TWI600894B - Measuring apparatus and measuring method - Google Patents

Description

Measuring device and measuring method

The present invention relates to a measuring device and a measuring method for measuring the optical properties of a phosphor.

Various phosphors containing fluorescent substances have been utilized for various purposes in the past. In recent years, it has been widely used as a light-emitting element such as an LED (Light Emitting Diode), a liquid crystal display, or a display element such as an organic EL (Electro Luminescence) display. The phosphor shown above will affect the performance of the light-emitting element or the display element, and therefore its optical properties must be properly evaluated.

In the structure of the evaluation of the phosphors as described above, Japanese Laid-Open Patent Publication No. 2012-208024 discloses a configuration for measuring the fluorescence spectrum of the phosphor used in the light-emitting device by dispersing in a package. .

The configuration disclosed in Japanese Laid-Open Patent Publication No. 2012-208024 is applied to measuring a spectrum of a phosphor of a sample (sample) in which a phosphor is dispersed in a package, and basically determines a fluorescence spectrum of each sample. .

On the other hand, in the production line of a phosphor or the like, there is a demand for measuring a plurality of phosphors to be inspected in a shorter period of time. For example, manufacturing or inspection is performed in a state in which a sheet of a phosphor is formed in its entirety. The sheet formed as a phosphor as described above is cut out of a desired size area as an article. Use it. In the configuration disclosed in Japanese Laid-Open Patent Publication No. 2012-208024, it is necessary to measure the integrating sphere by contacting the plate-shaped sample. Therefore, when measuring the fluorescence spectrum of a plurality of measurement points located in the same plane, it is necessary to repeat the movement of the integrating sphere and the contact with the sample, and it is difficult to shorten the time required for the measurement.

The present invention has been made in order to solve the problems as described above, and an object thereof is to provide a measuring device and a measuring method capable of measuring the optical performance of a phosphor in a shorter period of time.

An apparatus for measuring an optical property of a phosphor according to a certain aspect of the present invention includes: a light source for irradiating the phosphor with excitation light; and a light for transmitting the excitation light through the phosphor; a light receiving portion of the fluorescent light generated by the fluorescent body by the excitation light; and a detecting portion for detecting the light received by the light receiving portion. The light receiving unit includes a frame body having a predetermined length in the irradiation direction of the excitation light, a light diffusion portion disposed on the side of the phosphor of the frame body, and a light diffusion portion disposed on the opposite side of the light diffusion portion of the frame body. The window that guides the incident fluorescent light to the detecting portion.

Preferably, the light receiving portion is disposed away from the phosphor at a predetermined distance.

Preferably, the light diffusing portion is disposed in a range including a field of view from the window.

Preferably, the measuring device further includes a moving mechanism that changes the position at which the excitation light from the light source is incident on the phosphor.

Preferably, in the phosphor, a plurality of light receiving portions are arranged in accordance with a predetermined rule, and the detecting portion measures the fluorescence received by the plurality of light receiving portions in parallel.

Other aspects of the invention for determining the optics of a phosphor The method for measuring performance includes a step of irradiating the phosphor with excitation light by a light source, a light that transmits the excitation light through the light receiving portion, and a fluorescent light that is generated in the phosphor by the excitation light. And a step of detecting, by the detecting unit, the light received by the light receiving unit. The light receiving unit includes a frame body having a predetermined length in the irradiation direction of the excitation light, a light diffusion portion disposed on the side of the phosphor of the frame body, and a light diffusion portion disposed on the opposite side of the light diffusion portion of the frame body. The window that guides the incident fluorescent light to the detecting portion.

According to the present invention, the optical properties of the phosphor can be measured in a shorter time.

The above and other objects, features, aspects and advantages of the present invention will become apparent from

1‧‧‧Measurement device

2‧‧‧sample

10‧‧‧Receiving Department

12‧‧‧ frame

14‧‧‧Light Diffusion Department

16‧‧‧ inside

18‧‧‧ window

20, 66‧‧‧ fiber

22‧‧‧Connecting end

24 ‧ ‧ Vision

50, 60‧‧‧ Department of Irradiation

52‧‧‧Light source

54‧‧‧ Concentrating lens

56‧‧‧Power supply unit

62‧‧‧Excited light source

64‧‧‧Wavelength Selection Department

80‧‧‧hemispherical integrating sphere

84, 94‧‧‧light window

86‧‧‧Test window

90‧‧·score ball

92‧‧‧reflector

96‧‧‧Injection window

200‧‧‧Detection Department

202‧‧‧Diffraction grating

204‧‧‧Detection components

206‧‧ ‧Shutter

208‧‧‧ slit

220‧‧‧Multiple input spectrophotometer

300‧‧‧Processing device

302‧‧‧CPU

304‧‧‧RAM

306‧‧‧ Hard disk

307‧‧‧Measurement program

308‧‧‧Disc drive

309‧‧‧DVD

310‧‧‧ Input Department

312‧‧‧Display Department

314‧‧‧Import and export interface

316‧‧ ‧ busbar

400, 402, 500‧‧‧ inspection devices

410‧‧‧Black box for measurement

412‧‧‧Sample stage

414‧‧‧ Position Control Controller

420‧‧‧Black box for calibration

422‧‧‧Standard light source

424‧‧‧Power supply for standard light source

440‧‧‧sample holder

450‧‧‧匣 box

460‧‧‧Handling robot

462‧‧‧ Arms

464‧‧‧area sensor

470‧‧‧Support components

490‧‧‧sample storage unit

Fig. 1 is a schematic view showing the overall configuration of a measuring apparatus according to the present embodiment.

Fig. 2 is a schematic view showing a configuration example of a detecting unit according to the present embodiment.

Fig. 3 is a schematic view showing a configuration example of a processing apparatus according to the present embodiment.

Fig. 4 is a schematic view for explaining the occurrence of fluorescence in a flaky sample.

Fig. 5 is a schematic view showing a configuration for measuring the optical performance of a flaky sample using an integrating sphere.

Fig. 6 is a view showing an example of the cosine characteristic of the integrating sphere.

Fig. 7 is a schematic view showing a configuration for measuring the optical performance of a flaky sample using a hemispherical integrating sphere.

Fig. 8 is a schematic view showing a configuration for measuring the optical performance of a flaky sample using the measuring apparatus according to the embodiment.

Fig. 9 is a view showing an example of the cosine characteristic of the light receiving portion of the measuring device according to the embodiment.

Fig. 10 is a view showing an example of the result of chromaticity measurement using the light receiving unit of the measuring apparatus according to the present embodiment.

Fig. 11 is a graph showing the measurement results shown in Fig. 10 plotted on the distance between the sample and the light receiving portion.

Fig. 12 is a graph showing the difference between the chromaticity x and the chromaticity y with respect to the measurement result shown in Fig. 10 regarding the distance between the sample and the light receiving portion.

Fig. 13 is a view showing an example of the result of spectrum measurement using the light receiving unit of the measuring apparatus according to the present embodiment.

Fig. 14 is a schematic view for explaining a light receiving angle in the light receiving portion according to the embodiment.

Fig. 15 is a graph showing a change in the light receiving angle when the light projecting diameter is changed while maintaining the light receiving diameter in the light receiving portion according to the embodiment.

Fig. 16 is a graph showing a change in the light receiving angle when the light receiving diameter is changed while maintaining the light projecting diameter in the light receiving portion according to the embodiment.

Fig. 17 is a schematic view showing an example of an inspection apparatus including the measuring apparatus according to the embodiment.

Fig. 18 is a flow chart showing the procedure for measuring the optical performance of the sample using the inspection apparatus shown in Fig. 17.

Fig. 19 is a schematic view showing an example of an inspection apparatus including the measuring apparatus according to the embodiment.

Fig. 20 is a schematic view showing another example of the inspection apparatus including the measuring apparatus according to the embodiment.

Embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and the description thereof is not repeated.

<A. Schematic configuration of the measuring device>

First, a schematic configuration of a measuring apparatus according to the present embodiment will be described. Fig. 1 is a schematic view showing the overall configuration of a measuring apparatus 1 according to the present embodiment. The measuring device 1 measures the optical properties of the phosphor. The phosphor to be measured is also referred to as "sample 2" hereinafter.

Referring to Fig. 1, the measuring device 1 irradiates the sample 2 with excitation light, and detects the light that has passed through the phosphor among the excitation light and the fluorescence that has occurred in the sample 2 by the excitation light. Typically, the measuring device 1 is a transmission type fluorescence measuring device.

The measuring device 1 shown in Fig. 1 includes an illuminating unit 50 for irradiating the sample 2 with excitation light, light for transmitting the excitation light through the phosphor, and sample 2 by the excitation light. The light-receiving portion 10 that generates the fluorescence; the detecting portion 200 for detecting the light received by the light-receiving portion 10; and the processing device 300.

The illuminating unit 50 includes a light source 52 for generating excitation light, a condensing lens 54 disposed on an optical axis of the excitation light, and a driving light source 52. Power supply unit 56. The light source 52 is designed to generate excitation light having a wavelength bandwidth corresponding to the characteristics of the sample 2. More specifically, a blue LED or the like is employed as the light source 52. Alternatively, a halogen light source with a spectroscope, a xenon light source, a mercury lamp or the like may be used as the light source 52. By using these light sources, excitation light containing a specific wavelength can be generated. Condenser lens 54 includes an optical system for converting excitation light from source 52 into parallel light. The power supply device 56 supplies electric power corresponding to the type of the light source 52.

When the excitation light from the irradiation unit 50 is incident on the sample 2, the wavelength component of the component or composition of the sample 2 is absorbed and fluorescence is generated. The light that is not absorbed and is not reflected by the excitation light is transmitted as transmitted light. The light receiving unit 10 receives the generated fluorescence and transmitted light and guides it to the detecting unit 200.

The light receiving unit 10 does not directly receive the fluorescent light and the transmitted light from the sample 2, but receives the light transmitted through the light diffusing portion 14. In other words, the light receiving unit 10 includes a frame body 12 having a predetermined length in the irradiation direction of the excitation light, a light diffusion portion 14 disposed on the sample 2 side of the frame body 12, and a sample disposed on the frame body 12. The opposite side of 2 is for guiding the incident fluorescent light to the window 18 of the detecting portion 200.

The frame 12 is configured to have a predetermined length in the irradiation direction (optical axis direction) of the excitation light in order to increase the field of view (sectional area) from the window 18 as much as possible. Typically, the cylindrical frame 12 is preferred, but the cross-sectional shape of the frame 12 is not limited to a circle. For example, a cylindrical structure having a hexagonal or octagonal polygonal cross-sectional shape can also be employed. That is, the field of view (sectional area) from the window 18 may be any shape if it is not limited by the inner surface 16 of the frame 12. Further, in the case of the frame 12, the cross-sectional area on the side of the light diffusing portion 14 may be larger, and the cross-sectional area on the side of the window 18 may be smaller, such as a cone or a truncated cone. shape.

The light diffusing portion 14 is for integrating (uniformizing) the fluorescent light emitted from the sample 2 in each direction. Typically, the light diffusing portion 14 is realized by a diffusion sheet having a predetermined light transmittance. The light diffusing portion 14 does not need to cover the entire opening of the casing 12, but is preferably the entire light that is guided to the detecting portion 200 by the transmission window 18. That is, the light diffusing portion 14 is disposed in a range including the field of view 24 from the window 18. By passing through the light diffusing portion 14 as described above, the same effect as the integration (homogenization) of the fluorescent light using the integrating sphere can be substantially obtained.

The connection end 22 of the optical fiber 20 for optically connecting the light receiving unit 10 and the detecting unit 200 is inserted into the window 18, and the light entering the light receiving unit 10 is transmitted through the optical fiber 20 and guided to the detecting unit 200. In the case of the optical fiber 20, it may be constituted by a plurality of wires, in which case the plurality of wires are gathered at the connecting end 22. If the connection end 22 as shown above is used, the field of view 24 depends on the number of openings of the optical fiber 20. Alternatively, a slit can be used as the window 18. At this time, the field of view 24 depends on the slit width and the like. Further, the detecting unit 200 and the light receiving unit 10 may be directly connected without using the optical fiber 20.

The detecting unit 200 detects the light received by the light receiving unit 10. Typically, the detecting unit 200 measures the spectral illuminance of the incident light. As an example of the detecting unit 200 as described above, a spectrophotometer that can measure the characteristic value included in the fluorescence for each wavelength is used. In the case of a spectrophotometer, a monochromator that measures a characteristic value at a single wavelength can be used, or a polychromator that simultaneously measures a characteristic value (spectrum) in a certain wavelength range can be used. In the case of the characteristic value of the sample 2, a chromaticity sensor can also be used if a spectrum is not required and only chromaticity is required. Coping with The appropriate detection unit 200 is selected for the evaluation item or the like required for the sample 2.

Fig. 2 is a schematic view showing a configuration example of the detecting unit 200 according to the present embodiment. In the second drawing, an example in which the detecting unit 200 is realized using a spectrophotometer (polychromator) is shown. More specifically, the detecting unit 200 includes a diffraction grating 202, a detecting element 204, a shutter 206, and a slit 208. Light incident through the optical fiber 20 is reflected by the diffraction grating 202 after passing through the slit 208. Each wavelength component contained in the light in the diffraction grating 202 is reflected in various directions in accordance with the wavelength thereof. Then, each of the reflected wavelength components is incident on a region corresponding to the wavelength of the detecting element 204. The surface area of the detecting element 204 is divided into predetermined unit areas, and the received light spectrum is detected based on the intensity values in the respective unit areas.

The shutter 206 is configured to block light incident on the inside of the detecting unit 200 when dark correction or the like is performed. Further, in order to reduce the glare component or the like, a color filter that blocks light of a wavelength outside the measurement wavelength range may be disposed in the rear stage of the shutter 206.

Referring again to Fig. 1, the processing device 300 calculates and outputs the optical performance of the sample 2 based on the detection signal outputted by the detecting unit 200. The optical properties of the sample 2 include evaluation values such as brightness or color tone in addition to the spectral characteristics (spectral illuminance). Here, the brightness means the brightness or luminosity of the sample 2, and the color tone means the chromaticity coordinate, the dominant wavelength, the stimulation purity, and the correlated color temperature of the sample 2.

Fig. 3 is a schematic view showing a configuration example of the processing apparatus 300 according to the present embodiment. As shown in FIG. 3, the processing device 300 is typically implemented by a general purpose computer. More specifically, the processing device 300 includes a CPU (Central Processing Unit) 302 as a main memory. A RAM (Random Access Memory) 304, a hard disk (HDD) 306, an optical disk drive device 308, an input unit 310, a display unit 312, and an input/output interface 314. The components are interconnected by a bus bar 316.

A measurement program 307 for realizing measurement processing to be described later is attached to the hard disk 306. The measurement program 307 is developed in the RAM 304 or the like and executed by the CPU 302. The program shown above is stored in a recording medium such as a disc 309 or distributed through a network or the like. The program stored in the recording medium such as the optical disk 309 is read from the recording medium by the optical disk drive device 308 or the like, and is mounted on the hard disk 306.

The input unit 310 includes a keyboard, a mouse, a touch panel, and the like, and accepts commands or operations from the user. The display unit 312 includes a display or various indicators, and outputs measurement results calculated by the processing device 300.

The input/output interface 314 outputs an instruction to the component included in the measurement device 1, and receives an input signal from the detection unit 200 or the like. In the input/output interface 314, a general interface such as a USB (Universal Serial Bus) can also be used. In addition, an output device such as a printer can be connected to the input/output interface 314 as needed.

In the processing device 300 of the measuring device 1 according to the present embodiment, an example in which a measurement process to be described later is executed by executing a program by a general-purpose processor (CPU 302) will be described, but a dedicated processor or IC may be used. (Integrated Circuit, etc.) or the like to realize all or part of the measurement process. Alternatively, it can be realized by using a dedicated hardware circuit such as an ASIC (Application Specific Integrated Circuit).

<B. Background and related technologies>

(1: background and needs)

As described above, the fluorescent system is an indispensable material for manufacturing a light-emitting element or a display element. In a typical phosphor manufacturing line, the fluorescent system is manufactured in a sheet form, and quality management is also performed in this state. In part of the quality management as described above, the in-plane distribution measurement of the optical properties of the phosphor sheet is required. On the other hand, in order to improve the production efficiency of the phosphor sheet, rapid measurement (inspection) is required. That is, in the manufacturing line, the demand for measuring the plurality of measurement points set on the phosphor sheet in a shorter period of time is increasing. Further, in the case of a measurement that can achieve rapid measurement and long-term stability, the function of the measuring device can be corrected in a more simplified order, and the demand is also increasing.

(2: the occurrence of fluorescence)

Fig. 4 is a schematic view for explaining the occurrence of fluorescence in the flaky sample 2. As shown in Fig. 4, the light distribution pattern of the fluorescent light generated by irradiating the excitation light to the sheet-like sample 2 is changed depending on the type of the sample 2 (fluorescent body) and the measurement position. In addition, the fluorescent light distribution pattern also varies depending on the wavelength. Therefore, it is not easy to measure the optical properties of the flaky sample 2.

(3: Measurement using an integrating sphere)

First, a configuration for measuring the optical performance of the flaky sample 2 using an integrating sphere will be described with reference to the related art.

Fig. 5 is a schematic view showing a configuration for measuring the optical performance of the sheet-like sample 2 using an integrating sphere. Referring to Fig. 5, the sample 2 is irradiated with excitation light, and the transmitted light and the fluorescence generated by the irradiation of the excitation light are integrated (uniformized) by the integrating sphere 90, and then the spectroscopic emission is measured in the light receiving window 94. Illumination and so on. Wherein, in the vicinity of the light receiving window 94, it is provided to suppress the incident light The baffle 92 of the light receiving window 94 is directly reached.

Since the integrating sphere 90 is a sphere, the range in which the sample 2 is contacted is also formed into a curved shape. Therefore, the entrance window 96 including the metal port is provided in the range in which the integrating sphere 90 is in contact with the sample 2. That is, the surface of the metal port formed on the plane contacts the sample 2, and the fluorescence from the sample 2 is received in the integrating sphere 90. Here, in the case of the metal port, it is necessary to have a thickness of about 10 to 15 mm, and the optical performance of the fluorescent light cannot be accurately measured due to the influence of the thickness. That is, depending on the fluorescent light distribution pattern from the sample 2, the thickness of the metal port may hinder the emission of the fluorescent light, and the accurate measurement may not be performed.

In addition, the integrating sphere 90 must be brought into contact with the sample 2 for measurement. If the in-plane distribution of the phosphor sheet is to be measured, it is necessary to repeatedly contact and separate between the integrating sphere 90 and the sample 2, and the measurement efficiency cannot be improved. .

Further, when the integrating sphere 90 is used, there is a case where the incident light characteristics are deteriorated by the influence of the internal reflecting plate 92.

Fig. 6 is a view showing an example of the cosine characteristic of the integrating sphere. That is, the cosine characteristic shown in Fig. 6 indicates the oblique characteristic (the relationship between the incident angle and the relative intensity in the incident window) of the incident light viewed by the incident window 96 of the integrating sphere 90. An example in which the diameter of the integrating sphere is 2 吋 and 4 分别 is shown in Fig. 6, respectively. As indicated by the name of the cosine characteristic, the oblique nature of the incident light should ideally coincide with the cosine function (cos θ). However, the actual cosine characteristics of the integrating sphere 90 are offset from the ideal characteristics.

(4: Measurement using a hemispherical integrating sphere)

Next, a configuration for measuring the optical performance of the flaky sample 2 using a hemispherical integrating sphere will be described. Figure 7 shows the use of a hemispherical integrating sphere 80. A schematic diagram of the configuration of the optical properties of the flaky sample 2 was measured. Referring to Fig. 7, the hemispherical integrating sphere 80 is an integrating device in which a hemisphere having a diffuse reflection layer on the inner surface and a circular plate having a specular reflection layer on the inner surface are combined. For details of the hemispherical integrating sphere 80 as described above, please refer to, for example, Japanese Laid-Open Patent Publication No. 2009-103654. In the hemispherical integrating sphere 80 shown in Fig. 7, the transmitted light and the fluorescent light from the sample 2 are received through the sample window 86 provided in the circular plate, and the received light is subjected to the hemispherical integral. After the inside of the ball 80 is integrated (uniformized), the spectroscopic illuminance and the like are measured in the light receiving window 84. The line connecting the light receiving window 84 and the sample window 86 is provided with a baffle 82 for suppressing the incident light from directly reaching the light receiving window 84.

Unlike the case where the integrating sphere 90 shown in Fig. 5 is used, the portion of the hemispherical integrating sphere 80 that contacts the sample 2 (sample window 86) is formed in a planar shape. Therefore, there is no possibility of obstructing the irradiation of the fluorescent light from the sample 2 due to the contact portion with the sample 2. That is, by using the hemispherical integrating sphere 80, there is no need for a light distribution pattern depending on the fluorescence from the sample 2, and all of the irradiated fluorescent light can be accepted, and accurate measurement can be realized.

However, similarly to the case of using the integrating sphere 90 shown in FIG. 5, even when the hemispherical integrating sphere 80 is used, the hemispherical integrating sphere 80 must be brought into contact with the sample 2 for measurement. Therefore, in order to measure the in-plane distribution of the phosphor sheet, it is necessary to repeatedly contact and separate the hemispherical integrating sphere 80 and the sample 2, and the measurement efficiency cannot be improved.

<C. Measuring device according to the present embodiment>

(1: composition)

Figure 8 is a view showing measurement using the measuring device 1 according to the present embodiment. A schematic diagram of the configuration of the optical properties of the flaky sample 2. As described with reference to Fig. 1, the light receiving unit 10 includes a frame body 12 having a predetermined length in the irradiation direction of the excitation light, and a light diffusion portion 14 disposed on the sample 2 side of the frame body 12. Here, the light receiving unit 10 is disposed away from the sample 2 by a predetermined distance. The distance d between the sample 2 and the light-receiving portion 10 shown in Fig. 8 is a relationship between the projection light diameter ψ 0 and the light-receiving diameter ψ 1 of the frame 12, and the transmittance of the light-diffusing portion 14 in consideration of the point of the excitation light. Optimize.

In order to increase the measurement sensitivity and the measurement accuracy, it is preferable to reduce the distance d between the sample 2 and the light receiving unit 10 and to increase the aperture (light receiving diameter ψ 1) of the light receiving unit 10. Further, the light receiving diameter ψ 1 is preferably sufficiently larger than the light projecting diameter ψ 0 (ψ 1>>ψ 0).

According to the configuration shown in Fig. 8, since it is not necessary to bring the light receiving unit 10 into contact with the sample 2 during the measurement, the time required for the measurement of the in-plane distribution of the phosphor sheet can be shortened. Further, since the optical path is short, the light sensitivity can be improved, and a higher throughput can be realized. For example, when the same detection unit 200 is used, the case where the fluorescence is measured by the light receiving unit 10 according to the present embodiment and the case where the fluorescence is measured using the hemispherical integrating sphere 80 are used, and the exposure time required for each measurement is added. In comparison, when the hemispherical integrating sphere 80 is used, it is necessary to have 5500 ms. On the other hand, when the detecting portion 200 composed of the light diffusing portion 14 having a thickness of 15 mm is used, it is 450 ms. That is, by using the light receiving portion 10 according to the present embodiment, the exposure time can be formed to be about 1/10. In other words, by using the light receiving unit 10 according to the present embodiment, the brightness of the fluorescent light incident on the light receiving unit 10 is about 10 times, and the processing amount can be formed to be about 10 times. As shown above, by increasing the throughput, the tact time of the manufacturing line can be shortened.

In addition, the device configuration can be simplified as compared with when the integrating sphere is used, so that it can be more simplified and the cost can be reduced.

(2: Measurement performance)

In the measuring apparatus 1 according to the present embodiment, deterioration of incident light characteristics can be suppressed. Fig. 9 is a view showing an example of cosine characteristics of the light receiving unit 10 of the measuring device 1 according to the present embodiment. That is, the cosine characteristic shown in FIG. 9 indicates the oblique characteristic (the relationship between the incident angle and the relative intensity in the light diffusing portion 14) of the incident light viewed by the light diffusing portion 14 of the light receiving portion 10. As shown in Fig. 9, the oblique characteristic of the incident light of the light receiving portion 10 substantially coincides with the ideal cosine characteristic, and the measurement accuracy can be further improved as compared with the case where the integrating sphere 90 is used.

(3: distance between the sample and the light receiving portion)

Next, the distance d between the sample 2 and the light receiving portion will be described. As described above, the optical performance of the sample 2 is measured using the hemispherical integrating sphere 80 shown in Fig. 7, whereby the measurement accuracy can be improved as compared with when the integrating sphere 90 is used. Therefore, in the following review, the measurement result obtained when the hemispherical integrating sphere 80 is used is regarded as a reference value.

Fig. 10 is a view showing an example of the result of chromaticity measurement using the light receiving unit 10 of the measuring apparatus 1 according to the present embodiment. In Fig. 10, the results of measurement by measuring the distance d between the sample 2 and the light receiving unit 10 are shown. In the measurement results shown in Fig. 10, the chromaticity (chromaticity x and chromaticity) measured by using the hemispherical integrating sphere 80 shown in Fig. 7 under the conditions of the same sample 2 and the detecting unit 200 are displayed. The difference between the reference values of y). That is, Δx and Δy shown in Fig. 10 indicate the difference between the measurement results for the chromaticity x and the chromaticity y, respectively, and the chromatic aberration indicates the square root of the sum of the squares of Δx and Δy (color difference = √ (Δ) x ² + Δy ² )).

Fig. 11 is a graph showing the measurement result shown in Fig. 10 plotted on the distance d between the sample 2 and the light receiving portion 10. Fig. 12 is a graph showing the difference between the chromaticity x and the chromaticity y with respect to the measurement result shown in Fig. 10 regarding the distance d between the sample 2 and the light receiving portion 10.

As shown in FIGS. 10 to 12, it is understood that the difference between the color difference, that is, the measurement result (reference value) of the hemispherical integrating sphere 80 can be changed by changing the distance d between the sample 2 and the light receiving portion 10 ( The error) is minimized. In other words, by optimizing the distance d between the sample 2 and the light receiving unit 10, the measurement accuracy can be improved. More specifically, a coordinate system in which the distance d and the chromatic aberration of the sample 2 and the light receiving unit 10 shown in Fig. 11 are respectively used as axes can be used, or the difference and color of the chromaticity x shown in Fig. 12 can be used. The difference of degrees y is set to the coordinate system of the axis to determine the optimum value of the distance d. From the results shown in Figs. 10 to 12, it is understood that the distance d between the sample 2 and the light receiving portion 10 is preferably about 10 mm.

Fig. 13 is a view showing an example of the result of spectrum measurement by the light receiving unit 10 of the measuring apparatus 1 according to the present embodiment. In Fig. 13, the results of measurement were performed by setting the distance d between the sample 2 and the light receiving unit 10 to be different. Among them, the intensity of the spectrum is normalized and expressed as relative intensity.

Among the spectrums shown in Fig. 13, under the conditions of the same sample 2 and the detecting unit 200, the spectrum measured by using the hemispherical integrating sphere 80 shown in Fig. 7 is the closest to the sample 2 The distance d from the light receiving unit 10 is set to about 10 mm. That is, it corresponds to the distance d determined by the measurement results shown in Figs. 10 to 12 .

As described above, it is preferable to obtain a measurement value as a reference in advance, and to distance the sample 2 from the light receiving portion 10 so as to be most consistent with the reference value. Optimum.

(4. Light receiving angle in the light receiving section)

Next, the light receiving angle in the light receiving unit 10 will be described. Fig. 14 is a schematic view for explaining a light receiving angle in the light receiving unit 10 according to the embodiment.

As shown in Fig. 14, the light receiving angle θ of the light receiving unit 10 is defined as the maximum angle at which the fluorescent light generated by the sample 2 can enter the light receiving unit 10. Basically, the light receiving angle θ depends on the distance d between the sample 2 and the light receiving unit 10, the light projecting diameter ψ 0 (the spot diameter of the excitation light), and the light receiving diameter ψ 1 (depending on the diameter of the light receiving unit 10) Change). Therefore, for example, when the distance d between the sample 2 and the light receiving unit 10 is changed, it is preferable that the light receiving angle θ is the same before and after the change of the distance d, and other parameters are also adjusted.

Fig. 15 is a graph showing a change in the light receiving angle when the light projecting diameter ψ 0 is changed while maintaining the light receiving diameter ψ 1 in the light receiving unit 10 according to the present embodiment. Fig. 16 is a graph showing a change in the light receiving angle when the light receiving diameter ψ 1 is changed while maintaining the light projecting diameter ψ 0 in the light receiving unit 10 according to the present embodiment.

As shown in Fig. 15, when the light-emitting diameter ψ 0 is changed, the light-receiving angle θ changes. Therefore, in order to maintain the light-receiving angle θ before and after the change of the light-emitting diameter ψ 0, it is necessary to measure the light and the light. The distance d of the portion 10 is also adjusted. On the other hand, as shown in Fig. 16, even if the light receiving diameter ψ 0 is changed, the light receiving angle θ changes. The degree of change in the light receiving angle θ becomes larger as compared with when the light projecting diameter ψ 0 is changed. Therefore, in order to maintain the light receiving angle θ before and after the change of the light receiving diameter ψ 1, it is necessary to adjust the distance d between the sample 2 and the light receiving unit 10, which is compared with when the light projecting diameter ψ 0 is changed. It is bigger and bigger.

<D. Application Example 1>

(1: overall composition)

Next, an application example of the measuring device 1 according to the present embodiment will be described. Fig. 17 is a schematic view showing an example of an inspection apparatus 400 including the measuring apparatus 1 according to the present embodiment. The inspection device 400 measures the in-plane distribution of the optical properties of the phosphor sheet. More specifically, the inspection apparatus 400 includes a measurement dark box 410 and a correction dark box 420. The sample 2 is placed in the measurement dark box 410 and is irradiated with excitation light from the excitation light source 62. The fluorescent light generated by the irradiation of the excitation light passes through the light receiving unit 10 and the optical fiber 20, and is measured by the detecting unit 200.

More specifically, the excitation light generated by the excitation light source 62 is transmitted to the irradiation unit 60 through the optical fiber 66. The excitation light that is irradiated by the irradiation unit 60 is transmitted toward the sample 2. The transmitted light and the fluorescent light generated by the sample 2 by the incidence of the excitation light are received by the light receiving unit 10 and transmitted through the optical fiber 20 to the detecting unit 200. Here, in order to change the position at which the excitation light on the sample 2 is incident, the sample stage 412 is provided in the measurement dark box 410. In other words, the sample stage 412 corresponds to a moving mechanism that changes the position at which the excitation light from the excitation light source 62 enters the sample 2 (the phosphor). The sample stage 412 is movable to an arbitrary position in accordance with an instruction from the position control controller 414.

The wavelength selection unit 64 is provided on the irradiation side of the excitation light source 62, and is configured to select a wavelength suitable for measurement. As the wavelength selecting unit 64, a filter using a spectroscope can be used. Further, a plurality of different types of light sources may be prepared and appropriately selected in accordance with the sample 2 to be measured. If the wavelength of the excitation light changes, Since the amount of transmitted light and the amount of fluorescence change, it is extremely important to control the wavelength of the excitation light to be constant in the transmission type fluorescence measuring device.

Among them, the function of dimming the excitation light source 62 may be carried. In the state in which the sample stage 412 is moved so that the sample 2 does not exist in the path of the excitation light, the excitation light is irradiated, and the light emission of the excitation light source 62 is adjusted based on the measurement result at this time. strength. When the wavelength of the excitation light changes, the amount of transmitted light and the amount of fluorescence change. Therefore, it is extremely important to control the wavelength of the excitation light to be constant in a transmissive fluorescence measuring device.

The detecting unit 200 measures the spectrum of light incident on the light receiving unit 10 and the optical fiber 20. The processing device 300 sequentially stores the measurement result obtained by the detecting unit 200 in association with the position (coordinate value) of the corresponding sample 2. The chromaticity (chromaticity x and chromaticity y) or the correlated color temperature in the CIE color system is included in the measurement result. The position information of the position control controller 414 is used in terms of the position (coordinate value) of the sample 2.

Further, the processing device 300 can also determine the quality of the target sample 2 based on the measured in-plane distribution. Sample 2 is a defective series, for example, when the optical performance is uneven in-plane (the unevenness exceeds a predetermined threshold), or when the measured chromaticity exceeds a predetermined threshold range.

The inspection apparatus 400 shown in Fig. 17 is additionally provided with a correction function. More specifically, a standard light source 422 for calibration is disposed in the correction dark box 420. At the time of correction, the light receiving unit 10 is disposed in the correction dark box 420, and the standard light source 422 is turned on by the standard light source power source 424. At this time, the measurement value obtained by the detecting unit 200 is corrected (positioned). The correction calculation required for the correction is performed in the detection unit 200 and/or the processing device 300. Row.

(2: processing order)

Next, the procedure for measuring the optical performance of the sample 2 using the inspection apparatus 400 shown in Fig. 17 will be described. Fig. 18 is a flow chart showing the procedure for measuring the optical performance of the sample 2 using the inspection apparatus 400 shown in Fig. 17. The arithmetic processing shown in Fig. 18 is typically realized by executing the program by the processing device 300.

Referring to Fig. 18, the correction for the spectral illuminance detected by the detecting unit 200 is first performed. More specifically, the user places the light receiving unit 10 in the correction dark box 420 to turn on the standard light source 422 (step S2). The processing device 300 determines the correction coefficient by comparing the reference spectrum positioned as the standard light source 422 with the measured value obtained by the detecting unit 200 (step S4).

Next, dimming of the excitation light irradiated to the sample 2 is performed. In other words, the spectral illuminance of the excitation light from the excitation light source 62 is measured, and the luminous intensity of the excitation light source 62 is adjusted such that the measured spectral illuminance is within a predetermined range set in advance. When the amount of light of the excitation light changes, the value of the transmitted fluorescence changes. Therefore, it is necessary to make the amount of excitation light constant for the measurement of the sample of the same type.

More specifically, the user sets the light receiving unit 10 in the measurement dark box 410, and controls the wavelength selection after moving the sample stage 412 to a predetermined position in such a manner that the sample 2 does not exist on the optical path of the excitation light. The portion 64 sets the wavelength to cause the excitation light source 62 to light (step S6). Next, the processing device 300 determines whether or not the spectral illuminance measured by the detecting unit 200 is within a predetermined range and whether the peak wavelength is shifted by the set wavelength (step S8). If When the spectroscopic illuminance measured by the detecting unit 200 is not within the predetermined range, and/or the peak wavelength is deviated from the set wavelength (NO in step S8), the processing device 300 outputs the excitation light source 62 for adjustment. An instruction to excite the intensity of the light (step S10). Next, the processing of step S8 is repeated.

On the other hand, when the spectral illuminance measured by the detecting unit 200 is within a predetermined range and the peak wavelength is shifted by the set wavelength (YES in step S8), the measurement processing of the sample 2 is started. Specifically, the processing device 300 outputs a command for moving the sample stage 412 so that the measurement point of the sample 2 matches the optical path of the excitation light (step S12). The detecting unit 200 receives the excitation light received by the light receiving unit 10, and measures the spectral irradiance of the transmitted light and the fluorescent light generated by the sample 2 (step S14). Next, the processing device 300 stores the measurement result obtained by the detecting unit 200 in association with the position (coordinate) of the current sample 2 (or the sample stage 412) (step S16).

Here, in the measurement of the in-plane distribution of the sample 2, the excitation light may be constantly irradiated by the excitation light source 62, or the excitation light may be irradiated by the point when the positioning of the sample 2 is completed.

Next, the processing device 300 determines whether or not the measurement is completed for all the measurement points of the sample 2 (step S18). When there is an unfinished measurement point among the measurement points of the sample 2 (NO in step S18), the processing device 300 outputs a command for moving the sample stage 412, and the sample 2 is made. The subsequent measurement point coincides with the optical path of the excitation light (step S20). Next, the processing of step S14 and below is performed.

On the other hand, if all the measurement points of the sample 2 are measured, the measurement has been performed. When it is completed (YES in step S18), the processing device 300 outputs the stored measurement result (step S22). In this case, a process of calculating various optical characteristics or a process of determining whether or not there is an abnormality may be added in addition.

By the above procedure, the measurement of one sample 2 was completed.

(3: Modification)

In the case of Fig. 17, the measurement of one sample 2 is representatively shown. However, in the actual manufacturing line, it is necessary to efficiently measure the majority of the sample 2. In the case as shown above, for example, the configuration shown below can be employed.

Fig. 19 is a schematic view showing an example of an inspection device 402 including the measurement device 1 according to the present embodiment. Fig. 19(a) shows a plan view of the inspection device 402, and Fig. 19(b) shows a side view of the inspection device 402. In the inspection device 402, a plurality of flaky samples 2 are placed in the sample holder in accordance with a predetermined rule. In the example shown in Fig. 19(a), an example in which four samples 2 are disposed in one sample holder 440 is shown. Measurement points of a plurality (9 in Fig. 19) were set in the plane of one sample 2, and optical performance was measured for each measurement point. When it is judged to be defective based on the measurement result of any measurement point, the sample 2 including the measurement point is marked with a defect (indicated by a marking device (not shown)).

Each of the sample holders 440 in which the plurality of samples 2 are disposed is attached to the cassette 450. The cassette 450 is configured to be stacked in the direction of gravity. The plurality of cassettes 450 stacked as described above are housed in the sample storage unit 490. The transport robot 460 sequentially inserts the arm portions 462 into the respective grooves of the cassette 450, and transports the sample holder 440 collected in the target recess to the sample stage 412. The movement of the sample holder 440 is sensed by the area provided in the preceding stage of the sample stage 412. The detector 464 detects it. The measurement of the required optical performance is performed on the sample 2 in the sample holder 440 placed on the sample stage 412 in the order described above.

Among these, the irradiation unit 60 and the light receiving unit 10 are fixed to the support member 470 disposed in the vertical direction of the sample stage 412.

The measurement of the plurality of samples 2 can be continuously performed by adopting the configuration shown in Fig. 19. It is preferable to arrange the plurality of sample storage portions 490. By arranging the plurality of sample storage units 490, the measurement processing is performed on the plurality of cassettes 450 accommodated in one of the sample storage units 490, and the new sample storage unit 490 can be used to perform the new plurality of cassettes 450. The removal of the plurality of cassettes 450 installed or measured.

<E. Application Example 2>

In the above description, only a pair of the irradiation unit 50 for irradiating the sample 2 with the excitation light and the light receiving unit 10 for receiving the transmitted light and the fluorescence generated in the sample 2 by the excitation light are disposed. However, a plurality of the irradiation units 50 and the light receiving unit 10 may be arranged in pairs.

Fig. 20 is a schematic view showing another example of the inspection apparatus 500 including the measuring apparatus 1 according to the present embodiment. In the inspection apparatus 500 shown in FIG. 20, a configuration example in which a plurality of measurement points are set in the sample 2 and a pair of the plurality of irradiation units 50 and the light receiving unit 10 are arranged is displayed. In other words, in the inspection apparatus 500, the sample 2 (the phosphor) is placed in accordance with a predetermined rule, and the plurality of light receiving units 10 are arranged, and the detecting unit measures the transmitted light and the fluorescent light received by the plurality of light receiving units 10 in parallel. Light.

In the configuration shown in Figure 20, a multi-input spectrophotometer can be used. 220 is used as a detecting unit. The multi-input spectrophotometer 220 can measure the spectral irradiance of the complex fluorescent light in parallel using, for example, a plurality of line sensors arranged in parallel. By using the multi-input spectrophotometer 220, the time required for measurement can be further shortened, and the configuration of the sample stage 412 can be simplified or the sample stage 412 can be used. Here, the chromaticity sensor can be mounted on the light receiving unit 10, and the transmitted chromaticity can be measured in parallel to replace the multi-input spectrophotometer 220.

In the 20th drawing, the pair of the irradiation unit 50 and the light-receiving unit 10 are arranged in a matrix, but it is not necessarily required to be arranged in a matrix, and only one column may be arranged. In addition, when the measurement points are set in a zigzag shape, the pair of the irradiation unit 50 and the light receiving unit 10 may be arranged at positions corresponding to the measurement points set in the zigzag shape as described above.

<F. Advantages>

According to the present embodiment, when the optical performance of the phosphor is measured, it is not necessary to contact the sample when the integrating sphere is used, and the light receiving unit can be placed at a position away from the sample by a predetermined distance, and the measurement can be performed. Time for in-plane distribution determination. In addition, since it is not in contact with the sample, it is possible to avoid erroneous damage to the sample.

According to the present embodiment, the correction function can be configured to correct the spectroscopic illuminance of the light receiving portion in the light diffusing portion. The measurement itself can be stabilized for a long period of time by constructing the correction function as shown above.

According to this embodiment, a dimming function for the excitation light source can be configured, and the amount of excitation light can be maintained constant by the dimming function. The measurement itself can be stabilized for a long period of time by arranging the dimming function as shown above.

In the above description, it is mainly targeted to be widely used in illuminating elements. The fluorescent material to be measured, which is described in the case where the fluorescent material such as a member or a display element is a measurement target, is not limited to these. For example, it can also be applied to measurement of fluorescence generated by a Langmuir Blodgett (LB) film or a functional molecular film, or fluorescence generated by biological cells or proteins.

From the above description, it is possible to clearly understand the other advantages of the measuring apparatus according to the present embodiment.

The embodiments of the present invention have been described in detail above, but are to be construed as illustrative only, and not limited by the scope of the accompanying claims.

1‧‧‧Measurement device

2‧‧‧sample

10‧‧‧Receiving Department

12‧‧‧ frame

14‧‧‧Light Diffusion Department

16‧‧‧ inside

18‧‧‧ window

20‧‧‧Fiber

22‧‧‧Connecting end

24 ‧ ‧ Vision

50‧‧‧ Department of Irradiation

52‧‧‧Light source

54‧‧‧ Concentrating lens

56‧‧‧Power supply unit

200‧‧‧Detection Department

300‧‧‧Processing device

Claims (6)

An apparatus for measuring optical properties of a phosphor, comprising: a light source for illuminating the phosphor with excitation light; and a light receiving portion disposed away from the phosphor at a predetermined distance for receiving the excitation light The light that has passed through the phosphor and the fluorescent light that is generated by the fluorescent light by the excitation light; and the detecting unit that detects light received by the light receiving unit, wherein the light receiving unit is The housing includes a predetermined length in a direction in which the excitation light is irradiated, a light diffusion portion disposed on a side of the phosphor body of the housing, and a window disposed in the light diffusion portion of the housing The opposite side is for guiding the incident fluorescent light to the detecting portion. The measuring device according to claim 1, wherein the light diffusing portion is disposed in a range including a field of view from the window. The measuring device according to claim 1 or 2, further comprising a moving mechanism that changes a position at which excitation light from the light source is incident on the phosphor. The measuring device according to claim 1 or 2, wherein the fluorescent body is provided with a plurality of light receiving portions in accordance with a predetermined rule, and the detecting portion measures the fluorescent light received by the plurality of light receiving portions in parallel. Light. The measuring device according to claim 1 or 2, wherein the predetermined distance is determined by a relationship between a light projecting diameter of the excitation light and a light receiving diameter of the frame, and a transmittance of the light diffusing portion. A measuring method for measuring optical properties of a phosphor, comprising: a step of irradiating the phosphor with excitation light by a light source; and receiving, by the light receiving portion disposed away from the phosphor at a predetermined distance, receiving the excitation light a step of emitting light of the phosphor and a fluorescent light generated by the excitation light by the excitation light; and a step of detecting light received by the light receiving unit by the detecting unit, wherein the light receiving unit includes a frame having a predetermined length in the irradiation direction of the excitation light; a light diffusion portion disposed on the side of the phosphor of the frame; and a light diffusion portion disposed on the opposite side of the light diffusion portion of the frame A window for guiding the incident fluorescent light to the detecting portion.