JP2013197488A5 - - Google Patents

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Publication number
JP2013197488A5
JP2013197488A5 JP2012065616A JP2012065616A JP2013197488A5 JP 2013197488 A5 JP2013197488 A5 JP 2013197488A5 JP 2012065616 A JP2012065616 A JP 2012065616A JP 2012065616 A JP2012065616 A JP 2012065616A JP 2013197488 A5 JP2013197488 A5 JP 2013197488A5
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JP
Japan
Prior art keywords
storage
substrate
storage device
container
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012065616A
Other languages
English (en)
Japanese (ja)
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JP2013197488A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012065616A priority Critical patent/JP2013197488A/ja
Priority claimed from JP2012065616A external-priority patent/JP2013197488A/ja
Publication of JP2013197488A publication Critical patent/JP2013197488A/ja
Publication of JP2013197488A5 publication Critical patent/JP2013197488A5/ja
Pending legal-status Critical Current

Links

JP2012065616A 2012-03-22 2012-03-22 収納器群 Pending JP2013197488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012065616A JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Publications (2)

Publication Number Publication Date
JP2013197488A JP2013197488A (ja) 2013-09-30
JP2013197488A5 true JP2013197488A5 (cg-RX-API-DMAC7.html) 2014-07-31

Family

ID=49396029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012065616A Pending JP2013197488A (ja) 2012-03-22 2012-03-22 収納器群

Country Status (1)

Country Link
JP (1) JP2013197488A (cg-RX-API-DMAC7.html)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167629A (en) * 1981-04-08 1982-10-15 Nec Corp Carrier for semiconductor wafer
JPH1159777A (ja) * 1997-08-22 1999-03-02 Sony Corp 収容器
JPH11354625A (ja) * 1998-06-10 1999-12-24 Nikon Corp 基板カセット
JP2005340264A (ja) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk 基板収納容器用補助具及び基板収納容器

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