JP2014022862A - Vibration piece, frequency adjustment method for the same, vibrator, oscillator and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece that can suppress occurrence of burrs when parts of weight portions for frequency adjustment are removed by a laser beam even if an adjustment width of a frequency is increased, and further to provide a frequency adjustment method therefor, and a vibrator, an oscillator, and an electronic apparatus that are provided with the vibration piece and are excellent in reliability.SOLUTION: A vibration piece 2 includes a vibration arm 5 extending from a base portion and a weight portion 12 for frequency adjustment provided on the vibration arm 5. The weight portion 12 is configured so as to include a first layer 121, a second layer 122 provided at a vibration arm 5 side with respect to the first layer 121, and a third layer 123 provided at the vibration arm 5 side with respect to the second layer 122. A constituent material of the second layer 122 has a melting point higher than those of constituent materials of the first layer 121 and the third layer 123.

Description

  The present invention relates to a resonator element, a frequency adjustment method for the resonator element, a vibrator, an oscillator, and an electronic apparatus.

For example, a vibrating device such as a crystal oscillator or a gyro sensor generally includes a vibrating piece having a vibrating arm.
For example, the resonator element described in Patent Document 1 includes a base portion and two vibrating arms extending from the base portion so as to be parallel to each other, and the two vibrating arms are moved toward and away from each other (in-plane Direction).

In such a vibrating piece, as disclosed in Patent Document 1, generally, a metal film is provided on the tip of the vibrating arm, and a part of the metal film is removed by irradiation with laser light, and vibration is performed. The arm bending vibration frequency (resonance frequency) is adjusted.
In such frequency adjustment, if a part of the metal film for frequency adjustment is removed by laser, burrs are generated around the laser irradiation region in the remaining metal film.

  In the conventional resonator element, the metal film for frequency adjustment is composed of a single layer, and the metal film is removed by penetrating in the thickness direction with a single laser. When the thickness of the film is increased, there is a problem that the burrs as described above are increased. When the burr becomes large in this way, when the vibrating piece is used, the burr may be deformed or detached, and the frequency of the vibrating piece may be shifted.

JP 2003-328771 A

  An object of the present invention is to provide a resonator element capable of suppressing the occurrence of burrs when a part of a weight for frequency adjustment is removed by a laser even when the frequency adjustment width is increased, and a frequency adjustment method thereof. It is another object of the present invention to provide a resonator, an oscillator, and an electronic device that are provided with the resonator element and are excellent in reliability.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.
[Application Example 1]
The resonator element according to the invention includes a base,
A vibrating arm extending from the base;
A weight adjustment weight portion provided on the vibrating arm,
The weight portion includes a first layer, a second layer provided on the vibrating arm side with respect to the first layer, and a third layer provided on the vibrating arm side with respect to the second layer. Consisting of
The constituent material of the second layer has a higher melting point than the constituent materials of the first layer and the third layer.
According to the resonator element configured as described above, when removing the first layer, the second layer, and the third layer in this order, at least the first layer and the third layer can be removed for each layer. At that time, even if the thickness of the entire weight portion is increased and the frequency adjustment width is increased, the thickness of each layer of the weight portion can be suppressed, so that the generation of burrs when removed by a laser is suppressed. be able to.

[Application Example 2]
The resonator element according to the invention includes a base,
A vibrating arm extending from the base;
A weight adjustment weight portion provided on the vibrating arm,
The weight portion includes a first layer, a second layer provided on the vibrating arm side with respect to the first layer, and a third layer provided on the vibrating arm side with respect to the second layer. Consisting of
The constituent material of the second layer has a lower thermal conductivity than the constituent materials of the first layer and the third layer.
According to the resonator element configured as described above, when removing the first layer, the second layer, and the third layer in this order, at least the first layer and the third layer can be removed for each layer. At that time, even if the thickness of the entire weight portion is increased and the frequency adjustment width is increased, the thickness of each layer of the weight portion can be suppressed, so that the generation of burrs when removed by a laser is suppressed. be able to.

[Application Example 3]
In the resonator element according to the aspect of the invention, it is preferable that the constituent material of the second layer has a higher melting point than the constituent materials of the first layer and the third layer.
Thereby, when removing a 1st layer with a laser, it can prevent or suppress that a 2nd layer is removed. Further, after removing the second layer, at least a part of the third layer can be removed by laser. Therefore, the frequency adjustment can be performed by removing at least the first layer and the third layer for each layer with a laser.

[Application Example 4]
In the resonator element according to the aspect of the invention, it is preferable that each of the constituent materials of the first layer and the third layer has a specific gravity greater than that of the constituent material of the second layer.
Thereby, the mass of a 1st layer and a 3rd layer can be enlarged, and the adjustment range of a frequency can be enlarged.

[Application Example 5]
In the resonator element according to the aspect of the invention, it is preferable that the first layer and the third layer are thicker than the second layer, respectively.
Thereby, the mass of a 1st layer and a 3rd layer can be enlarged, and the adjustment range of a frequency can be enlarged. Further, by reducing the thickness of the second layer, the second layer can be easily and quickly removed even if the second layer is made of a material that is difficult to remove.

[Application Example 6]
In the resonator element according to the aspect of the invention, it is preferable that the thickness of the first layer is thicker than the thickness of the third layer.
Thus, the frequency can be roughly adjusted by removing the first layer, and the frequency can be finely adjusted by removing the third layer.

[Application Example 7]
In the resonator element according to the aspect of the invention, it is preferable that the constituent materials of the first layer and the third layer are the same.
Thus, the third layer can be removed under substantially the same laser irradiation conditions as when the first layer is removed.

[Application Example 8]
In the resonator element according to the aspect of the invention, it is preferable that the constituent materials of the first layer and the third layer are different from each other.
Thereby, desired characteristics can be imparted to the weight portion by making the characteristics of the first layer and the third layer different from each other.

[Application Example 9]
In the resonator element according to the aspect of the invention, the weight portion includes a fourth layer provided on the vibrating arm side with respect to the third layer, and a fifth layer provided on the vibrating arm side with respect to the fourth layer. And including
The constituent material of the fourth layer preferably has a higher melting point than the constituent materials of the first layer, the third layer, and the fifth layer.
Thereby, when removing a 3rd layer with a laser, it can prevent or suppress that a 4th layer is removed. Further, after removing the fourth layer, at least a part of the fifth layer can be removed by laser. Therefore, the frequency adjustment can be performed by removing at least the first layer, the third layer, and the fifth layer for each layer with a laser.

[Application Example 10]
The frequency adjustment method of the resonator element of the present invention is provided with the resonator element of the present invention,
The resonance frequency of the vibrating arm is adjusted by removing at least a part of the weight portion from the first layer side for each layer.
According to such a frequency adjustment method of the resonator element, when removing the first layer, the second layer, and the third layer in this order, at least the first layer and the third layer can be removed for each layer. At that time, even if the thickness of the entire weight portion is increased and the frequency adjustment width is increased, the thickness of each layer of the weight portion can be suppressed, so that the generation of burrs when removed by a laser is suppressed. be able to.

[Application Example 11]
The vibrator of the present invention includes the resonator element of the present invention,
And a package for housing the resonator element.
According to such a vibrator, it is possible to prevent the burrs formed on the weight part from being deformed or detached, and the frequency of the resonator element from shifting, and thus excellent reliability can be exhibited.

[Application Example 12]
The oscillator of the present invention includes the resonator element of the present invention,
And an oscillation circuit electrically connected to the vibration piece.
According to such an oscillator, it is possible to prevent the burrs formed on the weight portion from being deformed or detached and the frequency of the resonator element from being shifted, and thus excellent reliability can be exhibited.
[Application Example 13]
An electronic apparatus according to the present invention includes the resonator element according to the present invention.
According to such an electronic device, it is possible to prevent the burrs formed on the weight portion from being deformed or detached and the frequency of the resonator element from being shifted, and thus excellent reliability can be exhibited.

FIG. 3 is a plan view showing the vibrator according to the first embodiment of the invention. It is the sectional view on the AA line in FIG. 2 is a cross-sectional view (a cross-sectional view taken along the line BB in FIG. 1) of a resonator element included in the vibrator illustrated in FIG. FIG. 2 is a cross-sectional view of the resonator element included in the vibrator illustrated in FIG. 1 (cross-sectional view taken along line CC in FIG. 1). It is a longitudinal cross-sectional view of the weight part shown in FIG. It is a figure for demonstrating the frequency adjustment of the vibration piece shown in FIG. It is a figure for demonstrating the frequency adjustment of the conventional vibration piece. It is a figure for demonstrating the simulation regarding the influence on (DELTA) F by the burr | flash which generate | occur | produced at the time of the frequency adjustment of a vibration piece. It is a graph which shows the relationship between the volume of burrs, and (DELTA) F. (A) is a top view which shows the weight part of the vibration piece which concerns on 2nd Embodiment of this invention, (b) is a longitudinal cross-sectional view of the weight part shown to (a). It is a longitudinal cross-sectional view which shows the weight part of the vibration piece which concerns on 3rd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the weight part of the vibration piece which concerns on 4th Embodiment of this invention. It is sectional drawing which shows an example of the oscillator of this invention. FIG. 11 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the resonator element according to the invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device provided with the vibration piece of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device provided with the vibration piece of this invention is applied. It is a perspective view which shows the structure of the mobile body (automobile) to which the electronic device provided with the vibration piece of this invention is applied.

Hereinafter, the resonator element, the frequency adjusting method of the resonator element, the vibrator, the oscillator, and the electronic device of the present invention will be described in detail based on preferred embodiments shown in the drawings.
First, the vibrator of the present invention (the vibrator provided with the resonator element of the present invention) will be described.
<First Embodiment>
1 is a plan view showing a vibrator according to the first embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a diagram of a resonator element included in the vibrator shown in FIG. FIG. 4 is a cross-sectional view (cross-sectional view taken along the line BB in FIG. 1), FIG. 4 is a cross-sectional view of the resonator element included in the vibrator shown in FIG. FIG. 6 is a diagram for explaining frequency adjustment of the resonator element shown in FIG. 1, FIG. 7 is a diagram for explaining frequency adjustment of the conventional resonator element, and FIG. FIG. 9 is a diagram for explaining a simulation regarding the influence of burrs generated during frequency adjustment of the resonator element on ΔF, and FIG. 9 is a graph showing the relationship between the volume of burrs and ΔF.

  In the following, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other in FIGS. “, And the base end side is defined as“ − side ”. Also, the direction parallel to the X axis is called the “X axis direction”, the direction parallel to the Y axis is called the “Y axis direction”, and the direction parallel to the Z axis is called the “Z axis direction”. The upper side in the middle is also called “upper”, and the −Z side (lower side in FIG. 2) is also called “lower”. In the following description, for convenience of explanation, the X axis, the Y axis, and the Z axis shown in each figure are the X axis (electrical axis) and the Y axis (mechanical axis) of the crystal constituting the quartz substrate 3 described later, respectively. And coincides with the Z axis (optical axis).

1. Oscillator The vibrator 1 shown in FIGS. 1 and 2 includes a vibrating piece 2 (the vibrating piece of the present invention) and a package 9 that houses the vibrating piece 2. Hereinafter, the resonator element 2 and the package 9 will be sequentially described in detail.
(Vibration piece 2)
As shown in FIGS. 1, 2, and 3, the resonator element 2 of the present embodiment includes a crystal substrate 3, and a first drive electrode 84 and a second drive electrode 85 formed on the crystal substrate 3. Have. In FIG. 1 and FIG. 2, illustration of the first drive electrode 84 and the second drive electrode 85 is omitted for convenience of explanation.

The quartz substrate 3 is composed of a Z-cut quartz plate. Thereby, the resonator element 2 can exhibit excellent vibration characteristics. A Z-cut quartz plate is a quartz substrate whose thickness direction is the Z axis (optical axis) of quartz. The Z axis of the crystal preferably coincides with the thickness direction of the crystal substrate 3, but may be slightly inclined (less than about 1 °) with respect to the thickness direction.
As shown in FIG. 1, the crystal substrate 3 has a base portion 4, a pair of vibrating arms 5 and 6 extending from the base portion 4, and a support portion 7 extending from the base portion 4.

  The base 4 extends in the XY plane, which is a plane parallel to the X axis and the Y axis, and has a plate shape with the Z axis direction as the thickness direction. Further, the support portion 7 is connected to a connection portion 71 extending from the base portion 4 in the −Y axis direction, and connecting arms 72 and 73 extending from the connection portion 71 in a + X axis direction and a −X axis direction. Support arms 74 and 75 extending in the + Y-axis direction from the distal ends of the arms 72 and 73 are provided.

  The vibrating arms 5 and 6 extend in the + Y-axis direction from the base 4 so as to be aligned in the X-axis direction and parallel to each other. Each of the vibrating arms 5 and 6 has a longitudinal shape, and a base end thereof is a fixed end and a tip end is a free end. Further, hammer heads 59 and 69 are provided at the distal ends of the vibrating arms 5 and 6. The hammer heads 59 and 69 are provided with weight portions 12 and 13 for frequency adjustment. The weight parts 12 and 13 will be described in detail later.

As shown in FIG. 3, the vibrating arm 5 includes a pair of main surfaces 51 and 52 configured by an XY plane, and a pair of side surfaces 53 and 54 configured by a YZ plane and connecting the pair of main surfaces 51 and 52. have. The vibrating arm 5 has a bottomed groove 55 that opens to the main surface 51 and a bottomed groove 56 that opens to the main surface 52. Each of the grooves 55 and 56 extends in the Y-axis direction. Such a vibrating arm 5 has a substantially H-shaped cross-sectional shape in the portion where the grooves 55 and 56 are formed.
As shown in FIG. 3, the grooves 55 and 56 are preferably formed symmetrically with respect to a line segment L that bisects the thickness of the vibrating arm 5 in the cross section. Thereby, unnecessary vibration of the vibrating arm 5 (specifically, oblique vibration having an out-of-plane direction component) can be suppressed, and the vibrating arm 5 can be efficiently vibrated in the in-plane direction of the crystal substrate 3.

Similar to the vibrating arm 5, the vibrating arm 6 includes a pair of main surfaces 61 and 62 configured by an XY plane and a pair of side surfaces 63 and 64 configured by a YZ plane and connecting the pair of main surfaces 61 and 62. have. The vibrating arm 6 has a bottomed groove 65 that opens to the main surface 61 and a bottomed groove 66 that opens to the main surface 62. Each of the grooves 65 and 66 extends in the Y-axis direction. Such a vibrating arm 6 has a substantially H-shaped cross-sectional shape in the portion where the grooves 65 and 66 are formed.
As shown in FIG. 3, the grooves 65 and 66 are preferably formed symmetrically with respect to a line segment L that bisects the thickness of the vibrating arm 6 in the cross section. Thereby, unnecessary vibration of the vibrating arm 6 can be suppressed, and the vibrating arm 6 can be efficiently vibrated in the in-plane direction of the crystal substrate 3.

  A pair of first drive electrodes 84 and a pair of second drive electrodes 85 are formed on the vibrating arm 5. Specifically, one first driving electrode 84 is formed on the inner surface of the groove 55, and the other first driving electrode 84 is formed on the inner surface of the groove 56. One second drive electrode 85 is formed on the side surface 53, and the other second drive electrode 85 is formed on the side surface 54.

Similarly, a pair of first driving electrodes 84 and a pair of second driving electrodes 85 are also formed on the vibrating arm 6. Specifically, one first driving electrode 84 is formed on the side surface 63, and the other first driving electrode 84 is formed on the side surface 64. One second driving electrode 85 is formed on the inner surface of the groove 65, and the other second driving electrode 85 is formed on the inner surface of the groove 66.
When an alternating voltage is applied between the first drive electrode 84 and the second drive electrode 85 as described above, the vibrating arms 5 and 6 are predetermined in the in-plane direction (XY plane direction) so as to repeatedly approach and separate from each other. It vibrates at a frequency of.

The constituent materials of the first driving electrode 84 and the second driving electrode 85 are not particularly limited. For example, gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), It can be formed of a metal material such as zinc (Zn) or zirconium (Zr), or a conductive material such as indium tin oxide (ITO).
The configuration of the vibrating piece 2 has been briefly described above. Here, the weight portions 12 and 13 provided on the vibrating arms 5 and 6 will be described.

  As described above, the hammer head 59 (tip portion) of the vibrating arm 5 is provided with the weight portion 12 for frequency adjustment. As will be described later, the weight portion 12 removes at least a part of the weight portion 12 as necessary, thereby reducing the mass and, as a result, increasing the resonance frequency of the vibrating arm 5. Similarly, the hammer head 69 (tip portion) of the vibrating arm 6 is provided with a weight portion 13 for frequency adjustment. The weight portion 13 removes at least a part of the weight portion 13 as necessary, thereby reducing the mass and, as a result, increasing the resonance frequency of the vibrating arm 6.

Each of the weight portions 12 and 13 is configured by a stacked body in which a plurality of layers are stacked.
That is, the weight portion 12 includes the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 in this order from the upper side (+ Z side) to the lower side (−Z side). It is comprised by the laminated body laminated | stacked. In other words, the weight portion 12 is configured by laminating the fifth layer 125, the fourth layer 124, the third layer 123, the second layer 122, and the first layer 121 in this order on the vibrating arm 5.
Similarly, the weight portion 13 is configured by laminating a fifth layer 135, a fourth layer 134, a third layer 133, a second layer 132, and a first layer 131 in this order on the vibrating arm 6.

Hereinafter, the weight portion 12 will be described in detail. In addition, since the weight part 13 is the same as that of the weight part 12, the description is abbreviate | omitted.
The first layer 121 is a layer on the outermost surface side of the stacked body constituting the weight portion 12. The second layer 122 is provided on the vibrating arm 5 side with respect to the first layer 121. The third layer 123 is provided on the vibrating arm 5 side with respect to the second layer 122. The fourth layer 124 is provided on the vibrating arm 5 side with respect to the third layer 123. The fifth layer 125 is provided on the vibrating arm 5 side with respect to the fourth layer 124.

  In the present embodiment, the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 are formed over the same region on the hammer head 59 of the vibrating arm 5. ing. Specifically, the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 are provided over almost the entire main surface of the hammer head 59 of the vibrating arm 5, respectively. It has been.

Thus, the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 constituting the weight portion 12 are for frequency adjustment (adjustment of the resonance frequency of the vibrating arm 5), respectively. Can be used as a weight.
The second layer 122 is made of a material that prevents the third layer 123 from being removed when the first layer 121 is removed by a laser. Similarly, the fourth layer 124 is made of a material that prevents the fifth layer 125 from being removed when the third layer 123 is removed by a laser.

  Specifically, the constituent material of the second layer 122 has a melting point higher than that of the constituent materials of the first layer 121 and the third layer 123, and heat is higher than that of the constituent materials of the first layer 121 and the third layer 123. Satisfying at least one of the conditions of low conductivity. Similarly, the constituent material of the fourth layer 124 has a higher melting point than the constituent materials of the third layer 123 and the fifth layer 125, and the thermal conductivity of the constituent material of the third layer 123 and the fifth layer 125. Satisfies the condition of at least one of low.

  In particular, the constituent materials of the second layer 122 and the fourth layer 124 preferably satisfy the two conditions described above. That is, the constituent material of the second layer 122 has a melting point higher than that of the constituent materials of the first layer 121 and the third layer 123, and has a thermal conductivity higher than that of the constituent materials of the first layer 121 and the third layer 123. It is preferable to satisfy both conditions of low. Similarly, the constituent material of the fourth layer 124 has a higher melting point than the constituent materials of the third layer 123 and the fifth layer 125, and the thermal conductivity of the constituent material of the third layer 123 and the fifth layer 125. It is preferable to satisfy both conditions of low.

  If the constituent material of the second layer 122 has a melting point higher than that of the constituent material of the first layer 121 and the third layer 123, even when the first layer 121 reaches its melting point when the first layer 121 is removed by laser. The second layer 122 can be less than its melting point. Therefore, when the first layer 121 is removed by a laser, the removal of the second layer 122 can be prevented or suppressed. In addition, since the constituent material of the third layer 123 has a melting point lower than that of the constituent material of the second layer 122, it is possible to easily remove at least a part of the third layer 123 with a laser after removing the second layer 122. it can.

Similarly, if the constituent material of the fourth layer 124 has a higher melting point than the constituent materials of the third layer 123 and the fifth layer 125, the fourth layer 124 is removed when the third layer 123 is removed by laser. Can be prevented or suppressed. In addition, after removing the fourth layer 124, at least a part of the fifth layer 125 can be removed by laser.
If the constituent material of the second layer 122 is lower in thermal conductivity than the constituent materials of the first layer 121 and the third layer 123, the heat of the first layer 121 is reduced when the first layer 121 is removed by a laser. It is possible to prevent or suppress diffusion and escape to the second layer 122 side. In other words, when the first layer 121 is removed by a laser, the second layer 122 constitutes a heat insulating layer that prevents the heat of the first layer 121 from being transferred to the third layer 123. Therefore, only the first layer 121 can be efficiently heated by the laser.

Similarly, when the constituent material of the fourth layer 124 is lower in thermal conductivity than the constituent materials of the third layer 123 and the fifth layer 125, only the third layer 123 can be efficiently heated by the laser.
For this reason, according to the resonator element 2, when the first layer 121, the second layer 122, and the third layer 123 are removed in this order, at least the first layer 121 and the third layer 123 are removed for each layer. can do. At that time, even if the thickness of the entire weight portion 12 is increased and the frequency adjustment width is increased, the thickness of each layer of the weight portion 12 can be suppressed. Can be suppressed.

In this embodiment, when removing the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 in this order, at least the first layer 121, the third layer 123, and The fifth layer 125 can be removed for each layer with a laser to adjust the frequency.
The second layer 122 and the fourth layer 124 tend to be harder to be removed by the laser than the first layer 121, the third layer 123, and the fifth layer 125, but the laser irradiation conditions are changed. Thus, only the second layer 122 or only the fourth layer 124 can be removed. Alternatively, the second layer 122 or the fourth layer 124 can be removed by an ion beam. In this case, since the second layer 122 and the fourth layer 124 are relatively thin, only the second layer 122 or only the fourth layer 124 can be removed in a relatively short time even using an ion beam. The removal of each layer of the weight portion 12 will be described in detail in the description of the frequency adjustment method described later.

The constituent materials of the first layer 121, the third layer 123, and the fifth layer 125 preferably have a specific gravity greater than the constituent materials of the second layer 122 and the fourth layer 124, respectively. Thereby, the mass of the 1st layer 121, the 3rd layer 123, and the 5th layer 125 can be enlarged, and the adjustment range of a frequency can be enlarged.
In the present embodiment, the thicknesses t1, t3, and t5 of the first layer 121, the third layer 123, and the fifth layer 125 are larger than the thicknesses t2 and t4 of the second layer 122 and the fourth layer 124, respectively. That is, the thicknesses t2 and t4 of the second layer 122 and the fourth layer 124 are thinner than the thicknesses t1, t3, and t5 of the first layer 121, the third layer 123, and the fifth layer 125, respectively.

Thereby, the mass of the 1st layer 121, the 3rd layer 123, and the 5th layer 125 can be enlarged, and the adjustment range of a frequency can be enlarged. In addition, by reducing the thickness of the second layer 122 and the fourth layer 124, even if the second layer 122 and the fourth layer 124 are made of a material that is difficult to remove, the second layer 122 and the fourth layer 124 are used. Can be removed easily and in a short time.
Note that at least one of the first layer 121, the third layer 123, and the fifth layer 125 may have the same thickness as the second layer 122 or the fourth layer 124.

In the present embodiment, the thickness t1 of the first layer 121 is thicker than the thickness t3 of the third layer 123. Accordingly, the frequency can be roughly adjusted by removing the first layer 121, and the frequency can be finely adjusted by removing the third layer 123.
Further, the thickness t3 of the third layer 123 is thicker than the thickness t5 of the fifth layer 125. Thereby, the frequency can be further finely adjusted by removing the fifth layer 125.

The thickness of at least two of the first layer 121, the third layer 123, and the fifth layer 125 may be equal to each other.
The specific thicknesses of the first layer 121, the third layer 123, and the fifth layer 125 are determined in accordance with the number of layers constituting the weight portion 12, the frequency adjustment width to be set, and the like. Although not particularly limited, for example, it is preferably 1 nm or more and 500 nm or less.

Further, the thicknesses t2 and t4 of the second layer 122 and the fourth layer 124 are equal to each other. Thereby, when the 2nd layer 122 and the 4th layer 124 are comprised with the same material, these both layers can be removed on the same conditions. Note that the thicknesses of the second layer 122 and the fourth layer 124 may be different from each other.
The specific thicknesses of the second layer 122 and the fourth layer 124 are determined according to the number of layers constituting the weight portion 12, the frequency adjustment width to be set, and the like, and are not particularly limited. For example, it is preferably 1 nm or more and 300 nm or less.

The constituent material of the first layer 121, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 of the weight portion 12 satisfies the relationship of the melting point or the thermal conductivity as described above. Although it will not specifically limit if it is a thing, For example, a metal material or a ceramic material is preferable.
Metal or ceramics (insulating material) can be easily and accurately deposited by a vapor deposition method. Moreover, the film | membrane (each layer of a weight part) comprised with the metal or ceramics can be easily and highly accurately removed by irradiation of an energy ray (especially laser). For this reason, the frequency adjustment is simpler and more accurate by forming each layer of the weight portion 12 by forming a metal or ceramic film.

  Examples of the metal material used for the constituent material of each layer of the weight portion 12 include gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, and chromium (Cr). , Chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr), etc. 1 type or 2 types or more of them can be used in combination. Among these, it is preferable to use Al, Cr, Fe, Ni, Cu, Ag, Au, Pt, or an alloy containing at least one of these as the metal material.

Moreover, as ceramics used for the constituent material of each layer of the weight portion 12, for example, various types of glass, oxide ceramics such as alumina (aluminum oxide), silica (silicon oxide), titania (titanium oxide), zirconia, yttria, calcium phosphate, Nitride ceramics such as silicon nitride, aluminum nitride, titanium nitride and boron nitride, carbide ceramics such as graphite and tungsten carbide, and other ferroelectric materials such as barium titanate, strontium titanate, PZT, PLZT and PLLZT Etc. Among these, it is preferable to use an insulating material such as silicon oxide (SiO ₂ ), titanium oxide (TiO ₂ ), aluminum oxide (Al ₂ O ₃ ) as the ceramic.

In particular, as the constituent material of the first layer 121, the third layer 123, and the fifth layer 125 of the weight portion 12, since the specific gravity is relatively large, gold (Au), gold alloy, platinum (Pt), silver (Ag) ) Or a silver alloy, and it is more preferable to use gold (Au) or a gold alloy because it is excellent in chemical stability.
Further, as the constituent material of the second layer 122 and the fourth layer 124 of the weight portion 12, chromium (Cr), a chromium alloy, or a ceramic material is used because it has a relatively high melting point and low thermal conductivity. It is preferable to use chromium (Cr) or a chromium alloy because of excellent adhesion to the first layer 121, the third layer 123, and the like.

The constituent materials of the first layer 121, the third layer 123, and the fifth layer 125 may be the same as or different from each other.
When the constituent materials of the first layer 121, the third layer 123, and the fifth layer 125 are the same, the third layer 123 and the fifth layer 125 are subjected to substantially the same laser irradiation conditions as when the first layer 121 is removed. Can be removed.
On the other hand, when the constituent materials of the first layer 121, the third layer 123, and the fifth layer 125 are different from each other, the weight portion 12 is obtained by making the characteristics of the first layer 121, the third layer 123, and the fifth layer 125 different from each other. Desired characteristics can be imparted to.

(package)
The package 9 includes a box-shaped base 91 having a recess 911 that opens to the upper surface, and a plate-shaped lid 92 that is joined to the base 91 so as to close the opening of the recess 911. Such a package 9 has a storage space formed by closing the recess 911 with the lid 92, and the resonator element 2 is stored in the storage space in an airtight manner. The vibration piece 2 is fixed to the bottom surface of the recess 911 at the tip ends of the support arms 74 and 75 via a conductive adhesive 11 in which a conductive filler is mixed with, for example, an epoxy resin or an acrylic resin.
Note that the storage space may be in a reduced pressure (preferably vacuum) state, or may be filled with an inert gas such as nitrogen, helium, or argon. Thereby, the vibration characteristics of the resonator element 2 are improved.

  The constituent material of the base 91 is not particularly limited, but various ceramics such as aluminum oxide can be used. The constituent material of the lid 92 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 91. For example, when the constituent material of the base 91 is ceramic as described above, an alloy such as Kovar is preferable. The joining of the base 91 and the lid 92 is not particularly limited, and for example, the base 91 and the lid 92 may be joined via an adhesive or may be joined by seam welding or the like.

  In addition, connection terminals 951 and 961 are formed on the bottom surface of the recess 911 of the base 91. Although not shown, the first drive electrode 84 of the resonator element 2 is pulled out to the tip of the support arm 74, and the conductive adhesive 11 is electrically connected to the connection terminal 951 at this portion. . Similarly, although not shown, the second drive electrode 85 of the resonator element 2 is drawn to the tip of the support arm 75, and is electrically connected to the connection terminal 961 via the conductive adhesive 11 at that portion. It is connected to the.

The connection terminal 951 is electrically connected to an external terminal 953 formed on the bottom surface of the base 91 via a through electrode 952 that penetrates the base 91, and the connection terminal 961 is a penetration electrode that penetrates the base 91. It is electrically connected to an external terminal 963 formed on the bottom surface of the base 91 through 962.
The structures of the connection terminals 951 and 961, the through electrodes 952 and 962, and the external terminals 953 and 963 are not particularly limited as long as they have conductivity. For example, Cr (chrome), W (tungsten), and the like The metallized layer (underlying layer) can be composed of a metal film in which films such as Ni (nickel), Au (gold), Ag (silver), and Cu (copper) are laminated.

2. Next, based on FIG. 6, a frequency adjusting method for the resonator element 2 will be described as an example of the frequency adjusting method for the resonator element according to the present invention. Each drawing in FIG. 6 shows a cross section corresponding to FIG.
The frequency adjustment method of the resonator element 2 is as follows. The resonator element 2 is prepared, and at least a part of the weight parts 12 and 13 is removed from the first layers 121 and 131 side by layer, thereby resonating frequencies of the vibrating arms 5 and 6. Adjust.

Details will be described below. In the following, the frequency adjustment of the vibrating arm 5 will be representatively described, and the frequency adjustment of the vibrating arm 6 is the same as the frequency adjustment of the vibrating arm 5, and thus the description thereof is omitted.
[1]
First, the resonator element 2 before frequency adjustment is prepared.
At this time, as shown in FIG. 6 (a), on the vibrating arm 5, a weight portion composed of a first layer 121, a second layer 122, a third layer 123, a fourth layer 124, and a fifth layer 125 is formed. 12 is provided.
At this time, the frequency (resonance frequency) of the vibrating arm 5 is set to be lower than the target frequency (resonance frequency).

[2]
(Removal of the first layer)
Then, as shown in FIG. 6B, part or all of the first layer 121 is removed as necessary by laser irradiation.
Here, as described above, the constituent material of the second layer 122 has a melting point higher than that of the constituent material of the first layer 121 and a thermal conductivity lower than that of the constituent material of the first layer 121. Satisfies at least one of the conditions.

Therefore, the first layer 121 can be selectively removed without removing the layer closer to the vibrating arm 5 than the first layer 121 of the weight portion 12. Note that when the first layer 121 is removed, if the third layer 123 is not removed, a part of the second layer 122 may be slightly removed.
At this time, for example, the first layer 121 is removed by a laser while measuring the frequency of the vibrating arm 5. When the frequency of the vibrating arm 5 reaches the target frequency while the first layer 121 is being removed, the frequency adjustment is terminated with only a part of the first layer 121 being removed. .

On the other hand, even if all of the first layer 121 is removed, if the frequency of the vibrating arm 5 does not reach the target frequency, the second layer 122 is removed.
In FIG. 6B, a case where the entire first layer 121 is removed is illustrated as an example. Therefore, the second layer 122, the third layer 123, the fourth layer 124, and the fifth layer 125 remain on the vibrating arm 5 after the laser irradiation.

In addition, when removing a part of 1st layer 121, the shape of 1st layer 121 removed, a site | part, and its removal amount are suitably set as needed, for example, the 1st layer 121 of The removed portion has a line shape, a dot shape, or the like.
By removing the first layer 121 in this way, the mass of the weight portion 12 is reduced, so that the frequency of the vibrating arm 5 is increased.
Further, the laser used for removing the first layer 121 is not particularly limited as long as it can remove a necessary portion of the first layer 121 without adversely affecting the vibrating arm 5. For example, a carbon dioxide laser, excimer laser, YAG laser, or the like can be used.

(Removal of the second layer)
Next, as shown in FIG. 6C, part or all of the second layer 122 is removed as necessary by irradiation with a laser or an ion beam.
At this time, for example, the second layer 122 is removed by a laser or an ion beam while measuring the frequency of the vibrating arm 5. When the frequency of the vibrating arm 5 reaches the target frequency while the second layer 122 is being removed, the frequency adjustment is finished with only a part of the second layer 122 being removed. .

On the other hand, even if all of the second layer 122 is removed, if the frequency of the vibrating arm 5 does not reach the target frequency, the third layer 123 is removed.
In FIG. 6C, a case where the entire second layer 122 is removed is illustrated as an example. Therefore, the third layer 123, the fourth layer 124, and the fifth layer 125 remain on the vibrating arm 5 after the laser or ion beam irradiation.

Further, as the laser used for the removal of the second layer 122, the same laser as that used for the removal of the first layer 121 can be used. However, only the second layer 122 can be removed. Furthermore, it is preferable to carry out under conditions (laser power, frequency, etc.) different from those at the time of removing the first layer 121.
In addition, when an ion beam is used to remove the second layer 122, only the second layer 122 can be removed with high accuracy. At this time, since the second layer 122 is relatively thin, it does not take a long time to remove the second layer 122.
By removing the second layer 122 as described above, the mass of the weight portion 12 is further reduced, so that the frequency of the vibrating arm 5 is further increased.

(Removal of third layer)
Next, as shown in FIG. 6D, part or all of the third layer 123 is removed as necessary by laser irradiation.
Here, as described above, the constituent material of the fourth layer 124 has a higher melting point than the constituent material of the third layer 123 and has a lower thermal conductivity than the constituent material of the third layer 123. Satisfies at least one of the conditions.

Therefore, the third layer 123 can be selectively removed without removing the layer closer to the vibrating arm 5 than the third layer 123 of the weight portion 12. Note that when removing the third layer 123, if the fifth layer 125 is not removed, a part of the fourth layer 124 may be slightly removed.
At that time, for example, the third layer 123 is removed by a laser while measuring the frequency of the vibrating arm 5. In the middle of removing the third layer 123, when the frequency of the vibrating arm 5 reaches the target frequency, the frequency adjustment is finished with only a part of the third layer 123 removed. .

On the other hand, if the frequency of the vibrating arm 5 does not reach the target frequency even after removing all of the third layer 123, the fourth layer 124 is removed in the same manner as the removal of the second layer 122 and the third layer 123 described above. The fifth layer 125 is removed as necessary.
FIG. 6D shows an example in which a part of the third layer 123 is removed. Therefore, the remaining portion 123X, the fourth layer 124, and the fifth layer 125 of the third layer 123 remain on the vibrating arm 5 after the laser irradiation.

Here, since the third layer 123 is relatively thin, it is possible to prevent or suppress the occurrence of burrs in the remaining portion 123X of the third layer 123 even if the third layer 123 is removed using a laser.
In addition, the shape, part, and removal amount of the third layer 123 to be removed are appropriately set as necessary. For example, the removed part of the third layer 123 may be a line shape, a dot shape, or the like. The shape of

By removing the third layer 123 in this way, the mass of the weight portion 12 is reduced, so that the frequency of the vibrating arm 5 is increased.
Further, as the laser used for the removal of the third layer 123, the same laser as that used for the removal of the first layer 121 can be used, and when the first layer 121 is removed. Can be performed under the same or different conditions (laser power, frequency, etc.).

As described above, the frequency of the vibrating arm 5 can be adjusted to coincide with the target frequency.
In particular, when the first layer 121, the second layer 122, and the third layer 123 are removed in this order, at least the first layer 121 and the third layer 123 can be removed for each layer. At that time, even if the thickness of the entire weight portion 12 is increased and the frequency adjustment width is increased, the thickness of each layer of the weight portion 12 can be suppressed. Can be suppressed.
Therefore, according to the obtained vibrator 1, it is possible to prevent the burrs formed on the weight portion 12 from being deformed or detached and the frequency of the vibrating piece 2 from being shifted, and thus excellent reliability can be exhibited.

On the other hand, in the conventional resonator element, as shown in FIG. 7A, a weight portion 12X made of a single-layer metal film is formed on the vibrating arm 5X.
Therefore, when the thickness of the weight portion 12X is increased, as shown in FIG. 7B, when a part of the weight portion 12X is removed by a laser, a relatively large burr 12X1 is generated around the laser irradiation region. .
Such a burr 12X1 is easily deformed, and when the resonator element 2 is used, the burr 12X2 becomes a deformed burr 12X2 as shown in FIG. 7C.

Here, as shown in FIG. 8 (a), the burr 12X1 is set as three cuboids having the same shape and volume, and the burr 12X2 is arranged as shown in FIG. 8 (b). Two of the same three rectangular parallelepipeds were arranged vertically and the remaining one was set horizontally, and the frequency difference ΔF of these vibrating arms 5X was obtained by simulation.
The rectangular parallelepiped has a vertical and horizontal length of a [μ] and a height of b [μm].
As a result of such a simulation, as shown in FIG. 9, it can be seen that ΔF increases as the volume of the burr increases.

Second Embodiment
Next, a second embodiment of the vibrator of the invention will be described.
FIG. 10A is a plan view showing the weight portion of the resonator element according to the second embodiment of the invention, and FIG. 10B is a longitudinal sectional view of the weight portion shown in FIG.
Hereinafter, the vibrator of the second embodiment will be described focusing on the differences from the first embodiment described above, and description of similar matters will be omitted.

The vibrator according to the second embodiment of the present invention is the same as that of the first embodiment described above except that the configuration of the weight portion is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 10, a weight portion 12 </ b> A is provided on the vibrating arm 5. Although not shown, a weight portion similar to the weight portion 12 </ b> A is also provided on the vibrating arm 6.

The weight portion 12A includes a plurality of portions 126, 127, and 128 that are divided at intervals.
The portions 126, 127, and 128 are arranged from the upper side (+ Z side) to the lower side (−Z side) from the first layer 121A, the second layer 122A, the third layer 123A, the fourth layer 124A, and the fifth layer 125A. Are constituted by a laminated body laminated in this order.

Each of such portions 126, 127, and 128 can be removed for each layer as necessary, like the weight portion 12 of the first embodiment described above.
In particular, in the present embodiment, the portions 126, 127, and 128 can be removed for each layer. For example, the portions 126 and 127 can be used for coarse adjustment, and the portion 128 can be used for fine adjustment.
According to the second embodiment as well, even when the frequency adjustment range is increased, the generation of burrs when part of the frequency adjustment weight portion is removed by the laser can be suppressed.

<Third Embodiment>
Next, a third embodiment of the vibrator of the invention will be described.
FIG. 11 is a longitudinal sectional view showing the weight portion of the resonator element according to the third embodiment of the invention.
Hereinafter, the resonator according to the third embodiment will be described focusing on the differences from the first embodiment described above, and description of similar matters will be omitted.

The vibrator according to the third embodiment of the present invention is the same as that of the first embodiment described above except that the configuration of the weight portion is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 11, a weight portion 12 </ b> B is provided on the vibrating arm 5. Although not shown, a weight portion similar to the weight portion 12B is also provided on the vibrating arm 6.

In the weight portion 12B, the first layer 121B, the second layer 122B, the third layer 123B, the fourth layer 124B, and the fifth layer 125B are laminated in this order from the upper side (+ Z side) to the lower side (−Z side). It is comprised by the laminated body.
In the present embodiment, the area of the first layer 121B, the third layer 123B, and the fifth layer 125B is smaller as the layer is located on the side opposite to the vibrating arm 5. That is, the area of the first layer 121B is smaller than the area of the third layer 123B, and the area of the third layer 123B is smaller than the area of the fifth layer 125B.

The first layer 121B and the second layer 122B are formed in the same region, and the area of the first layer 121B is equal to the area of the second layer 122B. The third layer 123B and the fourth layer 124B are formed in the same region, and the area of the third layer 123B is equal to the area of the fourth layer 124B.
In the weight portion 12B, not only the first layer 121B but also the third layer 123B and the fifth layer 125B are exposed before the frequency adjustment.

Thus, for example, when the necessary frequency adjustment amount is large, the first layer to be removed is the first layer 121B, and when the necessary frequency adjustment amount is small, the first layer to be removed is the third layer 123B or the fifth layer. 125B.
According to the third embodiment as well, even if the frequency adjustment range is increased, it is possible to suppress the occurrence of burrs when part of the frequency adjustment weight portion is removed by a laser.

<Fourth embodiment>
Next, a fourth embodiment of the vibrator of the invention will be described.
FIG. 12 is a longitudinal sectional view showing the weight portion of the resonator element according to the fourth embodiment of the invention.
Hereinafter, the vibrator of the fourth embodiment will be described focusing on the differences from the first embodiment described above, and description of similar matters will be omitted.

The vibrator according to the fourth embodiment of the present invention is the same as that of the first embodiment described above except that the configuration of the weight portion is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 12, a weight portion 12 </ b> C is provided on the vibrating arm 5. Although not shown, a weight portion similar to the weight portion 12 </ b> C is also provided on the vibrating arm 6.

In the weight portion 12C, the first layer 121C, the second layer 122C, the third layer 123C, the fourth layer 124C, and the fifth layer 125C are laminated in this order from the upper side (+ Z side) to the lower side (−Z side). It is comprised by the laminated body.
In the present embodiment, the area of the first layer 121C, the third layer 123C, and the fifth layer 125C is smaller as the layer is located on the vibrating arm 5 side. That is, the area of the third layer 123C is smaller than the area of the first layer 121C, and the area of the fifth layer 125C is smaller than the area of the third layer 123C.
The second layer 122C and the third layer 123C are formed in substantially the same region. The fourth layer 124C and the fifth layer 125C are formed in substantially the same region.
According to the fourth embodiment, even when the frequency adjustment range is increased, the generation of burrs when part of the frequency adjustment weight portion is removed by the laser can be suppressed.

(Oscillator)
Next, an oscillator to which the resonator element according to the invention is applied (the oscillator according to the invention) will be described.
An oscillator 10 illustrated in FIG. 13 includes a vibrator 1 and an IC chip (chip component) 80 for driving the resonator element 2. Hereinafter, the oscillator 10 will be described with a focus on differences from the above-described vibrator, and description of similar matters will be omitted.

The package 9 includes a box-shaped base 91 having a recess 911 and a plate-shaped lid 92 that closes the opening of the recess 911.
The concave portion 911 of the base 91 opens to the first concave portion 911a that opens to the upper surface of the base 91, the second concave portion 911b that opens to the central portion of the bottom surface of the first concave portion 911a, and the central portion of the bottom surface of the second concave portion 911b. And a third recess 911c.
Connection terminals 95 and 96 are formed on the bottom surface of the first recess 911a. An IC chip 80 is disposed on the bottom surface of the third recess 911c. The IC chip 80 has a drive circuit (oscillation circuit) for controlling the drive of the resonator element 2. When the resonator element 2 is driven by the IC chip 80, a signal having a predetermined frequency can be extracted.

In addition, a plurality of internal terminals 93 that are electrically connected to the IC chip 80 via wires are formed on the bottom surface of the second recess 911b. The plurality of internal terminals 93 include terminals electrically connected to external terminals (mounting terminals) 94 formed on the bottom surface of the package 9 via vias (not shown) formed on the base 91, vias (not shown), A terminal electrically connected to the connection terminal 95 through a wire and a terminal electrically connected to the connection terminal 96 through a via or a wire (not shown) are included.
In the configuration of FIG. 13, the configuration in which the IC chip 80 is arranged in the storage space has been described. However, the arrangement of the IC chip 80 is not particularly limited, and for example, on the outside of the package 9 (base bottom surface) It may be arranged.
Such an oscillator 10 can exhibit excellent reliability.

(Electronics)
Next, an electronic device to which the resonator element according to the invention is applied (electronic device according to the invention) will be described in detail with reference to FIGS.
FIG. 14 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the resonator element according to the invention is applied. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in vibrator 1 that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 15 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic apparatus including the resonator element according to the invention is applied. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates the vibrator 1 that functions as a filter, a resonator, and the like.

  FIG. 16 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the resonator element according to the invention is applied. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates a vibrator 1 that functions as a filter, a resonator, or the like.

FIG. 17 is a perspective view illustrating a configuration of a moving body (automobile) to which an electronic device including the resonator element according to the invention is applied. In this figure, a moving body 1500 has a vehicle body 1501 and four wheels 1502, and is configured to rotate the wheels 1502 by a power source (engine) (not shown) provided in the vehicle body 1501. In such a moving body 1500, the oscillator 10 (vibration piece 2) is incorporated.
According to such an electronic device, excellent reliability can be exhibited.

  In addition to the personal computer (mobile personal computer) in FIG. 14, the mobile phone in FIG. 15, the digital still camera in FIG. 16, and the mobile body in FIG. Inkjet ejection device (for example, inkjet printer), laptop personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, Word processor, workstation, videophone, security TV monitor, electronic binoculars, POS terminal, medical equipment (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish finder , Various measuring instruments, instruments (eg , Gages for vehicles, aircraft, and ships), can be applied to a flight simulator or the like.

As described above, the resonator element, the frequency adjusting method of the resonator element, the vibrator, the oscillator, and the electronic device of the present invention have been described based on the illustrated embodiments. However, the present invention is not limited to this, and the configuration of each unit Can be replaced with any structure having a similar function. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.
Further, the vibrating piece is not limited to an oscillator, and can be applied to a sensor such as a gyro sensor, for example.

DESCRIPTION OF SYMBOLS 1 ... vibrator 2 ... vibration piece 3 ... crystal substrate 4 ... base 5 ... vibration arm 5X ... vibration arm 6 ... vibration arm 7 ... support part 9 ... package 10 ... oscillator 11 ... Conductive adhesive 12 ... Weight part 12A ... Weight part 12B ... Weight part 12C ... Weight part 12X ... Weight part 12X1 ... Burr 12X2 ... Burr 13 ... Weight part 51 ... Main surface 52 ... Main surface 53 ... Side surface 54 ... Side surface 55 ... Groove 56 ... Groove 59 ... Hammer head 61 ... Main surface 62 ... Main surface 63 ... Side surface 64 ... Side surface 65 ... Groove 66 ... Groove 69 ...... Hammerhead 71 ... Connection 72 ... Connection arm 73 ... Connection arm 74 ... Support arm 75 ... Support arm 80 ... Chip 84 ... First drive electrode 85 ... Second drive electrode 91 …… Base 92 …… Lid 93 …… Inside Element 94 ... External terminal 95 ... Connection terminal 96 ... Connection terminal 100 ... Display part 121 ... First layer 121A ... First layer 121B ... First layer 121C ... First layer 122 ... Second Layer 122A ... Second layer 122B ... Second layer 122C ... Second layer 123 ... Third layer 123A ... Third layer 123B ... Third layer 123C ... Third layer 123X ... Remaining 124 ... 4th layer 124A ... 4th layer 124B ... 4th layer 124C ... 4th layer 125 ... 5th layer 125A ... 5th layer 125B ... 5th layer 125C ... 5th layer 126 ... part 127 ··· Part 128 ············································································································· 5 ...... Recess 951 ... Connection terminal 952 ... Through electrode 953 ... External terminal 961 ... Connection terminal 962 ... Through electrode 963 ... External terminal 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main unit 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1312 ... Video signal output Terminal 1314 Input / output terminal 1430 Television monitor 1440 Personal computer 1500 Mobile unit 1501 Car body 1502 Wheel L Line segment ΔF Frequency difference

Claims (11)

The base,
A vibrating arm extending from the base;
A weight adjustment weight portion provided on the vibrating arm,
The weight portion includes a first layer, a second layer provided on the vibrating arm side with respect to the first layer, and a third layer provided on the vibrating arm side with respect to the second layer. Consisting of
The constituent material of the second layer has a melting point higher than that of the constituent materials of the first layer and the third layer. The base,
A vibrating arm extending from the base;
A weight adjustment weight portion provided on the vibrating arm,
The weight portion includes a first layer, a second layer provided on the vibrating arm side with respect to the first layer, and a third layer provided on the vibrating arm side with respect to the second layer. Consisting of
The constituent material of the second layer has a thermal conductivity lower than that of the constituent materials of the first layer and the third layer.   The resonator element according to claim 2, wherein the constituent material of the second layer has a melting point higher than that of the constituent materials of the first layer and the third layer.   4. The resonator element according to claim 1, wherein each of the constituent materials of the first layer and the third layer has a specific gravity greater than that of the constituent material of the second layer.   5. The resonator element according to claim 1, wherein a thickness of each of the first layer and the third layer is greater than a thickness of the second layer.   The resonator element according to claim 5, wherein a thickness of the first layer is larger than a thickness of the third layer. The weight portion includes a fourth layer provided on the vibrating arm side with respect to the third layer, and a fifth layer provided on the vibrating arm side with respect to the fourth layer,
7. The resonator element according to claim 1, wherein the constituent material of the fourth layer has a melting point higher than that of the constituent materials of the first layer, the third layer, and the fifth layer. A vibrating piece according to any one of claims 1 to 7 is prepared,
A method for adjusting a frequency of a resonator element, wherein the resonance frequency of the vibrating arm is adjusted by removing at least a part of the weight portion from the first layer side for each layer. The resonator element according to any one of claims 1 to 7,
And a package for housing the resonator element. The resonator element according to any one of claims 1 to 7,
And an oscillation circuit electrically connected to the resonator element.   An electronic device comprising the resonator element according to claim 1.

Images