JP2014050899A - Working apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a working apparatus having covering means which is inexpensive and hardly broken.SOLUTION: The working apparatus includes a chuck table, and working means having a spindle 21 working a workpiece W held on the holding surface 10a of the chuck table while supplying working liquid to the workpiece W. The spindle is movable in parallel in a direction parallel to the holding surface. The working means and the chuck table are surrounded by a box body 30 forming a working chamber 4. The box body includes a side wall 31, and an upper wall 32 having an insertion hole 33. The upper wall includes upper wall plates 341, 342 having an opening 36, and slide covers 351, 352 having the insertion hole and blocking the opening while slidably moving to the upper wall plates accompanied with the parallel movement of the spindle. The upper wall plates comprise a first upper wall plate 341 and a second upper wall plate 342 so as to be openable/closable. Connection means is disposed on each of the first slide cover and the second slide cover so that the connection state of the first slide cover and the second slide can be fixed.

Description

  The present invention relates to a processing device, and more particularly to a cover means for a processing chamber of a grinding device and a polishing device.

  For thinning wafers in the semiconductor device manufacturing process and optical device wafers in the optical device manufacturing process, there are many devices called grinders (grinders) that abut the grinding wheel or polishing pad while rotating the workpiece. It's being used. As a workpiece, it is often used for silicon or a substrate made of GaAs, sapphire, SiC or the like having a device formed on the surface.

  In such a grinding apparatus, grinding and polishing are performed while applying a grinding liquid (pure water, chemical liquid, or the like) to the workpiece held on the chuck table, and processing is performed while discharging a large amount of grinding waste. Finally, since grinding scraps are cleaned from the surface of the workpiece and completed, the processing area is covered by the cover means so that the grinding scrap does not leak from the processing area.

JP 2005-153090 A

  The cover means forms the processing chamber with the lower part of the spindle inserted, but with the diversification of processing, an apparatus for moving the spindle in the horizontal direction has been developed. In such an apparatus, in order to form a processing chamber, a cover by boot means as in Patent Document 1 has been made. However, the boot means is expensive, and there is a possibility that breakage or the like due to the adhered grinding scraps may occur. Further, the boot means must be removed when exchanging the wheel or polishing pad, and there is a problem that opening and closing is not easy.

  An object of the present invention is to provide a processing apparatus having cover means that is inexpensive and hardly damaged.

  Another object of the present invention is to provide a processing apparatus having cover means that allows easy access to the lower part of the spindle.

  The processing apparatus of the present invention includes a chuck table that sucks and holds a plate-like workpiece on a holding surface, and a spindle that performs processing while supplying a processing liquid to the workpiece held on the holding surface of the chuck table. A machining device comprising: a machining device comprising: a first feeding device that feeds the spindle in a machining feed direction orthogonal to the holding surface; and a second that moves the spindle parallel to the holding surface. The processing means and the chuck table are surrounded by a box that forms a processing chamber, and the box is inserted into the side wall and the lower part of the spindle. An upper wall having a hole, and an upper wall plate having an opening including at least a moving region of the spindle that is moved by the second feeding means; and an insertion hole having the insertion hole. With translation A slide cover that slides on the wall plate and shields the opening, and the slide cover has an insertion hole that is slightly larger than the diameter of the spindle, and the upper wall plate from the periphery of the insertion hole. And a guide member that covers the opening of the upper wall plate while extending so as to sandwich the upper wall plate between the first upper wall plate and the second upper wall plate. The slide cover is configured to be separated into a first slide cover corresponding to the first upper wall plate and a second slide cover corresponding to the second upper wall plate, and the first cover An upper wall plate is slidably inserted into the guide member of the first slide cover to form a first opening / closing door, and the second upper wall plate is attached to the guide member of the second slide cover. It is slidably inserted to form a second door, and the first slide cover and the second slide cover Characterized in that the fixed linkage means connecting state of each other in the closed state of the door is disposed.

  In the processing apparatus, it is preferable that a grinding wheel or a polishing pad is attached to the spindle of the processing means.

  The upper wall of the box of the processing apparatus according to the present invention has an upper wall plate having an opening and an insertion hole, and the opening is shielded while sliding on the upper wall plate along with the parallel movement of the spindle. And a slide cover. The upper wall plate is configured to be openable and closable by the first upper wall plate and the second upper wall plate. The processing apparatus according to the present invention has an effect that the cover means is inexpensive and difficult to break. Moreover, the processing apparatus according to the present invention has an effect that the access to the lower part of the spindle is easy.

FIG. 1 is a perspective view showing a processing apparatus according to the embodiment. FIG. 2 is a perspective view showing the processing apparatus to which the box according to the embodiment is attached. FIG. 3 is a perspective view showing a box according to the embodiment. FIG. 4 is a cross-sectional view of the vicinity of the box during processing. FIG. 5 is a perspective view showing the movement of the slide cover. FIG. 6 is another perspective view showing the movement of the slide cover. FIG. 7 is a perspective view showing the box with the open / close door opened.

  Hereinafter, a processing apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by this embodiment. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same.

[Embodiment]
The embodiment will be described with reference to FIGS. 1 to 7. The present embodiment relates to a processing apparatus. FIG. 1 is a perspective view showing a processing apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view showing a processing apparatus to which a box according to the embodiment is attached, and FIG. 3 shows a box according to the embodiment. 4 is a sectional view of the vicinity of the box during processing, FIG. 5 is a perspective view showing the movement of the slide cover, FIG. 6 is another perspective view showing the movement of the slide cover, and FIG. It is a perspective view which shows the box which opened the opening / closing door.

  The processing apparatus 1 according to the present embodiment includes a chuck table 10, a processing means 20, and a box 30. The processing apparatus 1 further includes a first feeding unit 40, a second feeding unit 50, and a control device (not shown).

  The chuck table 10 sucks and holds the plate-like workpiece W (see FIG. 4) with the holding surface 10a. The workpiece W is, for example, a semiconductor wafer or an optical device wafer. Returning to FIG. 1, the chuck table 10 is disposed in a water case 3 formed in the apparatus main body 2 of the processing apparatus 1. The water case 3 is a recess formed in the apparatus main body 2 and has a function of receiving and discharging the processing liquid supplied to the workpiece W and used. The chuck table 10 can be moved in the X-axis direction by a table moving means (not shown). Further, the chuck table 10 is driven to rotate around the Z axis by a table rotating means (not shown). In this embodiment, the X-axis direction is the horizontal direction, and the Z-axis direction is the vertical direction.

  The processing means 20 has a spindle 21 that performs processing while supplying a processing liquid to the workpiece W held on the holding surface 10 a of the chuck table 10. The processing means 20 further includes a grinding wheel 23 and a rotational drive source (not shown). The processing means 20 of this embodiment is a grinding means for grinding the workpiece W. The spindle 21 includes a rotating spindle 21a and a spindle housing 21b. The rotary spindle 21a is rotatably supported by a spindle housing 21b. In the present embodiment, the rotation axis of the spindle 21 extends in the Z-axis direction. The grinding wheel 23 is attached to the tip of the spindle 21, that is, the lower end of the rotary spindle 21a in this embodiment. The rotary spindle 21a and the grinding wheel 23 are driven to rotate by a rotary drive source connected to the spindle housing 21b and rotate around the Z axis.

  The spindle 21 can be moved by the first feeding means 40 and the second feeding means 50. The first feeding means 40 is for feeding the spindle 21 in the machining feed direction (Z-axis direction) orthogonal to the holding surface 10a. The first feeding unit 40 includes, for example, a pulse motor, a ball screw, a guide rail, and a position detection unit. The first feeding means 40 can change the relative position in the Z-axis direction between the workpiece W held on the chuck table 10 and the grinding wheel 23 by moving the spindle 21 in the Z-axis direction.

  The second feeding means 50 moves the spindle 21 in a direction parallel to the holding surface 10a. The second feeding means 50 has, for example, the same components as the first feeding means 40, and moves the spindle 21 in the W-axis direction. The W-axis direction is a direction that is orthogonal to the Z-axis direction and intersects the X-axis direction at a predetermined angle. In the present embodiment, the X-axis direction and the W-axis direction are not orthogonal, and the predetermined angle is an angle between 0 degrees and 90 degrees. That is, the second feeding means 50 can move the spindle 21 and the grinding wheel 23 in a direction parallel to the holding surface 10a and oblique to the X-axis direction.

  The box 30 according to the present embodiment has a function as a cover unit for the processing chamber 4 (see FIG. 4) of the processing apparatus 1. The box 30 forms the processing chamber 4 and surrounds at least a part of the processing means 20 and the chuck table 10 when processing the workpiece W. The box 30 is fixed to the apparatus main body 2 as shown in FIG. The box 30 may be detachably fixed to the apparatus main body 2. The box 30 is made of a material such as metal or resin, for example. The box 30 may be made of a material that at least partially transmits light so that the inside of the box 30 can be visually recognized from the outside.

  Returning to FIG. 1, the box 30 includes a side wall 31 and an upper wall 32 having an insertion hole 33. The upper wall 32 includes an upper wall plate 34 and a slide cover 35. The lower part of the box 30 is open, and the upper part is closed by the upper wall 32. The box 30 is formed by the four side walls 31 and the upper wall 32 to form a processing chamber 4 (see FIG. 4) that is a rectangular space. The processing apparatus 1 grinds the workpiece W while rotating the chuck table 10 by the table rotating means and rotating the grinding wheel 23 in the same direction as the rotation direction of the chuck table 10. The processing apparatus 1 contacts the workpiece W while rotating the grinding wheel 23, and grinds and feeds the grinding wheel 23 downward at a predetermined feed speed to grind the workpiece W. Further, the processing apparatus 1 can move the spindle 21 in the W-axis direction by the second feeding unit 50 during or before or after the processing by the processing unit 20.

  The processing means 20 performs processing while supplying a processing liquid to the workpiece W. The processing means 20, for example, injects a processing liquid supplied through a flow path formed in the shaft core portion of the rotary spindle 21 a toward the processing surface of the workpiece W, thereby causing the processing workpiece 20 to be processed. Supply machining fluid. The processing liquid is, for example, pure water or chemical liquid.

  The box 30 covers the chuck table 10, the lower part (lower part) of the spindle 21, and the grinding wheel 23 from above, and prevents the machining liquid from being scattered during machining. The bellows 5 covers the table moving means for moving the chuck table 10.

  As shown in FIG. 3, the upper wall plate 34 includes an opening 36. The opening 36 includes at least a moving region of the spindle 21 that is moved by the second feeding means 50, and is formed so that the moving spindle 21 and the upper wall plate 34 do not contact each other. The opening 36 according to the present embodiment extends in the W-axis direction in a state where the box 30 is fixed to the apparatus main body 2. Both ends of the opening 36 are semicircular. The width of the opening 36, in other words, the diameter of the semicircular portions at both ends is larger than the outer diameter of the spindle housing 21b. The length of the opening 36 in the W-axis direction corresponds to the movable range of the spindle housing 21b when the spindle 21 is moved by the second feeding means 50. The length of the opening 36 is determined so that at least the spindle housing 21b and the upper wall plate 34 do not come into contact with each other when the spindle 21 is moved a maximum amount to both sides in the W-axis direction.

  The upper wall plate 34 is configured to be openable and closable by a first upper wall plate 341 and a second upper wall plate 342. The first upper wall plate 341 and the second upper wall plate 342 are connected to the side walls 31 facing each other via a hinge or the like, and constitute a double door. The first upper wall plate 341 and the second upper wall plate 342 are formed by forming notches 361 and 362 in rectangular members, respectively. An opening 36 is constituted by a first notch 361 formed in the first upper wall plate 341 and a second notch 362 formed in the second upper wall plate 342. The first upper wall plate 341 and the second upper wall plate 342 are arranged so that the sides on which the notches 361 and 362 are formed are in contact with each other to form the upper wall plate 34 and close the upper portion of the box 30. To do. On the first upper wall plate 341 and the second upper wall plate 342, handles 34a for opening and closing are respectively arranged.

  The slide cover 35 has an insertion hole 33 and shields the opening 36 while sliding and moving on the upper wall plate 34 with the parallel movement of the spindle 21. The slide cover 35 includes an insertion hole 33 and guide members 353 and 354 that extend from the periphery of the insertion hole 33 so as to sandwich the upper wall plate 34 vertically and cover the opening 36 of the upper wall plate 34. The diameter of the insertion hole 33 is slightly larger than the diameter of the spindle 21. In the present embodiment, the spindle housing 21b is inserted into the insertion hole 33 during processing. Therefore, the diameter of the insertion hole 33 is slightly larger than the outer diameter of the spindle housing 21b.

  The slide cover 35 is configured to be divided into a first slide cover 351 and a second slide cover 352. The first slide cover 351 corresponds to the first upper wall plate 341, and the second slide cover 352 corresponds to the second upper wall plate 342. The first slide cover 351 and the second slide cover 352 are each formed by forming notches 331 and 332 forming part of the insertion hole 33 in a substantially rectangular member. The first slide cover 351 and the second slide cover 352 are formed by connecting two plate-like members facing each other with a predetermined gap at the insertion hole 33 portion. The predetermined gap, that is, the interval between the two plate-like members is slightly larger than the thickness of the upper wall plate 34, for example. The two plate-like members of the first slide cover 351 function as the first guide member 353. Further, the two plate-like members of the second slide cover 352 function as the second guide member 354.

  The first slide cover 351 and the second slide cover 352 slide on the upper wall plate 34 while being supported by the upper wall plate 34 by sandwiching the upper wall plate 34 by the guide members 353 and 354. Can move.

  FIG. 4 shows a cross-sectional view in the direction of A in FIG. As shown in FIG. 4, the first upper wall plate 341 is slidably inserted into the first guide member 353 of the first slide cover 351 to form the first opening / closing door 37. The second upper wall plate 342 is slidably inserted into the second guide member 354 of the second slide cover 352 to form the second opening / closing door 38. As shown in FIG. 3, the slide cover 35 has connecting means 39. As shown in FIG. 5, the connecting means 39 can fix the first slide cover 351 and the second slide cover 352 in a connected state when the open / close doors 37 and 38 are closed.

  As shown in FIG. 3, the connecting means 39 is disposed on the first slide cover 351 and the second slide cover 352. For example, the connecting means 39 hooks a hook portion disposed on the second slide cover 352 and locks it to an engagement receiving portion disposed on the first slide cover 351. The connection means 39 in the locked state fixes the connection state between the first slide cover 351 and the second slide cover 352. The first slide cover 351 and the second slide cover 352 are connected by the connecting means 39 in a state where the sides where the notches 331 and 332 are formed are in contact with each other. Accordingly, a circular insertion hole 33 is formed by the two semicircular cutouts 331 and 332.

  FIG. 5 shows a state in which the first slide cover 351 and the second slide cover 352 are connected by the connecting means 39 to be an integrated slide cover 35. The slide cover 35 moves in the direction in which the opening 36 of the upper wall plate 34 extends, that is, in the W-axis direction, and can move relative to the upper wall plate 34. FIG. 5 shows a state in which the slide cover 35 has moved to the one side in the W-axis direction with respect to the upper wall plate 34. FIG. 6 shows a state in which the slide cover 35 has moved to the other side in the W-axis direction with respect to the upper wall plate 34. 5 and 6, the description of the spindle 21 is omitted, but the spindle housing 21b of the spindle 21 is inserted into the insertion hole 33 when the workpiece W is processed.

  Since the slide cover 35 can move relative to the upper wall plate 34, the slide cover 35 can move following the movement of the spindle 21 inserted in the insertion hole 33 in the W-axis direction. Further, the size (area) of the plate-like members forming the guide members 353 and 354 of the slide cover 35 is such that the plate member can move relative to the upper wall plate 34 together with the spindle 21 while the opening 36 is closed. is there. Therefore, the slide cover 35 is movable in the W-axis direction while preventing the machining liquid from leaking out of the box 30 through the opening 36.

  As described above, the processing apparatus 1 according to the present embodiment realizes the cover means that is inexpensive and hardly damaged by forming the upper wall 32 of the cover means with the slide cover 35 that slides on the upper wall plate 34. I was able to. Unlike the boot means, the box 30 according to the present embodiment does not have a deforming portion for following the parallel movement of the spindle 21. The box body 30 is structured to follow the parallel movement of the spindle 21 when the slide cover 35 slides relative to the upper wall plate 34 and moves relative thereto, and thus is not easily damaged.

  Moreover, in the processing apparatus 1 which concerns on this embodiment, the upper wall 32 is divided | segmented into the 1st opening / closing door 37 and the 2nd opening / closing door 38, and can be opened and closed. As shown in FIG. 7, the second opening / closing door 38 can be opened by setting the connecting means 39 to the non-connected state. Similarly, the first opening / closing door 37 can be opened. The box 30 includes open state maintaining means such as a stopper for stopping the open / close doors 37 and 38 in the open state. For example, if the open / close doors 37 and 38 are maintained in an open state in a substantially vertical state, interference with peripheral devices can be avoided, and a large work space can be provided around the spindle 21. Can be secured.

  By opening at least one of the first opening / closing door 37 and the second opening / closing door 38, the operator can easily access the lower portion of the spindle 21 when replacing the wheel. In the open state, the first slide cover 351 can be removed by sliding from the first upper wall plate 341 and the second slide cover 352 from the second upper wall plate 342, respectively.

  When the slide cover 35 is attached to the upper wall plate 34, the first upper wall plate 341 is opened and inserted into the first guide member 353 of the first slide cover 351, and the second upper wall plate 342 is inserted. What is necessary is just to insert this in the 2nd guide member 354 of the 2nd slide cover 352 as an open state. When closing the first open / close door 37 and the second open / close door 38, the first slide cover 351 and the second slide door 351 are surrounded by the first notch 331 and the second notch 332 so as to surround the spindle housing 21b. Close the slide cover 352 while adjusting the position. Accordingly, the open / close doors 37 and 38 can be closed with the spindle 21 inserted into the insertion hole 33. After that, by connecting the first slide cover 351 and the second slide cover 352 by the connecting means 39, the open / close doors 37 and 38 can be locked in the closed state.

  In addition, although the processing apparatus 1 which concerns on this embodiment was a grinding apparatus provided with a grinding means as the processing means 20, it is not restricted to this, The polishing apparatus provided with a grinding | polishing means as the processing means 20 may be sufficient. In the polishing means, a polishing pad is mounted on the spindle 21 instead of the grinding wheel 23. The processing means 20 may serve as both a grinding means and a polishing means.

  Further, the processing means 20 may include a plurality of spindles 21. In this case, a plurality of openings 36 can be formed in the upper wall plate 34, and independent slide covers 35 can be provided in the respective openings 36. Even if the movement directions of the spindles 21 are different, the slide covers 35 can be moved relative to the upper wall plate 34 as the spindles 21 move.

  The guide members 353 and 354 of the present embodiment are two plate-like members provided in parallel, but are not limited to this. The guide members 353 and 354 are only required to be supported and guided by the upper wall plate 34 and to move the slide cover 35 relative to the upper wall plate 34 in the W-axis direction.

  The second feeding means 50 of the present embodiment moves the spindle 21 in the W-axis direction intersecting the X-axis direction, but is not limited to this. The second feeding means 50 may be anything that translates the spindle 21 in a direction parallel to the holding surface 10a.

  The insertion hole 33 may be provided with a seal member that seals the space between the spindle 21 and the spindle 21 in a watertight manner. Further, a seal member that seals watertight may be provided between the guide members 353 and 354 and the upper wall plate 34.

  The contents disclosed in the above embodiments can be executed in appropriate combination.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 4 Processing chamber 5 Bellows 10 Chuck table 10a Holding surface 20 Processing means 21 Spindle 21a Rotating spindle 21b Spindle housing 23 Grinding wheel 30 Box body 31 Side wall 32 Upper wall 33 Insertion hole 34 Upper wall board 34a Handle 341 First top Wall plate 342 Second upper wall plate 35 Slide cover 351 First slide cover 352 Second slide cover 353 First guide member 354 Second guide member 36 Opening 37 First open / close door 38 Second open / close door 39 Connecting means 40 First feeding means 50 Second feeding means

Claims (2)

A chuck table for sucking and holding a plate-like workpiece by a holding surface; and a processing means having a spindle for performing processing while supplying a processing liquid to the workpiece held on the holding surface of the chuck table. Processing equipment,
The spindle is movable by a first feeding means for machining and feeding in a machining feeding direction orthogonal to the holding surface, and a second feeding means for translating in a direction parallel to the holding surface,
The processing means and the chuck table are surrounded by a box that forms a processing chamber,
The box is
A side wall, and an upper wall having an insertion hole into which the lower part of the spindle can be inserted,
The upper wall is
An upper wall plate having an opening including at least a moving region of the spindle that is moved by the second feeding means, and has an insertion hole and slides and moves on the upper wall plate along with the parallel movement of the spindle; And a slide cover that shields the opening,
The slide cover
An insertion hole that is slightly larger than the diameter of the spindle, and a guide member that covers the opening of the upper wall plate while extending so as to sandwich the upper wall plate vertically from the periphery of the insertion hole,
The upper wall plate is configured to be openable and closable by a first upper wall plate and a second upper wall plate,
The slide cover is configured to be separated into a first slide cover corresponding to the first upper wall plate and a second slide cover corresponding to the second upper wall plate,
The first upper wall plate is slidably inserted into the guide member of the first slide cover to form a first opening / closing door, and the second upper wall plate is formed of the second slide cover. Slidably inserted into the guide member to form a second opening / closing door;
A processing apparatus in which the first slide cover and the second slide cover are provided with connection means capable of fixing the connection state to each other when the door is closed.   The processing apparatus according to claim 1, wherein a grinding wheel or a polishing pad is attached to the spindle of the processing means.

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