviolet radiation from the adjacent lamp arc tube.

  The shielding plate 26 is a member that shields light rays, and is formed in a plate shape, for example, and supported by the housing 22-2. As described above, since the plurality of lamp tubes are arranged with high density, the distance between adjacent lamp arc tubes is very short. Therefore, if the shielding plate 26 reflects light rays (including ultraviolet rays), the reflected light returns to the lamp itself that emits the light rays, resulting in shortening the life of the lamp tube. Therefore, the shielding plate 26 needs to be formed of a material that shields light and does not reflect light (a material that absorbs at least visible light and ultraviolet light having a wavelength of 500 nm or less). The shielding plate 26 is made of, for example, a metal plate such as stainless steel or a ceramic such as steatite mainly made of MgO.

  The entire shielding plate 26 is not composed of such a material, but a material that shields and does not reflect such light rays may be formed on the surface of the shielding plate as a film or layer, and is fixed as a thin plate. May be.

  Here, the height of the shielding plate 26 becomes a problem. The function of the lamp is to efficiently irradiate an object to be irradiated (not shown) located in front of the irradiation direction, and the excessively long shielding plate 26 reduces the irradiation efficiency. That is, the height of the shielding plate 26 needs to be relatively low as long as a desired lamp life can be secured.

  Therefore, it is assumed that a light beam emitted from the adjacent arc tube L1 is a point light source S1 from the lamp center C1 when viewed in a cross-sectional view as shown in FIG. Then, the shielding plate 26 is formed in a range where the light beam from the point light source S1 of the adjacent lamp L1 does not directly enter the lamp quartz tube L2.

  Actually, the arc (light emission source) generated in the lamp arc tube has a constant thickness in the radial direction from the center C1. However, it is considered that the light emitted from the arc outer peripheral portion of the adjacent lamp tube L1 has a relatively large incident angle when entering the lamp tube L2, and most of the light is reflected. Therefore, although the light emission from the arc outer peripheral portion of the adjacent lamp tube L1 depends on the distance between the adjacent lamp light tubes, the influence on the deterioration of the quartz tube of the lamp L2 is considered to be less than the light emission from the lamp center portion. .

  Furthermore, in the ultraviolet irradiation device 16-2 in which the light beam emitted from the adjacent lamp tube L1 is assumed to be a point light source S1 from the lamp center C1, and the light is emitted from the outer periphery of the arc and the shielding plate 26 is formed, the lamp quartz tube This assumption is reasonable in practice if L2 is not damaged and the desired lamp life can be ensured. The lamp life confirmed by the prototype will be described later.

  FIG. 3B is a partially enlarged view illustrating the positional relationship of FIG. As shown in FIG. 3B, the height of the shielding plate 26 is determined by the following equation (4).

従って、遮蔽板２６は、隣接する２個のランプＬ１，Ｌ２の中心Ｃ１，Ｃ２の間を結ぶ線より、Ｙ方向高さＨｓ以上に形成すればよい。ランプＬ１以外の他のランプ管相互の間の遮蔽板に関しても同様である。

Therefore, the shielding plate 26 may be formed at a height Hs or more in the Y direction from a line connecting the centers C1 and C2 of the two adjacent lamps L1 and L2. The same applies to the shielding plate between the lamp tubes other than the lamp L1.

  That is, the −Y direction height of the shielding plate 26 is such that the light source of the adjacent ultraviolet lamp L1 is regarded as the point light source S1 located at the lamp center C1, and the point of the adjacent ultraviolet lamp L1 from any part of the ultraviolet lamp tube L2. The height of the light source S1 is not visible.

  The shape of the shielding plate 26 is not limited as long as the shielding function is obtained. For example, the shielding plate 26 may be formed of a member such as a bank instead of a plate shape.

[Second embodiment: UV lamp not receiving UV radiation from adjacent lamp]
In the ultraviolet lamp according to the second embodiment, a light-shielding film is formed on the outer surface of the quartz tube to shield the incidence of ultraviolet rays from adjacent lamps, thereby preventing the quartz tube from deteriorating. The second embodiment is different from the first embodiment in which the internal structure of the irradiation device 16-2 shown in FIG.

  This will be specifically described below. FIG. 4A is a cross-sectional view perpendicular to the axial direction (Z direction) of two adjacent lamp tubes L1 and L2 among a plurality of ultraviolet lamps arranged in parallel. Here, the influence of a support body (not shown) that is essentially behind the lamp is ignored.

  The lamps L1 and L2 are the same ultraviolet lamps as in the first embodiment.

The light shielding films 28L and 28R on the outer surface of the quartz tube of the lamp are made of oxide, and are selected from, for example, titanium oxide TiO ₂ , zinc oxide ZnO, cerium oxide CeO _{2 and the} like. The formation of the light shielding film is typically performed by a sol-gel method.

  Similarly, the light beam emitted from the adjacent arc tube L1 is assumed to be a point light source S1 from the lamp center C1. As seen in a cross-sectional view as shown in FIG. 4A (that is, in a two-dimensional study), the lamp quartz tube L1 falls within a range in which the light from the point light source S1 of the adjacent lamp L1 does not directly enter the lamp L2. The light shielding films 28L and 28R are formed on the outer periphery of the film.

  Here, the range in which the light shielding films 28L and 28R are formed becomes a problem. FIG. 4B is a partially enlarged view illustrating the positional relationship of FIG. Regarding the range of the light shielding film 28R formed on the outer surface of the lamp tube, the Y-direction length hy is determined by the following equation (5).

同様に、ランプ管Ｌ１に形成する遮光膜２８Ｒの範囲は、膜面の長さ（円周方向長さ）ｈｃでは次式(6)によって決定される。

Similarly, the range of the light shielding film 28R formed on the lamp tube L1 is determined by the following expression (6) in terms of the film surface length (circumferential length) hc.

従って、ランプ管Ｌ１の外表面に形成する遮光膜２８Ｒは、隣接ランプに対面する部分に、Ｙ方向長さ2ｈｙ又は円周方向長さ２ｈｃの範囲で形成すればよい。ランプＬ１以外の他のランプ管の遮光膜に関しても同様である。

Therefore, the light-shielding film 28R formed on the outer surface of the lamp tube L1 may be formed in the range of the Y-direction length 2hy or the circumferential-direction length 2hc in the portion facing the adjacent lamp. The same applies to the light shielding films of lamp tubes other than the lamp L1.

That is, the range in which the light shielding film 28 is formed is that the light source of the adjacent ultraviolet lamp L1 is regarded as the point light source S1 located at the lamp center C1, and the point light source S1 of the adjacent ultraviolet lamp L1 from any part of the ultraviolet lamp tube L2. Is in the invisible range,
[Third embodiment: UV lamp not receiving reflected light from reflector of irradiator]
The third embodiment is different from the second embodiment in that not only the ultraviolet radiation (radiation) from the adjacent lamp but also the reflected light from the reflector behind the adjacent and own lamps is not received. .

  Usually, in order to improve irradiation intensity, a plurality of lamps are arranged in parallel, and a reflector 22-3 also serving as a casing is arranged behind them. In order to shield the reflected light from the rear, a light shielding film is formed on the outer surface of the lamp tube facing the reflector 22-3.

  As shown in FIG. 4, there is a non-light-shielding portion n1 between the pair of light-shielding films 28R and 28L formed on the surface of the lamp tube described in the second embodiment. In the third embodiment, as shown in FIG. 5, a light shielding film 28M in which a light shielding film is also formed on the non-light shielding portion n1 is used. Thereby, the lamps L1 and L2 can shield the reflected light from the reflector 22-3 due to the light beams of the lamp lamps L2 and L1 adjacent thereto.

  The positions of the light shielding film ends P7 and P10 are determined in the same manner as in the second embodiment. The same applies to the light shielding films of lamp tubes other than the lamp L1.

[Lamp life confirmed by trial production]
In the first to third embodiments, it is assumed that the light emitted from the adjacent lamp tube is a point light source from the center of the lamp. In order to verify this assumption, the lamp life was confirmed by making a prototype for the first to third embodiments.

  Under the conventional high load (current supply 1 ampere or more), the lamp tube was damaged after 3,000 to 6,000 hours (4.2 to 8.3 months) of continuous lighting. Regarding the lamps according to the first to third embodiments, all the lamps were confirmed to have a lamp life of 18,000 hours (25 months) or more.

  Therefore, it can be said that the assumption that the light emitted from the adjacent lamp tube is regarded as a point light source from the center of the lamp is practically appropriate for the first to third embodiments.

[Others]
The embodiments of the ultraviolet lamp and the ultraviolet irradiation device according to the present invention have been described above, but these are examples and do not limit the present invention. Additions, deletions, changes, and improvements to this embodiment that can be easily made by those skilled in the art are within the scope of the present invention.

  The technical scope of the present invention is defined by the description of the appended claims.

10: I-shaped lamp, 12: U-shaped lamp, 14: M-shaped lamp, 16-1, 16-2: Irradiation device, ultraviolet irradiation device, 18: Transport roller, 22-1, 22-2: Housing , Reflector, 24: irradiated object, 26: shielding object, shielding plate,
L1, L2: lamp, lamp tube, C1, C2: center of lamp tube, S1, S2: point light source,

Claims (7)

An ultraviolet lamp having a plurality of arc tube portions arranged in parallel,
When the coordinate axis defines the parallel direction of the plurality of ultraviolet lamps as the X direction, the irradiation direction of each ultraviolet lamp as the -Y direction, and the respective ultraviolet lamp axis direction as the Z direction,
Each ultraviolet lamp includes a pair of light-shielding films formed along the outer surface on the portion of the lamp tube facing the adjacent ultraviolet lamp,
The range for forming the light-shielding film is a range in which the light source of the adjacent ultraviolet lamp is regarded as a point light source in the center of the lamp, and the point light source of the adjacent ultraviolet lamp is not visible from any part of each ultraviolet lamp tube. UV lamp. The ultraviolet lamp according to claim 1,
The plurality of parallel arrangements means a state where a plurality of arc tubes are arranged in parallel when the tube is a straight tube type ultraviolet lamp, and one tube when the arc tube is a U, N or M-shaped ultraviolet lamp. Ultraviolet lamps that are arranged in parallel. The ultraviolet lamp according to claim 1,
The light-shielding film is an ultraviolet lamp formed in a range of 2 hy or more, which is twice as long as hy determined by the following equation (2), from a line connecting the centers of two adjacent lamps.

The ultraviolet lamp according to claim 1,
The light shielding film is an ultraviolet lamp formed in a range of 2 hc or more, which is twice as long as hc determined by the following equation (3), from a line connecting the centers of two adjacent lamps.

The ultraviolet lamp according to claim 1,
The light shielding film is an ultraviolet lamp made of a metal oxide. The ultraviolet lamp according to claim 1,
The light shielding film is an ultraviolet lamp made of titanium oxide TiO ₂ , zinc oxide ZnO or cerium oxide CeO ₂ . The ultraviolet lamp according to claim 1,
An ultraviolet lamp in which a light shielding film is also formed on a Y-direction light shielding film-unformed portion on the reflector side on the back of the lamp, between the pair of light shielding films.

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