KR101824560B1 - 가스 분석기, 가스 분석 방법 및 가스 분석 시스템 - Google Patents

가스 분석기, 가스 분석 방법 및 가스 분석 시스템 Download PDF

Info

Publication number
KR101824560B1
KR101824560B1 KR1020127014884A KR20127014884A KR101824560B1 KR 101824560 B1 KR101824560 B1 KR 101824560B1 KR 1020127014884 A KR1020127014884 A KR 1020127014884A KR 20127014884 A KR20127014884 A KR 20127014884A KR 101824560 B1 KR101824560 B1 KR 101824560B1
Authority
KR
South Korea
Prior art keywords
vacuum chamber
vacuum
sensor
mass
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020127014884A
Other languages
English (en)
Korean (ko)
Other versions
KR20120091344A (ko
Inventor
제라르도 에이. 브룩커
케네쓰 디. 주니어 반 안트워프
Original Assignee
엠케이에스 인스트루먼츠, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엠케이에스 인스트루먼츠, 인코포레이티드 filed Critical 엠케이에스 인스트루먼츠, 인코포레이티드
Publication of KR20120091344A publication Critical patent/KR20120091344A/ko
Application granted granted Critical
Publication of KR101824560B1 publication Critical patent/KR101824560B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/02—Vacuum gauges having a compression chamber in which gas, whose pressure is to be measured, is compressed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020127014884A 2009-11-09 2010-11-08 가스 분석기, 가스 분석 방법 및 가스 분석 시스템 Expired - Fee Related KR101824560B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US28082509P 2009-11-09 2009-11-09
US61/280,825 2009-11-09
US32499210P 2010-04-16 2010-04-16
US61/324,992 2010-04-16
PCT/US2010/055852 WO2011057201A2 (en) 2009-11-09 2010-11-08 Vacuum quality measurement system

Publications (2)

Publication Number Publication Date
KR20120091344A KR20120091344A (ko) 2012-08-17
KR101824560B1 true KR101824560B1 (ko) 2018-03-14

Family

ID=43970810

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127014884A Expired - Fee Related KR101824560B1 (ko) 2009-11-09 2010-11-08 가스 분석기, 가스 분석 방법 및 가스 분석 시스템

Country Status (6)

Country Link
US (1) US9322738B2 (https=)
EP (1) EP2499476A4 (https=)
JP (2) JP5756810B2 (https=)
KR (1) KR101824560B1 (https=)
CN (1) CN102612641B (https=)
WO (1) WO2011057201A2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2994736B1 (de) * 2013-05-07 2019-07-10 Lüdolph Management GmbH Dichtheitsprüfanordnung und dichtheitsprüfverfahren
CN104576289B (zh) * 2014-12-31 2017-08-25 聚光科技(杭州)股份有限公司 一种可调真空压力的电感耦合等离子体质谱仪
US10217621B2 (en) * 2017-07-18 2019-02-26 Applied Materials Israel Ltd. Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
CN108760867B (zh) * 2018-03-13 2020-10-09 上海科技大学 Uhv设备互联的原位反应池与内置质谱电四极杆的联用结构
CN112082692B (zh) * 2020-08-05 2021-10-15 国网浙江省电力有限公司嘉兴供电公司 一种抽真空作业真空度实时监测装置
US11747233B2 (en) * 2020-09-28 2023-09-05 Agilent Technologies, Inc. Gas leak detector cartridge
US11635338B2 (en) * 2020-10-23 2023-04-25 Applied Materials, Inc. Rapid chamber vacuum leak check hardware and maintenance routine
CN113457397B (zh) * 2021-07-23 2022-12-27 北京科思研环保技术有限公司 基于低温等离子净化的工业废气处理系统
CN114115108B (zh) * 2021-11-26 2023-11-21 西北有色金属研究院 电子束熔炼炉双输入控制系统与单输出真空计的连接方法
CN115308291B (zh) * 2022-08-09 2023-06-13 中国科学院合肥物质科学研究院 一种低温泵用低温板性能测试装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762212A (en) 1971-07-15 1973-10-02 Advanced Technologies Inc Leak testing apparatus and methods
JP2002005806A (ja) * 2000-06-16 2002-01-09 Murata Mfg Co Ltd 圧力測定方法および放出ガス量測定方法
JP2007095825A (ja) * 2005-09-27 2007-04-12 Mitsubishi Heavy Ind Ltd 真空処理装置及びその不純物監視方法
WO2008063497A2 (en) 2006-11-13 2008-05-29 Brooks Automation, Inc. Electrostatic ion trap

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3085913A (en) * 1960-10-03 1963-04-16 Ibm Vacuum evaporation method
JPS5811782A (ja) * 1981-07-13 1983-01-22 Oki Electric Ind Co Ltd 金属膜の形成方法
JPS61130485A (ja) 1984-11-28 1986-06-18 Mitsubishi Electric Corp 真空モニタ装置
JPS62218834A (ja) 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd 気体圧力計
JPH05215633A (ja) 1992-02-06 1993-08-24 Fujitsu Ltd 真空装置の監視装置及び監視方法
JPH0845856A (ja) * 1994-07-26 1996-02-16 Hitachi Ltd 減圧処理方法および装置
FI113805B (fi) * 1998-04-03 2004-06-15 Licentia Oy Menetelmä ja laite kaasuseosten analysoimiseksi
ES2165823B8 (es) * 2000-09-15 2014-06-05 Consejo Superior De Investigaciones Cientificas Procedimiento y dispositivo para medir la resistencia la hidruracion de tubos y vainas tubulares.
US7022992B2 (en) 2002-01-17 2006-04-04 American Air Liquide, Inc. Method and apparatus for real-time monitoring of furnace flue gases
US7223965B2 (en) 2002-08-29 2007-05-29 Siemens Energy & Automation, Inc. Method, system, and device for optimizing an FTMS variable
CN100437887C (zh) * 2002-08-29 2008-11-26 西门子能量及自动化公司 优化ftms变量的方法、系统与装置
US6822223B2 (en) * 2002-08-29 2004-11-23 Siemens Energy & Automation, Inc. Method, system and device for performing quantitative analysis using an FTMS
KR100588050B1 (ko) 2003-02-14 2006-06-09 박래준 진공관의 진공배기를 위한 진공배기장치 및 진공배기방법
JP5404984B2 (ja) * 2003-04-24 2014-02-05 東京エレクトロン株式会社 プラズマモニタリング方法、プラズマモニタリング装置及びプラズマ処理装置
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
US7531469B2 (en) 2004-10-23 2009-05-12 Applied Materials, Inc. Dosimetry using optical emission spectroscopy/residual gas analyzer in conjunction with ion current
CN1786704A (zh) 2004-12-08 2006-06-14 上海永新彩色显像管股份有限公司 彩色显像管扫屏放气性能的测试方法
CN2757130Y (zh) * 2004-12-08 2006-02-08 上海永新彩色显像管股份有限公司 彩色显像管残余气体分析设备
US7313966B2 (en) 2004-12-14 2008-01-01 Brooks Automation, Inc. Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
US7867779B2 (en) * 2005-02-03 2011-01-11 Air Products And Chemicals, Inc. System and method comprising same for measurement and/or analysis of particles in gas stream
US7289863B2 (en) * 2005-08-18 2007-10-30 Brooks Automation, Inc. System and method for electronic diagnostics of a process vacuum environment
FR2897434B1 (fr) * 2006-02-15 2014-07-11 Commissariat Energie Atomique Procede et dispositif de mesure de permeation
JP4958258B2 (ja) 2006-03-17 2012-06-20 株式会社リガク ガス分析装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762212A (en) 1971-07-15 1973-10-02 Advanced Technologies Inc Leak testing apparatus and methods
JP2002005806A (ja) * 2000-06-16 2002-01-09 Murata Mfg Co Ltd 圧力測定方法および放出ガス量測定方法
JP2007095825A (ja) * 2005-09-27 2007-04-12 Mitsubishi Heavy Ind Ltd 真空処理装置及びその不純物監視方法
WO2008063497A2 (en) 2006-11-13 2008-05-29 Brooks Automation, Inc. Electrostatic ion trap

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
BONUCCI, A., et al. A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS. In: Proc. of SPIE Vol. 2008. p. 68840M-1.

Also Published As

Publication number Publication date
EP2499476A2 (en) 2012-09-19
US20120227465A1 (en) 2012-09-13
WO2011057201A3 (en) 2011-08-18
JP5756810B2 (ja) 2015-07-29
EP2499476A4 (en) 2017-07-26
WO2011057201A2 (en) 2011-05-12
CN102612641B (zh) 2015-01-14
KR20120091344A (ko) 2012-08-17
JP2013510323A (ja) 2013-03-21
JP6019173B2 (ja) 2016-11-02
JP2015172594A (ja) 2015-10-01
US9322738B2 (en) 2016-04-26
CN102612641A (zh) 2012-07-25

Similar Documents

Publication Publication Date Title
KR101824560B1 (ko) 가스 분석기, 가스 분석 방법 및 가스 분석 시스템
US9153414B2 (en) Particle optical apparatus with a predetermined final vacuum pressure
EP2539917B1 (en) Gas delivery system for mass spectrometer reaction and collision cells
US5490413A (en) Method and apparatus for detecting refrigerant leaks
US20080283743A1 (en) Method and system for non-destructive distribution profiling of an element in a film
CN104979158B (zh) 评估质谱仪中的真空条件的方法
CN115668437B (zh) 用于监测真空腔室的清洁度的清洁度监测器和方法
CN106814125B (zh) 一种材料辐射致放气的在线测试装置和测试方法
JP6613402B2 (ja) 真空排気監視装置
KR101391822B1 (ko) 공정 모니터링이 가능한 기판 처리 장치 및 이를 이용한 공정 모니터링 방법
CN113933454B (zh) 极紫外光刻机材料检测装置及测试方法
JP4028723B2 (ja) 電子付着質量分析法を利用した昇温脱離ガス分析装置及び分析方法
KR102257270B1 (ko) 리크 체크 방법 및 처리 장치
Elkatmis et al. Time stability characterization of quadrupole mass spectrometers
Reagan et al. Mass‐dependent effects of channel electron multipliers in residual gas analyzers
KR20190119106A (ko) 공정의 실시간 모니터링 방법 및 질량 분광계
JPH0718783B2 (ja) 変形・破壊時に材料から放出される極微量ガスの分析装置
JP2005241647A (ja) 発光分光による少量気体種の検出
JP5255974B2 (ja) 真空室内のガス成分測定方法、及び真空装置
JP2004311446A (ja) ガス分析計付真空チャンバ、ガス分析計付真空チャンバのベーキング方法およびガス分析計付真空チャンバ内の残留ガスの分析方法
Brindley et al. True Gas Sensing in Vacuum and Atmosphere, Where RGAs Fail to Go
JP4837056B2 (ja) ガス分析装置
Anderson Accelerator Vacuum 101, Made Easy???
JP2008067535A (ja) ガス絶縁電力機器の異常検出方法
JP2005071692A (ja) 真空管装置の残留ガス検出装置及び信頼性評価方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250127

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250127

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250127