JP2014018906A - Method for managing process apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for managing a process apparatus, the method enabling reproduction of a process condition of basic data even in the case of the basic data being erroneously erased or overwritten.SOLUTION: A method, for use in managing a process apparatus that includes a chuck table, process means for applying a process to a processing article, storage means for storing plural process conditions, and display means for displaying a process condition, includes: a server connection step for connecting the process apparatus to a server via a communication line; a basic data storage step for selecting, from among plural process conditions stored in the storage means, a first process condition 40 constituting basic data and storing the selected first process condition in the server; and a process condition comparison step for comparing the basic data with a second process condition stored in storage means of the process apparatus. Further, the first and second process conditions are constituted of plural setup items to each of which data is set, and, when the second process condition is displayed on display means 26, a setup item to which data different from the basic data is set is displayed in an identifiable manner.

Description

  The present invention relates to a management method for a processing apparatus such as a cutting apparatus or a grinding apparatus.

  In the manufacturing process of semiconductor devices and electronic components, a plate-shaped workpiece made of various materials such as semiconductor wafers and ceramic substrates is ground to a predetermined thickness by grinding with a grinding wheel mounted on the spindle of a grinding machine. Then, it is divided into individual device chips by a cutting blade or a laser processing device mounted on the spindle of the cutting device.

  In these processing devices, various conditions are set for the grinding wheel, cutting blade, and laser beam irradiation unit, such as rotational speed, relative movement speed with the workpiece, cutting speed or contact speed, position of various nozzles, etc. (See, for example, JP 2009-117776 A).

  As for the processing conditions, a plurality of items called recipes in which a plurality of items whose settings are frequently changed are combined are created, and processing is performed by assigning recipes to various products. Therefore, since the processing results often differ slightly between products, the item data is changed correspondingly and registered in the memory of the controller (control means) as a new recipe. This increases the number of recipes.

JP 2009-117776 A

  The number of recipes increases due to various data changes based on recipes that specify the processing conditions to be basic data, but if the basic data is accidentally deleted or overwritten, the standard processing conditions disappear, It becomes difficult to set data when creating a new recipe.

  Also, since there are so many setting items that one recipe has, when you want to select a recipe with processing conditions different from the basic data recipe and perform processing, you can see which items are different when compared with the basic data recipe. There is an inconvenience that I do not understand.

  The present invention has been made in view of the above points, and the object of the present invention is to perform processing that can reproduce the processing conditions of the basic data even when the basic data is accidentally erased or overwritten. It is to provide a device management method.

  According to the present invention, a chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, a storage means for storing a plurality of processing conditions for controlling the processing means, A processing device management method comprising: display means for displaying the processing conditions; a server connection step for connecting the processing device to a server through a communication line; and a storage means stored in the storage device of the processing device. A basic data storage step of selecting a first processing condition serving as basic data from the plurality of processing conditions and storing the selected first processing condition in the server via the communication line; and the basic data A processing condition comparison step for comparing the basic data stored in the server with the second processing condition stored in the storage means of the processing device after performing the storing step, 2 processing conditions are composed of a plurality of setting items for which data is set, and after executing the comparison step, when the second processing conditions are displayed on the display means, data different from the basic data is set. A method for managing a machining apparatus is provided in which setting items are displayed in an identifiable manner.

  According to the processing device management method of the present invention, since the processing conditions of the selected basic data are stored in the server via the communication line, even if the basic data in the processing device is erased or overwritten, the basic data It becomes possible to restore the machining conditions.

  In addition, since the processing conditions of the basic data and the processing conditions of each recipe are compared and items different from the basic data among the setting items are displayed on the display means in an identifiable manner, Can be easily grasped.

It is a system configuration figure of an embodiment which applied a management method of the present invention to a cutting device. It is a schematic diagram explaining a basic data storage step. It is an example of the image of a display monitor which shows the example which can identify the setting item different from basic data.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, there is shown a system configuration diagram of the present invention connected to a cutting device 2 which is an example of a processing device. Reference numeral 4 denotes a housing that accommodates each mechanical component of the cutting device 2, and is composed of a large number of panels and an exterior cover fixed to the frame.

  In the housing 4, the first cutting unit 6 </ b> A and the second cutting unit 6 </ b> B are disposed so as to face each other and align in the Y-axis direction. Both the first cutting unit 6 </ b> A and the second cutting unit 6 </ b> B include a spindle 10 that is rotatably accommodated in the spindle housing 8, and a cutting blade 12 that is attached to the tip of the spindle 10. The first cutting unit 6A and the second cutting unit 6B can move in the Y-axis direction independently of each other.

  Doors 14 and 16 are provided on the operation side of the cutting device 2. An opening 15 is formed at the lower end of the doors 14 and 16. An operator (operator) can open the doors 14 and 16 and access the first and second cutting units 6A and 6B.

  A chuck table 18 is disposed on the front side of the doors 14 and 16. The chuck table 18 is configured to be rotatable and movable in the X-axis direction through an opening 15 provided at the lower ends of the doors 14 and 16.

  Reference numeral 20 denotes a cassette mounting table that can move in the vertical direction. On the cassette mounting table 20, a workpiece to be processed is configured such that a workpiece 11 is bonded to a dicing tape T that is bonded to an opening of an annular frame F. For example, two cassettes 24 containing a plurality of product units 22 are mounted.

  Reference numeral 26 denotes a touch panel type operation display monitor. By touching information displayed on the operation display monitor 26, a command can be input to the cutting apparatus 2, and the operating status of the cutting apparatus 2 is displayed on the monitor 26. Is displayed.

  Reference numeral 28 denotes a display lamp for displaying the operating status of the cutting device 2, which is lit in green, for example, when the cutting device 2 is operating normally, and flashes red when some failure occurs. Reference numeral 30 denotes an emergency stop button. When the operator presses the emergency stop button 30, the operation of the cutting device 2 can be stopped immediately.

  The cutting device 2 incorporates a control means (controller) 32 having a storage means (memory) 33. The control means 32 has a communication means (not shown) and can be connected to the server 36 via the communication means and a communication line 34 such as the Internet. The server 36 is connected to a terminal device 38 such as a personal computer. Preferably, the server 36 is installed on the device manufacturer side, but may be installed in a management room on the user side.

  In the processing apparatus management method of the present embodiment, a dotted line 40 indicates a server registration selection screen of the operation display monitor 26 shown in FIG. 2 among a plurality of processing conditions (recipes) stored in the storage means 33 of the cutting apparatus 2. As shown in the drawing, the machining condition A serving as basic data is selected, and the selected machining condition A is saved in the server 36 via the communication line 34 (basic data saving step).

  The processing condition A, which is basic data stored in the server 36, is preferably set to be non-rewritable except for a specific person by performing a lock step that restricts access authority by encryption or the like.

  After performing the basic data storage step, a processing condition comparison step is performed in which the processing conditions A serving as basic data stored in the server 36 are compared with the processing conditions B to D stored in the storage means 33 of the cutting device 2. Each processing condition A to D includes a plurality of setting items in which data is set.

  After performing the comparison step, as shown in FIG. 3, when the processing condition B to be used is displayed on the operation display monitor 26, setting items 44a and 44b in which data different from the processing condition A, which is basic data, are set. It is displayed on the operation display monitor 26 in an identifiable manner. As a method for displaying in an identifiable manner, a method of blinking the setting items 44a and 44b or coloring the setting items 44a and 44b in a different color from other setting items can be employed.

  According to the processing device management method of the above-described embodiment, the processing condition A, which is the selected basic data, is stored in the server 36 via the communication line 34. Therefore, the recipe (processing) stored in the storage means 33 of the cutting device 2 is stored. Even if the (condition) is deleted or overwritten, the basic data processing condition A is stored in the server 36, so that the basic data can be easily restored.

  In addition, the basic data processing condition A and other recipes (processing conditions B to D) are compared, and among the setting items, items 44a and 44b different from the basic data processing condition A can be identified on the operation display monitor 26. Since it is displayed, the characteristics of each recipe can be easily grasped in a large amount of recipes (processing conditions).

  In the above-described embodiment, an example in which the management method of the present invention is applied to a cutting device has been described. However, the management method of the present invention is also applicable to the management of other processing devices such as a grinding device, a polishing device, and a laser processing device. Can be applied.

2 Cutting device 6A, 6B Cutting unit 12 Cutting blade 32 Control means (controller)
33 Storage means (memory)
34 Communication line 36 Server 38 Terminal device 40 Processing conditions 44a, 44b to be selected basic data Setting method different from basic data

Claims (1)

A chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, a storage means for storing a plurality of processing conditions for controlling the processing means, and displaying the processing conditions A processing device management method comprising:
A server connection step of connecting the processing device to a server via a communication line;
A first machining condition serving as basic data is selected from a plurality of machining conditions stored in the storage unit of the machining apparatus, and the selected first machining condition is stored in the server via the communication line. A basic data storage step,
After performing the basic data storage step, the processing condition comparison step of comparing the basic data stored in the server and the second processing conditions stored in the storage means of the processing device,
The first and second processing conditions are composed of a plurality of setting items in which data is set,
After executing the comparison step, when the second machining condition is displayed on the display means, a setting item in which data different from the basic data is set is displayed in an identifiable manner. Method.

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