JP2014085342A - センサ用応力低減コンポーネント - Google Patents

センサ用応力低減コンポーネント Download PDF

Info

Publication number
JP2014085342A
JP2014085342A JP2013215402A JP2013215402A JP2014085342A JP 2014085342 A JP2014085342 A JP 2014085342A JP 2013215402 A JP2013215402 A JP 2013215402A JP 2013215402 A JP2013215402 A JP 2013215402A JP 2014085342 A JP2014085342 A JP 2014085342A
Authority
JP
Japan
Prior art keywords
support ring
lead
stator
ring
paddle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013215402A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014085342A5 (enExample
Inventor
Roehnelt Ryan
ライアン・ローネルト
Jarvis Michael
マイケル・ジャーヴィス
Magendanz Galen
ゲイレン・マジェンダンツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2014085342A publication Critical patent/JP2014085342A/ja
Publication of JP2014085342A5 publication Critical patent/JP2014085342A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
JP2013215402A 2012-10-19 2013-10-16 センサ用応力低減コンポーネント Pending JP2014085342A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/656,600 US9164117B2 (en) 2012-10-19 2012-10-19 Stress reduction components for sensors
US13/656,600 2012-10-19

Publications (2)

Publication Number Publication Date
JP2014085342A true JP2014085342A (ja) 2014-05-12
JP2014085342A5 JP2014085342A5 (enExample) 2016-11-24

Family

ID=49354521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013215402A Pending JP2014085342A (ja) 2012-10-19 2013-10-16 センサ用応力低減コンポーネント

Country Status (4)

Country Link
US (2) US9164117B2 (enExample)
EP (1) EP2722676A1 (enExample)
JP (1) JP2014085342A (enExample)
RU (1) RU2013146603A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016017962A (ja) * 2014-07-08 2016-02-01 ハネウェル・インターナショナル・インコーポレーテッド 加速度計のヒステリシス効果の低減

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9164117B2 (en) * 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors
US10036765B2 (en) * 2015-07-10 2018-07-31 Honeywell International Inc. Reducing hysteresis effects in an accelerometer
US10401378B2 (en) 2015-10-21 2019-09-03 Honeywell International Inc. Accelerometer
US10161956B2 (en) 2016-04-25 2018-12-25 Honeywell International Inc. Reducing bias in an accelerometer via a pole piece
CN107703329B (zh) * 2017-09-29 2019-11-26 中国船舶重工集团公司第七0七研究所 用于高分辨率石英挠性加速度计的真空保持结构
US10859593B2 (en) 2018-08-31 2020-12-08 Honeywell International Inc. Reducing thermal expansion induced errors in a magnetic circuit assembly
CN109100536A (zh) * 2018-09-19 2018-12-28 中国船舶重工集团公司第七0七研究所 一种新型石英玻璃摆片
CN109085384B (zh) * 2018-10-29 2020-12-15 中国船舶重工集团公司第七0七研究所 一种采用新型摆部件结构的高稳定性石英挠性加速度计
CN109358208A (zh) * 2018-11-14 2019-02-19 陕西华燕航空仪表有限公司 一种无骨架力矩器微小型石英加速度计
US11169175B2 (en) 2020-02-11 2021-11-09 Honeywell International Inc. Multilayer excitation ring
US11521772B2 (en) 2020-02-11 2022-12-06 Honeywell International Inc. Multilayer magnetic circuit assembly
CN111487006B (zh) * 2020-04-16 2021-07-20 南京高华科技股份有限公司 基于应力隔离结构的微差压传感器
CN112540193B (zh) * 2020-12-25 2023-04-28 中国电子科技集团公司第二十六研究所 隔离干扰力矩的石英挠性加速度检测质量摆及加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5024089A (en) * 1988-06-29 1991-06-18 Sundstrand Data Control, Inc. Stress compensated transducer
US5763779A (en) * 1995-02-09 1998-06-09 Alliedsignal, Inc. Accelerometer with improved support rim isolation

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4872342A (en) * 1986-06-27 1989-10-10 Sundstrand Data Control, Inc. Translational accelerometer and accelerometer assembly method
US4766768A (en) * 1987-10-22 1988-08-30 Sundstrand Data Control, Inc. Accelerometer with isolator for common mode inputs
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
US5090243A (en) * 1990-06-11 1992-02-25 Sundstrand Data Control, Inc. Preload system for accelerometer
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
EP0485589A1 (en) 1990-06-11 1992-05-20 Sundstrand Data Control, Inc. Capacitance pick-off for force rebalance accelerometer
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd, Inc. Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
US20090205424A1 (en) 2008-02-15 2009-08-20 Honeywell International Inc. Flexure type accelerometer and method of making same
US7926348B2 (en) * 2008-03-18 2011-04-19 Honeywell International Inc. Methods and systems for minimizing vibration rectification error in magnetic circuit accelerometers
US8096182B2 (en) 2008-05-29 2012-01-17 Freescale Semiconductor, Inc. Capacitive sensor with stress relief that compensates for package stress
US8039912B2 (en) 2008-06-25 2011-10-18 Honeywell International Inc. Systems and methods for reduced stress anchors
US9164117B2 (en) 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5024089A (en) * 1988-06-29 1991-06-18 Sundstrand Data Control, Inc. Stress compensated transducer
US5763779A (en) * 1995-02-09 1998-06-09 Alliedsignal, Inc. Accelerometer with improved support rim isolation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016017962A (ja) * 2014-07-08 2016-02-01 ハネウェル・インターナショナル・インコーポレーテッド 加速度計のヒステリシス効果の低減

Also Published As

Publication number Publication date
US20160011227A1 (en) 2016-01-14
EP2722676A1 (en) 2014-04-23
US20140109673A1 (en) 2014-04-24
RU2013146603A (ru) 2015-04-27
US9164117B2 (en) 2015-10-20
US9400287B2 (en) 2016-07-26

Similar Documents

Publication Publication Date Title
JP2014085342A (ja) センサ用応力低減コンポーネント
US4760299A (en) Distortion free synchro
US10401378B2 (en) Accelerometer
US8365596B2 (en) Method for sensing acceleration using a translational mass in-plane MEMS accelerometer
US4697455A (en) Accelerometer coil mounting system
JPH05505467A (ja) 絶縁した屈曲部を有する加速度計
CN107305215B (zh) 经由磁极片减少加速度计中的偏置
JPS6126627B2 (enExample)
CN105705926A (zh) 包括用于对耐受温度变化的粘合剂层进行控制的结构的压力传感器
JPS63503090A (ja) 加速度計の保証質量境界面
JP6482277B2 (ja) ひずみ非結合センサ
US4555945A (en) Method and apparatus for producing a controlled preload on a transducer assembly by means of a composite material sleeve
JPH05505878A (ja) 再平衡コイルの応力分離を有した加速度計
WO2019069620A1 (ja) トルク検出装置
JP2006153519A (ja) 加速度センサ
US12140606B2 (en) Bias performance in force balance accelerometers
US12123893B2 (en) Sensor having stress relieving support structure
JP2015114233A (ja) 半導体圧力センサ
KR101915770B1 (ko) 열탄성 코일패드 내장형 가속도계
JP2006153516A (ja) 加速度センサ
JP2021067578A (ja) サーボ型加速度計
JP2006317181A (ja) 加速度センサ
CN107037236A (zh) 加速度计

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161011

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20161011

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170710

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170712

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180305