JP2013217427A - Base isolation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a base isolation device capable of excellently performing base isolation, in response to input of different vibrational energy corresponding to an earthquake characteristic and an installation environment with every area supposed to be input to a base isolation object.SOLUTION: A base isolation device 1 includes a first stand 10 for installing a base isolation object W, a second stand 20 for slidably supporting the first stand 10 in the horizontal direction, and a sliding support member 30 installed in the first stand 10 and slidably contacting with the second stand 20, and includes an biasing means for making biasing force act in the direction against a load of the base isolation object W. The biasing means has a damper mechanism of air P (fluid) sealed in a space 5 between the first stand 10 and the second stand 20, and an air pump 40 for adjusting atmospheric pressure of the air P, and includes a mechanism for adjusting biasing force by adjusting the atmospheric pressure of the air P in response to input vibrational energy.

Description

  This invention relates to a seismic isolation device.

  Conventionally, various seismic isolation devices for protecting buildings and devices from vibrations such as earthquakes have been proposed. As one of them, a friction type seismic isolation device is known (for example, see Patent Document 1). ).

The friction-type seismic isolation device described in Patent Document 1 provides a horizontal gap between a vibration isolating material and a sliding pad that are sequentially stacked in the vertical direction with respect to the seismic isolation object, and at least the sliding pad. A horizontal excessive displacement prevention member attached to the seismic isolation object so as to surround the vibration isolator and the sliding pad is provided.
This friction-type seismic isolation device has a structure in which a sliding pad is attached to a floor frame subject to seismic isolation via a vibration isolator, and is installed on a sliding plate fixed to the base foundation. ing.

  According to the structure described in Patent Document 1, slip is generated between the sliding pad and the sliding plate with respect to vibration of relatively large acceleration, and the vibration is attenuated by the frictional force between the sliding pad and the sliding plate, so that seismic isolation is achieved. It is said that the response acceleration on the floor is almost flat and the seismic isolation effect is obtained. Further, since the sliding pad is attached to the floor frame via the vibration isolating material, it is said that the vibration isolating effect can be exhibited even for minute vibrations.

Japanese Patent Laid-Open No. 11-324401

However, the above friction type seismic isolation device has the following problems.
The vibration energy input to the seismic isolation device has different characteristics depending on the seismic characteristics, size, environment, etc. of each region where the seismic isolation object is installed, whereas the conventional friction type In the seismic device, the frictional force between the sliding pad and the sliding plate is set to be constant.
Therefore, for example, when the frictional force of the seismic isolation device is set for the purpose of seismic isolation for medium-scale earthquakes (Meteorological Agency seismic intensity seismic intensity 4-5 weakness), large-scale earthquakes (Meteorological Agency seismic intensity seismic intensity 5 to 7 or higher) ) Is input, the frictional force between the sliding pad and the sliding plate is insufficient. For this reason, the input vibration energy cannot be sufficiently attenuated, and the vibration amplitude cannot be sufficiently suppressed.
In other words, the friction type seismic isolation device of the prior art cannot set the friction force appropriately in response to the input of vibration energy according to the earthquake characteristics and installation environment for each region, which is different from the vibration energy set at the design stage. Therefore, a good seismic isolation effect may not be obtained.

  Therefore, the present invention aims to provide a seismic isolation device that can perform seismic isolation satisfactorily in response to the input of different vibration energy depending on the seismic characteristics and installation environment of each region that is assumed to be input to the seismic isolation object. And

  In order to solve the above-described problems, the seismic isolation device of the present invention includes a first gantry to which a seismic seismic object is attached, and a first gantry that is disposed so as to overlap with the first gantry in a gravitational direction. A second frame that is slidably supported along the direction, and is attached to one of the first frame and the second frame, and supports the seismic isolation object via the first frame; A seismic isolation device comprising a sliding support member that is in sliding contact with the other gantry, provided between the first gantry and the second gantry, and biasing force in a direction against a load of the seismic isolation object And an urging means capable of adjusting the urging force in accordance with the seismic characteristics of each region assumed to be input to the seismic isolation object and the vibration energy according to the installation environment. The force means is the first frame and the second frame A fluid damper mechanism that is sealed in a space between the first frame and the second frame by a seal member interposed between the first frame and the second frame; and a pump that fills the fluid with a necessary pressure. A mechanism for adjusting the urging force by adjusting the pressure is provided.

According to the present invention, the load of the seismic isolation object is obtained by the fluid damper mechanism sealed in the space provided between the first frame and the second frame, and the pump that fills the fluid with the necessary pressure. Since the urging means for applying the urging force in the resisting direction is provided, the seismic isolation object can be supported while the load of the seismic isolation object is shared by the sliding support member and the urging means. In addition, the biasing force of the biasing means can be adjusted by adjusting the fluid pressure in response to the seismic characteristics of each region assumed to be input to the seismic isolation object and the vibration energy according to the installation environment. The load sharing ratio of the seismic isolation object by the sliding support member and the biasing means can be adjusted. Therefore, the friction between the sliding support member and the frame that is in sliding contact with the sliding support member, corresponding to the earthquake characteristics and the vibration energy according to the installation environment for each region that is assumed to be input to the seismic isolation object. The magnitude of the force can be adjusted. As a result, the frictional force can be adjusted appropriately in response to the input of different vibration energy depending on the earthquake characteristics and installation environment of each region that is assumed to be input to the seismic isolation object. Can be seismically isolated.
The mechanism for adjusting the urging force of the urging means is composed of a fluid and a pump that fills the fluid with a necessary pressure. For example, a commercially available pump can be used to adjust the pressure simply. The biasing force can be adjusted with high accuracy. Therefore, it is possible to form a seismic isolation device that can perform seismic isolation well at low cost in response to the input of different vibration energy depending on the seismic characteristics and installation environment of each region that is assumed to be input to the seismic isolation object.

  The seal member is annularly disposed along the periphery of the first frame and the second frame between the first frame and the second frame, and a plurality of seal members are disposed inside the seal member. The sliding support member is arranged.

  According to the present invention, it is possible to form a seismic isolation device having a smaller outer shape than the case where the sliding support member is disposed outside the sealing member by arranging the sliding support member inside the sealing member. Moreover, since the several sliding support member is provided, a seismic isolation object can be supported stably.

The sliding support member can be formed of a material mainly composed of tetrafluoroethylene.
According to the present invention, a strong sliding support member having a stable coefficient of friction can be obtained. Therefore, it is possible to perform seismic isolation more satisfactorily in response to the input of different vibration energy according to the seismic characteristics of each region assumed to be input to the seismic isolation object and the installation environment.

Further, the other pedestal that is in sliding contact with the sliding support member is provided with a sliding contact layer on a sliding contact surface that is in sliding contact with the sliding support member.
According to the present invention, a more stable friction coefficient can be obtained between the sliding support member and the gantry by providing the sliding contact layer on the sliding contact surface of the gantry that is in sliding contact with the sliding support member. Therefore, it is possible to perform seismic isolation accurately and satisfactorily in response to the input of different vibration energy according to the seismic characteristics and the installation environment of each region assumed to be input to the seismic isolation object.

The sliding contact layer can be formed of stainless steel.
According to the present invention, since a sliding contact layer having excellent corrosion resistance and strength can be obtained, a seismic isolation device having excellent durability can be formed.

According to the present invention, the load of the seismic isolation object is obtained by the fluid damper mechanism sealed in the space provided between the first frame and the second frame, and the pump that fills the fluid with the necessary pressure. Since the urging means for applying the urging force in the resisting direction is provided, the seismic isolation object can be supported while the load of the seismic isolation object is shared by the sliding support member and the urging means. In addition, the biasing force of the biasing means can be adjusted by adjusting the fluid pressure in response to the seismic characteristics of each region assumed to be input to the seismic isolation object and the vibration energy according to the installation environment. The load sharing ratio of the seismic isolation object by the sliding support member and the biasing means can be adjusted. Therefore, the friction between the sliding support member and the frame that is in sliding contact with the sliding support member, corresponding to the earthquake characteristics and the vibration energy according to the installation environment for each region that is assumed to be input to the seismic isolation object. The magnitude of the force can be adjusted. As a result, the frictional force can be adjusted appropriately in response to the input of different vibration energy depending on the earthquake characteristics and installation environment of each region that is assumed to be input to the seismic isolation object. Can be seismically isolated.
The mechanism for adjusting the urging force of the urging means is composed of a fluid and a pump that fills the fluid with a necessary pressure. For example, a commercially available pump can be used to adjust the pressure simply. The biasing force can be adjusted with high accuracy. Therefore, it is possible to form a seismic isolation device that can perform seismic isolation well at low cost in response to the input of different vibration energy depending on the seismic characteristics and installation environment of each region that is assumed to be input to the seismic isolation object.

It is a perspective view of a seismic isolation apparatus. It is a top view of a seismic isolation apparatus. It is sectional drawing along the AA line of FIG. It is explanatory drawing of the modification of embodiment.

Below, the seismic isolation apparatus of embodiment is demonstrated based on drawing.
1 is a perspective view of the seismic isolation device 1, FIG. 2 is a plan view of the seismic isolation device 1, and FIG. 3 is a cross-sectional view taken along line AA in FIG. 2.
In each figure, for easy understanding, the seismic isolation object W is illustrated by a two-dot chain line as a substantially rectangular parallelepiped structure installed on the seismic isolation device 1. Further, in the following description, the upper side in the gravity direction is simply expressed as the upper side, and the lower side in the gravity direction is simply expressed as the lower side. In FIG. 3, the gap between the first frame 10 and the second frame 20 is exaggerated.

As shown in FIG. 1, the seismic isolation device 1 of the present embodiment is a device formed in a substantially plate shape having a predetermined thickness, and when installing the seismic isolation object W on the installation surface G, This is a so-called low floor seismic isolation device arranged between the seismic object W and the installation surface G.
The seismic isolation device 1 includes a first gantry 10 on which the seismic isolation object W is installed, and a second gantry 20 that is placed below the first gantry 10 and placed on the installation surface G. Yes. In addition, the seismic isolation object W of this embodiment is a semiconductor manufacturing apparatus, for example.
As shown in FIG. 2, the first gantry 10 is a substantially plate-like member having a predetermined thickness formed in a substantially square shape in plan view, and is formed of, for example, metal or the like. The outer shape of the first mount 10 is formed to be larger than the seismic isolation object W placed on the upper surface 11 in plan view. The upper surface 11 of the first gantry 10 is formed flat, and the seismic isolation object W is placed thereon.

A groove 13 extending in a substantially circular shape concentric with the center O of the first gantry 10 in plan view is formed on the lower surface 12 of the first gantry 10. The groove part 13 is formed inside the four sides so as to follow the peripheral part of the first mount 10. As shown in FIG. 3, the bottom of the groove 13 is formed in a substantially circular arc shape in cross section.
A substantially ring-shaped seal member 35 made of an elastic member such as rubber is disposed in the groove 13 portion of the lower surface 12 of the first mount 10. The seal member 35 is formed concentrically with the center O of the first gantry 10 and the center of the groove 13 in a plan view corresponding to the groove 13, and extends along the periphery of the first gantry 10. It is arranged inside 10 four sides. The seal member 35 is formed in a substantially circular shape in cross section.

The curvature radius of the upper end portion of the cross section of the seal member 35 is formed substantially the same as the curvature radius of the bottom portion of the groove portion 13. Accordingly, the seal member 35 is disposed in the groove portion 13 with the lower end portion of the cross section protruding below the groove portion 13 in a state where the upper end portion of the cross section of the seal member 35 and the bottom portion of the groove portion 13 are in close contact with each other. The seal member 35 is fixed to the groove portion 13 of the first mount 10 with, for example, an adhesive.
The lower end portion of the seal member 35 is in contact with the upper surface 21 of the second mount 20 to be described later over the entire circumferential direction of the seal member 35.
A gas is introduced into the first gantry 10 so as to penetrate the first gantry 10 in the thickness direction on the radially inner side of the circular groove 13 in a plan view and on the outer side of the seismic isolation object W to be placed. A hole 14 is formed. A distal end portion of a gas introduction pipe 42 extended from an air pump 40 described later is inserted into the gas introduction hole 14.

  A plurality of recesses 15 are formed on the lower surface 12 of the first mount 10. In the present embodiment, four recesses 15 are formed on the inner side in the radial direction from the groove 13 in a plan view and at positions corresponding to the corners of the seismic isolation object W. The recess 15 has a predetermined depth in the thickness direction of the first gantry 10 and is formed in a substantially circular shape in plan view.

As shown in FIG. 3, a sliding support member 30 is disposed in the recess 15 so that a part thereof protrudes from the recess 15.
The sliding support member 30 is a substantially cylindrical member having a predetermined height, and is formed of, for example, a resin material mainly composed of tetrafluoroethylene. Since tetrafluoroethylene has high strength, it is suitable as a material for forming the sliding support member 30.
The diameter of the sliding support member 30 is substantially the same as or slightly smaller than the diameter of the recess 15. The upper end surface 31 of the sliding support member 30 is disposed in a state of being inserted into the recess 15 and in contact with the bottom of the recess 15. The sliding support member 30 is formed by, for example, an adhesive or the like, or by forming a female screw portion in the recess 15 and forming a male screw portion on the outer periphery of the sliding support member 30, and screwing the sliding support member 30 into the recess 15. By doing so, it is fixed to the first frame 10.

A lower end surface 32 of the sliding support member 30 is formed flat and is in contact with a sliding contact layer 23 on the upper surface 21 of the second gantry 20 described later.
In the sliding support member 30, the separation distance between the lower end surface 32 of the sliding support member 30 and the lower surface 12 of the first gantry 10 is slightly smaller than the separation distance between the lower end portion of the seal member 35 and the lower surface 12 of the first gantry 10. It is formed to become. Thus, when the first frame 10 is placed on the second frame 20 with the lower end surface 32 of the sliding support member 30 in contact with the sliding contact layer 23 on the upper surface 21 of the second frame 20, the seal member 35 is slightly It collapses. Therefore, the lower end portion of the seal member 35 can abut against the sliding contact layer 23 on the upper surface 21 of the second mount 20 without any gap over the entire circumferential direction.
The sliding support member 30 is formed such that the distance between the lower end surface 32 of the sliding support member 30 and the lower surface 12 of the first mount 10 is about 10 mm, for example. Accordingly, a space 5 having a thickness of 10 mm is formed between the lower surface 12 of the first frame 10 and the sliding contact layer 23 on the upper surface 21 of the second frame 20 on the radially inner side of the seal member 35. . In addition, the separation distance of the lower end surface 32 of the sliding support member 30 and the lower surface 12 of the 1st mount frame 10 in this embodiment is an example, and is not limited to 10 mm.

  The lower end surface 32 of the sliding support member 30 has a sliding contact layer 23 on the upper surface 21 of the second gantry 20 when vibration energy such as seismic motion is input to the seismic isolation device 1 and the first gantry 10 slides in the horizontal direction. And slid. At this time, a predetermined frictional force is generated between the lower end surface 32 of the sliding support member 30 and the sliding contact layer 23 on the upper surface 21 of the second mount 20. The seismic isolation device 1 absorbs and attenuates the input vibration energy mainly by the frictional force between the lower end surface 32 of the sliding support member 30 and the sliding contact layer 23 on the upper surface 21 of the second mount 20. And the vibration amplitude is suppressed.

Below the first gantry 10, a second gantry 20 that supports the first gantry 10 is disposed in an overlapping manner via a sliding support member 30 and a seal member 35. The second gantry 20 is a substantially plate-like member having a predetermined thickness, which is formed in a substantially square shape like the first gantry 10 in a plan view, and is formed of, for example, metal. The lower surface 22 of the second mount 20 is formed flat and is placed on the installation surface G.
The second gantry 20 supports the first gantry 10 with the lower end surface 32 of the sliding support member 30 in contact with the sliding contact layer 23 on the upper surface 21 of the second gantry 20. The first gantry 10 supported by the second gantry 20 is a sliding support member against the sliding contact layer 23 on the upper surface 21 of the second gantry 20 when vibration energy such as earthquake motion is input to the seismic isolation device 1. In a state where the lower end surface 32 of 30 is brought into sliding contact with a predetermined frictional force, it can be slid along the horizontal direction. In other words, the second gantry 20 supports the first gantry 10 so as to be slidable along the horizontal direction. As described above, the sliding support member 30 is formed of a resin material mainly composed of tetrafluoroethylene. Therefore, a stable friction coefficient is obtained between the sliding contact layer 23 on the upper surface 21 of the second gantry 20 and the lower end surface 32 of the sliding support member 30.

The outer shape of the second gantry 20 is formed to be larger than the first gantry 10 in plan view.
Specifically, one side surface of the second gantry 20 is such that the horizontal separation distance from the corresponding one side surface of the first gantry 10 is sufficiently larger than the sliding movement amount of the first gantry 10 in the horizontal direction. The first gantry 10 is formed outside one side surface. Thereby, even when the vibration energy is input and the first gantry 10 slides in the horizontal direction, the seal member 35 can be prevented from jumping out from the four sides of the second gantry 20. Although not shown in each drawing, it is preferable that a stopper is provided on the peripheral edge of the second gantry 20 so that the first gantry 10 does not protrude outward from the upper surface 21 of the second gantry 20.

A sliding contact layer 23 having a predetermined thickness is provided on the upper surface 21 of the second mount 20. The sliding contact layer 23 is a thin plate member made of, for example, stainless steel and has a flat surface, and is fixed to the upper surface 21 of the second gantry 20 with, for example, an adhesive so as to cover the entire upper surface 21 of the second gantry 20. . The sliding contact layer 23 is formed flat, and the lower end surface 32 of the sliding support member 30 and the lower end portion of the seal member 35 are in contact with each other. The sliding contact layer 23 becomes a sliding contact surface that comes into sliding contact with the lower end surface 32 of the sliding support member 30 when vibration energy such as seismic motion is input to the seismic isolation device 1 and the first mount 10 slides in the horizontal direction. ing.
By forming the sliding contact layer 23 of stainless steel, the sliding contact layer 23 having excellent corrosion resistance and strength can be obtained. Further, the sliding support member 30 is made of tetrafluoroethylene, and the lower end surface 32 of the sliding support member 30 is formed smoothly. Therefore, a stable friction coefficient (that is, friction force) can be obtained between the sliding contact layer 23 made of stainless steel and the sliding support member 30.

(Biasing means)
Between the first gantry 10 and the second gantry 20, an urging means for urging the first gantry 10 and the seismic isolation object W is provided upward so as to resist the load of the seismic isolation object W. ing. The urging means of the present embodiment is the air P sealed in the space 5 provided between the first frame 10 and the second frame 20 on the radially inner side of the seal member 35 (the “fluid” in the claims). Equivalent).) And an air pump 40 (corresponding to “pump” in the claims) for filling the air P with a necessary pressure.

A gas (fluid) introduction pipe 42 extending from the air pump 40 is inserted into the gas introduction hole 14 communicating with the inside and outside of the space 5. The air pump 40 is always operated, for example, and is adjusted so that the air pressure in the space 5 becomes a predetermined pressure by adjusting the amount of air supplied from the air pump 40. Thereby, the first gantry 10 is urged upward by a predetermined urging force by the air pressure in the space 5. That is, the air P having a predetermined pressure sealed in the space 5 constitutes a damper mechanism of the first mount 10. Therefore, the load F of the seismic isolation object W is supported by the sliding support member 30 at a predetermined load ratio α, and is supported at a predetermined load ratio β by the air P that is an urging means.
The load ratio α of the load F of the seismic isolation object W by the sliding support member 30 and the load ratio β of the load F of the seismic isolation object W by the air P can be changed by adjusting the air pressure of the air P by the air pump 40. Is possible. Thus, a mechanism for adjusting the urging force is constituted by the air P filled in the space 5 and the air pump 40, and the load ratio α of the load F of the seismic isolation object W by the sliding support member 30 and the air P The load ratio β of the load F of the seismic isolation object W is changed.

By the way, the load ratio α of the load F of the seismic isolation object W by the sliding support member 30, and the load ratio β of the load F of the seismic isolation object W by the air P are as follows:
F = α · F + β · F (1)
Satisfied with the relationship.
Further, when vibration energy such as seismic motion is input to the seismic isolation device 1, the horizontal force when the first gantry 10 slides in the horizontal direction is Fs, and the sliding contact layer 23 of the second gantry 20 and the sliding support member 30 When the friction coefficient between the lower end surface 32 is μ1 and the friction coefficient between the air P and the lower surface 12 of the first gantry 10 is μ2, the horizontal force Fs of the first gantry 10 and the sliding of the second gantry 20 The friction coefficient μ1 between the contact layer 23 and the lower end surface 32 of the sliding support member 30 and the friction coefficient μ2 between the air P and the lower surface 12 of the first mount 10 are:
Fs = μ1, α, F + μ2, β, F = μ3, F (2)
Satisfied with the relationship. Note that the coefficient of friction μ2 between the air P and the lower surface 12 of the first gantry 10 is a very small value, which is as close to zero as possible. The friction coefficient μ3 corresponds to a friction coefficient that determines the horizontal force Fs of the first gantry 10 (hereinafter simply referred to as “the friction coefficient μ3 of the first gantry 10”).

Here, the friction coefficient μ3 of the first gantry 10 is
μ3 = μ1 ・ α + μ2 ・ β (3)
Satisfied with the relationship.
That is, the friction coefficient μ3 of the first gantry 10 is determined by the load ratio α of the load F of the seismic isolation object W by the sliding support member 30 and the load ratio β of the load F of the seismic isolation object W by the air P. . Therefore, the friction coefficient μ3 of the first gantry 10 is adjusted by adjusting the air pressure of the air P by the air pump 40, the load ratio α of the load F of the seismic isolation object W by the sliding support member 30, and the seismic isolation object W by the air P. The load F can be changed by adjusting the load ratio β.

(Adjustment of seismic isolation device bias)
Subsequently, the adjustment of the urging force of the seismic isolation device 1 and the seismic isolation effect will be described with specific examples.
In order to quickly attenuate the vibration energy when the characteristics of ground motion in the area where the seismic isolation object W is installed, for example, when a relatively large acceleration is generated, such as irregularly changing from regular sine wave vibration In addition, it is desirable to increase the friction coefficient μ3 of the first mount 10.
In this case, the air pump 40 adjusts the air pressure of the air P to be low to increase the load ratio α of the load F of the seismic isolation object W by the sliding support member 30 and the load of the seismic isolation object W by the air P. Reduce the burden ratio β of F.
Here, as described above, the coefficient of friction μ2 between the air P and the first mount 10 is a very small value. Therefore, the friction coefficient μ3 of the first gantry 10 can be increased by increasing the burden ratio α by the sliding support member 30 and decreasing the burden ratio β by the air P according to the expression (3). Therefore, the seismic isolation device 1 attenuates the vibration energy by the frictional force in response to the input of vibration energy having a relatively large acceleration by adjusting the air pressure of the air P to be low and reducing the biasing force. Good seismic isolation.

On the other hand, when the characteristics of the ground motion in the area where the seismic isolation object W is installed generates a relatively small acceleration such as regular sinusoidal vibration, for example, mainly to suppress the vibration amplitude. In addition, it is desirable to reduce the friction coefficient μ3 of the first mount 10.
In this case, the air pump 40 adjusts the air pressure of the air P to be high so that the load ratio α of the load F of the seismic isolation object W by the sliding support member 30 is reduced, and the seismic isolation object W by the air P is reduced. The burden ratio β of the load F is increased.
Here, as described above, the friction coefficient μ2 between the air P and the first mount 10 is a very small value. Therefore, the friction coefficient μ3 can be significantly reduced by reducing the burden ratio α by the sliding support member 30 and increasing the burden ratio β by the air P by the expression (3). Accordingly, the seismic isolation device 1 can satisfactorily isolate the vibration by suppressing the vibration amplitude in response to the input of vibration energy having a relatively small acceleration.

(effect)
According to the present invention, the damper mechanism of the air P sealed in the space 5 provided between the first gantry 10 and the second gantry 20 and the air pump 40 that fills the air P with the necessary pressure are used. Since there is a biasing means that applies a biasing force in the direction against the load of the seismic object W, the load F of the seismic isolation object W is shared by the sliding support member 30 and the air P, and the seismic isolation target The object W can be supported. Also, the urging force of the urging means is adjusted by adjusting the pressure of the air P in accordance with the seismic characteristics of each region assumed to be input to the seismic isolation object W and the vibration energy according to the installation environment. Since it can do, the burden ratio of the load F of the seismic isolation object W by the sliding support member 30 and the air P can be adjusted. Therefore, the sliding support member 30 and the second frame that is in sliding contact with the sliding support member 30 in response to the seismic characteristics of each region assumed to be input to the seismic isolation object W and the vibration energy according to the installation environment. The magnitude of the frictional force between 20 and 20 can be adjusted. As a result, the frictional force can be appropriately adjusted in accordance with the input of different vibration energy according to the earthquake characteristics and installation environment of each region assumed to be input to the seismic isolation object W. It can be seismically isolated in response to input.
Further, the mechanism for adjusting the urging force of the urging means is constituted by the air P that is a fluid and the air pump 40 that fills the air P with a necessary pressure. The biasing force can be easily and accurately adjusted only by adjusting the pressure of P. Therefore, the seismic isolation device 1 that can perform seismic isolation well at low cost in response to the input of different vibration energy according to the seismic characteristics and installation environment of each region that is assumed to be input to the seismic isolation object W. it can.

(Modification of the embodiment)
FIG. 4 is an explanatory diagram of a modification of the embodiment.
In the embodiment, as shown in FIG. 1, one seismic isolation device 1 is installed for one seismic isolation object W. On the other hand, in the modification of the embodiment, as shown in FIG. 4, the embodiment is different from the embodiment in that a plurality of seismic isolation devices 1 are installed for one seismic isolation object W. It has become. Moreover, although the seismic isolation object W in embodiment was apparatuses, such as a semiconductor manufacturing apparatus, the seismic isolation object W in the modified example of embodiment is structures, such as a house and a building, for example. This is different from the embodiment. Note that a detailed description of the same configuration as the embodiment is omitted.
As shown in FIG. 4, between the seismic isolation object W and the installation surface G, four seismic isolation devices 1 (FIG. 4 is a side view and only two seismic isolation devices 1 are shown) are arranged. Has been. The four seismic isolation devices 1 are provided at positions corresponding to the corners of the seismic isolation object W that is a building such as a house or a building formed in a substantially rectangular parallelepiped shape.
If the outer shape is larger than that of the seismic isolation device 1, such as when the seismic isolation target W is a building, as in the modification of the present embodiment, a plurality of seismic isolation targets W The seismic isolation device 1 may be installed. Thereby, even if the seismic isolation object W is a building or the like, the same effects as in the embodiment, that is, different vibrations depending on the earthquake characteristics and installation environment for each region assumed to be input to the seismic isolation object The effect of seismic isolation can be obtained in response to energy input. In the modification of the embodiment, the number of the seismic isolation devices 1 is not limited to four for one seismic isolation object W, and may be three or more than five. Also good.

The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
Although the seismic isolation device 1 of the embodiment includes the four sliding support members 30, the number of the sliding support members 30 is not limited to the number of the embodiments. For example, three sliding support members 30 may be provided, or five or more sliding support members 30 may be provided. The sliding support member 30 and the seal member 35 are attached to the first frame 10 side. However, for example, it may be attached to the second frame 20 side.

  The seismic isolation device 1 of the embodiment attenuates vibration energy mainly by the frictional force between the sliding support member 30 and the second mount 20. On the other hand, for example, an oil damper or the like is provided as a damping means between the first frame 10 and the second frame 20, and the vibration energy is attenuated in combination with the frictional force between the sliding support member 30 and the second frame 20. May be.

  In the seismic isolation device 1 of the embodiment, the biasing means that applies the biasing force in the direction against the load of the seismic isolation object W is provided in the space 5 provided between the first mount 10 and the second mount 20. It was comprised by the sealed air P and the air pump 40 for adjusting the atmospheric pressure of the air P. On the other hand, for example, the urging means includes an oil sealed in a space 5 provided between the first frame 10 and the second frame 20 and an oil pump for adjusting the pressure of the oil. It may be configured. Moreover, what is sealed in the space 5 is not limited to a gas such as air P or a liquid such as oil, but may be a fluid.

  The seismic isolation device 1 of the embodiment includes one air pump 40 for filling and adjusting the pressure of the air P, but the number of the air pumps 40 is not limited to one. Further, for example, a check valve may be provided in the middle of the gas introduction pipe 42, and the air pressure in the space 5 may be adjusted by the air pump 40 and then maintained at a constant pressure.

  In the embodiment, the sliding support member 30 is formed of a resin material whose main component is ethylene tetrafluoride, but the material forming the sliding support member 30 is a resin material whose main component is ethylene tetrafluoride. There is no limit. For example, the sliding support member 30 may be formed of a metal such as iron.

  In the embodiment, the sliding contact layer 23 made of stainless steel is formed on the sliding contact surface of the second gantry 20, but the material forming the sliding contact layer 23 is not limited to stainless steel. For example, the sliding contact layer 23 may be formed of a metal such as iron or a resin material. However, this embodiment is superior in that the sliding contact layer 23 excellent in corrosion resistance and strength can be obtained and the seismic isolation device 1 excellent in durability can be formed.

  In the embodiment, the case has been described in which the air pressure of the air P, which is the urging means, is set in advance in consideration of the characteristics of local earthquake motion and the like. However, for example, the seismic isolation device 1 may be configured to use an acceleration sensor or the like to feed back the acceleration of vibration during vibration and to appropriately control the air pressure of the air P during vibration to isolate the vibration. Good.

DESCRIPTION OF SYMBOLS 1 ... Seismic isolation device 10 ... 1st stand 20 ... 2nd stand 23 ... Sliding contact layer 30 ... Sliding support member 35 ... Seal member 40 ... Air pump (pump, attached) W ... Seismic isolation object P ... Air (fluid, biasing means)

Claims (5)

A first stand to which the seismic isolation object is attached;
A second pedestal that is arranged to be overlapped below the first gantry in the gravitational direction and supports the first slidably along the horizontal direction;
A sliding support member attached to one of the first frame and the second frame, supporting the seismic isolation object via the first frame, and slidingly contacting the other frame;
A seismic isolation device comprising:
It is provided between the first gantry and the second gantry and applies a biasing force in a direction against the load of the seismic isolation object, and for each region assumed to be input to the seismic isolation object. Corresponding to the vibration energy according to the earthquake characteristics and installation environment, provided with an urging means that can adjust the urging force,
The biasing means includes a fluid damper mechanism sealed in a space between the first frame and the second frame by a seal member interposed between the first frame and the second frame; And a pump for filling the fluid with a necessary pressure, and a mechanism for adjusting the biasing force by adjusting the pressure of the fluid. The seismic isolation device according to claim 1,
The seal member is annularly disposed along the periphery of the first frame and the second frame between the first frame and the second frame,
A seismic isolation device, wherein a plurality of the sliding support members are arranged inside the seal member. The seismic isolation device according to claim 1 or 2,
The seismic isolation device, wherein the sliding support member is made of a material mainly composed of tetrafluoroethylene. The seismic isolation device according to any one of claims 1 to 3,
The seismic isolation device according to claim 1, wherein a sliding contact layer is provided on a sliding contact surface in sliding contact with the sliding support member, on the other slidable contact with the sliding support member. The seismic isolation device according to claim 4,
The seismic isolation device, wherein the sliding contact layer is made of stainless steel.

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