JP2013210095A5 - - Google Patents

Download PDF

Info

Publication number
JP2013210095A5
JP2013210095A5 JP2013048065A JP2013048065A JP2013210095A5 JP 2013210095 A5 JP2013210095 A5 JP 2013210095A5 JP 2013048065 A JP2013048065 A JP 2013048065A JP 2013048065 A JP2013048065 A JP 2013048065A JP 2013210095 A5 JP2013210095 A5 JP 2013210095A5
Authority
JP
Japan
Prior art keywords
liquid
gas
diaphragm
outlet
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013048065A
Other languages
English (en)
Japanese (ja)
Other versions
JP5725482B2 (ja
JP2013210095A (ja
Filing date
Publication date
Priority claimed from US13/785,819 external-priority patent/US8783652B2/en
Application filed filed Critical
Publication of JP2013210095A publication Critical patent/JP2013210095A/ja
Publication of JP2013210095A5 publication Critical patent/JP2013210095A5/ja
Application granted granted Critical
Publication of JP5725482B2 publication Critical patent/JP5725482B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013048065A 2012-03-12 2013-03-11 膜蒸着のための液体流量制御 Active JP5725482B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261609616P 2012-03-12 2012-03-12
US61/609,616 2012-03-12
US13/785,819 2013-03-05
US13/785,819 US8783652B2 (en) 2012-03-12 2013-03-05 Liquid flow control for film deposition

Publications (3)

Publication Number Publication Date
JP2013210095A JP2013210095A (ja) 2013-10-10
JP2013210095A5 true JP2013210095A5 (https=) 2014-07-17
JP5725482B2 JP5725482B2 (ja) 2015-05-27

Family

ID=47900664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013048065A Active JP5725482B2 (ja) 2012-03-12 2013-03-11 膜蒸着のための液体流量制御

Country Status (4)

Country Link
US (1) US8783652B2 (https=)
EP (2) EP2639483A3 (https=)
JP (1) JP5725482B2 (https=)
KR (1) KR101432243B1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8240636B2 (en) 2009-01-12 2012-08-14 Fresenius Medical Care Holdings, Inc. Valve system
US9358331B2 (en) 2007-09-13 2016-06-07 Fresenius Medical Care Holdings, Inc. Portable dialysis machine with improved reservoir heating system
US8105487B2 (en) 2007-09-25 2012-01-31 Fresenius Medical Care Holdings, Inc. Manifolds for use in conducting dialysis
US8597505B2 (en) 2007-09-13 2013-12-03 Fresenius Medical Care Holdings, Inc. Portable dialysis machine
US9308307B2 (en) 2007-09-13 2016-04-12 Fresenius Medical Care Holdings, Inc. Manifold diaphragms
CA3057807C (en) 2007-11-29 2021-04-20 Thomas P. Robinson System and method for conducting hemodialysis and hemofiltration
AU2009302327C1 (en) 2008-10-07 2015-09-10 Fresenius Medical Care Holdings, Inc. Priming system and method for dialysis systems
CA2739807C (en) 2008-10-30 2017-02-28 Fresenius Medical Care Holdings, Inc. Modular, portable dialysis system
WO2010114932A1 (en) 2009-03-31 2010-10-07 Xcorporeal, Inc. Modular reservoir assembly for a hemodialysis and hemofiltration system
US9201036B2 (en) 2012-12-21 2015-12-01 Fresenius Medical Care Holdings, Inc. Method and system of monitoring electrolyte levels and composition using capacitance or induction
US9157786B2 (en) 2012-12-24 2015-10-13 Fresenius Medical Care Holdings, Inc. Load suspension and weighing system for a dialysis machine reservoir
US9354640B2 (en) * 2013-11-11 2016-05-31 Fresenius Medical Care Holdings, Inc. Smart actuator for valve
US11098819B2 (en) 2016-11-08 2021-08-24 Fujikin Incorporated Valve device, flow control method using the same, and semiconductor manufacturing method
US11022224B2 (en) * 2016-11-30 2021-06-01 Fujikin Incorporated Valve device, flow control method using the same, and semiconductor manufacturing method
KR102210582B1 (ko) * 2017-09-25 2021-02-02 가부시키가이샤 후지킨 밸브장치, 유량 조정방법, 유체 제어장치, 유량 제어방법, 반도체 제조장치 및 반도체 제조방법
CN111373182A (zh) * 2017-11-24 2020-07-03 株式会社富士金 阀装置以及使用该阀装置的控制装置的控制方法、流体控制装置以及半导体制造装置
DE102018001048A1 (de) * 2018-02-09 2019-08-14 Atlas Copco Ias Gmbh Dosierventil
WO2019171593A1 (ja) * 2018-03-09 2019-09-12 株式会社フジキン バルブ装置
IL268254B2 (en) * 2019-07-24 2024-10-01 Ham Let Israel Canada Ltd Fluid-flow control device
WO2021059989A1 (ja) * 2019-09-25 2021-04-01 芝浦機械株式会社 流量調整バルブ、ポンプユニット及び表面処理装置
JP2024158856A (ja) * 2023-04-28 2024-11-08 株式会社堀場エステック 流体制御弁、流体制御装置、及び、材料供給システム

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5092360A (en) * 1989-11-14 1992-03-03 Hitachi Metals, Ltd. Flow rated control valve using a high-temperature stacked-type displacement device
JPH0784662B2 (ja) * 1989-12-12 1995-09-13 アプライドマテリアルズジャパン株式会社 化学的気相成長方法とその装置
DE69312436T2 (de) * 1992-12-15 1998-02-05 Applied Materials Inc Verdampfung von flüssigen Reaktionspartnern für CVD
JPH08200525A (ja) * 1995-01-31 1996-08-06 Hitachi Metals Ltd 液体原料気化器用弁
JPH1089532A (ja) * 1995-12-13 1998-04-10 Rintetsuku:Kk 気化装置の弁構造
JPH11319660A (ja) * 1998-05-15 1999-11-24 Rintec:Kk 気化装置
KR100649852B1 (ko) 1999-09-09 2006-11-24 동경 엘렉트론 주식회사 기화기 및 이것을 이용한 반도체 제조 시스템
JP2001317646A (ja) * 2000-05-08 2001-11-16 Smc Corp 圧電式流体制御弁
JP2004092824A (ja) * 2002-09-02 2004-03-25 Fujikin Inc 流体制御器
JP2005113221A (ja) * 2003-10-08 2005-04-28 Lintec Co Ltd 気化器並びにこれを用いた液体気化供給装置
CN1894526A (zh) * 2003-10-17 2007-01-10 松德沃技术公司 故障保险气动致动阀
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
JP4933936B2 (ja) 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
ATE474167T1 (de) 2007-08-03 2010-07-15 Georg Fischer Wavin Ag Ventilanordnung mit drehmomentbegrenzer
WO2011097238A2 (en) 2010-02-05 2011-08-11 Msp Corporation Fine droplet atomizer for liquid precursor vaporization
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

Similar Documents

Publication Publication Date Title
JP2013210095A5 (https=)
EP2639483A3 (en) Liquid flow control for film deposition
MX2013008172A (es) Valvula autonoma.
MY159918A (en) Device for directing the flow of a fluid using a pressure switch
MX2014013709A (es) Metodo de, y aparato para, regulacion del gasto de flujo de masa de un gas.
MX355647B (es) Caudalímetro ultrasónico con control de transición de flujo laminar a turbulento.
MY164630A (en) Oilfield apparatus and methods of use
MX2017012000A (es) Sistema de entrega de materiales.
WO2013013974A3 (de) Verfahren und vorrichtung zum steuern bzw. regeln eines fluidförderers zum fördern eines fluides innerhalb einer fluidleitung
WO2014152755A3 (en) Pressure-based gas flow controller with dynamic self-calibration
MX2011013565A (es) Valvula de control de fluidos para doble proposito.
MX2014011174A (es) Un metodo y dispositivo de control de flujo.
MX2017000382A (es) Sistemas de gas y metodos de soldeo.
EP3511049A3 (en) Systems and methods for infusion of fluids using stored potential energy and a variable flow resistor
WO2016073454A3 (en) Compressed gad filling method and system
WO2015112436A3 (en) Nozzle assembly with self-cleaning face
JP2011516274A5 (https=)
MX2012013979A (es) Unidad dispensadora y metodo para dispensar un liquido bajo presion.
RU2017125567A (ru) Носимое устройство для очистки воздуха
EP2895777A4 (en) DEVICE FOR REDUCING THE PRESSURE OF A LIQUID FLOW AND CONTROL VALVE
JP2015510207A5 (https=)
JP2009006569A5 (https=)
RU2010145143A (ru) Способ и устройство для регулируемого охлаждения
MX2013013086A (es) Aparato de infusion con detector de flujo.
GB2520912A (en) Apparatus and method for controlling the flow of a fluid