JP2014122720A - Method and device for adjusting atmosphere of pusher type continuous calcination furnace - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for adjusting atmosphere of a pusher type continuous calcination furnace with which uniform calcination may be carried out by accurately changing calcination atmosphere of a treatment object.SOLUTION: Each of base plates 11 transported by a pusher is covered with a capsule 12. At a position of each of calcination capsules 10 in a furnace main body, in order to adjust atmosphere in the calcination capsules 10, gas introducing side penetrating holes 15 and gas discharge side penetrating holes 16 are arranged. A hollow nozzle 17 comprising a plurality of slits 18 from which gas flows out in vertical direction is arranged on the gas introducing side penetrating holes 15 of the base plates 11 in a standing posture. On the base plates 11, placed is a setter 13 consisting of multi-stacked shelf boards 14 on which a treatment object is loaded. The slits 18 on the nozzle 17 are arranged so as to correspond to positions of the plurality of shelf boards 14. Gas flows out from the plurality of slits 18 arranged on the nozzle 17 and flows via the treatment object loaded on each of the multi-stacked shelf boards 14. Thereby, atmosphere in the calcination capsules 10 is adjusted to a designed atmosphere.

Description

  The present invention relates to an atmosphere adjustment method and apparatus for a pusher-type continuous firing furnace that enables uniform firing of a treated product by accurately switching the firing atmosphere of the treated product during firing in a pusher-type continuous firing furnace.

  The pusher furnace is a furnace for continuously firing processed products (sintered products) such as ceramic electronic components, and as shown in FIG. 1, silicon carbide for heating the processed products placed on the base plate. It consists of a furnace body 1 provided with a heating element 7 such as a heating element, and the processed product placed on the base plate is conveyed from the processed product inlet 3 to the right of the furnace main body 1 by the pusher 2 and taken out from the processed product outlet 4. It is configured. 5 is an inlet for the atmospheric gas in the furnace, and 6 is an outlet for the atmospheric gas in the furnace.

  In a general pusher furnace, a gas for forming a predetermined furnace atmosphere is introduced into the furnace and the processed product is fired. In recent years, some ceramic parts have achieved desired characteristics. Therefore, it is necessary to change the firing atmosphere at each temperature stage during firing.

  In order to respond to such a request, the present applicant has first been configured such that the base plate on which the processed product is placed is slid and conveyed by the pusher in the furnace body for firing the processed product. In the pusher furnace shown in FIG. 1, each base plate is covered with capsules to form independent firing capsules, and the atmosphere in the firing capsule at that position is adjusted to the position of each firing capsule in the furnace body. A gas introduction pipe 8 for introducing gas and a gas discharge pipe 9 for exhausting gas are respectively disposed, and through holes are provided in the floor surface at the position of each fired capsule in the furnace body. A gas introduction pipe 8 and a gas discharge pipe 9 are connected to the holes, and through holes are also provided in each base plate. The pusher furnace continuously conveys the fired capsules by the pushers, and is carried by the pushers. When the gas introduction passage is formed until the formed capsule reaches the transport zone in the furnace body where the firing atmosphere should be changed and exits the transport zone, the gas is fired from the gas introduction pipe 8 through the through hole of the base plate. A pusher-type continuous firing furnace was proposed that was introduced into the interior and adjusted so that the inside of the firing capsule was adjusted to the set atmosphere in the transport zone.

  In this firing furnace, as shown in FIG. 4, when the gas introduction passage is formed, gas is introduced into the firing capsule 10 through the gas introduction side through hole 15 of the base plate, and the inside of the firing capsule 10 is conveyed. When the set atmosphere in the zone is adjusted, a setter 13 in which a plurality of shelves 14 are stacked on the base plate 11 is placed and covered with capsules 12, and the processed products are placed on each shelf 14 and fired. The flow of gas passing through each shelf 14 is greater in the upper shelf, the gas flow in the lower shelf is less, and a uniform gas flow cannot be obtained over the entire shelf. .

JP 2011-012823 A

  The present invention has been made to solve the above-mentioned problems in the pusher-type continuous firing furnace, and its purpose is to enable uniform firing of the treated product by accurately switching the firing atmosphere of the treated product during firing. An object of the present invention is to provide an atmosphere adjustment method and apparatus for a pusher-type continuous firing furnace.

  In order to achieve the above object, the pusher type continuous firing furnace atmosphere adjustment method according to claim 1 is configured such that the base plate on which the treated product is placed is conveyed by the pusher in the furnace body for firing the treated product. Each base plate is covered with capsules to form independent firing capsules, and each base plate is arranged at the position of each firing capsule in the furnace body to adjust the atmosphere in the firing capsule at that position. A gas introduction side through hole for introducing gas and a gas discharge side through hole for discharging gas are provided, and the firing capsule conveyed by the pusher is a pusher furnace that continuously conveys the firing capsule by the pusher. When the gas introduction passage is formed until it reaches the transfer zone in the furnace body where the firing atmosphere should be changed and exits the transfer zone, the firing cap is passed through the gas introduction side through hole. In order to adjust the atmosphere inside the calcined capsule to the set atmosphere in the transport zone by introducing gas into the cylinder, the gas flows out vertically on the gas introduction side through hole of the base plate. A hollow nozzle provided with a plurality of slits is erected, and a setter formed by stacking a plurality of shelves on which processing products are stacked is placed on the base plate, and the nozzles corresponding to the positions of the plurality of shelves are placed. When the gas introduction passage is formed until the firing capsule transported by the pusher reaches the transport zone in the furnace body where the firing atmosphere should be changed and exits the transport zone, the gas introduction side is provided. Gas is introduced into the nozzle in the calcined capsule through the through hole, and the gas flows out from the plurality of slits provided in the nozzle and flows through the processed products placed on the shelves stacked in a plurality of stages. Characterized in that so as to be adjusted to set the atmosphere in serial conveying zone.

  A pusher-type continuous firing furnace atmosphere adjustment device according to claim 2 is an apparatus for carrying out the pusher-type continuous firing furnace atmosphere adjustment method according to claim 1, wherein the pusher-type continuous firing furnace atmosphere adjustment device is disposed on the gas introduction side through hole of the base plate. A plurality of shelves, each having a plurality of shelves, each of which is provided with a hollow nozzle provided with a plurality of slits for allowing gas to flow in the up-and-down direction, and a plurality of shelves stacked with a shelf plate on which a processed product placed on a base plate is placed. A slit for the nozzle is provided corresponding to the position of the plate, and the gas introduction passage is provided until the calcined capsule conveyed by the pusher reaches the conveying zone in the furnace body where the firing atmosphere should be changed and exits the conveying zone. When formed, gas is introduced into the nozzle in the firing capsule through the gas introduction side through-hole, and the gas flows out from the plurality of slits provided in the nozzle and is placed on each shelf stacked in a plurality of stages. And the inside of the fired capsule is adjusted to the set atmosphere in the transport zone.

  ADVANTAGE OF THE INVENTION According to this invention, the atmosphere adjustment method and apparatus of a pusher type continuous baking furnace which enable the uniform baking of a processed product by switching the baking atmosphere of a processed product accurately during baking are provided.

It is the schematic which shows the structure of the pusher type continuous baking furnace used by this invention. A hollow nozzle 17 provided on the gas introduction side through-hole 15 of the base plate 11 in the present invention and provided with a plurality of slits 18 for gas to flow out in the vertical direction, and a processed product placed on the base plate 11 5 is a schematic vertical sectional view showing an example of a relationship between a setter 13 formed by stacking a plurality of shelves 14 on which a gas is placed, and a gas flow 19 from a slit 18 of a nozzle 17 and a shelf plate 14 of the setter 13. It is a horizontal sectional view same as the above. It is a schematic vertical sectional view showing a conventional gas flow 19.

  Hereinafter, specific embodiments of an atmosphere adjusting method and apparatus for a pusher-type continuous firing furnace according to the present invention will be described with reference to the drawings.

  In the pusher-type continuous firing furnace according to the present invention, as shown in FIGS. 1 and 2, each base plate 11 is covered with capsules 12 to form independent firing capsules 10. For each of the positions, a gas introduction pipe 8 for introducing a gas for adjusting the atmosphere in the firing capsule 10 at that position and a gas discharge pipe 9 for discharging the gas are independently arranged.

  Through holes are provided in the floor surface of the hearth at the position of each fired capsule 10 in the furnace body 1, and a gas introduction pipe 8 and a gas discharge pipe 9 are connected to these through holes, respectively. As shown in FIG. 2, each base plate 11 is also provided with a gas introduction side through hole 15 and a gas discharge side through hole 16, and the through hole on the floor surface to which the gas introduction pipe 8 is connected and the base plate 11. When the gas introduction passage is formed when the gas introduction side through hole 15 and the through hole on the floor surface to which the gas discharge pipe 9 is connected and the gas discharge side through hole 16 of the base plate 11 coincide with each other, Gas is introduced into the calcined capsule 10 through the through hole on the floor surface and the gas introduction side through hole 15 of the base plate 11 to adjust the atmosphere in the calcined capsule 10, and through the gas discharge side of the base plate 11 of the calcined capsule 10. The gas flows into the gas discharge pipe 9 through the hole 16 and the through hole on the floor surface and is discharged.

  The gas introduced into the fired capsule 10 through the gas introduction pipe 8 is adjusted to form an atmosphere at that position, and the processed product 20 such as each ceramic electronic component is in the fired capsule 10 in the adjusted atmosphere. It is heated to the set temperature at that position. The gas introduction pipe 8 has a structure in which gas always flows, and is configured such that the gas is immediately introduced into the calcined capsule 10 when the gas introduction passage is formed.

  Referring to FIGS. 1 and 2, firing of processed products such as ceramic electronic parts will be described. When the firing atmosphere is changed in the three transport zones a, b, and c in the furnace body 1, the fired capsules transported by the pusher are From the transport zone a to the transport zone b where the firing atmosphere should be changed and until the exit from the transport zone b, the through hole in the floor surface to which the gas introduction pipe 8 is connected, the gas introduction side through hole 15 in the base plate 11, the gas When the through hole on the floor surface to which the discharge pipe 9 is connected and the gas discharge side through hole 16 of the base plate 11 coincide with each other to form a gas introduction passage, the gas from the gas introduction pipe 8 flows through the floor surface through hole, It is introduced into the firing capsule 10 through the gas introduction side through hole 15 of the base plate 11 and adjusted to the atmosphere set in the transfer zone b, and the processed product is set in the transfer zone b in the adjusted atmosphere. Add to temperature It is, is fired.

  The calcined capsule 10 that has passed through the transport zone b is transported by the pusher, reaches the next transport zone c, and exits the transport zone c until the through hole in the floor surface to which the gas introduction pipe 8 is connected and the base plate 11. When the gas introduction passage is formed when the gas introduction side through hole 15 and the through hole on the floor surface to which the gas discharge pipe 9 is connected and the gas discharge side through hole 16 of the base plate 11 coincide with each other, The gas is introduced into the calcined capsule 10 through the through hole on the floor surface, the gas introduction side through hole 15 of the base plate 11, and adjusted to the atmosphere set in the transport zone c, and the processed product is in the adjusted atmosphere. Heated to the temperature set in the transport zone c. When more transfer zones are set in the furnace body, the above steps are repeated, and the process is performed and fired under the gas atmosphere and temperature conditions set in each transfer zone.

  The present invention provides an atmosphere adjustment method and apparatus for a pusher-type continuous firing furnace that enables uniform firing of a processed product by accurately switching the firing atmosphere when the firing atmosphere in the firing capsule 10 is adjusted in this way. Is. That is, as shown in FIGS. 2 to 3, a hollow nozzle 17 provided with a plurality of slits 18 for allowing gas to flow in the vertical direction is erected on the gas introduction side through hole 15 of the base plate 11. On the base plate 11, a setter 13 is placed by stacking a plurality of shelves 14 on which processed products 20 are placed, and slits 18 of nozzles 17 are provided corresponding to the positions of the plurality of shelves 14. When the gas-introducing passage is formed until the calcined capsule 10 conveyed by the gas reaches the conveying zone in the furnace main body where the firing atmosphere is to be changed and exits the conveying zone, the gas-introducing pipe is formed through the gas-introducing through hole 15. Gas is introduced into the nozzle 17 in the baked capsule 10 (not shown), and the gas flow 19 flows out from the plurality of slits 18 provided in the nozzle 17 and is placed on each shelf 14 stacked in a plurality of stages. Flows through management article 20, characterized in that as all the treated product 20 placed on the shelf plates 14 is adjusted to set the atmosphere in the uniform conveyance zone.

Hereinafter, the example of the present invention is tested in comparison with the comparative example, and the effect is demonstrated.
Example 1 and Comparative Example 1
As shown in FIG. 2, in the firing furnace capable of adjusting the atmosphere, a nozzle is erected on the base plate, and a firing capsule on which a 10-stage stacking setter in which 10 shelves are stacked is placed. Three graphite specimens (size: 15 mm × 15 mm × 5.4 mm) were placed on the second, fifth, and ninth shelf plates as treatment items and heated. Up to 850 ° C, the temperature of the graphite specimen was raised in a nitrogen atmosphere so as not to oxidize. When the temperature reached 850 ° C, air was introduced at a flow rate of 20 L / min, cooled for 30 minutes, and cooled. The weight loss of the piece was measured. As a comparison, the same test was performed using a conventional method as shown in FIG. The results are shown in Table 1.

  As shown in Table 1, in the examples according to the present invention, the difference in the weight reduction amount of the graphite specimens in the upper and lower stages was small, and it was confirmed that air flowed evenly on each shelf of the setter. In contrast, in the comparative example using the conventional method, the flow of air on the lower shelf is less than that on the upper shelf of the setter, so the difference in the weight reduction amount of the graphite specimen at the upper and lower stages is large. ing.

  In Example 1, as a result of firing 10 ceramic capacitor chips on each shelf board, a total of 100 ceramic capacitor chips at 1300 ° C., the yield was 92%. On the other hand, in the comparative example according to the conventional method, as a result of firing in the same manner, the ceramic capacitor chip mounted on the lower shelf board was not sufficiently fired, and the yield was 85%.

DESCRIPTION OF SYMBOLS 1 Furnace main body 2 Pusher 3 Processed product inlet 4 Processed product exit 5 Atmospheric gas inlet 6 Atmospheric gas outlet 7 Heating element 8 Gas introduction pipe 9 Gas exhaust pipe 10 Firing capsule 11 Base plate 12 Capsule 13 Setter 14 Shelf 15 Gas introduction side through hole of base plate 16 Gas discharge side through hole of base plate 17 Nozzle 18 Slit 19 Gas flow 20 Processed product

Claims (2)

In the furnace body for firing the processed product, the base plate on which the processed product is placed is transported by the pusher, and each base plate is covered with a capsule to form an independent firing capsule. In order to adjust the atmosphere in the firing capsule at that position, the gas introduction side through hole for introducing gas to each base plate and the gas discharge side penetration for discharging gas In the pusher furnace in which a hole is provided and the firing capsule is continuously conveyed by the pusher, until the firing capsule conveyed by the pusher reaches the conveyance zone in the furnace body where the firing atmosphere should be changed, and exits the conveyance zone. When the gas introduction passage is formed, gas is introduced into the calcined capsule through the gas introduction side through hole so that the inside of the calcined capsule is adjusted to the set atmosphere in the transport zone. In this case, a hollow nozzle having a plurality of slits for allowing gas to flow in the vertical direction is erected on the gas introduction side through hole of the base plate, and a shelf plate on which the processed product is placed is provided on the base plate. Setters stacked in a plurality of stages are placed, slits of the nozzles are provided corresponding to the positions of the plurality of shelf boards, and the firing capsule transported by the pusher is transported in the furnace body where the firing atmosphere should be changed When a gas introduction passage is formed between reaching the zone and exiting the transfer zone, gas is introduced into the nozzle in the calcined capsule through the gas introduction side through hole, and the gas flows out from a plurality of slits provided in the nozzle. Then, it flows through the processed products placed on each shelf stacked in a plurality of stages, and the inside of the fired capsule is adjusted to the set atmosphere in the transport zone. Atmosphere adjustment method of forming furnace. An apparatus for carrying out the atmosphere adjustment method for a pusher-type continuous firing furnace according to claim 1, wherein a plurality of gas flows out in the vertical direction provided on the gas introduction side through hole of the base plate. A hollow nozzle provided with a slit, a setter formed by stacking a plurality of shelves on which a processed product placed on a base plate is stacked, and the nozzle slits are provided corresponding to the positions of the plurality of shelves, When the fired capsule transported by the pusher reaches the transport zone in the furnace body where the firing atmosphere is to be changed and exits the transport zone, when the gas introduction passage is formed, the fired capsule in the fired capsule passes through the gas introduction side through hole. Gas is introduced into the nozzle, gas flows out from a plurality of slits provided in the nozzle, flows through the processed products placed on each shelf stacked in multiple stages, and the inside of the calcined capsule is set in the transport zone An atmosphere adjusting device for a pusher type continuous firing furnace, characterized in that the apparatus is configured to be adjusted to the air.

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