JP2013543257A - 半導体デバイス - Google Patents
半導体デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 51
- 239000010410 layer Substances 0.000 claims abstract description 124
- 239000002019 doping agent Substances 0.000 claims abstract description 87
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 238000002161 passivation Methods 0.000 claims abstract description 54
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- 239000011229 interlayer Substances 0.000 claims abstract description 26
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 14
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- 239000010703 silicon Substances 0.000 claims abstract description 13
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- 238000000034 method Methods 0.000 claims description 25
- 239000003989 dielectric material Substances 0.000 claims description 11
- 229910052785 arsenic Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
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- 229910052797 bismuth Inorganic materials 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 230000005669 field effect Effects 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
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- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 2
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28255—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor belonging to Group IV and not being elemental silicon, e.g. Ge, SiGe, SiGeC
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/105—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with vertical doping variation
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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Abstract
【解決手段】 本発明は、ゲート・スタック構造体(1)を含む半導体デバイスに関し、このゲート・スタック構造体(1)は、n型キャリアで実質的にドープされた半導体を含む少なくとも1つの基板(10)と、基板(10)上に形成された、シリコンを含む少なくとも1つの不動態化層(12)と、不動態化層(12)上に形成された少なくとも1つの絶縁体層(13)とを含み、ここで、ゲート・スタック構造体(1)は、基板(10)と不動態化層(12)との間に与えられた少なくとも1つの層間ドーパントをさらに含み、この層間ドーパントは、半導体デバイスが使用中のとき、ゲート・スタック構造体(1)に印加可能な閾値電圧の制御を容易にするように選択されるn型ドーパント(11)を含む。
【選択図】 図1
Description
ここで、例証として添付図面を参照する。
説明、並びに適切な場合には特許請求の範囲及び図面内に開示された各々の特徴は、独立して又は任意の適切な組み合わせで提供することができる。
10:基板
11:n型ドーパント
12:不動態化層
13:絶縁体層
Claims (22)
- ゲート・スタック構造体(1)を含む半導体デバイスであって、前記ゲート・スタック構造体(1)は、
n型キャリアで実質的にドープされた半導体を含む少なくとも1つの基板(10)と、
前記基板(10)上に形成された、シリコンを含む少なくとも1つの不動態化層(12)と、
前記不動態化層(12)上に形成された少なくとも1つの絶縁体層(13)と、
を含み、
前記ゲート・スタック構造体(1)は、
前記基板(10)と前記不動態化層(12)との間に与えられた少なくとも1つの層間ドーパントをさらに含み、前記層間ドーパントは、前記半導体デバイスが使用中のとき、前記ゲート・スタック構造体(1)に印加可能な閾値電圧の制御を容易にするように選択されるn型ドーパント(11)を含む、半導体デバイス。 - 前記半導体デバイスが使用中のとき、前記n型ドーパント(11)は、実質的に、前記基板(10)内に形成された導電性チャネルに隣接した領域内に与えられる、請求項1に記載の半導体デバイス。
- 前記n型ドーパント(11)の濃度は、前記閾値電圧の大きさを制御するように選択される、請求項1又は請求項2に記載の半導体デバイス。
- 前記n型ドーパント(11)は、少なくとも、前記基板(10)と前記不動態化層(12)との間の界面に存在する界面電荷を補償するように選択される、請求項1、請求項2又は請求項3に記載の半導体デバイス。
- 前記n型ドーパント(11)は、少なくとも、前記不動態化層(12)と前記絶縁体層(13)との間の界面における界面電荷を補償するように選択される、前記請求項のいずれかに記載の半導体デバイス。
- 前記n型ドーパント(11)は、少なくとも、前記不動態化層(12)、前記絶縁体層(13)、又はこれらの組み合わせの内部の電荷を補償するように選択される、前記請求項のいずれかに記載の半導体デバイス。
- 前記n型ドーパント(11)は、ヒ素(As)、燐(P)、アンチモン(Sb)及びビスマス(Bi)のうちの1つを含む、前記請求項のいずれかに記載の半導体デバイス。
- 前記半導体デバイスは電界効果トランジスタを含む、前記請求項のいずれかに記載の半導体デバイス。
- 前記絶縁体層(13)は、大きさが7より大きい有効誘電率を有する誘電体材料を含む、前記請求項のいずれかに記載の半導体デバイス。
- 前記基板(10)は、ゲルマニウム(Ge)、ゲルマニウム・オン・インシュレータ(GOI)、シリコン・ゲルマニウム・オン・インシュレータ(SiGe−OI)又はこれらのいずれかの組み合わせを含む、前記請求項のいずれかに記載の半導体デバイス。
- 半導体デバイス内にゲート・スタック構造体を製造する方法であって、
n型キャリアで実質的にドープされた半導体を含む少なくとも1つの基板(10)を形成するステップ(S1)と、
前記基板(10)上に、シリコンを含む少なくとも1つの不動態化層(12)を形成するステップ(S3)と、
前記不動態化層(12)上に少なくとも1つの絶縁体層(13)を形成するステップ(S4)と、
を含み、
前記方法は、
前記基板(10)と前記不動態化層(12)との間に少なくとも1つの層間ドーパントを与えるステップであって、前記層間ドーパントは、前記半導体デバイスが使用中のとき、前記ゲート・スタック構造体(1)に印加可能な閾値電圧の制御を容易にするように選択されるn型ドーパント(11)を含む、ステップ(S2)をさらに含む、方法。 - 前記層間ドーパントを与えるステップ(S2)において、前記半導体デバイスが使用中のとき、前記n型ドーパント(11)は、実質的に、前記基板(10)内に形成された導電性チャネルに隣接した領域内に与えられる、請求項11に記載の方法。
- 前記層間ドーパントを与えるステップ(S2)において、前記n型ドーパント(11)の濃度は、前記閾値電圧の大きさを制御するように選択される、請求項11又は請求項12に記載の方法。
- 前記層間ドーパントを与えるステップ(S2)において、前記n型ドーパント(11)は、少なくとも、前記基板(10)と前記不動態化層(12)との間の界面における界面電荷を補償するように選択される、請求項11、請求項12又は請求項13に記載の方法。
- 前記層間ドーパントを与えるステップ(S2)において、前記n型ドーパント(11)は、少なくとも、前記不動態化層(12)と前記絶縁体層(13)との間の界面における界面電荷を補償するように選択される、請求項11から請求項14までのいずれか1項に記載の方法。
- 前記層間ドーパントを与えるステップ(S2)において、前記n型ドーパント(11)は、少なくとも、前記不動態化層(12)、前記絶縁体層(13)又はこれらの組み合わせの内部の電荷を補償するように選択される、請求項11から請求項15までのいずれか1項に記載の方法。
- 前記層間ドーパントを与えるステップ(S2)において、前記n型ドーパント(11)は、ヒ素(As)、燐(P)、アンチモン(Sb)及びビスマス(Bi)のうちの1つを含むように選択される、請求項11から請求項16までのいずれか1項に記載の方法。
- 前記絶縁体層を形成するステップ(S4)において、前記絶縁体層(13)は、大きさが7より大きい有効誘電率を有する誘電体材料を含むように選択される、請求項11から請求項17までのいずれか1項に記載の方法。
- 前記基板を形成するステップ(S1)において、前記基板(10)は、ゲルマニウム(Ge)、ゲルマニウム・オン・インシュレータ(GOI)、シリコン・ゲルマニウム・オン・インシュレータ(SiGe−OI)又はこれらのいずれかの組み合わせを含むように選択される、請求項11から請求項18までのいずれか1項に記載の方法。
- 前記ステップ(S1、S2、S3、S4)は真空環境内で実行される、請求項11から請求項19までのいずれか1項に記載の方法。
- 前記ステップ(S1、S2、S3、S4)の少なくとも1つは、分子線エピタキシを用いて実行される、請求項11から請求項20までのいずれか1項に記載の方法。
- 半導体デバイスにおけるゲート・スタック構造体(1)の使用であって、前記ゲート・スタック構造体(1)は、
n型キャリアで実質的にドープされた半導体を含む少なくとも1つの基板(10)と、
前記基板(10)上に形成された、シリコンを含む少なくとも1つの不動態化層(12)と、
前記不動態化層(12)上に形成された少なくとも1つの絶縁体層(13)と、
を含み、
前記ゲート・スタック構造体(1)は、
前記基板(10)と前記不動態化層(12)との間に与えられた少なくとも1つの層間ドーパントをさらに含み、前記層間ドーパントは、前記半導体デバイスが使用中のとき、前記ゲート・スタック構造体(1)に印加可能な閾値電圧の制御を容易にするように選択されるn型ドーパント(11)を含む、ゲート・スタック構造体(1)の使用。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10180822.8 | 2010-09-28 | ||
EP10180822 | 2010-09-28 | ||
PCT/IB2011/054162 WO2012042442A1 (en) | 2010-09-28 | 2011-09-22 | Semiconductor device with a gate stack |
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JP2013543257A true JP2013543257A (ja) | 2013-11-28 |
JP5752254B2 JP5752254B2 (ja) | 2015-07-22 |
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JP2013529752A Expired - Fee Related JP5752254B2 (ja) | 2010-09-28 | 2011-09-22 | 半導体デバイス |
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JP (1) | JP5752254B2 (ja) |
CN (1) | CN103125014B (ja) |
DE (1) | DE112011103249B4 (ja) |
GB (1) | GB2497257B (ja) |
WO (1) | WO2012042442A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004006959A (ja) * | 2001-04-12 | 2004-01-08 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
WO2005101477A1 (ja) * | 2004-04-14 | 2005-10-27 | Fujitsu Limited | 半導体装置及びその製造方法 |
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US6852645B2 (en) * | 2003-02-13 | 2005-02-08 | Texas Instruments Incorporated | High temperature interface layer growth for high-k gate dielectric |
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US7446380B2 (en) | 2005-04-29 | 2008-11-04 | International Business Machines Corporation | Stabilization of flatband voltages and threshold voltages in hafnium oxide based silicon transistors for CMOS |
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GB2497257B (en) | 2013-11-06 |
DE112011103249B4 (de) | 2014-01-23 |
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GB2497257A (en) | 2013-06-05 |
JP5752254B2 (ja) | 2015-07-22 |
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