JP5588163B2 - Solvent recovery device - Google Patents

Description

The present invention relates to a solvent recovery apparatus for separating and recovering a contained solvent vapor from an exhaust gas containing a solvent vapor such as an NMP solvent (N-methyl-2-pyrrolidone solvent) used for battery production.

More specifically, the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where the solvent vapor is generated is cooled by the cooling means to condense the solvent vapor contained in the exhaust gas. The present invention relates to a solvent recovery device for separating and recovering from exhaust gas.

  In Patent Document 1, the NMP solvent vapor contained in the exhaust gas discharged from the drying process for removing the NMP solvent (N-2-pyrrolidone solvent) from the treated material in the manufacturing plant of the lithium ion battery is separated and recovered. Shows an absorption type solvent recovery method in which NMP solvent vapor is separated from exhaust gas by spraying water into the exhaust gas and dissolving (absorbing) NMP solvent vapor in the exhaust gas in the spray water. (Particularly, see paragraph 0002 of Patent Document 1 and FIG. 2).

  Further, Patent Document 1 condenses the NMP solvent vapor in the exhaust gas by cooling the exhaust gas and separates and collects it from the exhaust gas, and remains in the exhaust gas after the NMP solvent is condensed and separated by cooling. Concentrating the NMP solvent vapor by the adsorption rotor type concentrator, and cooling again the concentrated gas sent from the adsorption rotor type concentrator (that is, the gas in which the residual NMP solvent vapor is transferred from the exhaust gas in a concentrated state). In addition, a cooling type solvent recovery method in which residual NMP solvent vapor is condensed and separated and recovered from the concentrated gas is also shown (particularly, refer to paragraphs 0003 to 0004 of FIG. 1 and FIG. 1).

JP 2005-246218 A

  However, in the absorption-type solvent recovery method (so-called wet solvent recovery method) in which solvent vapor is dissolved in the spray water and separated from the exhaust gas, the recovered liquid (in order to recover the solvent vapor in the spray water) That is, the ratio of the water in the recovered water in which the solvent vapor is dissolved is large, and there is a problem that the purification cost required for purifying the solvent from the recovered liquid increases.

  On the other hand, in the cooling type solvent recovery method (so-called dry type solvent recovery method) in which the solvent vapor is cooled and condensed and separated from the exhaust gas, the solvent vapor is recovered without using water. Although the ratio of water in the recovered liquid can be reduced compared to the recovery method, even with this cooling-type solvent recovery method, moisture brought into the processing chamber due to indoor use conditions etc. is contained in the exhaust gas. In the condensation separation of the solvent vapor by the water, the moisture in the exhaust gas is also condensed together with the solvent vapor. For this reason, the recovered liquid (that is, the condensed solvent and the condensed water) is reduced although it is smaller than the absorption type (wet type) solvent recovery method. The ratio of water in the recovered liquid containing the liquid is still quite large, and there is a similar problem that the purification cost required for purifying the solvent from the recovered liquid is increased.

In view of this situation, the main problem of the present invention is to provide a solvent recovery apparatus that can effectively solve the above problems by adopting a cooling type solvent recovery method by a rational improvement.

The first characteristic configuration of the present invention relates to a solvent recovery apparatus ,
By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
The purified exhaust gas that has passed through the concentration adsorption zone of the adsorption rotor type concentrator, the mixed gas of the purified exhaust gas and external fresh gas, or the external fresh gas is treated as described above. The ventilation gas supplied to the room,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the dehumidified ventilation gas heated by the ventilation gas heating means is ventilated to the desorption area for concentration in the adsorption rotor type concentrator while being heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. The dehumidification regeneration gas is divided into the dehumidification regeneration gas and the one that passes through the desorption region for dehumidification in the adsorption rotor type dehumidification device in a state heated by the regeneration gas heating means for dehumidification .

That is, in this first characteristic configuration, the purified exhaust gas that has passed through the adsorption zone of the adsorption rotor type concentrator, or the mixed gas of the purified exhaust gas and fresh fresh gas from the outside, or from the outside By supplying a low-humidity ventilating gas whose dew point temperature (in other words, absolute humidity) is reduced by dehumidification by a dehumidifying means (adsorption rotor type dehumidifying device) to the processing chamber. Compared to supplying ventilation gas that has not been dehumidified by such dehumidification to the processing chamber, the dew point temperature of the indoor air in the processing chamber resists the introduction of moisture into the processing chamber due to indoor use conditions, etc. The dew point temperature of the exhaust gas discharged from the processing chamber is kept low.

And by reducing the dew point temperature of the exhaust gas and reducing the amount of moisture contained in the exhaust gas in this way, the amount of moisture that condenses with the solvent vapor in the cooling by the cooling means in the condensation separation process (ie, condensation) Reduce the amount of water).

Therefore, according to this first characteristic configuration, the ratio of water in the recovered liquid recovered by the condensation separation by cooling can be effectively reduced regardless of the amount of moisture brought into the processing chamber due to indoor use conditions. As a result, the purification cost required for solvent purification from the recovered liquid can be effectively reduced as compared with the prior art.

By the way, in conventional cooling (dry) solvent recovery, if a fresh gas with humidity such as outside air is used as the ventilation gas supplied to the processing chamber, a large amount of moisture is brought into the processing chamber due to the water content of the fresh gas. As a result, the ratio of water in the recovered liquid greatly increases, so in practice, fresh gas with humidity such as outside air cannot be used as the ventilation gas to be supplied to the processing chamber. The exhaust gas that has been treated after separation and recovery (that is, the exhaust gas that has become low humidity due to moisture condensation accompanying the condensation and separation of the solvent vapor) was circulated as a ventilation gas to be supplied to the processing chamber. Such circulation of exhaust gas may not be desirable in terms of ventilation of the processing chamber, maintaining cleanliness, processing performance and processing quality of processing performed in the processing chamber.

Further, in the conventional absorption (wet) solvent recovery described above, water is sprayed on the exhaust gas to separate and recover the solvent vapor, so that the treated exhaust gas after separating the solvent becomes extremely humid. For this reason, there has been a problem that, on the contrary, the treated exhaust gas cannot be used as a ventilation gas for supplying the treatment chamber.

On the other hand, according to the first characteristic configuration described above, the solvent vapor is condensed and separated by cooling the exhaust gas, but it is recovered regardless of whether moisture is brought into the processing chamber as described above. Since the ratio of water in the liquid can be effectively reduced, it becomes possible to use fresh, humid air such as outside air as the ventilation gas supplied to the processing chamber. Needless to say, the ventilation supplied to the processing chamber. It is also possible to use a treated exhaust gas obtained by condensing and separating the solvent vapor by cooling as a gas, and in this respect, in terms of compatibility with various implementation conditions compared to conventional absorption type and cooling type solvent recovery, It can be made more advantageous in terms of versatility.

Further, in the first characteristic configuration, as the concentration recovery means for separating the solvent vapor remaining in the exhaust gas after being condensed and separated by cooling by the cooling means from the exhaust gas in a concentrated state, the concentration for adsorbing the residual solvent vapor is used. Concentration adsorption rotor that holds the adsorbent for adsorption, and the exhaust gas ventilation area after the solvent vapor is condensed and separated by the cooling means by rotation of the adsorption rotor, and the ventilation area for the concentration regeneration gas An adsorption rotor type concentrator that is alternately positioned in the desorption zone for concentration is provided, and for the concentration that has passed through the desorption zone for concentration in this adsorption rotor type concentrator and has become a concentrated state containing high concentration desorption solvent vapor Since the regeneration gas is sent to the cooling means together with the exhaust gas from the processing chamber, the following effects can also be obtained.

In other words, according to this configuration, even a small amount of solvent vapor still remaining in the exhaust gas after separation of the solvent vapor by cooling is exhausted by the adsorption by the concentration adsorbent in the concentration adsorption region in the adsorption rotor type concentrator. Therefore, the recovery rate of the solvent vapor from the exhaust gas can be further increased, and the purification degree of the exhaust gas after the solvent recovery can be further increased. it can.

Further, in this configuration, the concentrated regeneration gas that has passed through the concentration desorption zone in the adsorption rotor type concentrating device and has become concentrated including high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber. In addition, the desorbed solvent vapor contained in the concentrated regeneration gas together with the solvent vapor contained in the exhaust gas is condensed and separated by cooling with a cooling means, so that the solvent vapor contained in the exhaust gas and the concentrated vapor regeneration are recovered. The apparatus can be simplified and the apparatus cost can be reduced as compared with the case where the desorption solvent vapor contained in the gas is separated and recovered separately.

Further, in the first characteristic configuration, as a dehumidifying means for dehumidifying the ventilation gas, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is replaced with a dehumidifying adsorption area that is a ventilation area of the ventilation gas by rotation of the adsorption rotor. Since the adsorption rotor type dehumidifier is provided alternately in the dehumidifying / desorbing area which is the ventilation area of the dehumidifying regeneration gas, the following effects can also be obtained.

That is, according to this configuration, for example, compared to using a cooling and dehumidifying dehumidifier as the dehumidifying means, it is possible to make the apparatus more advantageous in terms of simplification of the apparatus, apparatus cost, and energy saving.

That is, in the dehumidifying device for cooling and dehumidifying, a cooling system that cools the ventilation gas, a cooling heat source device that cools the cooling medium supplied to the cooling device, and a piping system such as a cooling medium are required. In the type dehumidifier, such a cold heat source device and a piping system can be eliminated, and this can be made more advantageous in terms of simplification of the device, cost of the device, and energy saving. it can.

In addition, when the ventilation gas after dehumidification is heated by the ventilation gas heating means as will be described later, the cooling dehumidification dehumidifier cools the ventilation gas, so that the ventilation gas after dehumidification is required to be supplied to the processing chamber. Although the necessary heating amount in the ventilation gas heating means is greatly increased to heat to the temperature with the ventilation gas heating means, if it is an adsorption rotor type dehumidifier, such an increase in the required heating amount is not caused, Rather, it is possible to reduce the amount of heat required for the ventilation gas heating means by the amount of adsorption heat generated by moisture adsorption by the dehumidifying adsorbent.

In the first characteristic configuration, the ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor dehumidifier is provided, and the ventilation gas after dehumidification heated by the ventilation gas heating means is supplied to the processing chamber. Since the solvent vapor is generated by heating and evaporating the solvent in the processing chamber, the following effects can also be obtained.

That is, according to this configuration, by supplying the heated ventilation gas after dehumidification to the processing chamber as described above, the solvent is heated and evaporated in the processing chamber to generate a solvent vapor. It is possible to provide a solvent recovery apparatus suitable for performing a solvent removal process to be removed in a processing chamber.

Further, according to this configuration, the ventilation gas dehumidified by the adsorption rotor type dehumidifier for the purpose of reducing the water ratio in the recovered liquid is heated by the ventilation gas heating means, so the ventilation gas not dehumidified is ventilated by the ventilation gas heating means. Compared to heating by means of the above, the required heating amount in the ventilation gas heating means can be reduced by the amount of dehumidified moisture by the adsorption rotor type dehumidifier, and this can be advantageous in terms of energy saving. it can.

And in the said 1st characteristic structure, the said adsorption rotor type | mold concentration apparatus in the state heated by the regeneration gas heating means for concentration as a part of ventilation gas after the dehumidification heated by the ventilation gas heating means as the said regeneration gas for concentration And the air that is ventilated to the desorption area for concentration in the adsorption rotor type dehumidifier while being heated by the regeneration gas heating means for dehumidification as the regeneration gas for dehumidification Because of the configuration, the following effects can also be obtained.

In other words, according to this configuration, since a part of the dehumidified ventilation gas heated by the ventilation gas heating means is used as the regeneration gas for concentration and the regeneration gas for dehumidification, the apparatus is simplified and the adsorption rotor type concentrator The adsorption solvent vapor can be desorbed from the concentration adsorbent in the concentration desorption area and the adsorption moisture can be desorbed from the dehumidification adsorbent in the desorption area in the adsorption rotor dehumidifier.

The second characteristic configuration of the present invention relates to a solvent recovery apparatus,
By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
Purified exhaust gas that has passed through the concentration adsorption zone of this adsorption rotor type concentrator, or fresh gas from the outside, as the ventilation gas to be supplied to the processing chamber,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the dehumidified ventilation gas heated by the ventilation gas heating means is ventilated to the desorption area for concentration in the adsorption rotor type concentrator while being heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. And
In the adsorption rotor type dehumidifier, a part of the purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator is heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. It is in the point which has the structure which ventilates to the desorption area for dehumidification.

That is, in this second characteristic configuration, the purified exhaust gas that has passed through the concentration adsorption zone of the adsorption rotor type concentrator or the fresh gas from the outside is used as the ventilation gas. Similarly, by reducing the dehumidification temperature (in other words, absolute humidity) by dehumidification by the dehumidifying means (adsorption rotor type dehumidifier), low humidity ventilation gas is supplied to the processing chamber, thereby reducing the humidity by such dehumidification. Compared to supplying unventilated ventilation gas to the processing chamber, the dew point temperature of the indoor air in the processing chamber is kept low against moisture being brought into the processing chamber due to indoor use conditions. Keep dew point temperature of exhaust gas discharged from

And by reducing the dew point temperature of the exhaust gas and reducing the amount of moisture contained in the exhaust gas in this way, the amount of moisture that condenses with the solvent vapor in the cooling by the cooling means in the condensation separation process (ie, condensation) Reduce the amount of water).

In addition, according to the second characteristic configuration, while the solvent vapor is condensed and separated by cooling the exhaust gas, the water in the recovered liquid can be used regardless of whether moisture is brought into the processing chamber as described above. Since the ratio can be effectively reduced, it becomes possible to use fresh, humid air such as outside air as the ventilation gas supplied to the processing chamber. Needless to say, cooling as the ventilation gas supplied to the processing chamber is also possible. It is also possible to use a treated exhaust gas obtained by condensing and separating the solvent vapor. In this respect, in terms of compatibility with various implementation conditions and versatility compared to conventional absorption and cooling solvent recovery. But it can be even more advantageous.

Further, in the second characteristic configuration, as the concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state, the concentration for absorbing the residual solvent vapor is performed. Concentration adsorption rotor that holds the adsorbent for adsorption, and the exhaust gas ventilation area after the solvent vapor is condensed and separated by the cooling means by rotation of the adsorption rotor, and the ventilation area for the concentration regeneration gas An adsorption rotor type concentrator that is alternately positioned in the desorption zone for concentration is provided, and for the concentration that has passed through the desorption zone for concentration in this adsorption rotor type concentrator and has become a concentrated state containing high concentration desorption solvent vapor Since the regeneration gas is sent to the cooling means together with the exhaust gas from the processing chamber, the following effects can also be obtained.

In other words, according to this configuration, even a small amount of solvent vapor still remaining in the exhaust gas after separation of the solvent vapor by cooling is exhausted by the adsorption by the concentration adsorbent in the concentration adsorption region in the adsorption rotor type concentrator. Therefore, the recovery rate of the solvent vapor from the exhaust gas can be further increased, and the purification degree of the exhaust gas after the solvent recovery can be further increased. it can.

Further, in this configuration, the concentrated regeneration gas that has passed through the concentration desorption zone in the adsorption rotor type concentrating device and has become concentrated including high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber. In addition, the desorbed solvent vapor contained in the concentrated regeneration gas together with the solvent vapor contained in the exhaust gas is condensed and separated by cooling with a cooling means, so that the solvent vapor contained in the exhaust gas and the concentrated vapor regeneration are recovered. Compared to separating and recovering the desorption solvent vapor contained in the gas, the apparatus can be simplified and the apparatus cost can be reduced.

Further, in the second characteristic configuration, as a dehumidifying means for dehumidifying the ventilation gas, each part of the dehumidifying adsorption rotor holding the dehumidifying adsorbent is replaced with a dehumidifying adsorption area which is a ventilation area of the ventilation gas by the rotation of the adsorption rotor. Since the adsorption rotor type dehumidifier is provided alternately in the dehumidifying / desorbing area which is the ventilation area of the dehumidifying regeneration gas, the following effects can also be obtained.

That is, according to this configuration, for example, compared to using a cooling and dehumidifying dehumidifier as the dehumidifying means, it is possible to make the apparatus more advantageous in terms of simplification of the apparatus, apparatus cost, and energy saving.

That is, in the dehumidifying device for cooling and dehumidifying, a cooling system that cools the ventilation gas, a cooling heat source device that cools the cooling medium supplied to the cooling device, and a piping system such as a cooling medium are required. In the type dehumidifier, such a cold heat source device and a piping system can be eliminated, and this can be made more advantageous in terms of simplification of the device, cost of the device, and energy saving. it can.

In addition, when the ventilation gas after dehumidification is heated by the ventilation gas heating means as will be described later, the cooling dehumidification dehumidifier cools the ventilation gas, so that the ventilation gas after dehumidification is required to be supplied to the processing chamber. Although the necessary heating amount in the ventilation gas heating means is greatly increased to heat to the temperature with the ventilation gas heating means, if it is an adsorption rotor type dehumidifier, such an increase in the required heating amount is not caused, Rather, it is possible to reduce the amount of heat required for the ventilation gas heating means by the amount of adsorption heat generated by moisture adsorption by the dehumidifying adsorbent.

In the second characteristic configuration, a ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the ventilation gas after dehumidification heated by the ventilation gas heating means is supplied to the processing chamber. Since the solvent vapor is generated by heating and evaporating the solvent in the processing chamber, the following effects can also be obtained.

That is, according to this configuration, by supplying the heated ventilation gas after dehumidification to the processing chamber as described above, the solvent is heated and evaporated in the processing chamber to generate a solvent vapor. It is possible to provide a solvent recovery apparatus suitable for performing a solvent removal process to be removed in a processing chamber.

Further, according to this configuration, the ventilation gas dehumidified by the adsorption rotor type dehumidifier for the purpose of reducing the water ratio in the recovered liquid is heated by the ventilation gas heating means, so the ventilation gas not dehumidified is ventilated by the ventilation gas heating means. Compared to heating by means of the above, the required heating amount in the ventilation gas heating means can be reduced by the amount of dehumidified moisture by the adsorption rotor type dehumidifier, and this can be advantageous in terms of energy saving. it can.

And in the said 2nd characteristic structure, in the state which heated a part of ventilation gas after the dehumidification heated by the ventilation gas heating means by the regeneration gas heating means for concentration as a regeneration gas for concentration, concentration in an adsorption rotor type | mold concentration apparatus Part of the purified exhaust gas that has passed through the desorption area for use and passed through the adsorption area for concentration in the adsorption rotor type concentrator is heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. Since the air is passed through the dehumidifying / desorbing area of the apparatus, the following effects can also be obtained.

That is, according to this configuration, since a part of the dehumidified ventilation gas heated by the ventilation gas heating means is used as the regeneration gas for concentration, a dedicated large regeneration gas heating means is provided separately from the ventilation gas heating means. Thus, the apparatus configuration can be simplified and the apparatus cost can be reduced as compared with the case where the regeneration gas for concentration is heated and generated by the dedicated regeneration gas heating means.

Further, since the heated ventilation gas by the ventilation gas heating means is a gas dehumidified by the dehumidification means (adsorption rotor type dehumidifier), the adsorption rotor is obtained by using a part of the heated ventilation gas after dehumidification as a regeneration gas for concentration. Desorption of adsorbed solvent vapor from the adsorbent for concentration in the concentration desorption region in the concentration concentrator can be effectively promoted, and the concentration performance of the adsorption rotor type concentrator can be enhanced. Since the rotor type concentrator can be downsized, the apparatus cost can be reduced.

Then, the purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator (that is, the water accompanying the condensation separation of the solvent vapor in the cooling means prior to the separation of the residual solvent vapor in the adsorption rotor type concentrator) A portion of the low-humidity purified exhaust gas whose dew point temperature (absolute humidity) has been reduced by condensation is heated by the regeneration gas heating means for dehumidification and used as the regeneration gas for dehumidification. Can effectively promote the desorption of adsorbed moisture from the dehumidifying adsorbent in the desorption area, and can improve the dehumidifying performance of the adsorption rotor type dehumidifier. Device cost can be reduced.

The third characteristic configuration of the present invention relates to a solvent recovery apparatus,
By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
The purified exhaust gas that has passed through the concentration adsorption zone of the adsorption rotor type concentrator, the mixed gas of the purified exhaust gas and external fresh gas, or the external fresh gas is treated as described above. The ventilation gas supplied to the room,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the purified exhaust gas that has passed through the adsorption zone for concentration in the adsorption rotor type concentrator is heated by the regeneration gas heating means for concentration as the regeneration gas for enrichment, and then in the adsorption rotor type concentrator. It is configured to divide into one that ventilates the desorption area for concentration and one that ventilates the desorption area for desorption in the adsorption rotor type dehumidifier while being heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. It is in a certain point.

That is, in the third characteristic configuration, the purified exhaust gas that has passed through the adsorption zone for concentration of the adsorption rotor type concentrator, or the mixed gas of the purified exhaust gas and fresh fresh gas from the outside, or from the outside As a ventilation gas, the fresh gas of the low-humidity, in which the dew point temperature (in other words, absolute humidity) is reduced by dehumidification by the dehumidifying means (adsorption rotor type dehumidifier) is the same as the first and second characteristic configurations. By supplying ventilation gas to the processing chamber, the dew point temperature of the indoor air in the processing chamber is caused by indoor use conditions compared to supplying ventilation gas that has not been dehumidified by such dehumidification to the processing chamber. The dew point temperature of the exhaust gas exhausted from the processing chamber is kept low by keeping it low against moisture brought into the processing chamber.

And by reducing the dew point temperature of the exhaust gas and reducing the amount of moisture contained in the exhaust gas in this way, the amount of moisture that condenses with the solvent vapor in the cooling by the cooling means in the condensation separation process (ie, condensation) Reduce the amount of water).

In addition, according to the third characteristic configuration, while the solvent vapor is condensed and separated by cooling the exhaust gas, the water in the recovered liquid can be used regardless of the moisture brought into the processing chamber as described above. Since the ratio can be effectively reduced, it becomes possible to use fresh, humid air such as outside air as the ventilation gas supplied to the processing chamber. Needless to say, cooling as the ventilation gas supplied to the processing chamber is also possible. It is also possible to use a treated exhaust gas obtained by condensing and separating the solvent vapor. In this respect, in terms of compatibility with various implementation conditions and versatility compared to conventional absorption and cooling solvent recovery. But it can be even more advantageous.

Further, in the third characteristic configuration, as the concentration recovery means for separating the solvent vapor remaining in the exhaust gas after the solvent vapor is condensed and separated by cooling by the cooling means from the exhaust gas in a concentrated state, the concentration for adsorbing the residual solvent vapor is used. Concentration adsorption rotor that holds the adsorbent for adsorption, and the exhaust gas ventilation area after the solvent vapor is condensed and separated by the cooling means by rotation of the adsorption rotor, and the ventilation area for the concentration regeneration gas An adsorption rotor type concentrator that is alternately positioned in the desorption zone for concentration is provided, and for the concentration that has passed through the desorption zone for concentration in this adsorption rotor type concentrator and has become a concentrated state containing high concentration desorption solvent vapor Since the regeneration gas is sent to the cooling means together with the exhaust gas from the processing chamber, the following effects can also be obtained.

In other words, according to this configuration, even a small amount of solvent vapor still remaining in the exhaust gas after separation of the solvent vapor by cooling is exhausted by the adsorption by the concentration adsorbent in the concentration adsorption region in the adsorption rotor type concentrator. Therefore, the recovery rate of the solvent vapor from the exhaust gas can be further increased, and the purification degree of the exhaust gas after the solvent recovery can be further increased. it can.

Further, in this configuration, the concentrated regeneration gas that has passed through the concentration desorption zone in the adsorption rotor type concentrating device and has become concentrated including high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber. In addition, the desorbed solvent vapor contained in the concentrated regeneration gas together with the solvent vapor contained in the exhaust gas is condensed and separated by cooling with a cooling means, so that the solvent vapor contained in the exhaust gas and the concentrated vapor regeneration are recovered. The apparatus can be simplified and the apparatus cost can be reduced as compared with the case where the desorption solvent vapor contained in the gas is separated and recovered separately.

Further, in the third characteristic configuration, as a dehumidifying means for dehumidifying the ventilation gas, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is replaced with a dehumidifying adsorption area that is a ventilation area of the ventilation gas by the rotation of the adsorption rotor. Since the adsorption rotor type dehumidifier is provided alternately in the dehumidifying / desorbing area which is the ventilation area of the dehumidifying regeneration gas, the following effects can also be obtained.

That is, according to this configuration, for example, compared to using a cooling and dehumidifying dehumidifier as the dehumidifying means, it is possible to make the apparatus more advantageous in terms of simplification of the apparatus, apparatus cost, and energy saving.

That is, in the dehumidifying device for cooling and dehumidifying, a cooling system that cools the ventilation gas, a cooling heat source device that cools the cooling medium supplied to the cooling device, and a piping system such as a cooling medium are required. In the type dehumidifier, such a cold heat source device and a piping system can be eliminated, and this can be made more advantageous in terms of simplification of the device, cost of the device, and energy saving. it can.

In addition, when the ventilation gas after dehumidification is heated by the ventilation gas heating means as will be described later, the cooling dehumidification dehumidifier cools the ventilation gas, so that the ventilation gas after dehumidification is required to be supplied to the processing chamber. Although the necessary heating amount in the ventilation gas heating means is greatly increased to heat to the temperature with the ventilation gas heating means, if it is an adsorption rotor type dehumidifier, such an increase in the required heating amount is not caused, Rather, it is possible to reduce the amount of heat required for the ventilation gas heating means by the amount of adsorption heat generated by moisture adsorption by the dehumidifying adsorbent.

In the third characteristic configuration, a ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor dehumidifier is provided, and the ventilation gas after dehumidification heated by the ventilation gas heating means is supplied to the processing chamber. Since the solvent vapor is generated by heating and evaporating the solvent in the processing chamber, the following effects can also be obtained.

That is, according to this configuration, by supplying the heated ventilation gas after dehumidification to the processing chamber as described above, the solvent is heated and evaporated in the processing chamber to generate a solvent vapor. It is possible to provide a solvent recovery apparatus suitable for performing a solvent removal process to be removed in a processing chamber.

Further, according to this configuration, the ventilation gas dehumidified by the adsorption rotor type dehumidifier for the purpose of reducing the water ratio in the recovered liquid is heated by the ventilation gas heating means, so the ventilation gas not dehumidified is ventilated by the ventilation gas heating means. Compared to heating by means of the above, the required heating amount in the ventilation gas heating means can be reduced by the amount of dehumidified moisture by the adsorption rotor type dehumidifier, and this can be advantageous in terms of energy saving. it can.

In the third characteristic configuration, a part of the purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator is heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. In the adsorption rotor type deconcentrator, and in the desorption region for dehumidification in the adsorption rotor type dehumidifier in a state heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. Since the configuration is such that the air is diverted to the one to be ventilated, the following effects can be obtained.

That is, according to this configuration, the purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator (that is, the solvent vapor in the cooling means prior to the separation of the residual solvent vapor in the adsorption rotor type concentrator). Adsorption is performed by heating a part of the low-humidity purified exhaust gas, which has been dew point (absolute humidity) decreased due to water condensation accompanying condensation and separation, and heating it with the regeneration gas heating means for concentration. The desorption of the adsorbing solvent vapor from the adsorbent for concentration in the desorption area for concentration in the rotor type concentrator can be effectively promoted, and the concentration performance of the adsorption rotor type concentrator can be enhanced. The adsorption rotor type concentrator can be miniaturized to reduce the apparatus cost.

In addition, purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator (that is, low humidity purified that has reduced the dew point temperature (absolute humidity) due to moisture condensation accompanying condensation of solvent vapor in the cooling means) Part of the exhaust gas) is heated by the regeneration gas heating means for dehumidification and used as the regeneration gas for dehumidification. Therefore, desorption of adsorbed moisture from the dehumidifying adsorbent in the desorption area for dehumidification in the adsorption rotor type dehumidifier It can be effectively promoted, and the dehumidifying performance of the adsorption rotor type dehumidifier can be enhanced, and accordingly, the adsorption rotor type dehumidifier can be miniaturized and the apparatus cost can be reduced.

The fourth feature configuration of the present invention specifies an embodiment suitable for the implementation of the third feature configuration.
A part of the purified exhaust gas that has passed through the adsorption zone for concentration in the adsorption rotor type concentrator is heated by a combined regeneration gas heating means and then heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. The dehumidifying desorption in the adsorption rotor type dehumidifier while being ventilated in the desorption area for concentration in the adsorption rotor type concentrator in a state of being heated and heated by a regeneration gas heating means for dehumidification as the dehumidifying regeneration gas It is configured to divert to what is ventilated in the area,
The cooling means includes precooling means for precooling the exhaust gas discharged from the processing chamber by heat exchange with a precooling heat medium, and the exhaust gas precooled by the precooling means at a lower temperature than the precooling heat medium. A main cooling means for performing main cooling by heat exchange with a cooling heat medium,
The precooling heating medium heated by heat exchange with the exhaust gas in the precooling means is configured to be supplied to the combined regeneration gas heating means as a heating medium for heating the regeneration gas.

That is, in the fourth characteristic configuration, the regenerated gas heating means also uses the retained heat of the pre-cooling heat medium heated by the pre-cooling of the exhaust gas in the pre-cooling means (that is, the recovered heat from the exhaust gas), Since a part of the purified exhaust gas to be used as the regeneration gas for concentration and the regeneration gas for dehumidification is heated, the purified exhaust gas that has been purified to be the regeneration gas for concentration and the regeneration gas for dehumidification using steam generated by a burner, electric heater, or boiler is used. Compared to heating a part of the exhaust gas, the energy consumption of the apparatus can be effectively reduced, which can be further advantageous in terms of energy saving.

In addition, the apparatus can be simplified by using a combined regeneration gas heating means.

The fifth feature configuration of the present invention specifies an embodiment suitable for the implementation of the fourth feature configuration.
The pre-cooling heating medium heated by the heat exchange with the exhaust gas in the pre-cooling means is supplied to the regenerating gas heating means as a regeneration gas heating medium, and a heating medium for ventilation gas heating It is in the point which is set as the structure supplied to the said ventilation gas heating means.

In the fifth characteristic configuration, the regeneration gas and the ventilation gas are heated using the retained heat of the pre-cooling heat medium that has been heated by the pre-cooling of the exhaust gas (that is, the recovered heat from the exhaust gas).

The sixth characteristic configuration of the present invention specifies an embodiment suitable for the implementation of any of the first to third characteristic configurations,
Dehumidification control means for adjusting the amount of dehumidification from the ventilation gas by the adsorption rotor type dehumidifier based on the detected dew point temperature of the exhaust gas discharged from the processing chamber is provided.

In the sixth characteristic configuration, by setting a dew point temperature at which the amount of moisture condensed together with the solvent vapor by the cooling by the cooling unit falls within an allowable range as the set dew point temperature, the above-described feedback method by the dehumidifying control unit is used. By adjusting the dehumidification amount like this, the dew point temperature of the exhaust gas (which may be indoor gas) can be adjusted to the set dew point temperature, and the amount of moisture condensed with the solvent vapor can be automatically adjusted within the allowable range. As a result, a reduction in the water ratio in the recovered liquid can be achieved reliably and stably.

In particular, in this configuration, the dehumidification amount is adjusted based on the detected dew point temperature of the exhaust gas, so even if the amount of moisture brought into the processing chamber due to a different cause from the introduction of moisture into the processing chamber by the ventilation gas is large. The water ratio reduction function can be kept high.

In the implementation of this configuration, when the treated exhaust gas is used as the ventilation gas, the exhaust gas for adjusting the dew point temperature to the set dew point temperature is not limited to the exhaust gas before cooling by the cooling means, but is dehumidified as the ventilation gas. The exhaust gas at the stage of dehumidification by means (adsorption rotor type dehumidifier) may be used.

The seventh feature configuration of the present invention specifies an embodiment suitable for the implementation of the first or third feature configuration.
The purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator is dehumidified as the ventilation gas in the dehumidification adsorption zone of the adsorption rotor type dehumidifier, followed by the ventilation gas heating means A circulating ventilation state that is heated at
A fresh ventilation state in which fresh gas from the outside is dehumidified as the ventilation gas in the adsorption area for dehumidification of the adsorption rotor type dehumidifier, and subsequently heated by the ventilation gas heating means and supplied to the processing chamber,
In the adsorption rotor type deconcentrator, the mixed gas of the purified exhaust gas that has passed through the concentration adsorption zone and the fresh gas from the outside is used as the ventilation gas in the dehumidification adsorption zone of the adsorption rotor type dehumidifier. Dehumidifying, followed by the mixed ventilation state that is heated by the ventilation gas heating means and supplied to the processing chamber ,
A switching means for selectively switching at least two ventilation states is provided.

In other words, in the seventh feature configuration, at least two ventilation states of the circulation ventilation state, the fresh ventilation state, and the mixed ventilation state as described above are selectively performed as necessary by switching by the switching means. Therefore, the solvent recovery apparatus is more excellent in terms of compatibility with changes in use conditions and versatility.

When the mixed ventilation state can be selectively performed, it is desirable that the mixing ratio of the purified exhaust gas and the fresh gas can be adjusted in the mixed ventilation state.

The block diagram of the solvent collection | recovery apparatus which shows 1st Embodiment The block diagram of the solvent collection | recovery apparatus which shows 2nd Embodiment The block diagram of the solvent collection | recovery apparatus which shows 3rd Embodiment The block diagram of the solvent collection | recovery apparatus which shows 4th Embodiment The block diagram of the solvent collection | recovery apparatus which shows 5th Embodiment The block diagram of the solvent collection | recovery apparatus which shows 6th Embodiment The block diagram of the solvent collection | recovery apparatus which shows 7th Embodiment The block diagram of the solvent collection | recovery apparatus which shows 8th Embodiment

  FIG. 1 shows a first embodiment of a solvent recovery apparatus equipped in a lithium ion battery production facility, wherein 1 is a treatment chamber (for example, a drying furnace) for treating a treatment containing NMP solvent (N-methyl-2-pyrrolidone solvent). Etc.).

  High-temperature ventilation air SA (an example of ventilation gas) is supplied to the processing chamber 1 through an air supply path 3 by an air supply fan 2, and the processing chamber 1 is heated by the supply of the ventilation air SA and heating by indoor heating means. The room temperature is maintained at a high temperature, and the NMP solvent held by the indoor treatment is heated and evaporated.

  For this reason, the high temperature (for example, about 130 ° C.) exhaust air EA exhausted from the processing chamber 1 to the exhaust passage 4 with the supply of the ventilation air SA has a high concentration (for example, 1500 ppm) of NMP solvent vapor Ls generated in the chamber. ).

  The solvent recovery apparatus of this example separates and recovers the vapor Ls of the NMP solvent contained in the exhaust air EA from the exhaust air EA. As the main apparatus, the cooling recovery apparatus 5 and the adsorption rotor type are provided in the exhaust path 4. The concentrating device 6 is equipped in that order.

  The cooling recovery device 5 includes a precooler 7 (an example of precooling means) and a primary cooler 8 (main cooling means) as cooling means for the exhaust air EA in order from the upstream side in the ventilation path of the exhaust air EA inside the apparatus casing 5a. 1), a recooler 9 (an example of the main cooling means), a secondary cooler 10 (an example of the main cooling means), and a reheater 11 at the most downstream portion of the ventilation path. is there.

  That is, in the cooling recovery device 5, the hot exhaust air EA from the processing chamber 1 guided through the exhaust passage 4 is cooled stepwise by the precooler 7, the primary cooler 8, the recooler 9, and the secondary cooler 10. Thus, the solvent vapor Ls contained in the exhaust air EA is condensed, and the solvent vapor Ls is separated and recovered from the exhaust air EA by this cooling condensation.

  The low-temperature exhaust air EA after the solvent vapor Ls is condensed and separated in this way is reheated (heated) by the reheater 11 and then sent to the subsequent adsorption rotor type concentrator 6.

  Reference numeral 12 denotes a recovery drain pan that receives the condensate L (ie, liquid solvent) of the solvent vapor Ls condensed by cooling in each of the coolers 7 to 10 and guides it to the recovery path 12a. Reference numeral 13 denotes the condensate L guided by the recovery path 12a. It is a collection container which stores.

  A pre-cooling heat medium Na is supplied to the pre-cooler 7, and the exhaust air EA is pre-cooled in the pre-cooler 7 by heat exchange with the pre-cooling heat medium Na.

The primary cooler 8 is supplied with cooling water CW to be circulated between the cooling tower as a primary cooling heat medium, and the precooled exhaust air EA is supplied to the primary cooler 8 by heat exchange with the cooling water CW. Cool primary.

  Further, the secondary cooler 10 is supplied with cold water C cooled by a refrigerator as a secondary cooling heat medium, and the exhaust air EA after primary cooling in the secondary cooler 10 is further exchanged by heat exchange with the cold water C. Secondary cooling.

  The recooler 9 and the reheater 11 constitute a run-around heat exchanger that circulates the reheating heat medium Nb through the circulation path 14b by the circulation pump 14a between them. The reheating heat medium Nb heated by heat exchange with the exhaust air EA in the recooler 9 (cooled for the exhaust air EA) is heat exchanged with the exhaust air EA after the secondary cooling in the reheater 11. Thus, the exhaust air EA after the solvent vapor separation is reheated. That is, the recooler 9 also serves as a heat recovery device for reheating.

  On the other hand, the adsorption rotor type concentrator 6 (an example of a concentration means) is a concentration adsorption rotor in which breathable adsorbent layers X holding a concentration adsorbent that adsorbs the solvent vapor Ls are arranged side by side in the rotor rotation direction. 15 is housed in the apparatus casing 6a, and the inside of the apparatus casing 6a absorbs the exhaust air EA guided from the outlet of the cooling recovery apparatus 5 through the relay path portion 4a of the exhaust path 4 with the exhaust fan 16 interposed therebetween. The concentration adsorption zone 17a that passes through the adsorbent layer X of 15 and the high-temperature concentration regeneration air Ha that is guided through the regeneration air supply path 18 for concentration pass through the adsorbent layer X of the adsorption rotor 15 It is partitioned into a desorption region 17b.

  That is, a part of the rotor rotation direction in the rotation region of the adsorption rotor 15 is the concentration adsorption region 17a that is the ventilation region of the exhaust air EA, and the other part of the rotation direction in the rotation region of the adsorption rotor 15 is the regeneration for concentration. The adsorption rotor 15 is disposed across the concentration adsorption region 17a and the concentration desorption region 17b in a state where the concentration desorption region 17b, which is the ventilation region of the air Ha, is formed, and the adsorption rotor 15 of this arrangement is rotated. Thus, the adsorbent layer X of each part of the adsorption rotor is configured to be alternately positioned in the adsorption region 17a for concentration and the desorption region 17b for concentration.

  As a preferred example of the adsorption rotor 15, a plurality of air-permeable bottomed cylindrical adsorptions provided with a rotating drum that forms the outer shape of the disk-like adsorption rotor 15 and holding the adsorbent layer X for concentration are provided. An adsorbing rotor in which cassettes are arranged in the rotor rotation direction and attached to a rotating drum can be mentioned. The thing of various structures can be employ | adopted for.

  The adsorption rotor type concentrator 6 exhausts the solvent vapor Ls still remaining in the exhaust air EA after being recovered by the cooling recovery device 5 by adsorption by the concentration adsorbent (adsorbent layer X) in the concentration adsorption zone 17a. The exhaust air EA that functions as a post-stage recovery device that separates and recovers from the air EA and separates and recovers the residual solvent vapor Ls in the concentration adsorption zone 17a is purified exhaust air from the adsorption rotor type concentrator 6 as purified exhaust air. 19 to send.

  Further, the adsorbent layer X having adsorbed the residual solvent vapor Ls in the concentration adsorption zone 17a is regenerated by desorbing the adsorption solvent vapor Ls in the concentration desorption zone 17b to the regeneration air Ha for concentration having a smaller air volume than the exhaust air EA. The adsorbent layer X thus regenerated is sent again to the concentration adsorption zone 17a by the rotation of the adsorption rotor 15 and reused for adsorption separation of the residual solvent vapor Ls from the exhaust air EA.

  In the adsorption rotor type concentrating device 6, the used concentration regeneration air Ha that has been concentrated to contain the high concentration solvent vapor Ls by desorption of the solvent vapor Ls in the concentration desorption region 17 b from the processing chamber 1 through the mixing path 20. The exhaust gas EA is sent to the cooling recovery device 5, whereby the solvent vapor Ls contained in the used concentration regeneration air Ha is also condensed and separated by the cooling recovery device 5 and recovered in the recovery container 13.

  An outside air intake passage 21a and a return air passage 21b branched from the purified exhaust passage 19 are connected to the air supply passage 3 for guiding the ventilation air SA supplied to the processing chamber 1, and these outside air intake passage 21a and return air are connected. A switching damper Da for switching the ventilation state (an example of switching means) is provided in each of the downstream side portions of the return air passage 21b in the passage 21b and the purified exhaust passage 19 (that is, the discharge passage to the outside). It is.

  That is, by the switching operation of the switching damper Da, only the purified exhaust air EA (purified exhaust gas) guided from the purified exhaust path 19 through the return air path 21a is used as the ventilation air SA to the processing chamber 1 through the air supply path 3. Circulating return air state to be supplied, fresh ventilation state in which only fresh outside air OA (fresh gas) taken from outside through the outside air intake passage 21a is supplied to the processing chamber 1 through the air supply passage 3 as ventilation air SA, and these purified exhaust gases It is possible to selectively switch between a mixed ventilation state in which mixed air (mixed gas) of air EA and fresh outside air OA is supplied to the processing chamber 1 through the air supply passage 3 as ventilation air SA.

  In the mixed ventilation state, the mixing ratio between the purified exhaust gas EA and the fresh outside air OA can be adjusted by operating the switching damper Da.

  Reference numeral 22 denotes a ventilation air heating device (an example of a ventilation gas heating means) that heats the ventilation air SA supplied to the processing chamber 1 to a required temperature, and the ventilation path of the ventilation air SA in the device casing 22a of the ventilation air heating device 22. Includes a filter 23, a heater 24, and an auxiliary heater 25 in that order from the upstream side.

  In other words, by supplying the processing chamber 1 with the ventilation air SA heated by the ventilation air heating device 22 (that is, the heated purified exhaust air EA, the heated fresh outside air OA, or the heated mixed air). In step 1, the NMP solvent held by the indoor treatment is evaporated by heating.

  The heater 24 of the ventilation air heating device 22 and the precooler 7 of the cooling recovery device 5 constitute a run-around heat exchange device that circulates the precooling heat medium Na through the circulation path 26b by the circulation pump 26a between them. As a result, the precooling heating medium Na heated by the heat exchange with the exhaust air EA in the precooler 7 (precooled for the exhaust air EA) and heated up is converted into the ventilation air SA in the heater 24. The ventilation air SA is heated by heat exchange. That is, the precooler 7 also serves as a heat recovery device for heating the ventilation air.

  The auxiliary heater 25 of the ventilation air heater 22 uses a steam coil that heats the ventilation air SA by exchanging heat with high-temperature steam, a hot air generator that heats the ventilation air SA by supplying high-temperature hot air to the ventilation air SA, and the like. Yes, the temperature of the ventilation air SA supplied to the processing chamber 1 is increased by the auxiliary heater 25 as necessary. In some cases, the auxiliary heater 25 may be omitted.

  Further, in the solvent recovery apparatus of this example, the ventilation air SA (that is, the purified exhaust air EA, the fresh outside air OA, or a mixed air thereof) supplied to the processing chamber 1 is dehumidified prior to the heating by the ventilation air heating device 22. An adsorption rotor type dehumidifier 27 (an example of dehumidifying means) is provided in the air supply path 3.

  The adsorption rotor type dehumidifying device 27 is similar to the adsorption rotor type concentrating device 6 and includes a dehumidifying adsorption rotor 28 in which air-permeable adsorbent layers Y holding a dehumidifying adsorbent are arranged in the rotor rotating direction. The inside of the device casing 27a is a high temperature guided through a dehumidifying adsorption area 29a for passing the ventilation air SA through the adsorbent layer Y of the adsorption rotor 28 and a dehumidifying regeneration air supply path 30. A dehumidifying regeneration air Hb is partitioned into a dehumidifying desorption region 29b that allows the adsorbent layer Y of the adsorption rotor 28 to pass through.

  That is, a part of the rotor rotation direction in the rotation area of the adsorption rotor 28 is a dehumidification adsorption area 29a that is a ventilation area of the ventilation air SA, and the other part in the rotor rotation direction in the rotation area of the adsorption rotor 28 is a regeneration for dehumidification. With the dehumidifying / desorbing area 29b, which is the ventilation area of the air Hb, the adsorption rotor 28 is disposed across the dehumidifying adsorption area 29a and the dehumidifying / desorbing area 29b, and the adsorption rotor 28 in this arrangement is rotated. Thus, the adsorbent layer Y of each part of the adsorption rotor is alternately positioned in the dehumidifying adsorption area 29a and the dehumidifying desorption area 29b.

  This adsorption rotor type dehumidifier 27 separates and removes moisture contained in the ventilation air SA from the ventilation air SA by adsorption by the dehumidifying adsorbent (adsorbent layer Y) in the dehumidifying adsorption zone 29a, and dehumidifies by this moisture separation. The ventilated air SA is sent to the ventilating air heating device 22.

  Further, the adsorbent layer Y that has adsorbed moisture in the dehumidifying adsorption zone 29a is regenerated by desorbing the adsorbed moisture to the dehumidifying regeneration air Hb in the dehumidifying desorption zone 29b, and the dehumidifying adsorbent layer Y thus regenerated is adsorbed. By rotating the rotor 28, it is sent again to the dehumidifying adsorption zone 29a and reused for moisture adsorption separation from the ventilation air SA (ie, dehumidification of the ventilation air SA).

  That is, by supplying low-humidity ventilation air SA whose dew point temperature (absolute humidity) has been reduced by dehumidification by the adsorption rotor type dehumidifier 27 to the processing chamber 1, ventilation air that has not been dehumidified by such dehumidification. Compared to supplying SA to the processing chamber 1, the dew point temperature of the indoor air in the processing chamber 1 is kept low against moisture brought into the processing chamber 1 due to indoor use conditions and the like. The dew point temperature (absolute humidity) of the exhaust air EA discharged from 1 is kept low.

  And exhaust gas which condenses with solvent vapor | steam Ls by cooling of the exhaust air EA in the cooling recovery apparatus 5 by reducing the dew point temperature of exhaust air EA and reducing the moisture content contained in exhaust air EA in this way. The amount of condensed water (that is, the amount of condensed water) in the air EA is reduced, thereby facilitating subsequent solvent purification from the recovered liquid L and reducing the purification cost.

  In the air supply path 3, the dehumidified ventilation air SA heated by the ventilation air heating device 22 (that is, the purified exhaust air EA after dehumidification heating, the fresh outside air OA after dehumidification heating, or the mixed air after dehumidification heating) A branching passage 31 for branching a part is connected, the regeneration air supply passage 18 for concentration for supplying the regeneration air Ha for concentration to the desorption region 17b for concentration of the adsorption rotor type concentrator 6, and the adsorption rotor type dehumidification The dehumidification regeneration air supply path 30 that supplies the dehumidification regeneration air Hb to the dehumidification desorption region 29 b of the device 27 is branched from the branch path 31.

  Further, the regeneration air supply path 18 for concentration is equipped with a regeneration air heater 33 (an example of the regeneration gas heating means for concentration) together with the regeneration air fan 32, and the regeneration air supply path 30 for dehumidification is provided in the regeneration air supply path 30. In addition to the regeneration air fan 34, a regeneration air heater 35 for dehumidification (an example of a regeneration gas heating means for dehumidification) is provided.

  That is, in the concentration adsorption area 17b of the adsorption rotor type concentrator 6, a part of the dehumidified heated ventilation air SA heated by the ventilation air heater 22 is concentrated as the regeneration air Ha for concentration. 33 is further heated and supplied as necessary. Similarly, a part of the ventilation air SA after the dehumidification heating heated by the ventilation air heating unit 22 is dehumidified in the dehumidification desorption region 29b of the adsorption rotor type dehumidifier 27. The regenerative air heater 35 is further heated and supplied as necessary.

In addition, by using a part of the ventilation air SA after the dehumidification heating heated by the ventilation air heating device 22 as described above as the regeneration air Ha for concentration and the regeneration air Hb for dehumidification, the apparatus is simplified and the adsorption rotor is used. Desorption of the adsorbed solvent vapor Ls from the concentration adsorbent (adsorbent layer X) in the concentration desorption region 17b of the concentration concentrator 6 and adsorption for dehumidification in the desorption desorption region 29b of the adsorption rotor dehumidifier 27 The adsorption of adsorbed moisture from the adsorbent (adsorbent layer Y) is promoted.

  From the discharge path 36 for discharging the used dehumidifying regeneration air Hb that has passed through the dehumidifying / desorbing area 29b of the adsorption rotor type dehumidifying device 27, a part of the used dehumidifying regenerating air Hb is regenerated for dehumidification. A return passage 37 that returns to the air supply passage 30 is branched, and an air volume adjustment damper Db is provided in each of the return passage 37 and the downstream portion of the return passage 37 in the discharge passage 36. It is.

  That is, the air volume of the used dehumidification regeneration air Hb returned to the dehumidification regeneration air supply path 30 through the return path 37 by adjusting the air volume adjustment damper Db (in other words, the circulation air volume of the dehumidification regeneration air Hb). Adjust according to the usage conditions.

  Reference numeral 38 denotes a sensor for detecting the dew point temperature tp of the ventilation air SA (that is, dehumidified ventilation air SA) on the outlet side of the adsorption rotor type dehumidifier 27, and 39 denotes a dehumidifying regenerative air heater 35 based on the detection information of the sensor 38. The amount of dehumidification from the ventilation air SA (that is, the purified exhaust air EA, the fresh outside air OA, or a mixed air thereof) in the adsorption rotor type dehumidifying device 27 is adjusted by adjusting the heating amount of the dehumidifying regeneration air Hb at It is a dehumidification controller to adjust (an example of dehumidification control means).

  Specifically, the dehumidifying controller 39 adjusts the amount of dehumidification from the ventilation air SA in the adsorption rotor type dehumidifying device 27 by adjusting the heating amount of the dehumidifying regeneration air heater 35 based on the dew point temperature tp detected by the sensor 38. By adjusting, the dew point temperature tp of the dehumidified ventilation air SA sent to the ventilation air heating device 22 is adjusted to the set dew point temperature tps.

  As the set dew point temperature tps of the ventilation air SA, the amount of water condensed together with the solvent vapor Ls in the condensation separation of the solvent vapor Ls by cooling in the cooling recovery device 5 is stably maintained below the required allowable upper limit amount. The dew point temperature to be obtained is set based on the result of trial operation of the device and the result of simulation of device operation.

  The concentration value (ppm) and temperature value (° C.) of each part added in the figure show an example of the solvent vapor concentration and air temperature in each part of the solvent recovery apparatus of this example.

[Another embodiment]
Next, another embodiment will be listed.

  In the first embodiment described above, an example in which a part of the ventilation air SA after the dehumidification heating heated by the ventilation air heating device 22 is used as the dehumidification regeneration air Hb of the adsorption rotor type dehumidification device 27 is shown. Instead, apparatus configurations shown in FIGS. 2 to 4 may be employed as the second to fourth embodiments.

  That is, in the solvent recovery apparatus of the second embodiment shown in FIG. 2, in the adsorption rotor type dehumidifier 27, the dehumidification desorption area 29b and the dehumidification adsorption area 29a are located on the lower side in the rotation direction of the adsorption rotor of the dehumidification desorption area 29b. A purge zone 29c is provided between them.

Then, the purified exhaust path 19 that guides the purified exhaust air EA is branched into three paths: a bypass path 19a, a dehumidification path 19b, and a regeneration path 19c, and the bypass path 19 is connected to the processing chamber via the bypass fan 40. The dehumidification path 19b is connected to the air supply path 3 through the dehumidifying fan 41 and the desorption adsorption area 29a of the adsorption rotor type dehumidifier 27 in that order, and the regeneration path 19c is The regeneration fan 42 and the regeneration air heater 35 for dehumidification are connected to the dehumidifying / desorbing area 29b of the adsorption rotor type dehumidifying device 27 through the order.

  Further, a purge path 19d is branched from a portion between the dehumidifying fan 41 and the dehumidifying adsorption area 29a in the dehumidifying path 19b. The purge path 19d is a purge area 29c of the air volume adjusting damper D and the adsorption rotor type dehumidifier 27. And is connected to the suction side of the regeneration fan 42 in the regeneration path 19c.

  That is, in the solvent recovery apparatus according to the second embodiment shown in FIG. 2, the ventilation air that supplies the processing chamber 1 with the purified exhaust air EA that is basically separated and removed by the adsorption rotor type concentrator 6. In the configuration used as SA, the purified exhaust air EA guided to the air supply path 3 through the dehumidification path 19b is dehumidified by the adsorption rotor type dehumidifier 27, whereby the ventilation air SA supplied to the processing chamber 1 through the air supply path 3 is obtained. It is designed to be dehumidified (low humidity).

  Further, a part of the purified exhaust air EA is passed through the purge path 19d to the purge area 19c of the adsorption rotor type dehumidifier 27 as purge air Pa for cooling and purifying the dehumidifying adsorbent layer Y after the desorption process. As the dehumidifying regeneration air Hb, a mixed air of a part of the purified exhaust air EA guided by the regeneration path 19c and the purified exhaust air EA as the used purge air Pa passing through the purge area 29c is used for dehumidification. Heating is performed by the regenerative air heater 35 and the dehumidification desorption area 29b of the adsorption rotor type dehumidifier 27 is ventilated.

  Note that the passing air volume of each of the detour path 19a, the dehumidifying path 19b, the regeneration path 19c, and the purge path 19 can be appropriately adjusted according to the use conditions and the like by adjusting the output of the fans 40 to 42 and adjusting the air volume adjusting damper D. it can.

  Further, in the solvent recovery device of the second embodiment shown in FIG. 2, the dew point tp of the ventilation air SA on the inlet side of the adsorption rotor type dehumidifier 27 (that is, the dew point of the purified exhaust air EA used as the ventilation air SA). The temperature tp) is detected by the sensor 38, and the dehumidification controller 39 adjusts the heating amount of the dehumidification regenerative air heater 35 based on the dew point temperature tp detected by the sensor 38 and performs ventilation in the adsorption rotor type dehumidifier 27. By adjusting the amount of dehumidification from the air SA, the dew point temperature tp of the ventilation air SA on the inlet side of the adsorption rotor type dehumidifier 27 is adjusted to the set dew point temperature tps.

  Other points in the solvent recovery apparatus of the second embodiment are the same as those of the solvent recovery apparatus of the first embodiment shown in FIG.

  On the other hand, in the solvent recovery apparatus of the third embodiment shown in FIG. 3, in the configuration in which the outside air OA is used as the ventilation air SA that supplies the processing chamber 1, the purified solvent having the residual solvent vapor Ls separated and removed by the adsorption rotor type concentrator 6. The exhaust air EA (or the mixed air of the purified exhaust air EA and the introduced outside air OA from the outside air introduction passage 19e) is heated by the regeneration air heater 35 for dehumidification, and then is used as the dehumidification regeneration air Hb. The dehumidifying / desorbing area 29b of the dehumidifying device 27 is ventilated.

  D in the figure is an air volume adjustment damper that adjusts the mixing ratio of the purified exhaust air EA and the outside air OA.

  Other points in the solvent recovery apparatus of the third embodiment are the same as those of the solvent recovery apparatus of the first embodiment shown in FIG.

Further, in the solvent recovery apparatus of the fourth embodiment shown in FIG. 4, the purified exhaust path 19 for guiding the purified exhaust air EA is branched into two paths, a regeneration path 19c and a purge path 19d, and the regeneration path 19c is The regeneration fan 42 and the regeneration air heater 35 for dehumidification are connected in that order to the desorption / desorption area 29b of the adsorption rotor type dehumidifier 27, and the purge path 19d is connected via the purge area 29c of the adsorption rotor type dehumidifier 27. The outside air introduction path 19e is connected to the suction side of the regeneration fan 42 in the regeneration path 19c.

  That is, in the solvent recovery apparatus of the fourth embodiment shown in FIG. 4, the purified exhaust air EA is used for dehumidification of the adsorption rotor type dehumidifier 27 in the configuration in which the outside air OA is used as the ventilation air SA that supplies the processing chamber 1. The regeneration air Hb and the purge air Pa are used.

  In the figure, D is an air volume adjusting damper that adjusts the passing air volume of each of the regeneration path 19c, the purge path 19d, and the outside air introduction path 19e.

  Other points in the solvent recovery apparatus of the fourth embodiment are the same as those of the solvent recovery apparatus of the first embodiment shown in FIG.

  5 to 8 show the solvent recovery devices of the fifth to eighth embodiments. In these solvent recovery devices of the fifth to eighth embodiments, a part of the purified exhaust air EA is used as the dehumidifying regeneration air Hb. A dehumidifying regenerative air heater for heating the dehumidifying regenerating air Hb (purified exhaust air EA) in a configuration in which air is passed through the dehumidifying regenerating air supply passage 30 to the dehumidifying / desorbing area 29b of the adsorption rotor type dehumidifying device 27. The preheater 43 (an example of the preheating means) and the postheater 35 (postheating means) for further heating the dehumidifying regeneration air Hb heated (preheated) by the preheater 43 are used for dehumidification in that order. The regenerative air supply passage 30 is interposed.

  Then, by circulating the pre-cooling heat medium Na between the pre-cooler 5 in the cooling recovery device 5 and the heater 24 in the ventilation air heater 22 and the pre-heater 43 through the circulation path 26b by the circulation pump 26a, The pre-cooling heat medium Na, which has been heated by pre-cooling the exhaust air EA in the pre-cooler 7, is used as the heat medium for heating the ventilation air and the heat medium for heating the regenerative air. It is configured to supply to the container 43.

  That is, the dehumidification regeneration air Hb and the ventilation air SA are heated using the retained heat of the pre-cooling heat medium Na (that is, the recovered heat from the exhaust gas EA) raised in temperature by the pre-cooling of the exhaust gas EA. .

  As a specific circulation path of the heating medium for preheating temperature rise Na, the first branch path 44a and the second branch path are provided in the circulation path 26b for leading the heating temperature precooling heating medium Na sent from the precooler 7. The second branch path 44b of the branch paths 44a and 44b is connected to the first branch path 44a via the pre-heater 43, and the connection point (confluence) of the second branch path 44b The first branch path 44 a as a circulation main path is connected to the heater 24 of the ventilation air heater 22 on the downstream side of the location), and further, the first branch path 44 a is connected to the circulation path on the downstream side of the heater 24. It is connected to the precooler 7 as a return part of 26b.

  That is, a part of the pre-cooling heat medium Nb that has been heated by pre-cooling the exhaust air EA is supplied to the pre-heater 43 through the second branch 44b as a heat medium for heating the regenerative air, The remainder of Na and the heating medium Na for heating and cooling after being used for heating (preheating) of the dehumidification regeneration air Hb by the pre-heater 43 are merged, and the combined precooling heating medium Na is used for heating the ventilation air It is made to supply to the heater 24 of the ventilation air heating apparatus 22 as a heat medium.

45 is a flow rate adjusting valve for adjusting the flow rate of the heating medium Na for temperature rising precooling to the first branch path 4a, and 46a is heat for temperature rising precooling that bypasses the preheater 43 through the bypass path 46 in the second branch path 44b. This is a merged three-way valve that adjusts the flow rate (bypass flow rate) of the medium Na. By adjusting the bypass flow rate by adjusting this merged three-way valve 46a, the supply flow rate to the pre-heater 43 of the heating medium Na for temperature rise precooling can be adjusted. It adjusts according to the heating load of the pre-heater 43, etc.

  Further, in the solvent recovery devices of the fifth to eighth embodiments shown in FIGS. 5 to 8, the regeneration air supply passage for concentration for supplying the regeneration air Ha for concentration to the concentration desorption region 17 b of the adsorption rotor type concentration device 6. 18 is branched from the downstream portion of the preheater 43 in the regeneration air supply passage 30 for dehumidification.

That is, a part of the purified exhaust air EA as the dehumidification regeneration air Hb is heated by the regeneration air heater for dehumidification and supplied to the desorption / desorption area 29b of the adsorption rotor type dehumidifier 27, and the regeneration for concentration A part of the purified exhaust air EA that is also purified as the air Ha is heated by the regeneration air heater for concentration and supplied to the concentration desorption region 17b of the adsorption rotor type concentrator 6, so that regeneration for dehumidification is performed. The pre-heater 43 is made to function as a combined regenerative air heater (also used as a regenerative gas heating means) that doubles as an air heater and a concentration regenerative air heater, thereby simplifying the apparatus. It is.

  Other points in the solvent recovery device of the fifth embodiment shown in FIG. 5 are the same as those of the solvent recovery device of the first embodiment shown in FIG. 1, and other points in the solvent recovery device of the sixth embodiment shown in FIG. Is the same as the solvent recovery apparatus of the second embodiment shown in FIG.

  Further, other points in the solvent recovery apparatus of the seventh embodiment shown in FIG. 7 are the same as those of the solvent recovery apparatus of the third embodiment shown in FIG. 3, and other points in the solvent recovery apparatus of the eighth embodiment shown in FIG. This point is the same as the solvent recovery apparatus of the fourth embodiment shown in FIG.

  In the implementation of the present invention, the ventilation gas SA supplied to the processing chamber 1 is not limited to air, and may be any gas.

  Further, the processing chamber 1 may perform any processing as long as the exhaust gas EA discharged from the processing chamber 1 contains the solvent vapor Ls.

  The solvent vapor Ls to be recovered may be any solvent as long as it can be condensed and separated from the exhaust gas EA by cooling.

  In the above-described embodiment, the dehumidification control means 39 (dehumidification controller) controls the ventilation gas by the dehumidification means 27 based on the detected dew point temperature tp of the ventilation gas SA at the outlet side or the inlet side of the dehumidification means 27 (adsorption rotor type dehumidifier). The dehumidification amount from SA is adjusted, and the dew point temperature of the ventilation gas SA supplied to the processing chamber 1 or the dew point temperature of the exhaust gas EA from the processing chamber 1 is adjusted to the set dew point temperature tps. The amount of dehumidification from the ventilation gas SA by the dehumidifying means 27 is adjusted based on the detected dew point temperature tp of the exhaust gas EA (which may be room gas) exhausted from the processing chamber 1, and the exhaust gas EA exhausted from the processing chamber 1 The dew point temperature tp may be adjusted to the set dew point temperature tps.

  Alternatively, the dew point of the ventilation gas SA supplied to the processing chamber 1 by adjusting the amount of dehumidification from the ventilation gas SA by the dehumidification means 27 based on the detected dew point temperature tp of the ventilation gas SA at the outlet side or the inlet side of the dehumidification means 27. In the configuration in which the temperature tp is adjusted to the set dew point temperature tps, a configuration in which the set dew point temperature tps of the ventilation air SA is changed in accordance with the detected dew point temperature of the indoor gas (or the exhaust gas EA) in the processing chamber 1 may be adopted. .

In order to adjust the dehumidification amount from the ventilation gas SA by the dehumidifying means 27 (adsorption rotor type dehumidifier), the dehumidification amount is adjusted by adjusting the heating amount in the dehumidifying regenerative air heater 35 in the above-described embodiment. showed adjustment method, it is possible to employ various methods in accordance with the dehumidifying amount of the adjustment system also dehumidification system.

In each embodiment described above, separated from the exhaust gas EA as a concentrate of the solvent vapor Ls remaining solvent vapor Ls by the cooling by the cooling means 7 to 10 in the exhaust gas EA after condensed and separated by adsorption rotor type concentration unit 5 I am doing so.

Further, the adsorption rotor type concentrator 6 is additionally provided in the subsequent stage of the cooling means 7-10 .

  The solvent recovery method and the solvent recovery apparatus according to the present invention can be used for separation and recovery of various solvent vapors contained in exhaust gas in various fields.

Ls Solvent vapor 1 Processing chamber SA Ventilation gas EA Exhaust gas 7-10 Cooling means 7 Precooling means 8-10 Main cooling means 27 Dehumidification means, adsorption rotor type dehumidifier tp Dew point temperature tps Set dew point temperature 39 Dehumidification control means 22 Ventilation gas heating Means 28 Dehumidification adsorption rotor 29a Dehumidification adsorption zone Hb Dehumidification regeneration gas 29b Dehumidification desorption zone 35, 43 Regeneration gas heating means OA Fresh gas Da Switching means 6 Concentration recovery means, Adsorption rotor type concentrator 15 Concentration Adsorption rotor 17a Concentration adsorption zone Ha Concentration regeneration gas 17b Concentration desorption region 33, 43 Concentration regeneration gas heating means 43 Concurrent regeneration gas heating means

Claims (7)

By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
The purified exhaust gas that has passed through the concentration adsorption zone of the adsorption rotor type concentrator, the mixed gas of the purified exhaust gas and external fresh gas, or the external fresh gas is treated as described above. The ventilation gas supplied to the room,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the dehumidified ventilation gas heated by the ventilation gas heating means is ventilated to the desorption area for concentration in the adsorption rotor type concentrator while being heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. And a solvent recovery apparatus configured to divide the dehumidification regeneration gas into a dehumidification regeneration gas heating means in a state of being heated by the regeneration gas heating means for dehumidification. By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
Purified exhaust gas that has passed through the concentration adsorption zone of this adsorption rotor type concentrator, or fresh gas from the outside, as the ventilation gas to be supplied to the processing chamber,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the dehumidified ventilation gas heated by the ventilation gas heating means is ventilated to the desorption area for concentration in the adsorption rotor type concentrator while being heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. And
In the adsorption rotor type dehumidifier, a part of the purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator is heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. A solvent recovery apparatus configured to ventilate the dehumidifying desorption region. By cooling the exhaust gas discharged from the processing chamber as it is supplied to the processing chamber where solvent vapor is generated by the cooling means, the solvent vapor contained in the exhaust gas is condensed and exhausted in the exhaust gas. A solvent recovery device for separating and recovering from
As a concentration recovery means for separating the solvent vapor remaining in the exhaust gas after condensation and separation of the solvent vapor by cooling by the cooling means from the exhaust gas in a concentrated state,
Concentration adsorption area, which is a ventilation area of exhaust gas after each part of the concentration adsorption rotor holding the concentration adsorbent for adsorbing residual solvent vapor is condensed and separated by the cooling means by the rotation of the adsorption rotor. And an adsorption rotor type concentrator that is positioned alternately in the desorption area for concentration, which is the ventilation area of the regeneration gas for concentration,
Concentrated regeneration gas that has passed through the concentration desorption region in this adsorption rotor type concentrating device and has become a concentrated state containing high concentration desorption solvent vapor is sent to the cooling means together with the exhaust gas from the processing chamber,
The purified exhaust gas that has passed through the concentration adsorption zone of the adsorption rotor type concentrator, the mixed gas of the purified exhaust gas and external fresh gas, or the external fresh gas is treated as described above. The ventilation gas supplied to the room,
By dehumidifying the ventilation gas and supplying the treatment gas with the dew point temperature lowered by the dehumidification to the processing chamber, the amount of moisture condensed in the exhaust gas that condenses with the solvent vapor during cooling by the cooling means is reduced. Providing dehumidifying means to
As the dehumidifying means, each part of the dehumidifying adsorption rotor that holds the dehumidifying adsorbent is divided into a dehumidifying adsorption area that is a ventilation gas ventilation area and a dehumidifying desorption area that is a ventilation gas ventilation area by rotating the adsorption rotor. And an adsorption rotor type dehumidifier that is alternately positioned
Ventilation gas heating means for heating the ventilation gas dehumidified by the adsorption rotor type dehumidifier is provided, and the dehumidified gas heated by the ventilation gas heating means is supplied to the processing chamber, so that the solvent in the processing chamber The solvent is vaporized by heating and evaporating,
A part of the purified exhaust gas that has passed through the adsorption zone for concentration in the adsorption rotor type concentrator is heated by the regeneration gas heating means for concentration as the regeneration gas for enrichment, and then in the adsorption rotor type concentrator. It is configured to divide into one that ventilates the desorption area for concentration and one that ventilates the desorption area for desorption in the adsorption rotor type dehumidifier while being heated by the regeneration gas heating means for dehumidification as the dehumidification regeneration gas. Solvent recovery device. A part of the purified exhaust gas that has passed through the adsorption zone for concentration in the adsorption rotor type concentrator is heated by a combined regeneration gas heating means and then heated by the regeneration gas heating means for concentration as the regeneration gas for concentration. The dehumidifying desorption in the adsorption rotor type dehumidifier while being ventilated in the desorption area for concentration in the adsorption rotor type concentrator in a state of being heated and heated by a regeneration gas heating means for dehumidification as the dehumidifying regeneration gas It is configured to divert to what is ventilated in the area,
The cooling means includes precooling means for precooling the exhaust gas discharged from the processing chamber by heat exchange with a precooling heat medium, and the exhaust gas precooled by the precooling means at a lower temperature than the precooling heat medium. A main cooling means for performing main cooling by heat exchange with a cooling heat medium,
4. The configuration according to claim 3, wherein the pre-cooling heat medium heated by heat exchange with the exhaust gas in the pre-cooling means is supplied to the combined regeneration gas heating means as a heat medium for regenerating gas heating. Solvent recovery device. The pre-cooling heating medium heated by the heat exchange with the exhaust gas in the pre-cooling means is supplied to the regenerating gas heating means as a regeneration gas heating medium, and a heating medium for ventilation gas heating The solvent recovery apparatus according to claim 4, wherein the solvent recovery apparatus is configured to supply to the ventilation gas heating means. The dehumidification control means which adjusts the dehumidification amount from the said ventilation gas by the said adsorption rotor type dehumidifier based on the detection dew point temperature of the said exhaust gas discharged | emitted from the said process chamber is provided. Item 4. Solvent recovery device. The purified exhaust gas that has passed through the concentration adsorption zone in the adsorption rotor type concentrator is dehumidified as the ventilation gas in the dehumidification adsorption zone of the adsorption rotor type dehumidifier, followed by the ventilation gas heating means A circulating ventilation state that is heated at
A fresh ventilation state in which fresh gas from the outside is dehumidified as the ventilation gas in the adsorption area for dehumidification of the adsorption rotor type dehumidifier, and subsequently heated by the ventilation gas heating means and supplied to the processing chamber,
In the adsorption rotor type deconcentrator, the mixed gas of the purified exhaust gas that has passed through the concentration adsorption zone and the fresh gas from the outside is used as the ventilation gas in the dehumidification adsorption zone of the adsorption rotor type dehumidifier. Dehumidifying, followed by the mixed ventilation state that is heated by the ventilation gas heating means and supplied to the processing chamber,
4. The solvent recovery apparatus according to claim 1, further comprising switching means for selectively switching at least two ventilation states.

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