JP7386636B2 - how to dress - Google Patents

Description

The present invention relates to a method for flat dressing a cutting blade.

Cutting equipment uses cutting blades to cut various plate-shaped workpieces such as semiconductor substrates made of silicon, gallium arsenide, SiC (silicon carbide), and sapphire, resin package substrates, and ceramic substrates. The tip of the cutting edge of the blade may deform into an arcuate cross section.

Some cutting devices regularly perform a flat dressing in which the tip of a cutting blade is flattened along the axis of a spindle (for example, see Patent Document 1). The dressing method shown in Patent Document 1 involves moving a cutting blade in the axial direction of a spindle from one end of a dressing board attached to a tape and attached to a frame to the other end, and cutting the dressing board with the cutting blade. It's a flat dress. Therefore, the cutting device stores the size of the dressing board in advance, and sets the moving distance of the cutting blade based on the size of the dressing board.

Japanese Patent Application Publication No. 2010-588

In the dressing method disclosed in Patent Document 1, a transport unit holds a frame and transports the frame so that the center of the frame and the center of the holding table overlap. For this reason, in the dressing method, the center of the chuck and the center of the dress board do not necessarily match due to errors in the attachment position of the dress board to the frame and transportation errors, so cutting is performed between positions that are outside the outer periphery of the dress board by an allowance width. The blade was moving. However, in the dressing method shown in Patent Document 1, the moving distance of the cutting blade becomes longer due to the margin width, so the time required for dressing is long, and there has been a strong desire to shorten the time required for dressing.

In particular, flat dressing places a load on the cutting blade compared to normal dicing in which the workpiece is cut by moving the cutting blade relatively in the X-axis direction, so the relative movement speed is set at a low speed. For this reason, there has been a strong desire for flat dresses to have as short a margin as possible.

The present invention has been made in view of such problems, and its purpose is to provide a dressing method that can reduce the time required for flat dressing.

In order to solve the above-mentioned problems and achieve the objectives, the dressing method of the present invention is a flat dressing method of a cutting blade fixed to the tip of a spindle, which is held on a holding table via an adhesive tape. a position detection step of imaging the dress board with an imaging means and detecting the position of the outer periphery of the dress board; positioning the dress board in a direction from one end to the other end parallel to the axis of the spindle; Based on the position of the outer periphery of the dress board detected in the detection step, a predetermined height for cutting into the dress board is set outside one end of the dress board, and the distance from the dress board is determined according to the processing conditions. a positioning step of positioning the lower end of the cutting blade at a position corresponding to the included margin ; and after performing the positioning step, moving the cutting blade relative to the dressing board to move the cutting blade from the one end to the other end of the dressing board; and a dressing step for flattening the tip of the cutting blade by moving the cutting blade to a position where the distance from the dressing board becomes the margin included in the processing conditions and cutting .

The dressing method includes a cut area storing step of storing information regarding the cut area of the dress board cut in the dress step, and after carrying out the dress step, carrying out the dress board from the holding table. a processing step of holding a workpiece on the holding table and cutting the workpiece on the holding table with the cutting blade; and after carrying out the processing step, carrying out the workpiece from the holding table; Holding the dress board on the holding table, based on the position of the outer peripheral edge of the dress board detected in the position detection step and information regarding the cut area of the dress board stored in the cut area storage step. A second blade for positioning the lower end of the cutting blade outside one end of the dress board at a predetermined height for cutting into the dress board and at a distance from the dress board that is within the margin included in the processing conditions. After performing the positioning step and the second positioning step, the cutting blade is moved relative to the dress board, and the distance from the dress board is included in the processing conditions from the one end of the dress board to the other end. A second dressing step may be provided, in which the cutter is moved to a position where the margin width is obtained .

The dressing method of the present invention has the effect of reducing the time required for flat dressing.

FIG. 1 is a perspective view showing a configuration example of a cutting device that implements the dressing method according to the first embodiment. FIG. 2 is a perspective view showing an example of a dressing board for flat dressing the cutting blade of the cutting device shown in FIG. 1. FIG. FIG. 3 is an example of a sectional view of the tip of the cutting blade of the cutting blade before flat dressing in the dressing method according to the first embodiment. FIG. 4 is an example of a cross-sectional view of the tip of the cutting blade of the cutting blade shown in FIG. 3 after flat dressing. FIG. 5 is a plan view of a dressing board showing a dressing start position, a dress storage position, etc. in the dressing method according to the first embodiment. FIG. 6 is a side sectional view of the dressing board showing the cutting depth and the like of the dressing method according to the first embodiment. FIG. 7 is a flowchart showing the flow of the dressing method according to the first embodiment. FIG. 8 is a side view, partially in section, showing the processing steps of the dressing method shown in FIG. 9 is a plan view of the workpiece in the position detection step of the dressing method shown in FIG. 7. FIG. FIG. 10 is a side view, partially in section, of the cutting unit and the dressing board in the positioning step of the dressing method shown in FIG. FIG. 11 is a plan view of the cutting unit and dress board shown in FIG. 10. FIG. 12 is a side view, partially in section, showing a cutting unit and a dressing board in the dressing step of the dressing method shown in FIG. FIG. 13 is a plan view of the cutting unit and dress board shown in FIG. 12. 14 is a plan view of the dressing board after the dressing step of the dressing method shown in FIG. 7. FIG. 15 is a plan view of the cutting unit and the dressing board of the second positioning step of the dressing method shown in FIG. 7; FIG. 16 is a plan view of the cutting unit and the dressing board of the second dressing step of the dressing method shown in FIG. 7. FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A dressing method according to Embodiment 1 of the present invention will be explained based on the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device that implements the dressing method according to the first embodiment. FIG. 2 is a perspective view showing an example of a dressing board for flat dressing the cutting blade of the cutting device shown in FIG. 1. FIG. FIG. 3 is an example of a sectional view of the tip of the cutting blade of the cutting blade before flat dressing in the dressing method according to the first embodiment. FIG. 4 is an example of a cross-sectional view of the tip of the cutting blade of the cutting blade shown in FIG. 3 after flat dressing. FIG. 5 is a plan view of a dressing board showing a dressing start position, a dress storage position, etc. in the dressing method according to the first embodiment. FIG. 6 is a side sectional view of the dressing board showing the cutting depth and the like of the dressing method according to the first embodiment.

The dressing method according to the first embodiment is carried out by the cutting device 1 shown in FIG. A cutting device 1 shown in FIG. 1 is a device that cuts (processes) a workpiece 200 that is a plate-shaped object. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer that uses silicon, sapphire, gallium, or the like as a base material. Devices 203 are formed on the workpiece 200 in areas partitioned in a grid pattern by a plurality of dividing lines 202 formed in a grid pattern on the surface 201 . The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thinner central portion and a thicker portion on the outer periphery, and may include a plurality of devices sealed with resin in addition to the wafer. A rectangular package substrate, a ceramic plate, a glass plate, etc. may also be used. The workpiece 200 has a disc-shaped adhesive tape 206 attached to its back surface 204, and an annular frame 205 whose inner diameter is larger than the outer diameter of the workpiece 200 is attached to the outer periphery of the adhesive tape 206. , is supported by an opening inside the annular frame 205.

The cutting device 1 shown in FIG. 1 is a device that holds a workpiece 200 having a dividing line 202 on a holding table 10 and cuts the workpiece 200 along the dividing line 202 with a cutting blade 21 . As shown in FIG. 1, the cutting device 1 includes a holding table 10 that suction-holds a workpiece 200 on a holding surface 11, and a cutting blade 21 that attaches the workpiece 200 held on the holding table 10 to a spindle 22. It includes a cutting unit 20 for cutting, an imaging unit 30 as an imaging means for photographing a workpiece 200 held on a holding table 10, and a control unit 100 as a control means.

As shown in FIG. 1, the cutting device 1 also includes an X-axis moving unit 41 that moves the holding table 10 in the horizontal direction and in the The Y-axis moving unit 42 indexes and feeds the cutting unit 20 in the Y-axis direction, which is parallel to the longitudinal direction of the device main body 2 and perpendicular to the X-axis direction, and the cutting unit 20 is moved in a vertical direction perpendicular to both the X-axis direction and the Y-axis direction. The Z-axis movement unit 43 feeds cuts in the Z-axis direction parallel to the Z-axis direction, and the holding table 10 is rotated around an axis parallel to the Z-axis direction, and the X-axis movement unit 41 processes the holding table 10 in the X-axis direction. and a rotational movement unit 44 to be sent.

The holding table 10 has a disk shape, and a holding surface 11 for holding the workpiece 200 is made of porous ceramic or the like. Further, the holding table 10 is provided to be movable by an X-axis moving unit and rotatable by a rotational drive source. The holding table 10 is connected to a vacuum suction source (not shown), and suctions and holds the workpiece 200 by suction from the vacuum suction source. Further, a plurality of clamp parts 12 for clamping the annular frame 211 are provided around the holding table 10.

The cutting unit 20 includes a spindle 22 on which a cutting blade 21 for cutting a workpiece 200 held on the holding table 10 is mounted. The cutting unit 20 is provided to be movable in the Y-axis direction by a Y-axis movement unit 42 with respect to a workpiece 200 held on the holding table 10, and is movable in the Z-axis direction by a Z-axis movement unit 43. It is set in.

As shown in FIG. 1, the cutting unit 20 is provided on a support frame 3 that stands up from the apparatus main body 2 via a Y-axis moving unit 42, a Z-axis moving unit 43, and the like. The cutting unit 20 can position the cutting blade 21 at any position on the holding surface 11 of the holding table 10 by the Y-axis movement unit 42 and the Z-axis movement unit 43.

The cutting unit 20 is moved in the Y-axis direction and the Z-axis direction by a Y-axis movement unit 42 and a Z-axis movement unit 43, in addition to a cutting blade 21 and a spindle 22 with the cutting blade 21 attached to the tip. It includes a spindle housing 23 housed in a rotatable manner around an axis, and a spindle motor (not shown) housed in the spindle housing 23 and rotating the spindle 22 around an axis.

The cutting blade 21 is an extremely thin cutting whetstone having a substantially ring shape. The spindle 22 cuts the workpiece 200 by rotating the cutting blade 21 . The spindle 22 is housed in a spindle housing 23, and the spindle housing 23 is supported by a Z-axis moving unit 43. The axes of the spindle 22 and the cutting blade 21 of the cutting unit 20 are set parallel to the Y-axis direction.

The X-axis moving unit 41 moves the holding table 10 in the X-axis direction, which is the processing feed direction, to relatively feed the holding table 10 and the cutting unit 20 along the X-axis direction. The Y-axis moving unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing and feeding direction, to relatively index and feed the holding table 10 and the cutting unit 20 along the Y-axis direction. The Z-axis moving unit 43 moves the cutting unit 20 in the Z-axis direction, which is the cutting-feeding direction, thereby relatively feeding the holding table 10 and the cutting unit 20 along the Z-axis direction.

The X-axis movement unit 41, the Y-axis movement unit 42, and the Z-axis movement unit 43 include a well-known ball screw rotatably provided around the axis, a well-known pulse motor that rotates the ball screw around the axis, and a holding table. 10 or the cutting unit 20 is provided with a known guide rail that supports the cutting unit 20 movably in the X-axis direction, Y-axis direction, or Z-axis direction.

The cutting device 1 also includes an X-axis position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, and a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. It includes a detection unit and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be configured by a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction using pulses from the pulse motor. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 10 in the X-axis direction and the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100. . In the first embodiment, each position is determined by a distance from a predetermined reference position in the X-axis direction, Y-axis direction, and Z-axis direction.

The cutting device 1 also includes a cassette elevator 50 on which a cassette 51 containing workpieces 200 before and after cutting is placed and for moving the cassette 51 in the Z-axis direction, and a cleaning unit for cleaning the workpiece 200 after cutting. 60, and a transport unit (not shown) that takes the workpiece 200 into and out of the cassette 51 and transports the workpiece 200.

The cassette 51 accommodates a plurality of workpieces 200 supported by an annular frame 205 at intervals in the Z-axis direction. Further, the cassette 51 accommodates one dress board 90 shown in FIG. 2 . A dressing board 90 shown in FIG. 2 is used to repeatedly cut a workpiece 200 and flat dress a cutting blade 21 whose tip end has an arcuate cross-section as shown in FIG. 3, for example. Flat dressing refers to cutting into the dressing board 90 while moving the cutting blade 21 shown in FIG. 3 in the Y-axis direction parallel to the axis of the spindle, and as shown in FIG. It means to be formed flat along the axial direction.

In the first embodiment, the dress board 90 is formed into a flat plate having a rectangular planar shape. The dress board 90 is configured by mixing abrasive grains such as WA (white alundum, alumina type) and GC (green carbonite, silicon carbide type) into a resin or ceramic bond material. Similar to the workpiece 200, the dress board 90 has a disc-shaped adhesive tape 206 attached to one surface, an annular frame 205 attached to the outer periphery of the adhesive tape 206, and an inner side of the annular frame 205. is supported by the opening of the Note that the dress board 90 is arranged at the center of the annular frame 205, and although its relative position with respect to the annular frame 205 is set to a predetermined position, it may deviate from the predetermined position. .

The dressing board 90 is supported by the annular frame 205 and is housed at a predetermined position in the Z-axis direction of the cassette 51, and when flat dressing is carried out, the dressing board 90 is carried out of the cassette 51 and placed on the holding table. 10 , and the annular frame 205 is clamped by the clamp portion 12 . During flat dressing, the dressing board 90 is held by the holding table 10, and the cutting blade 24 of the cutting blade 21 of the cutting unit 20 moving in the Y-axis direction cuts into the dressing board 90, forming a concave cutting groove 95 from the top surface (Fig. 5) is formed to flat dress the cutting blade 21.

In flat dressing, the cutting blade 21 moves from one end 91 of the dressing board 90 held on the holding table 10 to the other end 92 in the X-axis direction, or from the other end 92 to the one end 91 of the dressing board 90 along the Y-axis. The cutting groove 95 is formed by being relatively moved in the direction. In flat dressing, the cutting blade 21 is moved in the X-axis direction after forming the cutting groove 95, and is moved from the other end 92 in the X-axis direction of the dressing board 90 held on the holding table 10 to one end 91 or one end 91 The cutting groove 95 is formed by being moved relative to the dress board 90 in the Y-axis direction toward the other end 92 .

In the first embodiment, in flat dressing, the cutting blade 21 sequentially forms cutting grooves 95 parallel to the Y-axis direction from one end 93 in the X-axis direction toward the other end 94. In addition, in flat dressing, the dressing board 90 of the cutting blade 21 moves the cutting blade 21 in the Y-axis direction, rather than the normal dressing in which the cutting blade 21 is moved in the X-axis direction relative to the dressing board 90. Movement speed relative to is slow.

The imaging unit 30 is fixed so as to move integrally with the cutting unit 20. The imaging unit 30 includes an imaging element that photographs the region to be divided of the workpiece 200 held on the holding table 10 before cutting. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 30 photographs the workpiece 200 held on the holding table 10, obtains an image for performing alignment for aligning the workpiece 200 and the cutting blade 21, and uses the obtained image. Output to control unit 100.

Further, when performing flat dressing, the imaging unit 30 images the outer periphery of the dressing board 90 held on the holding table 10 and outputs the image obtained by the imaging to the control unit 100. Note that in the first embodiment, the imaging unit 30 images the center of all the outer peripheral edges of the dress board 90 in the longitudinal direction. The position of the imaging unit 30 relative to the holding table 10 when imaging the outer periphery of the dress board 90 is predetermined, and the field of view of the imaging unit 30 is the position of the dress board 90 shifted from the annular frame 205. The range is set within a range where it is possible to image the outer periphery even if the outer periphery is present.

The control unit 100 controls each of the above-described components of the cutting device 1 to cause the cutting device 1 to perform processing operations and flat dressing on the workpiece 200. Note that the control unit 100 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output unit. A computer having an interface device.

The control unit 100 includes a display unit (not shown) including a liquid crystal display device that displays the status of machining operations, images, etc., an input unit used by an operator to register machining content information, etc., and a notification unit 110. It is connected. The input unit includes at least one of a touch panel provided on the display unit and an external input device such as a keyboard. The notification unit 110 is controlled by the control unit 100 and notifies the operator by emitting at least one of light and sound.

Processing conditions are registered in the storage device of the control unit 100 from the input unit. The arithmetic processing device of the control unit 100 performs arithmetic processing according to the machining conditions and computer program stored in the storage device, and sends control signals for controlling the cutting device 1 to the cutting device via the input/output interface device. 1 to the above-mentioned components. In Embodiment 1, the machining conditions include an X-axis margin width 301, a Y-axis margin width 302, an X-axis feed width 303, the number of times the cutting blade 21 moves relative to the dress board 90, and FIG. includes a cut depth 304 shown in FIG. These X-axis direction margin width 301, Y-axis direction margin width 302, X-axis direction feed width 303, number of times the cutting blade 21 moves relative to the dressing board 90, and depth of cut 304 are determined by the cutting device 1 to perform flat dressing. These are the actual processing conditions.

The X-axis margin width 301 is the width in the X-axis direction from one end 93 in the X-axis direction of the dress board 90 on which flat dressing is not performed to the dressing start position 401 or dressing end position 402 when flat dressing is first performed. It is distance. Note that the dressing start position 401 is located outside the dressing board 90 held by the holding table 10 and when the cutting unit 20 starts moving in the Y-axis direction with respect to the dressing board 90 when performing flat dressing. This is the position of the lower end of the cutting edge 24 of the cutting blade 21. The dressing end position 402 is the cutting blade outside the dressing board 90 held by the holding table 10 and when the cutting unit 20 finishes moving in the Y-axis direction with respect to the dressing board 90 when performing flat dressing. This is the position of the lower end of the cutting blade 24 of No. 21.

The Y-axis direction margin width 302 is the distance in the Y-axis direction from the end of the dress board 90 in the Y-axis direction to the dress start position 401 or the dress end position 402. Note that the Y-axis direction margin width 302 is because the relative moving speed of the cutting blade 21 for flat dressing with respect to the dressing board 90 is slower than the relative moving speed of the cutting blade 21 of normal dressing with respect to the dressing board 90. , it is desirable that the distance be as short as possible.

The X-axis feed width 303 is the distance in the X-axis direction between the dressing start position 401 and the dressing end position 402, that is, the distance in the X-axis direction between the dressing start position 401 and the dressing end position 402; This is the distance when moving in the X-axis direction with respect to the dress board 90.

The number of times the cutting blade 21 is moved relative to the dress board 90 indicates the number of times and the direction in which the cutting blade 21 is moved relative to the dress board 90 in the Y-axis direction in one flat dress. In the first embodiment, the number of times the cutting blade 21 is moved relative to the dressing board 90 is as follows: the cutting blade 21 is moved from one end 91 of the dressing board 90 held on the holding table 10 toward the other end 92 in the X-axis direction; Although the number and direction of movement relative to the dress board 90 in the Y-axis direction from the other end 92 to the one end 91 are shown, the present invention is not limited thereto.

The cutting depth 304 is a predetermined height position at which the cutting blade 21 cuts into the dress board 90, and is defined as the distance from the upper surface of the dress board 90 to the lower end of the cutting blade 24 of the cutting blade 21 that cuts into the dress board 90 during flat dressing. It shows. Furthermore, the control unit 100 stores information regarding the outer diameter of the cutting edge 24 of the cutting blade 21. Information regarding the outer diameter of the cutting edge 24 of the cutting blade 21 is registered from the input unit or registered in the storage device by a reference position setting mechanism (not shown) of the cutting device 1.

Further, the control unit 100 includes a cut area storage section 101, a dressing range setting section 102, and a control section 103, as shown in FIG. The cut area storage unit 101 stores information regarding a cut area 601 (shown in FIG. 14) of the dress board 90, which is formed by the cutting edge 24 of the cutting blade 21 in flat dressing. In the first embodiment, as information regarding the cut area 601, the cumulative number of times the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 during flat dressing is stored.

If the cut area storage unit 101 stores that the number of movements is zero as information regarding the cut area 601, the dressing range setting unit 102 sets the imaging unit 30 to the dress board 90 on which flat dressing has not been performed. The position of the outer periphery of the dressing board 90 is calculated from the image obtained by capturing the outer periphery of , and the margin widths 301, 302, the feed width in the X-axis direction 303, and the number of times the cutting blade 21 moves relative to the dressing board 90 during flat dressing are calculated. Based on the cutting depth 304, a dressing start position 401 and a dressing end position 402 during flat dressing are set.

If the cut area storage unit 101 stores information regarding the cut area 601 that the number of movements is 1 or more, the dress range setting unit 102 sets the dress board at the time of flat dressing stored in the cut area 601. 90, the cumulative number of times the cutting blade 21 is moved in the Y-axis direction, the margin widths 301, 302, the feed width in the X-axis direction 303, the number of times the cutting blade 21 moves relative to the dressing board 90 during flat dressing, and the cutting depth. Based on the depth 304, a dressing start position 401 and a dressing end position 402 during flat dressing are set.

The control unit 103 controls the components of the cutting device 1 to cause the cutting device 1 to perform processing operations and flat dressing on the workpiece 200.

The functions of the cut area storage unit 101 are realized by a storage device. The functions of the address range setting section 102 and the control section 103 are realized by the arithmetic processing unit executing a computer program stored in a storage device.

Next, this specification will explain the processing operation of the cutting device 1 described above, that is, the dressing method according to the first embodiment. FIG. 7 is a flowchart showing the flow of the dressing method according to the first embodiment. The processing operation, that is, the dressing method of the cutting apparatus 1 according to the first embodiment is a flat dressing method in which the workpiece 200 is divided into individual devices 203 and the cutting blade 21 fixed to the tip of the spindle 22 is used.

In the cutting apparatus 1 having the above-described configuration, an operator registers processing conditions in the control unit 100, and a cassette 51 containing a workpiece 200 and a dress board 90 before cutting is installed in the cassette elevator 50. After that, when the cutting device 1 receives an instruction to start a machining operation from the operator via the input unit, it starts the machining operation, that is, the dressing method according to the first embodiment. When the cutting device 1 starts the machining operation, the control section 103 of the control unit 100 drives the spindle motor to rotate the spindle 22 around the axis at a rotation speed set in the machining conditions, and also sets the flat dress timing. It is determined whether or not (step ST1).

The flat dressing timing refers to the timing at which the cutting blade 21 of the cutting unit 20 is flat dressed. In the first embodiment, the flat dress timing is, for example, every time a preset number of workpieces 200 are cut, and is registered in the control unit 100 as part of the processing conditions. Further, the flat dress timing of the present invention is not limited to each time a preset number of workpieces 200 are cut. When the control section 103 of the control unit 100 determines that it is not the flat dress timing (step ST1: No), the cutting device 1 proceeds to processing step ST2.

(Processing step)
FIG. 8 is a side view, partially in section, showing the processing steps of the dressing method shown in FIG. The processing step ST2 is a step in which the workpiece 200 is held on the holding table 10 and the workpiece 200 on the holding table 10 is cut with the cutting blade 21.

In processing step ST2, the control section 103 of the control unit 100 controls the transport unit to take out the workpiece 200 before cutting from the cassette 51, and holds the back surface 204 side of the workpiece 200 on the holding table 10 via the adhesive tape 206. Place it on surface 11. The control section 103 of the control unit 100 controls the vacuum suction source and the like to suction and hold the back surface 204 side of the workpiece 200 to the holding surface 11 of the holding table 10 via the adhesive tape 206, and also to Clamp the annular frame 205. The control section 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 downward from the cutting unit 20, controls the imaging unit 30 to photograph the workpiece 200, Alignment is performed based on the image taken by the imaging unit 30.

In processing step ST2, the control section 103 of the control unit 100 controls the cutting unit 20 and each moving unit 41, 42, 43, 44 to separate the workpiece 200 and the cutting unit 20 along the planned dividing line 202. By relatively moving the cutting blade 21, as shown in FIG. 8, the cutting blade 21 cuts into each planned dividing line 202 to divide the workpiece 200 into individual devices 203. In the processing step ST2, the control section 103 of the control unit 100 controls the transport unit to transport the workpiece 200 divided into individual devices 203 to the cleaning unit 60, and controls the cleaning unit 60 to remove the workpiece After cleaning the object 200, the transfer unit is controlled to accommodate the workpiece 200 in the cassette 51, and the process proceeds to step ST13.

Further, when the control section 103 of the control unit 100 determines that it is the flat dress timing (step ST1: Yes), it is determined whether or not the information regarding the cut region 601 is stored in the cut region storage section 101, that is, the cut region 601 has been cut. It is determined whether or not the number of movements as information regarding the cut region 601 stored in the region storage unit 101 is stored as zero (step ST3).

The control unit 103 of the control unit 100 determines that the information regarding the cut area 601 is not stored in the cut area storage unit 101, that is, the number of movements as the information regarding the cut area 601 stored in the cut area storage unit 101 is If it is determined that it is stored as zero times (step ST3: No), the process advances to position detection step ST4.

(Position detection step)
9 is a plan view of the workpiece in the position detection step of the dressing method shown in FIG. 7. FIG. The position detection step ST4 is a step in which the imaging unit 30 images the dress board 90 held on the holding table 10 and detects the position of the outer peripheral edge of the dress board 90.

In the position detection step ST4, the control section 103 of the control unit 100 controls the transport unit to take out the dress board 90 from the cassette 51, and places the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206. place The control section 103 of the control unit 100 controls a vacuum suction source and the like to suction and hold the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 with the clamp section 12. do. The control section 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 downward from the cutting unit 20, and controls the imaging unit 30 to image the outer periphery of the dress board 90. .

In the first embodiment, in the position detection step ST4, the imaging unit 30 images the central part of each outer periphery within the imaging range 501 shown by the dotted line in FIG. and outputs the obtained image to the control unit 100. In the position detection step ST4, the control section 103 of the control unit 100 determines the position of the outer peripheral edge of the dress board 90 held on the holding table 10 based on the image within the imaging range 501, the detection results of each position detection unit, etc. It is calculated and stored in the storage device, and the process proceeds to address range setting step ST5.

(Dress range setting step)
The dress range setting step ST5 is a step of setting a dress start position 401 and a dress end position 402 of the flat dress. In the dressing range setting step ST5, the dressing range setting section 102 of the control unit 100 sets the position of the outer periphery of the dressing board 90, margin widths 301, 302 of processing conditions, X-axis direction feed width 303, and flat dressing stored in the storage device. A dressing start position 401 and a dressing end position 402 are calculated with reference to the number of times the cutting blade 21 moves relative to the dressing board 90 and the cutting depth 304 at the time.

In the first embodiment, in the dress range setting step ST5, the dress range setting unit 102 sets the Y of the dress board 90 at a position of 301 minutes from one end 93 of the dress board 90 in the X-axis direction and close to the other end 94 of the X-axis direction. A position outside the dress board 90 by an allowance width of 302 in the Y-axis direction from one end 91 in the axial direction is calculated as a first dressing start position 401. In the first embodiment, in the dress range setting step ST5, the dress range setting unit 102 sets the Y of the dress board 90 at a position of 301 minutes from one end 93 of the dress board 90 in the X-axis direction and close to the other end 94 of the X-axis direction. The position outside the dress board 90 by an allowance width of 302 in the Y-axis direction from the other end 92 in the axial direction is calculated as the first dressing end position 402. In the dress range setting step ST5, once the dress start position 401 and the dress end position 402 are calculated, the process proceeds to a positioning step ST6.

(positioning step)
FIG. 10 is a side view, partially in section, of the cutting unit and the dressing board in the positioning step of the dressing method shown in FIG. FIG. 11 is a plan view of the cutting unit and dress board shown in FIG. 10.

The positioning step ST6 positions the direction from one end 91 of the dress board 90 to the other end 92 parallel to the axis of the spindle 22, that is, the Y-axis direction, based on the position of the outer peripheral edge of the dress board 90 stored in the storage device. Based on the position of the outer peripheral edge of the dress board 90 detected in the position detection step ST4, the lower end of the cutting blade 24 of the cutting blade 21 is cut into the dress board 90 at a cutting depth 304 outside one end 91 of the dress board 90. This is the step of positioning the

In the positioning step ST6, the control section 103 of the control unit 100 controls the rotational movement unit 44 to align the axis of the holding table 10 so that the direction from one end 91 of the dress board 90 to the other end 92 is parallel to the Y-axis direction. Adjust the direction of rotation. In the positioning step ST6, the control section 103 of the control unit 100 controls each moving unit 41, 42, 43 to position the cutting blade 21 of the cutting unit 20 at the first dressing start position 401 calculated in the dressing range setting step ST5. The lower end of the cutting blade 24 is positioned and the process proceeds to a dressing step ST7.

(dress step)
FIG. 12 is a side view, partially in section, showing a cutting unit and a dressing board in the dressing step of the dressing method shown in FIG. FIG. 13 is a plan view of the cutting unit and dress board shown in FIG. 12. 14 is a plan view of the dressing board after the dressing step of the dressing method shown in FIG. 7. FIG.

In the dressing step ST7, after performing the positioning step ST6, the cutting blade 21 is moved relative to the dressing board 90 to cut from one end 91 of the dressing board 90 to the other end 92, thereby changing the cutting edge 24 of the cutting blade 21. This is the step of flattening the tip. In the dressing step ST7, the control section 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 in the Y-axis direction from one end 91 of the dressing board 90 to the other end 92, and as shown in FIG. As shown in FIG. 13, the cutting edge 24 of the cutting blade 21 is cut into the dress board 90 to form a cutting groove 95. In the dressing step ST7, the control section 103 of the control unit 100 controls the X-axis movement unit 41 and the Y-axis movement unit 42 to stop the movement of the cutting blade 21 in the Y-axis direction at the dressing end position 402, and then The cutting blade 21 is moved toward the other end 94 in the X-axis direction by an axial feed width of 303 and positioned at the next dressing start position 401.

In the dressing step ST7, the control section 103 of the control unit 100 controls the Y-axis movement unit 42 to move the cutting unit 20 in the Y-axis direction from the other end 92 of the dress board 90 toward the one end 91, and moves the cutting unit 20 toward the one end 91 of the dress board 90. The cutting edge 24 of the cutting blade 21 is cut into the cutting groove 90 to form a cutting groove 95. In the first embodiment, in the dressing step ST7, the control section 103 of the control unit 100 moves the cutting blade 21 in the Y-axis direction according to the number of times the cutting blade 21 is moved relative to the dressing board 90 during flat dressing processing conditions, and performs cutting. The tip of the cutting edge 24 of the blade 21 is flattened. In the first embodiment, in the dressing step ST7, as shown in FIG. 14, after two cutting grooves 95 are formed, the process proceeds to the cutting area storage step ST8.

(cut area memory step)
The cut area storage step ST8 is a step in which the cut area storage unit 101 stores information regarding the cut area 601 of the dress board 90 that was cut by flat dressing in the dress step ST7. In the first embodiment, in the cut area storage step ST8, the cut area storage unit 101 stores, as information regarding the cut area 601, the cutting blade 21 was moved in the Y-axis direction with respect to the dressing board 90 in the dressing step ST7. Stores the cumulative number of times the number of moves is added to the number of times already stored. In the cut area storage step ST8, the cut area storage unit 101 stores, as information regarding the cut area 601, the cumulative number of times the cutting blade 21 has been moved in the Y-axis direction with respect to the dress board 90 during flat dressing. Once stored, the process advances to step ST13.

In addition, the control unit 103 of the control unit 100 may move information regarding the cut area 601 stored in the cut area storage unit 101, that is, the information regarding the cut area 601 stored in the cut area storage unit 101. If it is determined that the number of times is stored as one or more (step ST3: Yes), the process advances to second dress range setting step ST9.

(Second dress range setting step)
The second dressing range setting step ST9 is a step of setting the dressing start position 401 and the dressing end position 402 of the flat dress when the cut area 601, that is, the cutting groove 95 is formed on the dress board 90.

In the second dressing range setting step ST9, the dressing range setting section 102 of the control unit 100 moves the cutting blade 21 in the Y-axis direction with respect to the dressing board 90 during flat dressing stored in the cut area storage section 101. The cumulative number of movements, the position of the outer periphery of the dressing board 90 stored in the storage device, the margin widths 301, 302 of processing conditions, the feed width in the X-axis direction 303, the number of times the cutting blade 21 moves relative to the dressing board 90 during flat dressing. A dressing start position 401 and a dressing end position 402 are calculated with reference to the cut depth 304.

In the first embodiment, in the second dressing range setting step ST9, the dressing range setting unit 102 calculates the center position in the width direction of the cutting groove 95 recently formed in the dressing step ST7 or the second dressing step ST11. From the center position in the width direction of the recently formed cutting groove 95, dress by 303 minutes in the X-axis direction feed width and at a position near the other end 94 from one end 91 in the Y-axis direction of the dress board 90 by 302 minutes in the Y-axis direction margin width. The position outside the board 90 is calculated as the first dress start position 401. In the first embodiment, in the second dressing range setting step ST9, the dressing range setting unit 102 selects a width of 303 minutes from the calculated center position in the width direction of the recently formed cutting groove 95 toward the other end 94. In the position, the position outside the dress board 90 by 302 margins in the Y-axis direction from the other end 92 of the dress board 90 in the Y-axis direction is calculated as the first dress end position 402. In the second dress range setting step ST9, once the dress start position 401 and the dress end position 402 are calculated, the process proceeds to the second positioning step ST10.

(Second positioning step)
15 is a plan view of the cutting unit and the dressing board of the second positioning step of the dressing method shown in FIG. 7; FIG. In the second positioning step ST10, the holding table 10 holds the dress board 90, and the position of the outer periphery of the dress board 90 detected in the position detection step ST4 and the cutting of the dress board 90 stored in the cut area storage step ST8 are performed. This is a step of positioning the lower end of the cutting blade 24 of the cutting blade 21 at a cutting depth 304, which is a predetermined height position for cutting into the dressing board 90, on the outside of one end 91 of the dressing board 90 based on information regarding the finished area.

In the first embodiment, in the second positioning step ST10, the control section 103 of the control unit 100 controls the transport unit to take out the dress board 90 from the cassette 51, and transfers the dress board 90 to the holding table 10 via the adhesive tape 206. Place it on the holding surface 11 of. The control section 103 of the control unit 100 controls a vacuum suction source and the like to suction and hold the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 with the clamp section 12. do.

In the second positioning step ST10, the control section 103 of the control unit 100 controls the rotational movement unit 44 from one end 91 of the dress board 90 to the other end based on the position of the outer peripheral edge of the dress board 90 stored in the storage device. The orientation of the holding table 10 around the axis is adjusted so that the direction toward the holding table 92 is parallel to the Y-axis direction. In the second positioning step ST10, the control section 103 of the control unit 100 controls each moving unit 41, 42, 43 to move the cutting unit 20 to the first dressing start position 401 calculated in the second dressing range setting step ST9. The lower end of the cutting edge 24 of the cutting blade 21 is positioned, and the process proceeds to a second dressing step ST11.

(Second dress step)
16 is a plan view of the cutting unit and the dressing board of the second dressing step of the dressing method shown in FIG. 7. FIG. In the second dressing step ST11, after performing the second positioning step ST10, the cutting blade 21 is moved relative to the dressing board 90 to cut from one end 91 of the dressing board 90 to the other end 92. This step is to flatten the tip of the cutting blade 24.

In the second dressing step ST11, the control section 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 in the Y-axis direction from one end 91 of the dressing board 90 to the other end 92, As shown in FIG. 16, cutting grooves 95 are formed in the dress board 90. In the second dressing step ST11, the control section 103 of the control unit 100 controls the X-axis movement unit 41 and the Y-axis movement unit 42 to stop the movement of the cutting blade 21 in the Y-axis direction at the dressing end position 402, and then , the cutting blade 21 is moved to the other end 94 side in the X-axis direction by an X-axis direction feed width of 303, and is positioned at the next dressing start position 401.

In the second dressing step ST11, the control section 103 of the control unit 100 controls the Y-axis movement unit 42 to move the cutting unit 20 in the Y-axis direction from the other end 92 of the dress board 90 toward the one end 91. A cutting groove 95 is formed by cutting the cutting blade 21 into the dress board 90. In the first embodiment, in the second dressing step ST11, the control section 103 of the control unit 100 determines the number of times the cutting blade 21 is moved relative to the dressing board 90 during flat dressing processing conditions, and the number of times the cutting blade 21 is moved in the Y-axis direction. , the tip of the cutting edge 24 of the cutting blade 21 is flattened. In the first embodiment, when two cutting grooves 95 are formed in the second dressing step ST11, the process proceeds to the second cutting area storage step ST12.

(Second cut area storage step)
The second cut area storage step ST12 is a step in which the cut area storage unit 101 stores information regarding the cut area 601 of the dress board 90 cut by flat dressing in the second dress step ST11. In the first embodiment, in the cut area storage step ST8, the cut area storage unit 101 stores, as information regarding the cut area 601, the cutting blade 21 moves in the Y-axis direction with respect to the dressing board 90 in the second dressing step ST11. The cumulative number of times of movement is added to the number of times already stored. In the cut area storage step ST8, after the cut area storage unit 101 stores information regarding the cut area 601, the process proceeds to step ST13.

In step ST13, the control section 103 of the control unit 100 determines whether flat dressing of the cutting blade 21 is possible using the dressing board 90 held on the holding table 10. In the first embodiment, the control unit 103 of the control unit 100 calculates the widthwise center position of the recently formed cutting groove 95 in the second dressing step ST11, and calculates the widthwise center position of the recently formed cutting groove 95. The position closer to the other end 94 by 303 minutes in the X-axis direction feed width is calculated from the center position. The control section 103 of the control unit 100 controls the dress board held on the holding table 10 when the distance between the position near the other end 94 and the other end 94 is less than the X-axis margin width 301 for the X-axis direction feed width 303. It is determined that the cutting blade 21 cannot be flat-dressed using the cutting blade 90 (step ST13: No), and the notification unit 110 is operated to notify the operator (step ST14).

The control section 103 of the control unit 100 returns to step ST1 when the distance from the position near the other end 94 corresponding to the X-axis direction feed width 303 and the other end 94 is equal to or greater than the X-axis direction margin width 301. For this purpose, in the dressing method according to the first embodiment, in the second and subsequent processing steps ST2, after performing at least one of the dressing step ST7 and the second dressing step ST11, the dressing board 90 is carried out from the holding table 10. Then, the dress board 90 is housed in the cassette 51. In the dressing method according to the first embodiment, in the second positioning step ST10, after performing the processing step ST2, the workpiece 200 is carried out from the holding table 10 and accommodated in the cassette 51, and Holds the dress board 90.

As described above, the dressing method according to the first embodiment includes a position detection step ST4, a positioning step ST6, a dressing step ST7, a cut area storage step ST8, a processing step ST2, a second positioning step ST10, A second dressing step ST11 is provided.

As described above, in the dressing method and cutting device 1 according to the first embodiment, in order to implement the position detection step ST4 of detecting the position of the outer peripheral edge of the dressing board 90, it is necessary to set the Y-axis direction margin width 302 excessively. Therefore, the Y-axis direction margin width 302 itself can be suppressed. As a result, the dressing method and cutting device 1 have the effect of reducing the time required for flat dressing.

Further, the dressing method and cutting device 1 according to the first embodiment stores information regarding the cut area 601 of the dress board 90 in the cut area storage unit 101 after the dress steps ST7 and ST11. As a result, the dressing method and cutting device 1 can perform flat dressing while avoiding the cut area 601.

In addition, the dressing method and cutting device 1 according to the first embodiment include, as information regarding the cut area 601 of the dress board 90, the number of times the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 during flat dressing. The cumulative number of times is stored in the cut area storage unit 101. As a result, the dressing method and cutting device 1 can perform flat dressing while reliably avoiding the cut region 601.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention.

1 Cutting device 10 Holding table 21 Cutting blade 22 Spindle 30 Imaging unit (imaging means)
90 Dress board 91 One end 92 Other end 200 Workpiece 304 Depth of cut (predetermined height position)
601 Cutting area ST2 Processing step ST4 Position detection step ST6 Positioning step ST7 Dressing step ST8 Cutting area storage step ST10 Second positioning step ST11 Second dressing step

Claims (2)

A method of flat dressing a cutting blade fixed to the tip of a spindle, the method comprising:
a position detection step of capturing an image of the dress board held on the holding table via an adhesive tape with an imaging means and detecting the position of the outer periphery of the dress board;
The direction from one end of the dress board to the other end is positioned parallel to the axis of the spindle, and the outside of one end of the dress board is located based on the position of the outer periphery of the dress board detected in the position detection step. a positioning step of positioning the lower end of the cutting blade at a position that is at a predetermined height for cutting into the dress board and at a distance from the dress board that is within a margin included in the processing conditions;
After performing the positioning step, the cutting blade is moved relative to the dressing board so that the distance from the dressing board from the one end to the other end of the dressing board becomes the margin included in the processing conditions. A dressing method comprising: a dressing step of flattening the tip of the cutting blade by moving it to a position and cutting it. a cut area storage step for storing information regarding the cut area of the dress board cut in the dress step;
After performing the dressing step, a processing step of carrying out the dressing board from above the holding table, holding the workpiece on the holding table, and cutting the workpiece on the holding table with the cutting blade;
After carrying out the machining step, the workpiece is carried out from the holding table, the dressing board is held on the holding table, and the position of the outer peripheral edge of the dressing board detected in the position detection step and the cutting are performed. Based on the information about the cut area of the dress board stored in the finished area storing step, the cut is made at a predetermined height and at a distance from the dress board outside one end of the dress board. a second positioning step of positioning the lower end of the cutting blade at a position corresponding to the margin included in the conditions ;
After performing the second positioning step, the cutting blade is moved relative to the dress board to move from the one end of the dress board to the other end of the margin width in which the distance from the dress board is included in the machining conditions. 2. The dressing method according to claim 1, further comprising a second dressing step of moving and cutting the material to a position where the material becomes .

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