JP2013217786A5 - - Google Patents
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- Publication number
- JP2013217786A5 JP2013217786A5 JP2012089060A JP2012089060A JP2013217786A5 JP 2013217786 A5 JP2013217786 A5 JP 2013217786A5 JP 2012089060 A JP2012089060 A JP 2012089060A JP 2012089060 A JP2012089060 A JP 2012089060A JP 2013217786 A5 JP2013217786 A5 JP 2013217786A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support member
- electromagnetic wave
- wave detection
- thermal electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012089060A JP2013217786A (ja) | 2012-04-10 | 2012-04-10 | 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012089060A JP2013217786A (ja) | 2012-04-10 | 2012-04-10 | 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013217786A JP2013217786A (ja) | 2013-10-24 |
| JP2013217786A5 true JP2013217786A5 (https=) | 2015-05-07 |
Family
ID=49590043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012089060A Withdrawn JP2013217786A (ja) | 2012-04-10 | 2012-04-10 | 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013217786A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016149443A (ja) * | 2015-02-12 | 2016-08-18 | 株式会社日立製作所 | 放射線検出素子、放射線検出器および核医学診断装置ならびに放射線検出素子の製造方法 |
| JP7718914B2 (ja) * | 2021-08-30 | 2025-08-05 | Tdk株式会社 | 構造体及び電磁波センサ |
| CN116380994B (zh) * | 2023-02-23 | 2025-08-19 | 艾感科技(广东)有限公司 | 一种基于单通多孔基底的半导体气体传感器 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63223531A (ja) * | 1987-03-13 | 1988-09-19 | Taiyo Yuden Co Ltd | 赤外線検出器 |
| FR2877492B1 (fr) * | 2004-10-28 | 2006-12-08 | Commissariat Energie Atomique | Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique |
| JPWO2007129547A1 (ja) * | 2006-05-10 | 2009-09-17 | 株式会社村田製作所 | 赤外線センサおよびその製造方法 |
| JP4800883B2 (ja) * | 2006-09-06 | 2011-10-26 | 日置電機株式会社 | 赤外線センサの製造方法 |
-
2012
- 2012-04-10 JP JP2012089060A patent/JP2013217786A/ja not_active Withdrawn
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