JP2014013211A - Stage structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stage structure capable of obtaining a sufficient pre-pressure without disposing magnetic poles and capable of reducing the thickness thereof.SOLUTION: The stage structure is configured including: a fixed plate 2; a moving plate 3; linear guide paths 4 and 5 of a V-groove for the moving plate 3; steel balls 6 for supporting the moving plate 3; and a permanent magnet 10 disposed in a pocket processing part 9. By using the pocket processing part 9 to function as a yoke, pre-pressure is increased by the permanent magnet 10 the thickness can be reduced by eliminating magnetic poles.

Description

  The present invention relates to an improvement in a stage structure used for feeding a workpiece in an inspection apparatus, a measurement apparatus, a test apparatus, a processing apparatus, or the like.

  As this type of stage structure, for example, linear stages disclosed in Patent Document 1 and Patent Document 2 are known.

The linear stage disclosed in Patent Document 1 constitutes a part of a cross table, and the main part thereof is a base and two protrusions formed on the left and right of the upper surface of the base, V-grooves engraved on each of the ridges, a moving plate provided with V-shaped ridges that fit these V-grooves on the left and right sides, a pair of V-grooves and V-shaped ridges, A plurality of needle roller bearings interposed between them and the inner side of the left and right V-shaped ridges and at a position near the center in the moving direction of the moving plate, and are fixed to the lower surface of the moving plate And four permanent magnets attached thereto.
If such a configuration is applied, the permanent magnet fixed to the lower surface of the moving plate attracts the base, and between the V groove and the plurality of needle roller bearings, and between the V-shaped protrusion and the plurality of needle rollers. Since a pre-pressure acts between the needle roller bearings, the moving plate can be prevented from being lifted carelessly without increasing the weight of the moving plate.
In addition, there is no need to provide a contact-type lifting prevention member between the base and the moving plate, so the driving torque required to drive the moving plate is reduced and the drive response of the moving plate is improved. Also occurs.
In the linear stage disclosed in Patent Document 1, the preload is further improved by attaching a magnetic pole (such as an electromagnetic material steel plate having a high magnetic permeability) to the upper surface of the base that faces the lower surfaces of the four permanent magnets. .
However, in the configuration disclosed in Patent Document 1, since the V grooves are provided in the protrusions formed on the left and right of the upper surface of the base, there is a limit to reducing the vertical height of the entire linear stage.
In addition, the central portion of the upper surface of the base located between the two ridges formed on the left and right sides of the upper surface of the base and the central portion of the lower surface of the movable plate positioned between the two V-shaped ridges. Therefore, it is necessary to perform a large amount of removal processing, and there is a disadvantage that the production efficiency is lowered.
Moreover, since the magnetic pole for enhancing the magnetic attractive force of the magnet needs to be interposed between the lower surface of the magnet and the upper surface of the base, the presence of the magnetic pole itself is the vertical height of the entire linear stage. It becomes an obstructive factor in achieving the purpose of reducing the thickness.
Of course, it is possible to form two V-shaped ridges separately from the moving plate and attach them to the moving plate. In such a case, however, the assembly is accompanied by the attachment of the V-shaped ridges. In order to reduce the error, for example, a complicated operation such as forming a notch having a sharp corner for positioning the V-shaped protrusion on the lower surface of the moving plate or penetrating the knock pin is required.
Naturally, all the elements constituting the linear guide path, that is, the two V-grooves and the two V-shaped ridges, prevent the occurrence of inadvertent stress and the occurrence of resistance. In order to improve the accuracy of the stage, it is desirable to be completely parallel, and it is also desirable that the shape of the V-shaped ridges and the shape of the V-grooves that make a pair match perfectly. Processing is difficult and involves considerable processing costs, if possible.

The linear stage disclosed in Patent Document 2 uses a configuration in which the protrusions on the left and right sides of the upper surface of the base are eliminated and the V-groove is directly carved on the upper surface of the base. Although it is relatively easy to reduce the thickness, it is still necessary to apply a large amount of removal processing to the central portion of the lower surface of the moving plate located between the two V-shaped protrusions. Generation of assembly errors when a protrusion is formed of a member different from the moving plate and retrofitted to the moving plate and complicated work for preventing it are not eliminated.
In addition, when processing V-grooves and V-shaped ridges, different types of processing, that is, processing that forms a necessary portion using removal processing (processing of V-groove) and removal of the necessary portion using removal processing are performed. Remaining processing (processing of V-shaped ridges) is required, and all elements constituting the linear guide path, that is, two V-grooves and two V-shaped ridges are in a completely parallel state. In addition, there remains a problem that it is difficult to completely match the shape of the V-shaped protrusions and the shape of the V-grooves that form a pair.

JP 2006-114557 A (paragraphs 0032-0033, 0036, FIG. 2, FIG. 3) JP 2006-114558 A (FIGS. 3 and 4)

  Accordingly, an object of the present invention is to improve the disadvantages of the prior art, easily reduce the thickness, not to reduce the production efficiency, and to obtain a sufficient preload without arranging magnetic poles. An object of the present invention is to provide a stage structure that is capable of forming all of the elements constituting a linear guide path in parallel with high accuracy by a single type of processing that suppresses processing errors and assembly errors.

The stage structure of the present invention includes two plates that are formed of a magnetic material and overlap in the thickness direction, and linear guide paths for sliding are spaced apart from each other on the same surface of one of the plates. In the state, a plurality of parallel guide paths are provided, while the other plate is provided with another linear guide path that forms a pair with each of the linear guide paths on the surface facing the one plate. The one plate is supported so as to be movable in one direction with respect to the other plate via a plurality of rolling elements interposed between a pair of linear guide paths, and the one plate A plate surface facing the other plate, or at least one surface of the other plate facing the one plate, A magnet is fixed so as to be positioned at a central position between adjacent linear guide paths among the plurality of linear guide paths, with a certain gap therebetween, and the linear guide in the one plate A stage structure in which a preload due to the magnetic attraction force of the magnet is applied between the path and the plurality of rolling elements, and between the linear guide path and the plurality of rolling elements in the other plate. In
The linear guide path of the one plate and the linear guide path of the other plate are formed by grooves directly carved into each plate and the plurality of rolling elements are formed by steel balls,
The magnet is embedded in a pocket processing portion formed by removal processing from the at least one surface toward the thickness direction of the plate having the surface, and an inner wall portion of the pocket processing portion functions as a yoke of the magnet. It has the structure characterized by this.

According to the above configuration, the linear guide path of one plate constituting a part of the stage structure and the linear guide path of the other plate constituting the other part of the stage structure are both directly carved into each plate. Since the groove is formed by a groove, the protrusion for forming the V-groove and a large amount of removal processing for forming the V-groove are not required, and the stage structure can be easily reduced in thickness without deteriorating the production efficiency. The
Further, the inner wall portion of the pocket processing portion in which the magnet is embedded functions as a yoke so as to enhance the magnetic attractive force of the magnet, so that between the linear guide path on one plate and the plurality of rolling elements, and the other In this plate, sufficient pre-pressure can be applied between the linear guide path and the plurality of rolling elements in the plate, and it is not necessary to arrange magnetic poles that overlap with the magnets, thereby further reducing the stage structure. The
Further, the straight guide path of one plate constituting a part of the stage structure and the straight guide path of the other plate constituting the other part of the stage structure are formed by simple grooves, thereby simplifying the processing. In addition, since no retrofitting of the linear guide path is required, machining errors are suppressed and assembly errors are eliminated, so that all the elements constituting the linear guide path can be formed in parallel with high accuracy. As a result, the accuracy of the stage structure is improved.
The elements constituting the linear guide path are parallel with high accuracy, so that the linear guide path on one plate and the plurality of rolling elements and the linear guide path on the other plate and the plurality of rolling elements are parallel. Since inadvertent stress and resistance are generated between the rolling elements and the inconvenience that the stress and resistance fluctuate is eliminated, overshoot (change in decreasing direction of stress and resistance) that may occur when the stage is fed Inconvenience in the case of occurrence of an inconvenience) and undershoot (inconvenience in the case of a change in stress or resistance in an increasing direction) can be prevented in advance.

In particular, the linear guide path in the one plate and the linear guide path in the other plate are as follows:
With the opposing surfaces of the plates facing upward, on the table of a surface grinding machine that grinds these plates, the direction of the processing locus on the plate serving as a reference for forming the linear guide path is Aligned with the horizontal movement direction of the table of the surface grinder and fixed in a straight line along the horizontal movement direction of the table within the range of the horizontal movement stroke of the table. It is desirable that each of the grooves forming a pair is formed by alternately grinding with a rotating grindstone of the surface grinder.

When such a configuration is applied, the paired grooves are formed in exactly the same environment, so the shape and directionality of the paired grooves can be made even higher. As a result, the accuracy of the stage structure is further improved.
In particular, a rotating grindstone with a width sufficient to straddle all the grooves engraved on one side of the plate is used, and plural grooves for simultaneously forming all the grooves engraved on the one side of the plate on the outer peripheral surface thereof. By dressing and grinding the V-shaped ridges in the row, the parallelism of all the grooves that constitute the linear guide path can be ensured to be in a completely close state.

  According to the present invention, thinning is easy, production efficiency is not reduced, and sufficient preload can be obtained without arranging magnetic poles. A stage structure is provided in which all of the elements constituting the linear guide path can be formed in parallel with high accuracy by a single type of processing that is suppressed.

FIG. 1A is a view showing the configuration of a stage structure according to an embodiment to which the present invention is applied. FIG. 1A shows a fixed plate and a moving plate by cutting one half of the moving plate at the position of the center line AA. FIG. 1B is a left side view showing the configuration of the stage structure, FIG. 1C is a left side view showing the configuration of the stage structure, and FIG. It is the front view shown about the structure of the same stage structure. It is the action principle figure which simplified and showed about the processing process of the linear guide path | route with which the fixed plate and movement plate which comprise a part of stage structure of the embodiment are provided.

  Next, embodiments for carrying out the present invention will be specifically described with reference to the drawings.

  FIG. 1 is a diagram showing a configuration of a stage structure 1 according to an embodiment including a fixed plate 2 and a moving plate 3. Among these, FIG. 1A shows a half of the moving plate 3 on the center line AA. FIG. 1B is a left side view showing the configuration of the stage structure 1, and FIG. 1C is a plan view showing the configuration of the stage structure 1. FIG. FIG. 1D is a right side view showing the configuration, and FIG. 1D is a front view showing the configuration of the stage structure 1.

  The stage structure 1 of this embodiment includes two plates that are formed of a magnetic material and overlap in the thickness direction, that is, a fixed plate 2 and a moving plate 3.

Of these, on the same surface of the fixed plate 2 which is one of the plates, that is, on the upper surface 2a of the fixed plate 2, two linear guide paths 4 for sliding are provided in parallel and spaced apart from each other. It is installed.
The arrangement of the two linear guide paths 4 and 4 has a symmetrical relationship in the horizontal plane with the center line AA as the axis of line symmetry.

  Further, the moving plate 3 which is the other plate is paired with each of the linear guide paths 4 and 4 of the fixed plate 2 on the surface opposite to the upper surface 2a of the fixed plate 2, that is, on the lower surface 3a side. Other straight guide paths 5 and 5 are formed.

All of the grooves constituting the linear guide paths 4 and 4 and the linear guide paths 5 and 5 are V-grooves having the same shape and the same dimensions, and are ground by being directly carved into the flat fixed plate 2 or the movable plate 3. ing.
The linear guide paths 4 and 4 and the linear guide paths 5 and 5 basically have the same shape and the same dimensions, but the longitudinal dimension between the linear guide paths 4 and 4 and the linear guide paths 5 and 5. It is permissible that there is a difference.

A plurality of rolling elements 6 made of steel balls inscribed in the V grooves forming the linear guide paths 4 and 5 are interposed between the pair of linear guide paths 4 and 5, and the rolling elements 6 are shown in FIG. As shown in FIG. 1D, the moving plate 3 is supported in a state where the stage structure 1 is placed upright, and is in one direction along the directions of the linear guide paths 4, 4, 5, 5, that is, FIG. And the movement of the moving plate 3 is permitted in the left-right direction in FIG.
The rectangular groove 7 engraved at the bottom of the V-groove forming the straight guide paths 4 and 5 has an uncut portion generated at the bottom of the V-groove when the outer peripheral surface of the rotating grindstone that processes the V-groove is worn. This is a general relief process for preventing interference with the rolling element 6.

At both ends in the longitudinal direction of the linear guide path 4, as shown in FIGS. 1A and 1B, slopes (center line A−) inside the V groove forming the linear guide path 4. A hole penetrating through the slope close to A) is drilled, and at both ends in the longitudinal direction of the linear guide path 5, slopes outside the V groove forming the linear guide path 5 (center line A) -A straight guide path 4, which is paired by pin-shaped stoppers 8 which are implanted in these holes and project on the slope of the V-groove. The rolling element 6 is prevented from falling off between 5 and the linear movement stroke of the moving plate 3 with respect to the fixed plate 2 is restricted.
As shown in FIG. 1A, the stopper 8 on the fixed plate 2 side protrudes upward beyond the upper surface 2 a of the fixed plate 2, and the stopper 8 on the moving plate 3 side moves downward beyond the lower surface 3 a of the moving plate 3. However, since the mounting position of the stopper 8 on the fixed plate 2 side and the mounting position of the stopper 8 on the moving plate 3 side are shifted inward and outward, the stoppers 8 do not interfere with each other.
With reference to FIG. 1A and FIG. 1D, the movement limit of the moving plate 3 in the left direction is such that the stopper 8 at the right end of the linear guide path 5 is located on the rolling element 6 positioned on the rightmost side. The stopper 8 at the left end of the linear guide path 4 is located on the leftmost side in a state where all of the plurality of rolling elements 6 between the linear guide paths 4 and 5 that are in contact with each other and are in contact with each other are in contact with each other. The movement limit of the movable plate 3 in the right direction is a position where the moving plate 6 is in contact with the stopper 8 at the left end of the linear guide path 5 and contacts the rolling element 6 located on the leftmost side to form a pair. The stopper 8 at the right end of the linear guide path 4 abuts on the rightmost rolling element 6 in a state where all of the plurality of rolling elements 6 sandwiched between the linear guide paths 4 and 5 are in contact with each other. Position.
The moving stroke of the moving plate 3 is approximately ½ of the total length of the linear guide paths 4 and 5.

  The surface of the fixed plate 2 facing the moving plate 3, that is, the upper surface 2a of the fixed plate 2, is removed from the upper surface 2a in the thickness direction of the fixed plate 2, for example, milling or die-sculpting electric discharge machining. A substantially rectangular pocket processing portion 9 is formed by the above method, and the lower surface of the permanent magnet 10 installed in the form embedded in the pocket processing portion 9 is adhered to the bottom surface of the pocket processing portion 9 by means such as bonding or screwing. A fixed gap is formed between the lower surface 3 a of the moving part rate 3 that is fixed and opposed to the fixed plate 2 and the upper surface of the permanent magnet 10 and is determined in consideration of the characteristics of the magnetic attractive force of the permanent magnet 10. Yes.

  The magnetization direction of the permanent magnet 10 is N pole on the upper surface side and S pole on the lower surface side, or S pole on the upper surface side and N pole on the lower surface side.

  In this embodiment, the pocket processing portions 9 and 9 and the permanent magnets 10 and 10 are arranged on both sides of the center line A-A, and the centroid (area center) of the two pocket processing portions 9 and 9. And the centroid (area center) of the two permanent magnets 10 and 10 is the center position between the two adjacent linear guide paths 4 and 4, in other words, the opposite side of the two linear guide paths 4 and 4 It coincides with the intersection position of two virtual diagonal lines obtained by connecting the end portions of the two. As a result, this intersection position is the center position of the fixed plate 2.

The pocket processing portions 9 and 9 and the permanent magnets 10 and 10 are arranged on both sides of the center line A-A from the screw hole 11 for attachment attachment screwed in the center portion of the moving plate 3. This is a measure for preventing the tip of the male screw from coming into contact with the magnets 10 and 10 and causing damage when the male screw on the attachment side is accidentally protruded. In the situation where it is not necessary to provide the screw hole 11, the center position between the two adjacent linear guide paths 4 and 4, that is, the two linear guide paths 4 and 4 are opposed to each other. Only one set of the large pocket machining portion 9 and the large permanent magnet 10 may be provided at the intersection of the virtual diagonal lines obtained by connecting the end portions on the side.
In this embodiment, screw holes 11 for attaching attachments are also provided at the four corners of the movable plate 3, and the user can selectively use various types of workpieces or the like by selectively using the screw holes 11 for attaching attachments. A test object or the like can be set on the moving plate 3.

  The fixing plate 2 constituting the base portion of the stage structure 1 is a work table or various devices using screw holes 12 with countersunk holes provided at the four corners and set screws adapted to the screw holes 12. It is attached to the bed part.

  Since the structure of a lead screw, a ball nut and a screw for feeding the moving plate 3 is already known, it will not be described in particular.

  Here, as an example, the case where the pocket processing portion 9 and the permanent magnet 10 are arranged on the fixed plate 2 side has been described. However, when the moving plate 3 does not need to be provided with the screw holes 11 for attachment, that is, In a situation where there is no inconvenience even if a part of the moving plate 3 has a thin thickness, the surface of the moving plate 3 facing the fixed plate 2, that is, the lower surface 3a of the moving plate 3 In addition, the pocket processing portion 9 and the permanent magnet 10 may be arranged so that a certain gap is formed between the lower surface of the permanent magnet 10 and the upper surface 2 a of the fixed plate 2.

Alternatively, when two sets of the pocket processing portion 9 and the permanent magnet 10 are provided around the center line AA, one of them is arranged on the fixed plate 2 side and the other is arranged on the moving plate 3 side. It is also possible to take an irregular form such as
In this case, a fixed gap is formed between the lower surface of the permanent magnet 10 installed on the moving plate 3 side and the upper surface 2a of the fixed plate 2, and the permanent magnet 10 installed on the fixed plate 2 side is similarly formed. A certain gap is formed between the upper surface and the lower surface 3 a of the moving plate 3.
In particular, when such a configuration is applied, it moves with the fixed plate 2 except for the escape portion 13 formed at the center of the lower surface of the fixed plate 2 and the screw holes 12 at the four corners of the fixed plate 2. It is possible to assemble the fixed plate 2 and the movable plate 3 so that the plate 3 has the completely same shape and the directions of both are different by 180 °. This work process can be simplified.
With respect to the through hole for the stopper 8, it is possible to avoid interference during assembly by offsetting and drilling in the same direction from the centers of the two V grooves on the fixed plate 2 and the movable plate 3. . When such a configuration is applied and described with reference to FIG. 1B, the stoppers 8 on the two linear guide paths 4 and 4 on the fixed plate 2 are all attached. The stopper 8 on the two linear guide paths 5 and 5 on the moving plate 3 is positioned below the center of the V-groove formed in the direction of FIG. 1 is located above the center of the V-groove to which 8 is attached in the direction of FIG. 1B, or the stoppers on the two linear guide paths 4 and 4 on the fixed plate 2 8 are all located above the center of the V-groove to which the stopper 8 is attached in the direction of FIG. 1B, and the two linear guide paths 5, 5 on the moving plate 3 The upper stopper 8 is all removed. The center of the V groove are attached is either a state positioned downwards in the direction of FIG. 1 (b). Therefore, mutual interference does not occur between the stopper 8 on the fixed plate 2 and the stopper 8 on the moving plate 3.

  FIG. 2 is an operation principle diagram showing the processing steps of the linear guide path 4 provided in the fixed plate 2 and the linear guide path 5 provided in the moving plate 3 in a simplified manner.

  Reference numeral 14 in FIG. 2 indicates a table of a surface grinder that grinds the fixed plate 2 and the moving plate 3, and reference numeral 15 in FIG. 2 indicates horizontal first axis movement that is the reciprocating feed direction of the table 14. FIG. 3 shows a metal pad installed at an end portion on the table 14 along the direction (the movement axis in the horizontal direction in FIG. 2).

  Although not shown in FIG. 2, the rotating surface of a rotating grindstone (not shown) attached to the spindle of the surface grinder is orthogonal to the surface of the table 14 set horizontally, and the horizontal first of the table 14 is horizontal. Parallel to the axis movement direction.

  At least one of the column or table 14 supporting the spindle of the surface grinder is movable in the vertical direction (direction perpendicular to the paper surface of FIG. 2) while maintaining the posture.

  When the linear guide paths 4 and 5 are engraved in the fixed plate 2 and the movable plate 3, for example, as shown in FIG. 2, the opposed surfaces of the plates 2 and 3, that is, the upper surface 2a of the fixed plate 2 and the movable plate 3 With the lower surface 3a of both of them facing upward, the direction of the processing trajectories 4a and 4b on the fixed plate 2 as a reference when forming the linear guide paths 4 and 4 on the fixed plate 2 and the moving plate 3 are linear. Both the directions of the machining trajectories 5a and 5b on the moving plate 3 serving as a reference when forming the guide paths 5 and 5 are matched with the horizontal first axis movement direction of the table 14 of the surface grinder, and the machining trajectory 4a and the machining are performed. The trajectory 5a, the machining trajectory 4b, and the machining trajectory 5b are positioned on a straight line along the horizontal first axis movement direction of the table 14 so that the movement stroking in the horizontal first axis movement direction of the table 14 is performed. Within the scope of click, Sorting fixed plate 2 and the moving plate 3 that will form a pair at the time of assembly, by actuating a magnetic chuck or the like of the table 14 to secure the plates 2 and 3 on the table 14.

In addition, when there is a difference in thickness between the fixed plate 2 and the movable plate 3, for example, it has a thickness corresponding to the difference in thickness, and its outer shape is slightly smaller than the fixed plate 2 and the movable plate 3. A small, generally rectangular height adjustment jig is prepared, and the height adjustment jig is interposed between the thin plate and the table 14, and then the straight portion and the square of the pad 15 are completely formed. Using the thin fixing jig, the four sides of the thin plate are pressed and solidified, and the thinner one is used exclusively by using the force of the magnetic chuck of the table 14 that attracts the fixing jig. By fixing the plate on the table 14, the upper surface 2a of the fixed plate 2 and the lower surface 3a of the moving plate 3 need to be positioned on the same plane.
At this time, it is desirable to increase the thickness of the fixing jig within a range in which the outer peripheral surface of the rotating grindstone that has reached the bottom dead center after the processing of the linear guide paths 4 and 5 is not in contact.

  If there is a margin in the movement stroke in the horizontal first axis movement direction of the table 14 even if the plates 2 and 3 for one set are arranged, the plates 2 and 3 for 2 sets, 3 sets,. The table 14 may be arranged together within the range of the movement stroke of the horizontal first axis.

Further, when the area of the table 14 has a margin in the horizontal second axis moving direction (vertical moving axis in FIG. 2), for example, as shown in FIG. It is also possible to arrange another set of fixed plates 2 ′ and moving plates 3 ′ to be arranged under the same conditions as described above.
4a ′ and 4b ′ are machining loci on the fixed plate 2 ′, and 5a ′ and 5b ′ are machining loci on the moving plate 3 ′.

  The operation of forming V-shaped ridges adapted to the linear guide paths 4 and 5 on the outer peripheral portion of the rotating grindstone of the surface grinder using the dresser set on the table 14 of the surface grinder is automatic programming. It can be easily realized by inputting a machining program such as an APT sentence generated by the apparatus to a CNC device (numerical control device) of the surface grinding machine. The V-shaped ridge formed on the outer peripheral portion of the rotating grindstone of the surface grinder may be a single row or a double row.

If the surface grinder is small and a thick rotating grindstone cannot be used, only one V-shaped protrusion is formed on the outer periphery of the surface grinder rotating grindstone, and then the table 14 is moved in the horizontal first axis. While reciprocating in the direction, the processing trajectories 4a and 5a are repeated while repeating the operation of raising the table 14 incrementally or lowering the column incrementally with a predetermined cut amount for each cycle of the table 14, that is, for each reciprocation or one-way movement. After completion of the grinding of the linear guide paths 4 and 5 on one side of the plates 2 and 3 corresponding to the table, the table 14 is lowered or the column is raised to return the table 14 or column to the height of the initial approach point. 14 is fed in the horizontal second axis movement direction, and the other straight line of the plates 2 and 3 corresponding to the machining loci 4b and 5b. Grinding of the guide paths 4 and 5 is started, and further, after the grinding of the other linear guide paths 4 and 5 of the plates 2 and 3 corresponding to the processing paths 4b and 5b is completed, the processing paths 4a ′ and 5a ′ are supported. Therefore, it is necessary to start grinding the linear guide paths 4 and 5 on one side of the other set of plates 2 ′ and 3 ′.
In this case, if the surface grinder has the function of detecting the reduction of the rotating whetstone and performing dressing again, or detecting the reduction of the rotating whetstone and adjusting the cutting amount, the linear guide on one side of the plates 2 and 3 Paths 4 and 5, the other linear guide paths 4 and 5 of the plates 2 and 3, linear guide paths 4 and 5 on one side of the other set of plates 2 ′ and 3 ′, and subsequently formed The other straight guide paths 4 and 5 can be V-grooves having substantially the same shape and the same dimensions.
If the surface grinder does not have the function of detecting the reduction of the rotating grindstone and re-executing dressing or adjusting the cutting amount by detecting the reduction of the rotating grindstone, the linear guide path on one side of the plates 2 and 3 4, 5, the other linear guide paths 4, 5 of the plates 2, 3, the linear guide paths 4, 5 on one side of the other set of plates 2 ′, 3 ′, and subsequently formed. There may be a difference in shape and size between the V-grooves of the other linear guide paths 4 and 5, and even in such a case, the linear guide path 4 on one side of the plate 2 and this Between the linear guide path 5 on one side of the plate 3 paired with this, between the other linear guide path 4 of the plate 2 and the other linear guide path 5 of the plate 3 paired with this, the plate 2 Paired with the linear guide path 4 on one side of There is no difference in shape or size between the linear guide paths 5 on one side of the plate 3 ′ and the V-grooves of the linear guide paths 4, 5 that form a pair that is formed subsequently. All of the V-grooves forming the same shape can have substantially the same shape and dimensions.
The reason is that each of the V-grooves of the linear guide paths 4 and 5 that are paired with each movement of the table 14 in the horizontal first axis movement direction is alternately ground by the rotating grindstone of the surface grinder, In the surface grinder, the cutting amount of the rotating grindstone is very small, and the reduction of the rotating grindstone in one cycle can be ignored.

Further, only one V-shaped protrusion is formed on the outer periphery of the rotating grindstone of the surface grinder, and the grooves of the plates 2 and 3 arranged in the horizontal first axis moving direction of the table 14 are ground one row at a time. Instead, the table 14 of the surface grinder is rotated by 45 ° around the horizontal first axis from the horizontal state, and the edge portion of the outer peripheral portion of the rotating grindstone of the surface grinder is used as a V-shaped ridge. The three grooves may be ground one by one.
In this case, the angle of the V-groove is generally limited to 90 °, and when moving to the processing of the adjacent V-groove, in addition to the feed in the horizontal second axis movement direction, at least one of the column or table 14 that supports the spindle. One of them needs to be moved in the vertical direction (perpendicular to the paper surface of FIG. 2). However, if the rigidity and accuracy of the surface grinding machine are sufficient, the linear shape on one side of the plates 2 and 3 is the same as described above. Shapes and dimensions between the guide paths 4 and 5, the other linear guide paths 4 and 5 of the plates 2 and 3, and the linear guide paths 4 and 5 on one side of the other set of plates 2 ′ and 3 ′ This difference can be held in the same manner as when the table 14 is leveled and the protrusions on the outer peripheral surface of the rotating grindstone are used.

On the other hand, when the surface grinder is large and a thick rotating grindstone can be used, linear guide paths 4 and 4 or linear guide paths on the same plate 2 and 3 are provided on the outer periphery of the rotating grindstone of the surface grinder. Two V-shaped ridges corresponding to the separation distance of 5, 5 (same for both) are formed, and the table 14 is incrementally raised by a predetermined cut amount while reciprocating the table 14 in the horizontal first axis movement direction. Alternatively, the linear guide paths 4 and 5 on one side of the plates 2 and 3 corresponding to the machining loci 4a and 5a and the other straight line of the plates 2 and 3 corresponding to the machining loci 4b and 5b while repeating the operation of lowering the column incrementally. The grinding of the guide paths 4 and 5 is completed at the same time, and then the table 14 is lowered or the column is raised to bring the table 14 or column to the initial apron. Returning to the height of the H-point, the table 14 is fed in the horizontal second-axis movement direction, and the linear guide paths 4 and 5 on one side of the plates 2 'and 3' corresponding to the machining loci 4a 'and 5a' are machined. It becomes possible to start grinding the other linear guide paths 4 and 5 of the plates 2 'and 3' corresponding to the tracks 4b 'and 5b' at the same time.
In this case, if the surface grinder has the function of detecting the reduction of the rotating whetstone and performing dressing again, or detecting the reduction of the rotating whetstone and adjusting the cutting amount, one side of the plates 2 and 3 is the same as described above. , The other linear guide paths 4, 5 of the plates 2, 3, the linear guide paths 4, 5 on one side of the other set of plates 2 ′, 3 ′, and the other The other linear guide paths 4, 5 of the plates 2 ', 3' of the set can be substantially completely identical in shape and V-groove.
If the surface grinder does not have the function of detecting the reduction of the rotating grindstone and re-executing dressing or adjusting the cutting amount by detecting the reduction of the rotating grindstone, the linear guide path on one side of the plates 2 and 3 4, 5 and the other linear guide paths 4, 5 of the plates 2, 3 and the linear guide paths 4, 5 on one side of the other sets of plates 2 ', 3' and the other sets of plates 2 ', 3 There may be slight differences in shape and size between the V-grooves of the other linear guide paths 4 and 5 ', but even in such a case, the outer peripheral portion of the rotating grindstone of the surface grinder If the two ridges formed on the plate 2 are accurately formed at the time of dressing, the linear guide path 4 on one side of the plate 2 and the linear guide path 5 on one side of the plate 3 paired therewith , The other linear guide path 4 of the plate 2 There is no difference in shape or size between the V-grooves of the other linear guide path 5 of the plate 3 paired therewith. Similarly, the linear guide path 4 on one side of the plate 2 ' The linear guide path 5 on one side of the plate 3 ′ paired therewith, the other linear guide path 4 of the plate 2 ′, and the other linear guide path 5 of the plate 3 ′ paired therewith. There is no difference in shape or size between the V grooves.
In other words, the four V-grooves formed on the one set of plates 2 and 3 are substantially completely finished in the same shape and the same size, and the four V-grooves formed on the one set of plates 2 ′ and 3 ′ are formed. The V-groove is also finished in substantially the same shape and dimensions.
The reason for this is that each of the V-grooves of the linear guide paths 4 and 5 on one side and the other linear guide paths 4 and 5 that form a pair each time the table 14 moves in one cycle in the horizontal first axis movement direction. Are ground alternately by the rotating grindstone of the surface grinder, and the surface grinder has a very small cutting amount of the rotating grindstone, and the reduction of the rotating grindstone in one cycle is negligible, and the linear shape on one side This is because the consumption of the protrusions on the outer periphery of the rotating grindstone for grinding the guide paths 4 and 5 and the protrusions on the outer periphery of the rotating grindstone for grinding the other linear guide paths 4 and 5 are always equal.
Furthermore, in this case, since simultaneous processing is performed by two ridges formed on the outer peripheral surface of a single rotating grindstone, the linear guide path 4 on one side located on the fixed plate 2 and the other linear guide There is a merit that the path 4 and the linear guide path 5 on one side located on the moving plate 3 and the linear guide path 5 on the other side are formed completely in parallel.

  Accordingly, the four V-grooves formed on the set of plates 2 and 3 constituting the stage structure 1 are finished to have the same shape and the same dimensions, and the four V-grooves are completely parallel. If desired, a surface grinder capable of using a thick rotating grindstone is selected, and the linear guide paths 4, 4 or the linear guide paths 5, 5 on the same plate 2, 3 are arranged on the outer peripheral portion of the rotating grindstone of the surface grinder. Two V-shaped ridges corresponding to a separation distance of 5 (which is the same for both) are formed, and the table 14 is incrementally raised or columned with a predetermined cut amount while the table 14 is reciprocated in the horizontal first axis movement direction. Incremental lowering is repeated, and linear guide paths 4 and 5 on one side of the plates 2 and 3 corresponding to the machining loci 4a and 5a and pre-corresponding to the machining loci 4b and 5b are repeated. It is best to perform the grinding of the other linear guide path 4, 5 bets 2,3 simultaneously.

Further, when a plurality of sets of the fixed plate 2 and the moving plate 3 are arranged in a straight line within the range of the moving stroke in the horizontal first axis moving direction of the table 14, as described above, these plates are arranged. 2 and 3 are cyclically ground, so that all V-grooves formed in these plates 2 and 3 are completely finished to the same shape and dimensions, The V-groove on 3 can be in a completely parallel state.
Therefore, as long as these plates 2 and 3 are handled as one lot of parts and a combination of the fixed plate 2 and the moving plate 3 paired therewith is selected, a completely uniform stage structure 1 can be configured. That is, problems such as wrong parts are solved.

  As already described, the assembled stage structure 1 is passed through set screws through countersunk screw-threading holes 12 provided at the four corners of the fixing plate 2 constituting the base portion, so that the work table and various devices can be used. Mounted on the bed.

  When the stage structure 1 is mounted, the moving plate 3 is slid to one of the movement limits, the two screw-through holes 12 located on the other side are exposed and a set screw is attached, and then the moving plate 3 is re-attached. The stage structure 1 need not be disassembled when the set screw is attached by sliding to the other movement limit to expose the two screw holes 12 positioned on the opposite side and attaching the set screw.

  If the lead screw or ball screw for feeding the moving plate 3 or the nut part thereof is rotationally driven, the moving plate 3 moves in one direction (including forward and reverse directions) in the horizontal plane. Various inspections, measurements, tests, processings, and the like can be performed on the workpiece set on the moving plate 3, the test object, and the like at an arbitrary position within the limit of the moving stroke.

  Stepping motors and servo motors are commonly used as actuators for rotationally driving lead screws, ball screws or their nut portions.

  The drive torque applied to this type of motor, that is, the magnitude of the drive continuity, is ultimately determined by the value of the error register in the servo circuit.

  At this time, if the moving plate 3 moves smoothly with a slight driving torque, an error value (integrated value of the movement command pulse) is not accumulated in the error register, but the movement of the moving plate 3 is hindered by disturbance or the like. Then, an error value is accumulated in the error register, and the drive current of the motor, that is, the drive torque increases in proportion to the increase in the error value.

  Accordingly, the stage structure 1 has defects such as non-parallelism of the linear guide paths 4 and 4 and the linear guide paths 5 and 5, shape errors, dimensional errors, and variations in surface roughness. When the fluctuation occurs, for example, an excessive driving force (strictly, the difference between the driving force and the load) acts at the moment when the load decreases, and the moving plate 3 overshoots beyond the command position, or the load is increased. When increased, the driving force proportional to the error value corresponding to the previous low load state cannot overcome the increased load, the moving plate 3 temporarily stops, the current position of the moving plate 3 undershoots, etc. Inconvenience occurs.

In the stage structure 1 of this embodiment, at least the coincidence of the shape and size of the linear guide path 4 on one side of the fixed play 2 and the linear guide path 5 on one side of the movable plate 3 paired therewith. And the coincidence of the shape and dimensions of the other linear guide path 4 of the fixed play 2 and the other linear guide path 5 of the movable plate 3 paired therewith (see paragraph 0039). ), Effective generation of overshoot and undershoot due to disturbance fluctuations caused by defects such as shape errors, dimensional errors, and surface roughness variations of the linear guide paths 4 and 4 and the linear guide paths 5 and 5 Can be prevented.
In particular, a thick rotating grindstone is used, and two V-shaped ridges are formed on the outer peripheral portion of the rotating grindstone of the surface grinder to form two linear guide paths 4 and 4 on the fixed plate 2 and the moving plate 3. When the two linear guide paths 5 and 5 are ground at substantially the same time, in addition to the same shape and size of the four V grooves, The two straight guide paths 4 and 4 and the two straight guide paths 5 and 5 on the moving plate 3 are completely parallelized, and the two straight guide paths 4 and 4 on the fixed plate 2 are parallelized. And the two linear guide paths 5 and 5 on the moving plate 3 can be prevented from being displaced (see paragraph 0040). Therefore, the linear guide paths 4 and 4 and the linear guide paths 5 and 5 Inconvenient due to defects such as non-parallelism, shape error, dimensional error, surface roughness variation It can be extremely effectively prevented.

Further, the lower surface 3a of the moving plate 3 is magnetically attracted to the permanent magnet 10 fixed to the fixed plate 2 so that the linear guide paths 4 and 4 made of V-grooves of the fixed plate 2 and the rolling elements 6 made of steel balls are interposed. In addition, since a preload can be applied between the linear guide paths 5 and 5 made of the V-groove of the moving plate 3 and the rolling elements 6 made of steel balls, the weight of the moving plate 3 need not be increased. In addition, the effect that the floating plate 3 can be prevented from being lifted inadvertently is the same as that of the conventional one, but the straight guide paths 4 and 5 of the V-groove are directly connected to the fixed plate 2 and the movable plate 3. And the inner wall portion of the pocket processing portion 9 in which the permanent magnet 10 is embedded functions as a yoke, and the substantial magnetic attraction force of the permanent magnet 10 is increased. Augmentation By unnecessary the pole between the permanent magnet 10 and the mobile plate 3, further thinning of the stage structure 1 is realized by causing.
As a result of the thinning of the stage structure 1, it is possible to bring the sample, the object to be measured, the workpiece, etc. on the moving plate 3 closer to the track surface (moving guide surface) of the moving plate 3 as compared with the conventional product. The posture error and posture change of the moving plate 3 when the plate 3 moves can be reduced, and further, the positional accuracy of the sample and the object to be measured and the processing error of the workpiece can be improved.

  As described above, according to this embodiment, it is easy to reduce the thickness, without causing a decrease in production efficiency caused by complicated processing and retrofitting of parts, and without having to arrange magnetic poles. The linear guide paths 4, 4, 4 can be obtained by a single type of processing (grinding to form a V-groove that is a necessary portion using removal processing) with reduced processing errors and assembly errors. A stage structure 1 capable of forming all of the V-grooves 5 and 5 in parallel with high accuracy is provided.

  As described above, as an embodiment, all of the grooves constituting the linear guide paths 4 and 4 and the linear guide paths 5 and 5 are V-grooves, and are formed of steel balls between the pair of linear guide paths 4 and 5. Although the thing of the structure which supports the movement plate 3 by interposing the rolling element 6 was demonstrated, it replaced with the combination of a V groove and a steel ball, and various groove | channels (straight guide path) other than a V groove and a steel ball ( Or a roller having a V-groove (linear guide path) and an inner wall of the V-groove in contact with the outer peripheral surface and an end surface of the roller in contact with the other surface of the inner wall. Even if (rolling element) is used, the same operation and effect as above can be achieved.

In the above embodiment, the configuration of the stage structure 1 obtained by combining the fixed plate 2 and the moving plate 3 having a flat opposing surface has been described as an example. However, the main portion of the above-described configuration is diverted to project downward. A moving plate having a convex quadric surface on its lower surface is placed on a fixed plate having a quadric surface on its upper surface that draws a circular arc, and both of these quadric surfaces are mounted. In addition, a plurality of downwardly projecting arcuate guide paths extending along the bending direction of these secondary curved surfaces are provided in parallel, and the movable plate is fed along the arcuate secondary curved surface on the fixed plate side. It is also possible to configure an inclined stage that changes the posture (angle) of the moving plate.
In that case, the upper surface of the fixed plate 2 becomes a downwardly convex arcuate secondary curved surface, and the downwardly convex arcuate guide path 4 extending along the bending direction of the secondary curved surface on the upper surface of the fixed plate 2. 4 are formed in parallel, the lower surface of the moving plate 3 becomes a convex arcuate quadric surface, and the lower surface of the moving plate 3 extends along the bending direction of the secondary curved surface. Apart from the fact that two convex arcuate guide paths 5 and 5 are formed, and more preferably, the upper surface of the magnet 10 corresponds to the lower surface shape of the moving plate 3 and forms a downwardly convex secondary curved surface. For example, the configuration of the tilt stage is the same as that of the stage structure 1 already described.
In general, in this type of inclined stage, a rack-shaped engagement portion corresponding to a wheel of a machine element is formed on the lower surface of the movable plate 3 having a downwardly convex arcuate secondary curved surface, while the downwardly convex shape is formed. The central portion of the upper surface of the fixed stage 2 forming the arcuate secondary curved surface, that is, the valley bottom portion of the arcuate secondary curved surface, and the central position between the arcuate guide paths 4 and 4 on both sides 1, a worm having a rotation axis along the center line AA in FIG. 1 is arranged, and the outer periphery of the worm is engaged with the rack-like engagement portion on the lower surface of the movable plate 3, and the rack-like is rotated by the rotation of the worm. The movable plate 3 is moved along the arcuate secondary curved surface on the upper surface of the fixed plate 2 by applying a feed along the center line AA in FIG. I am doing so.
At this time, it is necessary to strictly adjust the separation distance between the worm arranged on the fixed plate 2 side and the rack-shaped meshing portion on the movable plate 3 side. If the separation distance between the two is excessive, the movable plate 3 When the feed direction is switched, a backlash occurs, and if the two are too close, the worm rotates more or less, causing inconvenience.
When the above-described configuration is applied to the tilt stage having such characteristics, the engagement state between the worm disposed on the fixed plate 2 side and the rack-shaped engagement portion on the movable plate 3 side is Even if it becomes too tight, there is no inconvenience that the contact between the two becomes too strong and the rotation of the worm becomes heavy or does not move. , Can absorb the strong hit between the two. Moreover, since the moving plate 3 is attracted by the magnet 10 on the fixed plate 2 side, there is no inconvenience that the moving plate 3 is inadvertently loosened or separated from the raceway surface.
Therefore, as a result, when adjusting the separation distance between the worm arranged on the fixed plate 2 side and the rack-shaped meshing portion on the lower surface of the movable plate 3, the worm on the fixed plate 2 side and the movable are compared with the conventional one. It is possible to extend the allowable range of adjustment error in the direction in which the rack-shaped meshing portion on the plate 3 side approaches. Therefore, although the accuracy of maintaining the posture of the movable plate 3 may be slightly deteriorated due to the floating of the movable plate 3 when the adjustment operation is remarkably wrong, the adjustment operation itself is greatly facilitated. A big merit arises.
That is, the reason for diverting the above-described configuration to the tilt stage is not to improve accuracy but to facilitate adjustment work, and the purpose and effect also conform to this.

1, 1 'stage structure 2, 2' fixed plate (one plate)
2a Top surface of fixed plate (same surface of fixed plate)
3, 3 'moving plate (the other plate)
3a Lower surface of moving plate (surface facing the same surface of fixed plate)
4 Linear guide paths 4a, 4b, 4a ', 4b' Machining locus 5 on fixed plate Other linear guide paths 5a, 5b, 5a ', 5b' Machining locus on moving plate 6 Rolling elements (steel balls)
7 Rectangular groove 8 Stopper 9 Pocket machining part 10 Permanent magnet (magnet)
11 Screw holes for attachment 12 Screw through holes 13 Relief 14 Table 15 Latch

Claims (2)

Two plates that are made of magnetic material and overlap in the thickness direction are provided, and on the same surface of one plate, a plurality of linear guide paths for sliding are provided in parallel and spaced apart from each other. On the other hand, the other plate is provided with another linear guide path that forms a pair with each of the linear guide paths on the surface facing the one plate, and the linear guide path that forms the pair. The one plate is supported so as to be movable in one direction with respect to the other plate via a plurality of rolling elements interposed therebetween, and the one plate faces the other plate. Or at least one of the surfaces facing the one plate in the other plate, with a certain gap between the plate surface facing this surface In addition, a magnet is fixed so as to be positioned at a center position between adjacent linear guide paths among the plurality of linear guide paths, and the linear guide path in the one plate and the plurality of rolling elements In the stage structure in which a pre-pressure due to the magnetic attraction force of the magnet is applied between the linear guide path in the other plate and the plurality of rolling elements,
The linear guide path of the one plate and the linear guide path of the other plate are formed by grooves directly carved into each plate;
The magnet is embedded in a pocket processing portion formed by removal processing from the at least one surface toward the thickness direction of the plate having the surface, and an inner wall portion of the pocket processing portion functions as a yoke of the magnet. Stage structure characterized by that. In the processing step, the linear guide path in the one plate and the linear guide path in the other plate are:
With the opposing surfaces of the plates facing upward, on the table of a surface grinding machine that grinds these plates, the direction of the processing locus on the plate serving as a reference for forming the linear guide path is Aligned with the horizontal movement direction of the table of the surface grinder and fixed in a straight line along the horizontal movement direction of the table within the range of the horizontal movement stroke of the table. 2. The stage structure according to claim 1, wherein each of the paired grooves is formed by being alternately ground by a rotating grindstone of the surface grinding machine.

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