JP2013231700A5 - - Google Patents
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- Publication number
- JP2013231700A5 JP2013231700A5 JP2012104953A JP2012104953A JP2013231700A5 JP 2013231700 A5 JP2013231700 A5 JP 2013231700A5 JP 2012104953 A JP2012104953 A JP 2012104953A JP 2012104953 A JP2012104953 A JP 2012104953A JP 2013231700 A5 JP2013231700 A5 JP 2013231700A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- image
- shape
- ray transmission
- transmission image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000005540 biological transmission Effects 0.000 claims description 24
- 238000007689 inspection Methods 0.000 claims description 19
- 238000004088 simulation Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 claims 2
- 238000005457 optimization Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012104953A JP2013231700A (ja) | 2012-05-01 | 2012-05-01 | Ｘ線検査方法及びｘ線検査装置 |
| KR1020147030762A KR20150003783A (ko) | 2012-05-01 | 2013-04-24 | X선 검사 방법 및 x선 검사 장치 |
| PCT/JP2013/062127 WO2013164971A1 (ja) | 2012-05-01 | 2013-04-24 | Ｘ線検査方法及びｘ線検査装置 |
| TW102115339A TW201350788A (zh) | 2012-05-01 | 2013-04-30 | Ｘ射線檢查方法及ｘ射線檢查裝置 |
| US14/529,483 US20150055754A1 (en) | 2012-05-01 | 2014-10-31 | X-ray inspection method and x-ray inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012104953A JP2013231700A (ja) | 2012-05-01 | 2012-05-01 | Ｘ線検査方法及びｘ線検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013231700A JP2013231700A (ja) | 2013-11-14 |
| JP2013231700A5 true JP2013231700A5 (enExample) | 2015-06-25 |
Family
ID=49514370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012104953A Ceased JP2013231700A (ja) | 2012-05-01 | 2012-05-01 | Ｘ線検査方法及びｘ線検査装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20150055754A1 (enExample) |
| JP (1) | JP2013231700A (enExample) |
| KR (1) | KR20150003783A (enExample) |
| TW (1) | TW201350788A (enExample) |
| WO (1) | WO2013164971A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015125395A1 (ja) * | 2014-02-24 | 2015-08-27 | 東京エレクトロン株式会社 | Ｘ線検査システム、制御方法、制御プログラム及び制御装置 |
| EP2927946A1 (en) * | 2014-04-04 | 2015-10-07 | Nordson Corporation | X-ray inspection apparatus for inspecting semiconductor wafers |
| CN104266594B (zh) * | 2014-08-01 | 2017-01-18 | 江苏大学 | 一种基于不同视觉技术块冻虾净含量检测的厚度补偿方法 |
| JP2018087699A (ja) * | 2015-03-31 | 2018-06-07 | 東京エレクトロン株式会社 | シリコン貫通ビア形成生産管理システム、シリコン貫通ビア形成生産管理方法、記録媒体及びプログラム |
| KR101806026B1 (ko) * | 2016-05-23 | 2017-12-07 | 건양대학교산학협력단 | 엑스선 촬영 실습용 가상 엑스선 촬영 시스템 |
| CN111527400A (zh) * | 2017-12-28 | 2020-08-11 | 株式会社理学 | X射线检查装置 |
| US11430118B2 (en) * | 2019-07-12 | 2022-08-30 | Bruker Nano, Inc. | Methods and systems for process control based on X-ray inspection |
| JP7451306B2 (ja) * | 2020-05-29 | 2024-03-18 | 株式会社東芝 | 非破壊構造解析装置、非破壊構造検査装置および非破壊構造解析方法 |
| CN112504144B (zh) * | 2020-12-04 | 2021-10-29 | 南京大学 | 一种海冰表面积雪厚度的遥感估算方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6061469A (en) * | 1998-06-22 | 2000-05-09 | Mitsubishi Electric Information Technology Center America, Inc (Ita) | Object rendering system to produce X-ray like images |
| JP2001215202A (ja) * | 2000-02-02 | 2001-08-10 | Matsushita Electric Ind Co Ltd | 放射線検出方法における特定構造の位置特定方法、放射線検出装置、及び基準スケール |
| US6442234B1 (en) * | 2000-10-03 | 2002-08-27 | Advanced Micro Devices, Inc. | X-ray inspection of ball contacts and internal vias |
| JP4519434B2 (ja) * | 2003-09-24 | 2010-08-04 | 株式会社東芝 | 超解像処理装置及び医用画像診断装置 |
| JP4477980B2 (ja) * | 2004-10-05 | 2010-06-09 | 名古屋電機工業株式会社 | Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム |
| JP2007218711A (ja) * | 2006-02-16 | 2007-08-30 | Hitachi High-Technologies Corp | 電子顕微鏡装置を用いた計測対象パターンの計測方法 |
| JP4851240B2 (ja) * | 2006-06-05 | 2012-01-11 | 株式会社トプコン | 画像処理装置及びその処理方法 |
| JP2010034138A (ja) * | 2008-07-25 | 2010-02-12 | Toshiba Corp | パターン検査装置、パターン検査方法およびプログラム |
| JP2015025759A (ja) * | 2013-07-26 | 2015-02-05 | Hoya株式会社 | 基板検査方法、基板製造方法および基板検査装置 |
-
2012
- 2012-05-01 JP JP2012104953A patent/JP2013231700A/ja not_active Ceased
-
2013
- 2013-04-24 KR KR1020147030762A patent/KR20150003783A/ko not_active Withdrawn
- 2013-04-24 WO PCT/JP2013/062127 patent/WO2013164971A1/ja not_active Ceased
- 2013-04-30 TW TW102115339A patent/TW201350788A/zh unknown
-
2014
- 2014-10-31 US US14/529,483 patent/US20150055754A1/en not_active Abandoned