JP5681435B2 - Gas dehumidifier - Google Patents

Description

  The present invention relates to a gas dehumidifier.

  In various devices such as a glove box, a gas space filled with an inert gas or the like is formed. As a dehumidifying device for adjusting the humidity of such a gas space, for example, a device that removes moisture with a hygroscopic material as in a desiccant method, a device that condenses and removes moisture as in a compressor method, or these A hybrid system combining the above has been devised. The desiccant method is effective for extremely reducing the dew point temperature in the gas space, but exhaust gas is inevitably generated due to the regeneration principle of the hygroscopic material. As a technique for reducing the loss of exhaust gas, for example, a dehumidifying device as disclosed in Patent Document 1 has been proposed.

JP 2005-74387 A JP-A-6-63350

  The desiccant method must be adopted to extremely reduce the dew point temperature in the gas space. However, if the processing capacity of the dehumidifier is large, the amount of exhaust gas during regeneration becomes enormous. If a lower-level dehumidifier that further dehumidifies the high-humidity exhaust gas exhausted from the upper dehumidifier is installed in series, the amount of exhaust gas that is finally discharged out of the system from the terminal dehumidifier is minimized. However, exhaust gas cannot be completely eliminated, and providing many dehumidifiers may increase initial costs and running costs.

  This invention is made in view of such a subject, and makes it a subject to provide the dehumidification apparatus which does not discharge gas outside a system, dehumidifying the gas in gas space by a desiccant system. .

  In order to solve the above-mentioned problems, the present invention provides a desiccant dehumidifier for dehumidifying a specific gas circulating in a circulation path, and the regenerated exhaust gas exhausted from the dehumidifier upon heating regeneration is used as one or more desiccant dehumidifiers. The auxiliary dehumidifying part formed by the machine dehumidifies, and the regeneration exhaust gas of the desiccant dehumidifier forming the auxiliary dehumidifying part is dehumidified by the condensation dehumidifier.

  Specifically, it is a gas dehumidifying device for dehumidifying a specific gas circulating in the circulation path, and is exhausted from the main desiccant dehumidifier for dehumidifying the gas flowing in the circulation path and from the main desiccant dehumidifier along with heat regeneration. Regeneration of the main desiccant dehumidifier formed by a desiccant dehumidifier group in which a plurality of desiccant dehumidifiers dehumidifying the regenerated exhaust gas of a higher desiccant dehumidifier or a plurality of desiccant dehumidifiers connected in series is dehumidified. An auxiliary dehumidifying unit that dehumidifies the exhaust gas and the regeneration exhaust gas of the one desiccant dehumidifier, or the moisture in the regeneration exhaust gas of the lowest desiccant dehumidifier in the desiccant dehumidifier group is condensed, A condensation dehumidifier for dehumidification.

Here, the circulation path is a path through which the gas to be dehumidified circulates, and is a path in which a main desiccant dehumidifier is provided. This circulation path means a gas space to be dehumidified filled with a specific gas, and is a concept including not only a space in a circulation path formed by piping but also a space formed in a production apparatus, for example. . As a circulation route that requires continuous dehumidification, for example, when various products are brought into the gas space, moisture is taken in at the same time, or when fresh specific gas is put into the gas space, it is taken in together. For example, a path through which moisture that enters the gas space, moisture that enters from the inside / outside boundary of the gas space, or vapor of a solvent that volatilizes due to chemical treatment or the like performed in the gas space can be exemplified. In the gas dehumidifier, an exhaust gas path through which a regenerated exhaust gas exhausted during regeneration from the main desiccant dehumidifier flows, and one or a plurality of desiccant dehumidifiers are provided in the exhaust gas path provided separately from the circulation path. The auxiliary dehumidifying part is formed by these desiccant dehumidifiers provided in the exhaust gas path. The humid regenerated exhaust gas exhausted from the desiccant dehumidifier located higher in the exhaust gas path is dehumidified by the lower desiccant dehumidifier, and the humid regenerated exhaust gas exhausted from the desiccant dehumidifier is further dehumidified by the lower desiccant dehumidifier. For example, the moisture concentration of the regenerated exhaust gas exhausted from the lower desiccant dehumidifier is increased by performing dehumidification of the gas in the exhaust gas path in multiple stages using a plurality of desiccant dehumidifiers. The desiccant dehumidifier located at the top in the exhaust gas path is the main desiccant dehumidifier. As a result, even if the dew point temperature of the specific gas circulating in the circulation path is set to be extremely low, the dew point temperature of the regenerated exhaust gas exhausted from the lower desiccant dehumidifier in the exhaust gas path increases, With the dehumidifier, the moisture in the regenerated exhaust gas can be sufficiently condensed and dehumidified. The exhaust gas path is a path through which the regenerated exhaust gas exhausted during regeneration from the main desiccant dehumidifier flows, and is a path different from the circulation path, but is filled with the specific gas in the same manner as the circulation path. It is a route.

  Here, since the condensation dehumidifier does not use a hygroscopic material unlike the desiccant dehumidifier, regeneration is unnecessary. That is, in the case of a condensation dehumidifier, unnecessary gas is not generated by heat regeneration unlike a desiccant dehumidifier. Therefore, with the gas dehumidifier, the gas circulating in the circulation path can be kept at a very low dew point temperature by the desiccant dehumidifier without discharging the gas in the gas space to the outside of the system.

  The auxiliary dehumidifying unit is formed by a desiccant dehumidifier group in which a plurality of desiccant dehumidifiers for dehumidifying the regenerated exhaust gas of the upper desiccant dehumidifier is connected in series, and the condensed dehumidifier is the desiccant dehumidifier group. Of the lowermost desiccant dehumidifier is exhausted and again sucked into the lowermost desiccant dehumidifier, the moisture in the regenerated exhaust gas of the lowest desiccant dehumidifier is condensed to dehumidify the regenerated exhaust gas. It may be a thing. If the dehumidifying device is configured in this way, the dew point temperature of the regenerated exhaust gas flowing into the condensation dehumidifier becomes high, so that the dehumidification efficiency of the condensation dehumidifier increases.

  Further, the auxiliary dehumidifying unit is formed by a desiccant dehumidifier group in which a plurality of desiccant dehumidifiers for dehumidifying the regeneration exhaust gas of the upper desiccant dehumidifier is connected in series, and the main desiccant dehumidifier is the desiccant dehumidifier. The gas that has been dehumidified by the highest desiccant dehumidifier in the group (ie, the desiccant dehumidifier that directly dehumidifies the circulation path) and the gas that circulates through the circulation path may be sucked and dehumidified. If the dehumidifying device is configured in this way, even if the gas is not sufficiently dehumidified in the auxiliary dehumidifier, the gas having a high dew point temperature does not flow into the circulation path.

  Further, each of the desiccant dehumidifiers forming the main desiccant dehumidifier and the auxiliary dehumidifier may be dehumidified by a rotary dehumidification rotor carrying a moisture absorbent. If the dehumidifying device is configured in this way, stable dehumidifying treatment can be realized by continuous operation.

Each of the desiccant dehumidifiers forming the auxiliary dehumidifying unit may have a rated processing amount that is substantially equivalent to the regeneration exhaust gas of the upper desiccant dehumidifier. With the dehumidifier configured as described above, the capacity of the auxiliary dehumidifier becomes the minimum necessary, and the running cost of the entire apparatus can be reduced while suppressing gas consumption.

  While dehumidifying the gas in the gas space by the desiccant method, the gas is not discharged out of the system.

It is a block diagram of a dehumidification apparatus. It is a 1st example of the two-stage type dehumidification apparatus which concerns on a prior art example. It is a 2nd example of the two-stage type dehumidification apparatus which concerns on a prior art example. It is a block diagram of the dehumidification apparatus which concerns on a 1st modification. It is a block diagram of the dehumidification apparatus which concerns on a 2nd modification.

  A configuration of a dehumidifying apparatus according to an embodiment of the present invention is shown in FIG. As shown in FIG. 1, the dehumidifier 1 includes a main dehumidifier 10 (corresponding to a main desiccant dehumidifier in the present invention), and an auxiliary dehumidifier having a first auxiliary dehumidifier 10A and a second auxiliary dehumidifier 10B. 10x (a set of the first auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B corresponds to the desiccant dehumidifier group in the present invention). The dehumidifier 1 is preferably used for removing moisture contained in a so-called inert gas such as nitrogen gas or argon gas, but for removing moisture contained in other gases (for example, air). It may be used.

  As shown in FIG. 1, the main dehumidifier 10 includes a dehumidification rotor 11, a processing fan 12, a regeneration fan 13, a precooler 14, and a heating device 15.

  The dehumidification rotor 11 carries an adsorbent mainly composed of synthetic zeolite, silica gel, or the like inside a cylindrical member, and is configured so that gas flows along the axial direction inside. A section division cassette (not shown) is arranged on both end faces of the dehumidifying rotor 11, and the gas passage area of the dehumidifying rotor 11 is divided into three sections by this cassette. The dehumidification rotor 11 is rotatable relative to the section division cassette, and a processing region R1, a regeneration region R2, and a purge region R3 are formed in the dehumidification rotor 11 by this cassette.

  The gas supplied from the processing fan 12 and cooled by the precooler 14 passes through the processing region R1. The treatment region R1 adsorbs moisture in the aerated gas and discharges a low dew point gas having a dew point temperature of −50 degrees or less. The gas heated by the heating device 15 passes through the regeneration region R2. The regeneration region R2 releases the adsorbed moisture by being heated. The purge region R3 is a region formed in the middle of a transition from a regeneration region R2 to a processing region R1 at a certain point of the dehumidifying rotor 11. The purge region R3 is a region for cooling the adsorbent in a high temperature state immediately after regeneration and before in-service, and is cooled by passing a part of the gas supplied from the processing fan 12 and cooled by the precooler 14. Is done. As the dehumidifying rotor 11 rotates in the direction indicated by the arrow in FIG. 1, the fixed point of the dehumidifying rotor 11 repeatedly changes in order of the processing region R1, the regeneration region R2, and the purge region R3.

The processing fan 12 is an electric fan that supplies the gas supplied to the main dehumidifier 10 to the processing region R1 and the purge region R3 formed in the dehumidifying rotor 11. The precooler 14 provided on the downstream side of the processing fan 12 lowers the temperature of the gas to be processed. Refrigerant supplied from a cooling facility such as a refrigerator flows through the precooler 14. The performance of the adsorbent depends greatly on the temperature of the gas being processed. For this reason, the main dehumidifier 10 stably controls the temperature and humidity of the gas emitted from the dehumidification rotor 11 by providing the precooler 14 and stabilizing the temperature of the gas.

  The heating device 15 heats the gas discharged from the purge region R3 and the gas that has been discharged from the regeneration region R2 and then returned to the same region, and then heated. The heating device 15 includes a heating device such as an electric heater, a steam coil, or a heat pump. The gas heated by the heating device 15 flows to the regeneration region R2. When the high-temperature gas heated by the heating device 15 passes through the regeneration region R2, the adsorbent in the regeneration region R2 is heated to a high temperature, and the water adsorbed on the adsorbent is released.

  As with the main dehumidifier 10, the first auxiliary dehumidifier 10A also includes a dehumidification rotor 11A, a processing fan 12A, a regeneration fan 13A, a precooler 14A, and a heating device 15A, as shown in FIG. The first auxiliary dehumidifier 10A has the same configuration as the main dehumidifier 10 except for the processing capacity. The processing capacity of the first auxiliary dehumidifier 10A is an ability to process the gas discharged from the regeneration region R2 of the main dehumidifier 10 to the outside of the main dehumidifier 10, and in the present embodiment, the first auxiliary dehumidifier The processing capacity of the machine 10A is designed to be one tenth of that of the main dehumidifier 10.

  Similarly to the main dehumidifier 10 and the first auxiliary dehumidifier 10A, the second auxiliary dehumidifier 10B includes a dehumidification rotor 11B, a processing fan 12B, a regeneration fan 13B, a precooler 14B, and a heating device 15B, as shown in FIG. ing. However, unlike the main dehumidifier 10 and the first auxiliary dehumidifier 10A, the second auxiliary dehumidifier 10B includes a dehumidifying cooler 16 (corresponding to a condensation dehumidifier in the present invention). The dehumidifying cooler 16 is a condenser that cools the gas exhausted from the regeneration fan 13B and condenses the moisture, and the condensed water is discharged out of the system through the drain pipe 17. That is, the dehumidifying cooler 16 has a built-in cooling coil in which the refrigerant flows in the pipe, and the moisture in the gas is condensed by the exhaust of the regeneration fan 13B passing through the cooling coil. The refrigerant flowing through the cooling coil of the dehumidifying cooler 16 may be of any component or property as long as it can cool the gas exhausted from the regeneration fan 13B and sufficiently condense the moisture. The dehumidifying cooler 16 does not need to be built in the second auxiliary dehumidifier 10B, and may be separate from the second auxiliary dehumidifier 10B.

  Further, the drain pipe 17 is provided with a gas-liquid separation means for allowing only drain water to pass therethrough, such as a drain trap, a U seal, or a steam separator, and preventing gas from passing therethrough, and gas exhausted from the regeneration fan 13B. Is configured not to leak out of the system via the drain pipe 17.

  In addition, the processing capacity of the second auxiliary dehumidifier 10B is an ability capable of processing the gas discharged from the regeneration region R2A of the first auxiliary dehumidifier 10A to the outside of the first auxiliary dehumidifier 10A. In the embodiment, the processing capacity of the first auxiliary dehumidifier 10A is designed to be one hundredth of the main dehumidifier 10 (tenth of the first auxiliary dehumidifier 10A).

In the dehumidifying apparatus 1 configured as described above, the following processing is realized by operating each device. When the flow rate of the gas that can be dehumidified by the dehumidifier 1 (corresponding to “return air” in FIG. 1) is 100, the flow rate of the gas flowing into the main dehumidifier 10 is 110. The breakdown is 100 for the return air from the predetermined device having the gas space and 10 for the gas from the first auxiliary dehumidifier 10A. In FIG. 1, the flow rate is shown by enclosing numbers. In FIG. 1, the main dehumidifier 10 is connected to a line for supplying nitrogen gas in addition to the ventilation from the predetermined device and the gas from the first auxiliary dehumidifier 10A. To compensate for gas leaks. The gas is replenished automatically by a pressure reducing valve, a solenoid valve or the like, or manually by a manual valve or the like. Here, the predetermined device is a device having a space filled with a gas to be dehumidified by the dehumidifying device 1, and is filled with, for example, nitrogen gas (which is one aspect of the specific gas referred to in the present invention). It refers to all types of equipment such as various manufacturing apparatuses and glove boxes that require a dew point temperature of −50 ° C. or lower.

  The gas that has flowed into the main dehumidifier 10 by the processing fan 12 is cooled by the precooler 14, and then flows at a rate of 100 to the processing region R <b> 1 formed in the dehumidifying rotor 11 and to a rate of 10 to the purge region R <b> 3. The gas that has flowed to the processing region R1 is dehumidified and then supplied to a predetermined device. As described above, the main dehumidifier 10 is arranged in such a way as to be interrupted in the middle of the path through which the gas supplied to a predetermined device circulates. Gas circulates in the circulation path.

  The gas passing through the purge region R3 is heated by the heat at the time of regeneration remaining in the purge region R3. This gas flows to the regeneration region R2 after being further heated by the heating device 15. The gas that has passed through the regeneration region R2 is sent to the first auxiliary dehumidifier 10A by the regeneration fan 13, but a part of the gas is returned toward the regeneration region R2 and merged with the gas that has exited from the purge region R3 to regenerate. It is sent again to region R2. The moisture adsorbed by the adsorbent in the regeneration region R2 is released by heating by the heating device 15 and is sent to the first auxiliary dehumidifier 10A.

  In the first auxiliary dehumidifier 10A, the same processing as that of the main dehumidifier 10 is performed. However, since the first auxiliary dehumidifier 10A dehumidifies the exhaust gas from the main dehumidifier 10 and the gas dehumidified by the second auxiliary dehumidifier 10B, the flow rate of the gas flowing into the first auxiliary dehumidifier 10A is as described above. 11 for the gas flow rate 100 flowing into the main dehumidifier 10. The gas exhausted from the main dehumidifier 10 merges with the gas dehumidified by the second auxiliary dehumidifier 10B, and flows into the processing region R1A of the dehumidifying rotor 11A by the processing fan 12A. The gas that has flowed into the first auxiliary dehumidifier 10A is cooled by the precooler 14A, and then flows to the treatment region R1A formed in the dehumidification rotor 11A at a rate of 10 and to the purge region R3A at a rate of 1. The gas that has flowed into the processing region R1A is sent to the main dehumidifier 10 after being dehumidified. When the gas dehumidified by the first auxiliary dehumidifier 10A is returned to the main dehumidifier 10, the gas can be effectively used and the cost for gas supply can be reduced.

  As with the main dehumidifier 10, the gas that has passed through the purge region R3A is heated by the heating device 15A and then flows to the regeneration region R2A. The gas that has passed through the regeneration region R2A is sent to the second auxiliary dehumidifier 10B by the regeneration fan 13A, part of which is returned toward the regeneration region R2A and merged with the gas that has exited from the purge region R3A to be regenerated. It is sent again to region R2A. The moisture adsorbed by the adsorbent in the regeneration region R2A is released by heating by the heating device 15A and is sent to the second auxiliary dehumidifier 10B. The heat of the gas passing through the regeneration region R2A includes heat in the regeneration exhaust gas of the main dehumidifier 10 that is discharged from the regeneration region R2 of the main dehumidifier 10 and flows into the regeneration region R2A through the purge region R3A. The heat generated by the heat regeneration of the main dehumidifier 10 is indirectly used for the heat regeneration of the first auxiliary dehumidifier 10A.

  In the second auxiliary dehumidifier 10B, the same processing as the main dehumidifier 10 and the first auxiliary dehumidifier 10A is performed. However, since the second auxiliary dehumidifier 10B dehumidifies the exhaust of the first auxiliary dehumidifier 10A, the flow rate of the gas flowing into the second auxiliary dehumidifier 10B is the gas flow rate flowing into the first auxiliary dehumidifier 10A. 11 to 11. The gas exhausted from the first auxiliary dehumidifier 10A merges with the gas dehumidified by the dehumidifying cooler 16, and flows into the dehumidifying rotor 11B by the processing fan 12B. After the gas flowing into the second auxiliary dehumidifier 10B is cooled by the precooler 14B, the flow rate is 1 to the processing region R1B formed in the dehumidification rotor 11B and the flow rate is 0.1 to the purge region R3A. The gas that has flowed to the processing region R1B is dehumidified and then sent to the first auxiliary dehumidifier 10A. By returning the gas dehumidified by the second auxiliary dehumidifier 10B to the first auxiliary dehumidifier 10A, the gas is effectively used and the cost for gas supply is reduced.

  The gas that has passed through the purge region R3B flows to the regeneration region R2B after being heated by the heating device 15B, like the main dehumidifier 10 and the first auxiliary dehumidifier 10A. The gas that has passed through the regeneration region R2B is sent to the processing fan 12B by the regeneration fan 13B, and passes through the dehumidifying cooler 16 at that time. The gas that has passed through the dehumidifying cooler 16 merges with the gas that has exited from the first auxiliary dehumidifier 10A, and is then sent to the processing fan 12B. The moisture adsorbed by the adsorbent in the regeneration region R2B is released from the adsorbent of the dehumidifying rotor 11B by heating by the heating device 15B, but becomes condensed water by the cooling coil of the dehumidifying cooler 16 and passes through the drain pipe. Are discharged outside the system. Thereby, moisture contained in the nitrogen gas space is completely separated from the nitrogen gas without causing the nitrogen gas to leak out of the system. Note that the heat of the gas passing through the regeneration region R2B is discharged from the regeneration region R2A of the first auxiliary dehumidifier 10A and flows into the regeneration region R2B through the purge region R3B into the regeneration exhaust gas of the first auxiliary dehumidifier 10A. The heat generated by the heat regeneration of the first auxiliary dehumidifier 10A is indirectly used for the heat regeneration of the second auxiliary dehumidifier 10B.

  In the first auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B described above, the introduced gas is taken in only from the upper dehumidifier and is not replenished from outside the system. In the case of a dehumidifying apparatus having no configuration, in other words, when the gas exhausted from the regeneration region R2 of the main dehumidifier 10 is released to the outside of the system as it is, the necessary gas supply amount is 10 (this gas supply amount is It may be appropriately changed within a range of 10 to 20% of the amount of return air from the predetermined device. On the other hand, when the first auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B are provided as in the dehumidifier 1 described above and the dehumidifying cooler 16 is provided in the second auxiliary dehumidifier 10B, the required amount of gas supply is theoretically. The top zero (actually there is a leak from the duct and each device, so it is necessary to supplement the leaked gas), and the cost of the gas to be replenished can be reduced.

  For example, as shown in FIG. 2, when the dehumidifying device has a two-stage configuration including two rotors, the gas replenishment amount can be reduced to about 0.5% of the total circulation amount. However, when the dehumidifying device has a two-stage configuration in this way, the device becomes larger and the amount of energy consumption increases, which requires a running cost that is about three times that of a single-stage device. The amount cannot be reduced to zero. Further, for example, as shown in FIG. 3, when an auxiliary dehumidifier that dehumidifies only the exhaust from the main dehumidifier is adopted and only the exhaust gas regenerated from the auxiliary dehumidifier is discharged outside the system, the auxiliary dehumidifier Since the amount of gas air to be processed is about 10% of the main dehumidifier, the amount of energy consumption of the apparatus can be increased by about 10% while reducing the gas replenishment amount to about 0.5. The running cost can be reduced as compared with the case of the two-stage configuration as described above. However, even if a configuration in which only the exhaust of the main dehumidifier as shown in FIG. 3 is dehumidified by the auxiliary dehumidifier, the amount of gas replenishment cannot be made zero.

  On the other hand, with the dehumidifying apparatus 1 according to the present embodiment, the amount of gas that needs to be replenished can theoretically be reduced to zero, so a significant reduction in running cost can be expected. That is, the exhaust of the main dehumidifier 10 that dehumidifies the space of nitrogen gas is dehumidified in two stages of the first auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B, so that the humidity of the gas discharged from the regeneration region R2B is reduced. The minute increases to a concentration that can be dehumidified by the cooling coil of the dehumidifying cooler 16. By dehumidifying this with the dehumidifying cooler 16, the gas space can be continuously dehumidified without discharging the gas to the outside of the system.

The second auxiliary dehumidifier 10B only needs to dehumidify about 1% of the total circulation amount of gas, so it may be very small and consumes less energy. For example, compared with a dehumidifying apparatus having a configuration as shown in FIG. 3, the increase in energy consumption due to the addition of the second auxiliary dehumidifier 10B is about 3% of the whole. On the other hand, if it is the dehumidification apparatus 1 which concerns on this embodiment, 0.5% of discharge | emissions exhausted out of the system can be made into zero. Therefore, for example, even if the increase in energy consumption is 100,000 yen / year, if the gas reduction is 5 million yen / year (in the case of nitrogen gas), the amount of addition of the second auxiliary dehumidifier 10B The costs are fully redeemable. Needless to say, if the unit price of gas is higher, further effects can be achieved.

  In the dehumidifying apparatus 1, moisture is discharged out of the system by the drain pipe 17, but for example, when the moisture in the gas space is not water but a useful solvent, the dehumidifying cooler is used. The solvent condensed in 16 can be recovered and stored or used effectively.

  In addition, you may deform | transform the said dehumidification apparatus 1 as follows. A first modification of the dehumidifier 1 is shown in FIG. The dehumidifying device 1 ′ shown in FIG. 4 is slightly different from that of the dehumidifying device 1 in the configuration of the main dehumidifier 10 ′ and the first auxiliary dehumidifier 10A ′ and the second auxiliary dehumidifier 10B ′ of the auxiliary dehumidifier 10x ′. doing. That is, in the main dehumidifier 10 of the dehumidifying apparatus 1 according to the above embodiment, a part of the gas that has passed through the regeneration region R2 is again heated by the heating device 15 and flows again into the regeneration region R2. In the modification, as shown in FIG. 4, a configuration is adopted in which all the gas that has passed through the regeneration region R2 flows to the first auxiliary dehumidifier 10A ′. The same applies to the first auxiliary dehumidifier 10A 'and the second auxiliary dehumidifier 10B'. Even with such a dehumidifying apparatus 1 ′, the amount of gas replenishment can be reduced without significantly increasing the amount of energy consumed, as in the dehumidifying apparatus 1 according to the embodiment.

  The dehumidifying device 1 may be modified as follows. A second modification of the dehumidifying device 1 is shown in FIG. The dehumidifying device 1 ″ shown in FIG. 5 is slightly different from that of the dehumidifying device 1 in the configuration of the main dehumidifier 10 ″ and the first auxiliary dehumidifier 10A ″ and the second auxiliary dehumidifier 10B ″ of the auxiliary dehumidifying unit 10x ″. That is, in the main dehumidifying device 10 of the dehumidifying device 1 according to the above embodiment, after a part of the gas flowing from the processing fan 12 to the processing region R1 is diverted to the purge region R3 and passes through the purge region R3. In the present modification, as shown in FIG. 5, a part of the gas after passing through the processing region R1 is diverted to the purge region R3 and exits from the regeneration region R2. The same applies to the first auxiliary dehumidifier 10A ″ and the second auxiliary dehumidifier 10B ″. Even with such a dehumidifier 1 ″, the dehumidifier according to the embodiment is used. As in 1, the energy consumption It can be reduced gas replenishment amount without increasing the width.

  The dehumidifying device 1 may be modified as follows. In the dehumidifier 1, the exhaust of the main dehumidifier 10 is processed by the two first auxiliary dehumidifiers 10A and the second auxiliary dehumidifier 10B. For example, the exhaust of one or a plurality of main dehumidifiers is You may process with one auxiliary dehumidifier provided with the dehumidification cooler, or you may process the exhaust_gas | exhaustion from one main dehumidifier with three or more auxiliary dehumidifiers. The number of each dehumidifier is appropriately determined according to the target moisture concentration of the gas space.

  The dehumidifier 1 may be a combination of the main dehumidifier shown in FIG. 1 and the auxiliary dehumidifier shown in FIGS. 4 and 5. For example, the main dehumidifier 1 shown in FIG. The first auxiliary dehumidifier 10A ′ and the second auxiliary dehumidifier 10B ′ or the first auxiliary dehumidifier 10A ″ and the second auxiliary dehumidifier 10B ″ of FIG. 5 are combined, or the main dehumidifier 1 ′ of FIG. The first auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B or the first auxiliary dehumidifier 10A "and the second auxiliary dehumidifier 10B" of FIG. 5 are combined, or the main dehumidifier 1 "of FIG. The auxiliary dehumidifier 10A and the second auxiliary dehumidifier 10B or the first auxiliary dehumidifier 10A ′ and the second auxiliary dehumidifier 10B ′ of FIG. 4 may be combined.

  Moreover, in the said embodiment and modification, although the dehumidification capability of the low-order dehumidification apparatus was set to about 10% of a high-order dehumidification apparatus, this invention is a dehumidification apparatus of a high-order dehumidification device. If it is in the range of about 10 to 20%, it can be suitably operated. That is, the dehumidifying capacity of the first auxiliary dehumidifier 10A is set to about 10 to 20% of the main dehumidifier 1, and the dehumidifying capacity of the second auxiliary dehumidifier 10B is set to about 1 to 4% of the main dehumidifier 1. Note that these limit values are appropriately determined according to the amount of moisture generated, the regeneration capability of each dehumidifier, and the like.

  In addition, operation control of each dehumidifier can be performed as follows, for example. For example, a control device is provided in the dehumidifier 1 according to the embodiment, and the control device is configured to control the main dehumidifier 1 based on the temperature difference between the inlet temperature and the outlet temperature of the gas passing through the processing region R1 of the main dehumidifier 1. The dehumidifying amount is detected, and the heating device 15A of the first auxiliary dehumidifier 10A and the heating device 15B of the second auxiliary dehumidifier 10B are controlled based on the detected amount so that the dehumidifying amount of the main dehumidifier 1 is made constant. May be. In this case, the correlation between the temperature difference and the heating amount of the heating device is specified based on, for example, a function or map created in advance. Since the dehumidification amount of the main dehumidifier 1 is proportional to the amount of drainage of condensed water finally discharged out of the system through the drain pipe 17, the dehumidification amount of the main dehumidifier 1 decreases and the gas passing through the treatment region R1 is reduced. When the temperature difference between the inlet temperature and the outlet temperature is small, the amount of heat generated by each heating device is increased to increase the amount of condensed water discharged outside the system. In addition, when the dehumidification amount of the main dehumidifier 1 is increased and the temperature difference between the inlet temperature and the outlet temperature of the gas passing through the processing capacity R1 is increased, the amount of heat generated by each heating device is reduced and the condensation is discharged out of the system. Reduce water discharge. Thereby, the dehumidification amount of the main dehumidifier 1 is kept in a substantially constant range.

1, 1 ', 1 "... Dehumidifier 10, 10', 10" ... Main dehumidifier 10x, 10x ', 10x "... Auxiliary dehumidifier 10A, 10A', 10A" ... First auxiliary dehumidifier 10B , 10B ', 10B "· · second auxiliary dehumidifier 16 · · dehumidifier cooler

Claims (5)

A gas dehumidifying device for dehumidifying a specific gas circulating in a circulation path,
A main desiccant dehumidifier for dehumidifying the gas flowing through the circulation path;
Desiccant dehumidification in which one desiccant dehumidifier that dehumidifies the regenerated exhaust gas exhausted during heating regeneration from the main desiccant dehumidifier or a plurality of desiccant dehumidifiers that dehumidify the regenerated exhaust gas of the upstream desiccant dehumidifier connected in series. An auxiliary dehumidifying part for dehumidifying the regenerated exhaust gas of the main desiccant dehumidifier, formed by a machine group;
Regenerated exhaust gas exhausted from the one desiccant dehumidifier and sucked again , or moisture in the recovered exhaust gas exhausted from the desiccant dehumidifier on the most downstream side of the desiccant dehumidifier group and sucked again, and condensed. A condensation dehumidifier for dehumidifying the regenerated exhaust gas,
Gas dehumidifier. The auxiliary dehumidifying part is formed by a desiccant dehumidifier group in which a plurality of desiccant dehumidifiers for dehumidifying the regeneration exhaust gas of the upstream desiccant dehumidifier is connected in series.
The Condensed dehumidifier, the desiccant is exhausted out of the dehumidifier unit from the most downstream side of the desiccant dehumidifier is sucked again into the downstream-side of the desiccant dehumidifier, during regeneration exhaust gas of the downstream-side of the desiccant dehumidifier Dehumidifying the regenerated exhaust gas by condensing the moisture of
The gas dehumidifying device according to claim 1. The auxiliary dehumidifying part is formed by a desiccant dehumidifier group in which a plurality of desiccant dehumidifiers for dehumidifying the regeneration exhaust gas of the upstream desiccant dehumidifier is connected in series.
The main desiccant dehumidifier is dehumidified by sucking a gas circulating through the circulation path and dehumidified gas most upstream side of the desiccant dehumidifier of the desiccant dehumidifier group,
The gas dehumidifying device according to claim 1 or 2. Each desiccant dehumidifier forming the main desiccant dehumidifier and the auxiliary dehumidifying unit dehumidifies with a rotary dehumidification rotor carrying a moisture absorbent,
The gas dehumidifier according to any one of claims 1 to 3. Each desiccant dehumidifier for forming an auxiliary dehumidifying unit, the rated throughput of the same equivalent amount and regeneration exhaust gas of one upstream of the desiccant dehumidifier,
The gas dehumidifying device according to any one of claims 1 to 4.

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