KR101085585B1 - Film bonding apparatus and bonding method of the film - Google Patents

Abstract

A film unit including a film suction plate on which the film is adsorbed, and a film rotating table on which one or more film suction plates are mounted and rotated; And a substrate unit including a substrate adsorption plate on which the substrate to which the film is attached is adsorbed, a substrate support plate on which the substrate adsorption plate is movably installed, and a substrate rotation table on which one or more substrate support plates are mounted and rotated. When the film adsorption plate on which the film is adsorbed is tilted, the substrate adsorbing plate on which the substrate is adsorbed or the substrate support plate on which the substrate adsorption plate is installed is lifted and lowered so that the adhesion of the film proceeds from one side of the substrate to the other side An attachment apparatus and a film attachment method using the same are described.

Description

Film attachment device and attachment method {FILM BONDING APPARATUS AND BONDING METHOD OF THE FILM}

The present invention relates to an apparatus and a method for attaching a film to a substrate for a flat panel display panel. The present invention can stably maintain a contact pressure during a process of attaching a substrate to a film, and can stably perform an attaching process. A film attaching apparatus and method are possible.

Background Art Recently, liquid crystal displays have been widely used in industry, and films for various uses are attached to substrates for flat panel displays such as liquid crystal displays in the manufacturing process.

An example of an apparatus for attaching a film to a substrate for a flat panel display panel is as follows.

In the conventional film attaching apparatus, two film supply units are provided at regular intervals, and the substrate is supplied therebetween. A loading plate is installed in the film supply unit, and the loading plate is rotated at a predetermined angle. The loading plate transfers the supplied film to the attachment position while rotating horizontally or vertically with the bottom surface by the rotating motor. At the end of each loading plate, an attachment roller for pressing the film toward the substrate is provided at the attachment position of the substrate and the film.

In the conventional film attachment apparatus, the substrate is supplied in a straight line, and the film supplied to the loading plate is transferred to the attachment position while rotating in a horizontal or vertical direction at intervals of 90 ° while undergoing a process such as removing a protective sheet. However, the conventional film attachment device configured as described above has a configuration in which the film is in contact with the substrate to be supplied while the substrate is supplied in a straight line. Therefore, the configuration of the apparatus is relatively complicated and it is difficult to implement a compact apparatus.

The present invention is to improve the above-described problems, it is possible to maintain a uniform attachment position and pressure during the attachment of the substrate and the film, so that no bubbles or the like intervening on the attachment surface and installed for the attachment of the film It is to provide a film attachment device having a compact structure and a film attachment method using the same by reducing the occupied space and the operating span.

The technical problem to be achieved by the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned above may be clearly understood by those skilled in the art from the following description. will be.

In order to achieve the above object, the present invention provides a film attachment device, the film attachment device according to the present invention,

A film unit including a film suction plate on which the film is adsorbed, and a film rotating table on which one or more film suction plates are mounted and rotated; And a substrate unit including a substrate adsorption plate on which the substrate to which the film is attached is adsorbed, a substrate support plate on which the substrate adsorption plate is movably installed, and a substrate rotation table on which one or more substrate support plates are mounted and rotated. When the film adsorption plate on which the film is adsorbed is tilted, the substrate adsorption plate on which the substrate is adsorbed or the substrate support plate on which the substrate adsorption plate is installed is lifted and lowered so that the adhesion of the film proceeds from one side of the substrate to the other side. It features.

The film unit may be rotatably provided at a film adsorption plate hinge serving as a tilting center of the film adsorption plate, a film adsorption plate tilting means for rotating the film adsorption plate around the film adsorption plate hinge, and an end of the film adsorption plate opposite to the hinge. It may further include a roller for pressing the film attached to the substrate.

The substrate unit includes a guide rail provided on the substrate support plate to guide the movement of the substrate adsorption plate, substrate adsorption plate transporting means for raising and lowering the substrate adsorption plate in a height direction of the substrate rotation table, and an outer side of the substrate rotation table. It may further include a substrate support plate transfer means for moving the substrate support plate in the direction.

In addition, the film applying apparatus according to the present invention includes a film supply unit for supplying the film to the film unit; A substrate loading unit supplying the substrate to the substrate unit; And a substrate unloading unit configured to unload the substrate, on which the film is attached, from the substrate unit.

In addition, the film applying apparatus according to the present invention may further include a protective sheet removing unit for removing the protective sheet from the film adsorbed on the film suction plate, the protective sheet removing unit is positioned at a predetermined distance from the film rotating table And a first separator which peels off the protective sheet from the film by the adhesive force of the separating tape, and up / down the gap between the film and the protective sheet separated by the first separator. The second separator may be stripped off.

In addition, the present invention provides a film attaching method, the film attaching method according to the present invention,

Mounting the substrate adsorption plate on the substrate support plate provided in the substrate unit so as to be liftable and adsorbing the substrate onto the substrate adsorption plate through a substrate loading unit;

Adsorbing the film on the film adsorption plate of the film unit;

Rotating the substrate unit and the film unit such that the substrate adsorption plate on which the substrate is adsorbed and the film adsorption plate on which the film is adsorbed face each other; And

Tilting the film adsorption plate and elevating the substrate adsorption plate, thereby adhering the film from one side of the substrate to the other side and pressing the portion where the adhesion of the substrate and the film proceeds with a roller; It is done by

According to the film attachment apparatus according to the present invention as described above, the substrate adsorbing plate to which the substrate is adsorbed is raised and lowered, and the substrate adhering film is attached while the film adsorbing plate to which the film is adsorbed is tilted, thereby providing an installation space for the substrate unit and the film unit. This greatly reduces, the operation span of each unit generated when transporting the substrate or film in the horizontal direction is reduced, it is possible to install a large number of units in the same area, and the transfer time of the substrate or film is reduced, so that the substrate and film The time required for attachment can be reduced, which can greatly improve productivity.

In addition, since the transfer structure of the substrate or the film is simplified, the failure rate of the device can be reduced.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this process, the size or shape of the components shown in the drawings may be exaggerated for clarity and convenience of description. In addition, terms that are specifically defined in consideration of the configuration and operation of the present invention may vary depending on the intention or custom of the user or operator. Definitions of these terms should be made based on the contents throughout the specification.

1 is a plan view showing the structure of a film attachment device according to an embodiment of the present invention, Figure 3 is a perspective view showing the structure of a substrate unit according to an embodiment of the present invention, Figure 4 is an embodiment of the present invention FIG. 5 is a side view illustrating a film supply unit and a film unit, and FIG. 5 is a side view illustrating a protective sheet removing unit according to an embodiment of the present invention, and FIG. 6 is a view illustrating operations of a substrate unit and a film adsorption plate according to an embodiment of the present invention. It is a side view explaining. With reference to the accompanying drawings will be described in detail the configuration and operation of the film attachment device according to an embodiment of the present invention.

The film attaching apparatus 100 of the present invention includes a substrate unit 120 on which a substrate is adsorbed, and a film unit 130 on which a film is adsorbed.

 The substrate unit 120 includes a substrate rotation table 121, a substrate support plate 122, a substrate adsorption plate 123, a substrate support plate transport means 127, and a substrate adsorption plate transport means 125.

In addition, the substrate loading unit 20 and the substrate unloading unit 50 may be provided adjacent to the substrate unit 120. The substrate loading unit 20 is a device for transferring and supplying the substrate G, and serves to store and supply the substrate G as a sheet from a substrate cassette (not shown). The substrate unloading part 50 plays a role of unloading the substrate G on which the film F is attached and discharging it to the outside.

One or more substrate support plates 122 are mounted on the substrate rotation table 121 to be rotated, so that the loading position facing the substrate loading unit 20, the attachment position facing the film unit 130, and the substrate unloading unit 50 are fixed. ) Will be placed sequentially in the unloading position facing. To this end, a motor, an actuator, or the like for rotating the substrate rotating table 121 is connected to the substrate rotating table 121. In addition, the substrate support plate 122 is connected to the substrate support plate transfer means 127 for moving the substrate support plate 122 back and forth. The substrate support plate 122 moves back and forth according to the operation of the substrate support plate transfer means 127. The substrate support plate transfer means 125 may have various embodiments such as a lead screw structure connected to a motor or a linear guide connected to a cylinder.

The substrate adsorption plate 123 is installed on the substrate support plate 122 to be movable up and down. To this end, a guide rail 200 is installed on the substrate support plate 122, and a substrate adsorption plate 123 is installed on the guide rail 200. The guide rail 200 guides the substrate suction plate 123 to be elevated. In addition, the substrate adsorption plate 123 is connected to the substrate adsorption plate transfer means 125. According to the operation of the substrate adsorption plate transfer means 125, the substrate adsorption plate 123 is moved up and down along the guide rail 200 installed on the substrate support plate 122. The substrate adsorption plate transfer means 125 may have various embodiments such as a lead screw structure connected to a motor or a linear guide connected to a cylinder. Adsorption holes H are formed in the substrate adsorption plate 123. Adsorption hole (H) is connected to the vacuum pump to generate the adsorption force or a configuration that can express the same effect, which is a known technique, detailed description thereof will be omitted. The substrate G is vacuum-adsorbed to the adsorption hole H formed in the substrate adsorption plate 123 provided to be movable in the substrate support plate 122.

The film unit 130 includes a film suction plate 132, a film rotating table 131, a film suction plate tilting part 134, and a roller 145.

In the film adsorption plate 132, adsorption holes H through which the film is adsorbed are formed. The film F is vacuum-adsorbed to the adsorption hole H. The film suction plate 132 is mounted on the film rotating table 131 and rotated so that the film suction plate 132 faces the film supply unit 30 to receive the film, and faces the substrate unit 120 to attach the film to the substrate. One or more film adsorption plates 132 are attached to the film rotation table 131 and rotated to each position. The film rotation table 131 is connected to a motor, an actuator, and the like to rotate the film rotation table 131.

The film adsorption plate tilting unit 134 includes a hinge 138 serving as a tilting center of the film adsorption plate 132 and a film adsorption plate tilting means 134 for tilting the film adsorption plate 132. The hinge 138 is installed at the lower or upper portion of the film adsorption plate, and the film adsorption plate 132 is rotated around the hinge 138. The film adsorption plate tilting means 134 is connected to the film adsorption plate 132, and the film adsorption plate 132 is tilted about the hinge 138 by the operation of the film adsorption plate tilting means 134. The film adsorption plate tilting means 134 may be various embodiments such as a lead screw structure connected to a motor or a linear guide connected to a cylinder.

The roller 145 serves to adhere and press the film in contact with the substrate, and is rotatably installed at the end of the film adsorption plate opposite to the hinge 138 of the film adsorption plate 132. That is, the roller 145 is installed so as to press the film against the substrate while being rolled at the end of the film adsorption plate 132 by a known rotatable means such as a bearing structure. Therefore, the roller 145 is preferably installed so that a portion of the circumference is exposed at the end of the film adsorption plate 132 to compress the film to the substrate. For this purpose, the diameter of the roller 145 is preferably slightly larger than the thickness of the film adsorption plate 132.

In addition, the present invention may further include a protective sheet removing unit 40 to peel off the protective sheet from the film assuming that the film is attached to the substrate is a protective sheet, such as a polarizing film.

As shown in FIG. 4, the protective sheet removing unit 40 includes a first separator 41 and a second separator 45 to separate and remove the protective sheet through two separation operations. The first separator 41 is positioned at a predetermined distance from the film rotating table 131 and primarily separates the protective sheet F1 from the film F by the adhesive force of the separating tape 42. The second separator 45 secondly separates the remaining part by a separation operation of up / down between the gaps of the protective sheet F1 separated primarily from the film F by the first separator 41.

Hereinafter, the operation of the film applying apparatus 100 according to the present invention.

First, the substrate loading unit 20 supplies the substrate G to the substrate adsorption plate 123. At this time, the negative pressure formed through the adsorption holes H adsorbs and fixes the substrate G.

As the substrate rotation table 121 is rotated by the operation of the motor, the substrate support plate 122 and the substrate adsorption plate 123 attached thereto are rotated to the attachment position. The attachment position is a position where the substrate adsorption plate 123 and the film adsorption plate 132 face each other.

The film supply part 30 supplies the film F to the film adsorption plate 132.

An example in which the film F is supplied will be described with reference to FIG. 3, and the supply plate 31 of the film supply unit 30 is in a horizontally spread state, and is then supplied at 90 degrees while supplying the film to the film adsorption plate 132. do. For this purpose, the feed plate 31 is rotated about the feed plate hinge 32. The supply plate 31 rotated by 90 degrees faces the film adsorption plate 132 of the film unit 130, and transfers the film adsorbed on the supply plate 31 to the film adsorption plate 132 by a negative pressure difference. .

The film suction plate 132 that has received the film F is mounted on the film rotating table 131 and rotated by the driving of the motor 133.

If there is a protective sheet F1 in the film F adsorbed on the film adsorption plate 132, before moving to the attachment position, the film adsorption plate 132 is rotated to a position facing the protective sheet removal unit 40, Here, the protective sheet F1 is peeled off by the operation of the protective sheet removing unit 40.

By each rotation, the film adsorption plate 132 and the substrate adsorption plate 123 face each other, and this position becomes the attachment position. At the attachment position, the film adsorption plate 132 rotates about the hinge 138 by the operation of the film adsorption plate tilting means 134, and the substrate adsorption plate 123 is moved by the operation of the substrate adsorption plate transfer means 125. It will descend. The substrate support plate transfer means 127 in this faced state is determined whether or not the operation according to the device design. That is, when the film attached to the tilted film adsorption plate 132 and the substrate attached to the substrate adsorption plate 123 do not contact each other, the substrate loading plate transfer means 127 operates to contact the film and the substrate. The film and the substrate are in linear contact with each other by the tilting of the film adsorption plate 132 and the lifting and lowering movement of the substrate adsorption plate 123 or the tilting of the film adsorption plate 132. The roller 145 provided at the end of the tilted film adsorption plate 132 presses the film in contact with the substrate toward the substrate, and the film is attached to the substrate while the substrate adsorption plate 123 is raised and lowered while maintaining the pressure. . That is, the substrate and the film are uniformly adhered without generating bubbles by tilting the film adsorption plate 132, moving up and down the substrate adsorption plate 123, and pressing the roller. Although not described in detail or illustrated, an embodiment in which the adhesion of the film proceeds from one side of the substrate to the other side by moving the substrate support plate 122 on which the substrate adsorption plate 123 is installed is possible.

The substrate adsorption plate 123 on which the substrate on which the film is attached is adsorbed is rotated to a position facing the substrate unloading part 50 by the rotation of the substrate rotation table 121. The substrate unloading unit 50 unloads the substrate adsorbed on the substrate adsorption plate 123 and discharges it to the outside.

According to the film attachment device of the present invention having the above configuration and operation, the substrate adsorption plate 123 to which the substrate is adsorbed is lifted and the film adsorption plate 132 to which the film is adsorbed is attached to the substrate and the film. Therefore, the installation space of the substrate unit and the film unit is greatly reduced, and the operation span of each unit generated when transporting the substrate or the film in the horizontal direction is reduced, so that a large number of units can be installed in the same area. Since the transfer time is reduced, the time required for the attachment of the substrate and the film can be shortened, which can greatly improve productivity. In addition, since the transfer structure of the substrate or the film is simplified, the failure rate of the device can be reduced.

2 is a plan view showing a film attachment device according to another embodiment of the present invention. Since this embodiment has almost the same configuration as the previous embodiment, the same reference numerals are used, and overlapping descriptions will be omitted.

The film attaching apparatus according to the present exemplary embodiment includes a first substrate unit 120, a first film unit 130, a second substrate unit 120 ′, and a second film unit 130 ′.

The detailed configuration of each unit unit is the same as that described in the above embodiment, and the first film unit 130 is positioned to face the first substrate unit 120, and also faces the first substrate unit 120. The second substrate unit 120 ′ is positioned so that the second substrate unit 120 ′ may face the second substrate unit 120 ′.

In some cases, the film may need to be attached to both sides of the substrate. In this case, the film may be attached to both sides of the substrate by a single automated process by the apparatus as in the present embodiment.

That is, the film is attached to one surface of the substrate by the operation of the first substrate unit 120 and the first film unit 130 as described in the previous embodiment.

The substrate on which the film is attached to one surface moves to a position facing the second substrate unit 120 'by rotation, and at this time, the substrate attached to the first substrate unit 120 by the operation of the substrate support plate transfer means 127. Is facing the substrate adsorption plate of the second substrate unit 120 '. The substrate is transferred to the second substrate unit 120 'when the negative pressure of the first substrate unit 120 that delivers the substrate in the facing state is removed and the negative pressure of the second substrate unit 120' receiving the substrate is applied. .

On the substrate transferred to the second substrate unit 120 ', the surface on which the film is not attached is exposed and the film is not attached by the operation of the second substrate unit 120' and the second film unit 130 '. The film will be attached to the other side of the substrate.

The embodiments of the present invention described above and illustrated in the drawings should not be construed as limiting the technical idea of the present invention. The protection scope of the present invention is limited only by the matters described in the claims, and those skilled in the art can change and change the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the protection scope of the present invention as long as it will be apparent to those skilled in the art.

1 is a plan view showing the structure of a film applying apparatus according to an embodiment of the present invention.

2 is a plan view showing the structure of a film attaching apparatus according to another embodiment of the present invention.

3 is a perspective view showing the structure of the substrate unit of the present invention.

4 is a side view showing the supply unit and the film unit of the present invention.

5 is a side view showing the protective sheet removing unit of the present invention.

It is a side view explaining operation | movement of the board | substrate unit and film adsorption plate of this invention.

<Explanation of symbols for the main parts of the drawings>

20. . Substrate Loading Section 30. . Film supply

31. . Feed Plate 32.. . Feed plate hinge

30 '. . . Second supply unit 40. . Protective sheet removal unit

50. . Substrate unloading unit 100. . Film attachment device

120. . Board unit 120 '. . . 2nd board unit

121. . Substrate Rotation Table 122.. . Board Support Plate

123. . Substrate Suction Plate 125. . Substrate Suction Plate Feeder

127. . 130. Substrate support plate transfer means. . Film unit

130 '. . . Second Film Unit 131. . Film rotating table

132. . Film Suction Plate 133. . motor

134. . Film suction plate tilting means 138. . Film suction plate hinge

145. . Roller 200. . Guide rail

F1. . . Protective sheet F.. . film

G.. . Substrate H.. . Adsorption hall

Claims (8)

A film adsorbing plate on which the film is adsorbed, a film rotating table on which one or more film adsorbing plates are mounted and rotated, a film adsorbing plate hinge serving as a tilting center of the film adsorbing plate, and a film rotating the film adsorbing plate around the film adsorbing plate hinge A film unit including a suction plate tilting means and a roller rotatably provided at an end of the film suction plate opposite the hinge to press the film attached to the substrate; And a substrate unit including a substrate adsorption plate on which the substrate to which the film is attached is adsorbed, a substrate support plate on which the substrate adsorption plate is movably installed, and a substrate rotation table on which one or more substrate support plates are mounted and rotated. When the film adsorption plate on which the film is adsorbed is tilted, the substrate adsorption plate on which the substrate is adsorbed or the substrate support plate on which the substrate adsorption plate is installed is lifted and lowered so that the adhesion of the film proceeds from one side of the substrate to the other side. Film attachment device. delete The method of claim 1, The substrate unit, A guide rail installed at the substrate support plate to guide the movement of the substrate suction plate; Substrate suction plate conveying means for elevating and lowering the substrate suction plate in a height direction of the substrate rotating table; And a substrate support plate transfer means for moving the substrate support plate in an outward direction of the substrate rotation table. The method of claim 1, A film supply unit for supplying the film to the film unit; A substrate loading unit supplying the substrate to the substrate unit; And a substrate unloading part which unloads the substrate, on which the film is attached, from the substrate unit. The method of claim 1, And a protective sheet removing unit for removing the protective sheet from the film adsorbed on the film adsorption plate. The method of claim 5, The protective sheet removal unit, A first separator positioned at a predetermined distance from the film rotating table and peeling the protective sheet from the film by an adhesive force of a separating tape; And a second separator for peeling off the protective sheet by up / down to a gap between the film and the protective sheet separated by the first separator. delete delete

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