JP2014076571A - 液体吐出ヘッドの製造方法 - Google Patents
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Abstract
【解決手段】本発明は、基板の上に、液室の型材となるモールドを形成する工程と、前記基板及び前記モールドの上に化学的気相蒸着法により無機材料を配置し、流路形成部材を形成する工程と、ここで、前記流路形成部材には、隣り合う二つの液室側壁の間であって前記モールドが配されていない領域に凹部が形成され、前記流路形成部材上及び前記凹部内に感光性樹脂を配置して感光性樹脂層を形成する工程と、前記感光性樹脂層をオリフィスプレートの上面が露出するまで研削し、前記凹部内に埋め込み材を形成する工程と、前記研削の後、前記流路形成部材に吐出口を形成する工程と、前記吐出口を形成した後、前記モールドを除去する工程と、を有する液体吐出ヘッドの製造方法である。
【選択図】図2
Description
液体を吐出するためのエネルギーを発生させる複数のアクチュエーターが形成された基板と、該基板の上に、前記液体を吐出する吐出口及び前記アクチュエーターが配置される複数の液室を構成する流路形成部材と、を備える液体吐出ヘッドの製造方法であって、
前記流路形成部材は、前記吐出口を構成するオリフィスプレートと、前記液室の側壁を構成する液室側壁と、を少なくとも含み、
(1)前記基板の上に、前記液室の型材となるモールドを形成する工程と、
(2)前記基板及び前記モールドの上に化学的気相蒸着法により無機材料を配置し、前記流路形成部材を形成する工程と、ここで、前記流路形成部材には、隣り合う二つの前記液室側壁の間であって前記モールドが配されていない領域に凹部が形成され、
(3)前記流路形成部材上及び前記凹部内に感光性樹脂を配置して感光性樹脂層を形成する工程と、
(4)前記感光性樹脂層を前記オリフィスプレートの上面が露出するまで研削し、前記凹部内に埋め込み材を形成する工程と、
(5)前記研削の後、前記流路形成部材に前記吐出口を形成する工程と、
(6)前記吐出口を形成した後、前記モールドを除去する工程と、
を有することを特徴とする液体吐出ヘッドの製造方法である。
以下、実施例により本発明に係る液体吐出ヘッドの製造方法について、図1(a)〜(h)に示す工程図に則して更に詳しく説明する。
本実施例について、図3を参照して説明する。また、本実施例の図3(a)〜(d)に示す工程は、実施例1の図1(a)〜(d)に示す工程と同じである。
2 アクチュエーター(吐出エネルギー発生素子)
3 モールド
4 オリフィスプレート
5 液室側壁
6 凹部
7 Pad
8 感光性樹脂層
8’ 埋め込み材
9 吐出口
10 マスク
11 液室
12 フォトマスク
13 UV光
19 液体供給口
20 液体吐出ヘッド
Claims (7)
- 液体を吐出するためのエネルギーを発生させる複数のアクチュエーターが形成された基板と、該基板の上に、前記液体を吐出する吐出口及び前記アクチュエーターが配置される複数の液室を構成する流路形成部材と、を備える液体吐出ヘッドの製造方法であって、
前記流路形成部材は、前記吐出口を構成するオリフィスプレートと、前記液室の側壁を構成する液室側壁と、を少なくとも含み、
(1)前記基板の上に、前記液室の型材となるモールドを形成する工程と、
(2)前記基板及び前記モールドの上に化学的気相蒸着法により無機材料を配置し、前記流路形成部材を形成する工程と、ここで、前記流路形成部材には、隣り合う二つの前記液室側壁の間であって前記モールドが配されていない領域に凹部が形成され、
(3)前記流路形成部材上及び前記凹部内に感光性樹脂を配置して感光性樹脂層を形成する工程と、
(4)前記感光性樹脂層を前記オリフィスプレートの上面が露出するまで研削し、前記凹部内に埋め込み材を形成する工程と、
(5)前記研削の後、前記流路形成部材に前記吐出口を形成する工程と、
(6)前記吐出口を形成した後、前記モールドを除去する工程と、
を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記工程(4)において、前記オリフィスプレートの上面と前記埋め込み材の上面とが平坦になるように研削する請求項1に記載の液体吐出ヘッドの製造方法。
- 前記工程(4)において、前記感光性樹脂層をCMPにより研削する請求項1又は2に記載の液体吐出ヘッドの製造方法。
- 前記感光性樹脂はネガ型である請求項1乃至3のいずれかに記載の液体吐出ヘッドの製造方法。
- 前記感光性樹脂層を研削する前に、前記流路形成部材の上に配置された感光性樹脂部分を露光により硬化させる請求項4に記載の液体吐出ヘッドの製造方法。
- 前記感光性樹脂層を研削した後に、前記埋め込み材を露光により硬化させる請求項4に記載の液体吐出ヘッドの製造方法。
- 前記工程(5)において、前記吐出口を形成する際に、前記埋め込み材に微細穴を形成する請求項1乃至6のいずれかに記載の液体吐出ヘッドの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2012225065A JP5972139B2 (ja) | 2012-10-10 | 2012-10-10 | 液体吐出ヘッドの製造方法及び液体吐出ヘッド |
US14/048,412 US9139003B2 (en) | 2012-10-10 | 2013-10-08 | Method for producing liquid-ejection head |
US14/839,776 US9956776B2 (en) | 2012-10-10 | 2015-08-28 | Method for producing liquid-ejection head |
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JP2012225065A JP5972139B2 (ja) | 2012-10-10 | 2012-10-10 | 液体吐出ヘッドの製造方法及び液体吐出ヘッド |
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JP2014076571A true JP2014076571A (ja) | 2014-05-01 |
JP2014076571A5 JP2014076571A5 (ja) | 2015-11-26 |
JP5972139B2 JP5972139B2 (ja) | 2016-08-17 |
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JP5972139B2 (ja) * | 2012-10-10 | 2016-08-17 | キヤノン株式会社 | 液体吐出ヘッドの製造方法及び液体吐出ヘッド |
US9716035B2 (en) * | 2014-06-20 | 2017-07-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Combination interconnect structure and methods of forming same |
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JP2003053966A (ja) * | 2000-06-12 | 2003-02-26 | Seiko Epson Corp | インクジェット式記録ヘッド |
JP2006510508A (ja) * | 2002-12-19 | 2006-03-30 | テレコム・イタリア・エッセ・ピー・アー | 特にインクジェットプリントヘッド用の、攻撃性のある液体に対して液圧超小型回路を保護被覆するための工程 |
JP2007144878A (ja) * | 2005-11-29 | 2007-06-14 | Canon Inc | インクジェット記録ヘッド用基板、インクジェット記録ヘッドおよびインクジェット記録ヘッド用基板の製造方法 |
JP2010512261A (ja) * | 2006-12-12 | 2010-04-22 | イーストマン コダック カンパニー | 液体チャンバが改善された液滴排出装置 |
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US6331258B1 (en) * | 1997-07-15 | 2001-12-18 | Silverbrook Research Pty Ltd | Method of manufacture of a buckle plate ink jet printer |
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EP1065059B1 (en) * | 1999-07-02 | 2007-01-31 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
KR100570822B1 (ko) * | 2004-05-11 | 2006-04-12 | 삼성전자주식회사 | 잉크젯 헤드의 제조방법 및 그에 의해 제조된 잉크젯 헤드 |
US7600856B2 (en) * | 2006-12-12 | 2009-10-13 | Eastman Kodak Company | Liquid ejector having improved chamber walls |
JP6095315B2 (ja) * | 2012-10-02 | 2017-03-15 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP5972139B2 (ja) * | 2012-10-10 | 2016-08-17 | キヤノン株式会社 | 液体吐出ヘッドの製造方法及び液体吐出ヘッド |
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JP2003053966A (ja) * | 2000-06-12 | 2003-02-26 | Seiko Epson Corp | インクジェット式記録ヘッド |
JP2006510508A (ja) * | 2002-12-19 | 2006-03-30 | テレコム・イタリア・エッセ・ピー・アー | 特にインクジェットプリントヘッド用の、攻撃性のある液体に対して液圧超小型回路を保護被覆するための工程 |
JP2007144878A (ja) * | 2005-11-29 | 2007-06-14 | Canon Inc | インクジェット記録ヘッド用基板、インクジェット記録ヘッドおよびインクジェット記録ヘッド用基板の製造方法 |
JP2010512261A (ja) * | 2006-12-12 | 2010-04-22 | イーストマン コダック カンパニー | 液体チャンバが改善された液滴排出装置 |
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US9956776B2 (en) | 2018-05-01 |
US20150367640A1 (en) | 2015-12-24 |
US20140096385A1 (en) | 2014-04-10 |
JP5972139B2 (ja) | 2016-08-17 |
US9139003B2 (en) | 2015-09-22 |
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