JP2014055893A5 - - Google Patents

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Publication number
JP2014055893A5
JP2014055893A5 JP2012201707A JP2012201707A JP2014055893A5 JP 2014055893 A5 JP2014055893 A5 JP 2014055893A5 JP 2012201707 A JP2012201707 A JP 2012201707A JP 2012201707 A JP2012201707 A JP 2012201707A JP 2014055893 A5 JP2014055893 A5 JP 2014055893A5
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JP
Japan
Prior art keywords
code
marks
scale
detection
absolute encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012201707A
Other languages
English (en)
Japanese (ja)
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JP2014055893A (ja
JP6099908B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2012201707A priority Critical patent/JP6099908B2/ja
Priority claimed from JP2012201707A external-priority patent/JP6099908B2/ja
Priority to EP13182730.5A priority patent/EP2708855B1/en
Priority to US14/022,625 priority patent/US9267820B2/en
Publication of JP2014055893A publication Critical patent/JP2014055893A/ja
Publication of JP2014055893A5 publication Critical patent/JP2014055893A5/ja
Application granted granted Critical
Publication of JP6099908B2 publication Critical patent/JP6099908B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012201707A 2012-09-13 2012-09-13 ２次元アブソリュートエンコーダおよびスケール Expired - Fee Related JP6099908B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012201707A JP6099908B2 (ja) 2012-09-13 2012-09-13 ２次元アブソリュートエンコーダおよびスケール
EP13182730.5A EP2708855B1 (en) 2012-09-13 2013-09-03 Two-dimensional absolute encoder and scale
US14/022,625 US9267820B2 (en) 2012-09-13 2013-09-10 Two-dimensional absolute encoder and scale with marks each having one of a plurality of different characteristic values

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012201707A JP6099908B2 (ja) 2012-09-13 2012-09-13 ２次元アブソリュートエンコーダおよびスケール

Publications (3)

Publication Number Publication Date
JP2014055893A JP2014055893A (ja) 2014-03-27
JP2014055893A5 true JP2014055893A5 (OSRAM) 2015-11-05
JP6099908B2 JP6099908B2 (ja) 2017-03-22

Family

ID=49080810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012201707A Expired - Fee Related JP6099908B2 (ja) 2012-09-13 2012-09-13 ２次元アブソリュートエンコーダおよびスケール

Country Status (3)

Country Link
US (1) US9267820B2 (OSRAM)
EP (1) EP2708855B1 (OSRAM)
JP (1) JP6099908B2 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6338360B2 (ja) * 2013-11-29 2018-06-06 キヤノン株式会社 アブソリュートエンコーダ、信号処理方法、およびプログラム
EP3766608A1 (en) 2014-11-14 2021-01-20 Nikon Corporation Shaping apparatus and shaping method
KR102283654B1 (ko) 2014-11-14 2021-07-29 가부시키가이샤 니콘 조형 장치 및 조형 방법
TW201741618A (zh) 2016-05-23 2017-12-01 國立交通大學 光學感測裝置
WO2018083510A1 (en) * 2016-11-02 2018-05-11 Precilabs Sa Detector device, positioning code and position detecting method
JP7014226B2 (ja) 2017-05-01 2022-02-01 株式会社ニコン 加工装置
EP3428751A1 (en) 2017-07-12 2019-01-16 Koninklijke Philips N.V. Measuring position of motion stage
TWI890326B (zh) * 2024-02-20 2025-07-11 台達電子工業股份有限公司 光學感測組件及編碼器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11232762A (ja) * 1998-02-13 1999-08-27 Sony Corp 記録／再生装置及び方法
JPH11248489A (ja) 1998-03-04 1999-09-17 Japan Em Kk 二次元アブソリュートエンコーダおよび二次元位置測定装置並びに二次元位置測定方法
US6937349B2 (en) 2003-05-02 2005-08-30 Mitutoyo Corporation Systems and methods for absolute positioning using repeated quasi-random pattern
GB0428165D0 (en) 2004-12-23 2005-01-26 Renishaw Plc Position measurement
US7230727B2 (en) * 2005-04-22 2007-06-12 Agilent Technologies, Inc. System for sensing an absolute position in two dimensions using a target pattern
US7381942B2 (en) * 2006-01-25 2008-06-03 Avago Technologies Ecbu Ip Pte Ltd Two-dimensional optical encoder with multiple code wheels
WO2010023442A2 (en) * 2008-08-26 2010-03-04 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
JP5779012B2 (ja) * 2011-06-24 2015-09-16 キヤノン株式会社 ２次元アブソリュートエンコーダ及びそのスケール

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