JP2013510323A5 - - Google Patents

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Publication number
JP2013510323A5
JP2013510323A5 JP2012538063A JP2012538063A JP2013510323A5 JP 2013510323 A5 JP2013510323 A5 JP 2013510323A5 JP 2012538063 A JP2012538063 A JP 2012538063A JP 2012538063 A JP2012538063 A JP 2012538063A JP 2013510323 A5 JP2013510323 A5 JP 2013510323A5
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JP
Japan
Prior art keywords
vacuum chamber
vacuum
gas
analysis method
gas analysis
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Application number
JP2012538063A
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English (en)
Japanese (ja)
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JP5756810B2 (ja
JP2013510323A (ja
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Priority claimed from PCT/US2010/055852 external-priority patent/WO2011057201A2/en
Publication of JP2013510323A publication Critical patent/JP2013510323A/ja
Publication of JP2013510323A5 publication Critical patent/JP2013510323A5/ja
Application granted granted Critical
Publication of JP5756810B2 publication Critical patent/JP5756810B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012538063A 2009-11-09 2010-11-08 真空品質測定システム Expired - Fee Related JP5756810B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US28082509P 2009-11-09 2009-11-09
US61/280,825 2009-11-09
US32499210P 2010-04-16 2010-04-16
US61/324,992 2010-04-16
PCT/US2010/055852 WO2011057201A2 (en) 2009-11-09 2010-11-08 Vacuum quality measurement system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015111021A Division JP6019173B2 (ja) 2009-11-09 2015-06-01 真空品質測定システム

Publications (3)

Publication Number Publication Date
JP2013510323A JP2013510323A (ja) 2013-03-21
JP2013510323A5 true JP2013510323A5 (https=) 2013-12-26
JP5756810B2 JP5756810B2 (ja) 2015-07-29

Family

ID=43970810

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012538063A Expired - Fee Related JP5756810B2 (ja) 2009-11-09 2010-11-08 真空品質測定システム
JP2015111021A Expired - Fee Related JP6019173B2 (ja) 2009-11-09 2015-06-01 真空品質測定システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015111021A Expired - Fee Related JP6019173B2 (ja) 2009-11-09 2015-06-01 真空品質測定システム

Country Status (6)

Country Link
US (1) US9322738B2 (https=)
EP (1) EP2499476A4 (https=)
JP (2) JP5756810B2 (https=)
KR (1) KR101824560B1 (https=)
CN (1) CN102612641B (https=)
WO (1) WO2011057201A2 (https=)

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* Cited by examiner, † Cited by third party
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EP2994736B1 (de) * 2013-05-07 2019-07-10 Lüdolph Management GmbH Dichtheitsprüfanordnung und dichtheitsprüfverfahren
CN104576289B (zh) * 2014-12-31 2017-08-25 聚光科技(杭州)股份有限公司 一种可调真空压力的电感耦合等离子体质谱仪
US10217621B2 (en) * 2017-07-18 2019-02-26 Applied Materials Israel Ltd. Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
CN108760867B (zh) * 2018-03-13 2020-10-09 上海科技大学 Uhv设备互联的原位反应池与内置质谱电四极杆的联用结构
CN112082692B (zh) * 2020-08-05 2021-10-15 国网浙江省电力有限公司嘉兴供电公司 一种抽真空作业真空度实时监测装置
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US11635338B2 (en) * 2020-10-23 2023-04-25 Applied Materials, Inc. Rapid chamber vacuum leak check hardware and maintenance routine
CN113457397B (zh) * 2021-07-23 2022-12-27 北京科思研环保技术有限公司 基于低温等离子净化的工业废气处理系统
CN114115108B (zh) * 2021-11-26 2023-11-21 西北有色金属研究院 电子束熔炼炉双输入控制系统与单输出真空计的连接方法
CN115308291B (zh) * 2022-08-09 2023-06-13 中国科学院合肥物质科学研究院 一种低温泵用低温板性能测试装置

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