JPH11295456A - Pixel shifting base - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pixel shifting base capable of highly precisely moving CCD and having high durability. SOLUTION: A fixing plate 30, a first moving plate 40 in parallel with the fixing plate 30, and a second moving plate 50 in parallel with the fixing plate 30 and the first moving plate 40 are provided. V-shaped grooves 32, 34 mutually oppositely existing between the fixing plate 30 and the first moving plate 40 on a mutually opposed face and extending in a first moving direction are provided on the fixing plate 30 and the first moving plate 40. A bowl 60 is provided between the opposite V-shaped grooves 32, 42, and V-shaped grooves 46, 56 mutually oppositely existing between the first moving plate 40 and a second moving plate on a mutually opposed face and extending in a second moving direction intersecting to the first moving direction are provided on the first moving plate 40 and the second moving plate 50, and the bowl 60 is provided between the mutually opposite V-shaped grooves 46, 56.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a CCD (Charge Couple) having a large number of pixels arranged in a plane.
(Led Device) is repeatedly moved in parallel with its plane.

[0002]

2. Description of the Related Art Conventionally, a CCD has been incorporated and its C
A CCD camera is known in which an optical image is formed on a plane including a large number of pixels constituting a CD, and the optical image is captured by a large number of pixels constituting a CCD to obtain image data. Such a CCD camera is used to obtain image data for locating a circuit, image data for monitoring the state of soldering, and the like in an automatic assembling apparatus for electronic circuits. Further, with the development of circuit technology in recent years, electronic circuits have been increased in density, and image data indicating a high-definition image has been demanded as image data for positioning a circuit.

As described above, since a CCD camera is a device that captures images using a large number of pixels arranged in a plane, increasing the number of pixels of the CCD increases the height of an image represented by image data obtained by the CCD camera. Fine definition can be achieved. Also, in general, CCDs are to be created within a certain fixed size.
In other words, increasing the number of pixels means that the size of the pixels is reduced.

However, the size of the pixels constituting the CCD has already reached a sufficiently small size of about 8 μm × 8 μm. If the resolution of an image is increased by reducing the size of the pixels, advanced techniques and techniques are required. With a great deal of labor, the cost of the CCD camera is greatly increased. Therefore, as a method of obtaining image data indicating a high-definition image using a CCD having pixels of a general size, the CCD as a whole is arranged in parallel with a plane including a large number of pixels at intervals of pixels. An image is taken at a plurality of positions on the path of the repetitive movement while repetitively moving by a shorter distance, and one image data representing a high-definition image is obtained by data processing based on the obtained plurality of image data. A method called "slash" has been proposed. For example, using a CCD having a large number of pixels arranged at intervals of 8 μm in the X and Y directions in the XY coordinate plane, the CCD is moved by 4 μm in the direction in which the X coordinate increases, and the position after the movement is moved. And CCD from the image pickup position
Is moved by 4 μm in the direction in which the Y coordinate increases, and is imaged at the position after the movement. Similarly, the image is moved by 4 μm in the direction in which the X coordinate decreases, and is imaged by 4 μm in the direction in which the Y coordinate decreases.
The image is moved by m. As a result, four image data are obtained, and data processing based on the four image data is performed.
One piece of image data representing an image with double resolution is obtained.

[0005]

In order to realize such a "pixel shift", a pixel shift table for moving the entire CCD with high precision is required, and usually, a high-definition image is required. Since it is necessary to repeatedly obtain many pieces of image data to be shown, the pixel shift moving table is required to have high durability.

SUMMARY OF THE INVENTION In view of the above circumstances, an object of the present invention is to provide a pixel shift table which can move a CCD with high precision and has high durability.

[0007]

In order to achieve the above object, a pixel shift moving table according to the present invention has a CCD having a large number of pixels arranged in a plane, and the CCD is fixed to a first parallel to the plane. And a plurality of grooves extending in the first movement direction and having a V-shaped cross section in a pixel shift table that is repeatedly moved in a second movement direction intersecting with the first movement direction, the second movement direction being parallel to the first movement direction. A substrate having a flat surface provided with a plate-shaped outer surface, disposed on the surface side of the substrate in parallel with the surface of the substrate, and provided on a first surface facing the surface of the substrate, A plurality of grooves having a V-shaped cross section are provided so as to face each of the plurality of grooves provided on the front surface, and extend in a second movement direction on a second surface facing the first surface in a second movement direction, and have a cross section. First moving plate provided with a plurality of V-shaped grooves A groove provided in the surface of the substrate, the first
A first ball having a plate-like outer shape, which has entered a groove provided on the first surface of the moving plate and a groove opposed to the groove provided on the surface of the base, The first moving plate is disposed on the second surface side of the plate in parallel with the first moving plate, and is provided on the second surface of the first moving plate on the first surface facing the second surface of the first moving plate. A second movable plate to which a CCD is fixed, and a groove provided on a second surface of the first movable plate, provided with a plurality of grooves having a V-shaped cross section so as to face each of the plurality of grooves. And a first moving plate provided on the first surface of the second moving plate.
And a second ball that enters both of the grooves provided on the second surface of the moving plate and the grooves provided on the second surface of the moving plate.

[0008] The pixel shift moving table of the present invention comprises the above-described substrate,
Preferably, the first moving plate, the first ball, the second moving plate, and the second ball are made of ceramic, and move the first moving plate in the first moving direction. It is preferable to include a first piezoelectric element to be moved and a second piezoelectric element to move the second moving plate in the second moving direction.

[0009]

Embodiments of the present invention will be described below. FIG. 1 is a plan view showing an embodiment of a pixel shift moving table according to the present invention. FIG. 2 is a cross-sectional view of the pixel shift moving table shown in FIG. FIG. 2 is a side view of the pixel shift base shown in FIG. 1 as viewed from the left side of FIG. 1.

This pixel shift table is a pixel shift table that repeatedly moves the CCD 10 having a large number of pixels arranged in a plane in the vertical and horizontal directions in FIG. 1 in the vertical and horizontal directions in FIG. is there. The pixel shift moving table includes a fixing plate 30, which is an example of a base according to the present invention, fixed to the base 20, a first moving plate 40 parallel to the fixing plate 30, and the fixing plate 30 and the first moving plate. A second moving plate 50 parallel to 40 is provided, each of which is made of ceramic. The fixed plate 30 and the first movable plate 40 have a so-called V extending opposite to each other and extending in the up-down direction of FIG. 1 on two surfaces 31 and 41 which are present between the fixed plate 30 and the first movable plate 40 and face each other. The grooves 32 and 42 are provided. The surface 31 of the fixed plate 30 corresponds to the planar surface of the base according to the present invention, and the surface 41 of the first movable plate 40
Corresponds to the first surface of the first moving plate according to the present invention. The V-shaped groove 32 corresponds to a groove provided on the surface of the base according to the present invention, and the V-shaped groove 42 corresponds to a groove provided on the first surface of the first moving plate according to the present invention. I do. The vertical direction in FIG. 1 corresponds to the first moving direction according to the present invention.

A ceramic ball 60 is disposed on the pixel shift table so as to enter both of the V-shaped grooves 32 and 42 facing each other. The ceramic ball 60 is the first ball according to the present invention. Is equivalent to In addition, the first moving plate 40 and the second moving plate 50 are provided on two opposing surfaces 45 and 55 existing between the first moving plate 40 and the second moving plate 50 so as to face each other.
V-shaped grooves 46 and 56 extending in the left-right direction are provided. The surface 45 of the first moving plate 40 corresponds to the second surface of the first moving plate according to the present invention, and the surface 55 of the second moving plate 50 corresponds to the first surface of the second moving plate according to the present invention. Is equivalent to Also, V
The groove 46 corresponds to the groove provided on the second surface of the first moving plate according to the present invention, and the V-shaped groove 56 is provided on the first surface of the second moving plate according to the present invention. It corresponds to a groove. FIG.
The left-right direction corresponds to the second movement direction in the present invention.

A ceramic ball 60 is arranged on the pixel shift table so as to enter both of the V-shaped grooves 46 and 56 facing each other. The ceramic ball 60 is the second ball according to the present invention. Is equivalent to First
The moving plate 40 and the second moving plate 50 are pressed against the fixed plate 30 by a spring 80 via a belt 70.

Each of the first moving plate 40 and the second moving plate 50 includes a piezoelectric actuator 90 which is an example of each of the first piezoelectric element and the second piezoelectric element according to the present invention,
The first moving plate 40 and the second moving plate 40
The moving plate 50 moves repeatedly. The second moving plate 50 has a CC
D10 is fixed such that the plane 11 composed of a number of pixels constituting the CCD 10 is parallel to the second moving plate 50, and the CCD 10 is fixed to the second moving plate 50 with respect to the fixed plate 30.
Moves repeatedly with the repeated movement of.

Since the V-shaped groove and the ceramic ball are arranged on the pixel shift table as described above, the pixel shift table is moved in a direction other than the moving direction by the first moving plate and the second moving plate. It is easy to perform processing so that the degree of rattling of the plate is sufficiently small, and the accuracy of the moving direction of the pixel shift table is high. In addition, the expansion and contraction accuracy of the piezoelectric actuator is high, and as described above, the first moving plate and the second moving plate are repeatedly moved by the expansion and contraction of the piezoelectric actuator, so that the accuracy of the moving distance of the pixel shift moving table is also high.

Further, as described above, since the fixed plate and the balls are made of ceramic,
The wear of the V-shaped groove and the ceramic ball is small, and even if the V-shaped groove and the ceramic ball are worn by the repetitive movement, the influence of the wear mainly depends on the arrangement of the V-shaped groove and the ceramic ball as described above. 1 and the wear accuracy hardly appears on the movement accuracy of the first moving plate and the second moving plate. For this reason, even if repetitive movement is continued for a long period of time, the movement accuracy is maintained, and the pixel shift moving table has high durability.

In the present embodiment, the fixing plate is shown as an example of the substrate according to the present invention. However, the substrate according to the present invention is not limited to a plate-like shape. Any shape may be used as long as it has a provided planar surface.

[0017]

As described above, the pixel shift moving table of the present invention can move the CCD with high accuracy.
And it has high durability.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a pixel shift moving table according to the present invention.

FIG. 2 is a cross-sectional view showing an embodiment of a pixel shift moving table according to the present invention.

FIG. 3 is a side view showing an embodiment of a pixel shift moving table according to the present invention.

[Explanation of symbols]

 Reference Signs List 10 CCD 20 base 30 fixing plate 32, 42, 46, 56 V-shaped groove 40 first moving plate 50 second moving plate 60 ceramic ball 70 belt 80 spring 90 piezoelectric actuator 100 spring

Claims (3)

[Claims] 1. A CCD having a plurality of pixels arranged in a plane is fixed, and the CCD is fixed to a first movement direction parallel to the plane and the first movement direction parallel to the plane. A pixel shift moving table that repeatedly moves in each of the intersecting second movement directions, a base having a planar surface extending in the first movement direction and provided with a plurality of grooves having a V-shaped cross section; A first surface disposed on the surface side of the substrate in parallel with the surface of the substrate and facing the surface of the substrate.
A plurality of grooves having a V-shaped cross section are provided on the surface so as to face each of the plurality of grooves provided on the surface of the base, and the second surface facing the first surface is provided with the second surface. A first moving plate provided with a plurality of grooves having a V-shaped cross section extending in the movement direction of No. 2; a groove provided on the surface of the base; and a first surface provided on the first surface of the first moving plate. A first ball having a plate-like outer shape, and a first ball having a plate-like outer shape, the first ball having a plate-like outer shape, A plurality of grooves provided on a second surface of the first moving plate, the first surface being disposed in parallel with the one moving plate and facing a second surface of the first moving plate; A second moving plate to which the CCD is fixed, and a second moving plate of the first moving plate provided with a plurality of grooves having a V-shaped cross section.
And a groove provided on the first surface of the second moving plate, and a groove provided on the first surface of the second moving plate and opposed to the groove provided on the second surface of the first moving plate. A pixel shift moving table comprising a second ball. 2. The base, the first movable plate, and the first moving plate.
2. The pixel shift moving table according to claim 1, wherein the ball, the second moving plate, and the second ball are made of ceramic. 3. A first piezoelectric element for moving the first moving plate in the first moving direction, and a second piezoelectric element for moving the second moving plate in the second moving direction. The pixel shift moving table according to claim 1, further comprising: