JP2014020398A - 流体制御器用アクチュエータ - Google Patents
流体制御器用アクチュエータ Download PDFInfo
- Publication number
- JP2014020398A JP2014020398A JP2012157051A JP2012157051A JP2014020398A JP 2014020398 A JP2014020398 A JP 2014020398A JP 2012157051 A JP2012157051 A JP 2012157051A JP 2012157051 A JP2012157051 A JP 2012157051A JP 2014020398 A JP2014020398 A JP 2014020398A
- Authority
- JP
- Japan
- Prior art keywords
- spring retainer
- downward
- operation air
- hole
- inner spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 50
- 230000002093 peripheral effect Effects 0.000 claims abstract description 40
- 230000001174 ascending effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/02—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
- F15B15/1476—Special return means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K21/00—Fluid-delivery valves, e.g. self-closing valves
- F16K21/04—Self-closing valves, i.e. closing automatically after operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/02—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7754—Line flow effect assisted
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
Abstract
【解決手段】 内側ばね押さえ15は、軸部22と、軸部22の下端部に設けられた円筒部23とを有し、円筒部23の下端によって付勢部材12の貫通孔12aの上側周縁部を押圧している。軸部22は、外側ばね押さえ部材16を貫通して上方にのびている。ケーシング11頂壁11dに、下端が内側ばね押さえ15の軸部22の上面に当接させられることで内側ばね押さえ15を位置決めする調整ねじ19がねじ合わされている。
【選択図】 図1
Description
Claims (2)
- ボディの上方に取り付けられるケーシングと、中央部に貫通孔を有する複数枚の円盤状ダイヤフラムスプリングからなり、貫通孔の下側周縁部によって弁棒を下方に付勢する付勢部材と、付勢部材の貫通孔の上側周縁部を下方に押圧する内側ばね押さえと、付勢部材の外周縁部を下方に押圧する外側ばね押さえと、操作エアが導入されることで外側ばね押さえを下方に押圧する操作エア導入室とを備えており、付勢部材は、操作エアが操作エア導入室に導入されていない状態で、自然状態の下方に凸の形状に対して凸の量が小さくなるように弾性変形させられて、弁棒を下方に、外側ばね押さえリングを上方にそれぞれ付勢しており、操作エアが操作エア導入室に導入されることにより、外側ばね押さえが下方に押圧されて、付勢部材が上方に凸の形状に変形するようになされている流体制御器用アクチュエータにおいて、
内側ばね押さえは、軸部と、軸部の下端部に設けられた円筒部とを有し、円筒部の下端によって付勢部材の貫通孔の上側周縁部を押圧しており、軸部は、外側ばね押さえ部材を貫通して上方にのびており、ケーシング頂壁に、下端が内側ばね押さえの軸部の上面に当接させられることで内側ばね押さえを位置決めする調整ねじがねじ合わされていることを特徴とする流体制御器用アクチュエータ。 - ケーシングに、外側ばね押さえよりも上方位置に、カウンタプレートが固定されており、ケーシングの頂壁とカウンタプレートとの間に、内側ばね押さえの軸部が挿通される貫通孔が設けられたピストンが配置されており、ピストンは、カウンタプレートを貫通して下面が外側ばね押さえの上面に当接する下方突出部を有しており、操作エアが導入される操作エア導入室は、ピストンの上側に設けられており、操作エア導入室内の操作エアは、内側ばね押さえの軸部の外周面とピストンの貫通孔の周面との間に形成された隙間から外側ばね押さえの上面上側に流入可能とされており、操作エア導入時には、ピストンおよび外側ばね押さえの両方が操作エアによって下方に押圧されることを特徴とする請求項1の流体制御器用アクチュエータ。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012157051A JP5978035B2 (ja) | 2012-07-13 | 2012-07-13 | 流体制御器用アクチュエータ |
SG11201408180WA SG11201408180WA (en) | 2012-07-13 | 2013-06-26 | Fluid controller actuator |
US14/409,139 US9416893B2 (en) | 2012-07-13 | 2013-06-26 | Fluid controller actuator |
CN201380033803.0A CN104685278B (zh) | 2012-07-13 | 2013-06-26 | 流体控制器用执行机构 |
KR1020147036126A KR101584479B1 (ko) | 2012-07-13 | 2013-06-26 | 유체 제어기용 액추에이터 |
PCT/JP2013/067429 WO2014010412A1 (ja) | 2012-07-13 | 2013-06-26 | 流体制御器用アクチュエータ |
TW102124847A TWI595179B (zh) | 2012-07-13 | 2013-07-11 | Fluid Controller with Actuator |
IL236101A IL236101B (en) | 2012-07-13 | 2014-12-07 | Operator to control Nigar |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012157051A JP5978035B2 (ja) | 2012-07-13 | 2012-07-13 | 流体制御器用アクチュエータ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014020398A true JP2014020398A (ja) | 2014-02-03 |
JP2014020398A5 JP2014020398A5 (ja) | 2016-04-14 |
JP5978035B2 JP5978035B2 (ja) | 2016-08-24 |
Family
ID=49915876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012157051A Active JP5978035B2 (ja) | 2012-07-13 | 2012-07-13 | 流体制御器用アクチュエータ |
Country Status (8)
Country | Link |
---|---|
US (1) | US9416893B2 (ja) |
JP (1) | JP5978035B2 (ja) |
KR (1) | KR101584479B1 (ja) |
CN (1) | CN104685278B (ja) |
IL (1) | IL236101B (ja) |
SG (1) | SG11201408180WA (ja) |
TW (1) | TWI595179B (ja) |
WO (1) | WO2014010412A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5750454B2 (ja) * | 2011-01-06 | 2015-07-22 | 日立建機株式会社 | 履帯式走行装置を備えた作業機の油圧駆動装置 |
CN103556669A (zh) * | 2013-10-15 | 2014-02-05 | 徐州徐工挖掘机械有限公司 | 一种液压挖掘机回转能量回收控制装置 |
CN111051754A (zh) * | 2017-09-28 | 2020-04-21 | 株式会社富士金 | 致动器、阀、以及流体控制装置 |
WO2020016917A1 (ja) * | 2018-07-17 | 2020-01-23 | 株式会社ショ-ワ | 弁装置 |
SG11202100877QA (en) * | 2018-07-31 | 2021-03-30 | Fujikin Kk | Actuator, valve device, and fluid control apparatus |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2675204A (en) * | 1948-09-30 | 1954-04-13 | Johnson Clarence | Noncorrodible fluid-pressure operated valve |
JPS6166274U (ja) * | 1984-10-05 | 1986-05-07 | ||
JPS62274182A (ja) * | 1986-05-22 | 1987-11-28 | Yamada Mie | 開閉表示装置 |
JPH03107602A (ja) * | 1989-09-20 | 1991-05-08 | Kiyohara Masako | 流体制御装置用アクチエータ |
US6059259A (en) * | 1997-12-31 | 2000-05-09 | Advanced Pressure Technology | Pneumatic valve actuator utilizing force multiplication |
US6547214B2 (en) * | 2001-05-08 | 2003-04-15 | Roger J. Gregoire | Serpentine actuator disk |
JP2012042033A (ja) * | 2010-08-23 | 2012-03-01 | Shujiro Fujimoto | 弁装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4955582A (en) * | 1989-08-14 | 1990-09-11 | Baumann Hans D | Weirless diaphragm valve |
CN101611254A (zh) * | 2007-02-06 | 2009-12-23 | 株式会社富士金 | 流体控制器 |
CN202327328U (zh) * | 2011-11-20 | 2012-07-11 | 项光平 | 一种塑料气动隔膜阀 |
-
2012
- 2012-07-13 JP JP2012157051A patent/JP5978035B2/ja active Active
-
2013
- 2013-06-26 CN CN201380033803.0A patent/CN104685278B/zh not_active Expired - Fee Related
- 2013-06-26 WO PCT/JP2013/067429 patent/WO2014010412A1/ja active Application Filing
- 2013-06-26 US US14/409,139 patent/US9416893B2/en active Active
- 2013-06-26 KR KR1020147036126A patent/KR101584479B1/ko active IP Right Grant
- 2013-06-26 SG SG11201408180WA patent/SG11201408180WA/en unknown
- 2013-07-11 TW TW102124847A patent/TWI595179B/zh active
-
2014
- 2014-12-07 IL IL236101A patent/IL236101B/en active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2675204A (en) * | 1948-09-30 | 1954-04-13 | Johnson Clarence | Noncorrodible fluid-pressure operated valve |
JPS6166274U (ja) * | 1984-10-05 | 1986-05-07 | ||
JPS62274182A (ja) * | 1986-05-22 | 1987-11-28 | Yamada Mie | 開閉表示装置 |
JPH03107602A (ja) * | 1989-09-20 | 1991-05-08 | Kiyohara Masako | 流体制御装置用アクチエータ |
US6059259A (en) * | 1997-12-31 | 2000-05-09 | Advanced Pressure Technology | Pneumatic valve actuator utilizing force multiplication |
US6547214B2 (en) * | 2001-05-08 | 2003-04-15 | Roger J. Gregoire | Serpentine actuator disk |
JP2012042033A (ja) * | 2010-08-23 | 2012-03-01 | Shujiro Fujimoto | 弁装置 |
Also Published As
Publication number | Publication date |
---|---|
IL236101A0 (en) | 2015-01-29 |
TW201413144A (zh) | 2014-04-01 |
KR101584479B1 (ko) | 2016-01-11 |
JP5978035B2 (ja) | 2016-08-24 |
US20150323092A1 (en) | 2015-11-12 |
CN104685278A (zh) | 2015-06-03 |
WO2014010412A1 (ja) | 2014-01-16 |
US9416893B2 (en) | 2016-08-16 |
IL236101B (en) | 2018-06-28 |
SG11201408180WA (en) | 2015-02-27 |
TWI595179B (zh) | 2017-08-11 |
KR20150014993A (ko) | 2015-02-09 |
CN104685278B (zh) | 2016-10-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5978035B2 (ja) | 流体制御器用アクチュエータ | |
US3779274A (en) | Pressure regulator | |
KR101907283B1 (ko) | 유체 제어기 | |
JP5009107B2 (ja) | サックバックバルブ | |
KR101809809B1 (ko) | 진공 밸브 | |
CA2522853A1 (en) | Fluid controller | |
JP2004092824A (ja) | 流体制御器 | |
TWI591282B (zh) | 隔膜閥 | |
KR101919678B1 (ko) | 유체 제어기 | |
JP4452901B2 (ja) | 流体制御器 | |
WO2019009107A1 (ja) | アクチュエータ、バルブ、および半導体製造装置 | |
JP2010159790A (ja) | ダイヤフラム弁用ダイヤフラム押さえおよびこれを備えたダイヤフラム弁 | |
JP5022971B2 (ja) | 圧力調整器 | |
WO2019009106A1 (ja) | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 | |
KR101792371B1 (ko) | 제어 밸브 | |
JP7333045B2 (ja) | 流量制御弁 | |
WO2023007907A1 (ja) | バルブ装置 | |
JP2015010655A (ja) | 圧力作動弁及び圧力作動弁における設定圧力の設定方法 | |
JPWO2019131038A1 (ja) | バルブ装置およびその製造方法 | |
JP2014005906A (ja) | 制御弁 | |
JP2019065867A (ja) | アクチュエータ、バルブ、および流体制御装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150619 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160223 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160628 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160725 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5978035 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |