JP2014063954A - 半導体素子の製造方法、接着剤層付き半導体素子、及び半導体装置 - Google Patents
半導体素子の製造方法、接着剤層付き半導体素子、及び半導体装置 Download PDFInfo
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- JP2014063954A JP2014063954A JP2012209498A JP2012209498A JP2014063954A JP 2014063954 A JP2014063954 A JP 2014063954A JP 2012209498 A JP2012209498 A JP 2012209498A JP 2012209498 A JP2012209498 A JP 2012209498A JP 2014063954 A JP2014063954 A JP 2014063954A
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H—ELECTRICITY
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
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Abstract
【解決手段】この半導体素子の製造方法では、接着剤層3の形成から、半硬化、ダイシングテープ6の貼り付けまでを同一の支持台P上で行っている。これにより、接着剤組成物を塗布したときの厚みの均一性を好適に維持したまま半硬化を実施することができ、接着剤層3の接着強度を十分に確保できる。また、ダイシングテープ6のラミネートを同一の支持台上で行うことで、後の工程において、ダイシングテープ6が積層された状態で半導体ウェハ1の搬送等を行うことができ、半導体ウェハ1の破損や汚染を防止することができる。以上により、この製造方法を用いて製造される半導体装置15において、信頼性の向上が図られる。
【選択図】図3
Description
Claims (9)
- 半導体ウェハに接着剤組成物を塗布して接着剤層を形成する接着剤層形成工程と、
前記接着剤層に光を照射して半硬化させる半硬化工程と、
前記半導体ウェハにダイシングテープを貼り付けるダイシングテープ貼付工程と、を備え、
前記接着剤層形成工程、前記半硬化工程、及び前記ダイシングテープ貼付工程をいずれも同一の支持台上で実施することを特徴とする半導体素子の製造方法。 - 前記半導体ウェハと前記接着剤層とを所定のパターンでダイシングして接着剤層付き半導体素子を得るダイシング工程を更に備えることを特徴とする請求項1記載の半導体素子の製造方法。
- 前記支持台として、前記半導体ウェハの半径の80%〜120%の半径を有する円形の支持台を用いることを特徴とする請求項1又は2記載の半導体素子の製造方法。
- 前記接着剤層形成工程において、印刷法、スプレーコート法、円コート法、ジェットディスペンス法、インプリント法、及びインクジェット法のうち少なくとも一つの方法を用いて前記接着剤組成物を塗布することを特徴とする請求項1〜3のいずれか一項記載の半導体素子の製造方法。
- 前記接着剤組成物として、25℃における粘度が200mPa・S〜3000mPa・sのものを用いることを特徴とする請求項1〜4のいずれか一項記載の半導体素子の製造方法。
- 前記接着剤組成物として、分子量が1000以下の成分から構成されるものを用いることを特徴とする請求項1〜5のいずれか一項記載の半導体素子の製造方法。
- 前記接着剤組成物として、溶剤含有率が5質量%以下であるものを用いることを特徴とする請求項1〜6のいずれか一項記載の半導体素子の製造方法。
- 請求項1〜7のいずれか一項記載の半導体素子の製造方法を用いて作製されたことを特徴とする接着剤層付き半導体素子。
- 請求項8記載の接着剤層付き半導体素子を前記接着剤層を介して他の半導体素子又は支持部材に接合したことを特徴とする半導体装置。
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WO2016117605A1 (ja) * | 2015-01-22 | 2016-07-28 | 積水化学工業株式会社 | インクジェット用接着剤、半導体装置の製造方法及び電子部品 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2008153659A (ja) * | 2006-12-15 | 2008-07-03 | Samsung Electronics Co Ltd | 半導体パッケージ製造用のインラインシステム |
WO2011058998A1 (ja) * | 2009-11-13 | 2011-05-19 | 日立化成工業株式会社 | 液状半導体用接着剤組成物、半導体装置及び半導体装置の製造方法 |
WO2011058995A1 (ja) * | 2009-11-13 | 2011-05-19 | 日立化成工業株式会社 | 半導体装置、半導体装置の製造方法及び接着剤層付き半導体ウェハ |
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JP2008153659A (ja) * | 2006-12-15 | 2008-07-03 | Samsung Electronics Co Ltd | 半導体パッケージ製造用のインラインシステム |
WO2011058998A1 (ja) * | 2009-11-13 | 2011-05-19 | 日立化成工業株式会社 | 液状半導体用接着剤組成物、半導体装置及び半導体装置の製造方法 |
WO2011058995A1 (ja) * | 2009-11-13 | 2011-05-19 | 日立化成工業株式会社 | 半導体装置、半導体装置の製造方法及び接着剤層付き半導体ウェハ |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016117605A1 (ja) * | 2015-01-22 | 2016-07-28 | 積水化学工業株式会社 | インクジェット用接着剤、半導体装置の製造方法及び電子部品 |
WO2016117606A1 (ja) * | 2015-01-22 | 2016-07-28 | 積水化学工業株式会社 | インクジェット用接着剤、半導体装置の製造方法及び電子部品 |
JP5969726B1 (ja) * | 2015-01-22 | 2016-08-17 | 積水化学工業株式会社 | インクジェット用接着剤、半導体装置の製造方法及び電子部品 |
US10066118B2 (en) | 2015-01-22 | 2018-09-04 | Sekisui Chemical Co., Ltd. | Inkjet adhesive, manufacturing method for semiconductor device, and electronic component |
US10202519B2 (en) | 2015-01-22 | 2019-02-12 | Sekisui Chemical Co., Ltd. | Inkjet adhesive, manufacturing method for semiconductor device, and electronic component |
US10961411B2 (en) | 2015-01-22 | 2021-03-30 | Sekisui Chemical Co., Ltd. | Inkjet adhesive, manufacturing method for semiconductor device, and electronic component |
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