JP2014145776A - Parallelism measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a parallelism measurement device and a parallelism measurement method that are capable of accurately measuring parallelism of a tool in a short period without depending on a shape of a tip of the tool, a temperature and the like.SOLUTION: A parallelism measurement device is a device for measuring parallelism of a tool. The parallelism measurement device includes: a measuring section that is provided with a measurement surface to be brought into contact with the tool in a manner capable of separating; an energizing section that is brought into contact with an energization surface facing the measurement surface of the measuring section and energizes the measuring section; a detecting section that is provided so as to be in contact with the energization surface of the measuring section and detects the position of the measuring section when the measuring section brought into contact with the tool moves in a direction opposite to an energizing direction; a mooring section that is provided on a side with the measurement surface of the measuring section and moors and stops the measuring section energized by the energizing section in a manner capable of separating; and a notifying section that is electrically connected to the detecting section and provides notification of an absolute value of the amount of change in the position of the measuring section or the position detected by the detecting section.

Description

  The present invention relates to an apparatus for measuring the parallelism of a tool.

  2. Description of the Related Art Conventionally, for example, a parallelism measuring instrument that measures the parallelism of a crimping surface of a crimping device used for crimping a liquid crystal panel of a liquid crystal display module is brought into contact with the opposing crimping surface of the crimping device via a probe. There is a configuration in which the degree is indirectly measured by a displacement sensor (for example, see Patent Document 1).

JP-A-9-318347

  However, with the configuration as described above, it takes a certain time to measure the entire surface of the tip of the tool, and during that time the measuring instrument is affected by changes over time, so it is difficult to obtain high measurement accuracy. There was a problem.

  In view of the above technical problems, the present invention provides a parallelism measuring device capable of measuring the parallelism of a tool accurately in a short time without depending on the shape or temperature of the tip of the tool. With the goal.

  In order to solve the above-mentioned problem, a parallelism measuring apparatus according to the present invention is an apparatus for measuring the parallelism of a tool, and includes a measuring unit provided with a measuring surface on which the tool is detachably contacted, An urging portion that abuts the urging surface of the measuring unit that faces the measuring surface and urges the measuring unit, and the measuring unit that is disposed on the measuring surface of the measuring unit and abuts on the tool Is provided on the side of the measurement surface of the measurement unit, and the detection unit is separable so that the detection unit can be separated from the detection unit. And a mooring section that is stopped and a notification section that is electrically connected to the detection section and that reports the amount of change in the position of the measurement section or the absolute value of the position detected by the detection section. .

  According to the parallelism measuring apparatus according to the present invention, the parallelism of a tool can be accurately measured in a short time without depending on the shape or temperature of the tip of the tool.

It is a perspective view which shows the parallelism measuring apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows the parallelism measuring device which concerns on the 1st Embodiment of this invention, (a) is a schematic diagram which shows a parallelism measuring device from an upper surface, (b) is a parallelism measuring device partially from a side surface It is a schematic diagram shown in a cross section. It is a schematic diagram which shows the measurement board of the measurement part provided in the parallelism measuring apparatus which concerns on the 1st Embodiment of this invention, and the urging | biasing member of an urging | biasing part in a cross section, respectively, (a) is a measurement board of a measurement part The schematic diagram which shows the state which the projection part formed in the urging | biasing member of the urging | biasing part is contact | abutting with respect to the concave part formed in the urging | biasing surface of FIG. The schematic diagram which shows the state which the hollow part formed in the urging | biasing member of the urging | biasing part is contact | abutting with respect to the convex-shaped part formed in (c) with respect to the urging | biasing surface of the measurement plate of a measurement part FIG. 4D is a schematic diagram showing a state in which a conical protrusion formed on the urging member of the urging unit is in contact with the urging member, FIG. FIG. 9E is a schematic diagram showing a state in which the urging member of the urging portion is in contact with the shape portion, and FIG. The schematic diagram which shows the state which the projection part which consists of hemisphere contact | abuts, (f) is urging | biasing of a biasing part with respect to the convex part which consists of hemisphere formed in the biasing surface of the measurement plate of a measurement part. It is a schematic diagram which shows the state which the member is contact | abutting. It is a schematic diagram which shows a part of structure of the detection part and alerting | reporting part provided in the parallelism measuring apparatus which concerns on the 1st Embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic diagram which shows the state which uses the parallelism measuring apparatus which concerns on the 1st Embodiment of this invention in a partial cross section, (a) is provided in the parallelism measuring apparatus with the tool which satisfy | filled the parallelism. FIG. 4B is a schematic diagram partially showing a state in which the tool is in proximity to the measurement unit, FIG. 7B is a schematic diagram partially showing the state in which the tool is in contact with the measurement unit, and FIG. It is a schematic diagram which shows the state which is moving this measurement part, making it contact | abut to a part partially in a cross section. BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic diagram which shows the state which is using the parallelism measuring apparatus which concerns on the 1st Embodiment of this invention partially in a cross section, (a) is the measurement part provided in the parallelism measuring apparatus with the inclined tool (B) is a schematic diagram partially showing a state in which the tool is in contact with the measurement unit, and (c) is a schematic diagram showing the tool in contact with the measurement unit. It is a schematic diagram which shows the state which is moving this measurement part in contact with a partial cross section. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the parallelism measuring apparatus provided with the detection part which arrange | positioned the four detection means based on the 1st Embodiment of this invention, (a) is a tool which provided four convex parts in a measurement part. The schematic diagram which shows the state made to approach from the upper surface, (b) is a schematic diagram which shows the state which has made the tool which provided four convex parts approached the measurement part partially in a cross section from a side surface. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the parallelism measuring apparatus provided with the detection part which arrange | positioned the three detection means which concerns on the 1st Embodiment of this invention, (a) is a tool which provided three convex parts in a measurement part. The schematic diagram which shows the state made to approach from the upper surface, (b) is a schematic diagram which shows the state which has made the tool provided with three convex parts close to the measurement part partially in a cross section from the side. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the parallelism measuring apparatus provided with the detection part which arrange | positioned the two detection means which concerns on the 1st Embodiment of this invention, (a) is a tool which provided two convex parts in a measurement part. The schematic diagram which shows the state made to approach from the upper surface, (b) is a schematic diagram which shows the state which has made the tool provided with two convex parts close to the measurement part partially in a cross section from the side. FIG. 2 is a schematic diagram partially showing in cross section a measurement plate of a measurement unit, a biasing member of a biasing unit, and detection means of a detection unit provided in the parallelism measuring apparatus according to the first embodiment of the present invention; (a) is a schematic diagram showing a state in which a conical convex portion is formed on the biasing member in a sectional view from the side, and (b) is a convex shape having a truncated cone shape with a flat portion provided at the tip. (C) is a schematic diagram showing a state in which the portion is formed on the urging member, partly in cross section from the side, and (c) is a convex portion having a truncated cone shape with a flat portion larger than (b) at the tip. It is a schematic diagram which shows the state formed in the urging member partially in a section from the side. It is a schematic diagram which shows the parallelism measuring apparatus which concerns on the 2nd Embodiment of this invention partially in a cross section from the side surface. It is a schematic diagram which shows the parallelism measuring apparatus which concerns on the 3rd Embodiment of this invention partially in a cross section from the side surface. It is a schematic diagram which shows the parallelism measuring apparatus which concerns on the 4th Embodiment of this invention partially in a cross section from the side surface. It is a schematic diagram which shows the parallelism measuring apparatus which concerns on the 5th Embodiment of this invention partially in cross section from the side surface. It is a front view which shows the ultrasonic processing apparatus provided with the tool which needs to adjust inclination. It is a side view which shows ultrasonic processing to the light-guide plate base material by the ultrasonic processing apparatus provided with the tool which needs to adjust inclination, (a) is a state before performing ultrasonic processing to a light-guide plate base material. It is a side view which shows, (b) is a side view which shows the state which has given the ultrasonic processing to the light-guide plate base material. It is a perspective view which shows the mechanism which adjusts the inclination of the ultrasonic processing part of the ultrasonic processing apparatus provided with the tool which needs to adjust inclination. It is a perspective view which decomposes | disassembles for every structure and shows the mechanism which adjusts the inclination of the ultrasonic processing part of the ultrasonic processing apparatus provided with the tool which needs to adjust inclination.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments according to a parallelism measuring device and a parallelism measuring method of the invention will be described with reference to the drawings. In addition, the parallelism measuring apparatus and parallelism measuring method of this invention are not limited to the following description, In the range which does not deviate from the summary of this invention, it can change suitably.

  Moreover, in the following description, the parallelism measuring apparatus 1 of the 1st Embodiment of this invention is demonstrated first, referring FIG. 1 thru | or FIG. Next, a parallelism measuring device 2 according to a second embodiment of the present invention will be described with reference to FIG. Next, a parallelism measuring device 3 according to a third embodiment of the present invention will be described with reference to FIG. Next, a parallelism measuring device 4 according to a fourth embodiment of the present invention will be described with reference to FIG. Next, a parallelism measuring apparatus 5 according to a fifth embodiment of the present invention will be described with reference to FIG. Further, specific usage modes of the parallelism measuring apparatuses according to the first to fifth embodiments of the present invention will be described. An example of a method for adjusting the tilt of a tool whose parallelism is measured using the parallelism measuring apparatus according to any one of the first to fifth embodiments of the present invention will be described with reference to FIGS. Finally, the configuration and main functions and effects of each parallelism measuring apparatus according to the first to fifth embodiments of the present invention will be described for each claim.

[First Embodiment]
Hereinafter, the parallelism measuring apparatus 1 according to the first embodiment of the present invention will be specifically described with reference to FIGS. 1 to 10. First, the configuration of the parallelism measuring apparatus 1 will be described with reference to FIGS. 1 to 4, and the usage method of the parallelism measuring apparatus 1 will be described with reference to FIGS. 5 to 10.

  First, the configuration of the parallelism measuring apparatus 1 will be specifically described with reference to FIGS. 1 to 4. The parallelism measuring device 1 according to the first embodiment is a device that measures the parallelism of a tool. For example, as shown in FIGS. 1 and 2, the measuring unit 10, the urging unit 20, the detecting unit 30, and the mooring are performed. The unit 40 and the notification unit 50 are configured. Hereafter, each structure of the parallelism measuring apparatus 1 is demonstrated in order.

  The measurement part 10 which comprises the parallelism measuring apparatus 1 of 1st Embodiment is provided with the measurement surface 11a with which a tool is contact | abutted so that separation | spacing is possible. Such a measuring unit 10 is composed of a measuring plate 11, for example, as shown in FIG. Hereinafter, the configuration of the measurement unit 10 will be described with reference to FIG. The measurement plate 11 of the measurement unit 10 is made of, for example, stainless steel and has a disk shape. Here, the measurement surface 11a corresponding to, for example, the upper surface of the measurement plate 11 is anchored to be separable by an anchoring plate 41 of the anchoring portion 40 described later and stopped. Further, the measurement surface 11a of the measurement plate 11 has a predetermined surface accuracy. In addition, a contact portion 11c made of a concave shape, for example, is formed at the center of the urging surface 11b corresponding to the lower surface of the measurement plate 11 facing the measurement surface 11a. The contact portion 11c is biased by a biasing portion 21a of a biasing member 21 of a biasing portion 20 described later. Further, the urging surface 11b of the measuring plate 11 has a predetermined surface accuracy. In addition, the modification which concerns on the contact part 11c of the measurement board 11 is later mentioned, referring FIG. The notch 11d of the measurement plate 11 is a recess formed on the outer periphery of the measurement plate 11 and is provided to avoid interference with a support 42 of the mooring unit 40 described later. A contact reference mark 11e is provided on the measurement surface 11a of the measurement plate 11 as a reference for the position where the tool contacts. The contact reference mark 11e on the measurement surface 11a is provided at a position facing the contact portion 11c of the biasing surface 11b. Such a contact reference mark 11e is formed in a cross shape, for example.

  The urging unit 20 constituting the parallelism measuring device 1 of the first embodiment abuts on the urging surface 11 b facing the measurement surface 11 a of the measurement unit 10 and urges the measurement unit 10. For example, as shown in FIG. 2, such an urging unit 20 includes an urging member 21, a telescopic member 22, a support side plate 23, and a support cylinder 24. Hereinafter, the configuration of the urging unit 20 will be described with reference to FIGS. 2 and 3. The urging member 21 of the urging unit 20 is made of stainless steel, for example, and is formed in a cylindrical shape. Here, for example, a biasing portion 21 a formed in a convex shape on the upper portion of the biasing member 21 is in contact with a contact portion 11 c of the biasing surface 11 b of the measurement plate 11. In addition, a part of the expansion / contraction member 22 described later is stored in the expansion / contraction member storage portion 21b formed in the lower portion of the biasing member 21 with a hole having a predetermined depth. Further, the outer peripheral surface 21 d of the biasing member 21 has a predetermined surface accuracy and is in contact with an inner peripheral surface 23 a of the support side plate 23 and an inner peripheral surface 24 c of the support cylinder 24 described later. Here, the urging member 21 can move upward and downward as shown in FIG. 2B without being eccentric along the inner peripheral surface 23a of the support side plate 23 and the inner peripheral surface 24c of the support cylinder 24. it can.

  Further, with respect to the urging unit 20, the elastic member 22 of the urging unit 20 is made of a spring having a predetermined elasticity, for example. Here, the one end portion 22a of the expansion / contraction member 22 is in contact with the bottom surface 21c of the expansion / contraction member storage portion 21b of the biasing member 21 in a biased state. Furthermore, the other end portion 22b of the expansion / contraction member 22 abuts against the expansion / contraction member storage hole 43b of the support base 43 of the mooring portion 40 described later in a biased state. Further, the support side plate 23 of the urging portion 20 is made of, for example, aluminum and is formed in a disk shape having a through hole at the center. The inner peripheral surface 23a of the through hole of the support side plate 23 has a predetermined surface accuracy, and the outer peripheral surface 21d of the urging member 21 is in contact therewith. Moreover, the fixing | fixed part 23b formed in the outer periphery of the support side board 23 is fixed with respect to the support | pillar 42 of the mooring part 40 mentioned later by the set screw which is not shown in figure, for example. The support side plate 23 is provided with detection means 31 of the detection unit 30 described later. The support cylinder 24 of the urging unit 20 is made of, for example, aluminum and is formed in a cylindrical shape. Here, the support cylinder 24 is provided with an urging member storage hole 24a formed of a through hole. Furthermore, the inner peripheral surface 24c of the biasing member storage hole 24a of the support cylinder 24 has a predetermined surface accuracy, and the outer peripheral surface 21d of the biasing member 21 is in contact therewith. The support portion 24 b corresponding to the lower surface of the support cylinder 24 is fixed in a state where it is placed on the one surface 43 a of the support base 43 of the mooring portion 40.

  Here, regarding the urging unit 20, a modification of the form in which the urging member 21 of the urging unit 20 and the measurement plate 11 of the measurement unit 10 illustrated in FIG. 2 are in contact with each other will be described with reference to FIG. 3. FIG. 3A shows a protrusion formed on the urging member 21 of the urging member 20 on the abutting portion 11 c corresponding to the concave portion formed on the urging surface 11 b of the measuring plate 11 of the measuring unit 10. The state where the corresponding urging | biasing part 21a is contact | abutting is shown, and it is the same as that of the structure illustrated in FIG.2 (b). FIG. 3B shows an urging portion 25 a corresponding to a recess portion formed in the urging member 25 on an abutting portion 12 c corresponding to a convex portion formed on the urging surface 12 b of the measuring plate 12. The state which has contact | abutted is shown. Similarly, in FIG. 3C, the urging portion 21 a corresponding to the conical protrusion formed on the urging member 21 abuts on the urging surface 13 b formed on the flat surface formed on the measurement plate 13. It shows the state. Similarly, FIG. 3 (d) shows that the abutting portion 12c corresponding to the conical convex portion formed on the urging surface 12b of the measuring plate 12 has a flat surface formed on the urging member 26. The state which the urging | biasing site | part 26a is contacting is shown. Similarly, in FIG. 3E, a biasing portion 27 a corresponding to a hemispherical protrusion formed on the biasing member 27 abuts on a biasing surface 13 b formed on a flat surface formed on the measurement plate 13. It shows the state. Similarly, FIG. 3 (f) shows an attachment made of a flat surface formed on the urging member 26 on the abutting portion 14c corresponding to a hemispherical convex portion formed on the urging surface 14b of the measuring plate 14. The state which the urging | biasing site | part 26a is contacting is shown.

  The detecting unit 30 constituting the parallelism measuring device 1 of the first embodiment is provided in a state of being in contact with the urging surface 11b of the measuring unit 10, and the measuring unit 10 in contact with the tool is urged. The position of the measurement unit 10 is detected when moving in a direction opposite to the direction in which the sensor is located. Such a detection unit 30 includes, for example, a detection unit 31, a fixing member 32, and a wiring 33 as shown in FIG. Hereinafter, the configuration of the detection unit 30 will be described with reference to FIGS. 2 and 4. A contact-type sensor is used as the detection means 31 of the detection unit 30. Here, as the contact-type sensor, for example, a sensor that detects the amount by which the detection means 31 is compressed, the distance moved, or the increase in received pressure can be used.

  Specifically, for the detection unit 30, a contact type sensor is used as the detection means 31 of the detection unit 30 shown in FIG. Such a detection means 31 includes a measurement member 31a, a protection member 31b, a support member 31c, and a detection member 31d. The measuring member 31a of the detecting means 31 is made of, for example, stainless steel and has a cylindrical shape with a tip formed in a hemispherical shape. The protection member 31b of the detection means 31 is made of, for example, rubber, and is formed in a snake-like cylindrical shape to protect the outer periphery of the measurement member 31a when the measurement member 31a moves up and down. Further, the support member 31c of the detection means 31 is made of, for example, aluminum and is formed in a cylindrical shape. Here, the lower part of the measurement member 31a is movably accommodated in the support member 31c. Further, a protection member 31b is joined to one end of the support member 31c, and a detection member 31d described later is joined to the other end of the support member 31c. For example, screw grooves are formed on the outer peripheral surface of the support member 31c. In addition, the detection member 31d of the detection means 31 is formed in, for example, a rectangular shape having a space inside.

  Here, with respect to the detection unit 30, for example, a plurality of light sources and light receiving elements that receive light emitted from the light sources are provided in a row in the detection member 31d, and disposed between the light sources and the light receiving elements. When the measured measurement member 31a moves up and down, the position of the lower end of the measurement member 31a that moves inside the detection member 31d is detected by the photo interrupt method. Further, when a resistance element is provided inside the detection member 31d and the measurement member 31a moves up and down, the area where the outer peripheral surface of the measurement member 31a contacts the resistance element changes, and the current value is proportional to the contact area. You may detect the fluctuation | variation of. Similarly, a piezoelectric element may be provided inside the detection member 31d, and when the measurement member 31a moves up and down, fluctuations in pressure received by the measurement member 31a may be detected. Further, for example, the detection member 31d is provided with an amplifier for amplifying a signal obtained by the detection means 31. Here, as shown in FIG. 4, for example, four detection means 31 are connected in parallel, and each is supplied with a predetermined drive current. Further, the measurement accuracy of the detection unit 31 of the detection unit 30 is determined by the specification of the detection unit 31 and can be, for example, an accuracy of ± 1 μm.

  Further, with respect to the detection unit 30, the fixing member 32 of the detection unit 30 is made of a nut, for example, and fixes the detection means 31 to the support side plate 23 of the urging unit 20. Specifically, by passing the support member 31c of the detection means 31 through the through hole opened in the support side plate 23 of the urging portion 20, and attaching the fixing member 32 to the support member 31c, the fixing member 32 and the detection means The support side plate 23 is sandwiched between 31 detection members 31 d to fix the detection means 31 to the support side plate 23. Here, in FIG. 1 and FIG. 2, for example, the four detection means 31 are arranged at every 90 degrees centering on the position where the contact portion 11 c of the measurement plate 11 and the biasing portion 21 a of the biasing member 21 are in contact. They are arranged on the support side plate 23 at an equal distance from each other in the four directions. Moreover, the wiring 33 of the detection part 30 is a wiring which connects the detection means 31 and the alerting | reporting part 50, as shown in FIG.

  The mooring unit 40 constituting the parallelism measuring device 1 of the first embodiment is provided on the measurement surface 11a side of the measuring unit 10 and moored the measuring unit 10 urged by the urging unit 20 so as to be separable. Stop. Such a mooring part 40 is comprised from the mooring board 41, the support | pillar 42, and the support stand 43, as shown, for example in FIG. Hereinafter, the configuration of the mooring unit 40 will be described with reference to FIG. The mooring plate 41 of the mooring part 40 is made of, for example, stainless steel and is formed in a disk shape having an opening therein. The tool can be brought into contact with the measurement surface 11 a of the measurement plate 11 of the measurement unit 10 by providing an opening inside the mooring plate 41. Further, the mooring surface 41a corresponding to the lower surface of the mooring plate 41 shown in FIG. 2 is moored so that the measuring plate 11 can be separated and stopped while the tool is in contact with the measuring surface 11a of the measuring plate 11 of the measuring unit 10. I am letting.

  Moreover, regarding the mooring part 40, the support | pillar 42 of this mooring part 40 consists of aluminum, for example, and is formed in the column shape. One end 42a of such a support 42 is screwed to the anchoring plate 41 of the anchoring plate 41, and the other end 42b of the support 42 is screwed to one surface 43a of a support base 43 described later. Here, in FIG. 1 and FIG. 2, for example, the four support columns 42 are set to 4 at every 90 degrees centering on the position where the contact portion 11 c of the measurement plate 11 and the biasing portion 21 a of the biasing member 21 are in contact. It is arranged with respect to the direction. Moreover, the support base 43 of the mooring part 40 consists of stainless steel, for example, and is formed in the disk shape. Here, on one surface 43 a corresponding to the upper surface of the support base 43 shown in FIG. 2, an elastic member housing hole 43 b made of a recess is formed, and the other end portion 22 b of the elastic member 22 is in contact therewith. In addition, the other surface 43 c facing the one surface 43 a of the support table 43 has a predetermined surface accuracy and is placed on an arbitrary reference table G.

  The notification unit 50 constituting the parallelism measuring apparatus 1 of the first embodiment is electrically connected to the detection unit 30 and notifies the amount of change in the position of the measurement unit 10 detected by the detection unit 30 or the absolute value of the position. To do. Such a notification unit 50 includes, for example, a display unit 51, a notification unit 52, a power switch 53, and a reset switch 54 as shown in FIG. Hereinafter, the configuration of the notification unit 50 will be described with reference to FIG. As shown in FIG. 2, the display unit 51 of the notification unit 50 is a casing in which notification means 52 described later is disposed in a predetermined arrangement. The notification unit 52 of the notification unit 50 is a monitor that displays the signal obtained by the detection unit 31. The power switch 53 of the notification unit 50 is a switch for supplying or stopping the drive current to the detection means 31 and is disposed on the surface of the display unit 51. Moreover, the reset switch 54 of the alerting | reporting part 50 is arrange | positioned adjacent to the power switch 53, for example, and is a switch for resetting the signal obtained by the detection means 31 to zero. In addition, the notification unit 50 calculates the difference between the values detected by the plurality of detection units 31, and notifies the notification unit 52 whether the difference is equal to or less than a predetermined value and when the difference exceeds a predetermined value. It is good also as a structure which displays and alert | reports different information, such as NG.

  Next, a method for using the parallelism measuring apparatus 1 will be specifically described with reference to FIGS.

  Regarding the method of using the parallelism measuring device 1, the parallelism measuring device 1 provided with the four detection means 31 shown in FIGS. 5 to 7 includes a contact portion 11 c of the measuring plate 11 and a biasing portion of the biasing member 21. Centering on the position where 21a abuts, the four detection means 31 are arranged at an equal distance from each other in four directions every 90 degrees. 7 corresponds to a schematic diagram of the configuration illustrated in FIG. Here, in FIG.5 and FIG.6, the tool T equivalent to the processing tool provided with two or more convex parts is shown as an example. In addition, when the tool T is inclined, if the tool T having a plurality of convex portions is brought into contact with the workpiece and processed, the depths of the recesses formed in the workpiece are not uniform. Therefore, before using the tool T, the parallelism of the tool T needs to be measured.

  Specifically, for example, regarding the method of using the parallelism measuring apparatus 1 provided with four detection means 31, first, the reset switch 54 disposed in the display unit 51 shown in FIG. The displayed signal relating to the detection means 31 is reset to zero. Thereafter, the tool T satisfying the parallelism with respect to the reference table G is brought close to the measuring plate 11 of the measuring unit 10 provided in the parallelism measuring device 1 as shown in FIG. As shown in FIG. 5B, the measurement plate 11 is brought into contact with the measurement plate 11, and the measurement plate 11 is moved downward while being kept in contact with the measurement plate 11 as shown in FIG. In such a case, as shown in FIG. 5C, the measurement members 31 a of the four detection means 31 of the detection unit 30 are evenly moved by the urging surfaces 11 b of the measurement plate 11 of the measurement unit 10. Therefore, the same value is displayed on the notification means 52 connected to each of the four detection means 31, and it can be seen that the tool T shown in FIG.

  On the other hand, regarding the method of using the parallelism measuring apparatus 1 provided with the four detection means 31, first, the reset switch 54 provided in the display unit 51 shown in FIG. The signal relating to the means 31 is reset to zero. Thereafter, the tool T inclined with respect to the reference table G is brought close to the measuring plate 11 of the measuring unit 10 provided in the parallelism measuring device 1 as shown in FIG. 6A, and then FIG. As shown in FIG. 6, the measurement plate 11 is brought into contact with the measurement plate 11, and the measurement plate 11 is moved downward while being kept in contact with the measurement plate 11 as shown in FIG. In such a case, as shown in FIG. 6C, the measurement members 31 a of the four detection means 31 of the detection unit 30 are moved non-uniformly by the biasing surface 11 b of the measurement plate 11 of the measurement unit 10. . Therefore, different values are displayed on the notification means 52 connected to the four detection means 31, respectively, and it can be seen that the tool T shown in FIG.

  In addition, regarding the usage method of the parallelism measuring apparatus 1 provided with the four detection means 31, in FIG. 7, the parallelism of the tool T1 provided with the convex portions at the four corners of the machining surface in FIG. The structure to measure is shown with the schematic diagram. In this way, the four detection means 31 are equal distances in four directions every 90 degrees, with the position where the contact portion 11c of the measurement plate 11 and the biasing portion 21a of the biasing member 21 are in contact with each other. In the parallelism measuring apparatus 1 arranged only apart, the parallelism of the tool T1 can be measured in the plane of the two axes of the X axis and the Y axis shown in FIG. In addition, for example, the measurement is performed so that convex portions provided at the four corners of the tool T1 are positioned in a straight line connecting the position where the measurement plate 11 and the biasing member 21 are in contact with each detection unit 31.

  Further, regarding the method of using the parallelism measuring apparatus 1 provided with the three detection means 31, FIG. 8 shows the parallelism of the tool T2 provided with convex portions at the three corners of the machining surface. The structure to measure is shown with the schematic diagram. In this way, the three detection means 31 are equal distances in three directions every 120 degrees, with the position where the contact portion 11c of the measurement plate 11 and the biasing portion 21a of the biasing member 21 are in contact with each other. In the parallelism measuring apparatus 1 arranged only apart, the parallelism of the tool T2 can be measured in the planes of the X1, X2, and X3 axes shown in FIG. In addition, for example, the measurement is performed so that convex portions respectively provided at the three corners of the tool T2 are positioned in a straight line connecting the position where the measurement plate 11 and the biasing member 21 are in contact with each detection unit 31. Here, when the tips of the convex portions provided on the tool T2 are each formed as a flat surface, the measurement plate 11 in contact with the tool T2 is in contact with the measurement plate 11 and the biasing member 21. Since there is no eccentricity about the position, the parallelism of the tool T2 can be accurately measured.

  Further, regarding a method of using the parallelism measuring apparatus 1 provided with the two detecting means 31, FIG. 9 is a schematic diagram showing a configuration in which the parallelism of the tool T3 having a rectangular tip is measured by the parallelism measuring apparatus 1. Show. Such a tool T3 corresponds to, for example, a collet of a transfer machine. In addition, the suction surface of such a collet is a flat surface, and a minute hole for sucking the transfer object is opened. In this way, the two detection means 31 are arranged to face each other at an equal distance from the position where the contact portion 11c of the measurement plate 11 and the biasing portion 21a of the biasing member 21 are in contact. In the parallelism measuring apparatus 1, the parallelism in the major axis direction of the tool T3 can be measured on the X axis shown in FIG. That is, the parallelism measuring apparatus 1 shown in FIG. 9 corresponds to an apparatus applied when it is sufficient to measure the parallelism of the tool T3 by only one axis in the major axis direction. In addition, it measures so that the major axis direction of the tool T3 may be located in a straight line connecting the position where the measuring plate 11 and the urging member 21 are in contact with each detecting means 31. Here, when the tip of the tool T3 is formed as a flat surface, the measurement plate 11 that is in contact with the tool T3 is decentered about the position where the measurement plate 11 and the biasing member 21 are in contact. Therefore, the parallelism of the tool T3 can be accurately measured on one axis.

  Here, regarding a method of simply using the parallelism measuring apparatus 1 provided with a plurality of detection means 31, FIG. 10 is a schematic diagram illustrating a configuration in which the parallelism of the tool T4 is simply measured by the parallelism measuring apparatus 1. Show. First, as shown in FIG. 10A, when a conical urging portion 21a is formed at the tip of the urging member 21, the urging surface 13b of the measuring plate 13 and the urging member 28 are urged. The part 28a abuts at one point. In this case, the measurement plate 13 in contact with the tool T4 contacts the detection means 31 in a state of being inclined in proportion to the inclination angle of the tool T4. Therefore, the parallelism of the tool T4 can be accurately measured in correspondence with the inclination angle of the tool T4. Next, as shown in FIG. 10 (b), when the urging member 28 a having a truncated cone shape having a flat surface portion is provided at the tip of the urging member 28, the urging surface of the measurement plate 13 is provided. 13b and the urging portion 28a of the urging member 28 are in contact with each other on a predetermined surface. In this case, if the inclination angle of the tool T4 is within a certain angle, the measurement plate 13 abutted on the tool T4 abuts on each detection means 31 while maintaining a parallel state. Therefore, in the configuration shown in FIG. 10B, the parallelism of the tool T4 can be easily measured only when the inclination angle of the tool T4 exceeds a predetermined angle.

  Further, regarding a method for easily using the parallelism measuring apparatus 1 provided with a plurality of detecting means 31, as shown in FIG. 10C, a truncated cone shape in which a flat surface portion is formed at the tip of the biasing member 29. The urging portion 29a is provided, and the urging surface 13b of the measurement plate 13 and the urging portion 29a of the urging member 29 are in contact with each other on a surface having a larger area than that in FIG. Therefore, in the configuration shown in FIG. 10C, the parallelism of the tool T4 is simply measured only when the inclination angle of the tool T4 exceeds a larger angle compared to FIG. 10B. Can do. That is, the parallelism of the tool T4 can be measured with arbitrary accuracy by adjusting the area where the urging surface 13b of the measuring plate 13 and the urging portion of each urging member abut.

  As described above, according to the parallelism measuring apparatus 1 according to the first embodiment, for example, as illustrated in FIG. 6, the tool T is used as the measurement surface 11 a of the measurement plate 11 of the measuring unit 10 provided in the parallelism measuring apparatus 1. The measurement plate 11 is moved downward while being in contact with the reference plate, and the signals obtained from the plurality of detection means 31 of the detection unit 30 in contact with the urging surface 11b of the measurement plate 11 are compared, thereby comparing the reference plate. The parallelism of the tool T with respect to the table G can be accurately measured in a short time.

  Moreover, according to the parallelism measuring apparatus 1 which concerns on 1st Embodiment, it is the structure where the tool which measures parallelism does not contact the detection part 30 directly. Accordingly, by selecting the material and shape of the measurement plate 11 of the measurement unit 10 according to the specification of the tool, for example, the parallelism of a tool having a complicated shape or a tool used at high temperature is also provided in the detection unit 30. In addition, it is possible to measure with high accuracy without depending on the shape and heat resistance of the detection means 31.

  Similarly, according to the parallelism measuring apparatus 1 according to the first embodiment, for example, the number of detection means 31 provided in the detection unit 30 or the biasing unit 20 according to the shape of the tool for measuring parallelism, Since the distance from the contact point with the measuring unit 10 can be determined, the measurement accuracy of the parallelism measuring device 1 can be optimized.

  Similarly, according to the parallelism measuring apparatus 1 according to the first embodiment, the urging member 21 of the urging unit 20 and the measurement plate 11 of the measuring unit 10 come into contact with each other as shown in each drawing of FIG. The shape of the part can be optimized according to the characteristics of the tool. Specifically, for example, when the measurement range of the parallelism of the tool, that is, the measurement angle needs to be considerably widened, for example, if the configuration shown in FIG. Even if the urging surface 13b of the urging member 27 and the urging portion 27a of the urging member 27 are in constant contact with each other, the measurement accuracy is maintained without depending on the inclination of the tool. can do.

  Similarly, according to the parallelism measuring apparatus 1 according to the first embodiment, the measurement surface 11a of the measurement unit 10 urged by the urging unit 20 is moored by the mooring unit 40 and stopped. By resetting the signal in each detection means 31 of the detection unit 30 to zero, fine adjustment of the detection reference positions of the plurality of detection means 31 can be made unnecessary. Furthermore, if the configuration is such that the signal in each detection means 31 of the detection unit 30 is reset to zero immediately before the tool is brought into contact with the measurement surface 31a of the measurement plate 31 of the measurement unit 30, for example, parallel to the change with time of room temperature. Even if the constituent members of the degree measuring device 1 are thermally expanded, errors due to such fluctuations can be greatly suppressed.

  Similarly, according to the parallelism measuring apparatus 1 according to the first embodiment, for example, as shown in FIG. 10B, the parallelism measuring device 1 has a truncated cone shape in which a flat surface portion is formed at the tip of the biasing member 28. When the urging portion 28a is provided, the urging surface 13b of the measurement plate 13 and the urging portion 28a of the urging member 28 come into contact with each other on a predetermined surface. In this case, if the inclination angle of the tool T4 is within a certain angle, the measurement plate 13 abutted on the tool T4 abuts on each detection means 31 while maintaining a parallel state. Therefore, in the configuration shown in FIG. 10B, the parallelism of the tool T4 can be easily measured only when the inclination angle of the tool T4 exceeds a predetermined angle. That is, by adjusting the area where the urging surface 13b of the measuring plate 13 and the urging portion 28a of the urging member 28 abut, the parallelism of the tool T4 can be measured with an arbitrary accuracy.

  Similarly, according to the parallelism measuring apparatus 1 according to the first embodiment, a contact-type sensor can be used for the detection unit 30. Here, as the contact-type sensor, for example, a sensor that detects the amount by which the detection means 31 is compressed, the distance moved, or the increase in received pressure can be used. Moreover, there is no restriction | limiting in particular in the sensor used for the detection part 30, According to the required precision and cost, the sensor of an optimal specification can be selected.

[Second Embodiment]
Hereinafter, the parallelism measuring apparatus 2 according to the second embodiment of the present invention will be specifically described with reference to FIG.

  In the parallelism measuring apparatus 2 according to the second embodiment of the present invention, the detecting unit 30 is provided in a state of being separated from the urging surface 11b of the measuring unit 10, and the measuring unit 10 in contact with the tool is urged. The detection unit 30 detects the position of the measurement unit 10 with or without contacting the measurement unit 10 when moving in a direction opposite to the direction urged by the unit 20. Has characteristics. Other configurations according to the second embodiment are the same as the configurations described in the first embodiment. In the following, the second embodiment will be described focusing on matters different from the first embodiment.

  In the detection unit 30 constituting the parallelism measurement device 2 of the second embodiment, the detection means 31 of the detection unit 30 is provided in a state of being separated from the urging surface 11 b of the measurement plate 11 of the measurement unit 10. In addition to the contact type sensor, a non-contact type sensor can be used for the detection unit 30. Specifically, the non-contact type sensor, for example, irradiates the urging surface 11b of the measuring plate 11 of the measuring unit 10 from the detecting means 31 and receives the reflected light from the urging surface 11b. Are used to calculate the distance between the urging surface 11b of the measuring plate 11 of the measuring unit 10 and the detecting means 31 from the measured time. Note that the positions of the measurement members 31a of the detection means 31 provided in the detection unit 30 are adjusted so that the heights thereof are equal to each other.

  As mentioned above, according to the parallelism measuring apparatus 2 which concerns on 2nd Embodiment, the effect similar to the parallelism measuring apparatus 1 which concerns on 1st Embodiment mentioned above can be acquired.

  Specifically, the parallelism measuring device 2 according to the second embodiment corresponds to a modification of the parallelism measuring device 1 according to the first embodiment described above, and is illustrated as shown in FIG. 11, for example. The measurement plate 11 is moved downward by bringing the tool into contact with the measurement surface 11 a of the measurement plate 11 of the measurement unit 10 provided in the parallelism measuring device 2, so that it contacts the urging surface 11 b of the measurement plate 11. By comparing the signals obtained from the plurality of detection means 31 of the detection unit 30 in contact with each other, the parallelism of the tool can be accurately measured in a short time. For example, the configuration shown in FIGS. 3 and 10 relating to the parallelism measuring apparatus 1 according to the first embodiment can also be applied to the parallelism measuring apparatus 2 according to the second embodiment.

  Furthermore, according to the parallelism measuring apparatus 2 according to the second embodiment, the detection means 31 of the detection unit 30 is provided in a state of being separated from the urging surface 11 b of the measurement plate 11 of the measurement unit 10. Therefore, a non-contact type sensor can be used for the detection unit 30 in addition to the contact type sensor. Here, in the non-contact type sensor, for example, the light from the detecting means 31 to the urging surface 11b of the measuring plate 11 of the measuring unit 10 is irradiated and the reflected light from the urging surface 11b is received. What measures each time and calculates the distance between the urging | biasing surface 11b of the measuring plate 11 of the measurement part 10 and the detection means 31 from this measured time can be used, respectively. Thus, there is no restriction | limiting in particular in the sensor used for the detection part 30, According to the required precision and cost, the sensor of an optimal specification can be selected.

[Third Embodiment]
Hereinafter, the parallelism measuring apparatus 3 according to the third embodiment of the present invention will be specifically described with reference to FIG.

  In the parallelism measuring apparatus 3 according to the third embodiment of the present invention, the detection unit 30 is directly disposed on the measurement surface 61 of the measurement unit 60, and the mooring unit 80 can separate the detection means 31 of the detection unit 30. It is characterized by being moored and stopped. Further, in the parallelism measuring device 3 according to the third embodiment of the present invention, the detection unit 30 is disposed on the measurement surface 61a of the measurement unit 60, and the measurement unit 60 in contact with the tool is attached to the biasing unit 70. The position of the measurement unit 60 is detected when moving in a direction opposite to the biased direction. Other configurations according to the third embodiment are the same as the configurations described in the first or second embodiment. Specifically, as shown in FIG. 12, the parallelism measuring device 3 of the third embodiment includes a detection unit 30 and a notification unit 50 having the same specifications as the parallelism measuring device 1 of the first embodiment. The measuring unit 60, the urging unit 70, and the mooring unit 80, which are unique to the parallelism measuring device 3 of the third embodiment. Hereinafter, in the third embodiment, items different from those in the first or second embodiment will be mainly described.

  The measurement part 60 which comprises the parallelism measuring apparatus 3 of 3rd Embodiment has provided the measurement surface 61a with which a tool is contact | abutted so that separation | spacing is possible. Such a measuring unit 60 includes a measuring plate 61 having the same shape as the measuring plate 11 of the measuring unit 10. Here, the support member 31c of the detection means 31 is passed through the through hole formed in the measurement plate 61, and the fixing member 32 is attached to the support member 31c, so that the fixing member 32 and the detection member 31d of the detection means 31 are used. The measuring plate 61 is sandwiched, and the detection means 31 is fixed to the measuring plate 61. Here, in FIG. 12, for example, the four detection means 31 are arranged in four directions every 90 degrees with the position where the contact portion 61c of the measurement plate 61 and the biasing portion 71a of the biasing member 71 are in contact. On the other hand, they are arranged on the measuring plate 61 at an equal distance.

  The urging unit 70 constituting the parallelism measuring device 3 of the third embodiment abuts on the urging surface 61 b facing the measurement surface 61 a of the measurement unit 60 and urges the measurement unit 60. Such an urging unit 70 includes an urging member 71, a telescopic member 72, and a support cylinder 74. The urging member 71, the telescopic member 72, and the support cylinder 74 of the urging unit 70 have the same configuration as the urging member 21, the telescopic member 22, and the support cylinder 24 of the urging unit 20. On the other hand, the urging portion 70 does not require a member corresponding to the support side plate 23 of the urging portion 20.

  The mooring unit 80 constituting the parallelism measuring apparatus 3 of the third embodiment is provided on the measurement surface 61a side of the measuring unit 60, and moors and stops the detecting unit 30 so as to be separable. Such a mooring portion 80 is composed of a mooring plate 81, a support 82, and a support base 83. In addition, the support | pillar 82 and the support stand 83 of the mooring part 80 are the structures similar to the support | pillar 42 and the support stand 43 of the mooring part 40. Here, the mooring plate 81 of the mooring portion 80 is made of, for example, stainless steel and is formed in a disk shape having an opening therein. The tool can be brought into contact with the measurement surface 61 a of the measurement plate 61 of the measurement unit 60 by providing an opening in the mooring plate 81. Further, the mooring surface 81a corresponding to the lower surface of the mooring plate 81 anchors and stops the detection means 31 of the detection unit 30 so as to be separable.

  As mentioned above, according to the parallelism measuring apparatus 3 which concerns on 3rd Embodiment, the effect similar to the parallelism measuring apparatus 1 and the parallelism measuring apparatus 2 which concerns on the 1st and 2nd embodiment mentioned above can be obtained. it can.

  Specifically, the parallelism measuring device 3 according to the third embodiment corresponds to a modification of the parallelism measuring device 1 according to the first embodiment described above, and is illustrated as shown in FIG. 12, for example. The measurement plate 61 is moved downward by bringing the tool into contact with the measurement surface 61a of the measurement plate 61 of the measurement unit 60 provided in the parallelism measuring device 3, and the mooring surface 81a of the mooring plate 81 of the mooring unit 80. By comparing the signals obtained from the plurality of detection means 31 of the detection unit 30 that are in contact with each other, the parallelism of the tool can be accurately measured in a short time. For example, the configuration shown in FIGS. 3 and 10 relating to the parallelism measuring apparatus 1 according to the first embodiment can also be applied to the parallelism measuring apparatus 3 according to the third embodiment.

  Furthermore, according to the parallelism measuring apparatus 3 according to the third embodiment, the plurality of detection means 31 of the detection unit 30 are provided on the measurement surface 61 a side of the measurement unit 60 and the anchor plate 81 of the mooring unit 80. It arrange | positions in the state which contact | abutted to the mooring surface 81a so that separation | spacing was possible. Therefore, a contact-type sensor and a non-contact-type sensor can be used for the detection unit 30, respectively.

[Fourth Embodiment]
Hereinafter, the parallelism measuring device 4 according to the fourth embodiment of the present invention will be specifically described with reference to FIG.

  In the parallelism measuring apparatus 4 according to the fourth embodiment of the present invention, the detection means 31 of the detection unit 30 is provided on the measurement surface 11a side of the measurement plate 11 of the measurement unit 10 and also serves as an anchoring unit. It has a special feature. Other configurations according to the fourth embodiment are the same as the configurations described in the first to third embodiments. Specifically, as shown in FIG. 13, the parallelism measuring device 4 of the fourth embodiment includes a measuring unit 10 and a notification unit 50 having the same specifications as the parallelism measuring device 1 of the first embodiment. The urging unit 70 has the same specifications as the parallelism measuring device 3 of the third embodiment, and the detection unit 90 unique to the parallelism measuring device 4 of the fourth embodiment. Hereinafter, in the fourth embodiment, items different from the first to third embodiments will be mainly described.

  The detection unit 90 constituting the parallelism measurement device 4 of the fourth embodiment is provided on the measurement surface 11 a side of the measurement plate 11 of the measurement unit 10 and is measured by the measurement unit 10 urged by the urging unit 70. The position of the measurement unit 10 when the measurement unit 10 abutted on the tool moves in the direction opposite to the direction urged by the urging unit 80 in a state where the plate 11 is detachably moored and stopped. Is detected. The detecting unit 90 also functions as the mooring unit 40 according to the first embodiment. Such a detection unit 90 includes a detection unit 91, a fixing member 92, a wiring 93, a mooring plate 96, a support column 97, and a support base 98. The basic configuration of the detection unit 91, the fixing member 92, and the wiring 93 of the detection unit 90 is the same as the configuration of the detection unit 31, the fixing member 32, and the wiring 33 of the detection unit 30 according to the first embodiment. It is the same. The basic configurations of the mooring plate 96, the support column 97, and the support base 98 of the detection unit 90 are the configurations of the mooring plate 41, the support column 42, and the support base 43 of the mooring unit 40 according to the first embodiment, and It is the same. Here, the detection means 91 is fixed to the mooring plate 96 of the detection unit 90 by a fixing member 92. Further, the tip of the detection means 91 is brought into contact with the measurement surface 11a of the measurement plate 11 of the measurement unit 10, and the measurement plate 11 is moored and stopped.

As mentioned above, according to the parallelism measuring apparatus 4 which concerns on 4th Embodiment, the effect similar to the parallelism measuring apparatus 1 thru | or parallelism measuring apparatus 3 which concerns on the 1st thru | or 3rd embodiment mentioned above can be acquired. it can.

  Specifically, the parallelism measuring device 4 according to the fourth embodiment corresponds to a modification of the parallelism measuring device 1 according to the first embodiment described above, and is illustrated as shown in FIG. 13, for example. The measurement plate 11 is moved downward by bringing the tool into contact with the measurement surface 11a of the measurement plate 11 of the measurement unit 10 provided in the parallelism measuring device 4, and the measurement surface 11a of the measurement plate 11 of the measurement unit 10 is moved downward. By comparing the signals obtained from the plurality of detection means 91 of the detection unit 90 that are in contact with each other, the parallelism of the tool can be accurately measured in a short time. For example, the configuration shown in FIG. 3 and FIG. 10 related to the parallelism measuring apparatus 1 according to the first embodiment can also be applied to the parallelism measuring apparatus 4 according to the fourth embodiment.

  Furthermore, according to the parallelism measuring apparatus 4 according to the fourth embodiment, the plurality of detecting means 91 of the detecting unit 90 are arranged in a state in which they are detachably contacted with the measuring surface 11a of the measuring plate 11 of the measuring unit 10. It is installed. Therefore, a contact-type sensor and a non-contact-type sensor can be used for the detection unit 90, respectively.

  Further, according to the parallelism measuring apparatus 4 according to the fourth embodiment, the whole of the plurality of detecting means 91 of the detecting unit 90 is provided on the measuring surface 11 a side of the measuring plate 11 of the measuring unit 10. Even if the operating distance of the tool is considerably long and the operating distance cannot be varied, the urging surface 11b of the measuring plate 11 that has come into contact with the tool and moved greatly downward is detected by the detection unit 90. It does not interfere with the means 91.

[Fifth Embodiment]
Hereinafter, the parallelism measuring apparatus 5 according to the fifth embodiment of the present invention will be specifically described with reference to FIG.

  Note that the parallelism measuring device 5 of the fifth embodiment of the present invention is a device that is provided in each of the first to fourth devices, and with the tool stopped, the casing is directed toward the tool. It is characterized in that a moving unit 100 that moves is provided. Other configurations according to the fifth embodiment are the same as the configurations described in the first to fourth embodiments. Specifically, as shown in FIG. 14, the parallelism measuring device 5 of the fifth embodiment includes, for example, a measuring unit 10 and an urging unit that have the same specifications as the parallelism measuring device 1 of the first embodiment. 20, the detection part 30, the mooring part 40, the alerting | reporting part 50, and the moving part 100 peculiar to the parallelism measuring apparatus 5 of 5th Embodiment are comprised. In addition, it replaces with the structure of the parallelism measuring apparatus 1 of 1st Embodiment, the structure of the parallelism measuring apparatus 2 of 2nd Embodiment, the structure of the parallelism measuring apparatus 3 of 3rd Embodiment, or 4th. The configuration of the parallelism measuring device 4 of the embodiment may be used. Hereinafter, in the fifth embodiment, items different from those in the first to fourth embodiments will be mainly described.

  When the moving unit 100 constituting the parallelism measuring device 5 of the fifth embodiment of the present invention is provided in each device of the first to third embodiments, the mooring of each device of the first to third embodiments. Adjacent to a support base corresponding to the housing provided in the unit, the housing is moved toward the tool, and the measurement surface of the measurement unit of each device of the first to third embodiments is brought into contact with the tool. In addition, when the moving unit 100 is provided in the apparatus of the fourth embodiment, the moving unit 100 is adjacent to a support base corresponding to the casing provided in the detecting unit of the apparatus, the casing is moved toward the tool, and the fourth The measurement surface of the measurement unit of the apparatus of the embodiment is brought into contact with the tool. Here, as an example, the parallelism measuring device 5 shown in FIG. 14 is configured by adjoining the moving unit 100 to a support base corresponding to a housing provided in the mooring unit of the device of the first embodiment. Yes. Such a moving unit 100 includes an urging plate 101, a contact plate 102, and expansion / contraction means 103. Hereinafter, the configuration of the moving unit 100 will be described. The urging plate 101 of the moving unit 100 is made of, for example, aluminum and has a disk shape. Such an urging plate 101 is adjacent to a support base corresponding to the casing of each device. Further, the contact plate 102 of the moving unit 100 is made of, for example, aluminum and is formed in a disk shape. Such a contact plate 102 is placed on the reference table G. The expansion / contraction means 103 of the moving unit 100 is, for example, an electric jack, and varies the distance between the urging plate 101 and the contact plate 102.

  As mentioned above, according to the parallelism measuring apparatus 5 which concerns on 5th Embodiment, the effect similar to the parallelism measuring apparatus 1 thru | or parallelism measuring apparatus 4 which concerns on the 1st thru | or 4th embodiment mentioned above can be acquired. it can.

  Specifically, the parallelism measuring device 5 according to the fifth embodiment corresponds to an application example of the parallelism measuring devices 1 to 4 according to the first to fourth embodiments described above, and includes a tool. The parallelism can be accurately measured in a short time without depending on the driving conditions of the tool. That is, according to the parallelism measuring apparatus 5 according to the fifth embodiment, since it is not necessary to start up an apparatus on which a tool that needs to measure parallelism is mounted, the parallelism of the tool can be easily measured. Can do. Therefore, according to the parallelism measuring device 5 according to the fifth embodiment, for example, when a specialized worker is absent, or when noise is a concern in the early morning or late at night, the device on which the tool is mounted is used. The parallelism of the tool can be easily measured without activation.

  Similarly, according to the parallelism measuring apparatus 5 according to the fifth embodiment, the tool is brought into contact when the tool whose parallelism needs to be measured can be moved only at a relatively high speed. It is possible to prevent an excessive load from being applied to the measuring unit of the parallelism measuring device 5 and the tool itself for measuring the parallelism. That is, according to the parallelism measuring apparatus 5 according to the fifth embodiment, the speed of the expansion / contraction means 103 of the moving unit 100 can be determined in accordance with characteristics such as the material and shape of the tool for measuring parallelism. .

  Further, specific usage forms of the respective parallelism measuring apparatuses according to the first to fifth embodiments of the present invention will be described.

  Each parallelism measuring device of the present invention is used, for example, to measure the parallelism of a processing tool provided with a plurality of convex portions for forming concave portions on a workpiece. In addition, by maintaining the parallelism of the processing tool, it is possible to form a recess having a uniform depth in the processing object. Moreover, each parallelism measuring apparatus of this invention is used in order to measure the parallelism of the collet of the transfer machine which transfers a light emitting diode to the electrode pattern on a board | substrate, for example. In addition, by maintaining the parallelism of the collet having a flat suction surface, it can be transferred to the electrode pattern on the substrate without causing defects such as indentations on the surface of the light emitting diode. Similarly, each parallelism measuring device of the present invention is used for measuring the parallelism of a crimping member of a crimping machine that thermocompresses a protective material or the like to a predetermined base material, for example. In addition, a protective material etc. can be uniformly crimped | bonded to a predetermined base material by maintaining the parallelism of the crimping | compression-bonding member which a crimping | compression-bonding surface consists of a plane. Similarly, each parallelism measuring device according to the present invention is used for measuring the parallelism of a portion formed of a plane on which a predetermined mold is mounted on an injection molding machine or a press machine, for example. In this case, for example, each parallelism measuring device is configured such that a part of the measurement plate of the measurement unit protrudes from the opening portion of the mooring plate of the mooring unit. In addition, the lifetime of this metal mold | die can be extended by maintaining the parallelism of the site | part which mounts a predetermined metal mold | die. Moreover, each parallelism measuring device of this invention can respond | correspond to the form which a tool moves to the downward direction from the upper direction, the form to which it moves upwards from the downward direction, and the form to move to a horizontal direction, for example.

  Further, an example of a method for adjusting the inclination of a tool whose parallelism is measured using the parallelism measuring apparatus according to any one of the first to fifth embodiments of the present invention will be described with reference to FIGS. I will explain it.

  As an example, the tool for adjusting the inclination is an ultrasonic processing horn 1042 disposed in the ultrasonic processing apparatus 1000 shown in FIG. Here, as shown in FIG. 15, the ultrasonic processing apparatus 1000 is a base member 1010 on which a component device constituting the ultrasonic processing apparatus 1000 is mounted and accommodated, and a base material before being formed on the light guide plate. For example, a processing base portion 1020 for fixing the light guide plate base material 1100 by vacuum suction, a moving mechanism portion 1030 for moving the ultrasonic processing portion 1040 relative to the light guide plate base material 1100, and a main surface of the light guide plate base material 1100. The ultrasonic processing horn 1042 is brought into contact with the ultrasonic processing portion 1040 to partially heat and melt the main surface by ultrasonic vibration to form a concave pattern, and the ultrasonic processing portion 1040 The control unit 1050 controls sonic processing.

  Also, the ultrasonic processing unit 1040 of the ultrasonic processing apparatus 1000 makes the ultrasonic processing horn 1042 contact the main surface of the light guide plate base material 1100 as shown in FIG. A concave surface pattern is formed by partially heating and melting the main surface by vibration of sound waves. Specifically, in FIG. 16A, the ultrasonic processing unit 1040 starts to move downward, and the tip 1042 b connected to the vibrator 1042 a of the ultrasonic processing horn 1042 is the light guide plate base material 1100. When contacted with the surface, the ultrasonic processing unit 1040 stops as shown in FIG. 16B, and the ultrasonic processing horn 1042 rises after a predetermined time elapses after the support block and the stopper member are separated. Therefore, if the ultrasonic processing horn 1042 that is a tool is inclined, the main surface of the light guide plate substrate 1100 cannot be processed as designed.

  Here, a method for adjusting the inclination of the ultrasonic processing horn 1042 as a tool will be described with reference to FIGS. 17 and 18. Note that the inclination of the ultrasonic processing horn 1042 is adjusted in each of the θ1 direction and the θ2 direction shown in FIG.

  A method for adjusting the inclination in the θ1 direction of the ultrasonic processing unit 1040 provided with the ultrasonic processing horn 1042 will be described. The first tilt adjustment stage 1035 is pivotably anchored to the lifting stage 1034 using the first rotation reference screw 1036, and the ultrasonic processing horn 1042 is disposed using the first micrometer C1. The inclination in the θ1 direction of the ultrasonic processing unit 1040 provided is adjusted. Specifically, after the root portion of the first micrometer C1 is screwed into the screw groove 1035e formed in the fixed plate 1035d provided to protrude from the lower portion of the first tilt adjustment stage 1035, The tip portion of one micrometer C1 is inserted into a through hole 1035g formed in a support plate 1035f facing the fixed plate 1035d of the first tilt adjustment stage 1035. The first micrometer C1 includes a tip portion on which no thread is formed and a root portion on which the screw thread is formed, so that the tip portion does not rotate in conjunction with the rotation of the root portion. Is engaged. In addition, in a state where the lifting stage 1034 and the first tilt adjustment stage 1035 are in contact with each other, the first rotation reference screw 1036 is lifted through the through-hole 1035a formed in the first tilt adjustment stage 1035. Screwed into a screw groove 1034 a formed in the hole 1034. Further, a connecting rod 1034b provided in a through hole opened at the distal end portion of the first micrometer C1 is provided so as to protrude from the elevating stage 1034 through a long hole 1035h formed in the first inclination adjusting stage 1035. Has been inserted. With the above configuration, the inclination in the θ1 direction of the ultrasonic processing horn 1042 is adjusted using the first micrometer C1.

  A method for adjusting the inclination in the θ2 direction of the ultrasonic processing unit 1040 provided with the ultrasonic processing horn 1042 will be described. The second tilt adjustment stage 1037 is tethered to the first tilt adjustment stage 1035 by using the second rotation reference screw 1038 and then ultrasonically processed by using the second micrometer C2. The inclination in the θ2 direction of the ultrasonic processing unit 1040 provided with the horn 1042 is adjusted. Specifically, the engaging portions are formed such that the outer surfaces of the contact portions 1037a formed at the upper portions of both ends of the second tilt adjustment stage 1037 protrude from the upper portions of the both ends of the first tilt adjustment stage 1035, respectively. 1035b is inserted into the inner surface. In this state, the pair of second rotation reference screws 1038 are brought into contact with the second inclination adjusting stage 1037 through the through holes 1035c formed in the engaging part 1035b of the first inclination adjusting stage 1035. Screwed into a screw groove 1037b formed in 1037a. Here, the second tilt adjustment stage 1037 is always subjected to a stress that rotates clockwise in FIG. 18 by a spring (not shown) provided in the contact portion 1037a. Further, the second micrometer C2 is screwed into a screw groove 1035j formed in an L-shaped fixing plate 1035i provided so as to project from the lower portion of the first tilt adjustment stage 1035 in an l-shape. Further, a spring-like biasing spring 1035k is disposed on the first tilt adjustment stage 1035 so as to face the screw head of the second micrometer C2. Here, the connecting portion 1037c provided at the lower portion of the second tilt adjustment stage 1037 is sandwiched between the second micrometer C2 and the biasing spring 1035k. With the above configuration, the inclination in the θ2 direction of the ultrasonic processing horn 1042 is adjusted using the second micrometer C2.

  Finally, the configuration and main effects of the parallelism measuring apparatuses according to the first to fifth embodiments of the present invention will be described for each claim.

  The parallelism measuring device 3 according to claim 1 is a device that measures the parallelism of a tool, and includes a measuring unit 60 provided with a measuring surface on which the tool is detachably contacted, and a measuring surface of the measuring unit 60 The urging portion 70 that abuts against the urging surface opposite to the urging surface and urges the measuring portion 60, and the direction in which the measuring portion 60 that is disposed on the measuring surface of the measuring portion 60 and abuts against the tool is urged. And a mooring unit 80 that is provided on the measurement surface side of the measuring unit 60 and that detachably moores and stops the detecting unit 30 when moving in the opposite direction. And a notification unit 50 that is electrically connected to the detection unit 30 and that notifies the amount of change in the position of the measurement unit 60 or the absolute value of the position detected by the detection unit 30.

  According to the configuration of the parallelism measuring device 3 described in claim 1, for example, as shown in FIG. 12, a tool (not shown) is used to measure the measurement plate 61 of the measuring unit 60 provided in the parallelism measuring device 3. The measurement plate 61 is moved downward by being brought into contact with the measurement surface 61a, and the parallelism of the tool is determined by a signal obtained from the detection unit 30 that is detachably contacted with the anchoring surface 81a of the anchoring plate 81 of the anchoring portion 80. The degree can be accurately measured in a short time.

  The parallelism measuring device 3 according to claim 2 is dependent on claim 1, and the detecting unit 30 includes a measuring unit 60 that is in contact with a tool, and includes an urging surface of the measuring unit 60 and an urging unit 70. The amount the detector 30 is stretched, the distance moved, or the pressure received, which correlates with the amount of change in the position of the measuring unit 60 when moving in a state of being parallel or inclined around the abutting position. Two or more detection means 31 which contact | abutted with the mooring part 80 which detects the reduction | decrease amount of this is provided, It is characterized by the above-mentioned.

  According to the configuration of the parallelism measuring device 3 described in claim 2, for example, the number of the detection means 31 provided in the detection unit 30 or the urging unit 70 according to the shape of the tool for measuring the parallelism. Since the distance from the contact part with the measurement part 60 can be determined, the measurement accuracy of the parallelism measuring device 3 can be optimized. The detection unit 30 can be a contact type sensor. Here, there is no restriction | limiting in particular in the sensor used for the detection part 30, The sensor of an optimal specification can be selected according to the required precision and cost.

  The parallelism measuring device 3 according to a third aspect is dependent on the first aspect, and the detection unit 30 includes a measurement unit 60 in contact with a tool, and includes an urging surface of the measurement unit 60 and a urging unit 70. When moving in parallel or inclined with the abutting position as the center, the mooring part 80 is irradiated with light and the reflected light from the mooring part 80 is correlated with the amount of change in the position of the measuring part 60. It is characterized by comprising two or more detection means 31 for measuring the time until light reception and detecting the distance from the measured time to the mooring part 80, and separating from the state in contact with the mooring part 80. Yes.

  According to such a configuration of the parallelism measuring device 3 according to claim 3, for example, the number of detection means 31 provided in the detection unit 30 or the urging unit 70 according to the shape of the tool for measuring the parallelism. Since the distance from the contact part with the measurement part 60 can be determined, the measurement accuracy of the parallelism measuring device 3 can be optimized. Further, since the detection means 31 of the detection unit 30 is provided so as to be able to be separated from the urging surface 61b of the measurement plate 61 of the measurement unit 60, the detection unit 30 includes a non-contact type sensor in addition to the contact type sensor. A sensor can be used. Here, there is no restriction | limiting in particular in the sensor used for the detection part 30, The sensor of an optimal specification can be selected according to the required precision and cost.

  The parallelism measuring device 4 according to claim 4 is a device for measuring the parallelism of a tool, wherein the measuring unit 10 is provided with a measuring surface on which the tool is detachably contacted, and the measuring surface of the measuring unit 10. The urging portion 70 that abuts against the urging surface opposed to the urging surface and urges the measuring portion 10 and the measuring portion 10 provided on the measuring surface side of the measuring portion 10 and urged by the urging portion 70 can be separated. A detection unit 90 that detects the position of the measurement unit 10 when the measurement unit 10 abutted on the tool moves in a direction opposite to the direction in which the measurement unit 10 is urged, A mooring unit 80 that is provided on the measurement surface side of the unit 60 and moored so that the detection unit 30 can be separated and stopped; and a position of the measurement unit 10 detected by the detection unit 90 and electrically connected to the detection unit 90 And an informing unit 50 for informing the absolute value of the amount of change or the position.

  According to the configuration of the parallelism measuring device 4 described in claim 4, for example, as shown in FIG. 13, a tool (not shown) is used to measure the measurement plate 11 of the measuring unit 10 provided in the parallelism measuring device 4. The measurement plate 11 is moved downward by abutting against the measurement surface 11a, and the parallelism of the tool is determined by a signal obtained from the detection unit 90 that is detachably abutted against the measurement surface 11a of the measurement plate 11 of the measurement unit 10. The degree can be accurately measured in a short time.

  Further, according to the configuration of the parallelism measuring device 4 of the fourth aspect, since the detection unit 90 is provided on the measurement surface 11 a side of the measurement plate 11 of the measurement unit 10, the operation of the tool Even if the distance is considerably long and the operating distance cannot be varied, the urging surface 11b of the measuring plate 11 that has come into contact with the tool and moved greatly downward does not interfere with the detection unit 90.

  The parallelism measuring device 4 according to claim 5 is dependent on claim 4, and the detecting unit 90 includes a measuring unit 10 that is in contact with a tool, and an urging surface of the measuring unit 10 and an urging unit 70. The amount the detector 90 is stretched, the distance moved, or the pressure received, which correlates with the amount of change in the position of the measuring unit 10 when moving in a state of being parallel or inclined around the abutting position. Two or more detection means 91 which contact | abutted with respect to the measurement surface of the measurement part 10 which detect the reduction | decrease amount of this are provided.

  According to the configuration of the parallelism measuring device 4 according to the fifth aspect, for example, according to the shape of the tool for measuring the parallelism, for example, the number of the detection means 91 provided in the detection unit 90 or the urging unit 70. Since the distance from the contact part with the measurement part 10 can be determined, the measurement accuracy of the parallelism measuring device 4 can be optimized. The detection unit 90 can be a contact type sensor. Here, there is no restriction | limiting in particular in the sensor used for the detection part 90, According to the required precision and cost, the sensor of an optimal specification can be selected.

  The parallelism measuring device 4 according to claim 6 is dependent on claim 4, and the detecting unit 90 includes a measuring unit 10 that is in contact with a tool, and includes an urging surface of the measuring unit 10 and an urging unit 70. When moving in parallel or inclined with the abutting position as the center, the measurement surface of the measurement unit 10 is correlated with the amount of change in the position of the measurement unit 10 and reflected from the measurement surface. Two detection means 91 that measure the time until light is received and detect the distance from the measured time to the measurement surface of the measurement unit 10, away from the state in contact with the measurement surface of the measurement unit 10. It is characterized by having more than two.

  According to the configuration of the parallelism measuring device 4 according to the sixth aspect, for example, according to the shape of the tool for measuring the parallelism, for example, the number of detecting means 91 provided in the detecting unit 90 or the urging unit 70. Since the distance from the contact part with the measurement part 10 can be determined, the measurement accuracy of the parallelism measuring device 4 can be optimized. Further, since the detection means 91 of the detection unit 90 is provided so as to be separated from the measurement surface 11a of the measurement plate 11 of the measurement unit 10, the detection unit 90 includes a non-contact type sensor in addition to the contact type sensor. Can be used. Here, there is no restriction | limiting in particular in the sensor used for the detection part 90, According to the required precision and cost, the sensor of an optimal specification can be selected.

  A parallelism measuring device 5 according to a seventh aspect is dependent on the first and fourth aspects, and includes a support column that supports the mooring portion, a support table that supports the support column, and a moving unit 100 provided on the support table. The moving unit 100 is characterized in that the casing is moved toward the tool and the measurement surface of the measuring unit 10 is brought into contact with the tool.

  Such a configuration of the parallelism measuring device 5 according to claim 7 corresponds to an application example of the parallelism measuring device 4, and the parallelism of the tool does not depend on the driving conditions of the tool and is accurate in a short time. It can be measured well. That is, according to the parallelism measuring device 5 of the seventh aspect, since it is not necessary to start up a device on which a tool that needs to measure the parallelism is mounted, the parallelism of the tool can be easily measured. it can. Therefore, according to the parallelism measuring device 5 of the seventh aspect, for example, when a specialized worker is not present or when noise is a concern in the early morning or late at night, the device on which the tool is mounted is activated. Without this, the parallelism of the tool can be easily measured.

  Further, according to the configuration of the parallelism measuring device 5 described in claim 7, the tool is brought into contact when the tool that needs to measure the parallelism can be moved only at a relatively high speed. It is possible to prevent an excessive load from being applied to the measuring unit of the parallelism measuring device 5 and the tool itself for measuring the parallelism. That is, according to the parallelism measuring apparatus 5 of the thirteenth aspect, the speed of the expansion / contraction means 103 of the moving unit 100 can be determined in accordance with characteristics such as the material and shape of the tool for measuring the parallelism.

  The parallelism measuring devices 1 to 5 according to an eighth aspect are dependent on any one of the second, third, fifth, and sixth aspects, and the detecting unit 30 or 90 is the measuring unit 10 or It is characterized in that four detection means 31 or 91 are provided that are spaced apart by an equal distance in four directions around the position where the urging surface 60 and the urging portion 20 or 70 are in contact with each other.

  According to the configuration of the parallelism measuring devices 1 to 5 described in claim 8, for example, as shown in FIG. 7, the four detection means 31 are provided with the contact portion 11 c of the measurement plate 11 and the biasing member. In the case of a configuration in which the urging portions 21a of 21 are in contact with each other, the parallelism of the tool T1 is shown in FIG. ) In the plane of the two axes of the X axis and the Y axis.

  The parallelism measuring devices 1 to 5 according to a ninth aspect are dependent on any one of the second and fifth aspects, and the notifying unit 50 is configured so that the tool is in contact with the measuring unit 10 or 60 before the contact with the measuring unit 10 or 60. A reset switch 54 for resetting the values of two or more detection means 31 or 91 to zero is provided.

  According to the configuration of the parallelism measuring devices 1 to 5 described in the ninth aspect, for example, in the parallelism measuring device 1, the measurement surface 11a of the measuring unit 10 urged by the urging unit 20 is moored. The fine adjustment of the detection reference positions of the plurality of detection means 31 can be made unnecessary by resetting the signal in each detection means 31 of the detection part 30 to zero in a state where it is moored by the part 40 and stopped. . Further, for example, in the parallelism measuring apparatus 1, the signal in each detection means 31 of the detection unit 30 is reset to zero immediately before the tool is brought into contact with the measurement surface 31 a of the measurement plate 31 of the measurement unit 30. For example, even if the constituent members of the parallelism measuring device 1 are thermally expanded as the room temperature changes with time, errors due to such fluctuations can be significantly suppressed.

  The parallelism measuring devices 1 to 5 according to a tenth aspect are dependent on any one of the second, third, fifth, and sixth aspects, and the notification unit 50 includes the measuring unit 10 or 60. It is characterized in that it has a notifying means 52 for notifying values detected by two or more detecting means 31 or 91 that correlate with the amount of change in position.

  According to such a configuration of the parallelism measuring devices 1 to 5 according to the tenth aspect, the parallelism of the tool can be easily confirmed.

  The parallelism measuring devices 1 to 5 according to claim 11 are dependent on any one of claims 2, 3, 5, and 6, and the notification unit 50 is configured to measure the measurement unit 10 or 60. The difference between the values detected by the two or more detection means 31 or 91 that correlate with the amount of change in position is calculated, and when the difference is less than or equal to a predetermined value, It is characterized by having a notification means 52 that notifies different information.

  According to the configuration of the parallelism measuring devices 1 to 5 according to the eleventh aspect, it can be easily confirmed whether the parallelism of the tool is within the allowable range or outside the allowable range.

  The parallelism measuring devices 1 to 5 according to a twelfth aspect are dependent on any one of the first and fourth aspects, and the measuring unit 10 or 60 is attached to face the position of the measuring surface with which the tool abuts. A concave portion or a convex portion is formed at the position of the bias surface, and the biasing portion 20 or 70 is formed with a projection or a depression, and the projection or the depression is formed in the measurement unit 10 or 60. It is characterized by being in contact with the concave portion or the convex portion at one point.

  According to the configuration of the parallelism measuring devices 1 to 5 according to such a twelfth aspect, as shown in each drawing of FIG. 3, for example, the urging member 21 of the urging unit 20 and the measurement plate 11 of the measuring unit 10. The shape of the abutting portion can be optimized according to the characteristics of the tool. Specifically, for example, when the measurement range of the parallelism of the tool, that is, the measurement angle needs to be considerably widened, for example, if the configuration shown in FIG. Even if the urging surface 13b of the urging member 27 and the urging portion 27a of the urging member 27 are in constant contact with each other, the measurement accuracy is maintained without depending on the inclination of the tool. can do.

  In addition to the above, the present invention includes the following contents.

  The parallelism measuring apparatus 1 according to one aspect is an apparatus that measures the parallelism of a tool, and includes a measuring unit 10 provided with a measuring surface on which the tool is detachably contacted, and a measuring surface of the measuring unit 10. The urging unit 20 that urges the opposing urging surface and urges the measuring unit 10 and the urging unit 20 that is provided in contact with the urging surface of the measuring unit 10 and that abuts against the tool is urged. A detection unit 30 for detecting the position of the measurement unit 10 when moved in a direction opposite to the direction in which the measurement unit 10 is moved, and a measurement unit provided on the measurement surface side of the measurement unit 10 and urged by the urging unit 20 A mooring unit 40 that moors 10 to be separable and stops, and a notification unit 50 that is electrically connected to the detection unit 30 and notifies the amount of change in the position of the measurement unit 10 detected by the detection unit 30 or the absolute value of the position. It is characterized by having.

  According to such a configuration of the parallelism measuring apparatus 1, for example, as shown in FIG. 6, the tool T is brought into contact with the measuring surface 11a of the measuring plate 11 of the measuring unit 10 provided in the parallelism measuring apparatus 1. The parallelism of the tool T with respect to the reference table G can be accurately adjusted in a short time by a signal obtained from the detection unit 30 that is moved downward with the measurement plate 11 in contact with the biasing surface 11b of the measurement plate 11. Can be measured.

  Further, according to the configuration of the parallelism measuring device 1, the tool for measuring the parallelism is configured not to directly contact the detection unit 30. Accordingly, by selecting the material and shape of the measurement plate 11 of the measurement unit 10 according to the specification of the tool, for example, the parallelism of a tool having a complicated shape or a tool used at high temperature is also provided in the detection unit 30. In addition, it is possible to measure with high accuracy without depending on the shape and heat resistance of the detection means 31.

  In the parallelism measuring apparatus 1 according to another aspect, the detection unit 30 is configured such that the measurement unit 10 in contact with the tool is centered on the position where the urging surface of the measurement unit 10 and the urging unit 20 are in contact. A measuring unit that detects the amount by which the detection unit 30 is compressed, the distance moved, or the increase in pressure received, which correlates with the amount of change in the position of the measuring unit 10 when moving in a parallel or inclined state. It is characterized in that it has two or more detection means 31 that are in contact with ten urging surfaces.

  According to the configuration of the parallelism measuring apparatus 1 as described above, for example, the number of the detection means 31 provided in the detection unit 30 or the biasing unit 20 and the measurement unit 10 according to the shape of the tool for measuring the parallelism. Since the distance from the contact point can be determined, the measurement accuracy of the parallelism measuring device 1 can be optimized. The detection unit 30 can be a contact type sensor. Here, there is no restriction | limiting in particular in the sensor used for the detection part 30, The sensor of an optimal specification can be selected according to the required precision and cost.

  The parallelism measuring apparatus 2 according to still another aspect is an apparatus for measuring the parallelism of a tool, and includes a measuring unit 10 provided with a measuring surface on which the tool is detachably contacted, and a measuring surface of the measuring unit 10 The urging unit 20 that urges the measuring unit 10 to abut against the urging surface opposite to the urging surface, and the measuring unit 10 that is provided apart from the urging surface of the measuring unit 10 and that abuts against the tool is urged. A detector 30 that detects the position of the measurement unit 10 with or without contact with the measurement unit 10 when moving in a direction opposite to the direction in which the measurement unit 10 is moved; A mooring unit 40 provided and moored so as to be separable and stopped by the urging unit 20 and a position of the measuring unit 10 that is electrically connected to the detection unit 30 and detected by the detection unit 30 And an informing unit 50 for informing the absolute value of the change amount or position.

  According to such a configuration of the parallelism measuring device 2, for example, as shown in FIG. 11, a tool (not shown) is applied to the measuring surface 11a of the measuring plate 11 of the measuring unit 10 provided in the parallelism measuring device 2. The measurement plate 11 is moved downward by being brought into contact, and the parallelism of the tool can be accurately measured in a short time with a signal obtained from the detection unit 30 in contact with the urging surface 11b of the measurement plate 11. it can.

  In the parallelism measuring apparatus 2 according to still another aspect, the detection unit 30 is configured such that the measurement unit 10 that is in contact with the tool is centered on the position where the urging surface of the measurement unit 10 and the urging unit are in contact. A measuring unit that detects the amount by which the detection unit 30 is compressed, the distance moved, or the increase in pressure received, which correlates with the amount of change in the position of the measuring unit 10 when moving in a parallel or inclined state. Two or more detection means 31 which contact | abut from the state spaced apart with respect to 10 urging | biasing surfaces are provided.

  According to such a configuration of the parallelism measuring device 2, according to the shape of the tool for measuring parallelism, for example, the number of detection means 31 provided in the detection unit 30, or the biasing unit 20 and the measurement unit 10 Since the distance from the contact point can be determined, the measurement accuracy of the parallelism measuring device 2 can be optimized. The detection unit 30 can be a contact type sensor. Here, there is no restriction | limiting in particular in the sensor used for the detection part 30, The sensor of an optimal specification can be selected according to the required precision and cost.

  In the parallelism measuring apparatus 2 according to still another aspect, the detection unit 30 is configured such that the measurement unit 10 in contact with the tool is centered on the position where the urging surface of the measurement unit 10 and the urging unit 20 are in contact. Until the urging surface of the measurement unit 10 is irradiated with light and the reflected light from the urging surface is received, which is correlated with the amount of change in the position of the measurement unit 10. Two or more detection means 31 spaced from the urging surface of the measuring unit 10 for detecting the time and measuring the distance from the measured time to the urging surface are provided.

  According to such a configuration of the parallelism measuring device 2, according to the shape of the tool for measuring parallelism, for example, the number of detection means 31 provided in the detection unit 30, or the biasing unit 20 and the measurement unit 10 Since the distance from the contact point can be determined, the measurement accuracy of the parallelism measuring device 2 can be optimized. Further, since the detection means 31 of the detection unit 30 is provided in a state of being separated from the urging surface 11b of the measurement plate 11 of the measurement unit 10, the detection unit 30 has a non-contact type in addition to the contact type sensor. These sensors can be used. Here, there is no restriction | limiting in particular in the sensor used for the detection part 30, The sensor of an optimal specification can be selected according to the required precision and cost.

  A parallelism measuring method according to still another aspect is a method for measuring the parallelism of a tool, wherein the tool is in contact with the measuring surface of the measuring means, and the measuring means is biased by the biasing means facing the measuring surface. When the measuring means abutted on the tool moves in the direction opposite to the biased direction while the measuring means is moored from the measurement surface side by the mooring means. Further, the detection means detects the position of the measurement means, and the notification means notifies the change amount of the position of the measurement means detected by the detection means or the absolute value of the position.

  According to such a parallelism measurement method, the tool is moved downward while being in contact with the measurement surface of the measurement means, and obtained from the detection means that is in contact with the biasing surface facing the measurement surface of the measurement means. The parallelism of the tool can be measured with high accuracy in a short time by the received signal.

1, 2, 3, 4, 5 Parallelism measuring device 10, 60 Measuring unit 11, 12, 13, 14, 61 Measuring plate 11a, 12a, 13a, 61a Measuring surface 11b, 12b, 13b, 14b, 61b Energizing surface 11c, 12c, 14c, 61c Contact portion 11d, 61d Notch portion 11e Contact reference mark 20, 70 Biasing portion 21, 25, 26, 27, 28, 29, 71 Biasing member 21a, 25a, 26a, 27a, 28a, 29a, 71a Energizing portion 21b, 28b, 29b, 71b Telescopic member storage portion 21c, 28c, 29c, 71c Bottom surface 21d, 71d Outer peripheral surface 22, 72 Telescopic member 22a, 72a One end portion 22b, 72b The other end portion 23 Side plate 23a Inner peripheral surface 23b Fixed portion 24, 74 Support cylinder 24a, 74a Energizing member storage hole 24b, 74b Support portion 24c, 74c Peripheral surface 30,90 detection part 31,91 detection means 31a, 91a measurement member 31b, 91b protection member 31c, 91c support member 31d, 91d detection member 32, 92 fixing member 33, 93 wiring 40, 80 mooring part 41, 81, 96 mooring plate 41a, 81a, 96a mooring surface 42, 82, 97 support 42a, 82a, 97a one end 42b, 82b, 97b other end 43, 83, 98 support base 43a, 83a, 98a one side 43b, 83b, 98b telescopic member storage Holes 43c, 83c, 98c Other side 50 Notifying part 51 Display unit 52 Notifying means 53 Power switch 54 Reset switch 100 Moving part 101 Energizing plate 102 Abutting plate 103 Extending means G Reference stand T, T1, T2, T3, T4 Tool 1000 Ultrasonic processing apparatus 1010 Case 1020 Processing base 1030 Moving mechanism portion 1031 X-axis rail member 1032 Y-axis rail member 1033 Z-axis rail member 1034 Elevating stage 1034a, 1035e, 1035j, 1037b Screw groove 1034b Connecting rod 1035 First tilt adjustment stages 1035a, 1035c, 1035g Through hole 1035b Engagement Part 1035d Fixing plate 1035f Support plate 1035h Slot 1035i L-shaped fixing plate 1035k Biasing spring 1036 First rotation reference screw 1037 Second tilt adjustment stage 1037a Abutting part 1037c Connection part 1038 Second rotation reference screw 1040 Ultrasonic machining section 1041 Support member 1042 Ultrasonic machining horn 1042a Transducer 1042b Tip section 1050 Control section 1100 Light guide plate base material C1 First micrometer C2 Second micrometer

Claims (12)

A device for measuring the parallelism of a tool,
A measurement unit provided with a measurement surface on which the tool is detachably contacted;
An urging portion that abuts on the urging surface of the measuring unit facing the measuring surface and urges the measuring unit;
A detection unit that is disposed on the measurement surface of the measurement unit and detects the position of the measurement unit when the measurement unit abutted against the tool moves in a direction opposite to the biased direction; ,
A mooring part that is provided on the measurement surface side of the measuring part and moors the detection part in a separable manner;
A parallelism measuring apparatus comprising: a notifying unit that is electrically connected to the detecting unit and notifies a change amount or an absolute value of the position of the measuring unit detected by the detecting unit. The detector is
When the measurement unit that is in contact with the tool moves in a state of being parallel or inclined around the position where the urging surface of the measurement unit is in contact with the urging unit,
Detecting means abutting against the mooring part for detecting the amount of extension of the detecting part, the distance moved, or the amount of decrease in the pressure received, correlated with the amount of change in the position of the measuring part; The parallelism measuring device according to claim 1, comprising two or more. The detector is
When the measurement unit that is in contact with the tool moves in a state of being parallel or inclined around the position where the urging surface of the measurement unit is in contact with the urging unit,
The distance from the measured time to the mooring portion measured by measuring the time from irradiating the mooring portion with light and receiving the reflected light from the mooring portion, correlated with the amount of change in the position of the measuring portion. The parallelism measuring device according to claim 1, further comprising two or more detection units that detect the distance from the state in contact with the mooring portion. A device for measuring the parallelism of a tool,
A measurement unit provided with a measurement surface on which the tool is detachably contacted;
An urging portion that abuts on the urging surface of the measuring unit facing the measuring surface and urges the measuring unit;
The measurement unit, which is provided on the measurement surface side of the measurement unit and is in contact with the tool in a state where the measurement unit urged by the urging unit is detachably moored and stopped, is attached. A detection unit that detects the position of the measurement unit when moving in a direction opposite to the biased direction;
A mooring part that is provided on the measurement surface side of the measuring part and moors the detection part in a separable manner;
A parallelism measuring apparatus comprising: a notifying unit that is electrically connected to the detecting unit and notifies a change amount or an absolute value of the position of the measuring unit detected by the detecting unit. The detector is
When the measurement unit that is in contact with the tool moves in a state of being parallel or inclined around the position where the urging surface of the measurement unit is in contact with the urging unit,
Abutting against the measurement surface of the measurement unit, which detects the amount by which the detection unit is stretched, the distance moved, or the amount of decrease in the pressure received, correlated with the amount of change in the position of the measurement unit The parallelism measuring device according to claim 4, comprising two or more detection means. The detector is
When the measurement unit that is in contact with the tool moves in a state of being parallel or inclined around the position where the urging surface of the measurement unit is in contact with the urging unit,
Correlating with the amount of change in the position of the measurement unit, the time from irradiating the measurement surface of the measurement unit to receiving light reflected from the measurement surface is measured, and the measurement is performed from the measured time. The parallelism according to claim 4, further comprising two or more detection means for detecting a distance of the measurement unit to the measurement surface and separating from a state of contact with the measurement surface of the measurement unit. measuring device. A column supporting the mooring part;
A support for supporting the support;
A moving part provided on the support base;
The said moving part moves the said housing | casing toward the said tool, and makes the said measurement surface of the said measurement part contact | abut to the said tool. The Claim 1 characterized by the above-mentioned. The parallelism measuring device described. The detection unit is provided with four detection means disposed at equal distances in four directions around the position where the urging surface of the measurement unit and the urging unit are in contact with each other. The parallelism measuring device according to any one of claims 2, 3, 5, and 6. The said notification part is provided with the reset switch which resets the value of these two or more detection means to zero, respectively, before the said tool contact | abuts to the said measurement part. The parallelism measuring device according to any one of the above. The said alerting | reporting part was provided with the alerting | reporting means which alert | reports the value each detected by the said 2 or more detection means correlated with the variation | change_quantity of the position of the said measurement part. The parallelism measuring device according to any one of claims 5 and 6. The notification unit calculates a difference between values detected by the two or more detection units, which correlates with a change amount of the position of the measurement unit, and a case where the difference is equal to or less than a predetermined value. The parallelism measurement according to any one of claims 2, 3, 5, and 6, further comprising a notification unit that notifies different information depending on whether or not the difference is exceeded. apparatus. The measurement part is formed with a concave part or a convex part at a position of the urging surface facing the position of the measurement surface with which the tool abuts.
The urging portion is formed with a protrusion or a depression,
The protrusion or the recess is in contact with the concave portion or the convex portion formed in the measurement portion at a single point. The parallelism measuring device described.