JP2013512796A - Film adhesion apparatus and adhesion method - Google Patents

Abstract

[Solution]
A film adhering apparatus according to the present invention includes a substrate adsorbing plate on which a substrate is adsorbed, and a substrate adsorbing plate having a substrate adsorbing plate that is movably mounted and rotated to move the substrate adsorbing plate to an adhering position. Rotating to move the film suction plate to the attachment position so that the film suction plate is attached to the unit, the film suction plate to which the film attached to the substrate is sucked, and the film suction plate faces the substrate suction plate Film adsorption unit having a film carrying rotary table and a film adsorption plate tilting device for tilting the film adsorption plate mounted on the film carrying rotary table and moved to the adhesion position to the substrate adsorption plate side, moved to the adhesion position One end of the film adsorbed on the film adsorption plate is tilted to the substrate adsorption plate A substrate suction plate transfer device, a substrate suction plate, and a film suction plate that move the substrate suction plate so that the film is gradually attached to the substrate from one end to the other end when attached to the sucked substrate. Including one or more vacuum pumps for providing a vacuum pressure. One substrate suction plate transfer device is disposed at the attachment position.
[Selection] Figure 1

Description

  The present invention relates to an apparatus and method for attaching a film to a flat panel display substrate. More specifically, the present invention can stably attach a film to a substrate while maintaining the contact pressure of the film uniformly. The present invention relates to a film deposition apparatus and a film deposition method that can be compactly implemented.

  Recently, liquid crystal display devices have been used in a wide range of industries, and films for various uses are attached to the flat display panel substrates of such liquid crystal display devices in the manufacturing process.

  An example of an apparatus for attaching a film to a flat panel display substrate is as follows.

  The conventional film deposition apparatus is configured such that two film supply units are provided at regular intervals and a substrate is supplied therebetween. The film supply unit is provided with a loading plate, and the loading plate rotates at a certain angle. The loading plate moves the supplied film to an adhesion position while rotating horizontally or vertically with respect to the bottom surface by a rotary motor. And the adhesion roller which squeezes the said film to the board | substrate side in the adhesion position of a board | substrate and a film is provided in the end of each said loading plate.

  In such a conventional film attaching apparatus, the substrate is supplied in a straight line and the film supplied to the loading plate is transferred to the attaching position while rotating horizontally or vertically at intervals of 90 ° through a process such as removal of the protective sheet. The

  By the way, the conventional film adhesion apparatus has a problem that it is difficult to implement a compact apparatus with a relatively complicated structure because the film is in contact with the substrate to be supplied while the substrate is supplied in a straight line. There is.

  The present invention is intended to remedy such problems. When the substrate and the film are adhered, the adhesion position and the adhesion pressure can be kept uniform so that bubbles do not intervene on the adhesion surface. Another object of the present invention is to provide a film deposition apparatus and a film deposition method using the same, which can reduce the occupied space of individual parts provided for film deposition and the range of operation and can have a compact structure.

  In order to achieve the above object, a film adhering apparatus according to an embodiment of the present invention includes a substrate adsorbing plate on which a substrate is adsorbed, and the substrate adsorbing plate movably mounted to move the substrate adsorbing plate to an adhering position. A substrate adsorbing unit having a rotating table for carrying the substrate, a film adsorbing plate to adsorb the film adhering to the substrate, and the film adsorbing plate mounted on the film adsorbing plate facing the substrate adsorbing plate The film carrying rotary table that rotates to move the film adsorbing plate to the attachment position, and the film adsorbing plate that is mounted on the film carrying rotary table and moved to the attachment position is moved to the substrate adsorbing plate. A film suction unit having a film suction plate tilting device for tilting to the side, and When the one end of the film adsorbed on the film adsorbing plate is attached to the substrate adsorbed on the substrate adsorbing plate, the film adsorbing plate is moved to move the film at one end thereof. A substrate suction plate transfer device that is gradually attached to the substrate from one end to the other, one or more vacuum pumps for providing a vacuum pressure to the substrate suction plate and the film suction plate. One of the substrate suction plate transfer devices is disposed at the attachment position.

  The substrate suction plate transfer device includes an operation member for moving the substrate suction plate by applying an external force to the substrate suction plate and an operation member driving device for driving the operation member.

  The film attachment apparatus according to an embodiment of the present invention may further include a support member that is mounted on the substrate carrying rotary table and supports the substrate suction plate so as to be slidable.

  According to an embodiment of the present invention, there is provided a film adhering apparatus which is provided on the substrate carrying rotary table and applies an external force to the support member to move the support member in the inner and outer directions of the substrate carrying rotary table. A device can further be included.

  A plurality of the substrate suction plates may be arranged on the substrate carrying rotary table at a constant interval, and a plurality of the film adsorption plates may be arranged on the film carrying rotary table at a constant interval.

  The film adhering apparatus according to an embodiment of the present invention further includes a hinge device mounted on the film carrying rotary table and rotatably supporting the film adsorbing plate, and the film adsorbing plate rotates about the hinge device. And can be tilted.

  The film adhering apparatus according to an embodiment of the present invention includes a film adhering plate configured to press the film toward the substrate when the film adsorbed on the film adsorbing plate contacts the substrate adsorbed on the substrate adsorbing plate. And a pressure roller provided on the surface.

  The film attachment apparatus according to an embodiment of the present invention may be configured such that when the film disposed at the attachment position and adsorbed on the film adsorption plate contacts the substrate adsorbed on the substrate adsorption plate, the film is placed on the substrate side. It may further include a film pressure device having a pressure roller for pressing and a pressure roller transfer device for moving the pressure roller forward in a direction to pressurize the film and retreating in a direction away from the film. .

  A film adhesion apparatus according to an embodiment of the present invention includes a substrate loading apparatus for supplying the substrate to the substrate adsorption plate, an unloading apparatus for separating the substrate on which the film adhesion has been completed, from the substrate adsorption plate, The apparatus may further include a film supply apparatus for supplying the film to the film adsorption unit.

  In order to achieve the above object, a film adhering apparatus according to another embodiment of the present invention includes a substrate adsorbing plate on which a substrate is adsorbed, a substrate adsorbing unit having a support member that slidably supports the substrate adsorbing plate, Film adsorbing plate for adsorbing a film adhering to a substrate, film adsorbing unit having a film adsorbing plate tilting device for tilting the film adsorbing plate toward the substrate adsorbing plate, the substrate adsorbing plate and the film adsorbing plate And a substrate suction plate transfer device disposed at an attachment position facing each other, and one or more vacuum pumps for providing a vacuum pressure to the substrate suction plate and the film suction plate. The substrate suction plate transfer device is configured such that when the film suction plate is tilted and one end of the film sucked by the film suction plate is attached to the substrate sucked by the substrate suction plate, the substrate suction plate So that the film is gradually attached to the substrate from one end to the other.

  In order to achieve the above object, a method for attaching a film according to an embodiment of the present invention includes: (a) a step of adsorbing a substrate to a substrate adsorbing plate; (b) a step of adsorbing a film to the film adsorbing plate; Tilting the film adsorbing plate toward the substrate adsorbing plate so that one end of the film adsorbed on the adsorbing plate is adhered to the substrate adsorbed on the substrate adsorbing plate; (d) disposed at the adhering position; A step of linearly moving the substrate suction plate to the substrate suction plate transfer device to gradually attach the film to the substrate from one end to the other end thereof.

  The step (d) may include a step of pressing the film adsorbed on the film adsorbing plate with a pressure roller toward the substrate adsorbed on the substrate adsorbing plate.

  The method for attaching a film according to an embodiment of the present invention includes a step of moving the substrate adsorption plate to an attachment position before the step (c), and an adsorption to the substrate adsorbed on the substrate adsorption plate and the film adsorption plate. The method may further include moving the film adsorption plate to the attachment position so that the formed films face each other.

  In the film attaching apparatus according to the present invention, the substrate adsorbing plate on which the substrate is adsorbed moves linearly, and the film adsorbing plate on which the film is adsorbed is tilted to the substrate adsorbing plate side to adhere the film to the substrate. It is possible to reduce the occupied space and the operating range of the parts for supplying and carrying. Therefore, a compact structure is possible, and a large number of parts can be provided in the same space. Further, the carrying time of the substrate and the film can be reduced, the productivity can be greatly improved, the structure can be simplified, and the failure rate of the apparatus can be reduced.

  Further, the film adhering apparatus according to the present invention has a film adsorbing plate on which the substrate adsorbing plate on which the substrate is adsorbed is linearly moved and tilted toward the substrate adsorbing plate to adhere the film to the substrate. Can be gradually attached to the substrate from one end to the other. Therefore, it is possible to stably attach the film to the substrate without interposing bubbles on the adhesion surface between the substrate and the film.

  In addition, the film adhering apparatus according to the present invention can move all the substrate adsorbing plates moved to the adhering position by using one substrate adsorbing plate transfer device arranged at the adhering position. Since the films adsorbed on the plurality of film adsorbing plates are sequentially pressed toward the substrate adsorbing plate using the film pressurizing device, the number of components and the installation cost can be reduced.

FIG. 1 is a plan view schematically showing a film deposition apparatus according to an embodiment of the present invention. FIG. 2 shows a substrate adsorbing unit and a substrate adsorbing plate transfer device of a film adhering apparatus according to an embodiment of the present invention. FIG. 3 shows a film adsorbing unit and a film supply apparatus of a film adhering apparatus according to an embodiment of the present invention. FIG. 4 is a view for explaining the operation of the film deposition apparatus according to an embodiment of the present invention. FIG. 5 is a view for explaining the operation of the film deposition apparatus according to an embodiment of the present invention. FIG. 6 is a plan view schematically showing a film deposition apparatus according to another embodiment of the present invention. FIG. 7 is a view for explaining the operation of the film deposition apparatus according to another embodiment of the present invention. FIG. 8 is a view for explaining the operation of the film deposition apparatus according to another embodiment of the present invention.

  Hereinafter, a film deposition apparatus and a deposition method according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  In describing the present invention, the size and shape of the components illustrated in the drawings can be exaggerated or simplified for the sake of clarity and convenience. In addition, terms specifically defined in view of the configuration and operation of the present invention may vary according to the user's, operator's intention or custom. Such terms should be interpreted as meanings and concepts consistent with the technical idea of the present invention based on the entire contents of this specification.

  FIG. 1 is a plan view schematically showing a film deposition apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, a film attachment apparatus (100) according to an embodiment of the present invention includes a substrate suction unit (110) for carrying substrates (S; see FIG. 2) one by one to an attachment position (P1), A film suction unit (120) for carrying the films (F; see FIG. 3) attached to the substrate (S) one by one to the attachment position (P1), and a substrate suction plate (111) provided in the substrate suction unit (110). ), And a vacuum pump (150) for providing a vacuum pressure. Here, the adhesion position (P1) is a position where the substrate (S) and the film (F) face each other and adhere to each other. In addition, the film attachment apparatus (100) according to an embodiment of the present invention attaches the substrate loading apparatus (160) and the film (F) for supplying the substrates (S) to the substrate suction plate (111) one by one. The substrate unloading device (170) for separating the substrate (S) from the substrate suction plate (111) and the film (F) on the film suction plate (121) provided in the film suction unit (120) one by one. A film supply device (180) for supplying is included.

  As shown in FIGS. 1 and 2, the substrate suction unit (110) supports a plurality of substrate suction plates (111) to which the substrate (S) is sucked and the substrate suction plates (111) so as to be slidable in the vertical direction. A plurality of support members (112), a plurality of support member transfer devices (113) for linearly moving the support members (112), and a substrate carrying turntable (114). The plurality of substrate suction plates (111), the plurality of support members (112), and the plurality of support member transfer devices (113) are mounted on the substrate carrying rotary table (114). The substrate carrying rotary table 114 can be rotated by a certain angle by an actuator that provides a rotational force such as a motor (not shown).

  The plurality of substrate suction plates (111) are arranged at a certain angle with respect to the substrate carrying rotary table (114). The drawing shows that the number of the substrate suction plates (111) is four and these are arranged at intervals of 90 °. However, the number and the arrangement interval of the substrate suction plates (111) may be variously changed. it can. The substrate suction plate (111) can be moved together with the support member (112) by the support member transfer device (113) in the inner and outer sides of the substrate carrying rotary table (114), and is coupled to the support member (112). Can move up and down.

  A large number of suction holes (115) are provided on the front surface of the substrate suction plate (111) so that the substrate (S) can be sucked by a vacuum pressure. The substrate suction plate 111 may be connected to the vacuum pump 150 through a tube, and the vacuum pressure generated in the vacuum pump 150 is provided to a plurality of suction holes 115 through the tube. S) can be adsorbed on the front surface of the substrate adsorbing plate (111). The tube connecting the substrate suction plate (111) and the vacuum pump (150) may be provided with an adjustment valve (151) for adjusting the vacuum pressure.

  As shown in FIG. 2, the support member (112) supports the substrate suction plate (111) so as to be slidable in the vertical direction. The support member (112) includes a guide rail (116) extending in the vertical direction, and a rear surface of the substrate suction plate (111) includes a guide groove (117) into which the guide rail (116) is inserted. Accordingly, when the substrate suction plate (111) receives an external force from the substrate suction plate transfer device (140), the substrate suction plate (111) moves linearly along the guide rail (116). Of course, the coupling structure of the substrate suction plate (111) and the support member (112) is not limited to such a structure, and the substrate suction plate (111) is changed to various structures that can slide on the support member (112). be able to.

  The support member (112) is coupled to a support member transfer device (113) that is coupled to the substrate carrying rotary table (114). The support member transfer device (113) applies an external force to the support member (112) to advance the support member (112) toward the film adsorbing plate (121) located at the attachment position (P1) or to move it backward. Accordingly, the substrate suction plate (111) on which the substrate (S) is attracted can also move in the inner and outer directions of the substrate carrying rotary table (114) together with the support member (112). In the support member transfer device (113), various linear actuators capable of providing a linear moving force to the support member (112) can be used.

  In such a substrate adsorption unit (110), the substrate (S) adsorbed to the plurality of substrate adsorption plates (111) by the rotation of the substrate carrying rotary table (123) is loaded one by one in the loading position (P2) and the adhesion position. (P1) and unloaded position (P3). When the substrate suction plate (111) is positioned at the loading position (P2), the substrate loading device (160) supplies one substrate (S) to the substrate suction plate (111) and one substrate suction plate (111). The substrate (S) is adsorbed. When the substrate suction plate (111) is positioned at the attachment position (P1), the film (F) is attached to the substrate (S), and when the substrate suction plate (111) is positioned at the unloading position (P3). The unloading device (170) separates the substrate (S) on which the film (F) is attached from the substrate suction plate (111). The substrate loading device (160) and the substrate unloading device (170) can supply various substrates (S) one by one to the substrate suction plate (111) or can separate the substrate (S) from the substrate suction plate (111). Since it can be a structure, a detailed description thereof will be omitted.

  As shown in FIGS. 1 and 3, the film adsorption unit (120) includes a plurality of film adsorption plates (121) and a film adsorption plate (121) to which the film (F) attached to the substrate (S) is adsorbed. A plurality of film adsorbing plate tilting devices (122) for tilting, and a film carrying rotary table (123) are included. The plurality of film adsorption plates (121) and the plurality of film adsorption plate tilting devices (122) are mounted on the film carrying rotary table (123). The film carrying rotary table 123 can be rotated by a certain angle by an actuator that provides a rotational force such as a motor (not shown).

  The plurality of film suction plates (121) are arranged at a certain angle with respect to the film carrying rotary table (123). Although the drawing shows that the number of the substrate suction plates (111) is four and these are arranged at intervals of 90 °, the number of the film suction plates (121) and the arrangement interval can be variously changed. it can. The lower end of the film adsorbing plate (121) is rotatably coupled to a hinge device (124) coupled to a film carrying rotary table (123).

  If the film adsorption plate tilting device (122) pushes or pulls the film adsorption plate (121), the film adsorption plate (121) can be tilted by rotating a certain angle around the hinge device (124). . If the film adsorption plate (121) is tilted so that its upper end approaches the substrate adsorption plate (111) located at the attachment position (P1), one end of the film (F) adsorbed on the film adsorption plate (121) is adsorbed to the substrate. It can be attached to the substrate (S) adsorbed to the plate (111). The end of the film suction plate tilting device (122) is coupled to the film suction plate (121). The film suction plate tilting device (122) may use various types of actuators that can push or pull the film suction plate (121).

  In addition, a hinge device may be provided on the upper side of the film suction plate so that the film suction plate is tilted on the upper side of the film suction plate by the operation of the film suction plate tilting device. A large number of suction holes (125) are provided on the front surface of the film suction plate (121) so that the film (F) can be sucked by a vacuum pressure. The film suction plate 121 may be connected to the vacuum pump 150 through a tube, and the vacuum pressure generated in the vacuum pump 150 may be provided to a plurality of suction holes 125 through the tube. F) can be adsorbed on the front surface of the film adsorption plate (121). The tube connecting the film adsorption plate (121) and the vacuum pump (150) may be provided with an adjustment valve (152) for adjusting the vacuum pressure.

  As shown in FIGS. 3 and 4, a pressure roller (130) is provided on the upper end of the film adsorption plate (121). The pressure roller (130) moves the film (F) to the substrate (S) side when the film (F) adsorbed to the film adsorption plate (121) contacts the substrate (S) adsorbed to the substrate adsorption plate (111). The film (F) does not float and is applied smoothly to the substrate (S). The pressure roller (130) may be coupled to the film suction plate (121) so as to be rotated by a known rotation assist device such as a bearing. Further, the pressure roller 130 can be made of a material having elasticity such as rubber or silicone in order to improve the adhesion.

  As shown in FIG. 3, the film supply device (180) includes a film supply plate (181) for adsorbing the film (F), and a film supply plate rotating device (182) for rotating the film supply plate (181). including. The film supply plate (181) is rotatably supported by the hinge device (183), and is rotated by a certain angle around the hinge device (183) by the film supply plate rotation device (182). The film supply plate (181) is provided with a plurality of suction holes (184) on one side for sucking the film (F). The film supply plate (181) may be connected to the vacuum pump (150) through a tube. The tube connecting the film supply plate (181) and the vacuum pump (150) has an adjustment valve (for adjusting the vacuum pressure). 153) may be provided. The structure of the film supply device (180) is not limited to that shown in the figure. The film supply device 180 may be changed in various structures that can supply the film (F) to the film adsorption plate 121 one by one.

  As described above, in the film adsorption unit (120), the plurality of film adsorption plates (121) are moved to the film supply position (P4) and the adhesion position (P1) by the rotation of the film carrying rotary table (123). When the film adsorbing plate (121) is positioned at the film supply position (P4), the film supplying device (180) supplies one film (F) to the film adsorbing plate (121), and the film adsorbing plate (121) Two films (F) are adsorbed. When the film suction plate (121) is positioned at the attachment position (P1), the film (F) of the film suction plate (121) moves to the substrate (S) sucked by the substrate suction plate (111). When the film (F) is provided with an adhesive surface, the protective sheet attached to the film (F) and covering the adhesive surface is removed from the film (F) before the film (F) moves to the attachment position (P1). . As a method for removing the protective sheet from the film (F), various known methods can be used, and detailed description thereof will be omitted.

As shown in FIGS. 1 and 2, the substrate suction plate transfer device (140) is disposed at the attachment position (P1). The substrate suction plate transfer device (140) slides the substrate suction plate (111) moved to the attachment position (P1) in the vertical direction along the guide rail (116). The substrate adsorbing plate transfer device (140) applies an external force to the substrate adsorbing plate (111) to move the substrate adsorbing plate (111) up and down, and an operating member for operating the operating member (141). Including a drive (142). The actuating member (141) includes a pair of fingers (143). The pair of fingers (143) can take the upper end of the substrate suction plate (111) by being close to each other, and can be separated from the substrate suction plate (111) by being far from each other.
The operating member driving device (142) pushes the operating member (141) downward or pulls the operating member (141) upward. If the operating member driving device (142) moves the operating member (141) upward in a state where the operating member (141) takes the upper end of the substrate adsorbing plate (111), the substrate adsorbing plate (111) is moved to the guide rail (116). ) And slide upwards. Then, when the operating member driving device (142) moves the operating member (141) in the lower direction while the substrate adsorbing plate (111) is raised, the substrate adsorbing plate (111) slides in the lower direction.

  Of course, when the substrate suction plate (111) can be easily slid by the guide rail (116), the substrate suction plate (111) can be moved without the substrate suction plate transfer device (140) pushing the substrate suction plate (111) downward. ) Can slide downward by its own weight. In the operating member driving device (142), various linear actuators that provide a linear moving force to the operating member (141) can be used.

  In the present invention, the specific structure of the operating member (141) and the structure of the substrate suction plate transfer device (140) are not limited to those shown in the drawings, and can be variously changed. For example, the substrate suction plate transfer device (140) may be disposed below the substrate suction plate (111). In this case, the finger (143) of the operating member (141) can be omitted, and the substrate suction plate (111) slides upward when the substrate suction plate transfer device (140) pushes the substrate suction plate (111) upward. When the substrate suction plate transfer device (140) is moved, the substrate suction plate (111) can also slide in the lower direction. In addition, the substrate suction plate transfer device (140) can be changed to various structures that can move the substrate suction plate (111) linearly by applying an external force to the substrate suction plate (111).

  Hereinafter, the operation of the film deposition apparatus 100 according to an embodiment of the present invention will be described with reference to the accompanying drawings.

  If one substrate suction plate (111) moves to the loading position (P2), the substrate loading device (160) supplies the substrate (S) to one substrate suction plate (111) at the loading position (P2). The substrate (S) is adsorbed on the substrate adsorption plate (111). Thereafter, the substrate carrying rotary table (114) rotates by a certain angle, and the substrate suction plate (111) on which the substrate (S) is sucked moves to the attachment position (P1).

  Separately from this, one film adsorption plate (121) supplied with the film (F) by the film supply device (180) at the film supply position (P4) is attached to the attachment position (123) by the rotation of the film carrying rotary table (123). Move to P1).

  As shown in FIG. 4, the substrate adsorption plate (111) on which the substrate (S) is adsorbed and the film adsorption plate (121) on which the film (F) is adsorbed are supported at the attachment position (P 1). The member transfer device (113) pushes the support member (112) toward the film suction plate (121), and the film suction plate tilting device (122) tilts the film suction plate (121). At this time, the film adsorbing plate (121) rotates by a certain angle around the hinge device (124), and its upper end approaches the substrate adsorbing plate (111), and the film (F) adsorbed on the substrate adsorbing plate (111). Is attached to one end of the substrate (S) adsorbed on the substrate adsorbing plate (111). At the same time, the pressure roller (130) presses one end of the film (F) in contact with the substrate (S) toward the substrate (S).

  Thereafter, the substrate suction plate transfer device (140) is operated to lower the operating member (141) and take the upper end of the substrate suction plate (111). Subsequently, as shown in FIG. 5, the operating member (141) is raised by the operating member driving device (142), and the substrate suction plate (111) is moved upward along the guide rail (116). At this time, the film (F) adsorbed on the film adsorbing plate (121) is gradually attached to the substrate (S) from one end. In this process, the pressure roller (130) presses the film (F) attached to the substrate (S) toward the substrate (S), so that the film (F) floats or the substrate (S) and the film (F). The film (F) can be smoothly attached to the substrate (S) without generating air bubbles between them.

  In the process in which the film (F) gradually moves toward the substrate (S), the vacuum suction force of the film suction plate (121) can be gradually reduced while the film (F) moves to the substrate (S). .

  As described above, the film attaching apparatus 100 according to the embodiment of the present invention gradually attaches the film (F) to the substrate (S) from one end to the other end, thereby interposing bubbles or the like on the attaching surface. The film (F) can be stably attached to the substrate (S) without any problems.

  Further, a compact structure is possible by reducing the occupied space and operation range of parts for supplying and carrying the substrate (S) and the film (F), and one substrate adsorption arranged at the attachment position (P1). Since all the board | substrate adsorption | suction plates (111) moved to the adhesion position (P1) using the board | substrate transfer apparatus (140) can be moved, the number of components and installation cost can be reduced.

  6 to 8 show a film deposition apparatus according to another embodiment of the present invention.

  The film adhering apparatus (200) according to another embodiment of the present invention is substantially the same in configuration as the film adhering apparatus (200) according to one embodiment of the present invention described above. ) Is provided with a single film pressure device (210) instead of the plurality of pressure rollers (130). One film pressurizing device (210) disposed at the attachment position (P1) serves to pressurize the film (F) toward the substrate (S). Below, the same code | symbol is provided to the same part as the structure of the above-mentioned film adhesion apparatus (100), and the detailed description with respect to it is abbreviate | omitted.

  As shown in FIGS. 6 and 7, one film pressing device (210) is disposed at the attachment position (P 1). When the film (F) adsorbed by the film adsorbing plate (121) comes into contact with the substrate (S) adsorbed by the substrate adsorbing plate (111), the film pressing device (210) moves the film (F) to the substrate (S). A pressure roller (211) for pressurizing to the side, and a pressure roller transfer device for moving the pressure roller (211) forward in the direction of pressing the film (F) and backward in the direction away from the film (F) ( 212). The pressure roller (211) is rotatably coupled to a support bracket (213) provided in the pressure roller transfer device (212). In the pressure roller transfer device (212), various linear actuators that can provide a linear moving force to the pressure roller (211) can be used.

  As shown in FIG. 8, when the film adsorbing plate (121) moved to the attachment position (P1) is tilted and one end of the film (F) adsorbed here comes into contact with the substrate (S), the pressure roller ( 211) proceeds to pressurize the film (F) to the substrate (S) side. Thereafter, the substrate suction plate transfer device (140) is operated to move the substrate (S) upward, so that the film (F) is gradually attached to the substrate (S) from one end to the other end. At this time, since the pressure roller (211) presses the film (F) toward the substrate (S), the film (F) can be smoothly attached to the substrate (S) without floating on the substrate (S).

  When the adhesion of the film (F) is completed, the pressure roller (211) moves back from the original state and leaves the film (F). Then, if the film adsorption plate (121) on which the new film (F) is adsorbed moves to the adhesion position (P1), it proceeds again to pressurize the film (F) to the substrate (S) side.

  As described above, the film adhering apparatus (200) according to another embodiment of the present invention is adsorbed to the plurality of film adsorbing plates (121) by using one film pressurizing apparatus (210) provided at the adhering position (P1). The film (F) can be sequentially pressed to the substrate suction plate (111) side.

  In the present invention, the direction in which the substrate suction plate (111) is slid by the substrate suction plate transfer device (140) is not limited to the vertical direction, as shown in the figure, and can be the horizontal direction. In this case, the direction in which the film suction plate (121) is tilted varies depending on the moving direction of the substrate suction plate (111).

  On the other hand, in the above-described embodiment, the substrate suction unit (110) includes the substrate carrying rotary table (114) for moving the substrate suction plate (111), and the film suction unit (120) is the film suction plate (121). However, the present invention is not limited to such a configuration. That is, one or more substrate suction plates (111) may be provided on a straight line without being provided on the rotating substrate carrying rotary table (114). One or a plurality of film adsorbing plates (121) may be provided on a straight line without being provided on the rotating table (123) for carrying the film. In this case, the substrate suction plate (111) and the film suction plate (121) can be provided so as to move linearly to the attachment position, or can be provided so as to stop at the attachment position.

  In addition, it is possible to arrange the film adhering apparatus according to the above-described embodiments of the present invention so that all the films are adhered to both surfaces of the substrate. That is, the film deposition apparatuses according to the embodiments of the present invention are arranged side by side in a continuous manner so that the film is adhered to one surface of the substrate, and the film is adhered to the other surface of the substrate having the film adhered to one surface. You can also. In this case, the unloading apparatus moves to the part where the film is unloaded on all the substrates to which the film is attached on both sides.

  The embodiments of the present invention described above and illustrated in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited by the matters described in the claims, and a person having ordinary knowledge in the technical field of the present invention can improve and change the technical idea of the present invention in various forms. is there. Therefore, such improvements and modifications are obvious to those skilled in the art and belong to the protection scope of the present invention.

100, 200: Film adhesion device 110: Substrate adsorption unit 111: Substrate adsorption plate 112: Support member 113: Support member transfer device 114: Substrate carrying rotary table 116: Guide rail 120: Film adsorption unit 121: Film adsorption plate 122: Film suction plate tilting device 123: Film carrying rotary table 130, 211: Pressure roller 140: Substrate suction plate transfer device 141: Operating member 142: Operating member driving device 143: Finger 150: Vacuum pump 160: Substrate loading device 170 : Substrate unloading device 180: Film supply device 181: Film supply plate

Claims (13)

A substrate suction unit having a substrate suction plate to which a substrate is sucked, and a substrate carrying rotary table that is mounted so that the substrate suction plate is movably rotated to move the substrate suction plate to an attachment position;
A film adsorbing plate for adsorbing a film adhering to the substrate; and for moving the film adsorbing plate to the adhering position so that the film adsorbing plate is mounted and the film adsorbing plate faces the substrate adsorbing plate Rotating film carrying rotary table, and film adsorbing unit having a film adsorbing plate tilting device that tilts the film adsorbing plate mounted on the film carrying rotating table and moved to the adhesion position to the substrate adsorbing plate side ;
When the one end of the film placed at the attachment position and moved to the attachment position is tilted and adsorbed on the film adsorption plate is attached to the substrate adsorbed on the substrate adsorption plate A substrate suction plate transfer device that moves the substrate suction plate so that the film is gradually attached to the substrate from one end to the other end thereof; and a vacuum pressure applied to the substrate suction plate and the film suction plate. One or more vacuum pumps to provide
A film deposition apparatus comprising:   The substrate suction plate transfer device includes an operation member for moving the substrate suction plate by applying an external force to the substrate suction plate, and an operation member driving device for driving the operation member. Item 2. The film deposition apparatus according to Item 1.   3. The film adhering apparatus according to claim 2, further comprising a support member that is mounted on the substrate carrying rotary table and slidably supports the substrate suction plate.   4. The apparatus according to claim 3, further comprising a support member transfer device provided on the turntable for carrying the substrate, and applying an external force to the support member to move the support member in an inner / outer direction of the turntable for carrying the substrate. The film deposition apparatus described.   2. A plurality of the substrate suction plates are arranged on the substrate carrying rotary table at a constant interval, and a plurality of the film adsorption plates are arranged on the film carrying rotary table at a constant interval. The film deposition apparatus described.   A hinge device mounted on the film carrying rotary table and rotatably supporting the film suction plate, wherein the film suction plate is rotated around the hinge device and tilted. Item 2. The film deposition apparatus according to Item 1.   When the film adsorbed on the film adsorbing plate comes into contact with the substrate adsorbed on the substrate adsorbing plate, the apparatus further includes a pressure roller provided on the film adsorbing plate to pressurize the film toward the substrate. The film adhering apparatus according to claim 1.   A pressure roller for pressing the film toward the substrate when the film disposed at the attachment position and adsorbed by the film adsorption plate contacts the substrate adsorbed by the substrate adsorption plate, and the pressure roller 2. The film adhering apparatus according to claim 1, further comprising a film pressurizing device having a pressure roller transfer device for moving the film forward in the direction of pressurizing the film and retreating in the direction away from the film. A substrate loading device for supplying the substrate to the substrate suction plate;
A substrate unloading device for separating the substrate on which the film has been attached from the substrate suction plate; and a film supply device for supplying the film to the film suction unit;
The film deposition apparatus according to claim 1, further comprising: A substrate adsorption unit having a substrate adsorption plate to which the substrate is adsorbed, and a support member that slidably supports the substrate adsorption plate;
A film adsorption unit having a film adsorption plate for adsorbing the film adhering to the substrate, and a film adsorption plate tilting device for tilting the film adsorption plate toward the substrate adsorption plate;
The substrate adsorbing plate and the film adsorbing plate are arranged at the adhering position facing each other, the film adsorbing plate is tilted and adsorbed on the film adsorbing plate, and one end of the film adsorbed on the substrate adsorbing plate A substrate adsorbing plate transfer device for moving the substrate adsorbing plate so that the film is gradually adhered to the substrate from one end to the other end when adhering to the substrate; and the substrate adsorbing plate and the film One or more vacuum pumps for providing vacuum pressure to the suction plate;
A film deposition apparatus comprising: (A) adsorbing the substrate to the substrate adsorbing plate;
(B) a film adsorption stage on the film adsorption plate;
(C) tilting the film adsorption plate toward the substrate adsorption plate so that one end of the film adsorbed on the film adsorption plate is attached to the substrate adsorbed on the substrate adsorption plate; and (d) A step of linearly moving the substrate suction plate to the substrate suction plate transfer device disposed at the attachment position to gradually attach the film from one end to the other end of the substrate;
A film deposition apparatus comprising:   12. The film adhering apparatus according to claim 11, wherein the step (d) includes a step of pressurizing the film adsorbed on the film adsorbing plate with a pressure roller toward the substrate adsorbed on the substrate adsorbing plate.   Before the step (c), the step of moving the substrate adsorption plate to the attachment position, and the film adsorption so that the substrate adsorbed on the substrate adsorption plate and the film adsorbed on the film adsorption plate face each other. The apparatus of claim 11, further comprising moving a plate to the attachment position.

Images