JP2012044578A - Vibration piece, frequency adjustment method, resonator, vibration device, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece and a frequency adjustment method that allow easy and high-precision frequency adjustment, and to provide a reliable resonator, a reliable vibration device, and a reliable electronic apparatus, having the vibration piece.SOLUTION: A vibration piece according to the invention includes a base 27, and vibration arms 28 and 29 that extend from the base 27 in a direction of a Y-axis. The vibration arms 28 and 29 have upper surfaces 281 and 291, respectively, and lower surfaces 282 and 292, respectively, which face each other in a direction of a Z-axis. The upper surfaces 281 and 291 are provided with first mass portions 51 and 52, respectively. The lower surfaces 282 and 292 are provided with second mass portions 54 and 55, respectively. At least one of the first mass portion 51 and the second mass portion 54 has a portion that does not face the other in planar view from the direction of the Z-axis. At least one of the first mass portion 52 and the second mass portion 55 has a portion that does not face the other in planar view from the direction of the Z-axis.

Description

  The present invention relates to a resonator element, a frequency adjustment method, a vibrator, a vibration device, and an electronic apparatus.

As a vibrating device such as a crystal oscillator, a vibrating device including a tuning fork type vibrating piece including a plurality of vibrating arms is known (for example, see Patent Document 1).
For example, the resonator element described in Patent Literature 1 includes a base, two vibrating arms extending from the base so as to be parallel to each other, and a pair of excitation electrodes formed on each vibrating arm. In such a resonator element, by applying a voltage to the pair of excitation electrodes, each vibrating arm bends in the plane direction of the base (so-called in-plane vibration).

  Furthermore, in the resonator element described in Patent Document 1, a metal film is provided on the tip portion of the vibrating arm, and a part of the metal film is removed by laser light irradiation so that the bending vibration frequency (resonance) of the vibrating arm is reduced. Frequency) is adjusted. Specifically, metal films for frequency adjustment are formed in the same pattern on both plate surfaces of the plate-like vibrating arms. Then, by laser beam irradiation, a part of the metal film on one plate surface of the vibrating arm and a part of the metal film on the other plate surface are simultaneously removed to perform rough adjustment, and then an argon ion beam , A part of the metal film on one plate surface of the metal arm is further removed for fine adjustment.

  However, in the frequency adjustment method described in Patent Document 1, the metal film on one plate surface of the vibrating arm and the metal film on the other plate surface have the same pattern, and the thickness of the vibrating arm is thin. Therefore, the metal film on one plate surface of the vibrating arm and the metal film on the other plate surface are simultaneously removed by the laser light irradiation. Therefore, it is difficult to remove a part of the metal film on one plate surface of the vibrating arm and a part of the metal film on the other plate surface separately by laser irradiation, and it is difficult to fine-tune the frequency. There is a problem.

JP 2008-160824 A

  An object of the present invention is to provide a resonator element and a frequency adjustment method capable of performing frequency adjustment easily and with high accuracy, and to provide a highly reliable resonator, resonator device, and electronic apparatus including the resonator element. It is to provide.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The resonator element according to the aspect of the invention includes a base formed on a plane including a first direction and a second direction orthogonal to the first direction;
A vibrating arm extending in the first direction from the base,
The resonating arm has a first surface and a second surface that are opposite to each other in a normal direction of the plane, and the first surface is provided with a first mass portion, and the second surface has a first surface. 2 mass parts are provided,
At least one of the first mass part and the second mass part has a portion that is not opposed to the other in a plan view from the normal direction.
Thereby, for example, at least one of the first mass part and the second mass part can be (selectively) removed according to the irradiation position of the energy beam. Therefore, the removal amount of the 1st mass part and the 2nd mass part by irradiation of energy rays can be adjusted with high accuracy. For this reason, the frequency (resonance frequency) can be adjusted easily and with high accuracy.

[Application Example 2]
In the resonator element according to the aspect of the invention, it is preferable that the vibrating arm bend and vibrate in the plane.
As a result, a vibration piece having excellent vibration characteristics is obtained.
[Application Example 3]
In the resonator element according to the aspect of the invention, it is preferable that the first mass portion and the second mass portion have portions formed adjacent to each other in the second direction in plan view from the normal direction. .
Thereby, the range in the 1st direction (longitudinal direction of a vibrating arm) of the 1st mass part and the 2nd mass part can be made to correspond or overlap. Therefore, it is possible to suppress the length that the first mass portion and the second mass portion occupy in the longitudinal direction (first direction) of the vibrating arm.

[Application Example 4]
In the resonator element according to the aspect of the invention, it is preferable that at least one of the first mass portion and the second mass portion is formed in a band shape.
Thereby, for example, it becomes possible to continuously irradiate the energy beam to the first mass part or the second mass part in a row, and the first mass part or the second mass part is collectively removed. can do. Therefore, the first mass part or the second mass part can be quickly removed by a desired amount. As a result, the frequency adjustment becomes easier and more accurate.

[Application Example 5]
In the resonator element according to the aspect of the invention, it is preferable that at least one of the first mass portion and the second mass portion has a plurality of block portions provided at intervals.
Thereby, it becomes easy to predict the amount of change in the frequency of the vibrating arm with respect to the removal amount of the block portion formed in the first mass portion or the second mass portion. As a result, the frequency adjustment becomes easier and more accurate.

[Application Example 6]
In the resonator element according to the aspect of the invention, it is preferable that the first mass portion and the second mass portion are formed in a band shape and have portions that intersect each other in plan view from the normal direction.
Accordingly, when the first mass portion and the second mass portion are formed on the vibrating arm, the first direction and the second direction are not required for positioning in the first direction and the second direction without high accuracy. When viewed from the normal direction of the plane including the direction, the first mass portion and the second mass portion have portions that do not overlap each other.

[Application Example 7]
In the resonator element according to the aspect of the invention, it is preferable that the second mass unit is made of a material having a specific gravity smaller than that of the constituent material of the first mass unit.
Thereby, the amount of change in the frequency (resonance frequency) of the vibrating arm with respect to the removal amount of the first mass part is made larger than the amount of change in the frequency (resonance frequency) of the vibration arm with respect to the removal amount of the second mass part. Can do. Therefore, by using the first mass part for coarse adjustment and the second mass part for fine adjustment, the frequency adjustment becomes simpler and more accurate.

[Application Example 8]
In the resonator element according to the aspect of the invention, it is preferable that at least one of the first mass portion and the second mass portion is configured using one of a metal material and a ceramic material.
A metal or an insulating material (for example, ceramics) can be easily and accurately formed by a vapor deposition method. A film (weight film) made of metal or an insulating material can be easily and accurately removed by irradiation with energy rays (particularly laser). For this reason, the first and second mass parts are each formed by depositing a metal or an insulating material, whereby the frequency adjustment is simpler and more accurate.

[Application Example 9]
In the resonator element according to the aspect of the invention, it is preferable that the thickness of the first mass portion is thicker than the thickness of the second mass portion.
Thereby, the amount of change in the frequency (resonance frequency) of the vibrating arm with respect to the removal amount of the first mass part is made larger than the amount of change in the frequency (resonance frequency) of the vibration arm with respect to the removal amount of the second mass part. Can do. Therefore, by using the first mass part for coarse adjustment and the second mass part for fine adjustment, the frequency adjustment becomes simpler and more accurate.

[Application Example 10]
In the resonator element according to the aspect of the invention, it is preferable that the first mass portion and the second mass portion are provided in the vicinity of the tip of the vibrating arm.
Thereby, the variation | change_quantity of the frequency (resonance frequency) of the vibrating arm with respect to the removal amount of a 1st mass part and a 2nd mass part can be enlarged. Therefore, frequency adjustment can be performed efficiently. In addition, the excitation electrode and the piezoelectric element are formed from the base end portion of the vibrating arm to the vicinity of the center, and an effective space is provided near the tip of the vibrating arm for the installation of the first mass portion and the second mass portion. Can be used. Therefore, it is possible to reduce the length of the vibrating arm, and thus to reduce the size of the vibrating piece.

[Application Example 11]
In the resonator element according to the aspect of the invention, it is preferable that a plurality of the vibrating arms are provided side by side in the second direction, and two adjacent vibrating arms bend and vibrate in directions opposite to each other.
Thereby, the leakage vibrations of the two vibrating arms adjacent to each other can be canceled each other. As a result, a vibration piece with less vibration leakage can be realized.

[Application Example 12]
The frequency adjustment method of the present invention includes a step of preparing the resonator element of the present invention,
Adjusting the resonance frequency of the vibrating arm by increasing or decreasing the mass of at least one of the first mass part and the second mass part.
Thereby, for example, the first mass part and the second mass part can be separately (selectively) removed according to the irradiation position of the energy beam. Therefore, frequency (resonance frequency) adjustment can be performed easily and with high accuracy.

[Application Example 13]
The vibrator of the present invention includes the resonator element of the present invention,
And a package containing the resonator element.
Thereby, a vibrator having excellent reliability can be provided.
[Application Example 14]
The vibrating device of the present invention includes the vibrating piece of the present invention,
And an oscillation circuit connected to the resonator element.
Thereby, it is possible to provide a vibration device such as an oscillator having excellent reliability.
[Application Example 15]
An electronic apparatus according to the present invention includes the resonator element according to the present invention.
Thereby, it is possible to provide electronic devices such as a mobile phone, a personal computer, and a digital camera that are excellent in reliability.

1 is a cross-sectional view showing a vibrator according to a first embodiment of the present invention. FIG. 2 is a top view showing the vibrator shown in FIG. 1. (A) is the sectional view on the AA line in FIG. 2, (b) is the sectional view on the BB line in FIG. Partial enlarged view for explaining the first mass part and the second mass part shown in FIG. 3B ((a) is a top view, and (b) is a cross-sectional view taken along line CC in (a)). Figure). FIG. 3 is a diagram for explaining a method for adjusting the frequency of the resonator element shown in FIG. 2. The elements on larger scale for demonstrating the 1st mass part and 2nd mass part which concern on 2nd Embodiment of this invention ((a) is a top view, (b) is DD in (a). FIG. The elements on larger scale for demonstrating the 1st mass part and 2nd mass part which concern on 3rd Embodiment of this invention ((a) is a top view, (b) is EE in (a). FIG. The elements on larger scale for demonstrating the 1st mass part and 2nd mass part which concern on 4th Embodiment of this invention ((a) is a top view, (b) is FF in (a). FIG. The elements on larger scale for demonstrating the 1st mass part and 2nd mass part which concern on 5th Embodiment of this invention ((a) is a top view, (b) is GG in (a). (C) is a sectional view taken along line HH in (a). An electronic apparatus (notebook personal computer) including the resonator element according to the invention. It is an electronic device (cellular phone) including the resonator element according to the invention. It is an electronic device (digital still camera) provided with the resonator element according to the invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a resonator element, a frequency adjustment method, a vibrator, a vibrating device, and an electronic apparatus according to the invention will be described in detail based on embodiments shown in the accompanying drawings.
<First Embodiment>
FIG. 1 is a cross-sectional view showing a vibrator according to the first embodiment of the present invention, FIG. 2 is a top view showing the vibrator shown in FIG. 1, and FIG. A sectional view taken along line A, (b) is a sectional view taken along line BB in FIG. 2, and FIG. 4 is a partially enlarged view for explaining the first mass part and the second mass part shown in FIG. 3 (b). FIG. 5A is a top view, FIG. 5B is a cross-sectional view taken along line CC in FIG. 5A, and FIG. 5 is a diagram for explaining a method of adjusting the frequency of the resonator element shown in FIG. is there.

In each figure, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the Y-axis (first direction) is the Y-axis direction, the direction parallel to the X-axis (second direction) is the “X-axis direction”, and the direction parallel to the Z-axis (first The normal direction of the plane including the second direction and the second direction) is referred to as the Z-axis direction. In the following description, for convenience of explanation, the upper side in FIG. 1 is referred to as “upper”, the lower side as “lower”, the right side as “right”, and the left side as “left”.
A vibrator 1 shown in FIG. 1 includes a vibrating piece 2 and a package 3 that houses the vibrating piece 2.

Hereinafter, each part which comprises the vibrator | oscillator 1 is demonstrated in detail sequentially.
(Vibration piece)
First, the resonator element 2 will be described.
The resonator element 2 is a two-leg tuning fork type resonator element as shown in FIG. The resonator element 2 includes a vibration substrate 21, excitation electrodes 22 and 23 provided on the vibration substrate 21, first mass portions 51 and 52, and second mass portions 54 and 55. Yes.

The vibration substrate 21 has a base portion 27 and two vibration arms 28 and 29.
The vibration substrate 21 is made of a piezoelectric material. Examples of the piezoelectric material include crystal, lithium tantalate, lithium niobate, lithium borate, and barium titanate. Among these, quartz (X cut plate, AT cut plate, Z cut plate, etc.) is particularly preferable as the piezoelectric material constituting the vibration substrate 21. If the vibration substrate 21 is made of quartz, the vibration characteristics (particularly frequency temperature characteristics) of the vibration substrate 21 are excellent. Further, the vibration substrate 21 can be formed with high dimensional accuracy by etching.

In such a vibration substrate 21, the base 27 has a substantially plate shape with the Z-axis direction as the thickness direction.
The vibrating arms 28 and 29 are provided to extend from the base 27 so as to be parallel to each other. More specifically, the resonating arms 28 and 29 extend from the base 27 in the Y-axis direction (the Y-axis arrow direction), respectively, and are provided side by side in the X-axis direction. Each of the vibrating arms 28 and 29 has a longitudinal shape, and an end portion (base end portion) on the base portion 27 side is a fixed end, and an end portion (tip end portion) opposite to the base portion 27 is a free end.

  In addition, the vibrating arms 28 and 29 have a constant width over the entire area in the longitudinal direction. In addition, each vibrating arm 28, 29, 30 may have portions with different widths. The vibrating arms 28 and 29 are formed to have the same length. The lengths of the vibrating arms 28 and 29 are set according to the width and thickness of the vibrating arms 28 and 29 and may be different from each other.

In addition, you may provide the mass part (hammer head) with a larger cross-sectional area than a base end part in each front-end | tip part of the vibrating arms 28 and 29 as needed. In this case, the vibrating piece 2 can be made smaller, and the bending vibration frequency of the vibrating arms 28 and 29 can be further reduced.
Further, as shown in FIG. 3A, a groove 281 a is formed on the upper surface 281 of the vibrating arm 28, and a groove 282 a is formed on the lower surface 282. Similarly, a groove 291 a is formed on the upper surface 291 of the vibrating arm 29, and a groove 292 a is formed on the lower surface 292.

  These grooves 281a, 282a, 291a, 292a are provided to extend in the Y-axis direction and have the same shape. The grooves 281 a and 282 a are formed so as to exclude the tip of the vibrating arm 28, and the grooves 291 a and 292 a are also formed so as to exclude the tip of the vibrating arm 29. In other words, the cross-sectional shape of the base end side (portion excluding the tip portion) of the vibrating arms 28 and 29 is substantially “H”. By forming such grooves 281a, 282a, 291a, and 292a, it is difficult for heat generated by bending vibration to diffuse (heat conduction), and thermoelastic loss can be suppressed.

As shown in FIG. 3A, excitation electrodes 22 and 23 are formed on the vibrating arms 28 and 29, respectively.
The excitation electrode 22 is formed on each of the grooves 281 a and 282 a of the vibrating arm 28 and both side surfaces 293 and 294 of the vibrating arm 29. The excitation electrode 22 composed of these four electrode portions is electrically connected to a connection electrode 41 provided on the base portion 27 through wiring. On the other hand, the excitation electrode 23 is formed on both side surfaces 283 and 284 of the vibrating arm 28 and the grooves 291 a and 292 a of the vibrating arm 29. The excitation electrode 23 composed of these four electrode portions is electrically connected to a connection electrode 42 provided on the upper surface of the base portion 27 through wiring.

  Such excitation electrodes 22 and 23 (hereinafter, the same applies to the connection electrodes 41 and 42 and the wiring) are gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), It can be formed of a metal material such as zinc (Zn) or zirconium (Zr).

  Among them, as a constituent material of the excitation electrodes 22 and 23, it is preferable to use a metal (gold, gold alloy) mainly composed of gold or platinum, and a metal (particularly gold) mainly composed of gold is more preferable. preferable. Au is suitable as an electrode material because it has excellent conductivity (low electrical resistance) and excellent resistance to oxidation. Further, Au can be easily patterned by etching as compared with Pt.

Moreover, although the average thickness of the excitation electrodes 22 and 23 is not specifically limited, For example, it is preferable that it is about 1-300 nm, and it is more preferable that it is 10-200 nm. Thereby, it is possible to make the excitation electrodes 22 and 23 excellent in conductivity while preventing the excitation electrodes 22 and 23 from adversely affecting the vibration characteristics of the vibrating arms 28 and 29.
For example, when the excitation electrodes 22 and 23 are made of gold and the vibration substrate 21 is made of quartz, their adhesion is low. Therefore, in such a case, it is preferable to provide an underlayer composed of Ti, Cr or the like between the excitation electrodes 22 and 23 and the vibration substrate 21. As a result, the adhesion between the underlayer and the vibrating arms 28 and 29 and the adhesion between the underlayer and the excitation electrodes 22 and 23 are enhanced, and the excitation electrodes 22 and 23 are peeled off from the vibrating arms 28 and 29. And the reliability of the resonator element 2 can be improved.

The average thickness of the underlayer is not particularly limited as long as it can prevent the underlayer from adversely affecting the vibration characteristics of the vibrating arms 28 and 29 and can exhibit the effect of improving the adhesion as described above. For example, the thickness is preferably about 1 to 300 nm.
In the resonator element 2, when a drive signal (voltage) is applied between the excitation electrodes 22 and 23 via the connection electrodes 41 and 42, the vibrating arms 28 and 29 are driven at a predetermined frequency in the direction of arrow C (the vibrating arms 28 and 28). Bending vibration (resonance) alternately in the direction in which 29 is away from each other and in the direction of arrow D (in the direction in which the vibrating arms 28 and 29 approach each other). In this way, by causing the vibrating arms 28 and 29 to bend and vibrate in directions opposite to each other, leakage vibrations generated by the vibrating arms 28 and 29 can be canceled each other. As a result, vibration leakage can be prevented. In addition, by vibrating the vibrating arms 28 and 29 in the plane of the vibrating piece 2 (in the XY plane), excellent oscillation characteristics can be exhibited.

(First mass part and second mass part)
As shown in FIG. 3B, the first mass unit 51 is provided on the upper surface (first surface) 281 of the vibrating arm 28, and the lower surface (second surface) 282 of the vibrating arm 28. A second mass part 54 is provided above. Each of the first mass unit 51 and the second mass unit 54 adjusts the resonance frequency of the vibrating arm 28 by, for example, reducing the mass by removing part or all of the first mass unit 51 and the second mass unit 54 by irradiation with energy rays. Is for. Similarly, the first mass portion 52 is provided on the upper surface (first surface) 291 of the vibrating arm 29, and the second mass 292 is provided on the lower surface (second surface) 292 of the vibrating arm 29. A mass part 55 is provided.

Hereinafter, the first mass unit 51 and the second mass unit 54 provided on the vibrating arm 28 will be described in detail. In addition, since the 1st mass part 52 and the 2nd mass part 55 which were provided on the vibrating arm 29 are the same as the 1st mass part 51 and the 2nd mass part 54, the description is abbreviate | omitted.
As described above, the first mass unit 51 is provided on the upper surface 281 of the vibrating arm 28, and the second mass unit 54 is provided on the lower surface 282 of the vibrating arm 28. Here, the upper surface 281 and the lower surface 282 of the vibrating arm 28 are surfaces having a normal line in the Z-axis direction and facing each other. In the present embodiment, the resonating arm 28 has a plate shape, and a pair of plate surfaces constitute an upper surface 281 (first surface) and a lower surface 282 (second surface).

As shown in FIGS. 4A and 4B, the first mass portion 51 and the second mass portion 54 are portions that do not overlap each other when viewed from the Z-axis direction (that is, when viewed in plan). Have That is, the first mass unit 51 is provided on the upper surface 281, the second mass unit 54 is provided on the lower surface 282, and the first mass unit 51 and the second mass unit 54 are provided on the upper surface 281 or the lower surface 282. It can be said that when viewed in a plan view from the normal direction (that is, the Z-axis direction), there are portions that do not face each other.
Thereby, the 1st mass part 51 and the 2nd mass part 54 can be removed separately (selectively) according to the irradiation position of an energy ray, for example. Therefore, the removal amount of the first mass unit 51 and the second mass unit 54 can be adjusted with high accuracy. For this reason, the frequency (resonance frequency) can be adjusted easily and with high accuracy.

More specifically, the first mass unit 51 includes a mass unit 511 and a mass unit 512 provided side by side on the proximal end side of the vibrating arm 28 with respect to the mass unit 511.
The mass part 511 and the mass part 512 are respectively provided on the upper surface 281 of the vibrating arm 28 at the center in the X-axis direction.
In the present embodiment, the mass parts 511 and 512 each have a strip shape (rectangular shape) whose longitudinal direction is the Y-axis direction. In addition, the mass portions 511 and 512 have the same width. Further, the length of the mass part 511 in the Y-axis direction is longer than the length of the mass part 512 in the Y-axis direction.

By forming the mass parts 511 and 512 into a strip shape, for example, it becomes possible to continuously irradiate the first mass part 51 (mass parts 511 and 512) in a line with the first mass part. 51 can be removed at once. Therefore, the first mass part 51 can be quickly removed by a desired amount. As a result, the frequency adjustment becomes easier and more accurate.
Further, the mass part 511 and the mass part 512 are separated from each other in the Y-axis direction. The separation distance is not particularly limited, but is preferably 1/2 or more (particularly one or more) of an energy ray irradiation region (particularly the spot diameter of laser light) used for frequency adjustment described later.

On the other hand, the second mass unit 54 includes mass units 541 and 542, and mass units 543 and 544 provided side by side on the proximal end side of the vibrating arm 28 with respect to the mass units 541 and 542.
The mass portion 541 and the mass portion 543 are provided on one end portion (left end portion in FIG. 4) in the X-axis direction on the lower surface 282 of the vibrating arm 28, respectively, while the mass portion 542 and the mass portion 544 are provided. Are respectively provided on the lower surface 282 of the vibrating arm 28 at the other end in the X-axis direction (the right end in FIG. 4).

  In the present embodiment, the mass portions 541, 542, 543, and 544 each have a strip shape (rectangular shape) whose longitudinal direction is the Y-axis direction. Further, the mass parts 541, 542, 543, and 544 have the same width. Further, the length of the mass parts 541 and 542 in the Y-axis direction is equal to the length of the mass part 511 of the first mass part 51 described above in the Y-axis direction. Further, the length of the mass parts 543 and 544 in the Y-axis direction is equal to the length of the mass part 512 of the first mass part 51 described above in the Y-axis direction.

Further, the mass part 541 and the mass part 543 are separated from each other in the Y-axis direction. Further, the mass part 542 and the mass part 544 are separated from each other in the Y-axis direction. Each of these separation distances is not particularly limited, but is preferably 1/2 or more (especially 1 or more) of an irradiation region (especially a laser beam spot diameter) of energy rays used for frequency adjustment described later.
Further, the mass part 541 and the mass part 542 are separated from each other in the X-axis direction. Further, the mass part 543 and the mass part 544 are separated from each other in the X-axis direction. These separation distances are longer than the lengths in the X-axis direction of the mass portions 511 and 512 of the first mass portion 51 described above.

  The first mass unit 51 and the second mass unit 54 are provided so as not to overlap in the X-axis direction when viewed from the Z-axis direction. That is, when the first mass unit 51 and the second mass unit 54 have portions formed adjacent to each other in the X-axis direction (second direction) when viewed in a plan view from the Z-axis direction. I can say. Thereby, the range in the Y-axis direction of the 1st mass part 51 and the 2nd mass part 54 can be made to correspond or overlap. Therefore, it is possible to suppress the length that the first mass portion 51 and the second mass portion 54 occupy in the longitudinal direction (Y-axis direction) of the vibrating arm 28. The first mass unit 51 and the second mass unit 54 are part of the mass unit (for example, near the boundary between the first mass unit 51 and the second mass unit 54 when viewed from the Z-axis direction). The edges of the mass parts may overlap.

  Further, when viewed from the Z-axis direction, the mass parts 511 and 512 of the first mass part 51 and the mass parts 541 and 543 of the second mass part 54 are provided at an interval in the X-axis direction, Similarly, the mass parts 511 and 512 of the first mass part 51 and the mass parts 542 and 544 of the second mass part 54 are provided at an interval in the X-axis direction. Thereby, when irradiating an energy ray so that it may mention later, it can remove for every mass part. Here, each of these intervals is preferably at least 1/2 (especially 1 or more) of the irradiation region (especially the laser beam spot diameter) of energy rays used for frequency adjustment described later.

The first mass unit 51 and the second mass unit 54 are provided on the distal end side (near the distal end) of the vibrating arm 28, respectively. Thereby, the change amount of the frequency (resonance frequency) of the vibrating arm 28 with respect to the removal amount of the first mass part 51 and the second mass part 54 can be increased. Therefore, frequency adjustment can be performed efficiently. In addition, since the excitation electrodes 22 and 23 as described above are not provided at the distal end portion of the vibrating arm 28, it can be used effectively for the installation of the first mass portion 51 and the second mass portion 54. Therefore, the vibration arm 28 can be shortened, and the vibration piece 2 can be downsized.
Further, the first mass part 51 and the second mass part 54 have the same range in the Y-axis direction. As a result, the vibration arm 28 can be shortened, and the vibration piece 2 can be downsized.

The constituent materials of the first mass unit 51 and the second mass unit 54 are not particularly limited as long as they can be formed on the vibrating arm 28. For example, a resin material, A metal material, a ceramic material, or the like can be used.
In particular, the constituent material of the first mass part 51 and the second mass part 54 is preferably a metal material or a ceramic material. That is, the first mass part 51 and the second mass part 54 are preferably formed by depositing a metal or a ceramic, respectively.

  Metal or ceramics (insulating material) can be easily and accurately deposited by a vapor deposition method. A film (weight film) made of metal or ceramics can be easily and accurately removed by irradiation with energy rays (particularly laser). For this reason, by forming the first mass portion 51 and the second mass portion 54 by depositing a metal or a ceramic, respectively, the frequency adjustment becomes easier and more accurate.

  Examples of the metal material include gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (like the constituent materials of the excitation electrodes 22 and 23 described above. Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr) Among these, one type or two or more types can be used in combination. Among these, it is preferable to use Al, Cr, Fe, Ni, Cu, Ag, Au, Pt, or an alloy containing at least one of these as the metal material.

Moreover, as ceramics used for the constituent material of the first mass part 51 and the second mass part 54, various glasses, alumina (aluminum oxide), silica (silicon oxide), titania (titanium oxide), zirconia, yttria, calcium phosphate Oxide ceramics such as silicon nitride, aluminum nitride, titanium nitride, boron nitride and other nitride ceramics, graphite, tungsten carbide and other carbide based ceramics, and others such as barium titanate, strontium titanate, PZT, PLZT, PLLZT And other ferroelectric materials. Among these, it is preferable to use an insulating material such as silicon oxide (SiO ₂ ), titanium oxide (TiO ₂ ), aluminum oxide (Al ₂ O ₃ ) as the ceramic.

  In addition, it is preferable to use different materials for the first mass portion 51 and the second mass portion 54. Thereby, the specific gravity of the constituent material of the 1st mass part 51 and the specific gravity of the constituent material of the 2nd mass part 54 can be varied. As a result, the change amount of the frequency (resonance frequency) of the vibrating arm 28 with respect to the removal amount of the first mass unit 51 and the change amount of the frequency (resonance frequency) of the vibration arm 28 with respect to the removal amount of the second mass unit 54 Can be different. Therefore, by using one mass part of the first mass part 51 and the second mass part 54 for coarse adjustment and the other mass part for fine adjustment, the frequency adjustment becomes simpler and more accurate. .

  Moreover, it is preferable that the first mass part 51 is made of a material having a specific gravity larger than that of the constituent material of the second mass part 54. In other words, the second mass part 54 is preferably made of a material having a specific gravity smaller than that of the constituent material of the first mass part 51. More specifically, when each of the first mass part 51 and the second mass part 54 is made of a metal material, the first mass part 51 is made of Au, Pt, Ag, or an alloy thereof, and the like. It is preferable that the second mass portion 54 is made of Al, an Al alloy, or the like.

Thereby, the amount of change (increase amount) in the frequency (resonance frequency) of the vibrating arm 28 with respect to the removal amount of the first mass unit 51 is changed to the frequency (resonance frequency) of the vibration arm 28 with respect to the removal amount of the second mass unit 54. It can be made larger than the amount of change (the amount of increase). Therefore, by using the first mass part 51 for coarse adjustment and the second mass part 54 for fine adjustment, the frequency adjustment becomes simpler and more accurate.
In the present embodiment, since the second mass unit 54 is located at both ends of the vibrating arm 28 in the X-axis direction, the second mass unit 54 is used for fine adjustment, so that the vibrating arm It is possible to prevent the vibration characteristics 28 from becoming unbalanced at both ends in the X-axis direction.

In addition, from the same viewpoint as the specific gravity described above, the density of the first mass part 51 is preferably larger than the density of the second mass part 54. In other words, the density of the second mass part 54 is preferably smaller than the density of the first mass part 51. For example, by configuring the second mass unit 54 with a porous body, even if the first mass unit 51 and the second mass unit 54 use the same constituent material, the density of the second mass unit 54 Can be made smaller than the density of the first mass part 51.
The thickness (average thickness) of the first mass part 51 is preferably thicker than the thickness (average thickness) of the second mass part 54. In other words, the thickness (average thickness) of the second mass portion 54 is preferably thinner than the thickness (average thickness) of the first mass portion 51.

  Thereby, the amount of change (increase amount) in the frequency (resonance frequency) of the vibrating arm 28 with respect to the removal amount of the first mass unit 51 is changed to the frequency (resonance frequency) of the vibration arm 28 with respect to the removal amount of the second mass unit 54. The amount of change (the amount of increase) can be made larger. Therefore, by using the first mass part 51 for coarse adjustment and the second mass part 54 for fine adjustment, the frequency adjustment becomes simpler and more accurate.

In the present embodiment, since the second mass unit 54 is located at both ends of the vibrating arm 28 in the X-axis direction, the second mass unit 54 is used for fine adjustment, so that the vibrating arm It is possible to prevent the vibration characteristics 28 from becoming unbalanced at both ends in the X-axis direction.
Further, the thickness (average thickness) of the first mass portion 51 is preferably 1 to 10 times the thickness (average thickness) of the second mass portion 54, and preferably 1 to 8 times. The following is more preferable.
Moreover, the thickness (average thickness) of the first mass unit 51 and the second mass unit 54 is not particularly limited, but is preferably about 1 to 1000 nm. Thereby, the 1st mass part 51 and the 2nd mass part 54 which prescribed | regulated thickness with high precision can be obtained easily.

(Frequency adjustment method)
Next, a method for adjusting the frequency of the resonator element 2 configured as described above will be described with reference to FIG. In the following, a case where the first mass unit 51 is used for coarse adjustment and the second mass unit 54 is used for fine adjustment will be described as an example. In the following, the frequency adjustment of the vibrating arm 28 will be described as a representative, but the frequency adjustment of the vibrating arms 29 and 30 is the same as the frequency adjustment of the vibrating arm 28.
The frequency adjustment method of the resonator element 2 includes: [1] a step of preparing the resonator element 2 (before frequency adjustment), and [2] at least one mass part of the first mass part 51 and the second mass part 54. Removing a part or all of the above by energy beam irradiation, thereby reducing the mass of the mass part and adjusting the resonance frequency of the vibrating arm 28.

Hereinafter, the steps [1] and [2] will be sequentially described.
[1]
First, the resonator element 2 before frequency adjustment (unadjusted) is prepared.
At this time, as shown in FIG. 5A, on the vibrating arm 28, the first mass unit 51 composed of the mass units 511 and 512 as described above, and the mass units 541, 542, 543 and 544 are provided. And a second mass part 54 constituted by the following.
At this time, the frequency (resonance frequency) of the vibrating arm 28 is set to be lower than the target frequency (resonance frequency).

[2]
(Coarse adjustment)
First, the frequency is roughly adjusted.
Specifically, as shown in FIG. 5B, a part or all of the first mass part 51 is removed as necessary by irradiation with energy rays.

  In FIG.5 (b), the case where all the mass parts 511 of the 1st mass part 51 are removed is illustrated as an example. Therefore, on the vibrating arm 28 after irradiation with the energy beam, a first mass unit 151 after coarse adjustment constituted by a mass unit 512 is provided. In addition, the shape of the 1st mass part 51 removed in this rough adjustment, a site | part, and its removal amount are set suitably as needed, and are not limited to the thing of illustration. For example, when a part of the mass part 511 is removed by laser light irradiation, the removed part of the first mass part 51 has a shape such as a line shape or a dot shape.

  By such rough adjustment, the mass of the first mass unit 51 is reduced to become the first mass unit 151, so that the frequency of the vibrating arm 28 is increased. In addition, after this rough adjustment, the frequency (resonance frequency) of the vibrating arm 28 is slightly lower than the target frequency (resonance frequency) so that the frequency can be adjusted by fine adjustment described later. . That is, the first mass portion 51 is removed by irradiation with energy rays until the frequency (resonance frequency) of the vibrating arm 28 is slightly lower than the target frequency (resonance frequency).

  Further, the energy beam used for such rough adjustment is not particularly limited as long as it can remove a necessary part of the first mass unit 51 without adversely affecting the vibrating arm 28, and radiation, An electron beam, a laser, an ion beam, and the like can be given, and it is preferable to use a laser such as a carbon dioxide laser, an excimer laser, or a YAG laser. Thereby, a part or all of the 1st mass part 51 can be removed by a desired amount easily and reliably.

(Tweak)
Thereafter, the frequency is finely adjusted.
Specifically, as shown in FIG. 5C, part or all of the second mass portion 54 is removed as necessary by irradiation with energy rays.
FIG. 5C illustrates an example in which all of the mass parts 541 and 542 of the second mass part 54 are removed. Therefore, a finely adjusted second mass portion 154 configured by mass portions 543 and 544 is provided on the vibrating arm 28 after irradiation with the energy beam. In addition, the shape of the 2nd mass part 54 removed in this fine adjustment, a site | part, and its removal amount are set suitably as needed, and are not limited to the thing of illustration. For example, when a part of the mass part 541 is removed by laser light irradiation, the removed part of the second mass part 54 has a shape such as a line shape or a dot shape.

  By such fine adjustment, the mass of the second mass portion 54 is reduced to become the second mass portion 154, so that the frequency of the vibrating arm 28 is increased. Further, after this fine adjustment, the frequency (resonance frequency) of the vibrating arm 28 is set so as to match the target frequency (resonance frequency). That is, the second mass portion 54 is removed by irradiation with energy rays until the frequency (resonance frequency) of the vibrating arm 28 matches the target frequency (resonance frequency).

The energy beam used for such fine adjustment can be the same as the energy beam used for the coarse adjustment described above, and it is preferable to use a laser such as a carbon dioxide laser, excimer laser, or YAG laser. Thereby, a part or all of the 2nd mass part 54 can be removed by a desired amount easily and reliably.
As described above, the frequency of the vibrating arm 28 can be adjusted to coincide with the target frequency. In particular, in the frequency adjustment method described above, the first mass unit 51 and the second mass unit 54 can be separately (selectively) removed according to the irradiation position of the energy beam. Therefore, frequency (resonance frequency) adjustment can be performed easily and with high accuracy.

(Manufacturing method of vibrating piece)
Here, an example of a method for manufacturing the above-described resonator element 2 will be briefly described.
First, a substrate for forming the vibration substrate 21 is prepared.
Then, the vibration substrate 21 is formed by etching the substrate. Thereafter, the excitation electrodes 22 and 23, the first mass parts 51 and 52, and the second mass parts 54 and 55 are formed on the vibrating arms 28 and 29. At that time, wiring and the like are simultaneously formed as necessary.

The excitation electrodes 22 and 23, the first mass parts 51 and 52, and the second mass parts 54 and 55 can be formed by a physical film formation method such as sputtering or vacuum vapor deposition, CVD (Chemical Vapor Deposition), or the like. There are various vapor deposition methods such as the chemical vapor deposition method, and various coating methods such as an ink jet method, but it is preferable to use a vapor deposition method (particularly a sputtering method or a vacuum deposition method). In forming the excitation electrodes 22 and 23, it is preferable to use a photolithography method. The excitation electrodes 22 and 23 can be collectively formed in the same film forming process.
Thereafter, frequency adjustment as described above is performed as necessary.

The frequency adjustment may be performed before the resonator element 2 is stored in the package 3 or may be performed after the resonator element 2 is stored in the package 3. Further, one of the frequency adjustment by the first mass parts 51 and 52 and the frequency adjustment by the second mass parts 54 and 55 is performed before the resonator element 2 is stored in the package 3, and the other This frequency adjustment may be performed after the resonator element 2 is housed in the package 3.
As described above, the resonator element 2 can be manufactured. In the example of the manufacturing method described above, the first mass parts 51 and 52 and the second mass parts 54 and 55 are formed together with the excitation electrodes 22 and 23. However, the present invention is not limited to this. It may be formed separately from the formation of the electrodes 22 and 23.

(package)
Next, the package 3 that houses and fixes the resonator element 2 will be described.
As illustrated in FIG. 1, the package 3 includes a plate-like base substrate 31, a frame-like frame member 32, and a plate-like lid member 33. The base substrate 31, the frame member 32, and the lid member 33 are laminated in this order from the lower side to the upper side. The base substrate 31 and the frame member 32 are formed of a ceramic material or the like which will be described later, and are joined by being integrally fired. The frame member 32 and the lid member 33 are joined by an adhesive or a brazing material. The package 3 houses the resonator element 2 in an internal space S defined by the base substrate 31, the frame member 32, and the lid member 33. In addition to the resonator element 2, an electronic component (oscillation circuit) for driving the resonator element 2 can be accommodated in the package 3.

As the constituent material of the base substrate 31, those having insulating properties (non-conductive) are preferable. For example, various glass materials, various ceramic materials such as oxide ceramics, nitride ceramics, carbide ceramics, polyimide, etc. Various resin materials can be used.
Moreover, as a constituent material of the frame member 32 and the lid member 33, the same constituent material as the base substrate 31, various metal materials such as Al and Cu, various glass materials, and the like can be used, for example. In particular, when a material having light transmissivity such as a glass material is used as the constituent material of the lid member 33, the mass described above via the lid member 33 even after the resonator element 2 is accommodated in the package 3. The frequency of the resonator element 2 can be adjusted by irradiating the part with laser and removing the metal coating part to reduce the mass of the resonator element 2 (by a mass reduction method).

On the upper surface of the base substrate 31, the above-described vibrating piece 2 is fixed via a fixing material 36. The fixing material 36 is made of, for example, an epoxy, polyimide, or silicone adhesive. In such a fixing material 36, an uncured (unsolidified) adhesive is applied onto the base substrate 31, and the vibration piece 2 is placed on the adhesive, and then the adhesive is cured or solidified. Is formed. Thereby, the resonator element 2 (base portion 27) is securely fixed to the base substrate 31.
In addition, you may perform this fixation using electrically conductive adhesives, such as an epoxy type, a polyimide type, and a silicone type containing electroconductive particle.

In addition, a pair of electrodes 35 a and 35 b are formed on the upper surface of the base substrate 31 so as to be exposed to the internal space S.
The electrode 35a is electrically connected to the connection electrode 42 described above via, for example, a metal wire (bonding wire) 38 formed by a wire bonding technique. The electrode 35b is electrically connected to the connection electrode 41 described above via a metal wire (bonding wire) 37 formed by, for example, a wire bonding technique.

In addition, the connection method of a pair of electrode 35a, 35b and the connection electrodes 41 and 42 is not limited to this, For example, you may carry out with a conductive adhesive. In this case, for example, the front and back of the vibrating piece 2 may be reversed, or the connection electrodes 41 and 42 may be formed on the lower surface of the vibrating piece 2.
Further, four external terminals 34 a, 34 b, 34 c, 34 d are provided on the lower surface of the base substrate 31. Out of these four external terminals 34a to 34d, the external terminals 34a and 34b are electrically connected to the electrodes 35a and 35b through conductor posts (not shown) provided in via holes formed in the base substrate 31, respectively. It is a connected hot terminal. Further, the other two external terminals 34c and 34d are used to increase the bonding strength and to equalize the distance between the package 3 and the mounting board when the package 3 is mounted on the mounting board, respectively. Dummy terminal.

Such electrodes 35a and 35b and external terminals 34a to 34d can be formed, for example, by applying gold plating to an underlying layer of tungsten and nickel plating.
When an electronic component is housed inside the package 3, the lower surface of the base substrate 31 can be used to check the characteristics of the electronic component and various information in the electronic component (for example, temperature compensation information of the vibrator) as necessary. A write terminal for rewriting (adjustment) may be formed.

According to the first embodiment as described above, the first mass unit 51 and the second mass unit 54 have portions that do not overlap each other when viewed from the Z-axis direction (that is, when viewed in plan). Therefore, the first mass part 51 and the second mass part 54 can be separately (selectively) removed according to the irradiation position of the energy rays. Therefore, the removal amount of the first mass unit 51 and the second mass unit 54 by irradiation with energy rays can be adjusted with high accuracy. For this reason, the frequency (resonance frequency) can be adjusted easily and with high accuracy.
Further, the vibrator 1 including such a vibrating piece 2 is excellent in reliability.

Second Embodiment
Next, a second embodiment of the present invention will be described.
FIG. 6: is the elements on larger scale for demonstrating the 1st mass part and 2nd mass part which concern on 2nd Embodiment of this invention ((a) is a top view, (b) is in (a). FIG.
Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The second embodiment is substantially the same as the first embodiment except that the configurations of the first mass unit and the second mass unit are different. In FIG. 6, the same reference numerals are given to the same configurations as those in the above-described embodiment. In the present embodiment, the first mass portion and the second mass portion provided on the vibrating arm 28 will be representatively described. However, the first mass portion and the second mass portion provided on the vibrating arm 29 are described. The same applies to the mass parts.

As shown in FIG. 6, the first mass portion 51 </ b> A is provided on the upper surface 281 of the vibrating arm 28, and the second mass portion 54 </ b> A is provided on the lower surface 282 of the vibrating arm 28. .
Each of the first mass part 51A and the second mass part 54A adjusts the resonance frequency of the vibrating arm 28 by reducing the mass, for example, by removing part or all of the first mass part 51A and energy mass irradiation. Is for.

More specifically, the first mass unit 51A includes a plurality of mass units 513 and a plurality of mass units 514 provided side by side on the proximal end side of the vibrating arm 28 with respect to the plurality of mass units 513. It is configured.
Here, the plurality of mass units 513 constitute a plurality of block units arranged in a matrix in the Y-axis direction and the X-axis direction. Similarly, the plurality of mass units 514 constitute a plurality of block units arranged in a matrix in the Y-axis direction and the X-axis direction.
In the present embodiment, each of the mass parts 513 and 514 has a strip shape (rectangular shape) whose longitudinal direction is the Y-axis direction. Further, the respective mass parts 513 and 514 have the same shape and size.

On the other hand, the second mass portion 54 </ b> A includes a plurality of mass portions 545 and a plurality of mass portions 546 provided side by side on the proximal end side of the vibrating arm 28 with respect to the plurality of mass portions 545.
Here, the plurality of mass units 545 constitute a plurality of block units arranged in a matrix in the Y-axis direction and the X-axis direction. Similarly, the plurality of mass units 546 constitute a plurality of block units arranged in a matrix in the Y-axis direction and the X-axis direction.

In the present embodiment, each of the mass portions 545 and 546 has a strip shape (rectangular shape) whose longitudinal direction is the Y-axis direction. Further, the respective mass portions 545 and 546 have the same shape and size.
In such first mass part 51A and second mass part 54A, when viewed from the Z-axis direction, a row of mass parts 513 arranged in the Y-axis direction and a row of mass parts 545 arranged in the Y-axis direction Are arranged so as not to alternately overlap in the X-axis direction.

Similarly, when viewed from the Z-axis direction, the rows of mass parts 514 arranged in the Y-axis direction and the rows of mass parts 546 arranged in the Y-axis direction are arranged so as not to alternately overlap in the X-axis direction.
Thus, since the first mass part 51A and the second mass part 54A each have a plurality of block parts arranged in a matrix, each block part (that is, each mass part 513, 514) is irradiated with energy rays. 545, 546), the first mass portion 51A and the second mass portion 54A can be removed. Therefore, the first mass portion 51A and the second mass portion 54A can be quickly (simplely) removed by a desired amount. Moreover, it becomes easy to predict the amount of change in the frequency of the vibrating arm 28 with respect to the removal amount of the first mass part 51A and the second mass part 54A. As a result, the frequency adjustment becomes easier and more accurate.

Further, for example, since the distance between the blocks is increased compared to the case where both the first mass part 51A and the second mass part 54A are formed on the upper surface 281, the first mass part 51A and the second mass part. 54A can be easily formed and the frequency can be adjusted more easily.
Further, according to the second embodiment as described above, the same effects as those of the first embodiment described above can be obtained.

<Third Embodiment>
Next, a third embodiment of the present invention will be described.
FIG. 7 is a partial enlarged view for explaining the first mass part and the second mass part according to the third embodiment of the present invention ((a) is a top view, and (b) is in (a). EE line sectional drawing).
Hereinafter, the third embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The third embodiment is substantially the same as the first embodiment except that the configurations of the first mass unit and the second mass unit are different. In FIG. 7, the same reference numerals are given to the same components as those in the above-described embodiment. In the present embodiment, the first mass portion and the second mass portion provided on the vibrating arm 28 will be representatively described. However, the first mass portion and the second mass portion provided on the vibrating arm 29 are described. The same applies to the mass parts.

As shown in FIG. 7, the first mass portion 51 </ b> B is provided on the upper surface 281 of the vibrating arm 28, and the second mass portion 54 </ b> B is provided on the lower surface 282 of the vibrating arm 28. .
Each of the first mass part 51B and the second mass part 54B is used to adjust the resonance frequency of the vibrating arm 28 by reducing the mass by removing part or all of the first mass part 51B and the second mass part 54B. Is.
More specifically, the first mass part 51 </ b> B is composed of a plurality of mass parts (linear parts) 515.
Each mass part 515 has a linear shape (band shape) with the X-axis direction as a longitudinal direction. Here, the plurality of mass portions 515 constitute a plurality of linear portions provided at intervals in the Y-axis direction.

On the other hand, the second mass part 54 </ b> B includes a plurality of mass parts 547.
Each mass portion 547 has a linear shape (band shape) with the X-axis direction as a longitudinal direction. Here, the plurality of mass portions 547 constitute a plurality of linear portions provided at intervals in the Y-axis direction.
In the first mass part 51B and the second mass part 54B, the mass parts 515 and the mass parts 547 are alternately arranged in the Y-axis direction so as not to overlap each other when viewed from the Z-axis direction. It is out.

Thus, since each of the first mass part 51B and the second mass part 54B has a plurality of linear parts spaced apart from each other, each linear part (that is, each mass part) is irradiated with the energy beam. The first mass part 51B and the second mass part 54B can be collectively removed by sweeping the energy beam irradiation part every 515 and 547). Therefore, the first mass portion 51B and the second mass portion 54B can be easily removed by a desired amount. As a result, the frequency adjustment becomes easier and more accurate. In addition, since the mass part (linear part) is formed at an interval, the shavings generated when the metal film is shaved with a laser can be prevented from adhering to other metal films, and the frequency shift caused by the shavings can be prevented. Can be suppressed.
Moreover, according to 3rd Embodiment which was demonstrated above, there can exist an effect similar to 1st Embodiment mentioned above.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described.
FIG. 8 is a partially enlarged view for explaining the first mass part and the second mass part according to the fourth embodiment of the present invention ((a) is a top view, and (b) is in (a). FIG.
Hereinafter, the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The fourth embodiment is substantially the same as the first embodiment except that the configurations of the first mass unit and the second mass unit are different. In FIG. 8, the same components as those in the above-described embodiment are denoted by the same reference numerals. In the present embodiment, the first mass portion and the second mass portion provided on the vibrating arm 28 will be representatively described. However, the first mass portion and the second mass portion provided on the vibrating arm 29 are described. The same applies to the mass parts.

As shown in FIG. 8, the first mass portion 51 </ b> C is provided on the upper surface 281 of the vibrating arm 28, and the second mass portion 54 </ b> C is provided on the lower surface 282 of the vibrating arm 28. .
Each of the first mass part 51C and the second mass part 54C is used to adjust the resonance frequency of the vibrating arm 28 by reducing the mass by removing part or all of the first mass part 51C and the second mass part 54C. Is.
More specifically, the first mass part 51 </ b> C includes a plurality of mass parts (linear parts) 516.
Each mass portion 516 has a linear shape (band shape) with the Y-axis direction as a longitudinal direction. Here, the plurality of mass portions 516 constitutes a plurality of linear portions provided at intervals in the X-axis direction.

On the other hand, the second mass unit 54 </ b> C includes a plurality of mass units 548.
Each mass portion 548 has a linear shape (band shape) with the Y-axis direction as a longitudinal direction. Here, the plurality of mass portions 548 constitute a plurality of linear portions provided at intervals in the X-axis direction.
In the first mass part 51C and the second mass part 54C as described above, the mass parts 516 and the mass parts 548 are alternately arranged in the X-axis direction so as not to overlap each other when viewed from the Z-axis direction. It is out.

  As described above, since the first mass part 51C and the second mass part 54C each have a plurality of linear parts spaced from each other, each linear part (that is, each mass part) is irradiated with the energy beam. The first mass portion 51C and the second mass portion 54C can be removed every 516 and 548). Therefore, the first mass part 51C and the second mass part 54C can be easily removed by a desired amount. As a result, the frequency adjustment becomes easier and more accurate. In addition, since the mass part (linear part) is formed at an interval, the shavings generated when the metal film is shaved with a laser can be prevented from adhering to other metal films, and the frequency shift caused by the shavings can be prevented. Can be suppressed.

Further, by irradiating the laser beam in a line shape, the mass portion of the vibrating arm 28 and the mass portion on the vibrating arm 29 can be processed (removed) continuously, so that the frequency adjustment is performed in a shorter time. be able to.
Further, according to the fourth embodiment as described above, the same effects as those of the first embodiment described above can be obtained.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described.
FIG. 9 is a partially enlarged view for explaining the first mass part and the second mass part according to the fifth embodiment of the present invention ((a) is a top view, and (b) is in (a). GG line sectional drawing, (c) is the HH line sectional drawing in (a).

Hereinafter, the fifth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
The fifth embodiment is substantially the same as the first embodiment except that the configurations of the first mass unit and the second mass unit are different. The fifth embodiment is substantially the same as the third embodiment except that the configuration of the first mass unit is different. The fifth embodiment is substantially the same as the fourth embodiment except that the configuration of the second mass unit is different. In FIG. 9, the same reference numerals are given to the same configurations as those in the above-described embodiment. In the present embodiment, the first mass portion and the second mass portion provided on the vibrating arm 28 will be representatively described. However, the first mass portion and the second mass portion provided on the vibrating arm 29 are described. The same applies to the mass parts.

As shown in FIG. 9, the first mass portion 51 </ b> C is provided on the upper surface 281 of the vibrating arm 28, and the second mass portion 54 </ b> B is provided on the lower surface 282 of the vibrating arm 28. .
In the present embodiment, the plurality of mass portions 516 (linear portions) of the first mass portion 51C and the plurality of mass portions 547 (linear portions) of the second mass portion 54B are provided so as to be orthogonal to each other. Yes.
Thus, when the first mass portion 51C and the second mass portion 54B are formed on the vibrating arm 28, the positioning in the Y-axis direction and the X-axis direction does not require high accuracy, and the first mass portion 51C and the second mass portion 54B are viewed from the Z-axis direction. The first mass portion 51C and the second mass portion 54B have portions that do not overlap each other.
Further, according to the fifth embodiment as described above, the same effects as those of the first embodiment described above can be obtained.
The resonator element of each embodiment as described above can be applied to various electronic devices, and the obtained electronic device has high reliability.

Here, an electronic device including the resonator element according to the invention will be described in detail with reference to FIGS.
FIG. 10 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the resonator element according to the invention is applied.
In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably.
Such a personal computer 1100 incorporates the vibrator 1 that functions as a filter, a resonator, a reference clock, and the like.

FIG. 11 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic device including the resonator element according to the invention is applied.
In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204.
Such a cellular phone 1200 incorporates the vibrator 1 that functions as a filter, a resonator, and the like.

FIG. 12 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the resonator element according to the invention is applied. In this figure, connection with an external device is also simply shown.
Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.
In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 incorporates a vibrator 1 that functions as a filter, a resonator, and the like.

  In addition to the personal computer (mobile personal computer) shown in FIG. 10, the mobile phone shown in FIG. 11, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (Eg, vehicle, aircraft, ship instrumentation) It can be applied to a flight simulator or the like.

  As described above, the resonator element, the frequency adjustment method, the vibrator, the vibration device, and the electronic apparatus of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each unit is as follows. Any structure having a similar function can be substituted. Moreover, in the said Example, although the example which irradiates an energy beam to the 1st mass part or the 2nd mass part and performed frequency adjustment was demonstrated, it is not restricted to this, and mass is obtained by ion etching, sandblasting, and wet etching. You may reduce the mass of a part. The frequency may be adjusted by increasing the mass of the mass part by attaching a film to the first mass part or the second mass part by sputtering or vapor deposition. In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

For example, in the above-described embodiment, the case where the resonator element has two vibrating arms has been described as an example. However, the number of vibrating arms may be one, or may be three or more.
In the embodiment described above, the configuration in which the two vibrating arms bend and vibrate in the in-plane direction of the resonator element has been described. However, the two vibrating arms have a configuration in which the vibrating arm bends and vibrates in the out-of-plane direction (Z-axis direction). Also good.
In addition, the resonator device of the present invention has a crystal oscillator (SPXO), a voltage controlled crystal oscillator (VCXO), a temperature compensated crystal oscillator (TCXO), and a crystal oscillator with a thermostat (OCXO) by connecting an oscillation circuit to the resonator element. In addition to piezoelectric oscillators, etc., it is applied to gyro sensors and the like.

  DESCRIPTION OF SYMBOLS 1 ... vibrator 2 ... vibration piece 3 ... package 21 ... vibration substrate 22 ... excitation electrode 23 ... excitation electrode 27 ... base 28 ... vibration arm 29 ... vibration arm 31 ... base substrate 32 ... Frame member 33 Lid member 34a, 34b, 34c, 34d External terminal 35a Electrode 35b Electrode 36 Fixing material 37 Metal wire 38 Metal wire 41 Connection electrode 42 Connecting electrode 51 ... 1st mass part 51A ... 1st mass part 51B ... 1st mass part 51C ... 1st mass part 52 ... 1st mass part 54 ... 2nd mass part 54A ... 2nd mass part 54B ... 2nd mass part 54C ... 2nd mass part 55 ... 2nd mass part 100 ... Display part 151 ... 1st mass part after adjustment 154 ... ... Second mass part after adjustment 28 Top surface 281a ... Groove 282 ... Bottom 282a ... Groove 283 ... Side 284 ... Side 291 ... Top 291a ... Groove 292 ... Bottom 292a ... Groove 293 ... Side 294 ... Side 511 ... Mass part 512 ... Mass part 513 ... Mass part 514 ... Mass part 515 ... Mass part 516 ... Mass part 541 ... Mass part 542 ... Mass part 543 ... Mass part 544 ... Mass part 545 ... Mass part 546 ... Mass part 547 ... Mass part 548 ... Mass part 1100 ... Personal computer 1102 ... Keyboard 1104 ... Body part 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Received call Mouth 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case 304 ‥‥ receiving unit 1306 ‥‥ shutter button 1308 ‥‥ memory 1312 ‥‥ video signal output terminal 1314 ‥‥ output terminal 1430 ‥‥ television monitor 1440 ‥‥ personal computer

Claims (15)

A base formed on a plane including a first direction and a second direction orthogonal to the first direction;
A vibrating arm extending in the first direction from the base,
The resonating arm has a first surface and a second surface that are opposite to each other in a normal direction of the plane, and the first surface is provided with a first mass portion, and the second surface has a first surface. 2 mass parts are provided,
At least one of the first mass part and the second mass part has a portion that is not opposed to the other in a plan view from the normal direction.   The vibrating piece according to claim 1, wherein the vibrating arm bends and vibrates in the plane.   The said 1st mass part and the said 2nd mass part have the part formed adjacent to the said 2nd direction by planar view from the said normal line direction, The 1st or 2 characterized by the above-mentioned. The resonator element according to the item.   4. The resonator element according to claim 1, wherein at least one of the first mass portion and the second mass portion is formed in a band shape. 5.   4. The vibration according to claim 1, wherein at least one of the first mass portion and the second mass portion has a plurality of block portions provided at intervals. 5. Piece.   The said 1st mass part and the said 2nd mass part are formed in strip | belt shape, and have a part which mutually cross | intersects by the planar view from the said normal line direction, The Claim 1 or 2 characterized by the above-mentioned. Vibrating piece.   7. The resonator element according to claim 1, wherein the second mass part is made of a material having a specific gravity smaller than that of the constituent material of the first mass part.   8. The resonator element according to claim 1, wherein at least one of the first mass part and the second mass part is configured using any one of a metal material and a ceramic material.   9. The resonator element according to claim 1, wherein a thickness of the first mass part is thicker than a thickness of the second mass part.   10. The resonator element according to claim 1, wherein the first mass portion and the second mass portion are provided in the vicinity of a tip of the vibrating arm.   11. The resonator element according to claim 1, wherein a plurality of the vibrating arms are provided side by side in the second direction, and two adjacent vibrating arms bend and vibrate in directions opposite to each other. Preparing a resonator element according to any one of claims 1 to 11,
Adjusting the resonance frequency of the vibrating arm by increasing or decreasing the mass of at least one of the first mass part and the second mass part. The resonator element according to any one of claims 1 to 11,
And a package containing the resonator element. The resonator element according to any one of claims 1 to 11,
And an oscillation circuit connected to the resonator element.   An electronic apparatus comprising the resonator element according to claim 1.

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