US5814368A - Method of spreading particles and spreading apparatus - Google Patents

Method of spreading particles and spreading apparatus Download PDF

Info

Publication number
US5814368A
US5814368A US08/806,637 US80663797A US5814368A US 5814368 A US5814368 A US 5814368A US 80663797 A US80663797 A US 80663797A US 5814368 A US5814368 A US 5814368A
Authority
US
United States
Prior art keywords
spreading
substrate
nozzle
trace
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US08/806,637
Inventor
Yuka Yamada
Ikuo Hiruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Assigned to KABUSHIKI KAISHA TOSHIBA reassignment KABUSHIKI KAISHA TOSHIBA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIRUTA, IKUO, YAMADA, YUKA
Priority to US09/076,740 priority Critical patent/US6024798A/en
Application granted granted Critical
Publication of US5814368A publication Critical patent/US5814368A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0463Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length
    • B05B13/0468Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length with reciprocating or oscillating spray heads
    • B05B13/0473Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0463Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length
    • B05B13/0468Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length with reciprocating or oscillating spray heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/002Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means comprising means for neutralising the spray of charged droplets or particules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/12Applying particulate materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/004Filling molds with powder
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13392Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08Plant for applying liquids or other fluent materials to objects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • the present invention relates to a method of spreading particles between two substrates of a liquid crystal display panel such that the particles serve as spacers for controlling the distance between the substrates.
  • a liquid crystal display panel is constructed in a manner in which two substrates are arranged so as to face each other and liquid crystal is enclosed between these substrates. It is essential to both high performance and high display quality to maintain a uniform distance between the two opposite substrates. Specifically, it is necessary to maintain the distance between the substrates at a predetermined value in order to achieve high performance of the liquid crystal display element. It is also necessary to keep the distance between the substrates uniform over the entire areas of the substrates in order to further achieve high display quality.
  • Japanese Patent Application KOKAI Publication No. 6-3679 discloses an apparatus for spreading spacers comprising a swingable spreading nozzle for spreading spacers and a movement mechanism for relatively moving the spreading nozzle and a substrate in the X- and Y-directions in a horizontal plane.
  • spacers are spread onto the substrate from the nozzle while relatively moving the spreading nozzle and the substrate such that an extended line of the center axis of the spreading nozzle draws a saw-tooth-like zigzag trace on the substrate.
  • the distance between parts of the trace is smaller at each folded portion so that the spread areas of particles on the substrate are overlapped at the folded portions of the trace.
  • the amount of the spacers thus supplied is larger and the spread density is higher than in the other areas.
  • the spread density is increased to 150 to 170 particles/mm 2 in the overlapped areas. Therefore, the spread density of the spacers on the substrate is not uniform so that it is difficult to maintain a uniform distance between two substrates.
  • the trace of spread particles means the trace of movement of the center of distribution of spread particles, i.e., the trace of a cross point between an extended line of the center axis of the spreading nozzle for spreading particles and the surface of the substrate.
  • the swing angle of the spreading nozzle may be increased so as to make folded portions of the trace be positioned outside the substrate.
  • the amount of spacers used will then be increased and the time required for spreading will be elongated.
  • the spacers are electrically charged by friction caused as the spacers transferred through a convey path with positive or negative electric charges. This kind of charging of the spacers may be preferable in view of preventing the spacers from being coagulated. If the spacers thus electrically charged are spread onto the substrate, a number of lines such as scanning lines, signal lines, and a short ring formed on the substrate are also electrically charged to a potential equal to the spacers.
  • the substrate is not uniformly charged over its entire region, but only several particular lines or the likes are charged.
  • particular lines or the like on that region of the substrate where spacers are not yet spread are charged to a potential equal to the potential of the spacers, and those lines or the like repulses spacers which are spread later on that region. Therefore, the spread density of the spacers on such a region of the substrate is decreased abnormally so that non-uniformity occurs.
  • the present invention has been made in view of the above circumstances, and its object is to provide a method of spreading particles capable of uniformly spreading particles serving as spacers onto a substrate.
  • a method for spreading spacing particles on a surface of a substrate used to form a liquid crystal display comprises the steps of relatively moving the substrate and a spreading nozzle adapted to spread the spacing particles on the substrate with respect to one another as the spreading nozzle spreads the spacing particles such that the spacing particles spread from the spreading nozzle (draw a zigzag) to form a predetermined trace on the surface of the substrate. Electric charges on the substrate are discharged while relatively moving the substrate and the spreading nozzle such that the spreading nozzle spreads the spacing particles on a discharged portion of the surface of the substrate.
  • FIGS. 1 to 3 show a spreading apparatus according to an embodiment of the present invention, in which:
  • FIG. 1 is a schematic view showing the entire spreading apparatus
  • FIG. 2 is a perspective view showing a movable table, a discharging bar, and a spreading nozzle of the apparatus, and
  • FIG. 3 is a side view showing a positional relationship between the discharging bar and the spreading nozzle
  • FIG. 4 is a perspective view of a glass substrate used for manufacturing array substrates of liquid crystal display panels
  • FIG. 5 is an enlarged plan view showing a part of conductive pattern formed on the glass substrate.
  • FIG. 6 is a plan view schematically showing a trace of the spreading nozzle in relation to a substrate.
  • FIGS. 1 to 3 show a spreading apparatus for spreading particles serving as spacers onto a glass substrate 10 used for manufacturing liquid crystal display panels.
  • the glass substrate 10 formed in a rectangular shape and has a size corresponding to six array substrates used for liquid crystal display panels.
  • Six conductive patterns 40 for the array substrates are formed on the surface of the glass substrate 10 with predetermined intervals.
  • the spreading apparatus includes a container 12 which defines a spreading space for spreading spacers, partitioned from the outside, and a support base 14 provided in the container 12.
  • a movable table 16 for mounting the glass substrate 10 is arranged on the support base 14, such that the table is movable in a X-direction parallel to a longitudinal side of the glass substrate 10.
  • the movable table 16 is moved at a predetermined speed by means of a moving mechanism 18 having a motor (not shown), a transmission mechanism and the like.
  • the movable table 16 is connected to the ground of the spreading apparatus.
  • a discharging bar 20 extending in a Y-direction perpendicular to the X-direction is provided on the support base 14 such that the bar 20 is located over the movable table 16 and faces parallel with the surface of the glass substrate 10 on the table 16.
  • the movable table 16, the moving mechanism 18, and the drive mechanism 24 constitute a moving means in the present invention.
  • the spreading nozzle 22 is connected through a feed tube 26 to a feed device 28 for supplying particles.
  • the feed device 28 comprises a spacer storage portion, a compressor also not shown, a shut-off valve, and the like (not shown).
  • the spacer storage portion contains spacers consisting of resin balls each having a diameter of about 5 ⁇ m.
  • the compressor supplies the spacers from the spacer storage portion to the spreading nozzle 22 through the feed tube 26 by air pressure and spreads the spacers from the spreading nozzle 20.
  • a blower 30 for exhausting air in the container 12 is connected to the bottom portion of the container 12.
  • Each of the moving mechanism 28, the discharging bar 20, the nozzle drive mechanism 24, and the feed device 28 is connected to a control section 32 serving as control means.
  • the operation of these components is controlled by the control section 32.
  • the nozzle drive mechanism 24 is capable of changing the swing angle and the angle speed of the spreading nozzle 22 under the control by the control section 32.
  • the feed device 28 is capable of arbitrarily setting the supply amount of the spacers per unit time, also under the control by the control section 32.
  • a glass substrate 10 is placed on a movable table 16, with the lengthwise axis or the longitudinal sides of the glass substrate 10 oriented in the X-direction.
  • the glass substrate 10 is conducted to the ground of the spreading apparatus through the movable table 16.
  • the control section 32 the movable table 16 is moved in the X-direction at a predetermined constant speed by the moving mechanism 18, and the spreading nozzle 22 is made swing in the Y-direction at a predetermined angle speed.
  • the glass substrate 10 on the movable table 16 moves in the X-direction from one end side of the substrate 10, passing below the discharging bar 20 and below the spreading nozzle 22.
  • the glass substrate 10 and the spreading nozzle 22 move in relation to each other in the X- and Y-directions in a horizontal plane. Therefore, as shown in FIGS. 2 and 6, an extended line of the center axis of the spreading nozzle 22 moves drawing a saw-tooth-like zigzag trace A on the surface of the glass substrate 10.
  • the swing angle of the spreading nozzle 22 is set such that each of folded portions B of the trace A substantially corresponds with either of both side edges of the glass substrate 10.
  • the discharging bar 20 is energized under the control of the control section 32, and simultaneously, the feed device 28 and the blower 30 are driven.
  • the region of the glass substrate 10 which has faced the discharging bar 20 is sequentially discharged.
  • the spacers supplied from the spreading nozzle 22 are charged to a potential of about -5 to 10 kV by frictional charging or the like when they pass through the feed tube 26 and the spreading nozzle 22.
  • the conductive patterns 40 on the glass substrate 10 are charged to a potential by the supplied spacers when discharging is not performed.
  • the potential of each conductive pattern 40 is discharged to a potential of substantially zero which is substantially lower than the charge of the spacers.
  • the spacers are supplied to the spreading nozzle 22 through the feed tube 26 from the feed device 28 and are spread toward the surface of the glass substrate 10 from the spreading nozzle 22.
  • the spacers are spread with a predetermined width along the trace A of the spreading nozzle 22, onto that region of the glass substrate 10 which has been subjected to discharging by the discharging bar 20.
  • the control section 32 changes the spreading amount of the spacers in correspondence with the moving position of the spreading nozzle 22. Specifically, when the spreading nozzle 22 passes each of folded portions B of the trace A, e.g., when the spreading nozzle 22 passes the region outside each of circle marks in FIG. 6, the control section 32 reduces the supply amount of the spacers from the feed device 28 to a predetermined amount. Supposing that the spacer supply amount which will achieve a normal spread density of 150 particles/mm 2 is expressed as an index of 100, the spacer supply amount is reduced to an index of 50 to 70 when the nozzle 22 passes through each of the folded portions B.
  • the angle speed of the spreading nozzle 22 is 15 rpm, and the swing angle is 60 degrees.
  • the spreading amount of the spacers spread from the spreading nozzle 22 is decreased at the folded portions of the trace, i.e., at the portions where the distance between parts of the trace including a folded portion is small. Therefore, the spreading density in the region where the distance between those parts of the trace is small is not higher than the other parts of the trace, thereby spreading the spacers with a uniform density over the entire surface of the glass substrate 10.
  • the spacers are spread while discharging the glass substrate 10 by means of the discharging bar 20, the potential of the conductive patterns 40 in the region which is continuous to the spread region on the glass substrate and in which the spacers are not yet spread, is prevented from being charged to a potential equal to the spacers to be spread on the glass substrate. Therefore, spacers can be smoothly spread onto the region which has been discharged to a potential different to the potential of the spacers, i.e., discharged to the ground, so that the spread spacers are prevented from being repelled and scattered by the conductive patterns 40. As a result, it is possible to prevent non-uniform spreading of spacers, and spacers can be spread at a uniform spread density over the entire area of the glass substrate 10.
  • spacers are uniformly spread on an glass substrate.
  • this glass substrate it is possible to provide liquid crystal display panels with high quality in which the distance between two substrates is uniform over the entire substrates.
  • the above-mentioned embodiment is arranged such that the supply amount of the spacers from the spreading nozzle is reduced when the trace of the spreading nozzle passes each of folded portions of the trace.
  • the supply amount of the spacers from the spreading nozzle may be continuously maintained at a constant value, and the moving speed or the angle speed of the spreading nozzle may be increased by about 15% when the spreading nozzle passes each of the folded portions of the trace.
  • the spread amount of the spacers per unit area of the glass substrate can be reduced at each of the folded portions of the trace, and the spacers can also be uniformly spread as in the embodiment described above.
  • the discharging means may be a soft X-ray ionizer rather than a discharging bar.
  • the soft X-ray ionizer is capable of easily controlling the discharging area of the glass substrate, by shielding X-rays at portions where X-rays are not necessary. Besides, the air flow is not disturbed when the glass substrate is discharged by the soft X-ray ionizer. Therefore, regions of the glass substrate where spacers have yet to be spread can be subjected to discharging without influencing the on going spreading of the spacers.
  • spacer particles can be uniformly spread onto a substrate so that it is possible to provide a spreading method and a spreading apparatus which are capable of easily manufacturing a liquid crystal display element with high display quality and high reliability.

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention is a method for spreading spacing particles on a surface of a substrate used to form a liquid crystal display panel. The method comprises the steps of relatively moving the substrate and a spreading nozzle with respect to one another as the spreading nozzle spread the spacing particles such that the spacing particles spread from the spreading nozzle trace a predetermined trace on the surface of the substrate. Electric charge on the substrate is discharged while relatively moving the substrate and the spreading nozzle such that the spreading nozzle spreads the spacing particles on a discharged portion of the surface of the substrate.

Description

BACKGROUND OF THE INVENTION
The present invention relates to a method of spreading particles between two substrates of a liquid crystal display panel such that the particles serve as spacers for controlling the distance between the substrates.
In recent years, demands have arisen for a liquid crystal display panel with high performance qualities such as high contrast, a wide view angle, etc., and with high display enough quality to create a uniform display image over the entire display element without defects.
In general, a liquid crystal display panel is constructed in a manner in which two substrates are arranged so as to face each other and liquid crystal is enclosed between these substrates. It is essential to both high performance and high display quality to maintain a uniform distance between the two opposite substrates. Specifically, it is necessary to maintain the distance between the substrates at a predetermined value in order to achieve high performance of the liquid crystal display element. It is also necessary to keep the distance between the substrates uniform over the entire areas of the substrates in order to further achieve high display quality.
Hence, in order to obtain a uniform substrate distance over the entire areas of the substrates, a method has been adopted in which spacers consisting of particles each having a desired diameter are uniformly spread on the surface of one of the substrates and the other substrate is thereafter adhered thereon.
For example, Japanese Patent Application KOKAI Publication No. 6-3679 discloses an apparatus for spreading spacers comprising a swingable spreading nozzle for spreading spacers and a movement mechanism for relatively moving the spreading nozzle and a substrate in the X- and Y-directions in a horizontal plane. In this apparatus, spacers are spread onto the substrate from the nozzle while relatively moving the spreading nozzle and the substrate such that an extended line of the center axis of the spreading nozzle draws a saw-tooth-like zigzag trace on the substrate.
However, according to such a conventional spreading apparatus and a method thereof as described above, the distance between parts of the trace is smaller at each folded portion so that the spread areas of particles on the substrate are overlapped at the folded portions of the trace. In these overlapped areas, the amount of the spacers thus supplied is larger and the spread density is higher than in the other areas. For example, in case where spacers each having a diameter of about 5 μm is spread at a spread density of about 150 particles/mm2, the spread density is increased to 150 to 170 particles/mm2 in the overlapped areas. Therefore, the spread density of the spacers on the substrate is not uniform so that it is difficult to maintain a uniform distance between two substrates.
Note that the trace of spread particles means the trace of movement of the center of distribution of spread particles, i.e., the trace of a cross point between an extended line of the center axis of the spreading nozzle for spreading particles and the surface of the substrate.
In order to prevent the spread density from being not uniform, the swing angle of the spreading nozzle may be increased so as to make folded portions of the trace be positioned outside the substrate. However, the amount of spacers used will then be increased and the time required for spreading will be elongated.
Furthermore, in a method of spreading spacers through a spreading nozzle, the spacers are electrically charged by friction caused as the spacers transferred through a convey path with positive or negative electric charges. This kind of charging of the spacers may be preferable in view of preventing the spacers from being coagulated. If the spacers thus electrically charged are spread onto the substrate, a number of lines such as scanning lines, signal lines, and a short ring formed on the substrate are also electrically charged to a potential equal to the spacers.
However, since complicated electronic circuits are provided on the substrate of a liquid crystal panel, the substrate is not uniformly charged over its entire region, but only several particular lines or the likes are charged. In particular, when spacers are spread while moving the spreading nozzle so as to draw a certain trace, particular lines or the like on that region of the substrate where spacers are not yet spread are charged to a potential equal to the potential of the spacers, and those lines or the like repulses spacers which are spread later on that region. Therefore, the spread density of the spacers on such a region of the substrate is decreased abnormally so that non-uniformity occurs.
In addition, electric charges are gradually applied to the lines and the like of the substrate as spacers are gradually spread on the substrate. Thus, charging of the substrate leads to occurrence of defects such as electrostatic breakdown or the like of the electronic circuit and is therefore not desirable.
BRIEF SUMMARY OF THE INVENTION
The present invention has been made in view of the above circumstances, and its object is to provide a method of spreading particles capable of uniformly spreading particles serving as spacers onto a substrate.
In order to achieve the above object, a method is provided for spreading spacing particles on a surface of a substrate used to form a liquid crystal display. The method comprises the steps of relatively moving the substrate and a spreading nozzle adapted to spread the spacing particles on the substrate with respect to one another as the spreading nozzle spreads the spacing particles such that the spacing particles spread from the spreading nozzle (draw a zigzag) to form a predetermined trace on the surface of the substrate. Electric charges on the substrate are discharged while relatively moving the substrate and the spreading nozzle such that the spreading nozzle spreads the spacing particles on a discharged portion of the surface of the substrate.
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out in the appended claims.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate presently preferred embodiments of the invention and, together with the general description given above and the detailed description of the preferred embodiments given below, serve to explain the principles of the invention.
FIGS. 1 to 3 show a spreading apparatus according to an embodiment of the present invention, in which:
FIG. 1 is a schematic view showing the entire spreading apparatus,
FIG. 2 is a perspective view showing a movable table, a discharging bar, and a spreading nozzle of the apparatus, and
FIG. 3 is a side view showing a positional relationship between the discharging bar and the spreading nozzle;
FIG. 4 is a perspective view of a glass substrate used for manufacturing array substrates of liquid crystal display panels;
FIG. 5 is an enlarged plan view showing a part of conductive pattern formed on the glass substrate; and
FIG. 6 is a plan view schematically showing a trace of the spreading nozzle in relation to a substrate.
DETAILED DESCRIPTION OF THE INVENTION
In the following, an embodiment of the present invention will be specifically explained.
FIGS. 1 to 3 show a spreading apparatus for spreading particles serving as spacers onto a glass substrate 10 used for manufacturing liquid crystal display panels.
As shown in FIG. 4, the glass substrate 10 formed in a rectangular shape and has a size corresponding to six array substrates used for liquid crystal display panels. Six conductive patterns 40 for the array substrates are formed on the surface of the glass substrate 10 with predetermined intervals.
As shown in FIG. 5, each of the conductive pattern 40 includes a number of signal lines 42 and a number of scanning lines 44 which are arranged in matrix and serve as conductive lines. A pixel electrode 46 is arranged in each region enclosed by the signal and scanning lines 42 and 44 and is connected to these lines through a thin film transistor 45. Further, the conductive pattern 40 has a rectangular short ring 48 to which the signal and scanning lines 42 and 44 are connected. On the glass substrate 10, a sealing agent 50 is pasted so as to surround each of the conductive patterns 40.
As shown in FIGS. 1 to 3, the spreading apparatus includes a container 12 which defines a spreading space for spreading spacers, partitioned from the outside, and a support base 14 provided in the container 12. A movable table 16 for mounting the glass substrate 10 is arranged on the support base 14, such that the table is movable in a X-direction parallel to a longitudinal side of the glass substrate 10. The movable table 16 is moved at a predetermined speed by means of a moving mechanism 18 having a motor (not shown), a transmission mechanism and the like. The movable table 16 is connected to the ground of the spreading apparatus.
In addition, a discharging bar 20 extending in a Y-direction perpendicular to the X-direction is provided on the support base 14 such that the bar 20 is located over the movable table 16 and faces parallel with the surface of the glass substrate 10 on the table 16.
In the container 12, a swingable spreading nozzle 22 is provided above the movable table 16. The spreading nozzle 22 is driven to swing at a desired angle and an arbitrary angle speed in the Y-direction by a nozzle drive mechanism 24 provided on the container 12. Further, the spreading nozzle 22 is disposed to shift in the moving direction (or X-direction) of the movable table 16 with respect to the discharging bar 20. The distance d between the spreading nozzle 22 and the discharging bar 20 in the X-direction is set to be shorter than the length of the glass substrate 10 in the X-direction and to be also as short as possible without causing the discharging bar 20 to interfere with the spreading operation. Specifically, the spreading nozzle 22 and the discharging bar 20 are arranged such that both of the spreading nozzle 22 and the discharging bar 20 are at least temporarily opposed to the glass substrate 10 while the glass substrate 10 is moved in the X-direction by the movable table 16.
Note that the movable table 16, the moving mechanism 18, and the drive mechanism 24 constitute a moving means in the present invention.
The spreading nozzle 22 is connected through a feed tube 26 to a feed device 28 for supplying particles. The feed device 28 comprises a spacer storage portion, a compressor also not shown, a shut-off valve, and the like (not shown). The spacer storage portion contains spacers consisting of resin balls each having a diameter of about 5 μm. The compressor supplies the spacers from the spacer storage portion to the spreading nozzle 22 through the feed tube 26 by air pressure and spreads the spacers from the spreading nozzle 20. In addition, a blower 30 for exhausting air in the container 12 is connected to the bottom portion of the container 12.
Each of the moving mechanism 28, the discharging bar 20, the nozzle drive mechanism 24, and the feed device 28 is connected to a control section 32 serving as control means. The operation of these components is controlled by the control section 32. For example, the nozzle drive mechanism 24 is capable of changing the swing angle and the angle speed of the spreading nozzle 22 under the control by the control section 32. Further, the feed device 28 is capable of arbitrarily setting the supply amount of the spacers per unit time, also under the control by the control section 32.
Next will be explained a method of spreading spacers onto the surface of the array substrate 10 by means of the spreading apparatus constructed as described above.
At first, a glass substrate 10 is placed on a movable table 16, with the lengthwise axis or the longitudinal sides of the glass substrate 10 oriented in the X-direction. The glass substrate 10 is conducted to the ground of the spreading apparatus through the movable table 16. Subsequently, under the control by the control section 32, the movable table 16 is moved in the X-direction at a predetermined constant speed by the moving mechanism 18, and the spreading nozzle 22 is made swing in the Y-direction at a predetermined angle speed.
In this manner, the glass substrate 10 on the movable table 16 moves in the X-direction from one end side of the substrate 10, passing below the discharging bar 20 and below the spreading nozzle 22. The glass substrate 10 and the spreading nozzle 22 move in relation to each other in the X- and Y-directions in a horizontal plane. Therefore, as shown in FIGS. 2 and 6, an extended line of the center axis of the spreading nozzle 22 moves drawing a saw-tooth-like zigzag trace A on the surface of the glass substrate 10. Note that the swing angle of the spreading nozzle 22 is set such that each of folded portions B of the trace A substantially corresponds with either of both side edges of the glass substrate 10.
Meanwhile, in synchronization with driving of the nozzle drive mechanism 24 and the moving mechanism 18, the discharging bar 20 is energized under the control of the control section 32, and simultaneously, the feed device 28 and the blower 30 are driven.
In this manner, as the glass substrate 10 passes below the discharging bar 20, the region of the glass substrate 10 which has faced the discharging bar 20 is sequentially discharged. The spacers supplied from the spreading nozzle 22 are charged to a potential of about -5 to 10 kV by frictional charging or the like when they pass through the feed tube 26 and the spreading nozzle 22. Thus, the conductive patterns 40 on the glass substrate 10 are charged to a potential by the supplied spacers when discharging is not performed. By discharging the glass substrate 10 by means of the discharging bar 20, the potential of each conductive pattern 40 is discharged to a potential of substantially zero which is substantially lower than the charge of the spacers.
Further, the spacers are supplied to the spreading nozzle 22 through the feed tube 26 from the feed device 28 and are spread toward the surface of the glass substrate 10 from the spreading nozzle 22. Here, the spacers are spread with a predetermined width along the trace A of the spreading nozzle 22, onto that region of the glass substrate 10 which has been subjected to discharging by the discharging bar 20.
In addition, upon spreading the spacers, the control section 32 changes the spreading amount of the spacers in correspondence with the moving position of the spreading nozzle 22. Specifically, when the spreading nozzle 22 passes each of folded portions B of the trace A, e.g., when the spreading nozzle 22 passes the region outside each of circle marks in FIG. 6, the control section 32 reduces the supply amount of the spacers from the feed device 28 to a predetermined amount. Supposing that the spacer supply amount which will achieve a normal spread density of 150 particles/mm2 is expressed as an index of 100, the spacer supply amount is reduced to an index of 50 to 70 when the nozzle 22 passes through each of the folded portions B.
For example, when the size of the glass substrate 10 is set to 550×650 mm, the angle speed of the spreading nozzle 22 is 15 rpm, and the swing angle is 60 degrees.
According to the spreading apparatus and the spreading method as constructed above, during the steps of spreading spacers from the spreading nozzle 22 while relatively moving the nozzle with respect to the glass substrate 10 so as to draw the zigzag trace A on the surface of the glass substrate 10, the spreading amount of the spacers spread from the spreading nozzle 22 is decreased at the folded portions of the trace, i.e., at the portions where the distance between parts of the trace including a folded portion is small. Therefore, the spreading density in the region where the distance between those parts of the trace is small is not higher than the other parts of the trace, thereby spreading the spacers with a uniform density over the entire surface of the glass substrate 10.
In addition, it is not necessary to position folded portions B of the trace A outside the glass substrate 10, thereby reducing the amount of spacers consumed from to 1/2 to 2/3 in comparison with the amount of spacers consumed when the spacers are continuously spread at a constant rate. Thus, the present invention improves economical efficiency.
Further, since the spacers are spread while discharging the glass substrate 10 by means of the discharging bar 20, the potential of the conductive patterns 40 in the region which is continuous to the spread region on the glass substrate and in which the spacers are not yet spread, is prevented from being charged to a potential equal to the spacers to be spread on the glass substrate. Therefore, spacers can be smoothly spread onto the region which has been discharged to a potential different to the potential of the spacers, i.e., discharged to the ground, so that the spread spacers are prevented from being repelled and scattered by the conductive patterns 40. As a result, it is possible to prevent non-uniform spreading of spacers, and spacers can be spread at a uniform spread density over the entire area of the glass substrate 10.
In addition, since the glass substrate 10 charged by the spread spacers is immediately subjected to discharging by the discharging bar, electric charges are not stored in the glass substrate, thereby preventing switching elements and the like in the conductive patterns 40 from being electrostatically broken down.
From the above, according to the spreading apparatus and the spreading method of the present embodiment, spacers are uniformly spread on an glass substrate. With use of this glass substrate, it is possible to provide liquid crystal display panels with high quality in which the distance between two substrates is uniform over the entire substrates.
Note that the present invention is not limited to the embodiment as described above, but can be variously modified within the scope of the invention.
For example, the above-mentioned embodiment is arranged such that the supply amount of the spacers from the spreading nozzle is reduced when the trace of the spreading nozzle passes each of folded portions of the trace. However, the supply amount of the spacers from the spreading nozzle may be continuously maintained at a constant value, and the moving speed or the angle speed of the spreading nozzle may be increased by about 15% when the spreading nozzle passes each of the folded portions of the trace. In this case, the spread amount of the spacers per unit area of the glass substrate can be reduced at each of the folded portions of the trace, and the spacers can also be uniformly spread as in the embodiment described above.
Further, the discharging means may be a soft X-ray ionizer rather than a discharging bar. In this case, the soft X-ray ionizer is capable of easily controlling the discharging area of the glass substrate, by shielding X-rays at portions where X-rays are not necessary. Besides, the air flow is not disturbed when the glass substrate is discharged by the soft X-ray ionizer. Therefore, regions of the glass substrate where spacers have yet to be spread can be subjected to discharging without influencing the on going spreading of the spacers.
As has been specified above, according to the present invention, spacer particles can be uniformly spread onto a substrate so that it is possible to provide a spreading method and a spreading apparatus which are capable of easily manufacturing a liquid crystal display element with high display quality and high reliability.
Additional advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described herein. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

Claims (8)

We claim:
1. A method of spreading spacing particles on a surface of a substrate used to form a liquid crystal display panel, the method comprising the steps of:
relatively moving said substrate and a spreading nozzle adapted to spread said spacing particles on said substrate with respect to one another as said spreading nozzle spreads said spacing particles such that said spacing particles spread from said spreading nozzle form a predetermined trace on said surface of said substrate; and
discharging electric charge on said substrate while relatively moving said substrate and said spreading nozzle with respect to one another such that said spreading nozzle spreads said spacing particles on a discharged portion of said surface of said substrate.
2. A method of spreading particles according to claim 1, wherein said spreading nozzle spreads said spreading particles at a spreading rate which is controlled in relation to a relative position of said substrate with respect to said spreading nozzle.
3. A method of spreading particles according to claim 1, wherein said substrate and said spreading nozzle are relatively moved with respect to one another at a relative moving speed which is controlled in relation to a relative position of said substrate with respect to said spreading nozzle.
4. A method of spreading particles according to claim 1, wherein folded portions of said trace comprise two segments of said trace intersecting at an angle and said spreading nozzle spreads said spacing particles at a spreading rate, said spreading rate being reduced when said spreading nozzle is spreading said spacing particles at each of the folded portions of said trace.
5. A method of spreading particles according to claim 1 wherein said predetermined trace is a zigzag trace.
6. A method of spreading particles according to claim 4 wherein said predetermined trace is a zigzag trace.
7. A method of spreading particles according to claim 5, wherein said surface of said substrate has a pair of opposing side edges and folded portions of the zigzag trace are located adjacent said side edges.
8. A method for spreading spacing particles according to claim 1 wherein said discharging step includes relatively moving said substrate and a discharging device with respect to one another in a direction substantially parallel with a side edge of said substrate.
US08/806,637 1996-02-26 1997-02-26 Method of spreading particles and spreading apparatus Expired - Fee Related US5814368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US09/076,740 US6024798A (en) 1996-02-26 1998-05-13 Method of spreading particles and spreading apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8-038117 1996-02-26
JP3811796 1996-02-26

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/076,740 Continuation US6024798A (en) 1996-02-26 1998-05-13 Method of spreading particles and spreading apparatus

Publications (1)

Publication Number Publication Date
US5814368A true US5814368A (en) 1998-09-29

Family

ID=12516532

Family Applications (2)

Application Number Title Priority Date Filing Date
US08/806,637 Expired - Fee Related US5814368A (en) 1996-02-26 1997-02-26 Method of spreading particles and spreading apparatus
US09/076,740 Expired - Fee Related US6024798A (en) 1996-02-26 1998-05-13 Method of spreading particles and spreading apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
US09/076,740 Expired - Fee Related US6024798A (en) 1996-02-26 1998-05-13 Method of spreading particles and spreading apparatus

Country Status (2)

Country Link
US (2) US5814368A (en)
KR (1) KR100257942B1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6024798A (en) * 1996-02-26 2000-02-15 Kabushiki Kaisha Toshiba Method of spreading particles and spreading apparatus
US6190455B1 (en) * 1998-01-27 2001-02-20 Nisshin Flour Milling Co., Ltd. Finely-divided powder spray apparatus
FR2832652A1 (en) * 2001-11-29 2003-05-30 Atofina Procedure for covering object with plastics film layer by coating with polymer powder and melting in kiln
US6616761B2 (en) * 2000-08-14 2003-09-09 Nisshin Seifun Group Inc. Finely-divided powder spray apparatus
JP2014064966A (en) * 2012-09-25 2014-04-17 Nippon Electric Glass Co Ltd Film manufacturing method, and film manufacturing apparatus
US20160059249A1 (en) * 2014-08-26 2016-03-03 Tsi, Inc. Electrospray with soft x-ray neutralizer
CN105665169A (en) * 2016-03-23 2016-06-15 柳州一健科技有限公司 Spraying mechanism for manufacturing liquid crystal display panel films
WO2020086918A1 (en) * 2018-10-24 2020-04-30 Daniel Shafer Microscale chemical reactors
US11378728B2 (en) * 2016-06-30 2022-07-05 Tokyo Electron Limited Coating processing apparatus, coating processing method, and storage medium

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100652211B1 (en) * 2001-11-24 2006-11-30 엘지.필립스 엘시디 주식회사 Spacer distributing apparatus for fabricating liquid crystal display device
JP3922177B2 (en) * 2002-02-12 2007-05-30 セイコーエプソン株式会社 Film forming method, film forming apparatus, droplet discharge apparatus, color filter manufacturing method, display apparatus manufacturing method
KR20070019428A (en) * 2005-08-12 2007-02-15 에스케이 주식회사 Desulfurizing agent for removing organic sulfides, method of preparing thereof and method for removing organic sulfur compounds using the same
CN102266833A (en) * 2011-06-29 2011-12-07 吴江市金晟工艺制品有限责任公司 Atomizing device
CN204331231U (en) 2014-12-30 2015-05-13 日东电工株式会社 The neutralizer of liquid crystal panel

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3932682A (en) * 1970-06-04 1976-01-13 Celanese Corporation Air permeable waterproof products having fabric-like aesthetic properties and methods for making the same
US5110632A (en) * 1990-08-15 1992-05-05 Toyota Jidosha Kabushiki Kaisha Reciprocating painting method
JPH063679A (en) * 1992-06-24 1994-01-14 Nisshin Flour Milling Co Ltd Method and device for scattering pulverized substance
US5460653A (en) * 1990-06-28 1995-10-24 Nec Corporation Spray type flux applying device
US5513026A (en) * 1993-01-18 1996-04-30 Ricoh Company, Ltd. Method of producing a liquid crystal display with a spacer
US5588996A (en) * 1994-04-01 1996-12-31 Argus International Apparatus for spray coating flat surfaces
US5614254A (en) * 1991-11-01 1997-03-25 Nisshin Flour Milling Co., Ltd. Method of spraying powder on a substrate
US5686978A (en) * 1995-05-13 1997-11-11 Samsung Electronics Co., Ltd. Method for manufacturing a polymer-dispersed liquid crystal display panel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3403658A (en) * 1965-12-27 1968-10-01 Owens Illinois Inc Apparatus for applying bonding material between implosion band and glass for cathoderay tubes
US3672927A (en) * 1969-10-29 1972-06-27 Ransburg Electro Coating Corp Electrostatic coating method
JPS6476031A (en) * 1987-09-17 1989-03-22 Seiko Instr & Electronics Spacer scattering method
JP3169969B2 (en) * 1990-12-26 2001-05-28 触媒化成工業株式会社 How to spray fine particles on a substrate
JPH04274412A (en) * 1991-03-01 1992-09-30 Hitachi Ltd Wiring board
US5839668A (en) * 1996-01-29 1998-11-24 Accudyne Corporation Micro-spacer metering apparatus employing multi-cavity disc and pneumatic ejection head for flat panel display assembly
KR100257942B1 (en) * 1996-02-26 2000-06-01 니시무로 타이죠 The method of manufacturing liquid crystal display

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3932682A (en) * 1970-06-04 1976-01-13 Celanese Corporation Air permeable waterproof products having fabric-like aesthetic properties and methods for making the same
US5460653A (en) * 1990-06-28 1995-10-24 Nec Corporation Spray type flux applying device
US5110632A (en) * 1990-08-15 1992-05-05 Toyota Jidosha Kabushiki Kaisha Reciprocating painting method
US5614254A (en) * 1991-11-01 1997-03-25 Nisshin Flour Milling Co., Ltd. Method of spraying powder on a substrate
JPH063679A (en) * 1992-06-24 1994-01-14 Nisshin Flour Milling Co Ltd Method and device for scattering pulverized substance
US5513026A (en) * 1993-01-18 1996-04-30 Ricoh Company, Ltd. Method of producing a liquid crystal display with a spacer
US5588996A (en) * 1994-04-01 1996-12-31 Argus International Apparatus for spray coating flat surfaces
US5686978A (en) * 1995-05-13 1997-11-11 Samsung Electronics Co., Ltd. Method for manufacturing a polymer-dispersed liquid crystal display panel

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6024798A (en) * 1996-02-26 2000-02-15 Kabushiki Kaisha Toshiba Method of spreading particles and spreading apparatus
US6190455B1 (en) * 1998-01-27 2001-02-20 Nisshin Flour Milling Co., Ltd. Finely-divided powder spray apparatus
US6616761B2 (en) * 2000-08-14 2003-09-09 Nisshin Seifun Group Inc. Finely-divided powder spray apparatus
FR2832652A1 (en) * 2001-11-29 2003-05-30 Atofina Procedure for covering object with plastics film layer by coating with polymer powder and melting in kiln
WO2003045583A2 (en) * 2001-11-29 2003-06-05 Atofina Method for coating an object with a film and equipment therefor
WO2003045583A3 (en) * 2001-11-29 2003-12-11 Atofina Method for coating an object with a film and equipment therefor
JP2014064966A (en) * 2012-09-25 2014-04-17 Nippon Electric Glass Co Ltd Film manufacturing method, and film manufacturing apparatus
US20160059249A1 (en) * 2014-08-26 2016-03-03 Tsi, Inc. Electrospray with soft x-ray neutralizer
US9925547B2 (en) * 2014-08-26 2018-03-27 Tsi, Incorporated Electrospray with soft X-ray neutralizer
CN105665169A (en) * 2016-03-23 2016-06-15 柳州一健科技有限公司 Spraying mechanism for manufacturing liquid crystal display panel films
US11378728B2 (en) * 2016-06-30 2022-07-05 Tokyo Electron Limited Coating processing apparatus, coating processing method, and storage medium
WO2020086918A1 (en) * 2018-10-24 2020-04-30 Daniel Shafer Microscale chemical reactors
US11684903B2 (en) 2018-10-24 2023-06-27 Daniel Shafer Microscale chemical reactors

Also Published As

Publication number Publication date
US6024798A (en) 2000-02-15
KR970062772A (en) 1997-09-12
KR100257942B1 (en) 2000-06-01

Similar Documents

Publication Publication Date Title
US5814368A (en) Method of spreading particles and spreading apparatus
US6673386B2 (en) Method and apparatus for forming pattern onto panel substrate
US20070204795A1 (en) System and methods for manufacturing a liquid crystal device
US7119026B2 (en) Basic material for patterning and patterning method
JPH06313870A (en) Substrate assembly device
US20050007530A1 (en) Method of discharging liquid drops of alignment film, method of manufacturing electro-optical panel, method of manufacturing electronic apparatus, program, device for discharging liquid drops of alignment film, electro-optical panel, and electronic apparatus
KR100220536B1 (en) Method for distributing spacer particles onto the substrate of a lcd element , a jig plate and distributing apparatus for distribution therewith
US20050242394A1 (en) Pattern formation substrate and method of pattern formation
US20040166760A1 (en) Apparatus, mold and method for producing substrate for plasma display panel
EP1059558A1 (en) Method of scattering fine particles, method of manufacturing liquid crystal display, apparatus for scattering fine particles, and liquid crystal display
JP2012000553A (en) Apparatus and method for inkjet coating
JP2006248627A (en) Method and device for conveying substrate
JPH09292620A (en) Method for spreading fine particle and device therefor
CN100386667C (en) DIstributor for liquid-crystal display board and distributing method therewith
US7372511B2 (en) Device for controlling spreading of liquid crystal and method for fabricating an LCD
KR100652211B1 (en) Spacer distributing apparatus for fabricating liquid crystal display device
JP2002331259A (en) Method and apparatus for forming pattern on panel substrate
KR100590705B1 (en) Paste dispenser for manufacturing flat type display
JP2000081846A (en) Image display device, its production and ink coating applicator
JP2008132471A (en) Method and apparatus for forming film pattern, method and apparatus for forming wiring pattern and manufacturing method of device
JP2000107671A (en) Method for making chemical coating film thickness uniform, device for enbodying this method and chemical coating applicator including this device
JP4184943B2 (en) Liquid crystal display panel dispensing method
KR100759009B1 (en) Finely-divided powder spray apparatus
JP3258501B2 (en) Image forming device
JPH063679A (en) Method and device for scattering pulverized substance

Legal Events

Date Code Title Description
AS Assignment

Owner name: KABUSHIKI KAISHA TOSHIBA, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YAMADA, YUKA;HIRUTA, IKUO;REEL/FRAME:008421/0411

Effective date: 19970220

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20100929