JP2013208598A - Adsorption system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adsorption system capable of effectively using exhaust gas discharged from a supply destination of gas from which vapor is adsorbed and removed.SOLUTION: An adsorption system for adsorbing vapor contained in gas supplied to a prescribed supply destination includes: an adsorbing and removing means having an adsorbent capable of adsorbing the vapor, and adsorbing and removing the vapor contained in the gas supplied to the prescribed supply destination; a first regeneration means for recovering the gas supplied to the prescribed supply destination from the specified portion of the prescribed supply destination, and regenerating the adsorbent by allowing the recovered gas to flow through the adsorbent; and a second regeneration means for recovering the gas having vapor concentration lower than the gas recovered by the first regeneration means of the gas supplied to the prescribed supply destination from the portion different from the specified portion of the prescribed supply destination, and regenerating the adsorbent by allowing the recovered gas to flow through the adsorbent after being regenerated by the first regeneration means.

Description

  The present invention relates to an adsorption system.

  In industrial facilities, removal (or simply “removal”) of vapor (humidity, solvent vapor, etc.) contained in gas may be performed. For example, in a production line for various products, in order to maintain product quality, air from which low-humidity air is collected and moisture is removed is used (see, for example, Patent Document 1).

  As a system for removing vapor contained in the gas, a compressor type, a desiccant type, and a hybrid type combining these have been devised. In a desiccant type adsorption system, there is a system in which a rotor carrying an adsorbent is partitioned to form an adsorption region and a regeneration region, and adsorption and regeneration are continuously performed while rotating the rotor (for example, see Patent Document 2). ). Further, in the desiccant type adsorption system, the rotor regeneration area is divided into a plurality of areas (see, for example, Patent Document 3-4), or the rotor adsorption area is divided into a plurality of areas (for example, (See Patent Document 5).

JP 2010-216689 A Japanese Patent No. 4500461 JP-A-6-343819 JP 2011-230098 A Japanese Patent No. 2673300

  A system for removing vapor contained in gas supplies gas from which vapor contained in gas has been removed to various supply destinations such as various devices and rooms (low dew point chambers). Does not necessarily contain steam. Here, it is considered that the exhaust gas discharged from the supplier is returned and reused. If the vapor concentration in the exhaust gas is smaller than the vapor concentration of the gas (for example, outside air) just before flowing into the vapor removal system such as a dehumidifier, it is important to throw away the exhaust gas discharged from the supply destination. It is useless from the viewpoint.

  Therefore, it is conceivable to improve the energy balance by performing latent heat exchange between the gas immediately before flowing into the system and the exhaust discharged from the supply destination. However, in a system that recycles exhaust gas (hereinafter referred to as “recovery”), for example, in a compressor system, the gas is cooled for the purpose of condensing the vapor contained in the gas, and the desiccant system is used. In the (adsorption system), gas cooling (precooling) is performed for the purpose of promoting adsorption by the adsorbent. Therefore, when the latent heat exchange is performed, when the exhaust gas discharged from the supply destination is at a high temperature, the sensible heat inevitably exchanged with the latent heat may increase the amount of cooling heat required for cooling the gas. For this reason, improving the energy balance of the system by latent heat exchange is not practical.

  The present invention has been made in view of such problems, and it is an object of the present invention to provide an adsorption system capable of effectively using exhaust gas discharged from a destination to which a gas from which vapor is adsorbed and removed is supplied. To do.

  In order to solve the above problems, in the present invention, when gases supplied to a predetermined supply destination are recovered and used for regeneration of the adsorbent, gases having different vapor concentrations are recovered from different parts of the predetermined supply destination. The gas having a relatively low vapor concentration was passed through the adsorbent after the gas having a relatively high vapor concentration was passed through to regenerate the adsorbent.

  Specifically, the adsorption system adsorbs vapor contained in a gas supplied to a predetermined supply destination, and has an adsorbent capable of adsorbing the vapor and is contained in the gas supplied to the predetermined supply destination. An adsorbing / removing means for adsorbing and removing the gas, and recovering the adsorbent by collecting the gas supplied to the predetermined supply destination from a specific part of the predetermined supply destination and venting the recovered gas through the adsorbent Of the gas supplied to the first supply means and the gas supplied to the predetermined supply destination, a gas having a lower vapor concentration than the gas recovered by the first regeneration means is used as the specific part of the predetermined supply destination. And a second regenerating unit that regenerates the adsorbent by collecting the recovered gas from different parts and venting the recovered gas to the adsorbent after the first regenerating unit regenerates.

  In an adsorption system using an adsorbent such as a desiccant method, the adsorbent adsorbing vapor is regenerated. In order to effectively regenerate the adsorbent that has adsorbed the vapor, it is desirable to supply a gas having a low vapor content. Here, when a gas with low vapor content is discharged as it is at the gas supply destination supplied by the adsorption system, the effective use of this gas for regeneration of the adsorbent contributes to the improvement of the energy balance of the adsorption system. I think that.

  Therefore, in the adsorption system, the gas supplied to the predetermined supply destination is recovered from a specific part of the predetermined supply destination, and in addition to the first regeneration means used for regeneration of the adsorbent, the predetermined supply destination A gas having a lower vapor concentration than the gas recovered by the first regeneration means is recovered from a part different from the specific part, and used for regeneration of the adsorbent after the first regeneration means regenerates. The reproducing means is provided.

  The adsorbent can sufficiently recover the vapor adsorption capacity as the vapor concentration of the gas used for regeneration is lower. However, the adsorbent immediately after the start of regeneration adsorbs a larger amount of vapor than the adsorbent immediately before the end of regeneration. Therefore, even if the vapor concentration of the gas used for the regeneration of the adsorbent immediately after the start of regeneration is higher than the vapor concentration of the gas used for the regeneration of the adsorbent immediately before the end of regeneration, the regeneration effect of the adsorbent is not reduced. Therefore, in the above adsorption system, the gas recovered from the portion having a relatively low vapor concentration at the gas supply destination supplied by the adsorption system is used for further regeneration of the adsorbent regenerated with the gas recovered from the other portion. By using it, it is possible to improve the energy balance of the adsorption system and prevent the adsorbent regeneration effect from decreasing. Thereby, effective use of the exhaust discharged from the destination to which the gas from which the vapor is adsorbed and removed is supplied is realized.

  The predetermined supply destination includes a plurality of facilities, a first facility group having any one or a plurality of facilities among the plurality of facilities, and the first facility among the plurality of facilities. A plurality of facilities having a second facility group including any one or a plurality of facilities that generate the steam at a different timing from the facilities included in the group, and the first regeneration means includes the first regeneration unit Among the equipment group and the second equipment group, the gas recovered from the equipment group that is generating the steam is passed through the adsorbent to regenerate the adsorbent, and the second regeneration means includes the second regeneration means, Of the one equipment group and the second equipment group, the gas recovered from the equipment group in which the steam is not generated is passed through the adsorbent after the first regeneration means regenerates the adsorbent. May be reproduced.

In the case of the adsorption system configured as described above, the adsorbent that has been regenerated by the gas recovered from the facility group that is generating steam is further regenerated by the gas that is recovered from the facility group that is not generating steam. Therefore, it is possible to prevent the adsorbent regeneration effect from being lowered while improving the energy balance of the adsorption system. Thereby, effective use of the exhaust discharged from the destination to which the gas from which the vapor is adsorbed and removed is supplied is realized.

  Further, the predetermined supply destination is an indoor space in which one or a plurality of facilities for generating the steam is installed, and the first regeneration means vents exhaust gas from the one or a plurality of facilities to the adsorbent. The adsorbent may be regenerated, and the second regeneration means may regenerate the adsorbent by venting the gas in the indoor space to the adsorbent.

  The gas recovered from the indoor space in which the facility for generating steam is installed is more likely to have a lower vapor concentration than the gas recovered from the facility for generating steam. Therefore, by further regenerating the adsorbent that has been regenerated with the gas recovered from one or a plurality of facilities with the gas recovered from the indoor space in which the facility is installed, while improving the energy balance of the adsorption system, It is also possible to prevent a decrease in the regeneration effect of the adsorbent. Thereby, effective use of the exhaust discharged from the destination to which the gas from which the vapor is adsorbed and removed is supplied is realized.

  Further, the adsorption removal means is an adsorption rotor carrying the adsorbent, and when the adsorption rotor rotates, a specific region of the adsorption rotor adsorbs and removes the vapor, the first regeneration It may have an adsorption rotor which makes a transition to the adsorption state again after transitioning in the order of the first regeneration state regenerated by the means and the second regeneration state regenerated by the second regeneration means.

  In the case of an adsorption rotor in which an adsorbent is supported on a rotor-like carrier, continuous adsorption treatment and regeneration treatment are realized by rotating the rotor. That is, in the case of an adsorption rotor, a treatment area for adsorbing vapor and a regeneration area for regenerating the adsorbent that adsorbed vapor are simultaneously formed on the same rotor. Therefore, it is suitable for the adsorption system that simultaneously regenerates the adsorbent with the gas recovered from the supply destination while supplying the gas to the predetermined supply destination.

  It is possible to make effective use of the exhaust discharged from the destination to which the gas from which the vapor is adsorbed and removed is supplied.

It is a lineblock diagram of the adsorption system concerning an embodiment. It is an example of the timing chart which showed the opening / closing state of each damper of an adsorption | suction system, and the relationship between the temperature and humidity of the exhaust_gas | exhaustion discharged | emitted from each apparatus. It is the figure which showed the state of the adsorption | suction system when the apparatus A has stopped and the apparatus B is drive | operating. It is the figure which showed the state of the adsorption | suction system when the apparatus B has stopped and the apparatus A is drive | operating. It is the figure which showed the location which makes trial calculation with the circle number. It is the table | surface which showed an example of the trial calculation value regarding the adsorption | suction system which concerns on embodiment. It is the table | surface which showed an example of the trial calculation value regarding the adsorption system which concerns on a comparative example. It is the figure which showed the modification around an adsorption | suction rotor. It is the figure which showed the modification of the adsorption | suction system. It is the graph which showed the temperature and humidity of the air in the exhaust_gas | exhaustion of an apparatus, and a low dew point room | chamber interior.

<Embodiment>
A configuration of an adsorption system according to an embodiment of the present invention is shown in FIG. As shown in FIG. 1, the suction system 1 according to the present embodiment includes a suction rotor 2, a suction fan 3, a regeneration fan 4, a precooler 5, and a heater 6. Is dehumidified. That is, the adsorption system 1 removes moisture contained in the outside air by the adsorption rotor 2 that adsorbs moisture in the air, and supplies air having a low dew point to the devices 7A and 7B. Therefore, the adsorption system 1 can also be regarded as a dehumidification system.

  The devices 7A and 7B are devices that require an operating environment with a low dew point. Examples of such devices include production facilities that require a low-humidity environment such as manufacturing processes for semiconductors and displays. In addition, the devices 7A and 7B are devices that perform processing involving moisture discharge. The apparatus 7A and the apparatus 7B are realized by manual control by an operator or automatic control by a computer or the like so that processing involving moisture discharge is performed at different timings.

  The adsorption rotor 2 carries an adsorbent mainly composed of synthetic zeolite, silica gel or the like inside a cylindrical member, and is configured such that gas flows along the axial direction inside. A section dividing cassette (not shown) is arranged on both end faces of the suction rotor 2, and the cassette passes through the air passage area of the suction rotor 2 into at least three sections. The suction rotor 2 is rotatable relative to the section division cassette, and by this cassette, the suction region K, the first regeneration region S1, and the second regeneration region S2 are formed in the suction rotor 2. . The suction rotor 2 is not limited to one divided into three regions, and for example, a purge region or a preheating region may be further divided. As the adsorption rotor 2 rotates in the direction indicated by the arrow in FIG. 1, the adsorbent carried in a specific region of the adsorption rotor 2 transitions in the order of adsorption state, first regeneration state, and second regeneration state. After that, it transitions to the adsorption state again.

  The outside air sent from the suction fan 3 and cooled by the precooler 5 passes through the suction region K. The adsorbent in the adsorption region K adsorbs moisture in the aerated air and discharges low dew point air. The discharged low dew point air is temperature-adjusted by the heater 6 and then supplied to the devices 7A and 7B through the air supply paths 8, 8A and 8B.

  Of the both sides of the adsorption region K, the first regeneration region S1 adjacent to the rotation direction side of the adsorption rotor 2 and the second regeneration region S2 adjacent to the rotation direction side of the adsorption rotor 2 out of both sides of the first regeneration region S1. In this case, each device from the suction region K of the suction rotor 2 is recovered from each device 7A, 7B by the suction force of the regeneration fan 4 arranged downstream of the first regeneration region S1 and the second regeneration region S2. The air supplied to 7A and 7B passes through. Note that the regeneration fan 4 may be omitted if each of the devices 7A and 7B is provided with a fan, for example, so as to constantly exhaust the air flow necessary for regeneration of the adsorption rotor 2.

  The first exhaust path 9-1 connected to the first regeneration region S1 (which is an example of the “first regeneration means” in the present application) includes the apparatus exhaust path 10AA connected to the apparatus 7A and the apparatus connected to the apparatus 7B. An exhaust path 10BA is connected. The apparatus exhaust path 10AA is provided with a damper 11AA, and the apparatus exhaust path 10BA is provided with a damper 11BA. Therefore, by controlling the opening / closing states of the damper 11AA and the damper 11BA, the exhaust source of the air passing through the first regeneration region S1 can be selected from either the device 7A or the device 7B.

In the second exhaust path 9-2 connected to the second regeneration region S2 (which is an example of “second regeneration means” in the present application), an apparatus exhaust path 10AB connected to the apparatus 7A and an apparatus connected to the apparatus 7B An exhaust path 10BB is connected. A damper 11AB is provided in the apparatus exhaust path 10AB, and a damper 11BB is provided in the apparatus exhaust path 10BB. Therefore, the exhaust source of the air passing through the second regeneration region S2 can be selected from either the device 7A or the device 7B by controlling the open / close state of the damper 11AB and the damper 11BB.

  The suction fan 3 is an electric air fan that takes in outside air and supplies it to the suction region K of the suction rotor 2. The precooler 5 provided on the downstream side of the suction fan 3 lowers the temperature of the air to be treated as a process before the dehumidification by the suction rotor 2. Along with this, the outside air is condensed to remove moisture, and a dehumidifying effect can be expected.

  Since the performance of the adsorbent is greatly influenced by the temperature of the processing air, in the adsorption system 1 according to the present embodiment, the adsorption area K of the adsorption rotor 2 is reduced by providing the precooler 5 to lower the temperature of the processing air. The dew point temperature of the passed air is lowered. Further, the air that has passed through the adsorption region K of the adsorption rotor 2 is heated by the heater 6 in order to stably control the temperature of the air supplied to the devices 7A and 7B. The heater 6 may be an electric heater that generates heat by electricity, or may be a condenser (condenser) of a heat pump system that generates cold heat to be supplied to the precooler 5 or other devices.

  In the adsorption system 1 configured as described above, the following adsorption process and regeneration process are realized. An example of a timing chart showing the relationship between the open / close state of each damper of the adsorption system 1 and the temperature and humidity of the exhaust gas discharged from each of the devices 7A and 7B when the adsorption system 1 realizes the adsorption process and the regeneration process Is shown in FIG. When the adsorption system 1 is activated and each damper and each of the devices 7A and 7B of the adsorption system 1 are periodically controlled according to the timing chart shown in FIG. 2, the adsorption system 1 realizes the following adsorption processing and regeneration processing. Is done.

  Here, in order to effectively regenerate the adsorbent of the adsorption rotor 2, it is desirable that the relative humidity of the air flowing through the regeneration region is low. In particular, it is effective to improve the dehumidifying performance of the adsorption rotor 2 by flowing air having a humidity lower than that of the air flowing in the first regeneration region S1 to the second regeneration region S2. Since the adsorbent carried on the rotating adsorption rotor 2 transitions to the adsorption state after the second regeneration state, if the relative humidity of the air flowing to the second regeneration region S2 is kept low, the adsorption region This is because the dehumidifying performance of the K adsorbent is enhanced. Therefore, the adsorption system 1 according to the present embodiment is operated as follows.

  FIG. 3 shows the state of the adsorption system 1 when the apparatus 7A is stopped and the apparatus 7B is operating. For example, when the device 7A is stopped and the device 7B is operating, the device 7B discharges moisture, and the device 7A does not discharge moisture (in this case, the device 7B is used in the present application). The device 7A corresponds to a “part different from the specific part” in the present application). Therefore, the dampers 11AA and 11BB are closed, and the dampers 11AB and 11BA are opened. Each damper may be opened and closed by a manual operation corresponding to the operating state of the devices 7A and 7B, or may be automatically opened and closed based on a signal indicating the operating state of the devices 7A and 7B. You may open and close automatically based on the output signal of the sensor which measures the temperature and humidity of the exhaust gas discharged from 7B.

In the adsorption system 1 in such a state, the air dehumidified in the adsorption region K and supplied to the device 7A passes through the first regeneration region S1 of the adsorption rotor 2 while maintaining a low dew point temperature state. Further, the air dehumidified in the adsorption region K and supplied to the device 7B passes through the second regeneration region S2 of the adsorption rotor 2 in a state including moisture discharged from the device 7B. Therefore, in the first regeneration region S1 in which the adsorption capacity is restored to a medium level, regeneration processing using air flowing from the device 7B via the device exhaust path 10BA and the first exhaust path 9-1 is performed. Further, in the second regeneration region S2 in which the adsorption capacity is restored to the initial state at a high level, regeneration processing by air flowing from the device 7A via the device exhaust path 10AB and the second exhaust path 9-2 is performed. Is called. The air flowing from the device 7A has a lower dew point temperature than the air flowing from the device 7B. As a result, the adsorbent preliminarily regenerated in the first regeneration region S1 is regenerated in the second regeneration region S2 to the extent that there is no problem with the adsorption process in at least the adsorption region K.

  FIG. 4 shows the state of the adsorption system 1 when the apparatus 7B is stopped and the apparatus 7A is operating. For example, when the device 7B is stopped and the device 7A is operating, the device 7A discharges moisture, and the device 7B does not discharge moisture (in this case, the device 7A is used in the present application). The device 7B corresponds to a “part different from the specific part” in the present application). Therefore, the dampers 11AB and 11BA are closed, and the dampers 11AA and 11BB are opened.

  In the adsorption system 1 in such a state, the air dehumidified in the adsorption region K and supplied to the device 7A includes moisture discharged from the device 7A, and the first regeneration region S1 of the adsorption rotor 2 is included. Pass through. The air dehumidified in the adsorption region K and supplied to the device 7B passes through the second regeneration region S2 of the adsorption rotor 2 while maintaining the low dew point temperature state. Therefore, in the first regeneration region S1, regeneration processing using air flowing from the device 7A via the device exhaust path 10AA and the first exhaust path 9-1 is performed. In the first regeneration region S1, regeneration processing using air flowing from the device 7B via the device exhaust path 10BB and the second exhaust path 9-2 is performed. The air flowing from the device 7B has a dew point temperature lower than the air flowing from the device 7A. As a result, the adsorbent preliminarily regenerated in the first regeneration region S1 is regenerated in the second regeneration region S2 to the extent that there is no problem with the adsorption process in at least the adsorption region K.

  In the case of the adsorption system 1 according to the present embodiment, the air flowing from the device 7A and the air flowing from the device 7B are not divided into the first regeneration region S1 and the second regeneration region S2 as in the present embodiment. The adsorbent of the adsorption rotor 2 is effectively regenerated as compared with the case where the regeneration process is performed with air mixed with air (hereinafter referred to as a comparative example). Thereby, the exhaust gas discharged from the devices 7A and 7B can be effectively used, and the dew point temperature of the air supplied to the devices 7A and 7B can be lowered.

  In addition, since the adsorption system 1 according to the present embodiment uses the exhaust of the devices 7A and 7B for the regeneration of the adsorption rotor 2, the exhaust is exhausted when the temperature of the exhaust discharged from the devices 7A and 7B is somewhat high. This heat can be used for the regeneration of the adsorption rotor 2 without waste.

  The estimated value of the state of the air passing through the adsorption rotor 2 is shown below. FIG. 5 illustrates the places where trial calculation is performed (hereinafter referred to as trial calculation sections) with circled numbers. FIG. 6 is a table showing an example of estimated values of the state of air passing through the suction rotor 2 according to the present embodiment. Further, FIG. 7 shows an estimated value of the state of the air passing through the adsorption rotor when the air exhausted from each of the devices A and B is used for regeneration of the adsorbent as a comparative example. It is the table | surface which showed an example of the same as FIG.

  In the adsorption system 1 according to the present embodiment, the trial location No. 1 (outside air) and trial location No. 2 (treatment area entrance), No. 2 3 (treatment area exit), No. 3 5 (entrance to the second reproduction region S2), No. 5 6 (exit of the second reproduction area S2), No. 6 7 (entrance of the first reproduction area S1), No. 7 It is assumed that the state of each air passing through 8 (the exit of the first regeneration region S1) is, for example, as shown in the table of FIG. In this case, the trial location No. 5 (inlet of the second regeneration area S2) has an absolute humidity of 0.0157 g / kgDA, 7 (the inlet of the first regeneration area S1) is 21.00 g / kgDA, the trial location No. 4 (supply air to the devices 7A and 7B) is 0.0157 g / kgDA and the dew point temperature can be estimated to be −53.44 ° C.

  On the other hand, in the comparative example, the trial location No. 1-3, no. It is assumed that the state of each air passing through 5 to 8 is a state as shown in the table of FIG. In the comparative example, since the air mixed from the air flowing from the device 7A and the air flowing from the device 7B flows to the regeneration region, the trial calculation part No. No. 5 and trial calculation part No. The air condition of 7 is the same. Trial point No. When the absolute humidity of 5 and 7 is 10.51 g / kgDA, the trial location No. 4 (supply air to the devices 7A and 7B) is 0.716 g / kgDA and the dew point temperature is -18.75 ° C.

  From the calculation results of the adsorption system 1 according to the present embodiment and the comparative example, the adsorption system 1 according to the present embodiment is compared with the case where the adsorbent is regenerated with the air mixed from the air flowing from the device 7A and the air flowing from the device 7B. It can be seen that the partitioning of the regeneration region as described above can effectively regenerate the adsorbent and maintain the dehumidifying performance of the adsorption rotor 2 in a high state.

<Modification>
In the above embodiment, as shown in FIG. 2, the operating states of the devices 7A and 7B are periodically switched. However, the above embodiment is not limited to the operation according to such a timing chart. Absent. The adsorption system 1 according to the above embodiment may be operated, for example, so as to maintain the operating state of one of the devices 7A and 7B and maintain the stopped state of the other device.

  Moreover, in the said embodiment, although it comprised so that the air which passed the apparatus which has stopped among apparatus 7A and apparatus 7B may pass 2nd reproduction | regeneration area | region S2, the said embodiment is such an aspect. It is not limited to. In the adsorption system 1 according to the embodiment, for example, an air bypass path is provided in a stopped apparatus among the apparatuses 7A and 7B so that air passing through the bypass path is vented to the second regeneration region S2. May be.

  In the above embodiment, the air passing through the first regeneration area S1 and the second regeneration area S2 is sucked by one fan (regeneration fan 4). It is not limited to such an aspect. For example, the adsorption system 1 according to the embodiment may separately include a fan that sucks air that passes through the first regeneration region S1 and a fan that sucks air that passes through the second regeneration region S2. . When fans are provided separately, each fan can be provided upstream of each reproduction area.

  Moreover, in the said embodiment, although the air supplied to apparatus 7A, 7B was dehumidified, the said embodiment is not limited to such an aspect. In the adsorption system 1 according to the above embodiment, for example, the device 7A may be a first facility group having one or more facilities, and the device 7B may be a second facility group having one or more facilities. In this case, the second equipment group is operated at a timing different from that of the first equipment group. Even when supplying dehumidified air to a facility group having a large number of facilities, the adsorption system 1 according to the above embodiment is applied if the large number of facilities are divided into at least two facility groups. It is possible.

  Moreover, in the said embodiment, although the case where it applies to the two apparatuses 7A and 7B was made into an example, the said embodiment is not limited to such an aspect. The adsorption system 1 according to the above embodiment may be applied to, for example, three or more devices. In this case, the regeneration area formed in the suction rotor 2 may be partitioned into two regeneration areas as described above, but may be partitioned into three or more, for example. Even when the regeneration region is divided into three or more, as in the case of dividing the regeneration region into two, the adsorbent carried on the adsorption rotor 2 passes through each regeneration region in turn due to the rotation of the adsorption rotor 2, and the adsorbent A device for exhausting air flowing through each regeneration region is appropriately selected so that air for regenerating the air gradually becomes low-humidity air.

  Moreover, in the said embodiment, the moisture in the air was adsorbed and removed, and dehumidification was performed, However, The adsorption system 1 which concerns on the said embodiment is not limited to such an aspect. For example, the adsorption system 1 according to the above-described embodiment may be configured to adsorb and remove moisture contained in a gas other than air to perform dehumidification, or various types of vapor other than moisture (for example, vapor of a volatile solvent). ) May be adsorbed.

  Moreover, in the said embodiment, although the air which passed the adsorption | suction area | region K was heated with the heater 6, the adsorption | suction system 1 which concerns on the said embodiment is not limited to such an aspect. A modification around the suction rotor 2 of the suction system 1 according to the above embodiment is shown in FIG.

  For example, as shown in FIG. 8, the adsorption system 1 according to the embodiment includes a heater 16 that heats air flowing into the first regeneration region S1 and the second regeneration region S2. Further, instead of the heater 6, an after cooler 12 that cools the air that has passed through the adsorption region K is provided. The aftercooler 12 is disposed for the purpose of cooling the high-temperature air that has passed through the adsorption region K where the heat of the heater 16 remains. Even if the adsorption system 1 according to the above embodiment is modified in this way, the adsorbent can be effectively regenerated and the dehumidifying performance of the adsorption rotor 2 can be maintained in a high state.

  Moreover, in the said embodiment, although air was collect | recovered directly from each apparatus 7A, 7B, the adsorption | suction system 1 which concerns on the said embodiment is not limited to such an aspect. A modification of the adsorption system 1 according to the above embodiment is shown in FIG.

  For example, as shown in FIG. 9, the adsorption system 1 according to the embodiment may be applied to the case where the air supplied to the low dew point chamber 13 in which the apparatus 17 is installed is dehumidified. The first exhaust path 19-1 connected to the first regeneration region S 1 is connected to the device 17 installed in the low dew point chamber 13, and the space in the low dew point chamber 13 from the adsorption region K of the adsorption rotor 2. Then, the air supplied to the device 17 is collected from the device 17 and flows into the first regeneration region S1. Further, the second exhaust path 19-2 connected to the second regeneration region S2 is connected to the low dew point chamber 13, and the air supplied from the adsorption region K of the adsorption rotor 2 into the low dew point chamber 13 is reduced to the low dew point. It collect | recovers from the chamber 13 and flows into 2nd reproduction | regeneration area | region S2. In FIG. 9, only one device 17 is installed in the low dew point chamber 13, but a plurality of devices may be installed.

  FIG. 10 is a graph showing the temperature and humidity of the exhaust in the apparatus 17 according to this modification and the air in the low dew point chamber 13. The temperature and humidity of the air in the low dew point chamber 13 where the apparatus 17 is placed are lower than the temperature and humidity of the exhaust of the apparatus 17. Therefore, as described above, the air exhausted from the device 17 is caused to flow to the first regeneration region S1 through the first exhaust path 19-1, and the air in the low dew point chamber 13 is lower in humidity than the air exhausted from the device 17. It can be seen that the dehumidifying performance of the adsorption rotor 2 can be effectively enhanced by flowing air to the second regeneration region S2 through the second exhaust path 19-2.

  Moreover, in the said embodiment, although the dehumidification was performed with the adsorption | suction rotor 2 which carry | supported the adsorption agent, the adsorption system 1 which concerns on the said embodiment is not limited to such an aspect. The adsorption system 1 according to the above embodiment may be dehumidified by an adsorption tower containing an adsorbent, for example, instead of the adsorption rotor 2. In this case, at least three adsorption towers are provided in the adsorption system 1. Then, after each of the adsorption towers flows into the adsorption state by flowing the air flowing from the adsorption fan 3, the air flowing from the first exhaust path 9-1 is flowed into the first regeneration state. The flow of air in each flow path is controlled by dampers so that the air flowing from the second exhaust path 9-2 flows and transitions to the second regeneration state, and then transitions to the adsorption state again. Even if the adsorption rotor 2 of the adsorption system 1 according to the above embodiment is replaced with an adsorption tower, the dehumidifying performance of the adsorption tower can be effectively enhanced as in the adsorption system 1 according to the above embodiment.

  Moreover, the supply destination of low-humidity air is not limited to a room or an apparatus. For example, the present invention can be applied to a process of cleaning a plurality of large cans and supplying hot dry air after cleaning. That is, the exhaust gas is exhausted outside the can for a while after cleaning, but the high-temperature exhaust gas can be reused as the adsorbent when the humidity of the exhaust gas becomes a certain level or less. Furthermore, the present invention can also be applied to the case where the low-humidity air generated by the rotor-type dehumidifier is used for, for example, regeneration of the adsorbent of the pressure swing type adsorption tower and the adsorption tower is regenerated alternately.

1 ・ ・ Suction system: 2 ・ ・ Suction rotor: K ・ ・ Suction area: S1 ・ ・ First regeneration area: S2 ・ ・ Second regeneration area: 3 ・ ・ Suction fan: 4 ・ ・ Regeneration fan: 5 ・-Precooler: 6, 16-Heater: 7A, 7B, 17-Apparatus: 8, 8A, 8B-Air supply path: 9-1, 19-1-First exhaust path: 9-2, 19 -Second exhaust path: 10AA, 10AB, 10BA, 10BB ... Equipment exhaust path: 11AA, 11AB, 11BA, 11BB ... Dampers: 12 ... Aftercooler: 13 ... Low dew point chamber

Claims (4)

An adsorption system for adsorbing vapor contained in a gas supplied to a predetermined supply destination,
An adsorption / removal unit that has an adsorbent capable of adsorbing the vapor, and that adsorbs and removes the vapor contained in the gas supplied to the predetermined supply destination;
A first regeneration means for recovering the gas supplied to the predetermined supply destination from a specific part of the predetermined supply destination, and venting the recovered gas through the adsorbent to regenerate the adsorbent;
Of the gas supplied to the predetermined supply destination, a gas having a lower vapor concentration than the gas recovered by the first regeneration means is recovered from a part different from the specific part of the predetermined supply destination, and recovered. A second regenerating means for regenerating the adsorbent by passing the gas that has been regenerated to the adsorbent after the first regenerating means has regenerated,
Adsorption system. The predetermined supply destination includes a plurality of facilities, a first facility group including any one or a plurality of facilities among the plurality of facilities, and the first facility group among the plurality of facilities. A plurality of facilities having a second facility group including any one or a plurality of facilities that generate the steam at a different timing from the facilities that comprise,
The first regeneration means regenerates the adsorbent by ventilating the adsorbent with a gas recovered from the equipment group that is generating the steam among the first equipment group and the second equipment group. ,
The second regeneration unit is configured to regenerate the gas recovered from the facility group in which the steam is not generated out of the first facility group and the second facility group after the first regeneration unit regenerates the gas. Aeration of the adsorbent to regenerate the adsorbent;
The adsorption system according to claim 1. The predetermined supply destination is an indoor space in which one or a plurality of facilities for generating the steam is installed,
The first regeneration means regenerates the adsorbent by venting exhaust gas of the one or more facilities to the adsorbent,
The second regeneration means regenerates the adsorbent by venting the gas in the indoor space to the adsorbent.
The adsorption system according to claim 1. The adsorption removal means is an adsorption rotor that carries the adsorbent, and when the adsorption rotor rotates, a specific region of the adsorption rotor is in an adsorption state in which the vapor is adsorbed and removed by the first regeneration means. Having a suction rotor that transitions to the suction state again after transitioning in the order of the first regeneration state to be regenerated and the second regeneration state to be regenerated by the second regeneration means;
The adsorption system according to any one of claims 1 to 3.

Images