JP2021013984A - Dressing method - Google Patents

Abstract

To provide a dressing method capable of suppressing time required for flat dressing.SOLUTION: A dressing method includes: a position detection step ST4 of imaging a dressing board held on a holding table with an imaging unit, and detecting a position of an outer peripheral edge of the dressing board; a positioning step ST6 of positioning a direction from one end toward the other end of the dressing board in parallel to a shaft center of a spindle, and positioning the lower end of a cutting blade to a cutting-in depth cut in the dressing board in the outside one end of the dressing board on the basis of the position of the outer peripheral edge of the dressing board detected in the position detection step ST4; and a dressing step ST7 of cutting the dressing board from one end to the other end by relatively moving the cutting blade to the dressing board, and thereby flattening the tip of the cutting blade, after execution of the positioning step ST6.SELECTED DRAWING: Figure 7

Description

The present invention relates to a flat dressing method for cutting blades.

A cutting device that cuts various plate-shaped workpieces such as semiconductor substrates, resin package substrates, and ceramic substrates made of silicon, gallium arsenic, SiC (silicon carbide), sapphire, etc. with a cutting blade cuts the workpiece when it is cut. The tip of the cutting edge of the blade may be deformed into an arc shape in cross section.

Some cutting devices are regularly flat-dressed to flatten the tip of the cutting edge of the cutting blade along the axis of the spindle (see, for example, Patent Document 1). In the dressing method shown in Patent Document 1, the cutting blade is moved in the axial direction of the spindle from one end to the other end of the dress board attached to the frame by being attached to a tape, and the dress board is cut by the cutting blade. I'm wearing a flat dress. Therefore, the cutting device stores the size of the dress board in advance, and sets the moving distance of the cutting blade based on the size of the dress board.

JP-A-2010-588

In the dressing method shown in Patent Document 1, the transport unit holds the frame and transports the frame so that the center of the frame and the center of the holding table overlap. For this reason, in the dressing method, the center of the chuck and the center of the dressboard do not always match due to an error in the attachment position of the dressboard with respect to the frame or a transport error, so cutting is performed between positions outside the outer peripheral edge of the dressboard by a margin. I was moving the blade. However, in the dressing method shown in Patent Document 1, since the moving distance of the cutting blade is increased by the margin width, the time required for dressing is long, and it has been desired to shorten the time required for dressing.

In particular, in the flat dress, a load is applied to the cutting blade as compared with the case where the cutting blade is relatively moved in the X-axis direction to cut the workpiece as in normal dicing, so the relative moving speed is set to a low speed. For this reason, flat dresses have been eagerly desired to have as short a margin as possible.

The present invention has been made in view of such problems, and an object of the present invention is to provide a dressing method capable of suppressing the time required for a flat dress.

In order to solve the above-mentioned problems and achieve the object, the dressing method of the present invention is a flat dressing method of a cutting blade fixed to the tip of a spindle, and the dress board held on a holding table is imaged. The position detection step of detecting the position of the outer peripheral edge of the dress board and the direction from one end to the other end of the dress board are positioned parallel to the axis of the spindle and detected in the position detection step. Based on the position of the outer peripheral edge of the dress board, a positioning step of positioning the lower end of the cutting blade at a predetermined height position to be cut into the dress board and a positioning step were carried out outside one end of the dress board. After that, the dress step is provided by moving the cutting blade relative to the dress board and cutting from one end to the other end of the dress board to flatten the tip of the cutting blade. And.

In the dressing method, a cut area storage step for storing information about a cut area of the dress board cut in the dress step, and after performing the dress step, the dress board is carried out from the holding table. A machining step of holding the workpiece on the holding table and cutting the workpiece on the holding table with the cutting blade, and after performing the machining step, the workpiece is carried out from the holding table. The dressboard is held by the holding table, and based on the position of the outer peripheral edge of the dressboard detected in the position detection step and the information about the cut area of the dressboard stored in the cut area storage step. After performing a second positioning step of positioning the lower end of the cutting blade at a predetermined height position cut into the dressboard on the outside of one end of the dressboard and the second positioning step, the cutting blade is placed on the dressboard. A second dress step for cutting from one end to the other end of the dress board by moving relative to the dress board may be provided.

The dressing method of the present invention has an effect that the time required for a flat dress can be suppressed.

FIG. 1 is a perspective view showing a configuration example of a cutting device that implements the dressing method according to the first embodiment. FIG. 2 is a perspective view showing an example of a dress board for flat dressing the cutting blade of the cutting apparatus shown in FIG. FIG. 3 is an example of a cross-sectional view of the tip of the cutting edge of the cutting blade before the flat dress of the dressing method according to the first embodiment. FIG. 4 is an example of a cross-sectional view of the tip of the cutting blade of the cutting blade after the flat dress of the cutting blade shown in FIG. FIG. 5 is a plan view of a dress board showing a dress start position, a dress storage position, and the like of the dress method according to the first embodiment. FIG. 6 is a side sectional view of the dress board showing the depth of cut and the like of the dress method according to the first embodiment. FIG. 7 is a flowchart showing the flow of the dressing method according to the first embodiment. FIG. 8 is a side view showing a processing step of the dressing method shown in FIG. 7 in a partial cross section. FIG. 9 is a plan view of the workpiece in the position detection step of the dressing method shown in FIG. FIG. 10 is a side view showing a partial cross section of the cutting unit and the dress board in the positioning step of the dressing method shown in FIG. 7. FIG. 11 is a plan view of the cutting unit and the dress board shown in FIG. FIG. 12 is a side view showing a cutting unit and a dress board of the dress step of the dress method shown in FIG. 7 in a partial cross section. FIG. 13 is a plan view of the cutting unit and the dress board shown in FIG. FIG. 14 is a plan view of the dress board after the dress step of the dress method shown in FIG. FIG. 15 is a plan view of the cutting unit and the dress board in the second positioning step of the dressing method shown in FIG. FIG. 16 is a plan view of the cutting unit and the dress board of the second dress step of the dress method shown in FIG.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The dressing method according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device that implements the dressing method according to the first embodiment. FIG. 2 is a perspective view showing an example of a dress board for flat dressing the cutting blade of the cutting apparatus shown in FIG. FIG. 3 is an example of a cross-sectional view of the tip of the cutting edge of the cutting blade before the flat dress of the dressing method according to the first embodiment. FIG. 4 is an example of a cross-sectional view of the tip of the cutting blade of the cutting blade after the flat dress of the cutting blade shown in FIG. FIG. 5 is a plan view of a dress board showing a dress start position, a dress storage position, and the like of the dress method according to the first embodiment. FIG. 6 is a side sectional view of the dress board showing the depth of cut and the like of the dress method according to the first embodiment.

The dressing method according to the first embodiment is carried out by the cutting device 1 shown in FIG. The cutting device 1 shown in FIG. 1 is a device that cuts (processes) a work piece 200 that is a plate-like object. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. In the work piece 200, the device 203 is formed in a region divided in a grid pattern by a plurality of scheduled division lines 202 formed in a grid pattern on the surface 201. The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which a central portion is thinned and a thick portion is formed on an outer peripheral portion. In addition to the wafer, a plurality of devices sealed with resin are used. It may be a rectangular package substrate, a ceramic plate, a glass plate, or the like. The workpiece 200 is attached to a disk-shaped adhesive tape 206 on the back surface 204, and an annular frame 205 having an inner diameter larger than the outer diameter of the workpiece 200 is attached to the outer peripheral edge of the adhesive tape 206. , Supported by an opening inside the annular frame 205.

The cutting device 1 shown in FIG. 1 is a device that holds a workpiece 200 having a scheduled division line 202 on a holding table 10 and cuts along a scheduled division line 202 with a cutting blade 21. As shown in FIG. 1, the cutting apparatus 1 is a holding table 10 that sucks and holds the workpiece 200 on the holding surface 11 and a cutting blade 21 that mounts the workpiece 200 held on the holding table 10 on the spindle 22. It includes a cutting unit 20 for cutting, an image pickup unit 30 which is an image pickup means for photographing a workpiece 200 held on a holding table 10, and a control unit 100 which is a control means.

Further, as shown in FIG. 1, the cutting device 1 processes and feeds the holding table 10 in the horizontal direction and in the X-axis direction parallel to the lateral direction of the device main body 2, and the cutting unit 20 horizontally. The Y-axis moving unit 42, which is parallel to the direction and the longitudinal direction of the apparatus main body 2 and is indexed and fed in the Y-axis direction orthogonal to the X-axis direction, and the cutting unit 20 are vertically orthogonal to both the X-axis direction and the Y-axis direction. The Z-axis moving unit 43 that cuts and feeds in the Z-axis direction parallel to the direction and the holding table 10 are rotated around the axis parallel to the Z-axis direction and processed in the X-axis direction together with the holding table 10 by the X-axis moving unit 41. It includes at least a rotary movement unit 44 to be fed.

The holding table 10 has a disk shape, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. Further, the holding table 10 is movably provided by the X-axis moving unit and rotatably by the rotation drive source. The holding table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200. Further, a plurality of clamp portions 12 for clamping the annular frame 211 are provided around the holding table 10.

The cutting unit 20 includes a spindle 22 on which a cutting blade 21 for cutting the workpiece 200 held on the holding table 10 is mounted. The cutting unit 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 42 with respect to the workpiece 200 held by the holding table 10, and is movable in the Z-axis direction by the Z-axis moving unit 43. It is provided in.

As shown in FIG. 1, the cutting unit 20 is provided on a support frame 3 erected from the apparatus main body 2 via a Y-axis moving unit 42, a Z-axis moving unit 43, and the like. The cutting unit 20 can position the cutting blade 21 at an arbitrary position on the holding surface 11 of the holding table 10 by the Y-axis moving unit 42 and the Z-axis moving unit 43.

The cutting unit 20 is moved in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 42 and the Z-axis moving unit 43 in addition to the cutting blade 21 and the spindle 22 to which the cutting blade 21 is mounted at the tip, and the spindle 22 is moved. A spindle housing 23 rotatably housed around the axis and a spindle motor (not shown) housed in the spindle housing 23 and rotating the spindle 22 around the axis are provided.

The cutting blade 21 is an ultra-thin cutting grindstone having a substantially ring shape. The spindle 22 cuts the workpiece 200 by rotating the cutting blade 21. The spindle 22 is housed in the spindle housing 23, and the spindle housing 23 is supported by the Z-axis moving unit 43. The axes of the spindle 22 and the cutting blade 21 of the cutting unit 20 are set parallel to the Y-axis direction.

The X-axis moving unit 41 moves the holding table 10 in the X-axis direction, which is the machining feed direction, so that the holding table 10 and the cutting unit 20 are machined and fed relatively along the X-axis direction. The Y-axis moving unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing and feeding direction, so that the holding table 10 and the cutting unit 20 are indexed and fed relatively along the Y-axis direction. The Z-axis moving unit 43 cuts and feeds the holding table 10 and the cutting unit 20 relatively along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction, which is the cutting and feeding direction.

The X-axis moving unit 41, the Y-axis moving unit 42, and the Z-axis moving unit 43 include a well-known ball screw rotatably provided around the axis, a well-known pulse motor for rotating the ball screw around the axis, and a holding table. A well-known guide rail that movably supports the 10 or the cutting unit 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction is provided.

Further, the cutting device 1 has an X-axis direction position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, and a Y-axis direction position (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. It includes a detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction by the pulse of the pulse motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the holding table 10 in the X-axis direction, the cutting unit 20 in the Y-axis direction, or the Z-axis direction to the control unit 100. .. In the first embodiment, each position is determined by the distance in the X-axis direction, the Y-axis direction, and the Z-axis direction from the predetermined reference position.

Further, the cutting device 1 includes a cassette elevator 50 on which a cassette 51 accommodating a workpiece 200 before and after cutting is placed and moves the cassette 51 in the Z-axis direction, and a cleaning unit for cleaning the workpiece 200 after cutting. 60 and a transport unit (not shown) for loading and unloading the workpiece 200 into and out of the cassette 51 and transporting the workpiece 200.

The cassette 51 accommodates a plurality of workpieces 200 supported by the annular frame 205 at intervals in the Z-axis direction. Further, the cassette 51 accommodates one dress board 90 shown in FIG. The dress board 90 shown in FIG. 2 is for flat-dressing a cutting blade 21 in which the tip of the cutting blade 24 has an arcuate cross section as shown in FIG. 3, for example, by repeating cutting of the workpiece 200. The flat dress means that the cutting blade 21 shown in FIG. 3 is cut into the dress board 90 while moving in the Y-axis direction parallel to the axis of the spindle, and the tip of the cutting blade 24 is Y as shown in FIG. It means forming flat along the axial direction.

In the first embodiment, the dress board 90 is formed in a flat plate shape having a rectangular flat shape. The dress board 90 is formed by mixing abrasive grains such as WA (white random, alumina-based) and GC (green carbonite, silicon carbide-based) with a resin or ceramic bond material. Similar to the workpiece 200, the dress board 90 has a disk-shaped adhesive tape 206 attached to one surface thereof, and an annular frame 205 attached to the outer peripheral edge of the adhesive tape 206 to form an inner surface of the annular frame 205. It is supported by the opening of. Although the dress board 90 is arranged in the center of the annular frame 205, the relative position with respect to the annular frame 205 is set to a predetermined position, but may deviate from the predetermined position. ..

The dress board 90 is supported by the annular frame 205 and is housed in a predetermined position in the Z-axis direction of the cassette 51. When the flat dress is performed, the dress board 90 is carried out of the cassette 51 and then a holding table. It is sucked and held by 10, and the annular frame 205 is clamped by the clamp portion 12. At the time of flat dressing, the dress board 90 is held by the holding table 10 and is cut by the cutting blade 24 of the cutting blade 21 of the cutting unit 20 that moves in the Y-axis direction, and the cutting groove 95 is concave from the upper surface (FIG. (Indicated by a dotted line in 5) is formed, and the cutting blade 21 is flat dressed.

In the flat dress, the cutting blade 21 is held on the holding table 10 from one end 91 to the other end 92 in the X-axis direction of the dress board 90, or from the other end 92 to one end 91 toward the dress board 90 on the Y axis. It is moved relative to the direction to form the cutting groove 95. In the flat dress, the cutting blade 21 is moved in the X-axis direction after forming the cutting groove 95, and is held on the holding table 10 from the other end 92 in the X-axis direction to one end 91 or one end 91. It is moved relative to the dress board 90 toward the other end 92 in the Y-axis direction to form a cutting groove 95.

In the first embodiment, in the flat dress, the cutting blade 21 sequentially forms a cutting groove 95 parallel to the Y-axis direction from one end 93 in the X-axis direction toward the other end 94. Further, the flat dress is a dress board 90 of the cutting blade 21 for moving the cutting blade 21 in the Y-axis direction, as compared with a normal dress in which the cutting blade 21 is moved relative to the dress board 90 in the X-axis direction. The relative movement speed to is slow.

The image pickup unit 30 is fixed so as to move integrally with the cutting unit 20. The image pickup unit 30 includes an image pickup element that captures a region to be divided of the workpiece 200 before cutting held on the holding table 10. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 30 takes an image of the workpiece 200 held on the holding table 10 to obtain an image for performing alignment for aligning the workpiece 200 and the cutting blade 21, and obtains the obtained image. Output to the control unit 100.

Further, the image pickup unit 30 takes an image of the outer peripheral edge of the dress board 90 held by the holding table 10 when performing flat dressing, and outputs the image obtained by taking an image to the control unit 100. In the first embodiment, the imaging unit 30 images the center of all the outer peripheral edges of the dress board 90 in the longitudinal direction. The position relative to the holding table 10 when the imaging unit 30 images the outer peripheral edge of the dress board 90 is predetermined, and the field of view of the imaging unit 30 is the dress board 90 displaced with respect to the annular frame 205. Even if there is, it is set in a range where the outer peripheral edge can be imaged.

The control unit 100 controls each of the above-mentioned components of the cutting device 1 to cause the cutting device 1 to perform a machining operation and a flat dress on the workpiece 200. The control unit 100 is an arithmetic processing device having a microcomputer such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and input / output. It is a computer having an interface device.

The control unit 100 includes a display unit (not shown) composed of a liquid crystal display device for displaying the processing operation status and an image, an input unit used by the operator to register processing content information, and a notification unit 110. It is connected. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard. The notification unit 110 is controlled by the control unit 100 and emits at least one of light and sound to notify the operator.

In the storage device of the control unit 100, processing conditions are registered from the input unit. The arithmetic processing unit of the control unit 100 executes arithmetic processing according to the processing conditions and computer programs stored in the storage device, and sends a control signal for controlling the cutting apparatus 1 to the cutting apparatus via the input / output interface device. Output to the above-mentioned component of 1. In the first embodiment, the machining conditions are the X-axis direction margin width 301, the Y-axis direction margin width 302, the X-axis direction feed width 303, the number of times the cutting blade 21 is moved with respect to the dress board 90, and FIG. Includes a depth of cut 304 as shown in. The cutting device 1 performs flat dressing on the X-axis direction margin width 301, the Y-axis direction margin width 302, the X-axis direction feed width 303, the number of movements of the cutting blade 21 with respect to the dress board 90, and the cutting depth 304. It is a processing condition at the time.

The margin width 301 in the X-axis direction is the X-axis direction from one end 93 in the X-axis direction of the dress board 90 in which the flat dress is not performed to the dress start position 401 or the dress end position 402 when the flat dress is first performed. The distance. The dress start position 401 is when the cutting unit 20 starts moving in the Y-axis direction with respect to the dress board 90 outside the dress board 90 held by the holding table 10 when performing flat dressing. This is the position of the lower end of the cutting blade 24 of the cutting blade 21. The dress end position 402 is a cutting blade outside the dress board 90 held by the holding table 10 and when the cutting unit 20 finishes moving in the Y-axis direction with respect to the dress board 90 when performing flat dressing. This is the position of the lower end of the cutting edge 24 of 21.

The margin width 302 in the Y-axis direction is the distance in the Y-axis direction from the end of the dress board 90 in the Y-axis direction to the dress start position 401 or the dress end position 402. The margin width 302 in the Y-axis direction is because the relative moving speed of the flat dress cutting blade 21 with respect to the dress board 90 is slower than the relative moving speed of the normal dress cutting blade 21 with respect to the dress board 90. , It is desirable that the distance is as short as possible.

The X-axis direction feed width 303 is the distance between the dress start position 401 and the dress end position 402 in the X-axis direction, that is, the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 during flat dressing. This is the distance when the dress board 90 is moved in the X-axis direction.

The number of times the cutting blade 21 is moved with respect to the dress board 90 indicates the number of times and the direction in which the cutting blade 21 is moved with respect to the dress board 90 in the Y-axis direction in one flat dress. In the first embodiment, the number of times the cutting blade 21 is moved with respect to the dress board 90 is such that the cutting blade 21 is moved from one end 91 in the X-axis direction of the dress board 90 held on the holding table 10 toward the other end 92, and then. The number and direction of movement relative to the dress board 90 in the Y-axis direction from the other end 92 to the one end 91 are shown, but the present invention is not limited to this.

The cutting depth 304 is a predetermined height position for cutting into the dress board 90 of the cutting blade 21, and the distance from the upper surface of the dress board 90 at the lower end of the cutting blade 24 of the cutting blade 21 to cut into the dress board 90 at the time of flat dressing. Shown. Further, the control unit 100 stores information regarding the outer diameter of the cutting blade 24 of the cutting blade 21. Information regarding the outer diameter of the cutting blade 24 of the cutting blade 21 is registered from the input unit or registered in the storage device by a reference position setting mechanism (not shown) of the cutting device 1.

Further, as shown in FIG. 1, the control unit 100 includes a cut area storage unit 101, a dress range setting unit 102, and a control unit 103. The cut area storage unit 101 stores information regarding the cut area 601 (shown in FIG. 14) of the dress board 90 formed by cutting the cutting blade 24 of the cutting blade 21 in the flat dress. In the first embodiment, as information about the cut region 601, the cumulative number of times the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 at the time of flat dressing is stored.

When the dress range setting unit 102 stores in the cut area storage unit 101 that the number of movements as information regarding the cut area 601 is zero, the dress board 90 in which the imaging unit 30 is not flat dressed is not implemented. The position of the outer peripheral edge of the dress board 90 is calculated from the image obtained by imaging the outer peripheral edge of the dress board 90, and the margin widths 301 and 302, the feed width 303 in the X-axis direction, and the number of movements of the cutting blade 21 with respect to the dress board 90 during flat dressing. And the dress start position 401 and the dress end position 402 at the time of flat dress are set based on the cut depth 304.

When the dress range setting unit 102 stores in the cut area storage unit 101 that the number of movements is one or more as information regarding the cut area 601, the dress board at the time of flat dress stored in the cut area 601 is stored. Cumulative number of movements of the cutting blade 21 in the Y-axis direction with respect to 90, margin widths 301 and 302, feed width 303 in the X-axis direction, number of movements of the cutting blade 21 with respect to the dress board 90 during flat dressing, and cutting. The dress start position 401 and the dress end position 402 at the time of flat dress are set based on the depth 304.

The control unit 103 controls the components of the cutting device 1 to cause the cutting device 1 to perform a machining operation and a flat dress on the workpiece 200.

The function of the cut area storage unit 101 is realized by the storage device. The functions of the dress range setting unit 102 and the control unit 103 are realized by the arithmetic processing unit executing a computer program stored in the storage device.

Next, this specification describes the machining operation of the cutting apparatus 1 described above, that is, the dressing method according to the first embodiment. FIG. 7 is a flowchart showing the flow of the dressing method according to the first embodiment. The machining operation, that is, the dressing method of the cutting device 1 according to the first embodiment is a flat dressing method of a cutting blade 21 fixed to the tip of a spindle 22 while dividing the workpiece 200 into individual devices 203.

In the cutting device 1 having the above-described configuration, the operator registers the machining conditions in the control unit 100, and the cassette 51 containing the workpiece 200 and the dressboard 90 before cutting is installed in the cassette elevator 50. After that, when the cutting device 1 receives an instruction to start the machining operation from the operator via the input unit, the cutting device 1 starts the machining operation, that is, the dressing method according to the first embodiment. When the cutting device 1 starts the machining operation, the control unit 103 of the control unit 100 drives the spindle motor to rotate the spindle 22 around the axis at the rotation speed set in the machining conditions, and the flat dress timing. It is determined whether or not it is (step ST1).

The flat dress timing means that the cutting blade 21 of the cutting unit 20 is flat dressed. In the first embodiment, the flat dress timing is, for example, every time a preset number of workpieces 200 are cut, and is registered in the control unit 100 as a part of the machining conditions. Further, the flat dress timing of the present invention is not limited to each time a preset number of workpieces 200 are cut. When the cutting device 1 determines that the control unit 103 of the control unit 100 is not the flat dress timing (step ST1: No), the cutting device 1 proceeds to the machining step ST2.

(Processing step)
FIG. 8 is a side view showing a processing step of the dressing method shown in FIG. 7 in a partial cross section. The machining step ST2 is a step in which the workpiece 200 is held by the holding table 10 and the workpiece 200 on the holding table 10 is cut by the cutting blade 21.

In the machining step ST2, the control unit 103 of the control unit 100 controls the transport unit to take out the workpiece 200 before cutting from the cassette 51 and holds the back surface 204 side via the adhesive tape 206 to hold the table 10. Place it on surface 11. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the back surface 204 side of the workpiece 200 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and the clamp part 12 Clamp the annular frame 205. The control unit 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 downward of the cutting unit 20, and controls the imaging unit 30 to photograph the workpiece 200. Alignment is performed based on the image obtained by the image pickup unit 30.

In the machining step ST2, the control unit 103 of the control unit 100 controls the cutting unit 20 and the moving units 41, 42, 43, 44 to move the workpiece 200 and the cutting unit 20 along the scheduled division line 202. By moving them relative to each other, as shown in FIG. 8, the cutting blade 21 is cut into each scheduled division line 202 to divide the workpiece 200 into individual devices 203. In the machining step ST2, the control unit 103 of the control unit 100 controls the transport unit to transport the workpiece 200 divided into the individual devices 203 to the cleaning unit 60, and controls the cleaning unit 60 to be processed. After cleaning the object 200, the transfer unit is controlled to accommodate the workpiece 200 in the cassette 51, and the process proceeds to step ST13.

Further, when the control unit 103 of the control unit 100 determines that the flat dress timing is set (step ST1: Yes), whether or not the information regarding the cut area 601 is stored in the cut area storage unit 101, that is, the cut area has been cut. It is determined whether or not the number of movements as information regarding the cut area 601 stored in the area storage unit 101 is stored as zero (step ST3).

The control unit 103 of the control unit 100 does not store the information about the cut area 601 in the cut area storage unit 101, that is, the number of movements as the information about the cut area 601 stored in the cut area storage unit 101. If it is determined that the number of times is zero (step ST3: No), the process proceeds to the position detection step ST4.

(Position detection step)
FIG. 9 is a plan view of the workpiece in the position detection step of the dressing method shown in FIG. The position detection step ST4 is a step of capturing the image of the dress board 90 held on the holding table 10 by the imaging unit 30 and detecting the position of the outer peripheral edge of the dress board 90.

In the position detection step ST4, the control unit 103 of the control unit 100 controls the transport unit to take out the dress board 90 from the cassette 51 and puts the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206. Place. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 by the clamping part 12. To do. The control unit 103 of the control unit 100 controls the X-axis moving unit 41 to move the holding table 10 downward of the cutting unit 20 and controls the imaging unit 30 to image the outer peripheral edge of the dress board 90. ..

In the first embodiment, in the position detection step ST4, the imaging unit 30 images the central portion of each outer peripheral edge within the imaging range 501 shown by the dotted line in FIG. 9, and the image of the central portion of each outer peripheral edge within the imaging range 501. Is obtained, and the obtained image is output to the control unit 100. In the position detection step ST4, the control unit 103 of the control unit 100 determines the position of the outer peripheral edge of the dress board 90 held on the holding table 10 based on the image in the imaging range 501, the detection result of each position detection unit, and the like. It is calculated, stored in the storage device, and proceeds to the dress range setting step ST5.

(Dress range setting step)
The dress range setting step ST5 is a step of setting the dress start position 401 and the dress end position 402 of the flat dress. In the dress range setting step ST5, the dress range setting unit 102 of the control unit 100 stores the position of the outer peripheral edge of the dress board 90 stored in the storage device, the margin widths 301 and 302 of the processing conditions, the X-axis direction feed width 303, and the flat dress. The dress start position 401 and the dress end position 402 are calculated with reference to the number of movements of the cutting blade 21 with respect to the dress board 90 and the depth of cut 304.

In the first embodiment, in the dress range setting step ST5, the dress range setting unit 102 is located at a position closer to the other end 94 of the dress board 90 from one end 93 in the X-axis direction to the margin width 301 minutes in the X-axis direction. The position outside the dress board 90 from one end 91 in the axial direction to the margin width 302 minutes in the Y-axis direction is calculated as the first dress start position 401. In the first embodiment, in the dress range setting step ST5, the dress range setting unit 102 is located at a position closer to the other end 94 of the dress board 90 from one end 93 in the X-axis direction to the margin width 301 minutes in the X-axis direction. The position outside the dress board 90 from the other end 92 in the axial direction to the margin width 302 minutes in the Y-axis direction is calculated as the first dress end position 402. The dress range setting step ST5 proceeds to the positioning step ST6 after calculating the dress start position 401 and the dress end position 402.

(Positioning step)
FIG. 10 is a side view showing a partial cross section of the cutting unit and the dress board in the positioning step of the dressing method shown in FIG. 7. FIG. 11 is a plan view of the cutting unit and the dress board shown in FIG.

In the positioning step ST6, the direction from one end 91 to the other end 92 of the dressboard 90 is positioned parallel to the axial center of the spindle 22, that is, the Y-axis direction, based on the position of the outer peripheral edge of the dressboard 90 stored in the storage device. Based on the position of the outer peripheral edge of the dress board 90 detected in the position detection step ST4, the lower end of the cutting blade 24 of the cutting blade 21 is cut into the dress board 90 at a depth of cut 304 outside one end 91 of the dress board 90. It is a step to position.

In the positioning step ST6, the control unit 103 of the control unit 100 controls the rotational movement unit 44 so that the direction from one end 91 to the other end 92 of the dressboard 90 is parallel to the Y-axis direction. Adjust the direction of the heart circumference. In the positioning step ST6, the control unit 103 of the control unit 100 controls the moving units 41, 42, and 43, and the cutting blade 21 of the cutting unit 20 is placed at the first dress start position 401 calculated in the dress range setting step ST5. Position the lower end of the cutting edge 24 and proceed to dress step ST7.

(Dress step)
FIG. 12 is a side view showing a cutting unit and a dress board of the dress step of the dress method shown in FIG. 7 in a partial cross section. FIG. 13 is a plan view of the cutting unit and the dress board shown in FIG. FIG. 14 is a plan view of the dress board after the dress step of the dress method shown in FIG.

In the dress step ST7, after performing the positioning step ST6, the cutting blade 21 is moved relative to the dress board 90 to cut from one end 91 to the other end 92 of the dress board 90, whereby the cutting blade 24 of the cutting blade 21 is cut. It is a step to flatten the tip of the. In the dress step ST7, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from one end 91 to the other end 92 of the dress board 90 in the Y-axis direction, and FIG. And as shown in FIG. 13, the cutting blade 24 of the cutting blade 21 is cut into the dress board 90 to form the cutting groove 95. In the dress step ST7, the control unit 103 of the control unit 100 controls the X-axis moving unit 41 and the Y-axis moving unit 42 to stop the movement of the cutting blade 21 in the Y-axis direction at the dress end position 402, and then X. With an axial feed width of 303 minutes, the cutting blade 21 is moved to the other end 94 side in the X-axis direction and positioned at the next dress start position 401.

In the dress step ST7, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from the other end 92 of the dress board 90 toward one end 91 in the Y-axis direction to dress the dress board. The cutting blade 24 of the cutting blade 21 is cut into 90 to form a cutting groove 95. In the first embodiment, in the dress step ST7, the control unit 103 of the control unit 100 moves the cutting blade 21 with respect to the dress board 90 during flat dressing under the machining conditions, moves the cutting blade 21 in the Y-axis direction, and cuts. The tip of the cutting edge 24 of the blade 21 is flattened. In the first embodiment, in the dress step ST7, as shown in FIG. 14, when two cutting grooves 95 are formed, the process proceeds to the cut area storage step ST8.

(Cutting area memory step)
The cut area storage step ST8 is a step in which the cut area storage unit 101 stores information about the cut area 601 of the dress board 90 cut by the flat dress in the dress step ST7. In the first embodiment, in the cut area storage step ST8, the cut area storage unit 101 moves the cutting blade 21 with respect to the dress board 90 in the dress step ST7 as information regarding the cut area 601 in the Y-axis direction. The cumulative number of movements is added to the number of movements already stored. In the cut area storage step ST8, the cut area storage unit 101 accumulates the number of times the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 during flat dressing as information regarding the cut area 601. When the above is stored, the process proceeds to step ST13.

Further, the control unit 103 of the control unit 100 stores information about the cut area 601 in the cut area storage unit 101, that is, moves as information about the cut area 601 stored in the cut area storage unit 101. If it is determined that the number of times is stored as one or more (step ST3: Yes), the process proceeds to the second dress range setting step ST9.

(2nd dress range setting step)
The second dress range setting step ST9 is a step of setting the dress start position 401 and the dress end position 402 of the flat dress when the cut region 601 or the cutting groove 95 is formed on the dress board 90.

In the second dress range setting step ST9, the dress range setting unit 102 of the control unit 100 moves the cutting blade 21 in the Y-axis direction with respect to the dress board 90 at the time of flat dress stored by the cut area storage unit 101. Cumulative number of movements, position of outer peripheral edge of dressboard 90 stored in storage device, margin widths 301 and 302 of machining conditions, feed width 303 in X-axis direction, number of movements of cutting blade 21 with respect to dressboard 90 during flat dressing And the dress start position 401 and the dress end position 402 are calculated with reference to the cut depth 304.

In the first embodiment, in the second dress range setting step ST9, the dress range setting unit 102 calculates and calculates the center position in the width direction of the cutting groove 95 recently formed in the dress step ST7 or the second dress step ST11. The dress board 90 has a margin width of 302 minutes in the Y-axis direction from one end 91 in the Y-axis direction of the dress board 90 at a position closer to the other end 94 of the feed width 303 minutes in the X-axis direction from the center position in the width direction of the recently formed cutting groove 95. The position outside the board 90 is calculated as the first dress start position 401. In the first embodiment, in the second dress range setting step ST9, the dress range setting unit 102 is closer to the other end 94 by 303 minutes in the X-axis direction feed width from the calculated center position in the width direction of the recently formed cutting groove 95. At the position, the position outside the dress board 90 from the other end 92 in the Y-axis direction to the margin width 302 minutes in the Y-axis direction is calculated as the first dress end position 402. The second dress range setting step ST9 proceeds to the second positioning step ST10 when the dress start position 401 and the dress end position 402 are calculated.

(Second positioning step)
FIG. 15 is a plan view of the cutting unit and the dress board in the second positioning step of the dressing method shown in FIG. In the second positioning step ST10, the dressboard 90 is held by the holding table 10, and the position of the outer peripheral edge of the dressboard 90 detected in the position detection step ST4 and the cutting of the dressboard 90 stored in the cut area storage step ST8. This is a step of positioning the lower end of the cutting edge 24 of the cutting blade 21 at a cutting depth 304, which is a predetermined height position for cutting into the dress board 90, outside the one end 91 of the dress board 90 based on the information regarding the finished area.

In the first embodiment, in the second positioning step ST10, the control unit 103 of the control unit 100 controls the transport unit to take out the dress board 90 from the cassette 51 and holds the dress board 90 via the adhesive tape 206. It is placed on the holding surface 11 of the. The control unit 103 of the control unit 100 controls the vacuum suction source and the like to suck and hold the dress board 90 on the holding surface 11 of the holding table 10 via the adhesive tape 206, and clamps the annular frame 205 by the clamping part 12. To do.

In the second positioning step ST10, the control unit 103 of the control unit 100 controls the rotational movement unit 44 based on the position of the outer peripheral edge of the dress board 90 stored in the storage device, and controls one end 91 to the other end of the dress board 90. The direction around the axis of the holding table 10 is adjusted so that the direction toward 92 is parallel to the Y-axis direction. In the second positioning step ST10, the control unit 103 of the control unit 100 controls the moving units 41, 42, and 43, and the cutting unit 20 is placed at the first dress start position 401 calculated in the second dress range setting step ST9. The lower end of the cutting blade 24 of the cutting blade 21 is positioned, and the process proceeds to the second dress step ST11.

(2nd dress step)
FIG. 16 is a plan view of the cutting unit and the dress board of the second dress step of the dress method shown in FIG. In the second dress step ST11, after performing the second positioning step ST10, the cutting blade 21 is moved relative to the dress board 90 to cut from one end 91 to the other end 92 of the dress board 90, thereby cutting the cutting blade 21. This is a step of flattening the tip of the cutting edge 24 of the above.

In the second dress step ST11, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from one end 91 to the other end 92 of the dress board 90 in the Y-axis direction. As shown in FIG. 16, a cutting groove 95 is formed in the dress board 90. In the second dress step ST11, the control unit 103 of the control unit 100 controls the X-axis moving unit 41 and the Y-axis moving unit 42 to stop the movement of the cutting blade 21 in the Y-axis direction at the dress end position 402. , The cutting blade 21 is moved to the other end 94 side in the X-axis direction by 303 minutes in the X-axis direction feed width, and is positioned at the next dress start position 401.

In the second dress step ST11, the control unit 103 of the control unit 100 controls the Y-axis moving unit 42 to move the cutting unit 20 from the other end 92 of the dress board 90 toward one end 91 in the Y-axis direction. The cutting blade 21 is cut into the dress board 90 to form a cutting groove 95. In the first embodiment, in the second dress step ST11, the control unit 103 of the control unit 100 moves the cutting blade 21 with respect to the dress board 90 during flat dressing under the machining conditions, and moves the cutting blade 21 in the Y-axis direction. , Flatten the tip of the cutting blade 24 of the cutting blade 21. In the first embodiment, in the second dress step ST11, when two cutting grooves 95 are formed, the process proceeds to the second cut area storage step ST12.

(Second cut area storage step)
The second cut area storage step ST12 is a step in which the cut area storage unit 101 stores information regarding the cut area 601 of the dress board 90 cut by the flat dress in the second dress step ST11. In the first embodiment, in the cut area storage step ST8, the cut area storage unit 101 moves the cutting blade 21 with respect to the dress board 90 in the second dress step ST11 as information regarding the cut area 601 in the Y-axis direction. The cumulative number of movements is added to the number of movements already stored. In the cut area storage step ST8, when the cut area storage unit 101 stores the information regarding the cut area 601, the process proceeds to step ST13.

In step ST13, the control unit 103 of the control unit 100 determines whether or not the cutting blade 21 can be flat dressed by using the dress board 90 held on the holding table 10. In the first embodiment, the control unit 103 of the control unit 100 calculates the central position in the width direction of the recently formed cutting groove 95 in the second dress step ST11, and calculates the width direction of the recently formed cutting groove 95. The position closer to the other end 94 for the X-axis direction feed width 303 minutes is calculated from the center position of. When the distance between the position near the other end 94 and the other end 94 by the X-axis direction feed width 303 minutes and the distance to the other end 94 is less than the X-axis direction margin width 301, the control unit 103 of the control unit 100 holds the dress board on the holding table 10. It is determined that flat dressing of the cutting blade 21 is impossible using the 90 (step ST13: No), and the notification unit 110 is operated to notify the operator (step ST14).

The control unit 103 of the control unit 100 returns to step ST1 when the distance between the position near the other end 94 by the X-axis direction feed width 303 minutes and the other end 94 is equal to or more than the X-axis direction margin width 301. Therefore, in the dressing method according to the first embodiment, in the second and subsequent processing steps ST2, at least one of the dressing step ST7 and the second dressing step ST11 is performed, and then the dressboard 90 is carried out from the holding table 10. The dress board 90 is housed in the cassette 51. Further, in the dressing method according to the first embodiment, in the second positioning step ST10, after the machining step ST2 is performed, the workpiece 200 is carried out from the holding table 10 and stored in the cassette 51, and the holding table 10 is used. Hold the dressboard 90.

As described above, the dressing method according to the first embodiment includes position detection step ST4, positioning step ST6, dressing step ST7, cut area storage step ST8, machining step ST2, and second positioning step ST10. A second dress step ST11 is provided.

As described above, in order to carry out the position detection step ST4 for detecting the position of the outer peripheral edge of the dress board 90, the dressing method and the cutting device 1 according to the first embodiment need to excessively set the margin width 302 in the Y-axis direction. It is possible to suppress the margin width 302 itself in the Y-axis direction. As a result, the dressing method and the cutting device 1 have an effect that the time required for the flat dress can be suppressed.

Further, the dressing method and the cutting device 1 according to the first embodiment store in the cut area storage unit 101 as information regarding the cut area 601 of the dress board 90 after the dress steps ST7 and ST11. As a result, the dressing method and the cutting device 1 can perform flat dressing while avoiding the cut region 601.

Further, in the dressing method and the cutting device 1 according to the first embodiment, the number of times the cutting blade 21 is moved in the Y-axis direction with respect to the dress board 90 at the time of flat dressing as information regarding the cut area 601 of the dress board 90. Is stored in the cut area storage unit 101. As a result, the dressing method and the cutting device 1 can reliably avoid the cut region 601 to perform flat dressing.

The present invention is not limited to the above embodiment. That is, it can be modified in various ways without departing from the gist of the present invention.

1 Cutting device 10 Holding table 21 Cutting blade 22 Spindle 30 Imaging unit (imaging means)
90 Dressboard 91 One end 92 The other end 200 Work piece 304 Cutting depth (predetermined height position)
601 Machined area ST2 Machining step ST4 Position detection step ST6 Positioning step ST7 Dress step ST8 Machined area storage step ST10 Second positioning step ST11 Second dress step

Claims (2)

A flat dressing method for cutting blades fixed to the tip of a spindle.
A position detection step in which the dress board held on the holding table is imaged by an imaging means and the position of the outer peripheral edge of the dress board is detected.
The direction from one end to the other end of the dress board is positioned parallel to the axis of the spindle, and the outside of one end of the dress board is based on the position of the outer peripheral edge of the dress board detected in the position detection step. Then, the positioning step of positioning the lower end of the cutting blade at a predetermined height position to be cut into the dress board, and
After performing the positioning step, a dress step in which the tip of the cutting blade is flattened by moving the cutting blade relative to the dress board and cutting from one end to the other end of the dress board. Dress method with. A cut area storage step for storing information about the cut area of the dress board cut in the dress step, and a cut area storage step.
After performing the dress step, the dress board is carried out from the holding table, the work piece is held by the holding table, and the work piece on the holding table is cut by the cutting blade.
After performing the processing step, the workpiece is carried out from the holding table, the dressboard is held by the holding table, and the position of the outer peripheral edge of the dressboard detected in the position detection step and the cutting are performed. Second positioning that positions the lower end of the cutting blade at a predetermined height position to cut into the dressboard, outside one end of the dressboard, based on the information about the cut area of the dressboard stored in the finished area storage step. Steps and
The first aspect of the present invention includes a second dress step in which the cutting blade is moved relative to the dress board to cut from one end to the other end of the dress board after performing the second positioning step. The dress method described.

Images