JP2013229451A - Blade cover device and cutting device with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a blade cover device which can reduce at least the number of work steps for performing dressing and a cutting device with the same.SOLUTION: A blade cover device 23 covering a cutting blade 21 includes: a block correction member 26 for correcting the cutting blade 21; cover means 27 for covering the cutting blade 21 mounted on a rotary spindle; and cutting blade correction means 28 disposed on the cover means 27, for correcting the cutting blade 21 by moving the correction means 26 which is detachably held from an outer periphery of the cutting blade 21 toward the rotation center and making the cutting blade 21 cut into the correction member 26. The cutting blade correction means 28 keeps the position of the correction member 26 after correcting the cutting blade 21 by moving the correction member 26 by a predetermined distance, and corrects the cutting blade 21 again by further moving the correction member 26 whose position has been kept, in the same direction by the predetermined distance at the next correction.

Description

  The present invention relates to a blade cover device and a cutting device including the blade cover device.

  In the semiconductor device manufacturing process, a substantially disc-shaped surface of a semiconductor wafer is divided into a plurality of regions by dividing lines called streets arranged in a lattice pattern on the surface of the semiconductor wafer, and a circuit such as an IC or LSI is divided into the partitioned regions. Form. Then, each semiconductor device is manufactured by dividing the region where the circuit is formed by cutting the semiconductor wafer along the planned division line.

  In a cutting apparatus that cuts a semiconductor wafer, a cutting blade is rotated at a high speed, and the semiconductor wafer is cut while a cutting fluid is supplied by a nozzle disposed around the cutting blade. Heat generated by cutting and contamination are cooled and removed by the cutting fluid. When the cutting blade is mounted on the rotary spindle, the rotation trajectory of the cutting edge when rotating is not a perfect circle but tends to be an ellipse. In this case, the cutting edge used for actual machining is several percent of one round (360 °), and the original cutting force cannot be exhibited. Accordingly, dressing is performed after the cutting blade is mounted (see, for example, Patent Document 1).

  In addition, the cutting blade is configured in such a state that abrasives made of abrasive grains are held in the bonding material, and the abrasive grains and the bonding material on the cutting edge are sequentially dropped by the impact of cutting, so that the cutting force always exceeds a certain level. Is to be maintained. Therefore, moderate consumption is necessary, and in order to achieve this, it is necessary to adjust the type of cutting blade (abrasive grain size and type of adhesive), the number of rotations, and the cutting progress speed of the cutting blade.

JP 2006-218571 A

  However, if priority is given to the desired processing results (processing time, chipping tolerance size of semiconductor wafer, etc.), the cutting blade will not be properly consumed, and clogging and deformation will occur gradually. An operation to remove clogging may be required. Since dressing is usually performed using a dressing board fixed to the chuck table, work steps such as attachment / detachment of the dressing board to / from the chuck table and alignment of the dressing board with respect to the cutting blade are required. In the case of machining where the shape of the cutting edge is important, the shape changes due to wear, so that a cutting blade that can be used for a long time due to the change in shape may be replaced with a new one.

  This invention is made | formed in view of the above, Comprising: It aims at providing the cutting device provided with the blade cover apparatus and blade cover apparatus which can reduce the work man-hour at the time of dressing at least.

  In order to solve the above-described problems and achieve the object, the present invention provides a blade cover device that covers a cutting blade attached to a tip of a rotary spindle, and the blade cover device includes a block for correcting the cutting blade. And a cover means for covering the cutting blade mounted on the rotary spindle, and the correction member disposed on the cover means and detachably held from the outer periphery of the cutting blade toward the center of rotation. And a cutting blade correction means for correcting the cutting blade by cutting the cutting blade into the correction member, and the cutting blade correction means moves the correction member by a predetermined distance to move the correction blade. After correcting the cutting blade, the position of the correction member is maintained, and the correction member that has maintained the position at the next correction is removed. By is further moved to the constant distance same direction, characterized by modifying the cutting blade again.

  Further, the cutting device according to the present invention includes a chuck table for holding a workpiece, and a processing means including a rotary spindle on which a cutting blade for cutting the workpiece held on the chuck table is mounted at a tip end; A cutting apparatus comprising: display means for displaying a determination result by the control means; and control means for controlling the processing means and the display means, wherein the rotary spindle includes the blade cover device, and the control When the means determines that the cumulative distance that the correction member has moved by the cutting blade correction means has reached a predetermined distance, the means displays the determination result on the display means, and prompts replacement of the correction member. To do.

  The blade cover device of the present invention moves the correction member arranged in advance from the outer periphery of the cutting blade toward the center of rotation, and the cutting blade cuts into the correction member to correct the cutting blade. There is no need to fix the board, and it is possible to reduce the number of work steps such as attachment / detachment of the dressing board to / from the chuck table and alignment of the dressing board with respect to the cutting blade. In addition, when the cutting device provided with the blade cover device of the present invention determines that the cumulative distance that the correction member has moved by the blade correction unit of the blade cover device has reached a specified distance, the determination result is displayed on the display unit. Since the replacement of the correction member is urged, there is an effect that the operator can replace the correction member before it becomes impossible to perform dressing of the cutting blade.

FIG. 1 is a diagram illustrating a configuration example of a cutting device including a blade cover device. FIG. 2 is a diagram illustrating a configuration example of the processing means. FIG. 3A is a diagram illustrating a configuration example of the blade cover device according to the embodiment. FIG. 3-2 is an operation explanatory diagram of the blade cover device. FIG. 3C is an operation explanatory diagram of the blade cover device. FIG. 3-4 is an operation explanatory diagram of the blade cover device. FIG. 4 is a diagram illustrating another configuration example of the blade cover device. FIG. 5A is a diagram illustrating another configuration example of the blade cover device. FIG. 5B is an explanatory diagram of the operation of the blade cover device. FIG. 5C is an operation explanatory diagram of the blade cover device. FIG. 5-4 is an operation explanatory diagram of the blade cover device. FIG. 5-5 is an operation explanatory diagram of the blade cover device.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
FIG. 1 is a diagram illustrating a configuration example of a cutting device including a blade cover device. FIG. 2 is a diagram illustrating a configuration example of the processing means. FIG. 3A is a diagram illustrating a configuration example of the blade cover device according to the embodiment. 3-2 to 3-4 are explanatory diagrams of the operation of the blade cover device. 2 is a view of the cutting blade as viewed from the axial direction, and FIG. 3A is a view of the cutting blade as viewed from the radial direction.

  A cutting apparatus including a blade cover device according to the present embodiment includes a chuck table that holds a workpiece and a processing unit having a cutting blade in order to divide the workpiece or perform edge trimming of the workpiece. The workpiece is cut by relative movement. As shown in FIG. 1, the cutting apparatus 1 includes a chuck table 10, a processing means 20 having a blade cover device 23, an X-axis moving means (not shown), a Y-axis moving means 30, a Z-axis moving means 40, A control device 50 and a display device 60 are included.

  The chuck table 10 holds a workpiece. The chuck table 10 holds the workpiece W in an exposed state by sucking the workpiece W placed on the surface. The chuck table 10 is detachably fixed to the table moving base 2. In addition, a clamp portion 11 is provided around the chuck table 10, and the clamp portion 11 is driven by an air actuator so that the frame F holding the workpiece W is held via the dicing tape T. To do.

  Here, the workpiece W is a workpiece to be processed by the cutting apparatus 1, and in the present embodiment, a semiconductor wafer having a base material of silicon, sapphire, gallium or the like, a plate made of CSP substrate, glass, resin, or the like. It is a shaped member. The workpiece W has, for example, a device-side surface on which a plurality of devices are formed and a back surface opposite to the device-side surface attached to the dicing tape T, and the dicing tape T attached to the workpiece W is attached to the frame F. By being worn, it is fixed to the frame F.

  The processing means 20 performs cutting on the workpiece W held on the chuck table 10. The processing means 20 includes a cutting blade 21, a rotary spindle 22, a blade cover device 23, a housing 24, and nozzles 25a and 25b. The cutting blade 21 is formed in an annular shape for cutting the workpiece W, and is configured in a state where a polishing agent made of abrasive grains is held in a binding material, and the workpiece is cut by rotating at high speed. Is what you do. The cutting blade 21 is detachably fixed to a mount formed at the tip of the rotary spindle 22 by a fixing nut. The rotary spindle 22 is rotatably supported by a cylindrical housing 24 and is connected to a rotation drive source (not shown) connected to the housing 24. The cutting blade 21 rotates at a high speed (several thousand to several tens of thousands rpm) by the rotational force generated by the rotational drive source.

  The blade cover device 23 covers the cutting blade 21 attached to the tip of the rotary spindle 22 and includes a correction member 26, a cover means 27, and a cutting blade correction means 28.

  The correction member 26 corrects the cutting blade 21, and dresses the cutting blade 21 by cutting the cutting blade 21. The correction member 26 is formed in a block shape by holding an abrasive made of alumina powder or silicon carbide powder as abrasive grains in a binding material made of glass or resin (resin). The correction member 26 is connected to the cutting blade correction means 28 by being held by a holding member 28c described later.

  The cover means 27 covers the cutting blade 21 and is a main body portion of the blade cover device 23. Of the both ends in the horizontal direction, the cover means 27 is provided with a nozzle 25a that faces the cutting blade 21 in the radial direction at one end and extends in the horizontal direction from the other end toward the cutting blade 21. Two nozzles 25b that are opposed to 21 in the axial direction are arranged. The nozzles 25a and 25b are supplied to the cutting blade 21 and the workpiece W by being supplied with a cutting fluid from a cutting fluid supply source 80 connected via an on-off valve 70 that is controlled to be opened and closed by the control device 50. Supply cutting fluid.

  The cutting blade correction means 28 is disposed on the cover means 27 and holds the correction member 26 in a detachable manner. In this embodiment, the cutting blade correcting means 28 is an electric actuator, and includes a linear motion mechanism 28a, a motor 28b, and a holding member 28c. The linear motion mechanism 28a converts the rotation of the motor 28b into movement in the linear motion direction. For example, the linear motion mechanism 28a is screwed with a female screw member (not shown) connected to the motor 28b and the holding member 28c. It is comprised by the external thread member which is not shown in figure connected via the shaft 28d. That is, the linear motion mechanism 28a moves the holding member 28c downward by rotating the motor 28b in one direction, moves the holding member 28c upward by rotating in the other direction, and stops the rotation by stopping the rotation. The vertical position of 28c is maintained. The motor 28 b is connected to the control device 50 and is driven by the control device 50. The holding member 28c detachably holds the correction member 26. In the present embodiment, the holding member 28c detachably holds the correction member 26 by a fixing means such as a bolt. Here, the holding member 28c is arranged so that the correction member 26 is opposed to the cutting blade 21 in the radial direction in advance, and a central portion of the correction member 26 (a central portion in the axial direction of the cutting blade 21) is provided. The cutting blade 21 is held so as to be opposed to the rotation center in the radial direction. Accordingly, the holding member 28c is moved downward by the linear movement mechanism 28a, whereby the correction member 26 can be moved from the outer periphery of the cutting blade 21 toward the center, and the rotating cutting blade 21 is cut into the correction member 26. As a result, the cutting blade 21 is corrected.

  The X-axis moving means moves the workpiece W held on the chuck table 10 relative to the cutting blade 21 in the X-axis direction in the cutting apparatus 1. The X-axis moving means moves the table main body 2 in the X-axis direction while guiding the table moving base 2 with an X-axis guide rail (not shown) by a rotational force generated by an X-axis pulse motor (not shown). Here, the table moving base 2 is supported so as to be rotatable in the θ direction in the cutting apparatus 1 around the central axis of the table moving base 2. The table moving base 2 is connected to a rotational drive source (not shown), and can be rotated at an arbitrary angle, for example, 90 degrees or continuous rotation in the θ direction by the rotational force generated by the rotational drive source. The workpiece W held in the center can be driven to rotate at an arbitrary angular rotation or continuous rotation around the central axis of the table moving base 2 with respect to the cutting blade 21.

  As shown in FIG. 1, the Y-axis moving unit 30 moves the cutting blade 21 relative to the workpiece W held on the chuck table 10 in the Y-axis direction of the cutting apparatus 1. The Y-axis moving means 30 moves the processing means 20 in the Y-axis direction while guiding the processing means 20 by a Y-axis guide rail (not shown) by a rotational force generated by a Y-axis pulse motor (not shown).

  The Z-axis moving unit 40 moves the cutting blade 21 relative to the workpiece W held on the chuck table 10 in the Z-axis direction in the cutting apparatus 1. The Z-axis moving means 40 moves the machining means 20 in the Z-axis direction while guiding the machining means 20 by a Z-axis guide rail (not shown) by a rotational force generated by a Z-axis pulse motor (not shown).

  The control device 50 is a control means, and controls each of the above-described components constituting the cutting device 1. The control device 50 rotates the cutting blade 21 at a high speed and cuts the workpiece W by relatively moving the chuck table 10 and the cutting blade 21 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction. Processing is performed by the processing means 20. The control device 50 also corrects the cutting blade 21 by causing the cutting blade correction means 28 to cut the cutting blade 21 into the correction member 26. The control device 50 determines whether or not the cumulative distance that the correction member 26 has moved by the cutting blade correction means 28 has reached a specified distance. The control device 50 is mainly composed of an arithmetic processing device constituted by, for example, a CPU or the like and a microprocessor (not shown) provided with a ROM, a RAM, etc., and the state of the machining operation of the cutting device 1 and the cumulative distance are defined. Is connected to a display device 60 that is a display means such as an LCD for displaying a determination result when it is determined that the distance is reached, and an operation means used when an operator registers machining content information.

  Next, the cutting operation of the cutting device 1 having the blade cover device 23 according to the present embodiment will be described. When the operator registers the machining conditions in the cutting apparatus 1, holds the workpiece W on the chuck table 10, and starts the cutting operation, the cutting operation is started. In the cutting operation, the control device 50 performs alignment adjustment based on the image captured by the imaging unit, and the relative position of the held workpiece with respect to the processing unit 20 is adjusted. Next, the control device 50 moves the chuck table 10 holding the workpiece W at the imaging position in the X-axis direction to the machining position, and rotates the cutting blade 21 at high speed based on the machining content information. Cutting is performed by relatively moving the object W and the cutting blade 21.

  Here, the cutting blade 21 repeats the cutting process on the workpiece W, whereby the abrasive grains and the binding material of the cutting edge are dropped by the impact of the cutting, and the outer shape gradually decreases, as shown in FIG. From the state of having a cutting force, clogging gradually occurs. In this case, since it becomes difficult to cut the workpiece W with the original cutting force, dressing is performed. The control device 50 determines whether or not to perform an instruction from the operator via the operation means or dressing, and if it is determined to execute, the cutting blade correction means 28 causes the cutting blade 21 to rotate in a state where the cutting blade 21 is rotating. From the state shown in FIG. 3A, the correction member 26 is moved downward by a predetermined distance (arrow D1 shown in the figure). Here, the predetermined distance is a distance at which the cutting blade 21 is cut by moving the correction member 26 downward from the current position, and the cutting blade 21 can be corrected by one movement of the correction member 26. The cutting device 1, the cutting blade 21, and the correction member 26 are arbitrarily set according to the type, shape, size, and the like. Further, the control device 50 can calculate the downward movement distance of the correction member 26 based on the number of rotations of the motor 28b. Further, the rotational speed of the cutting blade 21 and the downward movement speed of the correction member 26 are set to the optimal rotational speed and movement speed at which the cutting blade 21 can be corrected by the correction member 26. The control device 50 determines whether or not to perform dressing, for example, the processing distance of the cutting blade 21 is the type, shape, size, processing conditions, etc. of the cutting device 1, the cutting blade 21, and the workpiece W. This is performed based on whether or not the machining distance is calculated based on the above.

  When the correction member 26 moves downward by a predetermined distance, as shown in FIG. 3-2, the cutting blade 21 is cut into the correction member 26, the cutting blade 21 is corrected by the correction member 26, and the cutting force of the cutting blade 21 is restored. To do. At this time, the cutting blade correction means 28 maintains the position of the correction member 26, that is, the position moved downward by a predetermined distance. In the present embodiment, the position of the correction member 26 is maintained by stopping the rotation of the motor 28b by the control device 50. In this state, the cutting blade 21 repeats the cutting process on the workpiece W again, whereby the abrasive grains and the binding material of the cutting edge are dropped due to the impact of the cutting, and the outer shape is gradually reduced. As shown in FIG. 4, a gap is formed between the correction member 26 and clogging occurs again. Therefore, the control device 50 determines whether or not to execute a re-instruction from the operator via the operating means or whether or not to perform dressing, and if it is determined to execute again, the cutting blade 21 is rotating and the cutting blade 21 is rotating. The correcting member 26 is moved downward by a predetermined distance from the state shown in FIG. 3-3 by the correcting means 28 (arrow D2 shown in FIG. 3). As a result, as shown in FIG. 3-4, the cutting blade 21 is cut into the correction member 26 again, and the cutting blade 21 is corrected again by the correction member 26. That is, every time the cutting blade 21 is dressed, the cutting blade correction means 28 moves the correction member 26 downward by a predetermined distance and maintains the position after the movement.

  Further, every time the cutting blade 21 is dressed, the control device 50 stores an accumulated distance obtained by accumulating the distance traveled by the correcting member 26 by the blade correcting means 28 in a storage unit (not shown). Determine whether the specified distance has been reached. Here, the specified distance is a distance at which the cutting blade 21 is repeatedly cut into the correction member 26, for example, it becomes difficult to correct the cutting blade 21 by the correction member 26, or the correction member 26 may be damaged. That is, it is set based on the type, shape, and size of the cutting blade 21 and the correction member 26, the number of rotations of the cutting blade 21, the moving speed of the correction member 26 downward, and the like.

  When the control device 50 determines whether or not the cumulative distance has reached a specified distance, the control device 50 causes the display device 60 to display the determination result. The display mode of the determination result can prompt the operator to replace the correction member 26 when the operator recognizes it. Note that when the control device 50 determines that the cumulative distance has not reached the specified distance, the control device 50 may cause the display device 60 to display that the correction member 26 need not be replaced.

  As described above, in the blade cover device 23 according to the present embodiment, the cutting member 21 can be corrected by moving the correction member 26 arranged in advance downward and cutting the cutting blade 21 into the correction member 26. Therefore, it is not necessary to fix the dressing board to the chuck table, and the attaching / detaching work of the dressing to the chuck table can be omitted. Here, in the dressing board, a groove is formed when the cutting blade 21 is cut. Therefore, when the same dressing board is used again, the cutting blade 21 is cut again at a position avoiding the formed groove. Become. On the other hand, in the blade cover device 23 according to the present embodiment, by repeatedly moving the correction member 26 in the same direction, dressing can be performed a plurality of times using the same correction member 26. Therefore, the positioning of the dressing board with respect to the cutting blade 21 can be omitted. As a result, the number of dressing operations for the cutting blade 21 can be reduced. Further, after the cutting blade 21 is corrected, that is, dressing is performed, the position of the correcting member 26 is maintained, and the correcting member 26 does not need to move upward, that is, retract, so that the mechanism for moving the correcting member 26 can be simplified. Can be. Further, since the correction member 26 is provided in advance, the cutting process for one workpiece W or the continuous cutting process for a plurality of workpieces W (for example, one workpiece) The dressing of the cutting blade 21 can be performed after the cutting of the workpiece W is finished and before the cutting of the next workpiece W is started.

  Further, when the cutting device 1 including the blade cover device 23 according to the present embodiment determines that the cumulative distance that the correction member 26 has moved by the cutting blade correction means 28 of the blade cover device 23 has reached a specified distance, Since the determination result is displayed on the display means and the replacement of the correction member 26 is urged, the operator can replace the correction member 26 before dressing the cutting blade 21 becomes impossible.

  In the above embodiment, the cutting blade correction means 28 is an electric actuator. However, any configuration is possible as long as the correction member 26 can be moved downward and the position of the correction member 26 after the movement can be maintained. May be. FIG. 4 is a diagram illustrating another configuration example of the blade cover device. As shown in the figure, the cutting blade correcting means 29 may be an air actuator. The cutting blade correcting means 29 includes a cylinder 29a and a shaft 29b that is movably supported in the cylinder 29a. The cylinder 29a is supplied with compressed air from a compressed air supply source 100 connected via an on-off valve 90 that is controlled to be opened and closed by the control device 50, whereby the pressure of the compressed air acts on the shaft 29b. Move down. Reference numeral 110 denotes a pressure sensor that detects the pressure of the compressed air supplied to the cylinder 29a.

  Here, the cutting blade correcting means 29 is a relative position between the cylinder 29a and the shaft 29b when no compressed air is supplied to the cylinder 29a, that is, when the on-off valve 90 is closed and no external force is applied to the shaft 29b. Is configured not to change. For example, the sliding resistance of the shaft 29b with respect to the cylinder 29a is increased to provide a regulating means for regulating the movement of the shaft 29b with respect to the cylinder 29a when the inside of the cylinder 29a is opened to the atmosphere or when the on-off valve 90 is closed.

  When performing dressing, the control device 50 rotates the cutting blade 21, opens the on-off valve 90, and moves the shaft 29b downward relative to the cylinder 29a, thereby moving the correction member 26 downward by a predetermined distance. Move to. When the correction member 26 moves downward by a predetermined distance, the cutting blade 21 cuts into the correction member 26, the cutting blade 21 is corrected by the correction member 26, and the cutting force of the cutting blade 21 is restored. Here, the cutting blade correcting means 29 maintains the position of the correcting member 26, that is, the position moved downward by a predetermined distance. At this time, the control device 50 determines the downward movement distance of the correction member 26 based on the pressure of the compressed air detected by the pressure sensor 110, the type, shape, size, dressing time, etc. of the cutting blade 21 and the correction member 26. Can be calculated. In this case, compared with the cutting blade correction means 28, the correction member 26 is moved downward by using compressed air supplied from the existing compressed air supply source 100 supplied to the cutting apparatus 1 without using the motor 28b or the like. Therefore, it is possible to perform dressing with a simple configuration.

  In the above embodiment, dressing is performed for the purpose of mainly eliminating clogging of the cutting blade 21 and restoring the cutting force, but the present invention is not limited to this, and the cutting blade 21 is mainly used. Dressing may be performed for the purpose of correcting the deformation of the cutting edge. FIG. 5A is a diagram illustrating another configuration example of the blade cover device. FIGS. 5-2 to 5-5 are explanatory diagrams of the operation of the blade cover device. Depending on the cutting blade 21, in order to cope with the cutting process using the side surface of the blade edge, as shown in FIG. 5-1, both side surfaces of the blade edge are inclined, and the radial cross-sectional shape of the blade edge is formed in a triangular shape. There is something. In order to correct such deformation of both side surfaces of the cutting blade 21 by performing dressing, the correction member 26 has a first correction at the central portion in the axial direction of the cutting blade 21 as shown in FIG. The member 26a and the second correction member 26b are divided and formed, and are detachably held by the holding member 28c with a gap formed therebetween. The first correction member 26a and the second correction member 26b are cut surfaces having inclined surfaces 26c and 26d having an inclination angle with respect to the vertical direction that is the same as that of both side surfaces of the blade edge on the gap side of the surface facing the cutting blade 21 in the radial direction. Each notch is formed.

  The cutting blade 21 repeats the cutting process on the workpiece W, whereby the abrasive grains and the binding material at the cutting edge are dropped by the impact of cutting, and the outer shape gradually decreases, as shown in FIG. The blade edge is gradually deformed (S1 shown in the figure). In this case, since both side surfaces of the cutting edge are not in the original shape and the inclination angle, it becomes difficult to perform a desired cutting process on the workpiece W, so that dressing is performed. As in the above embodiment, the control device 50 determines whether or not to perform an instruction from the operator via the operation means or whether or not to perform dressing, and if it is determined to execute, the cutting blade 21 is rotating. The correction member 26 is moved downward by a predetermined distance from the state shown in FIG. 5-2 by the cutting blade correction means 28 (arrow D3 shown in the figure). Here, the predetermined distance means that the cutting blade 21 is cut by moving the correction member 26 downward from the current position, and the cutting blade 21, particularly both side surfaces of the cutting edge, are corrected by one movement of the correction member 26. The distance can be arbitrarily set according to the type, shape, size, and the like of the cutting device 1, the cutting blade 21, and the correction member 26.

  When the correction member 26 moves downward by a predetermined distance, as shown in FIG. 5-3, the cutting blade 21 is cut into the correction member 26, that is, the both side surfaces of the cutting edge are cut in contact with the inclined surfaces 26c and 26d. Thus, both side surfaces of the cutting edge of the cutting blade 21 are corrected by the correction member 26, and the shape of the cutting edge of the cutting blade 21 is restored. At this time, the cutting blade correction means 28 maintains the position of the correction member 26, that is, the position moved downward by a predetermined distance. In the present embodiment, the position of the correction member 26 is maintained by stopping the rotation of the motor 28b by the control device 50. In this state, the cutting blade 21 repeats the cutting process on the workpiece W again, so that the abrasive grains and the binding material on the cutting edge are dropped by the impact of the cutting, and the outer shape is gradually reduced. As shown in FIG. 3, the blade edge is deformed (S2 shown in the figure) while a gap is gradually formed between the correction member 26 and the blade. Therefore, the control device 50 determines whether or not to execute a re-instruction from the operator via the operating means or whether or not to perform dressing, and if it is determined to execute again, the cutting blade 21 is rotating and the cutting blade 21 is rotating. The correcting member 26 is moved downward by a predetermined distance from the state shown in FIG. 5-4 by the correcting means 28 (arrow D4 shown in FIG. 5). As a result, as shown in FIG. 5-5, the cutting blade 21 is cut again into the correction member 26, and both side surfaces of the cutting edge of the cutting blade 21 are corrected again by the correction member 26. That is, every time the cutting blade 21 is dressed, the cutting blade correction means 28 moves the correction member 26 downward by a predetermined distance and maintains the position after the movement.

  Thereby, also in dressing intended to restore the cutting edge shape mainly of the cutting blade 21, the number of dressing work steps for the cutting blade 21 can be reduced, and the mechanism for moving the correction member 26 can be simplified. In addition, the dressing of the cutting blade 21 can be performed during the cutting process for one workpiece W or during the continuous cutting process for a plurality of workpieces W.

  Moreover, in the said embodiment, although the correction member 26 and the cutting blade correction means 28 and 29 are 1 set, it is not limited to this, Plural sets may be arrange | positioned previously. In this case, at the time of performing dressing, the cutting blade 21 may be corrected by the plurality of correcting members 26 at the same time, or the cutting blade 21 may be corrected by the correcting member 26 alternately every time dressing is performed. When one correction member 26 cannot correct the cutting blade 21, the correction blade 26 may be corrected by another correction member 26. Thereby, the replacement frequency of the correction member 26 can be reduced.

DESCRIPTION OF SYMBOLS 1 Cutting device 10 Chuck table 20 Processing means 21 Cutting blade 22 Rotating spindle 23 Blade cover device 24 Housing 25a, 25b Nozzle 26 Correction member 27 Cover means 28, 29 Cutting blade correction means 30 Y-axis moving means 40 Z-axis moving means 50 Control Device 60 Display device 70 On-off valve 80 Cutting fluid supply source 90 On-off valve 100 Compressed air supply source 110 Pressure sensor

Claims (2)

A blade cover device that covers a cutting blade attached to the tip of a rotating spindle,
The blade cover device is
A block-shaped correction member for correcting the cutting blade;
Cover means for covering the cutting blade mounted on the rotating spindle;
Cutting that corrects the cutting blade by moving the correction member disposed on the cover means and detachably held from the outer periphery of the cutting blade toward the center of rotation and cutting the cutting blade into the correction member. Blade correction means;
Comprising
The cutting blade correcting means moves the correction member by a predetermined distance to correct the cutting blade, and then maintains the position of the correction member. When the next correction is made, the correction member that has maintained the position at the predetermined distance is maintained. A blade cover device that corrects the cutting blade again by further moving in the same direction. A chuck table for holding the workpiece;
Processing means including a rotating spindle to which a cutting blade for cutting the workpiece held on the chuck table is mounted at a tip;
Display means for displaying the determination result by the control means;
Control means for controlling the processing means and the display means;
A cutting device comprising:
The rotary spindle has a blade cover device according to claim 1,
When the control means determines that the cumulative distance that the correction member has moved by the cutting blade correction means has reached a specified distance, the control means displays the determination result on the display means and prompts replacement of the correction member. A cutting device characterized.

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