JP2014129559A5 - - Google Patents

Download PDF

Info

Publication number
JP2014129559A5
JP2014129559A5 JP2012286958A JP2012286958A JP2014129559A5 JP 2014129559 A5 JP2014129559 A5 JP 2014129559A5 JP 2012286958 A JP2012286958 A JP 2012286958A JP 2012286958 A JP2012286958 A JP 2012286958A JP 2014129559 A5 JP2014129559 A5 JP 2014129559A5
Authority
JP
Japan
Prior art keywords
target
sputtering target
materials
backing plate
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012286958A
Other languages
English (en)
Japanese (ja)
Other versions
JP6079228B2 (ja
JP2014129559A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012286958A priority Critical patent/JP6079228B2/ja
Priority claimed from JP2012286958A external-priority patent/JP6079228B2/ja
Publication of JP2014129559A publication Critical patent/JP2014129559A/ja
Publication of JP2014129559A5 publication Critical patent/JP2014129559A5/ja
Application granted granted Critical
Publication of JP6079228B2 publication Critical patent/JP6079228B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012286958A 2012-12-28 2012-12-28 多分割スパッタリングターゲットおよびその製造方法 Active JP6079228B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012286958A JP6079228B2 (ja) 2012-12-28 2012-12-28 多分割スパッタリングターゲットおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012286958A JP6079228B2 (ja) 2012-12-28 2012-12-28 多分割スパッタリングターゲットおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2014129559A JP2014129559A (ja) 2014-07-10
JP2014129559A5 true JP2014129559A5 (enExample) 2015-11-05
JP6079228B2 JP6079228B2 (ja) 2017-02-15

Family

ID=51408190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012286958A Active JP6079228B2 (ja) 2012-12-28 2012-12-28 多分割スパッタリングターゲットおよびその製造方法

Country Status (1)

Country Link
JP (1) JP6079228B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6021861B2 (ja) * 2014-08-06 2016-11-09 Ｊｘ金属株式会社 スパッタリングターゲット−バッキングプレート接合体
JP6291551B2 (ja) * 2016-10-04 2018-03-14 Ｊｘ金属株式会社 スパッタリングターゲット−バッキングプレート接合体
JP7311290B2 (ja) 2019-03-27 2023-07-19 Ｊｘ金属株式会社 分割スパッタリングターゲット及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2939751B2 (ja) * 1989-03-28 1999-08-25 株式会社高純度化学研究所 分割スパッタリングターゲット
JPH10121232A (ja) * 1996-10-14 1998-05-12 Mitsubishi Chem Corp スパッタリングターゲット
JP4427831B2 (ja) * 1998-06-08 2010-03-10 東ソー株式会社 スパッタリングターゲットおよびその製造方法
JP5482020B2 (ja) * 2008-09-25 2014-04-23 東ソー株式会社 円筒形スパッタリングターゲット及びその製造方法
WO2012063524A1 (ja) * 2010-11-08 2012-05-18 三井金属鉱業株式会社 分割スパッタリングターゲット及びその製造方法
JP2013185160A (ja) * 2012-03-06 2013-09-19 Jx Nippon Mining & Metals Corp スパッタリングターゲット
JP2014096493A (ja) * 2012-11-09 2014-05-22 Idemitsu Kosan Co Ltd 酸化物半導体用ターゲット積層体

Similar Documents

Publication Publication Date Title
JP2012081521A5 (enExample)
JP2013157269A5 (enExample)
PH12017500898A1 (en) Materials and methods for pufa production, and pufa-containing compositions
SI3682965T1 (sl) Postopek za proizvodnjo ogljikovega materiala v obliki delcev iz obnovljivih surovin
JP2015520667A5 (enExample)
FR3032648B1 (fr) Procede de fabrication d'une aube de turbomachine en materiau composite
JP2016504351A5 (enExample)
EP3378943A4 (en) PROCESS FOR THE PRODUCTION OF PSICOSIS FROM FRUKTOSE-SUBSTRATED SUBSTRATE
FR3047988B1 (fr) Procede de fabrication d'une piece en materiau composite a matrice ceramique
IL255614B (en) Novel compound, thin film-forming material, and thin film manufacturing method
ZA201701003B (en) Process for the production of a pgm-enriched alloy
EP2780921A4 (en) DRYING PLANTS PRODUCED BY MODIFYING THE STAY GREEN (STGX) LOCUS
JP2015218351A5 (enExample)
FR3037078B1 (fr) Procede pour la fabrication de nanocelluloses a partir d'un substrat cellulosique
FR3026843B1 (fr) Procede de caracterisation du mecanisme de fissuration d'un materiau a partir de sa surface de rupture
UA116511C2 (uk) Виливок з титану для гарячої прокатки і спосіб його виробництва
BR112013019525A2 (pt) método para a produção de 2,3-butanodiol por fermentação
BR112013019524A2 (pt) método para a produção de 2,3-butanodiol por fermentação
IL271462A (en) Metal alkoxide compound, thin-film-forming raw material and method for producing thin film
FR3032198B1 (fr) Valorisation de produits nobles dans un procede de production d'ester (meth)acrylique.
FR2995554B1 (fr) Procede de fabrication d'un ensemble d'aubes en materiau composite pour turbomachine
EP2878700A4 (en) TANTAL SPUTTER TARGET AND MANUFACTURING METHOD THEREFOR
WO2015181802A3 (en) Oral pharmaceutical composition of isotretinoin
TR201815207T4 (tr) Kaplanmış dondurulmuş şekerli ürün üretimi için işlem.
FR2984884B1 (fr) Procede pour ameliorer la resistance mecanique d'un materiau composite a matrice ceramique sic/sic