CN102540757A - Light irradiating device - Google Patents
Light irradiating device Download PDFInfo
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- CN102540757A CN102540757A CN2011103863502A CN201110386350A CN102540757A CN 102540757 A CN102540757 A CN 102540757A CN 2011103863502 A CN2011103863502 A CN 2011103863502A CN 201110386350 A CN201110386350 A CN 201110386350A CN 102540757 A CN102540757 A CN 102540757A
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0275—Photolithographic processes using lasers
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Abstract
Provided is a light irradiating device, capable of detecting the changes of illumination distribution to confirm the discharge lamp having experienced bad situations and the determination of the abnormal condition, confirming the normal movement state of the apparatus, and realizing the illumination homogenization according to the changes of the illumination distribution. In the light irradiating device which arranges the light source elements composed of the discharge lamps and reflectors and simultaneously lights the elements, and irradiates the rays from the light source elements to a light irradiating portion in the light irradiating area, a light diffuser plate is arranged for making the light from the light source elements be radicalized for radiation. Further provided is an optical sensor used for detecting the distribution of the light quantity of the spread scattered light reflected by the diffuser plate. The signals detected by the optical sensor are sent to an image processing unit. The image processing unit changes the illumination distribution upon the diffuser plate into the illumination distribution in the light irradiation area to be displayed upon the display portion, and the like. If the illumination of the specified lamp declines, then the lamp with declined illumination is confirmed for outputting alarms, or increasing the power supply for the lamp to compensate the changes of the light quantity distribution.
Description
Technical field
The present invention relates to a kind of light irradiation device; For example in manufacturing process of semiconductor element or liquid crystal display substrate or patterning phase-contrast film etc., use in order to form linear pattern; This light irradiation device will use a plurality of light source components of short arc discharge lamp to arrange and light simultaneously, carry out exposure-processed etc. in one direction; Possess the photodetector that can detect moment, particularly can show Illumination Distribution and the accumulative total light quantity distribution in the irradiation area based on the output of this photodetector and can make the light irradiation device of the Illumination Distribution homogenising of light from the Illumination Distribution of the light of a plurality of light source components radiation.
Background technology
For example; In the manufacturing of semiconductor element or liquid crystal display substrate or patterning phase-contrast film; Carry out exposure-processed in order to form linear pattern, in this exposure-processed, studied following technology; Promptly for through to shone thing on a large scale activation-energy-ray such as irradiation ultraviolet radiation improve production, and use the light irradiation device that possesses long arc type discharge lamp usually.
But, in long arc type discharge lamp, owing to be difficult to the light that irradiation is parallel to each other on the lamp length direction, so the problem of the higher pattern of resolution has taken place verily to obtain mask pattern.In addition, see that from the maximization of liquid crystal panel and the viewpoints such as raising of production efficiency the requirement of irradiation area large tracts of landization is arranged.
In the past, can discharge lamp be maximized and deal with large tracts of landization, but have problem on the manufacturing technology etc., further the maximization of the discharge lamp difficulty that becomes.
For such requirement, proposed to use small-sized short arc discharge lamp to arrange the light irradiation device of a plurality of light source components.
But; In such light irradiation device; Because each discharge lamp has individual difference aspect illumination and life-span; So be difficult to keep equably the illumination sustainment rate of each discharge lamp,, need carry out the monitoring of illumination and the Illumination Distribution (light quantity distribution) of each discharge lamp, keep illumination equably in order to ensure high reliability and the stable productivity made on the line.
Such, use short arc discharge lamp and arranged in the light irradiation device of a plurality of light source components; The method of illumination of measuring each discharge lamp is for example shown in figure 27, has proposed to turn back, to make light transmission department 103-a transmission and the method through illumination photometry device 107 measured of a part on the part that is opened in catoptron 103 after through integrator 102 stacks from the light (ultraviolet ray) of a plurality of light source portion 100 radiation of being made up of a plurality of discharge lamp 101-a and catoptron 101-b.
In order to measure the illumination of each light source cell 101, when light source portion 100 is turned off the light, measure the illumination of each light source cell, and illuminance information is recorded among the storing mechanism 106-b while light source cell 101 is turned off the light one by one.
Can measure the brightness value (patent documentation 1) of each light source cell 101 through this method.
But; In such method; Only measure from integrator 102 outgoing, based on the illumination of the synthetic light of a plurality of discharge lamp 101-a (in other words being with the Illumination Distribution equalization of integral body and the value that obtains); Correct Illumination Distribution in the rayed zone that can not obtain being brought by light irradiation device is so can not be applied in the light irradiation device that forms linear pattern.
In addition, in exposure-processed, even the situation of the illumination decrease of certain discharge lamp also just detects the illumination decrease of synthesizing light, so be not sure of unusual discharge lamp has taken place.
In addition, as the method that measuring illumination in the light irradiation device of having arranged a plurality of light source components using short arc discharge lamp distributes, known have a method shown in Figure 28.As shown in the drawing, optical sensor 115 is configured on the XYZ platform 117, while when measuring, make optical sensor 115 scanning measuring illumination on the direction that illuminator unit 111-a arranges.And,, can measure the Illumination Distribution (patent documentation 2) of lamp optical system 111 through the variation of measuring illumination.
In addition, known have through with each discharge lamp the illumination that each discharge lamp is measured by illumination photometry mechanism being set accordingly, detects the unusual methods such as illumination decrease of discharge lamp thus.
According to such method; For example through under the situation about decline in time in illumination because of long use, some discharge lamps; Can confirm to have taken place the discharge lamp of undesirable condition; But what measure through each illumination photometry mechanism is the illumination (from specific light source bright spot radiation and by the value of the privileged site reflection of catoptron) at certain privileged site place; Even following problem so take place in the correct Illumination Distribution in the rayed zone that the illumination photometry mechanism about configuration and lamp source equal number can not obtain being brought by light irradiation device.Promptly; If describe with reference to Fig. 7; Then for example is producing effectively and be out of shape etc. former thereby cause under the situation of phenomenon of the optical axis deviation that discharge lamp has taken place in some discharge lamps because of constituting effect on the electrode of discharge lamp; Squint (shift) to the rayed area side that is produced by the discharge lamp that is adjacent to this discharge lamp in rayed zone by this discharge lamp produces, actual Illumination Distribution becomes the curve that in Fig. 7, dots that kind.Can know by Fig. 7; The influence of illumination change that the discharge lamp of undesirable condition has taken place also occurs in the rayed zone that is produced by the discharge lamp that is adjacent to this discharge lamp; Though, also represent value than initial value decline or increase by the illumination that the illumination photometry mechanism corresponding with this discharge lamp measures so in the ultraviolet light quantity self of discharge lamp that for example should adjacency, do not change sometimes.But, in said method, owing in the position of the overlap-add region of measuring the light that each discharge lamp produces, do not have illumination photometry mechanism, so the ERST of such discharge lamp that can not judge rightly.Therefore, carry out based on the measurement result of each illumination photometry mechanism discharge lamp light control so that for example the illumination of discharge lamp increases or situation about descending under, have the Illumination Distribution uneven situation that becomes that makes on the contrary.
In addition; In the light irradiation device that short arc discharge lamp is arranged in one direction; Especially through with shone thing (workpiece) in the treatment process of handling with the direction relative scanning of the length direction quadrature in rayed zone; Even sometimes in for example very little zone if there is the part of illumination decrease that the uneven situation of strip also takes place, confirm that Illumination Distribution and accumulative total light quantity distribution under the tiny measurement spacing are important so spread all over the whole zone of length direction.
On the other hand; In having used the such purposes of long arc type dried discharge lamp, printed article; Since light from 1 electric arc produces, each angle of divergence greatly, from the light coincidence of the Width of broad etc.; So the change of locality does not in fact take place, so do not become problem in the past in the Illumination Distribution of length direction.Thus, in the discharge lamp of long arc type, as long as it is just passable about several places of its length direction, to obtain accumulative total light quantity data.But, in a plurality of light irradiation devices of arranging in one direction, only through as above-mentioned, about several places of length direction, obtaining accumulative total light quantity data and not enough with short arc discharge lamp.
In a plurality of light irradiation devices of arranging in one direction with the discharge lamp of short-arc type; In order to spread all over whole Illumination Distribution and the accumulative total light quantity distribution of confirming under the tiny measurement spacing of length direction regionally, also can consider a fairly large number of illumination photometry mechanism is disposed with connecting airtight.But; Not only cost increases in the case; And owing to there is the individual difference of the characteristic (temperature coefficient) of the degree of fouling of each photo detector and degradation speed that ultraviolet ray brings, the change of sensitivity when temperature rises, so also be difficult to continue the problem of carrying out stable Illumination Distribution measurement between long-term.
As above, to arrange on prescribed direction at a plurality of discharge lamps that will use and to set in the light irradiation device that forms in order to form linear pattern, detailed Illumination Distribution is measured becomes bigger technically problem for the first time.But actual conditions are not know and can detect the illumination of each discharge lamp and the method for Illumination Distribution with higher reliability.
Patent documentation 1: TOHKEMY 2010-034293 communique
Patent documentation 2: japanese kokai publication hei 10-284401 communique
In the measuring method of patent documentation 1, by the value after the light addition of a plurality of light source cells 101 of illumination photometry device 107 detections.Therefore, in order to measure the independently value of light source cell, when light source portion 100 is turned off the light, Yi Bian write down the change of illumination Yi Bian must singly light source cell be turned off the light.
When device work, the illumination of each illumination unit of energy measurement must not turned off the light the illuminator unit once spended time in measurement when measuring.In addition, in the method, in the optical system of using formation 2 secondary light sources such as integrator, be effective only.
In the method for patent documentation 2, under the state that lamp optical system 111 is lighted, through making optical sensor 115 scanning, the Illumination Distribution on can measured X YZ platform 117.
Thereby, when measuring, must substrate 116 be removed from XYZ platform 117.At substrate is under the situation of film like, can not easily extract, so when illumination photometry only limits to the substrate of film like changed etc.
Therefore, make device work during in can not measure, thereby the unusual control Illumination Distribution in can not pick-up unit work.
In addition, while in the method that 1 optical sensor 115 scanning is measured, the unusual spended time owing under the situation of measuring detailed Illumination Distribution, need increase measurement point (point) to count.In addition, in measurement, optical sensor is exposed under the high light of lighting source, so the temperature of optical sensor rises.Optical sensor Yin Wendu and measure change of sensitivity is so can not carry out the measurement of correct Illumination Distribution.
In order to measure correct Illumination Distribution, need optical sensor under identical temperature, to measure simultaneously.
In addition; Arranged using short arc discharge lamp under the situation of light irradiation device of a plurality of light source components; The reason of illumination decrease is not only the illumination decrease of other light source component, also has the situation that not have under the state of decline light source component arbitrarily depart from respect to its optical axis of other light sources element in illumination.
In the case, if recover and the current value of putting into discharge lamp is increased for the illumination that makes decline, then not only Illumination Distribution worsens, and the life-span that becomes discharge lamp descends or the reason of plant failure etc.
Therefore, hope is not only carried out the measurement of Illumination Distribution, is also grasped the change reason of illumination and can carry out suitable correspondence based on this reason based on measurement result.
Summary of the invention
The present invention is based on above-mentioned situation and makes; Purpose provides a kind of light irradiation device of on prescribed direction, arranging as light source and with a plurality of short arc discharge lamps; This light irradiation device can detect the change from the Illumination Distribution of the light of each light source component radiation together; And can judge and show discharge lamp that lightness descends etc., the confirming and unusual state of discharge lamp of undesirable condition taken place, can confirm the regular event state of device.Can realize the homogenising of illumination when in addition, Illumination Distribution produces change in the rayed zone.
Light irradiation device of the present invention is characterised in that; Possess: light outgoing portion; Have a plurality of light source components alignment arrangements and the light source component that obtains row in one direction, this light source component is made up of the discharge lamp of short-arc type and the reflection of light device that reflects from this discharge lamp that surrounds this discharge lamp configuration; And the photodetector array, detecting light quantity from the diffusion light of a plurality of measuring points, these a plurality of measuring points are from a plurality of measuring points in the light arrival zone of the light of each light source component.
In light irradiation device of the present invention, constitute, the diffusion light of above-mentioned measuring point via imaging optic element by above-mentioned photodetector array detection.
In addition, in light irradiation device of the present invention, constitute, diffuser plate is located on the light path of the light of above-mentioned smooth outgoing portion outgoing free to advance or retreatly, and the light quantity of the diffusion light on the light diffusingsurface of this diffuser plate is by above-mentioned photodetector array detection.
And then, in light irradiation device of the present invention, constitute, be provided with shutter part, this shutter part the time is positioned on the light path of the light of above-mentioned smooth outgoing portion outgoing and to the light from this light outgoing portion in action and carries out shading; Above-mentioned diffuser plate is located on the photoirradiated surface of this shutter part.
And then, in light irradiation device of the present invention, constitute, possess from the light optically focused of above-mentioned smooth outgoing portion optically focused parts for the wire of extending along an above-mentioned direction.
And then, in light irradiation device of the present invention, can constitute, possess the light reflection having been implemented to make from the wavelength coverage of the regulation in the light of above-mentioned smooth outgoing portion, make light transmissive wavelength beyond this wavelength coverage select the reflection part of coating; The light of the transmitted light after crossing this reflection part from the transmittance of above-mentioned smooth outgoing portion arrives on the zone and is provided with diffuser plate, from the diffusion light of this diffuser plate by above-mentioned photodetector array detection.
In the present invention; Arranging in one direction through the light source component that will constitute that makes by the discharge lamp of short-arc type and surround that this discharge lamp disposes and making it light simultaneously, and will in the rayed zone, carry out from the rayed of above-mentioned light source component in the light irradiation device of exposure-processed etc. from the reverberator of the light reflection of this discharge lamp; Be provided with the light that is configured in from the light of this light source component and arrive in the zone, make from the light diffusion of this light source component and the diffusion mechanism of radiation, and be provided with and be arranged with a plurality of light quantity testing agencies that are used for detecting by the photodetector of the light quantity (light intensity) of the diffusion scattered light of this diffusion mechanism reflection.
Above-mentioned light quantity testing agency accepts from above-mentioned light source component outgoing, by the diffusion scattered light of diffusion mechanism reflection, but might not correctly reflect the illumination of the position from the rayed zone that light shone of above-mentioned light source component outgoing to the incident angle of light quantity testing agency, the reflection characteristic of diffuser plate etc. according to light in the detected light quantity in the position of light quantity testing agency (light intensity).For example, even the scattered light of same intensity, with respect to the scattered light from the positive incident of light quantity testing agency, oblique incidence is measured as lower to the scattering of light light in the light quantity testing agency.
So; In the present invention, be provided with the detected light quantity in each position in above-mentioned light quantity testing agency and the illumination of position from the rayed zone that light shone of light source component outgoing are set up corresponding and the light quantity of the position in the light quantity testing agency is transformed to the mechanism of the signal that the illumination of the position in this rayed zone of expression changes.
Thus, the output through above-mentioned light quantity testing agency can access the signal that is equivalent to the Illumination Distribution in the rayed zone, can detect the change of Illumination Distribution.
In addition, illumination is the physical quantity of expression to the brightness of the light of irradiations such as rayed zone.For the photodetector of measuring, has limited size; For example rectangular photodetector is being configured to make under the parallel situation about measuring in long limit with throughput direction; The situation of other title addresses such as the also useful accumulative total of the amount of measuring light quantity; But in this manual, expression is expressed as illumination by the physical quantity general designation of the brightness of photodetector measurement.
The light quantity of the position in the above-mentioned light quantity testing agency is transformed to the Signal Processing of illumination change of the position in expression rayed zone, for example can as following, carries out.
Prepare the transformation ratio data of signal that the light quantity that is used for the position in the light quantity testing agency is transformed to the illumination of each position in the expression rayed zone in advance; Use this transformation ratio data; According to the light quantity of this diffusion scattered light of the position in the light quantity testing agency, the signal of the illumination of each position in represents rayed zone change.
The light quantity of the position the when discharge lamp that makes light source component row is lighted at first in the detected light quantity testing agency is preserved as benchmark light quantity data; According to light quantity and the said reference light quantity data of this diffusion scattered light of the position in the light quantity testing agency, the signal that the illumination of each position in the represents rayed zone changes.
Through output and show the change of detected like this Illumination Distribution, can keep watch on from the change of the Illumination Distribution of the light of a plurality of light source components radiation.In addition, when the change according to above-mentioned Illumination Distribution detects the illumination decrease from the light of specific light source component irradiation, increase, can compensate the decline of illumination through for example making the electric power that the discharge lamp of this light source component is supplied with.
As above-mentioned diffusion mechanism; Diffused component with light diffusion and reflection also can be set in the light path between above-mentioned light source component and the rayed zone; But want to make device work during in also detect under the situation of change of Illumination Distribution, also can utilize the mask that is located in the above-mentioned light path etc. as diffusion mechanism, or make the optical elements such as optically focused parts that are located in the above-mentioned light path for coated reflector, in the rear side of this coated reflector diffusion mechanism is set, makes light that transmission crosses coated reflector through diffusion mechanism reflection lead-in light amount detection machine structure.
Based on more than, in the present invention, as following, address the above problem.
(1) a kind of light irradiation device; Possess: light outgoing portion; Have a plurality of light source components alignment arrangements and the light source component that obtains row in one direction, this light source component is made up of the discharge lamp of short-arc type and the reflection of light device that reflects from this discharge lamp that surrounds this discharge lamp configuration; Diffusion mechanism, the light that is configured in from the light of each light source component arrives in the zone, makes light diffusion and radiation from this light source component; Light quantity testing agency, possess acceptance from the diffusion scattered light of this diffusion mechanism, and detect a plurality of photodetectors of light quantity of this diffusion scattered light at each position of accepting; And graphics processing unit; Handle the output of above-mentioned light quantity testing agency; Above-mentioned graphics processing unit possesses: conversion process portion; Each position in the above-mentioned light quantity testing agency and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up upright corresponding, and the light quantity of the position in the light quantity testing agency is transformed to the signal that the light quantity of the position in this rayed zone of expression changes; And output mechanism, the signal output of the light quantity change of each position in the expression rayed zone that will obtain by above-mentioned conversion process portion.
(2) in above-mentioned (1), the position foundation that above-mentioned graphics processing unit possesses the signal of the expression light quantity change that is obtained by above-mentioned conversion process portion and rayed zone is presented at the display process mechanism in the above-mentioned display unit accordingly.
(3) in above-mentioned (1) (2), above-mentioned light irradiation device possesses the supply unit of supplying power for the discharge tube lighting of each light source component that makes light irradiation device; Above-mentioned graphics processing unit also possesses: light quantity change MA monitoring agency, keep watch on signal by the light quantity change of above-mentioned conversion process portion each position that obtain, expression rayed zone; And supply power in the controlling organization, be used for controlling the electric power of each light source component being supplied with from above-mentioned supply unit; Above-mentioned light quantity change MA monitoring agency; When the light quantity of the input discharge lamp of specific light source component in light source component that changes through the light quantity of representing each position that above-mentioned rayed is regional descends; Control above-mentioned supply unit through above-mentioned supply power in the controlling organization; The electric power of the discharge lamp supply that above-mentioned light quantity is descended is increased, the light quantity of this discharge lamp is increased.
(4) in above-mentioned (1) (2) (3); Above-mentioned graphics processing unit has the transformation ratio of preserving memory of data, and these transformation ratio data are used for the light quantity of the position in the above-mentioned light quantity testing agency is transformed to the signal of the light quantity of each position in this rayed zone of expression; The transformation ratio data are read in from above-mentioned storer in above-mentioned conversion process portion; According to the light quantity of this diffusion scattered light at each position in the above-mentioned light quantity testing agency be kept at the transformation ratio data in the above-mentioned storer, the signal of the light quantity change of each position in the represents rayed zone.
(5) in above-mentioned (1) (2) (3), above-mentioned graphics processing unit has the storer that the light quantity that detects the position in the light quantity testing agency when discharge lamp of the light source component row that make this light irradiation device lighted is at first preserved as benchmark light quantity data; Above-mentioned conversion process portion is according to the light quantity of this diffusion scattered light at each position in the above-mentioned light quantity testing agency and be kept at the benchmark light quantity data in the above-mentioned storer, the signal of the light quantity change of each position in the represents rayed zone.
According to light irradiation device of the present invention, can access following effect.
(1) possess each the structure of photodetector array of light quantity of diffusion light that the light that detects each discharge lamp arrives a plurality of measuring points in the zone through making, by this photodetector array obtain light that light outgoing portion brings arrive the light source component in the zone orientation Illumination Distribution and accumulative total light quantity distribution and about the data of the illumination of each discharge lamp.And; When illumination decrease etc. has taken place when unusual in certain discharge lamp that is constituting the light source component row based on the Data Detection that is obtained; Can correctly confirm to take place the discharge lamp of undesirable condition and can judge unusual states such as illumination decrease or optical axis deviation, therefore can confirm the regular event state of light irradiation device reliably.
(2) setting makes from the light diffusion of light source component and the diffusion mechanism of radiation; The light quantity of the diffusion scattered light at each position on this diffusion mechanism is detected through light quantity testing agency; And the light quantity of the position in the light quantity testing agency is transformed to the position in this rayed zone of expression the illumination change signal and export; Therefore unlike technology in the past such on one side one by one lamp ground light source is turned off the light observe the change of illumination on one side or make optical sensor scanning, and can keep watch on the change of the Illumination Distribution of the light that radiates from a plurality of light source components simultaneously.
Therefore; Can be while carrying out that the photo-irradiation treatment of object being treated is carried out the supervision of the illuminating state of each discharge lamp; So when detecting certain discharge lamp when unusual, can promptly take to make and make line and stop and changing measure such as discharge lamp, can realize the work of high efficiency equipment.
In addition, the signal of the illumination change through will representing each position in the rayed zone is corresponding with the position foundation in rayed zone and be presented on the display unit, and the light quantity that can keep watch on which light source component has descended etc.
(3) supervision is set and representes that the light quantity of the signal that the illumination of each position in rayed zone changes changes MA monitoring agency; When the illumination decrease of the discharge lamp of the specific light source component of input in light source component of the illumination change of each position through expression rayed zone; The electric power that this discharge lamp is supplied with increases through making, the decline of compensation illumination; Thereby the performances such as illumination decrease that can prevent light supply apparatus descend, and prevent a large amount of generations of unacceptable product.
(4) the transformation ratio data of signal that the light quantity be used for the position in the light quantity testing agency is transformed to the illumination of each position in this rayed zone of expression are set; According to the light quantity of this diffusion scattered light at each position in the light quantity testing agency be kept at the transformation ratio data in the above-mentioned storer; Calculate the signal of the illumination change of each position in the rayed zone, thereby can obtain representing the signal of the illumination change of each position in the rayed zone fairly simplely.
The light quantity of the position in the time of (5) discharge lamp of the light source component row of light irradiation device being lighted at first in the detected light quantity testing agency is preserved as benchmark light quantity data; According to the light quantity of the diffusion scattered light at each position in the light quantity testing agency be kept at the benchmark light quantity data in the above-mentioned storer; The signal of the illumination change of each position in the represents rayed zone; Thereby the Illumination Distribution when lighting at first with the discharge lamp that makes the light source component row is compared, and can grasp Illumination Distribution with what kind of degree change.In addition, the decline of the illumination of detection light source element easily, and the deviation of the optical axis of light source component etc. can be judged lamp or lamp unit replacement reliably whether it is necessary or not and regularly.
Description of drawings
Fig. 1 is the figure of schematic configuration of the light irradiation device of expression embodiments of the invention.
Fig. 2 is the side sectional view that illumination part shown in Figure 1 is cut off with the A-A line.
Fig. 3 is the figure that illumination part shown in Figure 1 is observed from the rear side of optically focused parts.
Fig. 4 is the cut-open view along the tubular axis of luminotron.
Fig. 5 is the measuring point of expression on the diffuser plate and the concept map of relation that receives to look like the position of line sensor.
Fig. 6 is the figure of the illumination change under the situation of illumination decrease of the specific lamp of expression.
Fig. 7 is the figure that the illumination change under the situation of optical axis deviation of specific lamp has taken place in expression.
Fig. 8 is the figure that expression is provided with the structure example under the situation of two optical sensors.
Fig. 9 is the measuring point of expression on the diffuser plate and the concept map of relation that receives to look like the position of 2 dimensional region sensor.
Figure 10 is the side sectional view of summary of the structure in another example of expression light irradiation device of the present invention.
Figure 11 is that the rear side at the optically focused parts is provided with diffuser plate, detects the structure example that the light of optically focused parts is crossed in transmission.
Figure 12 is the figure that another routine schematic configuration of light irradiation device of the present invention is observed from optically focused parts rear side.
Figure 13 is the FBD of the graphics processing unit of the 2nd embodiment of the present invention.
Figure 14 is the process flow diagram of processing order of the graphics processing unit of expression the 2nd embodiment of the present invention.
Figure 15 is the routine figure of corresponding relation of location of pixels and irradiation area position of each detecting element of explanation photodetector array.
Figure 16 is the figure of an example of expression transformation ratio data (correction factor).
Figure 17 be expression by the photodetector array detection to light quantity distribution and figure through the Illumination Distribution after the above-mentioned transformation ratio data conversion.
Figure 18 is the figure of the conversion process of explanation the 2nd embodiment.
Figure 19 is the FBD of the graphics processing unit of the 3rd embodiment of the present invention.
Figure 20 is the process flow diagram of processing order of the graphics processing unit of expression the 3rd embodiment of the present invention.
Figure 21 is the figure of the conversion process of explanation the 3rd embodiment.
Figure 22 is the figure of the illumination sustainment rate under the situation of illumination decrease of the specific lamp of expression.
Figure 23 is the FBD of the graphics processing unit of the 4th embodiment of the present invention.
Figure 24 is the process flow diagram of processing order of the graphics processing unit of expression the 4th embodiment of the present invention.
Figure 25 is the FBD of the graphics processing unit of the 5th embodiment of the present invention.
Figure 26 is the process flow diagram of processing order of the graphics processing unit of expression the 5th embodiment of the present invention.
Figure 27 is a skeleton diagram of representing an example of light irradiation device in the past.
Figure 28 is another routine skeleton diagram of representing light irradiation device in the past.
Embodiment
Below, embodiment of the present invention is at length explained.
Fig. 1 is the figure of schematic configuration of integral body of the light irradiation device of expression embodiments of the invention, and Fig. 2 is with the light irradiation device of Fig. 1 side sectional view with the cut-out of A-A line.In addition, Fig. 3 is the figure that illumination part shown in Figure 2 is observed from the rear side of optically focused parts 40 perspective light source side.
Irradiation unit of the present invention for example uses in order to make the patterning phase-contrast film; As shown in Figure 1, by the light outgoing portion 10 that possesses optically focused parts 40, possess the light from light outgoing portion 10 is shaped as the illumination part 1, graphics processing unit 7 of the mask 45 of strip and constitutes to the power supply unit 9 of the lamp power supply of illumination part 1.At the downside of mask 45, as shown in Figure 2, be provided with conveying mechanism 50, carry shone thing W through conveying mechanism 50, to the light of shone thing W irradiation from illumination part 1 outgoing.
In addition, in Fig. 1, Fig. 2, be inserted into the light incident side of mask 45 with being used for the diffuser plate 55 that measuring illumination distributes, but this is narrated in the back.
Light source component row 20 that above-mentioned smooth outgoing portion 10 will be made up of a plurality of for example light source components more than 3 21 and will constituting for the optically focused parts 40 of the upwardly extending wire in side of arranging at light source component 21 are configured in the lamp housing 11 that for example is made up of aluminium from the light optically focused of these light source component row 20.
Below optically focused parts 40; Be formed with along the length direction of optically focused parts 40 and use opening 12A to the light outgoing of a direction extension; In addition; Being formed with on the position of this light outgoing with the rear side of the optically focused parts 40 of the lower wall of opening 12A, be formed with diffusion light incident and use opening 12B, this diffusion light incident with opening 12B make from after the light that light shone of light outgoing portion 10 outgoing stated arrive the diffusion scattered light that reflects the zone and incide in the lamp housing 11.And, be provided with the luffer boards parts 13 that for example constitute by quartz glass, so that covering the light outgoing, it uses opening 12A.
In light outgoing portion 10, make light source component 21 (in Fig. 2, be perpendicular to the direction of paper along a direction.Below this direction is also referred to as " directions X ") arrange the ground configuration, constitute light source component row 20 through them.Each light source component 21 of light source component row 20 has the discharge lamp 30 of short-arc type and surrounds this discharge lamp 30 and the reverberator 22 that will reflect from the light of this discharge lamp 30 of configuration.
As discharge lamp 30, can use for example have structure shown in Figure 4, will be for example the ultraviolet light of wavelength 270～450nm with the extra-high-pressure mercury vapour lamp of high-level efficiency radiation.This discharge lamp 30 possesses luminotron 31; This luminotron 31 has the illuminating part 32 of the for example ball shape that forms discharge space S and is connected the shaft-like sealing 33 on the two ends of this illuminating part 32; In luminotron 31; Disposing pair of electrodes 35 opposed to each other, and enclose mercury, inert gas and halogen are arranged along the mutual opposed mode of its tubular axis.And each electrode 35 is connected on the outer lead 37 via the airtight metal forming of burying underground 36 in sealing 33.In such discharge lamp 30, the interelectrode distance that pair of electrodes is 35 for example is that the enclosed volume of 0.5～2.0mm, mercury for example is 0.08～0.30mg/mm
3
Optically focused parts 40 have cylinder parabolic reflector parabolic light reflection surface 41, that extend along directions X by the cross section perpendicular to directions X and constitute; Be configured in the place ahead of the light-emitting face vertical, so that its focus is positioned on the surface of shone thing W with the optical axis C of each reverberator 22 of light source component row 20.
These optically focused parts 40 for example also can be the coated reflectors of having implemented wavelength selection coating, and this wavelength selects coating only to make the light reflection as target wavelength, and makes the transmittance of unwanted wavelength.
Shone thing W for example is transferred mechanism 50 and carries along the Y direction as Fig. 2, mask 45 disposes with respect to shone thing W with leaving.Minimum clearance between mask 45 and the shone thing W for example is 50～1000 μ m.
In addition; Gap between mask 45 and the shone thing W is carried to the Y direction along with this shone thing W and is changed; So mask 45 from effective irradiating width of the light institute incident of optically focused parts 40 preferably, consider the radius of allowing change value or roller 51 in the gap between mask 45 and the shone thing W and in possible scope, set lessly.This is based on following reason.When shone thing W is transferred and when zone under through mask 45; Gap between shone thing W and the mask 45 is at first along with shone thing W moves and diminishes to the Y direction; After under the middle position that arrives mask 45; Along with shone thing W moves and becomes big to the Y direction, but because the amplitude of fluctuation in the bigger then gap of smallest effective irradiating width is also big more, so can not form the pattern and the high-resolution pattern of faithful to mask 45.
Particularly; When the change value of allowing of establishing gap between mask 45 and the shone thing W is the radius of a, roller 51 when being r, effectively illumination amplitude d can obtain through
.In this formula, need consider the thickness of shone thing W in theory, but since the thickness of shone thing W compare with the radius of roller 51 very little, so can ignore.If enumerate concrete example, then the change value a that allows in the gap between mask 45 and shone thing W is that the radius r of 50 μ m, roller 51 is under the situation of 300mm, effectively below the preferably about 11mm of illumination amplitude d.Thereby; To be wire through each reverberator 22 and optically focused parts 40 optically focused from the radiating light of each discharge lamp 30 of the short-arc type in the above-mentioned smooth outgoing portion 10 along the directions X extension; For being effective in the scope of this effective irradiating width d in order to make light optically focused; And then, help forming the pattern and the high-resolution pattern of faithful to mask 45.
The conveying mechanism 50 of the light irradiation device of relevant this embodiment has this shone thing W is carried in contact on shone thing W roller 51.Particularly, the posture configuration that roller 51 extends along directions X with the turning axle of this roller 51 (diagram is omitted) so that contact the position on the shone thing W be positioned at mask 45 under the position, through these roller 51 rotations, shone thing W is carried to the Y direction.
At shone thing is under the situation of film like; Owing to conveying mechanism 50 has this shone thing W is carried in contact on shone thing W roller 51; So through reducing the off-centre of roller 51, can be with mask 45, remain necessarily with the gap that contacts between the shone thing W of the film like on the roller 51.
In addition, through water-cooled mechanism is set in roller 51, even under the situation of the ultraviolet light that shone thing W is shone high illumination, also can be through the roller 51 of contact on shone thing W with shone thing W cooling, so can prevent the distortion such as contraction of shone thing W.
In the light irradiation device of relevant this embodiment, diffuser plate 55 is located at free to advance or retreatly to be made on the light path of the light scattered reflection of light outgoing portion 10 outgoing, particularly be on the light path between optically focused parts 40 and the mask 45.Diffuser plate 55 is carrying out shone thing W under the situation of photo-irradiation treatment; From keep out of the way from the light path of light outgoing portion 10 and carry out after under the situation of monitors for activity (illumination photometry of each discharge lamp, Illumination Distribution are measured) of illuminating state of each discharge lamp 30 of stating; Driving mechanism through not shown moves so that its on from the light path of the light of light outgoing portion 10 along the planar configuration vertical (with reference to the diffuser plate 55 of Fig. 1, Fig. 2) with the catoptrical optical axis L of optically focused parts 40.
In addition, be coated with or contain and mixed the diffuser plate that receives uv light induction and mainly send the fluorophor of visible light, also good and efficient is luminous well for the incident light diffusivity, so be preferred.
In the 2nd embodiment of the present invention, during Illumination Distribution in keeping watch on the rayed zone, arrive at light and to insert diffuser plate 55 zone from the light of light outgoing portion 10 outgoing.
The present invention is provided with MA monitoring agency, and this MA monitoring agency is obtained the light intensity distributions picture that arrives the zone from the light of the light of light outgoing portion 10 outgoing, based on through carrying out the Illumination Distribution on the directions X that appropriate image processing obtains, keeps watch on the illuminating state of each discharge lamp 30.
About the MA monitoring agency of the light irradiation device of this embodiment is made up of with opening 12B, imaging optic element with through the view data that is obtained by optical sensor 60 being carried out the Flame Image Process mechanism that Flame Image Process obtains Illumination Distribution the diffusion light incident that is configured in optical sensor 60 in the lamp housing 11, be formed on the lamp housing 11.
As shown in Figure 3; In the rear side of optically focused parts 40, be provided with built-in as the optical sensor 60 of the photodetector array of light quantity testing agency, this light quantity testing agency have a plurality of acceptance from the diffusion scattered light of this diffuser plate 55, and detect the photodetector of light quantity of this diffusion scattered light at each position of accepting; In addition; Being formed on diffusion light incident on the lamp housing 11, be provided with imaging optic elements 65 such as pinhole plate, if be inserted into diffuser plate 55 with opening 12B place; Then the light from 10 outgoing of light outgoing portion is reflected by diffuser plate 55, and this diffusion scattered light is imaged on the optical sensor 60 through above-mentioned imaging optic element 65.
To send to graphics processing unit shown in Figure 17 by optical sensor 60 detected signals.
In the photodetector array of one dimension, though can not obtain the accumulative total light quantity, as long as the sensitive surface of photodetector is the rectangular shape long with respect to throughput direction, then the instrumentation value is the accumulative total light quantity.
One example of the size of photodetector array light accepting part is, is of a size of in each pixel under the situation of highly several mm, width tens μ m, and be tens mm highly for several mm, width.Therefore, in Fig. 5, only put down in writing the such representative point of P1～Pn in order to understand easily, even but in fact diffusion light on the direction of scanning, have limited width at each point, also can fully correctly measure the accumulative total light quantity when scanning.
But the size of the sensing range of the diffusion light of optical sensor 60 (measurable range of illumination) can be regulated through the length of leaving the distance and the directions X of photodetector array 61 of imaging optic element and optical sensor 60.
The whole angle of visibility of optical sensor 60 (normal of the sensitive surface 601 of optical sensor 60 with from the diffusion light R1 of the measuring point P1 of the outermost on the directions X the angle that light path became) θ is for example preferably below 60 °, more preferably below 45 °.Thus, can detect the diffusion light of diffuser plate 55 reliably.
In addition, the sensitivity of each photodetector, according to diffusion light (R1, R2 ..., Rn-1, Rn) regulate for the incident direction of photodetector.
In above-mentioned light irradiation device, be radiated on the shone thing W via mask 45 from the light of light outgoing portion 10 outgoing.That is, in light outgoing portion 10,, become along the directional light of the optical axis C of this reverberator 22 from be reflected light reflection surface 23 reflections of device 22 of the light of discharge lamp 30 radiation that constitute light source component row 20, from light-emitting face towards 40 outgoing of optically focused parts.This directional light is reflected downwards by the light reflection surface 41 of optically focused parts 40, on one side use opening 12A one side optically focused (not insert diffuser plate 55 this moment) for the wire of extending along directions X incides the mask 45 from the light outgoing.At this moment, the light that incides in the mask 45 is directional light on directions X.
And; Be shaped as striated through light shielding part and transmittance section and be radiated on the shone thing W inciding light in the mask 45; Thereby on the surface at the position of the roller of shone thing W 51 contacts; Form the rayed zone of the striated corresponding with the pattern of the light shielding part of mask 45 and transmittance section, through with shone thing W with conveying mechanism 50 to the conveying of Y direction, this shone thing W is carried out the photo-irradiation treatment of needs.
On the other hand; For example in beginning during the review of operations or during 1 day the end of job etc., keep watch under the situation of illumination and the Illumination Distribution in the rayed zone of each discharge lamp 30 of light outgoing portion 10; Diffuser plate 55 inserted through not shown driving mechanism be configured on the light path between optically focused parts 40 and the mask 45, will be on diffuser plate 55 from the rayed of light outgoing portion 10 outgoing.
At this moment, be radiated at the light that only is parallel to directions X on the diffuser plate 55, on light diffusingsurface 55A, be formed with banded rayed area L A.The light that is radiated on the diffuser plate 55 is as shown in Figure 5; By light diffusingsurface 55A scattered reflection, from each measuring point (P1, P2 ..., Pn-1, Pn) diffusion light via imaging optic element 65 as the light intensity distributions of the one dimension of rayed area L A look like to be imaged on corresponding to each measuring point receive the image position (D1, D2 ..., Dn-1, Dn) on.And; Each photodetector through photodetector array 61; Detect the light quantity (illumination) of the diffusion light of each corresponding measuring point, the view data that obtains is thus carried out appropriate image processing through Flame Image Process mechanism, obtain the Illumination Distribution of the directions X of rayed area L A.
For example, carry out the monitors for activity of the illuminating state of above-mentioned each discharge lamp 30, under the situation of the Illumination Distribution that has obtained representing, play the 2nd discharge lamp deterioration, can be judged as the regional illumination decrease of rayed that this discharge lamp brings according to a left side by the dotted line of Fig. 6.
In addition, for example carry out the monitors for activity of the illuminating state of above-mentioned each discharge lamp 30, under the situation of the Illumination Distribution that has obtained representing, detect and taken place that certain is unusual, thus, take to change discharge lamp 30 measures such as grade by the dotted line of Fig. 7.
As above; According to the present invention; Through making the structure that possesses photodetector array 61; Through the view data that is obtained by optical sensor 60 is carried out appropriate image processing; Illumination about the Illumination Distribution of the directions X in the rayed zone or accumulative total light quantity distribution and each discharge lamp 30 obtains detailed data, the light quantity of the diffusion light of a plurality of measuring points in the rayed zone this each discharge lamp 30 of photodetector array detection, on the light diffusingsurface 55A, and it is arranged with a plurality of photodetectors corresponding to this measuring point on directions X.And; When in certain discharge lamp 30, detecting illumination decrease etc. based on the data that obtained when unusual; Can correctly confirm to take place the discharge lamp of undesirable condition and can judge unusual states such as illumination decrease or optical axis deviation, so can confirm the regular event state of light irradiation device reliably.
In addition, because each photodetector condition such as temperature in the encapsulation of a photodetector array is roughly the same, so be not vulnerable to the influence between each photodetector along with the poor sensitivity of effluxion.And then, do not need to prepare separately the distribution cable and the amplifying circuit of each photodetector, so, can suppress cost lower though carry out detailed distribution measuring yet.
In addition; In the monitors for activity of the illuminating state of discharge lamp 30; Made and diffuser plate 55 inserted the structure that is configured on the light path of the light of light outgoing portion 10 outgoing, detects the light quantity of the diffusion light on the light diffusingsurface 55A; Because diffuser plate 55 has the light-operated diffuse reflectance that is made as certain size with incident, so can detect diffusion light reliably through optical sensor 60, in testing result, can access higher reliability.
And then, because optical sensor 60 is fixed on the lamp housing 11,, do not need complicated optical adjustment so the position of optical sensor 60 and light source component row 20 relation is fixed.
In addition; Light irradiation device according to this embodiment; Light source component 21 is the discharge lamps 30 as the short-arc type of pointolite; Through arranging the light source component row 20 formation light outgoing portions 10 that obtain that dispose along a direction (directions X) by a plurality of light source components 21 that this discharge lamp 30 and the reverberator 22 with light reflection surface 23 of paraboloid of revolution shape constitute; Therefore the light that is radiated by each discharge lamp 30 from each light source component 21 becomes the light of a direction that is parallel to light source component 21 arrangements through each reverberator 22 of this light source component 21; Thus, from the light of optically focused parts 40 on the transmittance section of mask 45 with its face direction quadrature or roughly incident of quadrature ground and transmission.Thereby, preventing or suppressed the zone of the shone thing W of rayed under the light shielding part that is arranged in mask 45, the result can form the pattern and the higher pattern of resolution of faithful to mask 45.
More than, embodiment of the present invention is illustrated, but the present invention is not limited to above-mentioned embodiment, can add various changes.In Fig. 3, represented to use the situation of 1 optical sensor 60, but also can use a plurality of optical sensors 60 to carry out comparing the measurement of the wider Illumination Distribution in zone with the situation of using 1 optical sensor 60.
Fig. 8 be a plurality of photodetector arrays of configuration so that its example along the directions X structure arranged, if such structure, then the bigger zone for directions X can obtain the illumination of each discharge lamp and the Illumination Distribution in rayed zone with higher reliability.
In the example of Fig. 8, in the light irradiation device of relevant above-mentioned embodiment, in lamp housing 11, each freedom is the 1st optical sensor 60A and the 2nd optical sensor 60B alignment arrangements on directions X of ccd line sensor formation for example.Other structures are identical with light irradiation device shown in Figure 3, give identical label for identical part.
In addition; In this structure; But but the 1st optical sensor 60A and the 2nd optical sensor 60B both can make sensing range not repeatedly alignment arrangements, the part alignment arrangements repeatedly that also can that kind as shown in Figure 8 makes sensing range; But for fear of the generation of the deviation of the Illumination Distribution of bringing by the individual sensitivity difference of the 1st optical sensor 60A and the 2nd optical sensor 60B, in testing result, obtain higher reliability, so a but part of preferably making the sensing range that makes the 1st optical sensor 60A and the 2nd optical sensor 60B structure of alignment arrangements repeatedly.
In addition, the photodetector array is not limited to one dimension line sensor that a plurality of photodetectors are arranged abreast on directions X, also can use the for example CCD area sensor (2 dimensional region sensor) with a plurality of photodetector two-dimensional arrangements.
Using in the structure of 2 dimensional region sensor as the photodetector array; As shown in Figure 9; Since from each measuring point on the light diffusingsurface 55A of diffuser plate 55 (P11 ..., Pn1 ..., P1m ..., Pnm) diffusion light can through the imaging optic element 65 light intensity distributions picture that rayed area L A is whole make a video recording in the lump on the sensitive surface 601 of optical sensor 60 corresponding to each measuring point (P11 ..., Pn1 ..., P1m ..., Pnm) respectively receive the image position (D11 ..., Dn1 ..., D1m ..., Dnm) on; Even so on the direction beyond the directions X that light source component is arranged, taken place also can confirm to have taken place unusual discharge lamp under the situation of optic axis deviation at for example discharge lamp.
In addition; For example form under the situation of structure of pattern of wire at shone things such as flat glass substrate that liquid crystal panel is used; Do not need to be that wire is shone through optically focused parts optically focused from the light of light source component row; Also can make with from the light of light source component row through suitable reflection part reflection as being parallel to directions X shines (it is regional to form banded rayed) with the light that is parallel to the Y direction structure; Even in such structure, also, can obtain above-mentioned effect reliably through using the 2 dimensional region sensor as the photodetector array.
If use the 2 dimensional region sensor as photodetector array 61; Then as shown in Figure 9; (Dk1～Dkm (k=1～n) light intensity distributions) through to Y direction accumulative total light quantity distribution, can obtain the accumulative total light quantity of the throughput direction of shone thing also can to detect the light quantity distribution of Y direction.
And then MA monitoring agency needs not be the structure that is configured in the lamp housing that constitutes light outgoing portion, and is shown in figure 10, also can make the structure on the housing that external stability at the lamp housing 11 that constitutes light outgoing portion 10 is arranged on light irradiation device.
In the example of Figure 10; For example constitute, obtain directions X and the Illumination Distribution of Y direction in the rayed zone that light outgoing portion 10 brings based on the view data that obtains by photodetector array 61 by photodetector array 61 that possesses the 2 dimensional region sensor and imaging len 66 (imaging optic element) that the diffusion light in the light diffusingsurface of diffuser plate 55 is imaged on the photodetector array 61.
And then; In light irradiation device of the present invention; Under the situation of having made the structure that is provided with shutter part; Can make the structure that diffuser plate is set on the photoirradiated surface of shutter part, this shutter part the time is positioned on the light path of the light of light outgoing portion outgoing in action, and will be from the light shading of light outgoing portion.
More than; For passing through to detect diffusion light as in the light arrival zone (the for example zone of the rayed on the diffuser plate) of the ultraviolet light of target wavelength; Obtain the illumination of each discharge lamp and the structure of the Illumination Distribution in the rayed zone and be illustrated, but also can make processing through detecting shone thing the diffusion light of unwanted visible or infrared light obtain the illumination of each discharge lamp and the structure of the Illumination Distribution in the rayed zone.
In Figure 11, expression detects transmission and crosses the structure example under the situation of diffusion scattered light of visible or infrared light of optically focused parts 40A.On optically focused parts 40A, to implement wavelength and selected coating, this wavelength is selected coating, and (270～340nm) reflect, make light (for example black light or the visible light) transmission of the wavelength beyond it with the ultraviolet light of the processing necessary wavelength of shone thing.Rear side at optically focused parts 40A; Cross on the light path of these optically focused parts 40A the state setting of the diffuser plate 56 that makes this transmitted light of scattered reflection to tilt towards the direction of oblique upper with respect to the optical axis of transmitted light, light diffusingsurface from the transmitted light of light outgoing portion 10 in transmission.And the light quantity of each diffusion light of a plurality of measuring points on the light diffusingsurface is detected by optical sensor 60 via imaging optic element 65.In addition, give identical label for the component parts identical with the light irradiation device of Fig. 1 to Fig. 3.
The diffuser plate 56 that in the light irradiation device of this embodiment, uses for example is that the diffuse reflectance of the visible light of wavelength 350～700nm is the structure more than 90%.
And; In certain discharge lamp, taken place under the unusual situation; Be not only ultraviolet light as target wavelength; For visible light illumination decrease etc. takes place also for example, and though degree of illumination decrease be ultraviolet light or visible light all represent identical tendency, so also can access the effect identical with the light irradiation device of above-mentioned embodiment through the light irradiation device of said structure.In addition, while carry out photo-irradiation treatment owing to can carry out the monitors for activity of illuminating state of each discharge lamp 30 of light source component row 20 to shone thing W, so even make device work during in also can detect Illumination Distribution.When detecting certain discharge lamp unusual, can promptly take to make and make that line stops and measure that changing discharge lamp etc.
In addition, under the situation of this structure, also can be with the package arrangements of photodetector array in the place of cooling easily, thus can not bring influence to poor sensitivity because of the difference of the temperature coefficient between each photodetector along with effluxion, it is also easy to safeguard.And then, owing to do not need to prepare separately the distribution cable and the amplifying circuit of each photo detector (photodetector) yet, thus can carry out detailed distribution measuring, but also can suppress cost lower.
In addition; In the light irradiation device of such structure; Need not make the light from light outgoing portion 10 is the structure that wire is shone through optically focused parts 40A optically focused, also can make replace optically focused parts 40A and use suitable reflection part, will be from the light of light outgoing portion 10 through this reflection part reflection each other as the structure that is parallel to directions X and is parallel to the rayed (forming banded rayed zone) of Y direction.
And then; In light irradiation device of the present invention; Need not make the structure that possesses diffuser plate; For example shown in figure 12, also can make the structure that the diffusion light (scattered light) of the diffusion reflection surface of the surface that makes through shone thing W or mask 45 is detected by optical sensor 60 via imaging optic elements such as pinhole plate 65.
According to such structure; Owing to can carry out photo-irradiation treatment while the monitors for activity of the illuminating state of each discharge lamp 30 that carries out light source component row 20 to shone thing W; So when detecting certain discharge lamp unusual, can promptly take to make and make that line stops and with the measure of discharge lamp replacing etc.
And then; As the imaging optic element that in light irradiation device of the present invention, uses; Be not limited to pinhole plate, also can use the light that can light outgoing portion be brought to arrive light intensity distributions in the zone and look like to project to lens on the photodetector array, for example camera lens etc.
And then; Light outgoing portion also can make: the plural light source component row that will be respectively extend along directions X are configured to, make straight line that electrode centers point with the discharge lamp in the light source component of the electrode centers point of the discharge lamp in the light source component of light source component row and another light source component row that approach this light source component most links, and along the straight line oblique of directions X extension.
Then, in the light irradiation device that is applied to said structure, the embodiment of graphics processing unit that keeps watch on the change of the Illumination Distribution in the rayed zone describes.
Figure 13 is the FBD of graphics processing unit of the light irradiation device of expression the 2nd embodiment of the present invention, and Figure 14 is the process flow diagram of the processing order of the above-mentioned graphics processing unit of expression.
In Figure 13, (light of in the figure each lamp note being made L1～L5) emit is emitted as directional light by reverberator 22 reflections of elliptical reflector from discharge lamp 30 as above-mentioned.
This directional light is radiated at (light-struck district is shade among the figure (
hangs a け) part) on the diffuser plate 55 by 40 reflections of optically focused parts, by diffuser plate 55 scattered reflections.
(in Figure 13, be recited as SL1 by the light of diffuser plate 55 scattered reflections according to lamp ... SL5) through being built in the imaging optic elements 65 such as lens unit or pinhole plate in the optical sensor 60, in imaging on the photodetector array 61 corresponding to the light of the light quantity of the Illumination Distribution on the diffuser plate 55.In addition, as photodetector array 61, can as above-mentioned, use 2 dimensional region sensor (CCD) or line sensor, but in following embodiment, the situation of having used the 2 dimensional region sensor described.
Signal corresponding to by above-mentioned optical sensor 60 detected light quantities is sent out to graphics processing unit 7.Graphics processing unit 7 is shown in figure 13, is made up of handling part 71, storage part 72, display part 73 and alarm portion 74 etc.
In above-mentioned storage part 72; Preserve: position corresponding data 72a, transformation ratio data 72b, illumination movement threshold data 72c and lamp ensure life time data 72d; Wherein, Position corresponding data 72a is used for corresponding to by the signal of optical sensor 60 detected light quantities, set up upright corresponding with from the rayed zone that light shone of light source component 21 outgoing everybody; Transformation ratio data 72b is used for light quantity with each position in the light quantity testing agency and is transformed to the signal of illumination change of each position in this rayed zone of expression; Illumination movement threshold data 72c representes the boundary value of illumination change, and lamp ensures that life time data 72d lights the time corresponding to the accumulative total of the use that can ensure lamp.
Handling part 71 possesses: the light quantity distribution (71a of pre-treatment portion of the pre-treatments such as accumulative total processing of the Dk1～Dkm Fig. 9 (k=1～n) light intensity) that the light amount signal of sending here from optical sensor 60 is carried out Y direction (line direction); With the 71b of conversion process portion; The 71b of this conversion process portion is based on the position corresponding data 72a and the transformation ratio data 72b that are stored in the storage part 72; Each position on the photodetector array 61 of above-mentioned optical sensor 60 and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up upright corresponding, and the light quantity of each position in the light quantity testing agency is transformed to the signal that the illumination of each position in this rayed zone of expression changes.In addition; Also have with by the illumination change of each position in the rayed after this 71b of conversion process portion conversion zone, be stored in illumination movement threshold data 72c in the storage part 72 and compare to wait and keep watch on illumination and whether change; And from the illumination change supervision 71c of portion of alarm portion 74 output alarm signals; Also possess to undertaken by each position in the rayed after the above-mentioned conversion process 71b of portion conversion zone with illumination be presented at the processing on the display part 73 the 71d of display process portion and based on the lamp of sending here from power supply unit 9 light signal, whether time of lighting of keeping watch on each lamp reached the 71e of the time monitoring portion that lights that the lamp that is kept at the storage part 72 ensures the time of life time data 72d.
Here, the conversion process among the above-mentioned conversion process 71b of portion is described.
In above-mentioned conversion process, carry out (1) each position in the light quantity testing agency and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up the Signal Processing of illumination change that upright corresponding processing, (2) are transformed to the light quantity of each position on the photodetector array 61 each position in this rayed zone of expression.Below, the processing of above-mentioned (1), (2) is illustrated in greater detail.
(1) about everybody of each position on the photodetector array and irradiation area set up upright corresponding processing
In storage part 72, preserve position corresponding data 72a, each position on the photodetector array 61 with from each position in the rayed that light shone of above-mentioned light source component outgoing zone through setting up corresponding with reference to above-mentioned position corresponding data 72a.
This be because, if do not know each position on the photodetector array 61 corresponding to which position in rayed zone, the Illumination Distribution in the measuring light irradiation area correctly just.
For example photodetector array 61 under the situation that little bias has taken place; If not with the information updating of the location of pixels on each detecting element (CCD) corresponding to where (corresponding to the irradiation position of which lamp) of the irradiation area of reality, the then information of output error.
Location of pixels of each detecting element (CCD) and irradiation area position are in the relation of linearity (1 function); Even known ratio (slope); Shown in figure 15, if there is not decision to be equivalent to the parameter of the intercept of Y axle (irradiation area position), can not obtain actual position clearly.That is, if do not know which position of the zone of which light irradiation at photodetector array 61, then in the illumination decrease of lamp, carry out just can not determining the illumination that should carry out which lamp to feed back (electric adjustment) under the situation that illumination regulates.
And then; As above-mentioned shown in Figure 8; Come under the situation in the bigger zone of irradiating width arranging a plurality of optical sensors, if indeterminate overlapping part specifically corresponding to which position, just can not with by a plurality of light sensors to the light quantity data add and obtain whole Illumination Distribution together.
Because above reason, preferably, be provided with each position on the photodetector array 61 of optical sensor 60 with set up upright corresponding position corresponding data 72a from everybody of the rayed that light the shone zone of above-mentioned light source component outgoing.
In addition; Can consider in advance that measuring illumination distributes when the dispatching from the factory of device, the position on the photodetector array 61 is corresponding with the relation foundation of discharge lamp 30, also can need not to be the corresponding informance of the position of position and irradiation area on the photodetector array 61.
(2) about Signal Processing with the illumination change of each position in this rayed zone of the light quantity of each position in the light quantity testing agency and expression
As stated; Incide light in the photodetector array 61 because the incident angle of light and the reasons such as scattering properties of diffuser plate 55; Not for correctly reflecting the value of the Illumination Distribution that rayed is regional; For example with from the positive diffusion scattered light of photodetector array compare, even also light quantity is measured as lower from the scattered light of the diffusion scattered light same intensity of tilted direction incident.
Promptly; Comprise effect of bringing by cosine law etc.; This cosine law is meant; Because because of the different orientation angles interdependence of scattering angle with to the difference of the incident angle of photodetector array 61, even so light, the measured value of the identical light quantity of the scattered intensity of diffuser plate 55 also change.
Figure 16 is the figure of expression as an example of the correction factor of above-mentioned transformation ratio data 72b, for the incident angle θ to photodetector array 61, for roughly approaching cos θ
2Coefficient, represent the correction factor under the bigger situation of the effect of above-mentioned cosine law.
In order to determine this correction factor, the method for making the table of correction factor at the ratio of the output signal of the photodetector array 61 that uses the correct Illumination Distribution of measurement such as light-receiving device under the illuminate condition of this light irradiation device, on mask, workpiece face, obtains and obtain is for example arranged in advance.
Measure and carry out for example discretely, the value between each measurement point is carried out interpolation processing and is obtained.Perhaps, also can use configuration to have the light source of the bar-shaped lamp of sufficient length, the method that the uniform light source condition of setting is obtained correction factor.
Figure 17 is that expression is by photodetector array 61 detected light quantity distribution and by the figure of (being equivalent to the Illumination Distribution in the rayed zone) of the Illumination Distribution after the above-mentioned transformation ratio data conversion; The position of the transverse axis indication lamp spread length direction of this figure (being positioned at the position on the rayed zone in front of each lamp), L1～L11 is equivalent to the peak of the Illumination Distribution of each lamp L1～L11.In addition, the longitudinal axis is illumination (relative value), through above-mentioned conversion process, will be by the single-point of this figure line expression be modified to the Illumination Distribution B shown in the solid line of this figure by photodetector array 61 detected light quantity distribution A.
Figure 18 is the figure of the above-mentioned conversion process of explanation present embodiment, and Figure 18 (a) representes by photodetector array 61 detected light quantity data (A) (light quantity distribution data).In this example, represented in round area surrounded, because reason such as the illumination decrease of lamp and the situation of illumination decrease by this figure.In addition, the above-mentioned transformation ratio data (B) shown in Figure 16 of Figure 18 (b) expression.
Above-mentioned conversion process for example through with above-mentioned light quantity data (A) with transformation ratio data (B) remove, computing (A)/(B) carries out.Thus, shown in Figure 18 (c), can access signal corresponding to the Illumination Distribution in rayed zone.
Through carrying out conversion process like this, can make the size of the illumination on the position (position of above-mentioned directions X) of lamp bank row length direction consistent, can grasp the part of illumination decrease intuitively.
Figure 14 is the process flow diagram of the processing in the presentation video processing unit 7, with reference to Figure 13, through the process flow diagram of Figure 14, the processing in the graphics processing unit is described.
Handling part 71 will be taken into (step S1) by optical sensor 60 detected ccd images, as above-mentioned, carried out the accumulative total of the light quantity distribution of line direction (Y direction) by the 71a of pre-treatment portion and handle (step S2).Then, read in transformation ratio data 72b, position corresponding data 72a, in the 71b of conversion process portion, as above-mentioned, carry out conversion process (step S3, S4) from storage part 72.
Then, will handle with the 71d of display process portion, be presented at (step S5) on the display part 73 as view data by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process.Thus, such shown in above-mentioned Figure 18 (c), show the change of Illumination Distribution.
The illumination change supervision 71c of portion compares by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process and is stored in the illumination movement threshold data 72c in the storage part 72, judges whether the illumination change (step S6, S7) of particular lamp.
Fig. 6 is the figure of the illumination change under the situation of illumination decrease of a part of lamp of expression; The position of the transverse axis indication lamp spread length direction of this figure (being positioned at the position on the rayed zone in front of each lamp), L1, L2, L3 are equivalent to the peak of the Illumination Distribution of each lamp L1～L4.In addition, the longitudinal axis is illumination (relative value), and A representes detected light quantity distribution data, and B representes the illumination threshold value, and C representes to be located at the Illumination Distribution that each the discharge lamp L1～L4 in each light source components 21 of light source component row 20 brings.
The 71c of portion is as shown in Figure 6 in illumination change supervision; Illumination Distribution A and illumination threshold value B after the comparison conversion process; If such low zone of illumination degree of contrasting threshold value B that exists shown in the dotted line of this figure; Which lamp the lamp of then judging the reason that becomes illumination decrease is, from the 74 output alarm signals (step S11) of alarm portion.In this example, owing to know that the illumination of lamp L2 descends, so the illumination of lamp L2 this situation that descended is exported as alarm signal.
If exported above-mentioned illumination decrease signal, then light irradiation device abnormal ending, or turn off the light as alarm signal.
Lighting the 71e of time monitoring portion keeps watch on from the accumulative total of lamp L1～L5 that the power supply unit 9 of lamp L1～L5 power supply is sent here and lights the time (step S8).And; Ensure that with the lamp that is stored among the lamp guarantee life time data 72d life time relatively; Judge whether reached guarantee life-span (step S9), ensure the life-span if the accumulative total time of lighting reaches if adding up the time of lighting, the alarm signal of then changing (step S10) from alarm portion 74 output lamps.Thus, the release of light irradiation device and turning off the light.
In addition,, then after the interval time of regulation, return step S1, repeat above-mentioned processing if the accumulative total time of lighting does not reach the guarantee life-span.
Figure 19 is the FBD of graphics processing unit of the light irradiation device of expression the 3rd embodiment of the present invention, and Figure 20 is the process flow diagram of the processing order of the above-mentioned graphics processing unit of expression.
In Figure 19; The structure of illumination part 1 is identical with structure shown in Figure 13; (light of in the figure each lamp note being made L1～L5) emit is by reverberator 22 reflections of elliptical reflector, and the light of emitting as directional light is by 40 reflections of optically focused parts and be radiated on the diffuser plate 55 from discharge lamp 30.By the light of diffuser plate 55 scattered reflections through being built in the imaging optic elements 65 such as lens unit or pinhole plate in the optical sensor 60, in imaging on the photodetector array 61 corresponding to the light intensity of the Illumination Distribution on the diffuser plate 55.
To send to graphics processing unit 7 corresponding to signal (light quantity) by above-mentioned optical sensor 60 detected light intensities.Graphics processing unit 7 is same with above-mentioned structure shown in Figure 13, is made up of handling part 71, storage part 72, display part 73 and alarm portion 74 etc.
In above-mentioned storage part 72, preserve: be used in above-mentioned light quantity and the rayed zone everybody set up upright corresponding position corresponding data 72a; Under the state that the illumination of each discharge lamp 30 of illumination part 1 does not have to descend, 61 detected by the photodetector array, as the benchmark light quantity data 72e of the light quantity data of each position on the photodetector array 61; The illumination movement threshold data 72c of the boundary value of expression illumination change; With light corresponding lamp of time with the accumulative total of the use that can ensure lamp and ensure life time data 72d.
Said reference light quantity data 72e for example is at the new discharge lamp 30 of installation on the illumination part 1, when this discharge lamp 30 is lighted at first; With the light quantity data recording of each position on the detected photodetector array 61 in above-mentioned storage part 72 and the data that obtain are used these data as benchmark light quantity data.
Handling part 71 is structures same basically with structure shown in Figure 13, possesses: the 71a of pre-treatment portion that the light amount signal of sending here from optical sensor 60 is added up pre-treatments such as processing as above-mentioned; With the 71b of conversion process portion; The 71b of this conversion process portion is based on the position corresponding data 72a and the said reference light quantity data 72e that are stored in the storage part 72; Each position on the photodetector array 61 of above-mentioned optical sensor 60 and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up upright corresponding, and the light quantity of each position in the light quantity testing agency is transformed to the signal that the illumination of each position in this rayed zone of expression changes.
In addition; Also have carry out relatively by the illumination change of each position in the zone of the rayed after this 71b of conversion process portion conversion, be stored in illumination movement threshold 72c in the storage part 72 and wait and keep watch on illumination and whether change; And from the illumination change supervision 71c of portion of alarm portion 74 output warning informations; Also possess to undertaken by each position in the rayed after the above-mentioned conversion process 71b of portion conversion zone with illumination be presented at the processing on the display part 73 the 71d of display process portion and based on the lamp of sending here from power supply unit 9 light signal, whether time of lighting of keeping watch on each lamp reached the 71e of the time monitoring portion that lights that the lamp that is kept at the storage part 72 ensures the time of life time data 72d.
In the present embodiment; Conversion process among the above-mentioned conversion process 71b of portion; As above-mentioned, carry out (1) each position in the light quantity testing agency and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up the Signal Processing of illumination change that upright corresponding processing, (2) are transformed to the light quantity of each position on the photodetector array 61 each position in this rayed zone of expression, but processing that should (2) is different with above-mentioned the 2nd embodiment.
The processing of above-mentioned (1) is as above-mentioned, and use location corresponding data 72a carries out the corresponding foundation of each position and each position from the rayed zone that light shone of above-mentioned light source component outgoing on the photodetector array 61.In addition, as stated, also can set up corresponding with the relation of lamp the position on the photodetector array 61.
Conversion is carried out in the processing of above-mentioned (2) in the present embodiment as following.
Figure 21 is the figure of the above-mentioned conversion process of explanation present embodiment, and Figure 21 (a) representes by photodetector array 61 detected light quantity data (A) (distribution of light intensity data).In this example, the situation of having represented in round area surrounded, having descended because of the reason light quantities such as illumination decrease of lamp by this figure.In addition, Figure 21 (b) expression benchmark light quantity data (B).
Benchmark light quantity data as stated; Be new discharge lamp 30 to be installed, when this discharge lamp 30 is lighted at first, will to be stored in the storage part 72 and the data that obtain as reference data by the light quantity of each position on the photodetector array 61 detected photodetector arrays 61.
The conversion process of present embodiment for example through with above-mentioned light quantity data (A) with benchmark light data (B) remove, computing (A)/(B) carries out.
Thus; Shown in Figure 21 (c), the signal how degree descends has taken place, has represented the signal of the ratio that light quantity descends (following this signal is called the illumination sustainment rate) in the Illumination Distribution in the rayed zone that can access expression when making discharge lamp and light at first, the light quantity of which position.In the figure, illumination decrease in having round part.
Through carrying out conversion process like this, on the position (position of above-mentioned directions X) of lamp bank row length direction, compare with the moment of measuring benchmark light quantity data, can grasp illumination intuitively the how decline of degree has taken place.
Figure 22 is the figure (analog result) of example of the change (ratio of illumination decrease) of expression illumination sustainment rate, the situation of the illumination decrease of the lamp that Figure 22 (a) expression is specific, the situation of the optical axis deviation of the lamp that Figure 22 (b) expression is specific.In addition, the position of the transverse axis indication lamp spread length direction of this figure (being positioned at the position on the rayed zone in front of each lamp), L1, L2, L3 are equivalent to the peak of the Illumination Distribution of each lamp L1～L4.
The longitudinal axis is represented illumination sustainment rate, illumination (relative value), and A representes above-mentioned illumination sustainment rate data, and solid line representes that illumination compares 0.9 the situation that drops to initial value, and single-point line expression illumination is compared 0.8 the situation that drops to initial value.In addition, C is provided in a side of the illumination that each the discharge lamp L1～L4 on each light source components 21 of light source component row 20 brings.
Shown in Figure 22 (a), if the illumination decrease of particular lamp, the illumination sustainment rate data A that then obtains through above-mentioned conversion in the position corresponding with the lamp of illumination decrease (being position in this example) corresponding to lamp L2 locate to descend.Thus, can grasp the illumination decrease of which lamp.
In addition, if the inclined light shaft of particular lamp (being lamp L2 in this example), then shown in Figure 22 (b), illumination sustainment rate data movement.
That is, under the situation of the illumination decrease of particular lamp, shown in Figure 22 (a); The light quantity sustainment rate of the position corresponding with its center descends; But under the situation of the optical axis deviation of lamp, because of the overlapping degree from the light quantity of adjacent lamp changes, with the form appearance adjacent of trough portion with crest portion.
Particularly, trough portion takes place in place different with the front position at lamp center, deviation with the peak of crest portion.For example, the trough portion that can degree of telling distributes take place between L1 and the L2, crest portion takes place between L2 and L3.
As above, under the situation of the situation of the illumination decrease of specific lamp and inclined light shaft, the upset condition of illumination sustainment rate is different, thus can judge lamp illumination decrease still be inclined light shaft.
Figure 20 is the process flow diagram of the processing order of presentation video processing unit 7, with reference to above-mentioned Figure 19, through the processing in the flowchart text graphics processing unit of Figure 20.In addition, the processing of present embodiment only conversion process is different with the process flow diagram of Figure 14, and other processing are identical with Figure 14 basically.
Handling part 71 will be taken into (step S1) by optical sensor 60 detected ccd images, as above-mentioned, carried out the accumulative total of the light quantity distribution of line direction (Y direction) by the 71a of pre-treatment portion and handle (step S2).
Then, advance to step S3, the benchmark light quantity data 72e and the position corresponding data 72a that are stored in the storage part 72 are read in, and in the 71b of conversion process portion, as above-mentioned, carry out conversion process (step S4).
Then; Judge whether being taken into of this image be being taken into of image (step S5) when new lamp being installed and it being lighted at first; Being taken into of this image is under the situation about being taken into of the image when new lamp being installed and it being lighted at first; These data are saved in (step S12) in the storage part 72 as benchmark light quantity data, after the interval time of regulation, return step S1.
In addition; Under the situation about being taken into of the image when being taken into of this image is not that new lamp is installed and it is lighted at first; To handle through the 71d of display process portion by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process, be presented at (step S6) on the display part 73 as view data.Thus, such shown in above-mentioned Figure 21 (c), show the change of Illumination Distribution.
The illumination change supervision 71c of portion compares by the incremental data of the Illumination Distribution after the above-mentioned conversion process 71b of the portion conversion process and is stored in the illumination movement threshold data 72c in the storage part 72, judges whether the illumination change (step S7, S8) of particular lamp.
If the illumination change supervision 71c of portion is such zone that has illumination decrease shown in Figure 22 (a) for example, judge that then which lamp the lamp of the reason that becomes illumination decrease is, from the 74 output alarm signals (step S13) of alarm portion.In this example, owing to know that the illumination of lamp L2 descends, so the illumination of lamp L2 this situation that descended is exported as alarm signal.
If export above-mentioned illumination decrease signal as alarm signal, then the degree at optical axis deviation is under the situation more than the certain value, light irradiation device abnormal ending or turn off the light.
In addition; The illumination change supervision 71c of portion is in that kind shown in above-mentioned Figure 22 (b), in the trough portion that Illumination Distribution takes place between the 1st specific lamp L1 and the 2nd lamp L2, under the situation of generation crest portion between the 2nd lamp L2 and the 3rd lamp L3; Be judged as the optical axis deviation of lamp L2; From alarm portion 74 output alarm signals (step S13), light irradiation device abnormal ending or turn off the light.
Lighting the 71e of time monitoring portion keeps watch on as above-mentioned from the accumulative total of lamp L1～L5 that the power supply unit 9 of lamp L1～L5 power supply is sent here and lights the time (step S9).And; Ensure that with the lamp that is stored in the storage part 72 life time data 72d compares; Judge whether reached guarantee life-span (step S10), ensure the life-span if the accumulative total time of lighting reaches if adding up the time of lighting, the alarm signal of then changing (step S11) from alarm portion 74 output lamps.Thus, the release of light irradiation device and turning off the light.In addition,, then after the interval time of regulation, return step S1, repeat above-mentioned processing if the accumulative total time of lighting does not reach the guarantee life-span.
Figure 23 is the FBD of graphics processing unit of the light irradiation device of expression the 4th embodiment of the present invention, and Figure 24 is the process flow diagram of the processing order of the above-mentioned graphics processing unit of expression.Present embodiment constitutes, and in above-mentioned Figure 13, the 2nd embodiment shown in Figure 14, when the illumination decrease of specific lamp, the electric power that this lamp is supplied with is increased and illumination is recovered.
In Figure 23; The structure of illumination part 1 is identical with structure shown in Figure 13; (light of in the figure each lamp note being made L1～L5) emit is by reverberator 22 reflections of elliptical reflector, and the light of emitting as directional light is by 40 reflections of optically focused parts and be radiated on the diffuser plate 55 from discharge lamp 30.By the light of diffuser plate 55 scattered reflections through being built in the imaging optic elements 65 such as lens unit or pinhole plate in the optical sensor 60, in imaging on the photodetector array 61 corresponding to the light quantity of the light of the Illumination Distribution on the diffuser plate 55.
Be sent out to graphics processing unit 7 by the corresponding signal (light quantity) of above-mentioned optical sensor 60 detected light intensities.Graphics processing unit 7 as stated; Constitute by handling part 71, storage part 72, display part 73 and alarm portion 74 etc.; In above-mentioned storage part 72, preserve: above-mentioned position corresponding data 72a, transformation ratio data 72b, illumination movement threshold data 72c and lamp ensure life time data 72d.
Handling part 71 as above-mentioned shown in Figure 13 possesses: whether the 71a of pre-treatment portion, the 71b of conversion process portion, the illumination change supervision 71c of portion, the 71d of display process portion and the time of lighting of keeping watch on each lamp reach the 71e of the time monitoring portion that lights that the lamp that is kept in the storage part 72 ensures the time of life time data 72d.
In addition, in the present embodiment, possess power supply control part 71f, this power supply control part 71f controls when the supervision 71c of portion detects the decline of illumination of specific lamp when being changed by above-mentioned illumination, so that the increase of the electric power of this lamp.
If the decline of illumination is the scope that can regulate electric power, among the power supply unit PS1～PS5 of the power supply unit 9 of the control part 71f that then supplies power control lamp, to the power supply unit (for example being power supply unit PS2 under the situation of lamp L2) of this lamp power supply, electric power is increased.
In addition, not under the situation in the scope that can regulate electric power, the illumination change supervision 71c of portion is from the 74 output illumination decrease alarms of alarm portion in the decline of illumination.
Except having above-mentioned power supply control part 71f, the structure of the graphics processing unit of present embodiment and above-mentioned structure shown in Figure 13 are same, and the action of each one also is same.
Through the process flow diagram of Figure 24, the processing of the handling part of present embodiment is described.In addition, except when control so that the electric power of this lamp increases beyond this point when detecting the decline of illumination of specific lamp, with the processing of Figure 14 be same.
Handling part 71 will be taken into (step S1) by optical sensor 60 detected ccd images, as above-mentioned, carried out the accumulative total of the light quantity distribution of line direction (Y direction) by the 71a of pre-treatment portion and handle (step S2).Then, read in transformation ratio data 72b, position corresponding data 72a, in the 71b of conversion process portion, as above-mentioned, carry out conversion process (step S3, S4) from storage part 72.
Then, will handle through the 71d of display process portion, be presented at (step S5) on the display part 73 as view data by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process.Thus, shown in above-mentioned Figure 18 (c), show the change of Illumination Distribution.
The illumination change supervision 71c of portion compares by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process and is stored in the illumination movement threshold data 72c in the storage part 72, judges whether the illumination change (step S6, S7) of particular lamp.
If the zone of illumination decrease is arranged, then the illumination change supervision 71c of portion judges that which lamp the lamp as the reason of illumination decrease is, judges whether it is the illumination decrease (step S11) that can carry out in the scope of electric adjustment.Can recover to advance to step S13 under the situation of illumination decrease through electric adjustment, control power supply control part 71f, regulate the electric power of this lamp.
This electric adjustment both can the FEEDBACK CONTROL amount of power so that for example become desirable distribution by optical sensor 60 detected light quantity distribution, perhaps also can store the electric adjustment amount relative, amount of power increased according to the illumination decrease amount with the illumination decrease amount.
In the decline of illumination under the situation of the scope that can recover through electric adjustment; Alarm signal (step S12) from alarm portion 74 output illumination decrease; If export above-mentioned illumination decrease signal as alarm signal, then light irradiation device abnormal ending or turn off the light.
In addition, the accumulative total of lighting the 71e of time monitoring portion pilot lamp L1～L5 is lighted the time (step S8).And; Be stored in lamp in the storage part 72 and ensure among the life time data 72d and compare; Judge whether reached guarantee life-span (step S9), ensure the life-span if the accumulative total time of lighting reaches if adding up the time of lighting, the alarm signal of then changing (step S10) from alarm portion 74 output lamps.Thus, the release of light irradiation device and turning off the light.
In addition,, then after the interval time of regulation, return step S1, repeat above-mentioned processing if the accumulative total time of lighting does not reach the guarantee life-span.
Figure 25 is the FBD of graphics processing unit of the light irradiation device of expression the 5th embodiment of the present invention, and Figure 26 is the process flow diagram of the processing order of the above-mentioned graphics processing unit of expression.Present embodiment constitutes, and in above-mentioned Figure 19, the 3rd embodiment shown in Figure 20, when the illumination decrease of specific lamp, the electric power that this lamp is supplied with is increased and Illumination Distribution is recovered.
In Figure 25; The structure of illumination part 1 is identical with structure shown in Figure 13; (light of in the figure each lamp note being made L1～L5) emit is by reverberator 22 reflections of elliptical reflector, and the light of emitting as directional light is by 40 reflections of optically focused parts and be radiated on the diffuser plate 55 from discharge lamp 30.By the light of diffuser plate 55 scattered reflections through be built in imaging optic elements 65 such as lens unit or pinhole plate in the optical sensor 60 in imaging on the photodetector array 61 corresponding to the light quantity of the light of the Illumination Distribution on the diffuser plate 55.
Be sent out to graphics processing unit 7 by the corresponding signal (light quantity) of above-mentioned optical sensor 60 detected light intensities.Graphics processing unit 7 is same with above-mentioned structure shown in Figure 19, is made up of handling part 71, storage part 72, display part 73 and alarm portion 74 etc.
In above-mentioned storage part 72, preserve: position corresponding data 72a, benchmark light quantity data 72e, illumination movement threshold data 72c and lamp ensure life time data 72d.
72e is as above-mentioned for said reference light quantity data; For example be when new discharge lamp 30 being installed on illumination part 1 and this discharge lamp 30 being lighted at first; With the light quantity data recording of the position on the detected photodetector array 61 in above-mentioned storage part 72 and the data that obtain use these data as benchmark light quantity data.
Handling part 71 is structures same basically with structure shown in Figure 19, possesses: whether the 71a of pre-treatment portion, the 71b of conversion process portion, the illumination change supervision 71c of portion, the 71d of display process portion and supervision reach the 71e of the time monitoring portion that lights that lamp ensures life time 72d.
In addition, in the present embodiment,, possess when detecting the illumination decrease of specific lamp by the above-mentioned illumination change supervision 71c of portion and control so that the power supply control part 71f that the electric power of this lamp increases as explanation among the 4th embodiment.
If the decline of power supply control part 71f illumination is the scope that can regulate electric power, then control among the power supply unit PS1～PS5 of power supply unit 9 of lamp, to the power supply unit (for example being power supply unit PS2 under the situation of lamp L2) of this lamp power supply, electric power is increased.
In addition, not under the situation in the scope that can regulate electric power, the illumination change supervision 71c of portion is from the 74 output illumination decrease alarms of alarm portion in the decline of illumination.
Except having above-mentioned power supply control part 71f, the structure of the graphics processing unit of present embodiment and above-mentioned structure shown in Figure 19 are same, and the action of each one also is same.
Figure 26 is the process flow diagram of processing order in the graphics processing unit 7 of expression present embodiment, with reference to Figure 25, through the process flow diagram of Figure 26, the processing in the graphics processing unit is described.In addition, except when control so that the electric power of this lamp increases beyond this point when detecting the illumination decrease of specific lamp, with the processing of Figure 20 be same.
Handling part 71 will be taken into (step S1) by optical sensor 60 detected ccd images, carried out the accumulative total of light quantity distribution by the 71a of pre-treatment portion and handle (step S2).
Then, advance to step S3, the benchmark light quantity data 72e and the position corresponding data 72a that are stored in the storage part 72 are read in, in the 71b of conversion process portion, as above-mentioned, carry out conversion process (step S4).
Then; Judge whether being taken into of this image be being taken into of image (step S5) when new lamp being installed and it being lighted at first; Being taken into of this image is under the situation about being taken into of the image when new lamp being installed and it being lighted at first; These data are saved in (step S13) in the storage part 72 as benchmark light quantity data, after the interval time of regulation, return step S1.
In addition; Under the situation about being taken into of the image when being taken into of this image is not that new lamp is installed and it is lighted at first; To handle through the 71d of display process portion by the Illumination Distribution data after the above-mentioned conversion process 71b of the portion conversion process, be presented at (step S6) on the display part 73 as view data.Thus, such shown in above-mentioned Figure 21 (c), show the change of Illumination Distribution.
The illumination change supervision 71c of portion compares by the incremental data of the Illumination Distribution after the above-mentioned conversion process 71b of the portion conversion process and is stored in the illumination movement threshold data 72c in the storage part 72, judges whether the illumination change (step S7, S8) of particular lamp.
If the zone of illumination decrease is arranged, then the illumination change supervision 71c of portion judges that which lamp the lamp of the reason that becomes illumination decrease is, judges whether it is the illumination decrease (step S14) that can carry out in the scope of electric adjustment.Can recover to advance to step S15 under the situation of illumination decrease through electric adjustment, control power supply control part 71f, regulate the electric power of this lamp.
In the decline of illumination under the situation of the scope that can recover through electric adjustment; Alarm signal (step S16) from alarm portion 74 output illumination decrease; If export above-mentioned illumination decrease signal as alarm signal, then light irradiation device abnormal ending or turn off the light.
In addition, the light quantity change supervision 71c of portion under the situation of the optical axis deviation that is judged as lamp (step S9), exports alarm signals (step S17) from alarm portion 74 as explanatorily such among above-mentioned Figure 22 (b), light irradiation device abnormal ending or turn off the light.
Lighting the 71e of time monitoring portion keeps watch on as above-mentioned from the accumulative total of lamp L1～L5 that the power supply unit 9 of lamp L1～L5 power supply is sent here and lights the time (step S10).And; Ensure life time data 72d relatively with the lamp that is stored in the storer 72; Judge whether reached guarantee life-span (step S11), ensure the life-span if the accumulative total time of lighting reaches if adding up the time of lighting, the alarm signal of then changing (step S12) from alarm portion 74 output lamps.Thus, the release of light irradiation device and turning off the light.In addition,, then after the interval time of regulation, return step S1, repeat above-mentioned processing if the accumulative total time of lighting does not reach the guarantee life-span.
In the explanation of the foregoing description; The light amount signal of sending here from optical sensor 60 being carried out the accumulative total of the light quantity distribution of Y direction (line direction) handles; And directions X shown the change of Illumination Distribution, carry out this accumulative total and handle preceding data, be not only the Illumination Distribution of directions X, also show the Illumination Distribution of Y direction but also can use.
Particularly, the Illumination Distribution with directions X, Y direction for example shows with the such form of contour map.If show Illumination Distribution like this, then whole state comes into plain view, so confirm unusual easily.
In addition, in above-mentioned explanation, be illustrated used the situation of 2 dimensional region sensor as photodetector array 61, but can use above-mentioned line sensor shown in Figure 5.
Using under the situation of line sensor as photodetector array 61, in the process flow diagram of the foregoing description, do not needing the integral processing of the line direction of step S2, but other handle with explanation in the above-described embodiments be same.
In addition, in the above-described embodiments, the situation of in irradiation area, having placed diffuser plate is illustrated, but also can places the visible light that the fluorescent plate measurement is sent, also can not place diffuser plate etc. and measure scattered light from mask.And then; Such like explanation among above-mentioned Fig. 1, also can be used as optically focused parts 40 and use coated reflector, the diffusion scattered light of unwanted visible or infrared light in the processing of shone thing of crossing optically focused parts 40 through the detection transmission obtains the Illumination Distribution in the rayed zone.
Under situation about measuring, though according to the place and reflectivity step-down, measuring accuracy descend, while the measurement in real time that can make public from the scattered light of mask.In addition; Using coated reflector as the optically focused parts, crossing the diffusion scattered light of the visible or infrared light of optically focused parts and obtain under the situation that light arrives the Illumination Distribution in the zone, while the measurement in real time that can make public too through detecting transmission.
Label declaration
1 illumination part
7 graphics processing units
9 power supply units
10 smooth outgoing portions
11 lamp housings
Opening is used in the outgoing of 12A light
Opening is used in the incident of 12B diffusion light
13 luffer boards parts
20 light source components row
21 light source components
22 reverberators
The C optical axis
The F focus
23 light reflection surfaces
30 discharge lamps
The S discharge space
31 luminotrons
32 illuminating parts
33 sealings
35 electrodes
36 metal formings
37 outer leads
40 optically focused parts
The L optical axis
40A optically focused parts
41 light reflection surfaces
45 masks
50 conveying mechanisms
51 rollers
The W shone thing
55 diffuser plates
55A light diffusingsurface
LA rayed zone
56 diffuser plates
60 optical sensors
601 sensitive surfaces
60A the 1st optical sensor
60B the 2nd optical sensor
61 photodetector arrays
65 imaging optic elements
66 imaging lens
71 handling parts
71a pre-treatment portion
71b conversion process portion
71c illumination change supervision portion
71d display process portion
71e lights time monitoring portion
The 71f control part of supplying power
72 storage parts
72a position corresponding data
72b transformation ratio data
72c illumination movement threshold data
The 72d lamp ensures the life time data
72e benchmark light quantity data
73 display parts
74 alarm portions
100 light source portion
101 light source cells
The 101-a discharge lamp
The 101-b catoptron
102 integrators
103 retroreflectors
The 103-a light transmission department
The 106-b storing mechanism
107 illumination photometry devices
111 lamp optical systems
111-a illuminator unit
115 optical sensors
116 substrates
The 117XYZ platform
Claims (11)
1. light irradiation device is characterized in that possessing:
Light outgoing portion has a plurality of light source components alignment arrangements and the light source component that obtains row in one direction, and this light source component is made up of the discharge lamp of short-arc type and the reflection of light device that reflects from this discharge lamp that surrounds this discharge lamp configuration; And
The photodetector array detects the light quantity from the diffusion light of a plurality of measuring points, and these a plurality of measuring points are from a plurality of measuring points in the light arrival zone of the light of each light source component.
2. light irradiation device as claimed in claim 1 is characterized in that,
The diffusion light of above-mentioned measuring point via imaging optic element by above-mentioned photodetector array detection.
3. according to claim 1 or claim 2 light irradiation device is characterized in that,
Diffuser plate is located on the light path of the light of above-mentioned smooth outgoing portion outgoing free to advance or retreatly, and the light quantity of the diffusion light on the light diffusingsurface of this diffuser plate is by above-mentioned photodetector array detection.
4. light irradiation device as claimed in claim 3 is characterized in that,
Be provided with shutter part, this shutter part the time is positioned on the light path of the light of above-mentioned smooth outgoing portion outgoing and to the light from this light outgoing portion in action and carries out shading;
Above-mentioned diffuser plate is located on the photoirradiated surface of this shutter part.
5. according to claim 1 or claim 2 light irradiation device is characterized in that,
Possessing will be from the light optically focused of the above-mentioned smooth outgoing portion optically focused parts for the wire of extending along an above-mentioned direction.
6. according to claim 1 or claim 2 light irradiation device is characterized in that,
Possess the light reflection having been implemented to make from the wavelength coverage of the regulation in the light of above-mentioned smooth outgoing portion, make light transmissive wavelength beyond this wavelength coverage select the reflection part of coating;
The light of the transmitted light after crossing this reflection part from the transmittance of above-mentioned smooth outgoing portion arrives on the zone and is provided with diffuser plate, from the diffusion light of this diffuser plate by above-mentioned photodetector array detection.
7. light irradiation device possesses:
Light outgoing portion has a plurality of light source components alignment arrangements and the light source component that obtains row in one direction, and this light source component is made up of the discharge lamp of short-arc type and the reflection of light device that reflects from this discharge lamp that surrounds this discharge lamp configuration;
Diffusion mechanism, the light that is configured in from the light of each light source component arrives in the zone, makes light diffusion and radiation from this light source component;
Light quantity testing agency, possess acceptance from the diffusion scattered light of this diffusion mechanism, and detect a plurality of photodetectors of light quantity of this diffusion scattered light at each position of accepting; And
Graphics processing unit is handled the output of above-mentioned light quantity testing agency,
It is characterized in that,
Above-mentioned graphics processing unit possesses:
Conversion process portion; Each position in the above-mentioned light quantity testing agency and from the rayed zone that light shone of above-mentioned light source component outgoing everybody are set up upright corresponding, and the light quantity of the position in the light quantity testing agency is transformed to the signal that the light quantity of the position in this rayed zone of expression changes; And
Output mechanism, the signal output of the light quantity change of each position in the expression rayed zone that will obtain by above-mentioned conversion process portion.
8. light irradiation device as claimed in claim 7 is characterized in that,
Above-mentioned light irradiation device possesses display unit, and the position foundation that above-mentioned graphics processing unit possesses the signal of the expression light quantity change that is obtained by above-mentioned conversion process portion and rayed zone is presented at the display process mechanism in the above-mentioned display unit accordingly.
9. like claim 7 or 8 described light irradiation devices, it is characterized in that,
Above-mentioned light irradiation device possesses the supply unit of supplying power for the discharge tube lighting of each light source component that makes light irradiation device;
Above-mentioned graphics processing unit also possesses: light quantity change MA monitoring agency, keep watch on the signal of light quantity change of each position in the expression rayed zone that obtains by above-mentioned conversion process portion; And supply power in the controlling organization, be used for controlling the electric power of each light source component being supplied with from above-mentioned supply unit;
Above-mentioned light quantity change MA monitoring agency; When the light quantity of the input discharge lamp of specific light source component in light source component that changes through the light quantity of representing each position that above-mentioned rayed is regional descends; Control above-mentioned supply unit through above-mentioned supply power in the controlling organization; The electric power of the discharge lamp supply that above-mentioned light quantity is descended is increased, the light quantity of this discharge lamp is increased.
10. like claim 7 or 8 described light irradiation devices, it is characterized in that,
Above-mentioned graphics processing unit has the transformation ratio of preserving memory of data, and these transformation ratio data are used for the light quantity of the position in the above-mentioned light quantity testing agency is transformed to the signal of the light quantity of each position in this rayed zone of expression;
The transformation ratio data are read in from above-mentioned storer in above-mentioned conversion process portion; According to the light quantity of this diffusion scattered light at each position in the above-mentioned light quantity testing agency be kept at the transformation ratio data in the above-mentioned storer, the signal of the light quantity change of each position in the represents rayed zone.
11. like claim 7 or 8 described light irradiation devices, it is characterized in that,
Above-mentioned graphics processing unit has the storer that the light quantity that detects the position in the light quantity testing agency when discharge lamp of the light source component row that make this light irradiation device lighted is at first preserved as benchmark light quantity data;
Above-mentioned conversion process portion is according to the light quantity of this diffusion scattered light at each position in the above-mentioned light quantity testing agency and be kept at the benchmark light quantity data in the above-mentioned storer, the signal of the light quantity change of each position in the represents rayed zone.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP266415/2010 | 2010-11-30 | ||
| JP2010266415A JP5234091B2 (en) | 2010-11-30 | 2010-11-30 | Light irradiation device |
| JP043804/2011 | 2011-03-01 | ||
| JP2011043804A JP5541198B2 (en) | 2011-03-01 | 2011-03-01 | Light irradiation device |
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| Publication Number | Publication Date |
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| CN102540757A true CN102540757A (en) | 2012-07-04 |
| CN102540757B CN102540757B (en) | 2015-03-11 |
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| CN201110386350.2A Expired - Fee Related CN102540757B (en) | 2010-11-30 | 2011-11-29 | Light irradiating device |
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| KR (1) | KR101408516B1 (en) |
| CN (1) | CN102540757B (en) |
| TW (1) | TWI463272B (en) |
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| CN110915006A (en) * | 2018-11-19 | 2020-03-24 | 泉州三安半导体科技有限公司 | Ultraviolet light source packaging element |
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Also Published As
| Publication number | Publication date |
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| TW201237560A (en) | 2012-09-16 |
| KR101408516B1 (en) | 2014-06-17 |
| TWI463272B (en) | 2014-12-01 |
| CN102540757B (en) | 2015-03-11 |
| KR20120059359A (en) | 2012-06-08 |
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