JP2014079837A - Auxiliary member for cutting tool wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an auxiliary member for cutting tool wheels capable of reducing the possibility of an object to be processed or a cutting edge when a cutting edge catches cutting chips.SOLUTION: A cutting tool wheel includes a wheel base and a cutting tool unit comprising a cutting tool shank mounted on the wheel base, a cutting tool arranged in the cutting tool shank in a removable way and a cutting edge arranged in the lower end part of the cutting tool. An auxiliary member for the cutting tool wheel includes a mounting part to be mounted on the wheel base and a wall part which takes, as the moving direction, the direction of the movement of the cutting edge on an object to be processed in cutting the to-be-processed object, is hung from the lower end of the wheel base on the front side in the moving direction of the cutting edge, leads at least to a part of the cutting edge and exposes a processing point of the cutting edge so as to prevent adhesion of cutting chips produced during cutting the to-be-processed object with the cutting edge.

Description

  The present invention relates to an auxiliary member for a bite wheel to be attached to the bite wheel.

  Conventionally, as disclosed in Patent Documents 1 and 2, it is known to thin a workpiece by a cutting tool with respect to the workpiece held by a holding table.

  Specifically, a cutting tool (cutting blade) is attached to the lower end portion to constitute a bite unit, and this bite unit is provided on a bite wheel connected to the lower end portion of the spindle. The workpiece is cut by the cutting blade by being fed to the workpiece.

JP 2009-012105 A JP 2012-035343 A

  When the workpiece is cut by the cutting blade, cutting waste is generated. This cutting waste is generated on the front end side in the cutting direction of the cutting blade, that is, on the front side in the rotation direction of the spindle.

  When the workpiece includes a ductile material such as metal or resin, the cutting waste is generated in a thread shape, which may cause a problem that the thread cutting waste is entangled with the bite unit.

  Furthermore, when the entangled cutting waste is caught in the cutting blade when cutting the workpiece, there is a concern that the workpiece may be damaged or the cutting blade may be damaged.

  In particular, in a bite unit in which a cutting tool provided with a cutting blade is detachably attached to the bite shank as in the configurations of Patent Documents 1 and 2, the bite and the bite shank's bite mounting portion (pit) Cutting scraps are easily caught in the gaps that are exposed between them, and there is a high risk of problems associated with the cutting scraps and problems caused by these defects.

  This invention is made in view of such a point, The place made into the objective is the bite wheel which can reduce the possibility that a cutting blade will injure a workpiece and a cutting blade by enclosing a cutting waste. It is to provide an auxiliary member.

  According to the invention described in claim 1, a cutting tool having a holding table for holding a workpiece, a cutting tool for cutting the workpiece held by the holding table, and a spindle for rotating the cutting wheel, Positioning means for positioning the cutting tool at a predetermined height position, and a holding table holding the workpiece to the cutting tool positioned at the predetermined height by the positioning means is processed and fed in a horizontal direction so as to be able to approach and separate. A bite wheel auxiliary member attached to a bite wheel in a bite cutting device having a processing feed means. The bite wheel is divided into a wheel base, a bite shank attached to the wheel base, and a bite shank. A cutting tool unit having a cutting tool provided detachably and a cutting blade provided at the lower end of the cutting tool. The auxiliary member has a mounting portion mounted on the wheel base, and a direction in which the cutting blade moves on the work piece when cutting the work piece, and a lower end of the wheel base on the leading side of the moving direction of the cutting blade. And a wall that exposes at least a part of the cutting blade and exposes the machining point of the cutting blade, and the cutting blade cuts the work piece and attaches to the bite unit. A bite wheel auxiliary member is provided for preventing.

  According to the second aspect of the present invention, at least the wall surface on the leading side in the movement direction of the wall portion has an inclined surface that is inclined at a predetermined angle so as to recede in the movement direction as it becomes outside in the radial direction of the bite wheel in plan view. The auxiliary member of the bite wheel according to claim 1, wherein the cutting waste is configured to be discharged toward a radially outer side of the bite wheel.

  ADVANTAGE OF THE INVENTION According to this invention, the auxiliary member of the bite wheel which can reduce a possibility that a cutting blade may damage a to-be-processed object or a cutting blade by enclosing a cutting waste is provided.

  Specifically, by attaching an auxiliary member of the bite wheel to the bite wheel, the wall of the auxiliary member can be erected on the leading side in the moving direction of the cutting blade to cover the necessary part of the bite unit, It is possible to prevent entanglement of the cutting scraps into the bite unit and reduce the possibility that the cutting blade will entrain the cutting scraps.

  Furthermore, according to the invention described in claim 2, since the cutting waste is discharged toward the radially outer side of the bite wheel, it is possible to more effectively reduce the occurrence of defects due to the generation of the cutting waste. be able to.

It is a perspective view of the cutting tool suitable for implementation of the present invention. It is a side view of the cutting tool unit suitable for implementation of the present invention. It is a perspective view of a bite wheel which attached an auxiliary member and a bite unit. It is a perspective view of a bite unit. It is a side view of the bite unit explaining the state of cutting. It is a side view shown about the structure of an auxiliary member and a bite unit. It is a top view shown about the structure of an auxiliary member and a bite unit. It is a top view shown about other embodiments of an auxiliary member. It is a figure explaining the clearance gap between the pit and bite of a bite shank.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an overall configuration of a cutting tool 2 suitable for implementing the present invention. FIG. 2 is a side view showing processing of a wafer W by a cutting tool unit 10.

  As shown in FIG. 1, reference numeral 4 denotes a base (housing) of the cutting tool 2, and a column 6 is erected on the rear side of the base 4. A pair of guide rails (only one is shown) 8 extending in the vertical direction is fixed to the column 6.

  A cutting tool unit 10 is mounted along the pair of guide rails 8 so as to be movable in the vertical direction. The cutting tool unit 10 is attached to a moving base 12 whose housing 20 moves in the vertical direction along a pair of guide rails 8.

  As shown in FIGS. 1 and 2, the cutting tool unit 10 includes a housing 20, a spindle 22 rotatably accommodated in the housing 20, a mount 24 fixed to the tip of the spindle 22, and a detachable attachment to the mount 24. And a bite wheel 25 mounted as possible. A bite unit 26 is detachably attached to the bite wheel 25.

  As shown in FIG. 1, the cutting tool unit 10 includes a cutting tool unit feed mechanism 18 including a ball screw 14 and a pulse motor 16 that move the cutting tool unit 10 in a vertical direction along a pair of guide rails 8. I have. When the pulse motor 16 is pulse-driven, the ball screw 14 rotates and the moving base 12 is moved in the vertical direction.

  A chuck table mechanism 28 having a chuck table 30 is disposed at an intermediate portion of the base 4, and the chuck table mechanism 28 is moved in the Y-axis direction by a chuck table moving mechanism (not shown). Reference numeral 33 denotes a bellows, which covers the chuck table mechanism 28.

  In the front portion of the base 4, a first wafer cassette 32, a second wafer cassette 34, a wafer transfer robot 36, a positioning mechanism 38 having a plurality of positioning pins 40, and a wafer carry-in mechanism (loading arm) 42, a wafer unloading mechanism (unloading arm) 44, and a spinner cleaning unit 46 are disposed.

  Further, a cleaning water spray nozzle 48 for cleaning the chuck table 30 is provided at the approximate center of the base 4. The cleaning water spray nozzle 48 sprays cleaning water toward the chuck table 30 in a state where the chuck table 30 is positioned in the wafer loading / unloading area on the front side of the apparatus.

  Referring to FIG. 3, a perspective view of a bite wheel 25 according to an embodiment of the present invention is shown. The bite wheel 25 includes an annular wheel base 50, a bite unit 26 detachably attached to the wheel base 50, and a wheel at a point target position with respect to the bite unit 26 with respect to the rotation center of the wheel base 50. It comprises a bite unit 26 detachably attached to the base 50 and a balancing weight 66 (counter balance) having the same weight. The bite wheel 25 is rotated in the direction of arrow R.

  As shown in the exploded perspective view of FIG. 4, the bite unit 26 includes a substantially rectangular parallelepiped bite shank 52 and a bite 54 detachably attached to the bite shank 52. The cutting tool 54 has a plate shape, and a cutting blade 56 formed in a predetermined shape with diamond or the like is fixed to the surface side of one end portion in the longitudinal direction. A round hole 59 into which a screw 58 is inserted is formed in the cutting tool 54.

  A pit 60 having a depth equivalent to the thickness of the cutting tool 54 is formed on one side of the cutting tool shank 52. A screw hole 61 is formed in the pit 60. The cutting tool 54 is fixed to the cutting tool shank 52 by inserting the cutting tool 54 into the pit 60 of the cutting tool shank 52 and screwing the screw 58 into the screw hole 61 through the round hole 59 of the cutting tool 54.

  As shown in FIG. 5, the wheel base 50 is formed with a rectangular parallelepiped mounting hole 62 formed in the vertical direction and a screw hole 63 that opens from the mounting hole 62 to the outer side in the radial direction of the wheel base 50. Yes. The bite unit 26 is fixed to the wheel base 50 by inserting the bite shank 52 of the bite unit 26 into the attachment hole 62 from below and screwing the screw 64 into the screw hole 63 from the lateral side and tightening.

  Next, the configuration of the auxiliary member 70 shown in FIGS. 5 to 7 will be described. The auxiliary member 70 is a member provided to cover a portion of the bite shank 52 to which the bit 54 is attached.

  As shown in FIG. 6, the auxiliary member 70 is configured to include a mounting portion 72 for mounting on the wheel base 50 and a wall portion 74 that extends outward in the radial direction of the wheel base 50.

  As shown in FIG. 5, the mounting portion 72 is formed with a through hole 72b in the vertical direction. The fixing bolt 71 is inserted into the through hole 72b from the lower side, and the tip of the fixing bolt 71 is attached to the wheel base. The auxiliary member 70 is suspended from the lower surface 50 a of the wheel base 50 by being screwed into a screw hole 65 formed vertically in the base 50.

  As shown in FIG. 6, the wall portion 74 is configured to face a mounting surface 52 a on the back side surface 74 a on the side where the cutting tool 54 is mounted in the cutting tool shank 52.

  As shown in FIGS. 6 and 7, the mounting surface 52 a is formed with a pit 60 for accommodating the cutting tool 54, and the rear side surface 74 a of the wall portion 74 is opposed to the pit 60. A vertical groove 74b is formed. The vertical groove 74 b accommodates a part of the cutting tool 54 protruding from the pit 60 and a screw 58 so that the back side surface 74 a of the wall portion 74 comes into contact with the mounting surface 52 a of the cutting tool shank 52. .

  Further, as shown in FIGS. 6 and 7, the back side surface 72 a of the mounting portion 72 is in contact with one side surface 52 b of the bite shank 52 (the inner surface in the radial direction of the wheel base 50).

  As described above, the back side surface 74a of the wall portion 74 is in contact with the mounting surface 52a of the bite shank 52, and the back side surface 72a of the mounting portion 72 is in contact with the one side surface 52b of the bite shank 52. The auxiliary member 70 can be positioned with respect to.

  As shown in FIG. 5, the auxiliary member 70 is suspended from the lower surface 50 a of the wheel base 50, and at least the wall portion 74 has a length L <b> 1 reaching a part of the cutting blade 56. The machining point 56a is exposed below the wall 74 so that cutting can be performed. In addition, the processing point 56a of the cutting blade 56 should just be exposed, and about the cutting blade 56 itself, for example, the state where most has appeared may be sufficient. Further, the dimension of the mounting portion 72 may not have the length L1, and is not particularly limited.

  As shown in FIG. 5, the bite shank 52 is moved in the moving direction K together with the auxiliary member 70 by the rotation of the wheel base 50. Then, as shown in FIG. 5, the wafer W is cut by the cutting blade 56, whereby thread-like cutting waste 57 is generated.

  The cutting waste 57 generated in this way is separated from the wafer W and repelled outside by hitting the wall 74 or the bottom surface 74c of the auxiliary member 70. Here, if the auxiliary member 70 is not present, the mounting surface 52a of the bite shank 52 will be exposed, and will be entangled with the cutting blade 56 shown in FIG. The trouble that the cutting waste 57 is pinched by S2 will generate | occur | produce. In this regard, according to the present embodiment, since the attachment surface 52a of the bite shank 52 is hidden by the auxiliary member 70, it is possible to prevent such a problem.

The present invention can be implemented as described above.
That is, a tool having a chuck table (holding table) 30 for holding a wafer W as a workpiece, a tool wheel 25 for cutting the wafer W held by the chuck table 30, and a spindle 22 for rotating the tool wheel 25. Cutting unit (bite cutting means) 10, bite cutting unit feed mechanism (positioning means) 18 for positioning the bite cutting unit 10 at a predetermined height position, and bite cutting positioned at a predetermined height by the bite cutting unit feed mechanism 18 A bite mounted on a bite wheel 25 in a bite cutting device provided with a chuck table moving mechanism (machining feed means) that feeds the chuck table 30 holding the wafer W to the unit 10 in a horizontal direction so that the chuck table 30 can be approached and separated. An auxiliary member 70 of the wheel 25 The bite wheel 25 includes a wheel base 50, a bite shank 52 attached to the wheel base 50, a bite 54 detachably disposed on the bite shank 52, and a cutting blade 56 provided at the lower end of the bite 54. The auxiliary member 70 includes a mounting portion 72 mounted on the wheel base 50, and a direction in which the cutting blade 56 moves the wafer W when cutting the wafer W as a moving direction K. A wall portion 74 that hangs down from the lower surface (lower end) 50a of the wheel base 50 on the leading side of the moving direction (K) of the cutting blade 56 and reaches at least a part of the cutting blade 56 and exposes a processing point of the cutting blade 56. The cutting wheel 56 serves as a bite wheel auxiliary member 70 that prevents the cutting waste 57 formed by cutting the wafer W from adhering to the bite unit 26. It is.

  With such a configuration, the auxiliary member 70 of the bite wheel 25 that can reduce the risk of damaging the wafer W or the cutting blade 56 when the cutting blade 56 entrains the cutting waste 57 is provided.

  Specifically, by attaching the auxiliary member 70 of the bite wheel 25 to the bite wheel 25, the wall portion 74 of the auxiliary member 70 is erected on the leading side in the movement direction (K) of the cutting blade 56, and the bite unit 26. Therefore, it is possible to reduce the possibility that the cutting blade 56 entrains the cutting waste 57 by preventing the cutting waste 57 from being entangled with the cutting tool unit 26.

  FIG. 8 shows an auxiliary member 70A according to another embodiment. With respect to the wall 74A, the wall surface 74m on the leading side in the movement direction K is in the radial direction R1 of the bite wheel 25 (see FIG. 3) in plan view. By configuring an inclined surface inclined at a predetermined angle θ so as to recede in the moving direction K as it goes to the outside, the cutting waste 57 is configured to be discharged toward the outside in the radial direction R1 of the bite wheel 25. Yes.

  The predetermined angle θ can be set as appropriate depending on the material of the wafer W, the rotational speed of the bite wheel 25, and the like. For example, it may be set in the range of 10 to 45 degrees.

  As described above, when the wall surface 74m is configured as an inclined surface in plan view, the end 74n on the outer side in the radial direction R1 of the wall surface 74m moves so as to be delayed in the movement direction K. The cutting waste 57 that has come into contact with 74m can easily escape to the end 74n side by the amount of delay, and a situation can be formed in which the cutting waste 57 is easily guided to the outside in the radial direction R1.

  If the wall surface 74m does not form an inclined surface and forms a surface parallel to the imaginary line 75, the cutting waste 57 that has contacted the wall surface is not particularly formed in a direction in which the generated cutting waste 57 easily escapes. Will stagnate.

  7 and 8 described above, as shown in FIG. 9, in the byte unit 26, the width of the byte 54 (the horizontal width in FIG. 9) is smaller than the width of the pit 60. By setting, the attachment angle of the cutting tool 54 with respect to the cutting tool shank 52 can be changed.

  Therefore, it is assumed that clearances S1 (gap above the cutting tool 54) and S2 (gap on the side of the cutting tool 54) between the pit 60 and the cutting tool 54 are secured. The above-described embodiment that can reliably prevent the intrusion of cutting wastes exhibits particularly excellent effects.

  Further, according to the above-described embodiment, the unevenness of the surface (mounting surface 52 a) on the side where the tool 54 of the tool shank 52 is disposed, that is, the gaps S 1 and S 2, the screw 58, and the cutting blade 56. Since the portion is covered by the wall 74 (FIG. 5), it is possible to reliably prevent the cutting waste from being entangled with the bite shank 52 (bite unit 26).

25 Bite wheel 26 Bite unit 50 Wheel base 50a Lower surface 52 Bite shank 52a Mounting surface 52b One side surface 54 Bite 56 Cutting blade 56a Machining point 57 Cutting waste 60 Pit 70 Auxiliary member 72 Mounting portion 74 Wall portion 74c Bottom surface K Moving direction R1 Radius Direction S1 Gap S2 Gap W Wafer θ Predetermined angle

Claims (2)

A holding table for holding the workpiece;
A bite cutting means having a bite wheel for cutting the workpiece held by the holding table and a spindle for rotating the bite wheel;
Positioning means for positioning the cutting tool at a predetermined height, and the holding table holding the workpiece with respect to the cutting tool positioned at a predetermined height by the positioning means can be moved close to and away from each other in the horizontal direction. Processing feed means for processing and feeding to,
A bite wheel auxiliary member attached to the bite wheel in a bite cutting device comprising:
The bite wheel
A wheel base,
A tool unit having a tool shank attached to the wheel base, a tool provided detachably on the tool shank, and a cutting blade provided at the lower end of the tool,
The auxiliary member is
A mounting portion mounted on the wheel base;
The direction in which the cutting blade moves on the workpiece when cutting the workpiece is defined as the moving direction, and is suspended from the lower end of the wheel base on the leading side in the moving direction of the cutting blade and reaches at least a part of the cutting blade. And a wall that exposes the processing point of the cutting blade,
Preventing cutting chips formed by cutting the workpiece by the cutting blade from adhering to the bite unit;
Auxiliary member for bite wheel. At least the wall surface on the front side in the movement direction of the wall portion is
By forming an inclined surface that is inclined at a predetermined angle so as to recede in the moving direction as it goes outward in the radial direction of the bite wheel in a plan view, the cutting waste is discharged outward in the radial direction of the bite wheel. Configured to be
The auxiliary member for a bite wheel according to claim 1.

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