JP2013197488A5 - - Google Patents

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Publication number
JP2013197488A5
JP2013197488A5 JP2012065616A JP2012065616A JP2013197488A5 JP 2013197488 A5 JP2013197488 A5 JP 2013197488A5 JP 2012065616 A JP2012065616 A JP 2012065616A JP 2012065616 A JP2012065616 A JP 2012065616A JP 2013197488 A5 JP2013197488 A5 JP 2013197488A5
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JP
Japan
Prior art keywords
storage
substrate
storage device
container
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012065616A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013197488A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012065616A priority Critical patent/JP2013197488A/ja
Priority claimed from JP2012065616A external-priority patent/JP2013197488A/ja
Publication of JP2013197488A publication Critical patent/JP2013197488A/ja
Publication of JP2013197488A5 publication Critical patent/JP2013197488A5/ja
Pending legal-status Critical Current

Links

JP2012065616A 2012-03-22 2012-03-22 収納器群 Pending JP2013197488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Publications (2)

Publication Number Publication Date
JP2013197488A JP2013197488A (ja) 2013-09-30
JP2013197488A5 true JP2013197488A5 (https=) 2014-07-31

Family

ID=49396029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012065616A Pending JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Country Status (1)

Country Link
JP (1) JP2013197488A (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167629A (en) * 1981-04-08 1982-10-15 Nec Corp Carrier for semiconductor wafer
JPH1159777A (ja) * 1997-08-22 1999-03-02 Sony Corp 収容器
JPH11354625A (ja) * 1998-06-10 1999-12-24 Nikon Corp 基板カセット
JP2005340264A (ja) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk 基板収納容器用補助具及び基板収納容器

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