JP2014055882A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014055882A5 JP2014055882A5 JP2012201462A JP2012201462A JP2014055882A5 JP 2014055882 A5 JP2014055882 A5 JP 2014055882A5 JP 2012201462 A JP2012201462 A JP 2012201462A JP 2012201462 A JP2012201462 A JP 2012201462A JP 2014055882 A5 JP2014055882 A5 JP 2014055882A5
- Authority
- JP
- Japan
- Prior art keywords
- aberration
- image
- optical system
- estimation method
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004075 alteration Effects 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 17
- 238000011156 evaluation Methods 0.000 claims description 15
- 210000001747 pupil Anatomy 0.000 claims 9
- 238000005286 illumination Methods 0.000 claims 5
- 238000003384 imaging method Methods 0.000 claims 4
- 238000012887 quadratic function Methods 0.000 claims 2
- 238000005452 bending Methods 0.000 claims 1
- 238000004364 calculation method Methods 0.000 claims 1
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000004590 computer program Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012201462A JP6000773B2 (ja) | 2012-09-13 | 2012-09-13 | 収差推定方法、プログラムおよび撮像装置 |
| EP13183088.7A EP2708950A2 (en) | 2012-09-13 | 2013-09-05 | Aberration estimating method, program, and image-pickup apparatus |
| US14/021,245 US9228921B2 (en) | 2012-09-13 | 2013-09-09 | Aberration estimating method, program, and image-pickup apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012201462A JP6000773B2 (ja) | 2012-09-13 | 2012-09-13 | 収差推定方法、プログラムおよび撮像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014055882A JP2014055882A (ja) | 2014-03-27 |
| JP2014055882A5 true JP2014055882A5 (enExample) | 2015-11-05 |
| JP6000773B2 JP6000773B2 (ja) | 2016-10-05 |
Family
ID=49118357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012201462A Expired - Fee Related JP6000773B2 (ja) | 2012-09-13 | 2012-09-13 | 収差推定方法、プログラムおよび撮像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9228921B2 (enExample) |
| EP (1) | EP2708950A2 (enExample) |
| JP (1) | JP6000773B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198055B (zh) * | 2014-08-29 | 2018-10-23 | 浙江依诺威声信息技术有限公司 | 一种波面检测装置 |
| EP3736775B1 (en) | 2016-03-14 | 2023-10-11 | Imagination Technologies Limited | Methods and graphics processing units for determining differential data for rays of a ray bundle |
| CN107272323B (zh) * | 2017-07-21 | 2019-12-27 | 京东方科技集团股份有限公司 | 成像模组及其离焦测试装置与方法、光束选通控制方法 |
| JP7277101B2 (ja) * | 2018-10-11 | 2023-05-18 | キヤノン株式会社 | 収差推定方法、収差推定装置、プログラムおよび記憶媒体 |
| CN111899436B (zh) * | 2020-07-29 | 2023-04-28 | 北京市永康药业有限公司 | 一种智能化学药品存储柜 |
| DE102021205541B4 (de) | 2021-05-31 | 2025-06-26 | Carl Zeiss Smt Gmbh | Verfahren zur Bestimmung einer Abbildungsqualität eines optischen Systems bei Beleuchtung mit Beleuchtungslicht innerhalb einer zu vermessenden Eintrittspupille sowie Metrologiesystem |
| CN116399451B (zh) * | 2023-05-29 | 2023-08-11 | 长春理工大学 | 一种适用于平面对称光学系统的偏振像差简化获取方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3854231B2 (ja) * | 2002-02-12 | 2006-12-06 | 株式会社東芝 | 投影光学系の収差測定方法 |
| US7489828B2 (en) * | 2003-10-03 | 2009-02-10 | Media Cybernetics, Inc. | Methods, system, and program product for the detection and correction of spherical aberration |
| JP4668204B2 (ja) * | 2003-11-14 | 2011-04-13 | オフソニックス・インコーポレーテッド | 眼科用両眼波面測定システム |
| JP4126378B2 (ja) * | 2005-05-02 | 2008-07-30 | 国立大学法人東京工業大学 | 超解像処理の高速化方法 |
| EP1785714B1 (en) * | 2005-11-15 | 2017-02-22 | Olympus Corporation | Lens evaluation device |
| JP4937686B2 (ja) * | 2005-11-15 | 2012-05-23 | オリンパス株式会社 | レンズ評価装置 |
| US7531774B2 (en) * | 2006-06-05 | 2009-05-12 | General Dynamics Advanced Information Systems, Inc. | Measurement-diverse imaging and wavefront sensing with amplitude and phase estimation |
| JP4402145B2 (ja) * | 2007-10-03 | 2010-01-20 | キヤノン株式会社 | 算出方法、生成方法、プログラム、露光方法及び原版作成方法 |
| JP5406677B2 (ja) * | 2009-01-26 | 2014-02-05 | 株式会社日立ハイテクノロジーズ | 暗視野欠陥検査方法及び暗視野欠陥検査装置 |
| MX2013009389A (es) * | 2011-02-25 | 2014-03-27 | Univ Texas | Estimacion de error de enfoque en imagenes. |
| US9055248B2 (en) * | 2011-05-02 | 2015-06-09 | Sony Corporation | Infrared imaging system and method of operating |
-
2012
- 2012-09-13 JP JP2012201462A patent/JP6000773B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-05 EP EP13183088.7A patent/EP2708950A2/en not_active Withdrawn
- 2013-09-09 US US14/021,245 patent/US9228921B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102665579B1 (ko) | 오버레이 측정을 위한 지형 위상 제어 | |
| US9228921B2 (en) | Aberration estimating method, program, and image-pickup apparatus | |
| KR101892321B1 (ko) | 타겟 대상의 영역의 이미지를 생성하기 위한 이미지 데이터 제공 방법 및 장치 | |
| KR20090043535A (ko) | 물체의 이미지의 이미지면에서의 전자기장의 위상 및 진폭의 공간적 해상 결정 방법 및 장치 | |
| JP2008506505A5 (enExample) | ||
| CN105277133B (zh) | 表面倾斜或弯曲的透明材料的主体的高度图的计算方法 | |
| US10330913B2 (en) | Method and device for imaging an object | |
| CN104833311A (zh) | 用于结构照明显微术的图像序列和评估方法及系统 | |
| Sykora et al. | Instantaneous measurement Fizeau interferometer with high spatial resolution | |
| JP2020060469A (ja) | 収差推定方法、収差推定装置、プログラムおよび記憶媒体 | |
| CN119960176B (zh) | 显微物镜的优化方法及电子设备 | |
| CN115523839A (zh) | 一种基于观测目标的拼接子镜边缘误差高精度实时探测方法 | |
| JP2011129885A5 (enExample) | ||
| Shomali et al. | Application of irradiance transport equation in aspheric surface testing | |
| Besaga et al. | Digital holographic microscopy for sub-µm scale high aspect ratio structures in transparent materials | |
| KR20190100883A (ko) | 리소그래피 마스크를 측정하기 위한 이미징 광학 유닛의 이미징 수차 기여도를 결정하는 방법 | |
| CN113432731B (zh) | 一种光栅横向剪切干涉波前重建过程中的补偿方法 | |
| KR20190100876A (ko) | 리소그라피 마스크의 초점 위치를 결정하기 위한 방법 및 그 방법을 실행하기 위한 계측 시스템 | |
| Baer et al. | Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces | |
| KR102372739B1 (ko) | 라인 폭 변동에 대한 리소그라피 마스크의 구조-독립적 기여도를 결정하기 위한 방법 | |
| JP6418886B2 (ja) | スロープデータ処理方法、スロープデータ処理装置および計測装置 | |
| KR102763946B1 (ko) | 디지털 홀로그래피 재구성 처리를 위한 수치 위상 검출 자동 초점 방법 | |
| Sohn et al. | Köhler illumination for high-resolution optical metrology | |
| JP2020060470A (ja) | 収差推定方法、収差推定装置、プログラムおよび記録媒体 | |
| CN101893485A (zh) | 星点衍射波面相差的检测方法 |