JP2013210432A - Workpiece holding device of carrying arm, workpiece fixing device of work stage, work installation device, and projection exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry a curling or warping workpiece in a state of having a clean surface while maintaining its flatness and to fix the workpiece to a work stage while securing the flatness.SOLUTION: A work piece W being apt to deform is clamped by a workpiece holding device 100 and is carried to an installation base 210 of a workpiece fixing device 200. The workpiece holding device 100 clamps two edge parts in a breadthwise direction of the workpiece W by an upper clamp part 140 and a lower clamp part 146 to carry the workpiece. The upper clamp part 140 includes upper rods 142 arranged at a fixed interval. The installation base 210 of the workpiece fixing device 200 is provided with a breadthwise-direction clamp part 220 and a longitudinal-direction clamp part 230 which clamp four edges of the workpiece W. The upper clamp part 140 and the longitudinal-direction clamp part 230 are configured so as not to interfere with each other when the workpiece holding device 100 is taken into and out from the workpiece fixing device 200.

Description

  The present invention relates to a workpiece holding device for a transfer arm, a workpiece fixing device for a workpiece stage, a workpiece setting device, and a projection exposure apparatus.

  In the projection exposure apparatus, a work such as a printed circuit board is carried into an exposure stage (work stage), and a pattern formed on a mask is exposed to the conveyed work (see Patent Document 1).

  Here, since the printed circuit board is formed of a flexible material, it may have a wrinkle or warp. As a workpiece transfer device that transfers such a workpiece to the projection exposure apparatus, there is one that includes a suction pad that sucks the upper surface of the workpiece on the transfer arm (see Patent Document 2). According to this work conveyance device, it is possible to reliably convey a workpiece that has been wrinkled or warped.

See JP 2011-248260 A See JP 2010-76929 A

  By the way, in order to maintain the flatness of the work on the exposure stage, the work is attracted to the exposure stage to maintain the flatness. The flatness of the workpiece is preferably conveyed while maintaining a high flatness from the time of conveyance.

  Further, a photosensitive agent is applied to the surface of the workpiece, and it is desirable to keep it as clean as possible. For this reason, it is not desirable to bring a member such as a suction pad into contact with the surface of the workpiece.

  The present invention has been made in view of the above-described problems, and conveys workpieces with wrinkles or warpage while keeping the flatness as clean as possible, and further ensuring flatness. It is an object of the present invention to provide a work holding device for a transfer arm that can be fixed to a work stage, a work fixing device for a work stage, a work setting device, and a projection exposure apparatus.

The invention according to claim 1, which solves the above-mentioned problem, is a work holding device for a transfer arm that holds and conveys a quadrangular work in a detachable manner, and includes two frames arranged so as to sandwich the work. An upper clamp portion and a lower clamp portion that are provided so as to extend inward from the member and the two frame members, and hold the workpiece by sandwiching two opposite edge portions of the workpiece from above and below, respectively. At least one of the upper clamp portion and the lower clamp portion is configured by connecting a plurality of rods and connecting bases, and the tips of the plurality of rods contact the workpiece. And a holding member that is driven to a clamping position that holds the workpiece on the frame member and an unclamping position that is separated from the workpiece. Beam which is the workpiece holding device.
ADVANTAGE OF THE INVENTION According to this invention, the workpiece | work which wrinkled or warped can be conveyed maintaining flatness, without making a member contact a surface.

Similarly, the invention according to claim 2 is the workpiece holding device for a transfer arm according to claim 1, further comprising a driving means for driving the holding member between the clamp position and the unclamp position. And
According to the present invention, both ends of the workpiece can be clamped by the holding member, and the workpiece can be conveyed while maintaining the flatness of the workpiece.

Similarly, the invention described in claim 3 is a work stage fixing device for fixing a conveyed quadrangular workpiece to a work stage, wherein an installation table for supporting the lower surface of the workpiece and four edges of the arranged workpiece are provided. A clamp that is installed along at least two opposing edges, and includes a plurality of rods spaced apart and connected to a base, and the tip of the rod contacts the workpiece and clamps the workpiece A workpiece fixing device for a workpiece stage, comprising: a fixing member that is driven to a position and an unclamping position separated from the workpiece.
According to the present invention, the conveyed workpiece can be fixed to the workpiece stage while ensuring its flatness.

Similarly, the invention according to claim 4 is the work fixing device for the work stage according to claim 3, further comprising a driving means for driving the fixing member between a clamp position and an unclamp position. Features.
According to the present invention, both ends of a workpiece can be clamped by a fixing member, and the workpiece can be fixed to the workpiece stage while maintaining the flatness of the workpiece.

Similarly, the invention according to claim 5 includes the work holding device for the transfer arm according to claim 1 or 2, and the work fixing device for the work stage according to claim 3 or 4, wherein the transfer is performed. A workpiece holding device for the workpiece holding device of the transfer arm above the installation table of the workpiece fixing device for the workpiece stage with the workpiece holding device for the arm and the workpiece fixing device for the workpiece stage in the unclamping position. And a workpiece fixing device of the work stage can be inserted so as to be arranged in the same direction, the contact position of the holding member of the workpiece holding device of the transfer arm to the workpiece, and the workpiece fixing device of the work stage The fixing member is configured so that the holding member and the fixing member do not interfere with each other as a position different from the contact position of the fixing member with the work, and the conveyance The workpiece holding device of the workpiece and the workpiece fixing device of the workpiece stage can be moved relative to each other in the vertical direction, and the workpiece fixing device of the workpiece stage having the pressing member as the unclamping position is clamped to the fixing member. The workpiece setting device is configured to be extracted from the workpiece fixing device of the workpiece stage.
According to the present invention, a work with wrinkles or warping can be transported while maintaining flatness without bringing a member into contact with the surface, and further, flatness can be secured and fixed to the work stage.

Similarly, the invention according to claim 6 is the workpiece installation device according to claim 5, wherein the pressing member of the workpiece stage fixing device is set to the unclamping position, and the workpiece holding device of the transfer arm that holds the workpiece is the workpiece. The workpiece holding device of the stage is inserted above the mounting table, the holding member of the workpiece holding device of the transfer arm is set to the unclamp position, the workpiece fixing device of the workpiece stage is fixed, and the workpiece holding device of the transfer arm and the Control means for driving to move the workpiece holding device of the transfer arm from the workpiece holding device of the transfer arm so as to move relative to the workpiece fixing device of the workpiece stage in the vertical direction is provided.
According to the present invention, a work with wrinkles or warping can be transported while maintaining flatness without bringing a member into contact with the surface, and further, flatness can be secured and fixed to the work stage.

Similarly, the invention described in claim 7 includes a workpiece fixing device for a work stage according to claim 3 or claim 4, and an exposure optical system that exposes a pattern to an installed workpiece. It is an exposure apparatus.
According to the present invention, a wrinkled or warped work can be transported while maintaining flatness without bringing a member into contact with the surface, and the flatness can be secured and fixed to the work stage for exposure.

  According to the present invention, a workpiece that has been wrinkled or warped is kept clean without bringing a member into contact with the surface, and is transported while maintaining flatness, and is further secured to the work stage while ensuring flatness. Can do.

It is a schematic diagram which shows the exposure apparatus with which embodiment is applied. It is a schematic diagram which shows the arrangement | positioning state of each apparatus in embodiment. BRIEF DESCRIPTION OF THE DRAWINGS The workpiece holding apparatus of the conveyance arm which concerns on Embodiment 1 is shown, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. BRIEF DESCRIPTION OF THE DRAWINGS The workpiece fixing apparatus of the workpiece stage which concerns on Embodiment 1 is shown, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. 1A and 1B show an insertion operation of a workpiece setting device according to Embodiment 1, wherein FIG. 3A is a plan view, FIG. 3B is a side view, FIG. 3C is a front view, and FIG. 1A and 1B show a fixing operation of a workpiece setting device according to Embodiment 1, wherein FIG. 3A is a plan view, FIG. 3B is a side view, FIG. 3C is a front view, and FIG. FIGS. 2A and 2B illustrate an extraction operation of the workpiece setting device according to the first embodiment, where FIG. 3A is a plan view, FIG. 3B is a side view, FIG. 3C is a front view, and FIG. It shows each state of the workpiece | work installation apparatus which concerns on Embodiment 1, (a) is an insertion state, (b) is a fixed state, (c) is an enlarged front view which shows an extraction state. FIG. 3 shows a workpiece fixing device for a workpiece stage according to Embodiment 2, wherein (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is a perspective view. FIG. 3 shows a workpiece fixing device for a workpiece stage according to Embodiment 2, wherein (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is a perspective view. The operation state (1) of the workpiece | work installation apparatus which concerns on Embodiment 2 is shown, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. The operation state (2) of the workpiece | work installation apparatus which concerns on Embodiment 2 is shown, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. The operation state (3) of the workpiece | work installation apparatus which concerns on Embodiment 2 is shown, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. It is a front enlarged view which shows the operation state in each step of the workpiece | work installation apparatus which concerns on Embodiment 2. FIG.

  Hereinafter, a workpiece holding device for a transfer arm, a workpiece fixing device for a workpiece stage, a workpiece setting device, and a projection exposure apparatus according to an embodiment for carrying out the present invention will be described.

  First, a schematic configuration of the projection exposure apparatus according to the embodiment will be described. FIG. 1 is an explanatory diagram showing an outline of an optical system of a projection exposure apparatus according to an embodiment. The projection exposure apparatus 20 includes a light source unit 1, a cold mirror 2, an exposure shutter 3, an ultraviolet (i-line) bandpass filter 4, an integrator lens 5, a collimator lens 6, a plane mirror 7, a mask stage 8, a mask blind 9, and a projection lens 10. , A magnification correction mechanism 11 and an exposure stage 12. The exposure shutter 3 is appropriately retracted from the optical path of the optical system during exposure. The projection exposure apparatus 20 projects the pattern formed on the mask 13 onto a work 14 such as a substrate.

  The light source unit 1 includes a mercury lamp 1a and a spheroid mirror 1b. The mercury lamp 1a is arranged at the first imaging position of the spheroid mirror 1b, and the emitted light beam from the mercury lamp 1a is reflected by the spheroid mirror 1b and condensed at the second imaging position. The cold mirror 2 removes infrared light having a wavelength longer than the infrared wavelength, reflects a light beam in a short wavelength region shorter than the wavelength of visible infrared light, and guides it to the bandpass filter 4. The band pass filter 4 cuts light rays in a wavelength region other than ultraviolet rays (i-line), and guides the light rays as an exposure light beam P to the integrator lens 5.

  The integrator lens 5 makes the light amount distribution of the exposure light beam P substantially uniform and guides it to the collimator lens 6. The collimator lens 6 has a focal point at the second imaging position, and converts the exposure light beam P into a parallel light beam. The plane mirror 7 bends the optical path of the exposure light beam P and guides it to the mask stage 8.

  A mask 13 is provided on the mask stage 8. A pattern 23 to be imaged on the work 14 is formed on the mask 13. In addition, an alignment mark 21 that is a predetermined mark is formed on the mask 13 in order to perform alignment with a workpiece 14 described later. A drive mechanism (not shown) moves the mask stage 8 in the horizontal (X) direction and the vertical (Y) direction in the drawing. The mask blind 9 is appropriately retracted from the projection optical path of the optical system when the work 14 is exposed by the exposure light beam P.

  The projection lens 10 includes a projection lens group 10a. The projection lens group 10a forms an image on the work 14 by enlarging the pattern of the mask 13 in this example.

  Next, the arrangement of the workpiece supply device 30, the workpiece transfer device 60, and the projection exposure device 20 that supply workpieces to the projection exposure device 20 will be described. FIG. 2 is a schematic diagram illustrating an arrangement state of each device in the embodiment.

  The work W is a printed circuit board, a rectangular thin sheet, and is supplied from the work supply device 30. The workpiece transfer device 60 includes a hand 50 including the workpiece holding device 100 according to the embodiment at the tip. Further, the projection exposure apparatus 20 includes a workpiece fixing device 200 according to the embodiment. The hand 50 of the workpiece transfer device 60 is expanded and contracted (arrow X in FIG. 2), rotated (arrow θ in FIG. 2), and up and down (arrow Z perpendicular to the paper surface) under the control of a control means (not shown). Driven by.

  When the hand 50 is driven and the workpiece holding device 100 is arranged on the supply table 40 of the workpiece supply device 30, the workpiece W is supplied to the workpiece holding device 100. Then, the hand 50 of the workpiece supply device 30 is driven to transport the workpiece holding device 100 to the exposure stage 12 of the projection exposure apparatus 20. In the projection exposure apparatus 20, the workpiece W is fixed by the workpiece fixing apparatus 200, the alignment of the workpiece W is precisely adjusted, and a predetermined projection exposure process is performed.

<Embodiment 1>
Hereinafter, the workpiece installation apparatus according to the first embodiment will be described. The workpiece installation device according to the embodiment includes a workpiece holding device 100 and a workpiece fixing device 200.

  First, the workpiece holding device 100 will be described. 3A and 3B show a workpiece holding device for a transfer arm according to the first embodiment, where FIG. 3A is a plan view, FIG. 3B is a side view, FIG. 3C is a front view, and FIG. In the embodiment, the workpiece holding device 100 is configured to hold the workpiece W by arranging it on the upper side of the workpiece holding device 100.

  The workpiece holding device 100 includes an attachment portion 110 for fixing to the tip of the hand 50, a lateral member 120 extending in the width direction of the workpiece W, and a direction in which the hand 50 of the workpiece supply device 30 moves through the lateral member 120 (X And two frame members 130 and 130 disposed close to each other along opposite edge portions across the workpiece W from both ends in the width direction (Y direction) orthogonal to (direction). The frame members 130 and 130 are each provided with an arm member 131, and both edge portions of the workpiece W can be disposed close to each other between the two arm members 131.

  The arm member 131 is provided with an upper clamp portion 140 as a holding member that holds both end edges of the work W in the vertical direction, and a lower clamp portion 146 (see FIG. 8) as a holding member. The upper clamp part 140 includes a base part 141 and an upper rod 142 which is ten rods formed to protrude from the base part 141. Shaft holding pieces 132 and 133 are formed on the arm member 131, and the base portion 141 is rotatably held by the shaft 143. The upper rod 142 is a straight rod-like short member having a length that can come into contact with the edge of the workpiece W from the base portion 141, and a plurality of, in this example, ten, rods are arranged on the base portion 141 at equal intervals.

  The work holding device 100 is provided with an upper clamp driving device 150 as a clamp driving means. The upper clamp driving device 150 includes a driving unit 151 such as an air cylinder, and a link unit 152 that converts the translational motion of the driving unit 151 into the rotational motion of the base 141 of the upper clamping unit 140 and transmits it. By driving the drive unit 151, the upper rod 142 of the upper clamp unit 140 comes into contact with the upper surface of the edge of the workpiece W to clamp the workpiece W (the position of FIG. 8A), and the workpiece W And the workpiece W is driven to an unclamping position (positions (b) and (c) in FIG. 8) where the workpiece W comes out upward.

  The lower clamp part 146 is ten projecting members that project inwardly from the arm member 131 and is arranged at a position corresponding to the arrangement position of the upper rod 142 of the upper clamp part 140. The lower clamp part 146 is fixed to the arm member 131.

  Next, the workpiece fixing device 200 will be described. 4A and 4B show a workpiece fixing device for a workpiece stage according to the first embodiment. FIG. 4A is a plan view, FIG. 4B is a side view, FIG. 4C is a front view, and FIG.

  The workpiece fixing device 200 is disposed on both sides of the installation table 210 that is the exposure stage 12 of the projection exposure apparatus 20 on which the workpiece W held by the workpiece holding device 100 is installed, and the width direction (Y direction) of the installation table 210. Then, the workpiece W on the installation table 210 is arranged on both sides of the width direction clamp part 220 as a fixing member for pressing and fixing the workpiece W on the installation table 210 from above and the front and rear direction (X direction) of the installation table 210. And a front-rear direction clamp portion 230 that holds the pin from above.

  The installation table 210 has a plurality of suction holes 211 for sucking the workpiece W, and the lower clamp portion 146 of the workpiece holding device 100 and the upper rod moved to the unclamping position at both edges in the width direction (Y direction). 142 forms a passage groove 212 through which the installation table 210 can pass from above to below. In addition, a curved arm member 214 for attaching the front-rear direction clamp portion 230 is disposed on the installation table 210. The arm member 214 is bent so as not to interfere with each member of the workpiece holding device 100 when the workpiece holding device 100 is inserted into and removed from the workpiece fixing device 200.

  The width direction clamp part 220 includes a base part 221 and bending rods 222 which are ten rods formed to protrude from the base part 221. The base 221 is rotatably supported by the arm member 214. The bent rods 222 are bent rod-like members having a length that can contact the edge of the workpiece W from the base portion 221, and ten of them are arranged on the base portion 141 at equal intervals. Further, the bending rod 222 presses the workpiece W against the installation table 210 at a position where the passage groove 212 is not formed in the edge portion of the installation table 210. For this reason, the bending rod 222 is disposed between positions where the upper rod 142 of the work holding device 100 is disposed when the work holding device 100 is disposed in the work fixing device 200.

  Further, the bending rod 222 is bent so as not to interfere with each member of the work holding device 100 when the work holding device 100 is inserted into and removed from the work fixing device 200.

  The workpiece fixing device 200 includes a lateral clamp driving device 240 that is a clamp unit driving means. The lateral clamp drive device 240 includes a drive unit 241 such as an air cylinder, and a link unit 242 that converts the translational motion of the drive unit 241 into the rotational motion of the base 221 of the widthwise clamp unit 220 and transmits it. By driving the drive unit 241, the bending rod 222 of the width direction clamp unit 220 comes into contact with the upper surface of the edge of the workpiece W to clamp the workpiece W (the positions shown in FIGS. 8B and 8C). ), And the workpiece W is driven to an unclamping position (a position shown in FIG. 8A) where the workpiece W comes out upward.

  The front / rear direction clamp part 230 includes a base part 231 and a front / rear direction rod 232 which is ten rods formed to protrude from the base part 221. The base 231 is rotatably supported on the installation table 210. The front / rear direction rods 232 are a plurality of bent rod-shaped members that can contact the edge of the workpiece W from the base portion 231 in this example, and ten rods 232 are arranged at predetermined intervals on the base portion 231.

  The work fixing device 200 includes a front-rear direction clamp driving device 250 which is a clamp unit driving means. The front / rear direction clamp drive device 250 includes a drive unit 251 such as an air cylinder, and a link unit 252 that converts the translational motion of the drive unit 251 into the rotational motion of the base portion 231 of the front / rear direction clamp unit 230 and transmits it. By driving the drive unit 251, the front-rear direction rod 232 of the front-rear direction clamp unit 230 comes into contact with the upper surface of the edge of the work W and clamps the work W (see FIGS. 8B and 8C). Position) and the unclamping position where the workpiece W is separated upward from the workpiece W and is driven to the position (the position in FIG. 8A).

  Next, the operation when the work W is transported and fixed to the exposure stage 12 will be described. Hereinafter, a series of operations will be described separately for (A) insertion operation, (B) fixing operation, and (C) extraction operation. 5A and 5B illustrate an insertion operation of the workpiece setting device according to the first embodiment, where FIG. 5A is a plan view, FIG. 5B is a side view, FIG. 5C is a front view, and FIG. 6 shows the fixing operation of the workpiece setting device according to the first embodiment, where (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is a perspective view. is there. Moreover, FIG. 7 shows the extraction operation | movement of the workpiece | work installation apparatus based on Embodiment 1, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. is there. Furthermore, FIG. 8 shows each state of the workpiece | work installation apparatus based on Embodiment 1, (a) is an insertion state, (b) is a fixed state, (c) is a front enlarged view which shows the extraction state.

  These operations are performed by the upper clamp driving device 150 of the workpiece holding device 100, the lateral clamp driving device 240 of the workpiece fixing device 200, the driving units of the front and rear direction clamp driving device 250, and the hand 50 of the workpiece conveying device 60. The drive unit is controlled by the control unit and executed. The control unit is a microcomputer including a CPU, a RAM, a ROM, and the like, and can be realized by driving and controlling each unit by executing a program while referring to a position sensor arranged in each unit. Further, the operation can be controlled by a sequencer in which the operation of each unit is set in advance.

(A) Insertion operation (see FIGS. 1, 5, and 8A)
As shown in FIG. 1, the workpiece supply device 30 receives the workpiece W from the workpiece holding device 100 using the supply table 40 of the workpiece supply device 30. Then, with the workpiece W held by the workpiece holding device 100 (see FIG. 3), the hand 50 is rotated in the θ direction and moved to a position before the exposure stage 12 of the workpiece holding device 100. Then, the position of the workpiece holding device 100 and the workpiece fixing device 200 are adjusted by adjusting the position in the vertical direction (Z direction), the hand 50 is extended in the X direction, and the workpiece holding device 100 is inserted into the workpiece fixing device 200 ( Arrow (1) in FIG. 5 (a).

  At this time, in the workpiece holding device 100, after receiving the workpiece holding device 100, the upper clamp driving device 150 arranges the upper rod 142 at the clamp position. Accordingly, the workpiece W is clamped between the two arm members 131 and 131 by the upper rod 142 and the lower clamp portion 146 of the upper clamp portion 140. For this reason, the workpiece | work W is the state clamped by the high flatness between the arm members 131 and 131. FIG.

  On the other hand, in the workpiece fixing device 200, the lateral clamp driving device 240 arranges the bending rod 222 of the width direction clamp portion 220 at the unclamping position. Similarly, the front / rear direction clamp driving device 250 arranges the front / rear direction rod 232 of the front / rear direction clamp part 230 at the unclamping position.

  In this state, as shown in FIG. 8A, the workpiece holding device 100 arranges the workpiece W above the installation table 210 without contacting the width direction clamp unit 220 and the link unit 242 of the workpiece fixing device 200. You can move like that.

(B) Fixing operation (see FIGS. 6 and 8B)
Next, the workpiece holding device 100 is moved downward (Z direction) (arrow (2) in FIG. 6B), and the workpiece W is set on the setting table 210 (exposure stage 12). At this time, since the lower clamp portion 146 is disposed in the passage groove 212 of the installation table 210, the passage groove 212 does not get in the way, and the workpiece W can be brought into contact with the installation table 210.

  Next, the lateral clamp drive device 240 and the front-rear direction clamp drive device 250 move the bending rod 222 of the width-direction clamp unit 220 and the front-rear direction rod 232 of the front-rear direction clamp unit 230 to the clamp position (in FIG. 6D). Arrow (3)). Further, the upper clamp drive device 150 moves the upper rod 142 of the upper clamp part 140 to the unclamping position (arrow (4) in FIG. 6 (c)). By these operations, the workpiece W is clamped by the workpiece fixing device 200 and unclamped from the workpiece holding device 100.

(C) Extraction operation (see FIGS. 7 and 8 (c))
Here, in FIG. 8, in order to make it easy to see the state of the bending rod 222 and the front-rear direction rod 232, the workpiece W is indicated by a virtual line.

  In order to extract the workpiece holding device 100 from the workpiece fixing device 200, the workpiece holding device 100 is moved downward (Z direction) in a state where the workpiece W is clamped by the workpiece fixing device 200 (the arrow (in FIG. 7B) ( 4)). At this time, the lower clamp part 146 and the upper rod 142 pass through the passage groove 212 of the installation base 210 when the work holding device 100 moves downward. As a result, as shown in FIG. 8C, the work holding device 100 is placed in a region surrounded by the arm member 214 and the bending rod 222.

  Then, the workpiece holding device 100 is pulled out from the workpiece fixing device 200 (arrow (6) in FIG. 7A). In this state, the workpiece W is clamped by the bending rod 222 and the front-rear direction rod 232 at the peripheral portions of the four sides on the installation table 210, and the flatness can be maintained. After a series of work transfer processes are completed, the work holding device 100 is returned to the work supply device 30 by the work transfer device 60 and repeats the same operation. Then, the exposure processing is executed in the projection exposure apparatus 20 according to a predetermined procedure.

  As described above, according to the first embodiment, a work that has been wrinkled or warped is transported while maintaining flatness without bringing a member into contact with the surface, and further, the flatness is secured and fixed to the exposure stage. And good exposure processing can be performed.

<Embodiment 2>
Hereinafter, the workpiece installation apparatus according to the second embodiment will be described. The workpiece installation device according to the embodiment includes a workpiece holding device 300 and a workpiece fixing device 400.

  First, the workpiece holding device 300 will be described. 9A and 9B show a workpiece holding device for a transfer arm according to the second embodiment. FIG. 9A is a plan view, FIG. 9B is a side view, FIG. 9C is a front view, and FIG. In the second embodiment, the workpiece holding device 300 is configured to place and hold the workpiece W on the lower side of the workpiece holding device 300.

  The workpiece holding device 300 has a horizontal member 320 extending in the width direction of the workpiece W at a mounting portion 310 fixed to the tip of the hand 50, and a direction (X direction) in which the hand 50 of the workpiece supply device 30 moves through the horizontal member 320. 2, two frame members 330, 330 arranged close to each other along opposite edge portions across the workpiece W from both ends in the width direction (Y direction: see FIG. 2). Each of the frame members 330 and 330 includes an arm member 331, and both edge portions of the workpiece W can be disposed close to each other between the two arm members 131.

  The arm member 331 includes an upper clamp portion 332 that is formed to protrude inward and is a holding member that is in contact with and holds the both end edges of the workpiece W from above. The upper clamp portion 332 is a plurality of, for example, ten rod-shaped members, and is disposed on each arm member 331. The arm member 331 is provided with a lower clamp portion 340 as a holding portion that holds the workpiece W from below. The lower clamp portion 340 includes a base portion 341 and a lower rod 342 that is a holding member that is ten rods that protrude from the base portion 341. Shaft holding pieces 333 and 334 are formed on the arm member 331, and the base 341 is rotatably held by the shaft 343. The lower rod 342 is a bent member that can come into contact with the edge of the workpiece W from the base 341, and a plurality of, in this example, ten, rods are arranged on the base 341 at equal intervals. The lower rod 342 is disposed at the same position so as to clamp the workpiece W with the upper clamp portion 332.

  When the workpiece W is clamped by the workpiece holding device 300, the workpiece W comes into contact with the upper clamp portion 332 on the upper side of both edge portions in the Y direction, and the lower rod 342 is located below the portion where the upper clamp portion 332 is in contact. And supported by pressing upward.

  The work holding device 300 is provided with a lower clamp drive device 350 as a clamp drive means. The lower clamp driving device 350 includes a driving unit 351 such as an air cylinder, and a link unit 352 that converts the translational motion of the driving unit 351 into the rotational motion of the base 341 of the lower clamping unit 340 and transmits the rotational motion. By driving the drive unit 351, the lower rod 342 of the lower clamp unit 340 comes into contact with the lower surface of the edge of the workpiece W to clamp the workpiece W (in FIGS. 14A and 14B). Position) and an unclamping position (position shown in FIG. 14C) that is separated from the work W and allows the work W to fall downward.

  Next, the workpiece fixing device 400 will be described. FIG. 10 shows a workpiece fixing device for a workpiece stage according to the second embodiment, wherein (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is a perspective view.

  The workpiece fixing device 400 is disposed on both sides of the installation table 410 that is the exposure stage 12 of the projection exposure apparatus 20 on which the workpiece W held by the workpiece holding device 300 is installed, and the width direction (Y direction) of the installation table 410. And the width direction clamp part 420 which is a fixing member which fixes the workpiece | work W on the installation base 410 from the upper side is provided. In addition, the workpiece fixing device 400 is provided on both sides of the installation table 410 in the front-rear direction (X direction), and includes a front-rear direction clamp unit 430 that presses the workpiece W on the installation table 410 from above.

  The installation table 410 has a plurality of suction holes 411 for sucking the workpiece W. In addition, on the installation table 410, an arm member 413 for attaching the width direction clamp part 420 and an attachment member 414 for attaching the front and rear direction clamp part 430 are arranged.

  The width direction clamp part 420 includes a base part 421 and linear rods 422 which are ten rods formed to protrude from the base part 421. The base 421 is rotatably supported by the arm member 413. A plurality of, for example, ten linear rods 422 are arranged on the base 421 at equal intervals. The front / rear direction clamp portion 430 includes three plate members, that is, a central member 432 and end members 433 and 433 on the base portion 431, and is rotatably supported by the attachment member 414.

  The workpiece fixing device 400 includes a lateral clamp drive device 440 that drives the width direction clamp unit 420 as a clamp unit drive unit, and a front / rear direction clamp drive device 450 that drives the front / rear direction clamp unit 430. The lateral clamp drive device 440 and the front / rear direction clamp drive device 450 include drive units 441 and 451 such as air cylinders, and a translational movement of the drive unit 241 based on the base 421 of the width direction clamp unit 420, the central member 432, and end members. It consists of link parts 442 and 452 which transmit to 433 and 433 as rotational motion.

  By driving the drive unit 441, the linear rod 422 of the width direction clamp unit 420 is brought into contact with the upper surface of the width direction end edge of the work W to clamp the work W (FIGS. 8B and 8C). ) And the unclamping position (position of FIG. 8 (a)) at which the work W is separated upward from the work W. Similarly, by driving the drive unit 451, the center member 432 and the end members 433 and 433 of the front-rear direction clamp unit 430 come into contact with the upper surface of the front-rear end edge of the work W to clamp the work W ( 8 (b) and (c) positions), and the workpiece W is driven to an unclamping position where the workpiece W is pulled upward. Moreover, a moving means (not shown) is connected to the workpiece fixing device 400, and the entire workpiece fixing device 400 can be moved in the vertical direction (Z direction).

  Next, an operation when the work W is transported and fixed to the exposure stage 12 will be described. Hereinafter, a series of operations will be described separately for (A) insertion operation, (B) fixing operation, and (C) extraction operation. 11A and 11B show the insertion operation of the workpiece setting device according to the second embodiment. FIG. 11A is a plan view, FIG. 11B is a side view, FIG. 11C is a front view, and FIG. FIG. 12 shows the fixing operation of the workpiece setting device according to the second embodiment, (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is a perspective view. is there. Moreover, FIG. 13 shows the extraction operation | movement of the workpiece | work installation apparatus based on Embodiment 2, (a) is a top view, (b) is a side view, (c) is a front view, (d) is a perspective view. is there. Furthermore, FIG. 14 shows each state of the workpiece | work installation apparatus based on Embodiment 2, (a) is an insertion state, (b) is a fixed state, (c) is a front enlarged view which shows the extraction state.

  In each of these operations, the lower clamp driving device 350 of the workpiece holding device 300, the lower clamp portion 340 of the workpiece fixing device 400, the respective driving units of the lower clamp driving device 350, and the workpiece fixing device 400 are moved up and down. The means and the drive unit of the hand 50 of the work transfer device 60 are driven and controlled by the control unit. The control unit is a microcomputer including a CPU, a RAM, a ROM, and the like, and can be realized by driving and controlling each unit by executing a program while referring to a position sensor arranged in each unit. Further, the operation can be controlled by a sequencer in which the operation of each unit is set in advance.

(A) Insertion operation (see FIGS. 1, 11, and 14A)
As shown in FIG. 1, the workpiece supply device 30 receives the workpiece W from the workpiece holding device 300 using the supply table 40 of the workpiece supply device 30. Then, with the workpiece W held by the workpiece holding device 300 (see FIG. 3), the hand 50 is rotated in the θ direction and moved to a position before the exposure stage 12 of the workpiece holding device 300. Then, the position of the workpiece holding device 300 and the workpiece fixing device 400 is adjusted by adjusting the position in the vertical direction (Z direction), the hand 50 is extended in the X direction, and the workpiece holding device 300 is inserted into the workpiece fixing device 400 ( An arrow (1) in FIG.

  At this time, in the work holding device 300, after receiving the work holding device 300, the lower clamp driving device 350 arranges the lower rod 342 at the clamp position. Thereby, the workpiece W is clamped between the two arm members 331 and 331 by the lower rod 342 and the upper clamp portion 332 of the lower clamp portion 340. For this reason, the workpiece | work W is the state clamped by the high flatness between the arm members 331 and 331. FIG.

  On the other hand, in the workpiece fixing device 400, the lateral clamp driving device 440 arranges the linear rod 422 of the width direction clamp portion 420 at the unclamping position. Similarly, the front-rear direction clamp driving device 450 arranges the center member 432 and the end members 433, 433 of the front-rear direction clamp part 430 at the unclamping position.

  In this state, the workpiece holding device 300 can move to place the workpiece W above the installation table 410 without contacting the workpiece fixing device 400, as shown in FIG.

(B) Fixing operation (see FIGS. 12 and 14B)
Next, the workpiece fixing device 400 is moved upward (in the Z direction) (arrow (2) in FIG. 12B), and the workpiece W is installed on the installation table 410.

  Next, the lateral clamp drive device 440 and the front-rear direction clamp drive device 450 move the linear rod 422 of the width-direction clamp unit 420, the central member 432 of the front-rear direction clamp unit 430, and the end members 433, 433 to the clamp position (see FIG. 12 (d) middle arrow (3)). Further, the lower clamp driving device 350 moves the lower rod 342 of the lower clamp portion 340 to the unclamping position (arrow (4) in FIG. 12C). By these operations, the workpiece W is clamped by the workpiece fixing device 400 and is unclamped from the workpiece holding device 300.

(C) Extraction operation (see FIGS. 13 and 14C)
In order to extract the workpiece holding device 300 from the workpiece fixing device 400, the workpiece fixing device 400 is moved downward (Z direction) in a state where the workpiece W is clamped by the workpiece fixing device 400 (the arrow ( 4)). At this time, since the workpiece holding device 300 is disposed at a position above the workpiece fixing device 400, the workpiece holding device 300 and the workpiece fixing device 400 do not interfere with each other.

  Then, the work holding device 300 is pulled out from the work fixing device 400 (arrow (5) in FIG. 13A). In this state, the workpiece W is clamped by the straight rod 422, the central member 432, and the end members 433 and 433 at the four peripheral edges of the installation table 410, and the flatness can be maintained. After the workpiece transfer processing is completed, the workpiece holding device 100 is returned to the workpiece supply device 30 by the workpiece transfer device 60 and repeats the same operation. Then, the exposure processing is executed in the projection exposure apparatus 20 according to a predetermined procedure.

  As described above, according to the second embodiment, a workpiece with wrinkles or warps is transported while maintaining flatness without bringing a member into contact with the surface, and further, the flatness is secured and fixed to the exposure stage. And good exposure processing can be performed.

10: Projection lens 12: Exposure stage 13: Mask 14: Workpiece 20: Projection exposure device 30: Workpiece supply device 40: Supply table 50: Hand 60: Workpiece transfer device 100: Workpiece holding device 140: Upper clamp part (holding member)
141: Base 142: Upper rod 146: Lower clamp part (holding member)
150: Upper clamp driving device 200: Work fixing device 210: Installation base 212: Passing groove 220: Width direction clamping portion (fixing member)
221: Base 222: Bending rod 230: Front / rear direction clamp part 231: Base part 232: Front / rear direction rod 240: Lateral direction clamp drive apparatus 250: Front / rear direction clamp drive apparatus 300: Workpiece holding apparatus 330: Frame member 332: Upper clamp part 340 : Lower clamp (holding member)
341: Base 342: Lower rod (holding member)
350: Lower clamp driving device 400: Work fixing device 410: Installation table 420: Width direction clamp portion (fixing member)
421: Base 422: Straight rod 430: Front / rear direction clamp 431: Base 432: Central member 433, 433: End member 440: Lateral clamp drive 441: Drive unit 450: Front / rear direction clamp drive W: Workpiece

Claims (7)

A workpiece holding device for a transfer arm that holds and transfers a rectangular workpiece detachably,
Two frame members arranged so as to sandwich the workpiece, and provided so as to extend inward from the two frame members, respectively, and sandwiching two opposite edge portions of the workpiece from above and below, respectively. An upper clamp part and a lower clamp part for holding the workpiece are provided as holding members,
At least one of the upper clamp part and the lower clamp part is
A plurality of rods are spaced apart and connected to a base, and a clamp position where the tips of the plurality of rods come into contact with the workpiece to hold the workpiece on the frame member, and an unscrewed from the workpiece. A work holding device for a transfer arm, comprising a holding member driven to a clamp position.   The work holding device for a transfer arm according to claim 1, further comprising a driving unit that drives the holding member between the clamp position and the unclamp position. In the work stage fixing device that fixes the conveyed rectangular work to the work stage,
An installation table for supporting the lower surface of the workpiece;
It is installed along at least two opposing edges of the four edges of the workpiece, and a plurality of rods are spaced apart and connected to a base, and the tip of the rod is A workpiece fixing device for a workpiece stage, comprising: a clamping position that contacts the workpiece and clamps the workpiece; and a fixing member that is driven to an unclamping position spaced from the workpiece.   The work fixing device for a work stage according to claim 3, further comprising a driving unit that drives the fixing member between a clamp position and an unclamp position. A work holding device for a transfer arm according to claim 1 or 2, and a work fixing device for a work stage according to claim 3 or 4,
A workpiece holding device of the transfer arm and a workpiece fixing device of the workpiece stage;
The holding member of the work holding device of the transfer arm and the fixing member of the work fixing device of the work stage are arranged in the same direction above the setting table of the work fixing device of the work stage with the fixing member as the unclamping position. It can be inserted as quickly as possible,
The holding member and the fixing member are different positions in which the contact position of the holding member of the work holding device of the transfer arm to the work and the contact position of the fixing member of the work fixing device of the work stage to the work Configure to avoid interference,
The work holding device of the transfer arm and the work fixing device of the work stage are configured to be relatively movable in the vertical direction,
A workpiece placement device, wherein the workpiece fixing device for the workpiece stage having the pressing member as an unclamping position can be extracted from the workpiece fixing device for the workpiece stage having the clamping member in a clamped state. The pressing member of the work stage fixing device is an unclamping position,
Insert the workpiece holding device of the transfer arm that holds the workpiece above the installation stage of the workpiece fixing device of the workpiece stage,
The holding member of the work holding device of the transfer arm is set to the unclamping position,
The workpiece fixing device of the workpiece stage is in a fixed state,
Move the workpiece holding device of the transfer arm and the workpiece fixing device of the workpiece stage relatively up and down,
Extracting the work holding device of the transfer arm from the work holding device of the transfer arm;
6. The workpiece placement device according to claim 5, further comprising control means for driving the workpiece.   5. A projection exposure apparatus comprising: a workpiece fixing device for a workpiece stage according to claim 3; and an exposure optical system for exposing a pattern to an installed workpiece.