JP2014064966A - Film manufacturing method, and film manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a thickness irregularity suppressed film by a spray coating method.SOLUTION: At a coating step and in a region not having a film deposition member 10, a nozzle 11 is scanned such that at least one of a scanning rate in a second direction of the nozzle 11 before the scanning direction of the nozzle 11 is reversed and a scanning rate in the second direction of the nozzle 11 after the scanning direction of the nozzle 11 has been reversed is lower than the scanning rate in the second direction of the nozzle 11 in the region having the film deposition member 10.

Description

  The present invention relates to a film manufacturing method and a film manufacturing apparatus.

  Conventionally, a spray coating method is known as a kind of film manufacturing method. In the spray coating method, for example, as described in Patent Document 1, a film-forming member is moved from a nozzle to a film-forming member that moves along one direction while reciprocating the nozzle along another direction. By supplying the coating liquid to the film, a coating film is formed on the film forming member. Thereafter, the film can be obtained by drying the coating film.

JP 2012-71266 A

  As a result of intensive studies by the present inventors, it has been found that when a film is formed by the spray coating method, the film thickness at both ends in the scanning direction of the nozzle is smaller than the film thickness at the center in the scanning direction. It was done.

  A main object of the present invention is to provide a method capable of producing a film with reduced thickness unevenness by a spray coating method.

  The manufacturing method of the 1st film | membrane which concerns on this invention is equipped with a movement process and an application | coating process. In the moving step, the film forming member is moved relative to the nozzle along the first direction. In the coating process, the nozzle is reciprocally scanned across the film forming member along the second direction inclined with respect to the first direction, thereby supplying the coating liquid from the nozzle onto the film forming member. . A film is manufactured on the deposition target member by alternately or simultaneously performing the moving process and the coating process. In the coating step, in the region where the film forming member is not provided, the scanning speed along the second direction of the nozzle before the nozzle scanning direction is reversed and the second nozzle after the nozzle scanning direction is reversed. The nozzles are scanned so that at least one of the scanning speeds along the direction of the nozzle is lower than the scanning speed along the second direction of the nozzles in the region where the film forming member is provided.

  In the first film manufacturing method according to the present invention, in the coating step, in the region where the film forming member is not provided, the scanning speed along the second direction of the nozzle before the scanning direction of the nozzle is reversed. The nozzle is preferably scanned so as to be lower than the scanning speed along the second direction of the nozzle in the region where the film forming member is provided.

  In the first film manufacturing method according to the present invention, it is preferable to temporarily stop the nozzle when the scanning direction of the nozzle is reversed in the coating step.

  The manufacturing method of the 2nd film | membrane which concerns on this invention is equipped with a movement process and an application | coating process. In the moving step, the film forming member is moved relative to the nozzle along the first direction. In the coating process, the nozzle is reciprocally scanned across the film forming member along the second direction inclined with respect to the first direction, thereby supplying the coating liquid from the nozzle onto the film forming member. . A film is manufactured on the deposition target member by alternately or simultaneously performing the moving process and the coating process. In the coating process, the nozzle is temporarily stopped when the scanning direction of the nozzle is reversed.

  In each of the first and second film manufacturing methods according to the present invention, the nozzle may atomize the coating liquid and supply the atomized coating liquid onto the film forming member.

  The first film manufacturing apparatus according to the present invention includes a nozzle, a moving mechanism, a scanning mechanism, and a control unit. The nozzle supplies the coating liquid onto the film forming member. The moving mechanism moves the film forming member relative to the nozzle along the first direction. The scanning mechanism reciprocally scans the nozzle so as to cross the film forming member along a second direction inclined with respect to the first direction. The control unit controls the scanning mechanism. In the region where the deposition target member is not provided, the control unit performs the scanning speed along the second direction of the nozzle before the nozzle scanning direction is reversed and the second nozzle after the nozzle scanning direction is reversed. The scanning mechanism is caused to scan the nozzle so that at least one of the scanning speeds along the direction is lower than the scanning speed along the second direction of the nozzles in the region where the film forming member is provided.

  In the first film manufacturing apparatus according to the present invention, the control unit may temporarily stop the nozzle when the scanning direction of the nozzle is reversed.

  The second film manufacturing apparatus according to the present invention includes a nozzle, a moving mechanism, a scanning mechanism, and a control unit. The nozzle supplies the coating liquid onto the film forming member. The moving mechanism moves the film forming member relative to the nozzle along the first direction. The scanning mechanism reciprocally scans the nozzle so as to cross the film forming member along a second direction inclined with respect to the first direction. The control unit controls the scanning mechanism. The control unit causes the scanning mechanism to temporarily stop the nozzle when the nozzle scanning direction is reversed.

  In the first and second film manufacturing apparatuses according to the present invention, the nozzles may each atomize the coating liquid and supply the atomized coating liquid onto the film forming member.

  ADVANTAGE OF THE INVENTION According to this invention, the method which can manufacture the film | membrane with which thickness nonuniformity was suppressed by the spray coat method can be provided.

It is a typical side view of the manufacturing apparatus of the film | membrane which concerns on one Embodiment of this invention. It is a typical top view of the manufacturing apparatus of the film concerning one embodiment of the present invention. It is a typical block diagram of the manufacturing apparatus of the film | membrane which concerns on one Embodiment of this invention. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction. It is an example of the graph showing the time-dependent change of the position of the nozzle in a y-axis direction.

  Hereinafter, an example of the preferable form which implemented this invention is demonstrated. However, the following embodiment is merely an example. The present invention is not limited to the following embodiments.

  Moreover, in each drawing referred in embodiment etc., the member which has a substantially the same function shall be referred with the same code | symbol. The drawings referred to in the embodiments and the like are schematically described. A ratio of dimensions of an object drawn in a drawing may be different from a ratio of dimensions of an actual object. The dimensional ratio of the object may be different between the drawings. The specific dimensional ratio of the object should be determined in consideration of the following description.

  FIG. 1 is a schematic side view of a film manufacturing apparatus according to this embodiment. FIG. 2 is a schematic plan view of the film manufacturing apparatus according to this embodiment.

  A film manufacturing apparatus 1 shown in FIGS. 1 and 2 is a film forming apparatus for manufacturing a film on a film forming member 10 by a spray coating method. The shape of the film forming member 10 is not particularly limited, but the film forming member 10 is generally plate-shaped. The film forming member 10 may be, for example, a glass plate, a ceramic plate, a resin plate, or the like.

  The manufacturing apparatus 1 includes a nozzle 11. A coating liquid supply mechanism 12 shown in FIG. 1 is connected to the nozzle 11. The coating liquid supply mechanism 12 stores a coating liquid for forming a film. The coating liquid is supplied from the coating liquid supply mechanism 12 to the nozzle 11. The coating liquid is discharged from the nozzle 11 toward the film forming member 10. It is preferable that the nozzle 11 atomizes the coating liquid and supplies the atomized coating liquid onto the film forming member 10.

  The manufacturing apparatus 1 includes a moving mechanism that moves the film forming member 10 relative to the nozzle 11 along the y-axis direction. For example, as shown in FIG. 1, the moving mechanism 13 includes a plurality of transport rolls so that the film forming member 10 can be moved along the y-axis direction. Alternatively, the moving mechanism is configured by a nozzle moving mechanism (not shown) connected to the nozzle 11 so that the nozzle 11 can be moved along the y-axis direction. The moving mechanism 13 moves the film forming member 10 relative to the nozzle 11 in the x-axis direction. Specifically, the moving mechanism 13 moves the film forming member 10 relative to the nozzle 11 at a constant speed from the x1 side in the x-axis direction toward the x2 side.

  The nozzle 11 is connected to the scanning mechanism 14 shown in FIG. The scanning mechanism 14 causes the nozzle 11 to reciprocately scan across the film forming member 10 along a direction (typically a vertical direction) inclined with respect to the x-axis direction. Specifically, the scanning mechanism 14 has a nozzle between a position on the y1 side from the y1 side end of the film forming member 10 and a position on the y2 side from the y2 side end of the film forming member 10. 11 is reciprocally scanned. That is, the scanning mechanism 14 scans the nozzle 11 to the y1 side from the film forming member 10 and then reverses the scanning direction of the nozzle 11 to scan the nozzle to the y2 side from the film forming member 10. The reversing of the scanning direction of the nozzle 11 is repeated.

  As shown in FIG. 3, the scanning mechanism 14, the moving mechanism 13 and the coating liquid supply mechanism 12 described above are connected to a control unit 15 and controlled by the control unit 15. Specifically, the control unit 15 adjusts the flow rate of the coating liquid supplied from the coating liquid supply mechanism 12 to the nozzle 11. By adjusting the flow rate of the coating liquid by the control unit 15, the amount of the coating liquid applied to the film forming member 10 is controlled. The control unit 15 controls the moving speed of the film forming member 10 by the moving mechanism 13. The control unit 15 controls the scanning direction and scanning speed of the nozzle 11 by the scanning mechanism 14.

  Next, the manufacturing method of the film | membrane using the manufacturing apparatus 1 is demonstrated.

  Schematically, first, a coating liquid is supplied onto the film forming member 10 from a nozzle 11 to form a coating film (application process). Further, a moving process is performed in which the film forming member 10 is moved relative to the nozzle 11 along the x-axis direction. For example, the moving process and the applying process may be performed alternately. Moreover, you may perform an application | coating process, performing a moving process. After performing the coating process and the moving process, a film can be manufactured on the film forming member 10 by drying the formed coating film.

  Specifically, the control unit 15 causes the moving mechanism 13 to move the film forming member 10 relative to the nozzle 11 along the x-axis direction. By the scanning mechanism 14, the nozzle 11 is reciprocally scanned a plurality of times so as to cross the film forming member 10 along the y-axis direction. By doing in this way, the coating liquid is supplied onto the film forming member 10 from the nozzle 11 and the coating process of applying the coating liquid to the film forming member 10 is performed.

  4 to 10 are graphs showing changes with time in the position of the nozzles in the y-axis direction, where the horizontal axis indicates time and the vertical axis indicates the position of the nozzles in the y-axis direction. Therefore, the slope of the straight line portion of the graph represents the nozzle scanning speed.

  As shown in FIG. 4 to FIG. 7, FIG. 9 and FIG. 10, in this embodiment, the controller 15 scans the nozzle 11 in the region where the film forming member 10 is not provided in this coating process. At least one of the scanning speed along the y-axis direction of the nozzle 11 before the reversal of the nozzle 11 and the scanning speed along the y-axis direction of the nozzle 11 after the scanning direction of the nozzle 11 is reversed The nozzle is scanned so as to be lower than the scanning speed along the y-axis direction of the nozzle in the region where 10 is provided. Specifically, in FIG. 4, the control unit 15 scans along the y-axis direction of the nozzle 11 before the scanning direction of the nozzle 11 is reversed in the region where the film forming member 10 is not provided in this coating step. The nozzle is scanned so that the speed is lower than the scanning speed along the y-axis direction of the nozzle in the region where the film forming member 10 is provided.

  More specifically, in the region where the film forming member 10 is provided, the nozzle 11 is scanned at a constant first speed. The first speed is not particularly limited. The first speed is preferably about 20 m / min to 40 m / min, for example. When the nozzle 11 passes through the region where the film forming member 10 is provided and reaches the region where the film forming member 10 is not provided, the nozzle 11 scans at a second speed lower than the first speed. Is done. Thereafter, the scanning direction of the nozzle 11 is reversed. For example, the scanning direction of the nozzle 11 is switched from the y1 side to the y2 side. After the scanning direction of the nozzle 11 is reversed, the nozzle 11 is scanned at the first speed until it passes through the region where the film forming member 10 is provided. When the nozzle 11 passes through the region where the film-forming member 10 is provided and reaches the region where the film-forming member 10 is not provided, the nozzle 11 is moved until the scanning direction of the nozzle 11 is reversed again. Scanned at a speed of 2. As described above, in the present embodiment, the deposition target member 10 remains in the period from when the nozzle 11 passes through the region where the deposition target member 10 is provided until the scanning direction of the nozzle 11 is reversed. The nozzle 11 is scanned at a second speed lower than the first speed that is the scanning speed of the nozzle 11 in the provided region.

  By the way, in general, in the spray coating method, the nozzle is always scanned at a constant speed. However, as a result of intensive studies by the present inventors, it has been found that when the nozzle is scanned at a constant speed, the thickness at both ends of the film is thinner than the thickness at the center in the scanning direction of the nozzle. It was done. Further, it has been found that the decrease in thickness at both ends of the film is due to the following causes. That is, inertia force is applied to the coating liquid located in the nozzle by deceleration, acceleration, or impact when the scanning direction of the nozzle is reversed. As a result, when the nozzle is reversed in the scanning direction, the coating liquid located in the nozzle is excessively discharged. That is, the discharge amount immediately after the nozzle scanning direction is reversed exceeds the supply amount of the coating liquid to the nozzle. As a result, immediately after the scanning direction of the nozzle is reversed, the discharge liquid provided in the nozzle is not filled with the coating liquid. Therefore, the discharge amount of the coating liquid from the nozzle is reduced in a certain period after the scanning direction of the nozzle is reversed. As a result, the thickness at both ends in the scanning direction of the film is reduced.

  Here, in the present embodiment, in the coating process, in the region where the deposition target member 10 is not provided, the scanning speed along the y-axis direction of the nozzle 11 before the scanning direction of the nozzle 11 is reversed is the deposition speed. It is lower than the scanning speed along the y-axis direction of the nozzle in the area where the film member 10 is provided. For this reason, the scanning speed of the nozzle 11 when the scanning direction of the nozzle 11 is reversed is low. Therefore, when the scanning direction of the nozzle 11 is reversed, the inertial force applied to the coating liquid located inside the nozzle 11 is small. For this reason, excessive discharge of the coating liquid when the scanning direction of the nozzle 11 is reversed is suppressed. Therefore, the unevenness of the discharge amount of the coating liquid from the nozzle 11 is small. As a result, a film in which uneven thickness is suppressed can be obtained.

  From the viewpoint of suppressing the film thickness unevenness, the second speed is preferably 1/4 times or less, more preferably 1/5 times or less of the first speed. However, if the second speed is too low, there is a problem that the film formation efficiency is reduced, and the coating liquid in the nozzle 11 is reduced when the scanning speed of the nozzle 11 is reduced from the first speed to the second speed. The added inertial force may become too large. Therefore, the second speed is preferably 1/10 times or more of the first speed, and more preferably 1/8 times or more.

  From the viewpoint of further suppressing film thickness unevenness, as shown in FIG. 5, in the coating process, the nozzle 11 may be temporarily stopped before the scanning direction of the nozzle 11 is reversed. In this case, even if the coating liquid is excessively discharged from the nozzle 11, the discharge amount from the nozzle 11 is stabilized before the nozzle 11 reaches the region where the film forming member 10 is provided again. Cheap. Therefore, the coating amount of the coating liquid can be made more uniform. Therefore, the uneven thickness of the film can be further suppressed. The time for which the nozzle 11 is temporarily stopped is preferably 0.3 seconds or more, and more preferably 0.5 seconds or more. However, if the stop time of the nozzle 11 is too long, the film formation efficiency may be too low. Accordingly, the time for which the nozzle 11 is temporarily stopped is preferably 1 second or less, and more preferably 0.8 seconds or less.

  From the viewpoint of further suppressing the film thickness unevenness, as shown in FIGS. 6 and 7, the nozzle before the scanning direction of the nozzle 11 is reversed in the region where the film forming member 10 is not provided in the coating process. The scanning speed along the y-axis direction of 11 is lower than the scanning speed along the y-axis direction of the nozzle in the area where the film forming member 10 is provided, and in the area where the film forming member 10 is not provided. Even if the scanning speed along the y-axis direction of the nozzle 11 after the scanning direction of the nozzle 11 is reversed is lower than the scanning speed along the y-axis direction of the nozzle in the region where the film forming member 10 is provided. Good. Also in this case, even when excessive discharge of the coating liquid occurs from the nozzle 11, the discharge amount from the nozzle 11 is stabilized before the nozzle 11 reaches the region where the film forming member 10 is provided again. Cheap. Therefore, as in the case shown in FIG. 5, the thickness unevenness of the film can be further suppressed. The scanning speed along the y-axis direction of the nozzle 11 before the scanning direction of the nozzle 11 is reversed in the region where the film forming member 10 is not provided, and the nozzle in the region where the film forming member 10 is not provided Although the scanning speed along the y-axis direction of the nozzle 11 after the 11 scanning directions are reversed may be different, it is preferable that they are substantially the same. That is, after scanning the film forming member 10 at the first speed, the nozzle 11 is scanned at the second speed, the scanning direction is reversed, and then the film forming member 10 is scanned until reaching the film forming member 10. It is preferable to scan the nozzle 11 at a speed of 2 and then scan the nozzle 11 at a first speed after reaching the film forming member 10.

  In the example shown in FIG. 7, the nozzle 11 is temporarily stopped when the nozzle 11 is reversed in the scanning direction. Therefore, the uneven thickness of the film can be more effectively suppressed.

  Further, as shown in FIG. 8, the nozzle 11 may be scanned at a constant speed, and the nozzle 11 may be temporarily stopped when the nozzle 11 is reversed. Even in this case, the flow rate of the coating liquid from the nozzle 11 tends to be stabilized before the nozzle 11 reaches the film forming member 10 again. Therefore, uneven thickness of the film can be suppressed.

  In the example shown in FIGS. 4, 5, 6, and 7, the example in which the nozzle 11 is operated at a constant speed in the region where the deposition target member 10 is not provided has been described. However, the present invention is not limited to this configuration. For example, as shown in FIG. 9, in a region where the film forming member 10 is not provided, the scanning speed before reversing the scanning direction of the nozzle 11 is set in the y-axis direction of the nozzle in the region where the film forming member 10 is provided. The scanning speed may be gradually decreased from the scanning speed along the scanning direction, or the scanning speed after reversing the scanning direction of the nozzle 11 may be gradually increased to the scanning speed along the y-axis direction of the nozzle in the region where the film forming member 10 is provided. By doing in this way, the inertia force added to the coating liquid in the nozzle 11 can be made smaller. Therefore, the uneven thickness of the film can be more effectively suppressed.

  Similarly, the scanning speed of the nozzle 11 may be changed a plurality of times before and after the scanning direction of the nozzle 11 is reversed.

  As shown in FIG. 10, before the nozzle 11 is reversed in the scanning direction, the scanning speed of the nozzle 11 is made constant, and after the nozzle 11 is reversed in the scanning direction, before the nozzle 11 reaches the film forming member 10. The scanning speed of the nozzle 11 may be lower than the scanning speed of the nozzle 11 on the film forming member 10. Even in this case, the flow rate of the coating liquid from the nozzle 11 tends to be stabilized before the nozzle 11 reaches the film forming member 10 again. Therefore, uneven thickness of the film can be suppressed.

DESCRIPTION OF SYMBOLS 1 ... Film manufacturing apparatus 10 ... Film-forming member 11 ... Nozzle 12 ... Coating liquid supply mechanism 13 ... Moving mechanism 14 ... Scanning mechanism 15 ... Control part

Claims (9)

A moving step of moving the film forming member relative to the nozzle along the first direction;
By reciprocatingly scanning the nozzle so as to cross the film forming member along a second direction inclined with respect to the first direction, the coating liquid is applied onto the film forming member from the nozzle. Supplying coating process;
With
A method for producing a film on the film-forming member by alternately or simultaneously performing the moving step and the applying step,
In the coating step, in a region where the film forming member is not provided, the scanning speed along the second direction of the nozzle and the scanning direction of the nozzle are reversed before the nozzle scanning direction is reversed. At least one of the subsequent scanning speeds of the nozzles along the second direction is lower than the scanning speed of the nozzles along the second direction in the region where the film forming member is provided. A method for manufacturing a film, wherein the nozzle is scanned as described above.   In the coating step, in the region where the film forming member is not provided, the scanning speed along the second direction of the nozzle before the nozzle scanning direction is reversed is provided by the film forming member. The film manufacturing method according to claim 1, wherein the nozzle is scanned so as to be lower than a scanning speed along the second direction of the nozzle in a defined region.   The method for producing a film according to claim 1 or 2, wherein, in the coating step, the nozzle is temporarily stopped when the scanning direction of the nozzle is reversed. A moving step of moving the film forming member relative to the nozzle along the first direction;
By reciprocatingly scanning the nozzle so as to cross the film forming member along a second direction inclined with respect to the first direction, the coating liquid is applied onto the film forming member from the nozzle. Supplying coating process;
With
A method for producing a film on the film-forming member by alternately or simultaneously performing the moving step and the applying step,
In the coating process, the nozzle is temporarily stopped when the scanning direction of the nozzle is reversed.   5. The film manufacturing method according to claim 1, wherein the nozzle atomizes the coating liquid and supplies the atomized coating liquid onto the film forming member. A nozzle for supplying a coating solution onto the film forming member;
A moving mechanism for moving the film forming member relative to the nozzle along the first direction;
A scanning mechanism for reciprocally scanning the nozzle so as to cross the film-forming member along a second direction inclined with respect to the first direction;
A control unit for controlling the scanning mechanism;
With
The control unit reverses the scanning speed along the second direction of the nozzle and the scanning direction of the nozzle before the scanning direction of the nozzle is reversed in an area where the deposition target member is not provided. At least one of the subsequent scanning speeds of the nozzles along the second direction is lower than the scanning speed of the nozzles along the second direction in the region where the film forming member is provided. In this way, the film manufacturing apparatus causes the scanning mechanism to scan the nozzle.   The film manufacturing apparatus according to claim 6, wherein the control unit temporarily stops the nozzle when the scanning direction of the nozzle is reversed. A nozzle for supplying a coating solution onto the film forming member;
A moving mechanism for moving the film forming member relative to the nozzle along the first direction;
A scanning mechanism for reciprocally scanning the nozzle so as to cross the film-forming member along a second direction inclined with respect to the first direction;
A control unit for controlling the scanning mechanism;
With
The control unit causes the scanning mechanism to temporarily stop the nozzle when the scanning direction of the nozzle is reversed.   9. The film manufacturing apparatus according to claim 6, wherein the nozzle atomizes the coating liquid and supplies the atomized coating liquid onto the film forming member.

Images