JP2014116403A5 - - Google Patents

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Publication number
JP2014116403A5
JP2014116403A5 JP2012268340A JP2012268340A JP2014116403A5 JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5 JP 2012268340 A JP2012268340 A JP 2012268340A JP 2012268340 A JP2012268340 A JP 2012268340A JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5
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Japan
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detection
mark
reference member
exposure
projection optical
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JP2012268340A
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Japanese (ja)
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JP6102230B2 (ja
JP2014116403A (ja
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JP2012268340A 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法 Active JP6102230B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012268340A JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012268340A JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2014116403A JP2014116403A (ja) 2014-06-26
JP2014116403A5 true JP2014116403A5 (https=) 2015-12-03
JP6102230B2 JP6102230B2 (ja) 2017-03-29

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JP2012268340A Active JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

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JP (1) JP6102230B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102676391B1 (ko) * 2015-09-30 2024-06-18 가부시키가이샤 니콘 노광 장치, 노광 방법, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1068604A (ja) * 1996-08-27 1998-03-10 Canon Inc 光干渉計測方法およびそれを用いた光干渉計測装置
WO2004053426A1 (en) * 2002-12-05 2004-06-24 Kla-Tencor Technologies Corporation Apparatus and methods for detecting overlay errors using scatterometry
EP3267259A1 (en) * 2006-02-21 2018-01-10 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
EP3327507B1 (en) * 2006-02-21 2019-04-03 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
TWI622084B (zh) * 2006-09-01 2018-04-21 尼康股份有限公司 Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
JP5215357B2 (ja) * 2009-07-16 2013-06-19 エーエスエムエル ネザーランズ ビー．ブイ． 多重ヘッドアライメントシステムにおけるアライメントヘッドの位置キャリブレーション
NL2005092A (en) * 2009-07-16 2011-01-18 Asml Netherlands Bv Object alignment measurement method and apparatus.

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