JP2013505465A - 高速高解像度三次元太陽電池検査システム - Google Patents

高速高解像度三次元太陽電池検査システム Download PDF

Info

Publication number
JP2013505465A
JP2013505465A JP2012530968A JP2012530968A JP2013505465A JP 2013505465 A JP2013505465 A JP 2013505465A JP 2012530968 A JP2012530968 A JP 2012530968A JP 2012530968 A JP2012530968 A JP 2012530968A JP 2013505465 A JP2013505465 A JP 2013505465A
Authority
JP
Japan
Prior art keywords
illumination
workpiece
inspection system
camera array
optical inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012530968A
Other languages
English (en)
Japanese (ja)
Inventor
ケース，スティーブン・ケイ
ハウガン，カール・イー
スカンズ，ティモシー・エイ
ホーゲン，ポール・アール
Original Assignee
サイバーオプティクス コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by サイバーオプティクス コーポレーション filed Critical サイバーオプティクス コーポレーション
Publication of JP2013505465A publication Critical patent/JP2013505465A/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2012530968A 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム Withdrawn JP2013505465A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24467109P 2009-09-22 2009-09-22
US24461609P 2009-09-22 2009-09-22
US61/244,671 2009-09-22
US61/244,616 2009-09-22
PCT/US2010/049619 WO2011037905A1 (en) 2009-09-22 2010-09-21 High speed, high resolution, three dimensional solar cell inspection system

Publications (1)

Publication Number Publication Date
JP2013505465A true JP2013505465A (ja) 2013-02-14

Family

ID=43086315

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012530968A Withdrawn JP2013505465A (ja) 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム
JP2012530966A Expired - Fee Related JP5809628B2 (ja) 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012530966A Expired - Fee Related JP5809628B2 (ja) 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム

Country Status (5)

Country Link
JP (2) JP2013505465A (https=)
KR (1) KR20120084738A (https=)
CN (2) CN102498387A (https=)
DE (1) DE112010003742T5 (https=)
WO (2) WO2011037905A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017530352A (ja) * 2014-09-11 2017-10-12 サイバーオプティクス コーポレーション 三次元表面形状計測における多数のカメラ及び光源からの点群統合
JP2019002762A (ja) * 2017-06-14 2019-01-10 キヤノン株式会社 画像処理装置及び方法
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR20220149019A (ko) * 2021-04-30 2022-11-08 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120133920A1 (en) * 2009-09-22 2012-05-31 Skunes Timothy A High speed, high resolution, three dimensional printed circuit board inspection system
CN102253051A (zh) * 2011-05-03 2011-11-23 3i系统公司 一种线扫描探测器检测太阳能电池片缺陷的系统
CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
KR101351000B1 (ko) * 2013-04-10 2014-01-15 주식회사 미루시스템즈 복수 개의 검사 모드를 가지는 인라인 카메라 검사 장치
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
CA2947720C (en) * 2014-05-05 2019-09-10 Arconic Technologies Llc Apparatus and methods for weld measurement
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
US10976535B2 (en) * 2016-03-30 2021-04-13 Optical Wavefront Laboratories Multiple camera microscope imaging with patterned illumination
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
WO2018142188A1 (en) * 2017-02-02 2018-08-09 Ismeca Semiconductor Holding Sa Assembly and method for inspecting components
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
US20210025698A1 (en) * 2018-03-30 2021-01-28 Kurashiki Boseki Kabushiki Kaisha Device and Method for Three-dimensionally Measuring Linear Object
CN109000566B (zh) * 2018-08-15 2020-09-11 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
US20220070343A1 (en) * 2019-01-14 2022-03-03 Orbotech Ltd. Multiplexed Image Acquisition Device for Optical System
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
JP7373436B2 (ja) * 2020-03-09 2023-11-02 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法
KR102856352B1 (ko) * 2020-10-16 2025-09-04 삼성전자주식회사 다채널 액체 파티클 계수기
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
US12510474B2 (en) * 2021-03-31 2025-12-30 Skyverse Technology Co., Ltd. Detection device, detection apparatus and detection method
CN113075232A (zh) * 2021-03-31 2021-07-06 深圳中科飞测科技股份有限公司 一种检测设备及检测方法
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统
EP4641176A1 (en) * 2024-04-24 2025-10-29 Automatizacion y Sistemas de Inspeccion en Linea Global, S.L. Vision system for an inspection apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1577388A (en) 1923-05-19 1926-03-16 Hilger Ltd Adam Projection apparatus
JP4558112B2 (ja) * 1998-10-13 2010-10-06 山形カシオ株式会社 部品搭載装置用の照明装置とその照明装置を備える部品搭載装置
GB9828109D0 (en) * 1998-12-19 1999-02-17 Kestra Ltd Inspection equipment and methods of inspection
DE10194788T1 (de) 2000-01-07 2003-02-27 Cyberoptics Corp Phasenprofilometriesystem mit telezentrischem Projektor
CN1242290C (zh) * 2003-09-18 2006-02-15 中国科学院上海技术物理研究所 一种能使光束光能分布均匀的均化光学组件
WO2009094489A1 (en) * 2008-01-23 2009-07-30 Cyberoptics Corporation High speed optical inspection system with multiple illumination imagery
US20100074515A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect Detection and Response

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017530352A (ja) * 2014-09-11 2017-10-12 サイバーオプティクス コーポレーション 三次元表面形状計測における多数のカメラ及び光源からの点群統合
JP2019002762A (ja) * 2017-06-14 2019-01-10 キヤノン株式会社 画像処理装置及び方法
US10740890B2 (en) 2017-06-14 2020-08-11 Canon Kabushiki Kaisha Image processing apparatus, method, and storage medium
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR20220149019A (ko) * 2021-04-30 2022-11-08 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
KR102528246B1 (ko) 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템

Also Published As

Publication number Publication date
JP5809628B2 (ja) 2015-11-11
CN102656444A (zh) 2012-09-05
JP2013505464A (ja) 2013-02-14
CN102498387A (zh) 2012-06-13
CN102656444B (zh) 2016-08-03
WO2011037905A1 (en) 2011-03-31
WO2011037903A1 (en) 2011-03-31
KR20120084738A (ko) 2012-07-30
DE112010003742T5 (de) 2013-06-06

Similar Documents

Publication Publication Date Title
JP2013505465A (ja) 高速高解像度三次元太陽電池検査システム
US8388204B2 (en) High speed, high resolution, three dimensional solar cell inspection system
US8670031B2 (en) High speed optical inspection system with camera array and compact, integrated illuminator
US8681211B2 (en) High speed optical inspection system with adaptive focusing
US20120133920A1 (en) High speed, high resolution, three dimensional printed circuit board inspection system
US8872912B2 (en) High speed distributed optical sensor inspection system
CN110248056B (zh) 图像检查装置
EP2800946B1 (en) Arrangement for optical measurements and related method
KR102339677B1 (ko) 광학 검사 장치
US20200033451A1 (en) Distance measuring device and moving object
JP6198312B2 (ja) ３次元測定装置、３次元測定方法および基板の製造方法
WO2013051716A1 (ja) 半導体ウェハの表面検査システム
CN102639989B (zh) 具有自适应聚焦的高速光学检查系统
US20250146812A1 (en) Arrangement for optical measurements and related method
KR101366204B1 (ko) 조명을 이용한 팬너트 비전 검사 장치
JP7730558B2 (ja) 鉄筋状態判定方法
CN214767039U (zh) 一种板材检测装置
JP2026050145A (ja) 表面形状解析システム及び表面形状解析システム用光照射器

Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20131203